JP3867320B2 - Piezoelectric ceramic composition - Google Patents

Piezoelectric ceramic composition Download PDF

Info

Publication number
JP3867320B2
JP3867320B2 JP16159296A JP16159296A JP3867320B2 JP 3867320 B2 JP3867320 B2 JP 3867320B2 JP 16159296 A JP16159296 A JP 16159296A JP 16159296 A JP16159296 A JP 16159296A JP 3867320 B2 JP3867320 B2 JP 3867320B2
Authority
JP
Japan
Prior art keywords
piezoelectric ceramic
piezoelectric
ceramic composition
mol
piezoelectric constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16159296A
Other languages
Japanese (ja)
Other versions
JPH107461A (en
Inventor
晃司 小木曽
政浩 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP16159296A priority Critical patent/JP3867320B2/en
Publication of JPH107461A publication Critical patent/JPH107461A/en
Application granted granted Critical
Publication of JP3867320B2 publication Critical patent/JP3867320B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【0001】
【発明の属する技術分野】
本発明は圧電体磁器組成物、特に圧電/電歪特性を利用したアクチュエータ用材料として有用な圧電体磁器組成物に関する。
【0002】
【従来の技術】
従来より、圧電体磁器組成物としては、PbTiO3 −PbZrO3 系に、PbM1-x x 3 (但し、MはNb又はWであり、NはZn、Mg、Co、Mn又はNiである。)で表わされる第3成分を添加したり、Pbの一部をBa、Sr、Caなどで置換したものなどが用いられている。
【0003】
又、特開昭49−122512号公報及び特開昭62−17065号公報には、PbTiO3 −PbZrO3 −Pb(Mg1/3 Nb2/3 )O3 −Pb(Ni1/3 Nb2/3 )O3 系において、各主成分の割合を限定した特定組成について開示されている。
【0004】
【発明が解決しようとする課題】
ところで、圧電アクチュエータ用材料として使用する圧電体磁器組成物は、誘電率、径方向電気機械結合係数及び圧電定数に優れたものが好ましく、なかでも圧電定数が大きいことが特に必要とされている。
【0005】
しかしながら、上述のような従来の圧電体磁器組成物では、十分大きな圧電定数が得られないという問題点を有していた。
【0006】
例えば、上述の特開昭49−122512号公報及び特開昭62−17065号公報に開示の、PbTiO3 −PbZrO3 −Pb(Mg1/3 Nb2/3 )O3−Pb(Ni1/3 Nb2/3 )O3 系における特定組成においても、市場の要求に比べて、得られる圧電体磁器の圧電定数は未だ不十分なものであった。
【0007】
そこで、本発明の目的は、圧電アクチュエータ用材料として特に有用な、圧電定数の大きな圧電体磁器組成物を提供することにある。
【0008】
【課題を解決するための手段】
上記目的を達成するため、本発明の圧電体磁器組成物は、一般式、aPbTiO3 −bPbZrO3 −cPb(Mg1/3 Nb2/3 )O3 −dPb(Ni1/3 Nb2/3 )O3 で表わされる磁器組成物において、34≦a≦40、17≦b≦23、15≦c≦28、15≦d≦28(但し、a、b、c及びdはモル%、a+b+c+d=100)であることを特徴とする。
【0009】
ここで、上記した組成範囲に限定したのは次のような理由による。
即ち、PbTiO3 量aが34モル%未満の場合には、キュリ−温度が低下するとともに圧電定数が小さくなり好ましくない。一方、PbTiO3 量aが40モル%を超えると、圧電定数が小さくなり好ましくない。
【0010】
又、PbZrO3 量bが17モル%未満の場合には、圧電定数が小さくなり好ましくない。一方、PbZrO3 量bが23モル%を超えると、キュリ−温度が低下するとともに圧電定数が小さくなり好ましくない。
【0011】
又、Pb(Mg1/3 Nb2/3 )O3 量cが15モル%未満又は28モル%を超えると、共に圧電定数が小さくなり好ましくない。
【0012】
さらに、Pb(Ni1/3 Nb2/3 )O3 量dが15モル%未満の場合には、圧電定数が小さくなり好ましくない。一方、Pb(Ni1/3 Nb2/3 )O3 量dが28モル%を超えると、キュリ−温度が低下するとともに圧電定数が小さくなり好ましくない。
【0013】
【発明の実施の形態】
以下、本発明の圧電体磁器組成物の実施の形態を、実施例に基づいて説明する。
【0014】
まず、出発原料として、PbO、ZrO2 、TiO2 、Nb2 5 、NiO、Mg(OH)2 の粉末を用意した。その後、これら粉末を、表1に示す組成の磁器が得られるように秤量し、水を加えてボールミルで湿式混合した後、900℃で2時間仮焼した。
【0015】
【表1】

Figure 0003867320
【0016】
その後、得られた仮焼物をボールミルで湿式粉砕した後、バインダを添加して造粒した。この造粒粉を1.5ton/cm2 の圧力で34mm×24mm×1.1mm(厚さ)に成形した後、1240℃で2時間焼成して角板状磁器を得た。その後、角板状磁器の両面を厚さ0.6mmにラッピングし、その両面に銀電極を焼き付けした後、接着剤で2枚貼り合わせた。次いで、これを30mm×3mm×1.2mm(厚さ)に切断して素子を得た。その後、得られた素子に、80℃のシリコンオイル中で3kV/mmの電界を印加して分極処理を行なった。
【0017】
次に、以上のようにして得られた素子について、誘電率(ε33)、電気機械結合係数(Kp)、圧電定数(d31)を求めた。なお、誘電率(ε33)は、静電容量を測定して計算により求めた。電気機械結合係数(Kp)は、インピーダンス測定器により共振、反共振周波数を測定して計算により求めた。圧電定数(d31)は、2kV/mmの大電界を印加してユニモルフ駆動させたときの変位量を測定して計算により求めた。
【0018】
以上の結果を表2に示す。なお表2において*印を付したものは本発明の範囲外のものであり、その他はすべて本発明の範囲内のものである。
【0019】
【表2】
Figure 0003867320
【0020】
表2に示す通り、本発明の範囲内のものは、試料番号13、14、15に示す本発明の範囲外のものと比較して、特に圧電定数(d31)が大きく、優れている。
【0021】
【発明の効果】
以上の説明で明らかなように、本発明によれば、PbTiO3 −PbZrO3−Pb(Mg1/3 Nb2/3 )O3 −Pb(Ni1/3 Nb2/3 )O3 系における各成分の比率を特定範囲に限定したことにより、アクチュエータ用材料として有用な、圧電定数の大きい圧電体磁器組成物が得られる。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a piezoelectric ceramic composition, and more particularly to a piezoelectric ceramic composition useful as an actuator material utilizing piezoelectric / electrostrictive characteristics.
[0002]
[Prior art]
Conventionally, piezoelectric ceramic compositions include PbTiO 3 -PbZrO 3 series, PbM 1-x N x O 3 (where M is Nb or W, and N is Zn, Mg, Co, Mn or Ni). Or the like in which a part of Pb is partially substituted with Ba, Sr, Ca, or the like.
[0003]
Further, JP-A-49-122512 and JP 62-17065, PbTiO 3 -PbZrO 3 -Pb ( Mg 1/3 Nb 2/3) O 3 -Pb (Ni 1/3 Nb 2 / 3 ) In the O 3 system, a specific composition in which the ratio of each main component is limited is disclosed.
[0004]
[Problems to be solved by the invention]
By the way, the piezoelectric ceramic composition used as the material for the piezoelectric actuator is preferably excellent in dielectric constant, radial electromechanical coupling coefficient and piezoelectric constant, and particularly required to have a large piezoelectric constant.
[0005]
However, the conventional piezoelectric ceramic composition as described above has a problem that a sufficiently large piezoelectric constant cannot be obtained.
[0006]
For example, disclosed in JP 49-122512 and JP 62-17065 discloses the above, PbTiO 3 -PbZrO 3 -Pb (Mg 1/3 Nb 2/3) O 3 -Pb (Ni 1 / Even in the specific composition in the 3 Nb 2/3 ) O 3 system, the piezoelectric constant of the obtained piezoelectric ceramic was still insufficient as compared with the market demand.
[0007]
Accordingly, an object of the present invention is to provide a piezoelectric ceramic composition having a large piezoelectric constant that is particularly useful as a material for a piezoelectric actuator.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, the piezoelectric ceramic composition of the present invention has a general formula: aPbTiO 3 —bPbZrO 3 —cPb (Mg 1/3 Nb 2/3 ) O 3 —dPb (Ni 1/3 Nb 2/3 ) In the porcelain composition represented by O 3 , 34 ≦ a ≦ 40, 17 ≦ b ≦ 23, 15 ≦ c ≦ 28, 15 ≦ d ≦ 28 (where a, b, c and d are mol%, a + b + c + d = 100).
[0009]
Here, the reason why the composition range is limited to the above is as follows.
That is, when the PbTiO 3 amount a is less than 34 mol%, the Curie temperature decreases and the piezoelectric constant decreases, which is not preferable. On the other hand, when the amount a of PbTiO 3 exceeds 40 mol%, the piezoelectric constant becomes small, which is not preferable.
[0010]
On the other hand, when the PbZrO 3 content b is less than 17 mol%, the piezoelectric constant becomes small, which is not preferable. On the other hand, when the amount b of PbZrO 3 exceeds 23 mol%, the Curie temperature is lowered and the piezoelectric constant is decreased, which is not preferable.
[0011]
On the other hand, if the amount c of Pb (Mg 1/3 Nb 2/3 ) O 3 is less than 15 mol% or exceeds 28 mol%, the piezoelectric constant is decreased, which is not preferable.
[0012]
Furthermore, when the amount d of Pb (Ni 1/3 Nb 2/3 ) O 3 is less than 15 mol%, the piezoelectric constant becomes small, which is not preferable. On the other hand, if the amount d of Pb (Ni 1/3 Nb 2/3 ) O 3 exceeds 28 mol%, the Curie temperature is lowered and the piezoelectric constant is decreased, which is not preferable.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the piezoelectric ceramic composition of the present invention will be described based on examples.
[0014]
First, powders of PbO, ZrO 2 , TiO 2 , Nb 2 O 5 , NiO, and Mg (OH) 2 were prepared as starting materials. Thereafter, these powders were weighed so that porcelains having the compositions shown in Table 1 were obtained, water was added and wet-mixed with a ball mill, and then calcined at 900 ° C. for 2 hours.
[0015]
[Table 1]
Figure 0003867320
[0016]
Thereafter, the obtained calcined product was wet pulverized with a ball mill, and then added with a binder and granulated. The granulated powder was molded into 34 mm × 24 mm × 1.1 mm (thickness) at a pressure of 1.5 ton / cm 2 and then fired at 1240 ° C. for 2 hours to obtain a square plate-like ceramic. Thereafter, both sides of the square plate-like porcelain were lapped to a thickness of 0.6 mm, and silver electrodes were baked on both sides, and then two sheets were bonded together with an adhesive. Next, this was cut into 30 mm × 3 mm × 1.2 mm (thickness) to obtain an element. Thereafter, the obtained element was subjected to polarization treatment by applying an electric field of 3 kV / mm in silicon oil at 80 ° C.
[0017]
Next, the dielectric constant (ε 33 ), electromechanical coupling coefficient (Kp), and piezoelectric constant (d 31 ) of the element obtained as described above were obtained. The dielectric constant (ε 33 ) was calculated by measuring the capacitance. The electromechanical coupling coefficient (Kp) was calculated by measuring the resonance and antiresonance frequencies with an impedance measuring instrument. The piezoelectric constant (d 31 ) was calculated by measuring the amount of displacement when a large electric field of 2 kV / mm was applied to drive the unimorph.
[0018]
The results are shown in Table 2. In Table 2, those marked with * are outside the scope of the present invention, and all others are within the scope of the present invention.
[0019]
[Table 2]
Figure 0003867320
[0020]
As shown in Table 2, those within the range of the present invention are particularly excellent in the piezoelectric constant (d 31 ) as compared with those outside the range of the present invention shown in Sample Nos. 13, 14, and 15.
[0021]
【The invention's effect】
As apparent from the above description, in accordance with the present invention, PbTiO 3 -PbZrO 3 -Pb (Mg 1/3 Nb 2/3) O 3 -Pb (Ni 1/3 Nb 2/3) O 3 system By limiting the ratio of each component to a specific range, a piezoelectric ceramic composition having a large piezoelectric constant useful as an actuator material can be obtained.

Claims (1)

一般式、aPbTiO3 −bPbZrO3 −cPb(Mg1/3 Nb2/3 )O3 −dPb(Ni1/3 Nb2/3 )O3 で表わされる磁器組成物において、
34≦a≦40
17≦b≦23
15≦c≦28
15≦d≦28
(但し、a、b、c及びdはモル%、a+b+c+d=100)であることを特徴とする、圧電体磁器組成物。
In the formula, aPbTiO 3 -bPbZrO 3 -cPb (Mg 1/3 Nb 2/3) O 3 -dPb (Ni 1/3 Nb 2/3) porcelain composition represented by O 3,
34 ≦ a ≦ 40
17 ≦ b ≦ 23
15 ≦ c ≦ 28
15 ≦ d ≦ 28
(However, a, b, c, and d are mol%, a + b + c + d = 100) The piezoelectric ceramic composition characterized by the above-mentioned.
JP16159296A 1996-06-21 1996-06-21 Piezoelectric ceramic composition Expired - Fee Related JP3867320B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16159296A JP3867320B2 (en) 1996-06-21 1996-06-21 Piezoelectric ceramic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16159296A JP3867320B2 (en) 1996-06-21 1996-06-21 Piezoelectric ceramic composition

Publications (2)

Publication Number Publication Date
JPH107461A JPH107461A (en) 1998-01-13
JP3867320B2 true JP3867320B2 (en) 2007-01-10

Family

ID=15738075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16159296A Expired - Fee Related JP3867320B2 (en) 1996-06-21 1996-06-21 Piezoelectric ceramic composition

Country Status (1)

Country Link
JP (1) JP3867320B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7067965B2 (en) 2002-09-18 2006-06-27 Tdk Corporation Piezoelectric porcelain composition, piezoelectric device, and methods of making thereof
US8470211B2 (en) * 2006-04-13 2013-06-25 Agency For Science, Technology And Research Ferroelectric ceramic material with a low sintering temperature

Also Published As

Publication number Publication date
JPH107461A (en) 1998-01-13

Similar Documents

Publication Publication Date Title
US6426018B1 (en) Piezoelectric ceramic compositions
JP4513948B2 (en) Piezoelectric ceramic and manufacturing method thereof
JP3244027B2 (en) Piezoelectric ceramic composition
JP3341672B2 (en) Method for manufacturing piezoelectric ceramic element
JP3198906B2 (en) Piezoelectric porcelain composition
JPH06191941A (en) Piezoelectric material
JP3385999B2 (en) Piezoelectric ceramic composition, piezoelectric buzzer and piezoelectric actuator using the same
JP3867320B2 (en) Piezoelectric ceramic composition
JP2004168603A (en) Piezoelectric ceramic composition
JP4569062B2 (en) Piezoelectric ceramic
JPH0788252B2 (en) Oxide piezoelectric material
JP4432280B2 (en) Piezoelectric ceramic
JP4001366B2 (en) Piezoelectric ceramic
JP2820000B2 (en) Piezoelectric material composition for actuator
JPH0558729A (en) Piezoelectric ceramic composition
WO1991004586A1 (en) Piezoelectric ceramic composition for actuator
JPH08217541A (en) Piezoelectric ceramic composition
JP3771776B2 (en) Piezoelectric ceramic composition
JPH0687652A (en) Piezoelectric material
JP3117625B2 (en) Electric field induced strain material
JP4009417B2 (en) Piezoelectric and piezoelectric devices
JP3554395B2 (en) Piezoelectric material
JP3214626B2 (en) Piezoelectric ceramic composition
JPH0629140B2 (en) Piezoelectric element material and manufacturing method thereof
JP3554397B2 (en) Piezoelectric material

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050916

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051025

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060919

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20061002

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101020

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101020

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111020

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121020

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees