JP3867062B2 - Inkjet recording head - Google Patents

Inkjet recording head Download PDF

Info

Publication number
JP3867062B2
JP3867062B2 JP2003102601A JP2003102601A JP3867062B2 JP 3867062 B2 JP3867062 B2 JP 3867062B2 JP 2003102601 A JP2003102601 A JP 2003102601A JP 2003102601 A JP2003102601 A JP 2003102601A JP 3867062 B2 JP3867062 B2 JP 3867062B2
Authority
JP
Japan
Prior art keywords
fixed substrate
piezoelectric
piezoelectric vibrator
recording head
ink jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003102601A
Other languages
Japanese (ja)
Other versions
JP2003260800A (en
Inventor
強 北原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2003102601A priority Critical patent/JP3867062B2/en
Publication of JP2003260800A publication Critical patent/JP2003260800A/en
Application granted granted Critical
Publication of JP3867062B2 publication Critical patent/JP3867062B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

【0001】
【発明の属する技術の分野】
本発明は、圧力発生室の一方の面を振動板で封止し、この振動板を縦振動モードの圧電振動子により圧力発生室を膨張、収縮させてノズル開口からインク滴を発生させるインクジェット式記録ヘッドに関する。
【0002】
【従来の技術】
例えば、特許文献1に示されたような縦振動モードの圧電振動子をインクジェット式記録ヘッドの駆動に使用すると、圧電振動子と振動板との当接面積を極めて小さくできるため、1ユニット当たり180DPI以上の解像度を実現できる。
【0003】
縦振動モードの圧電振動子Aは、図8に示したように一方の極となる内部電極Bと、他方の極となる内部電極Cとを圧電材料Dを介してサンドイッチ状に積層し、一方の内部電極Bを先端側に、また他方の内部電極Cを後端側に露出させて、各端面でセグメント電極E、及び共通電極Fに接続した圧電定数d31のものとして構成され、固定基板Gに一定のピッチで配列、固定して構成され、セグメント電極Eと共通電極FとにフレキシブルケーブルHの導電パターンを接続して外部駆動回路からの信号を供給するように構成されている。
【特許文献1】
特開平5-104715号公報
【0004】
【発明が解決しようとする課題】
後端側に形成される共通電極Fは、すべての圧電振動子Aの駆動電流が流れるため、これの抵抗を可及的に小さくする目的で、圧電振動子Aの上面、後端面、及び裏面の3面に導電層F1〜F3を形成し、後端側を一部残すように櫛歯状に歯割りして、導電路を確保するように構成されている。なお、図中符号Jは、圧電振動子Aによりインクの加圧を受けてインク滴を吐出する流路ユニットを示す。
このため、圧電振動子Aの先端面、後端面、及び表裏両面の4面に外部接続用の電極層を必要とし、これらの外部電極層は、インクに対する耐腐蝕性や半田付けの容易さを確保する目的で金が使用されている。このため、高速駆動を可能ならしめるため電極層の抵抗を下げるために電極層を厚く形成しようとすると、電極形成にコストが掛かるという問題がある。
本発明は、このような問題に鑑みてなされたものであって、その目的とするところは外部接続用の電極層を2面として、高価な電極材料の使用料を低減しつつ、3面に形成したのと同等の効果を得ることができるインクジェット式記録ヘッドを提供することである。
【0005】
【課題を解決するための手段】
このような課題を解決するために本発明においては、変位軸方向に延びる2つの極の内部電極を圧電材料を挟んで交互に積層され、一方の極となる前記内部電極が先端面に延び、また他方の極となる前記内部電極が後端面に延びて圧電定数d31を有する複数の圧電振動子を、その後端側を固定基板に固定し、また前記圧電振動子の前記先端面を圧力発生室の一部を構成する弾性板に当接させ、フレキシブルケーブルにより前記圧電振動子のそれぞれに駆動信号を供給して前記圧力発生室の容積を膨張、収縮させてノズル開口からインク滴を吐出させるインクジェット式記録ヘッドにおいて、前記固定基板の少なくとも前記圧電振動子の固定面が導電性を有し、また前記圧電振動子の前記先端面、及び前記固定基板に接着されていない側の面に、隣接する前記圧電振動子と電気的に独立し、かつ前記フレキシブルケーブルに接続されるセグメント電極が形成され、また前記セグメント電極から一定の間隔をおいて前記固定基板に接着されていない側の面から前記圧電振動子の前記後端面に延び、かつ前記固定基板と対向する領域が前記固定基板と接触できる程度に増厚された共通電極が形成され、さらに前記共通電極の増厚された領域が前記固定基板の表面と導電関係を形成して前記固定基板の表面の導電性により前記共通電極が後端面側で連続するように接続されている。
【0006】
【作用】
圧電振動子の共通電極の一端部の増厚領域が導電性の固定基板に並列接続されて電気抵抗を低減するから、圧電振動子に形成する共通電極をほぼ2面だけとし、3面に形成したのと同等の低い抵抗で接続可能ならしめる。
【0007】
【発明の実施の形態】
図1、図2は本発明のインクジェット式記録ヘッドの一実施例を示すものであって、流路ユニット1は、ノズル開口2を一定ピッチで穿設したノズルプレート3と、ノズル開口2に連通する圧力発生室4、これにインク供給口5を介してインクを供給するリザーバ6を備えた流路形成基板7と、圧電振動ユニット8の縦振動モードの各圧電振動子9の先端に当接して圧力発生室4の容積を膨張、縮小させる弾性板10とを一体に積層して構成されている。
【0008】
流路ユニット1は、高分子材料の射出成形等により構成されたホルダー11の開口面12に、また圧電振動ユニット8は外部からの駆動信号を伝達するフレキシブルケーブル13に接続された上で収容室14に収容され、それぞれのホルダ11との当接面を接着剤により固定され、ノズルプレート側にシールド材を兼ねる枠体15を挿入して記録ヘッドに構成されている。
【0009】
縦振動モードの圧電振動子9は、先端側から固定基板16との固定領域の手前まで延びる一方の極となる内部電極21と、先端近傍から後端まで延びる他方の極となる内部電極22とを圧電材料23を介してサンドイッチ状に積層し、一方の内部電極21を先端側で、また他方の内部電極22を後端側で露出させて、圧電定数d31のものとして構成されている。
【0010】
一方の内部電極21は、先端面から圧電振動子9の中央近傍まで導電層を形成してなるセグメント電極24に、また他方の内部電極22は、後端面から圧電振動子9の中央部で、かつセグメント電極24の後端側と一定の間隔25を有するように導電層を形成してなる共通電極26に接続されている。
【0011】
一方、固定基板16は、導電性材料、たとえば不錆鋼や、セラミックスの表面に金属層を形成して構成され、これの表面に圧電振動子9を圧力発生室4の配列ピッチに一致させて固定するとともに、圧電振動子9の共通電極26の後端面26aから固定基板16側に回り込んむように増厚で形成された導電面26bと導電的に接続されている。
【0012】
そして、これら圧電振動子9の列の少なくとも一端側には、図3、図4に示したように圧電振動子9と同様に構成、つまり先端側から固定基板16との固定領域の手前まで延びる一方の極となる内部電極21と、先端近傍から後端まで延びる他方の極となる内部電極22とを圧電材料23を介してサンドイッチ状に積層し、一方の内部電極21を先端側で、また他方の内部電極22を後端側で露出させ、さらに内部電極21は、先端面から圧電振動子9の中央近傍まで導電層を形成してなるセグメント電極24に、また他方の内部電極22は、後端面から圧電振動子9の中央部で、かつセグメント電極24の後端側と一定の間隔25を有するように導電層を形成してなる共通電極26に接続し、圧電振動子9よりも若干幅広に形成されたダミー圧電振動子9’が固定されている。
【0013】
振動子ユニット8の各圧電振動子9のセグメント電極24、共通電極26は、半田層28、29を介してフレキシブルケーブル13の導電パターンに接続されている。
【0014】
フレキシブルケーブル13は、図5に示したように振動子ユニット8の両端のダミーの圧電振動子9’、9’の幅に一致するアース用の導電パターン31、31と、圧電振動子9、9、9‥‥のセグメント電極24に対応する駆動信号供給用の導電パターン32、32、32、‥‥をベース材33に形成して構成されている。
【0015】
この実施例において、フレキシブルケーブル13を介して外部駆動回路から駆動信号を供給すると、インク滴を吐出させるべき圧電振動子9は、フレキシブルケーブル13の導電パターン32、及びセグメント電極24を介して一方の極となる内部電極21に、またアース用導電パターン31、固定基板16、及び共通電極26を介して他方の極となる内部電極22に駆動信号を受け、圧電定数d31による変位によりノズル開口2からインク滴を吐出させる。
【0016】
このように、各圧電振動子9は、その共通電極26が固定基板16の対向面を増厚されて形成された導電面26bにより固定基板16に接触して並列に接続されているため、小さな抵抗でフレキシブルケーブル16のアース用導電パターン31に接続することになる。
【0017】
次に上述の圧電振動子ユニット8の製造方法を図6、7に基づいて説明する。先端から活性領域の終端側まで延びる一方の極となる内部電極となる導電材料41と、後端から先端近傍まで延びる他方の極となる内部電極となる導電材料42を、圧電材料43を挟みながら積層し、乾燥後に焼成して形成された圧電振動板44、44を2枚を用意する(図6(I))。
【0018】
この圧電振動板44、44とを、蒸着時に外部接続用電極形成材が若干回り込める程度の間隔Lを形成するように2枚のスペーサ45、45を挟んで対向させ、また圧電振動板44、44の露出している表面と裏面の、セグメント電極と共通電極との境界領域にマスク材46、46を固定し(図6(II))、全周に外部接続用電極形成材料を蒸着して電極層47、48を形成する。この蒸着の過程で2枚の圧電振動板44、44の間に間隔Lが存在する分だけ、外部接続用電極形成材料が若干回り込んで、圧電振動板44、44の平面44a、44aから若干露出した層47a、48aが形成される(図6(III))。
【0019】
蒸着が終了した段階で、2枚の圧電振動板44、44を分離し、またマスク材46、46を除去すると、先端面、一方の表面、後端面及び対向面側に若干突出した実質的に3面にだけ導電層47、48が形成された2枚の圧電振動板50、50を得ることができる(図6(IV))。
【0020】
他方の内部電極52だけが形成された領域、つまり不活性領域を、金属や、固定面に導電層が形成された固定基板53を位置決めして(図7(I))、圧電振動板50の端面から対向面に露出している層48aが固定基板53に接触するように接着剤により固定する。
【0021】
ついで、ダイシングソウやワイヤソウの切断具55により、自由端側の先端から少なくともセグメント電極となる導電層47と導電材料41の後端側までスリット56、56、56、‥‥を形成し、圧電振動子9としての振動領域と、セグメント電極となる領域を櫛歯状に切分けると、圧電振動子ユニットが完成する。
【0022】
なお、スリット56、56、56、‥‥を形成する際、両端部を若干幅広に切り出して振動関与しない若干幅広なダミーの圧電振動子9‘、9’を形成し、また導電層48を連続した状態で残すと、共通電極の電気抵抗を下げるのに役立つ。
【0023】
【発明の効果】
以上、説明したように本発明によれば、圧電振動子の共通電極を増厚した領域で固定基板に並列接続させて電気抵抗を低減できて、圧電振動子に形成する共通電極を実質的に2面だけとして外部接続用電極の形成面積を小さくしてコストの低減を図りつつ、3面に形成したのと同等の効果を得ることができる。
【図面の簡単な説明】
【図1】 本発明のインクジェット式記録ヘッドの一実施例を示す組み立て斜視図である。
【図2】 同上装置の断面構造を示す図である。
【図3】 同上記録ヘッドのダミーの圧電振動子とフレキシブルケーブルの接続構造を示す断面図である。
【図4】 図(イ)、(ロ)は、それぞれ同上記録ヘッドに用いる圧電振動ユニットの一実施例を示す斜視図である。
【図5】 フレキシブルケーブルの一実施例を示す図である。
【図6】 図(I)乃至(IV)は、それぞれ同上記録ヘッドに用いる振動子ユニットの製造工程の内、電極形成工程を示す図である。
【図7】 図(I)乃至(III)は、それぞれ同上記録ヘッドに用いる振動子ユニットの製造工程の内、分割工程までを示す図である。
【図8】 圧電定数d31の圧電振動子を使用した従来のインクジェット式記録ヘッドの一例を示す断面図である。
【符号の説明】
1 流路ユニット 8 振動子ユニット 9 圧電振動子 9’ ダミーの圧電振動子 13 フレキシブルケーブル 16 固定基板 25 セグメント電極 26 共通電極 26b 共通電極の端面を増圧して形成した導電面
[0001]
[Field of the Invention]
The present invention is an ink jet type in which one surface of a pressure generating chamber is sealed with a diaphragm, and the diaphragm is expanded and contracted by a piezoelectric vibrator in a longitudinal vibration mode to generate ink droplets from a nozzle opening. The present invention relates to a recording head.
[0002]
[Prior art]
For example, when a longitudinal vibration mode piezoelectric vibrator as disclosed in Patent Document 1 is used for driving an ink jet recording head, the contact area between the piezoelectric vibrator and the diaphragm can be made extremely small, so that 180 DPI per unit is obtained. The above resolution can be realized.
[0003]
In the longitudinal vibration mode piezoelectric vibrator A, as shown in FIG. 8, the internal electrode B which is one pole and the internal electrode C which is the other pole are laminated in a sandwich shape via the piezoelectric material D. The internal electrode B is exposed to the front end side, and the other internal electrode C is exposed to the rear end side, and each end face has a piezoelectric constant d31 connected to the segment electrode E and the common electrode F. The segment electrode E and the common electrode F are connected to the conductive pattern of the flexible cable H to supply a signal from an external drive circuit.
[Patent Document 1]
JP-A-5-104715 [0004]
[Problems to be solved by the invention]
The common electrode F formed on the rear end side has a drive current for all the piezoelectric vibrators A. Therefore, the upper surface, the rear end face, and the rear face of the piezoelectric vibrator A are used for the purpose of making the resistance as small as possible. The conductive layers F1 to F3 are formed on the three surfaces, and are divided into comb teeth so as to leave a part of the rear end side, thereby ensuring a conductive path. Reference symbol J in the drawing indicates a flow path unit that discharges ink droplets when the ink is pressurized by the piezoelectric vibrator A.
For this reason, electrode layers for external connection are required on the four surfaces of the front end surface, the rear end surface, and the front and back surfaces of the piezoelectric vibrator A, and these external electrode layers provide corrosion resistance to ink and ease of soldering. Gold is used to secure it. For this reason, if an attempt is made to form a thick electrode layer in order to reduce the resistance of the electrode layer in order to enable high-speed driving, there is a problem that the cost for forming the electrode is high.
The present invention has been made in view of such problems, and the object of the present invention is to use two electrode layers for external connection as two surfaces, while reducing the usage fee for expensive electrode materials. An object of the present invention is to provide an ink jet recording head capable of obtaining the same effect as that formed.
[0005]
[Means for Solving the Problems]
In order to solve such a problem, in the present invention, the internal electrodes of two poles extending in the displacement axis direction are alternately stacked with the piezoelectric material interposed therebetween, and the internal electrode serving as one pole extends to the tip surface, The plurality of piezoelectric vibrators having the piezoelectric constant d31 with the internal electrode serving as the other pole extending to the rear end face are fixed to the fixed substrate on the rear end side, and the tip face of the piezoelectric vibrator is used as the pressure generating chamber. An ink jet which is brought into contact with an elastic plate constituting a part of the nozzle, supplies a drive signal to each of the piezoelectric vibrators by a flexible cable, expands and contracts the volume of the pressure generating chamber, and ejects ink droplets from the nozzle openings In the recording head, at least the fixed surface of the piezoelectric vibrator of the fixed substrate has conductivity, and the tip surface of the piezoelectric vibrator and the surface not bonded to the fixed substrate A segment electrode that is electrically independent from the adjacent piezoelectric vibrator and connected to the flexible cable is formed, and from a surface that is not bonded to the fixed substrate at a certain distance from the segment electrode. A common electrode is formed to extend to the rear end face of the piezoelectric vibrator and to an area where the area facing the fixed substrate is in contact with the fixed substrate, and the increased area of the common electrode is the thickness of the common electrode. A conductive relationship is formed with the surface of the fixed substrate, and the common electrode is connected to be continuous on the rear end surface side due to the conductivity of the surface of the fixed substrate.
[0006]
[Action]
Since the thickened area at one end of the common electrode of the piezoelectric vibrator is connected in parallel to the conductive fixed substrate to reduce the electrical resistance, the common electrode formed on the piezoelectric vibrator has only two faces and is formed on three faces. It is possible to connect with low resistance equivalent to that.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
1 and 2 show an embodiment of an ink jet recording head according to the present invention. A flow path unit 1 is connected to a nozzle plate 3 having nozzle openings 2 formed at a constant pitch, and to the nozzle openings 2. The pressure generating chamber 4 and the flow path forming substrate 7 having the reservoir 6 for supplying ink to the pressure generating chamber 4 through the ink supply port 5, and the tip of each piezoelectric vibrator 9 in the longitudinal vibration mode of the piezoelectric vibration unit 8. Thus, an elastic plate 10 for expanding and reducing the volume of the pressure generating chamber 4 is integrally laminated.
[0008]
The flow path unit 1 is connected to an opening surface 12 of a holder 11 constituted by injection molding of a polymer material, and the piezoelectric vibration unit 8 is connected to a flexible cable 13 for transmitting a driving signal from the outside, and then accommodated in a storage chamber. 14, the contact surface with each holder 11 is fixed with an adhesive, and a frame 15 serving also as a shield material is inserted into the nozzle plate side to constitute a recording head.
[0009]
The piezoelectric vibrator 9 in the longitudinal vibration mode includes an internal electrode 21 serving as one pole extending from the front end side to the front of the fixed region with the fixed substrate 16, and an internal electrode 22 serving as the other pole extending from the vicinity of the front end to the rear end. Are laminated in a sandwich shape via a piezoelectric material 23, and one internal electrode 21 is exposed at the front end side, and the other internal electrode 22 is exposed at the rear end side, so that the piezoelectric constant d31 is obtained.
[0010]
One internal electrode 21 is a segment electrode 24 formed with a conductive layer from the front end surface to the vicinity of the center of the piezoelectric vibrator 9, and the other internal electrode 22 is a central portion of the piezoelectric vibrator 9 from the rear end face. In addition, it is connected to a common electrode 26 formed by forming a conductive layer so as to have a certain distance 25 from the rear end side of the segment electrode 24.
[0011]
On the other hand, the fixed substrate 16 is formed by forming a metal layer on the surface of a conductive material such as non-rust steel or ceramics, and the piezoelectric vibrator 9 is made to coincide with the arrangement pitch of the pressure generating chambers 4 on this surface. In addition to being fixed, the piezoelectric vibrator 9 is conductively connected to a conductive surface 26b formed with an increased thickness so as to go around from the rear end surface 26a of the common electrode 26 to the fixed substrate 16 side.
[0012]
Then, at least one end side of the row of the piezoelectric vibrators 9 is configured in the same manner as the piezoelectric vibrator 9 as shown in FIGS. 3 and 4, that is, extends from the front end side to the front of the fixing region with the fixed substrate 16. An internal electrode 21 serving as one pole and an internal electrode 22 serving as the other pole extending from the vicinity of the front end to the rear end are laminated in a sandwich shape via the piezoelectric material 23, and the one internal electrode 21 is stacked on the front end side. The other internal electrode 22 is exposed at the rear end side, and the internal electrode 21 is further formed into a segment electrode 24 formed with a conductive layer from the front end surface to the vicinity of the center of the piezoelectric vibrator 9, and the other internal electrode 22 is Connected from the rear end surface to a common electrode 26 formed with a conductive layer so as to have a constant distance 25 from the rear end side of the segment electrode 24 at the center of the piezoelectric vibrator 9, and slightly more than the piezoelectric vibrator 9 Widely formed dami The piezoelectric vibrator 9 'is fixed.
[0013]
The segment electrode 24 and the common electrode 26 of each piezoelectric vibrator 9 of the vibrator unit 8 are connected to the conductive pattern of the flexible cable 13 via solder layers 28 and 29.
[0014]
As shown in FIG. 5, the flexible cable 13 includes ground conductive patterns 31 and 31 that match the widths of the dummy piezoelectric vibrators 9 ′ and 9 ′ at both ends of the vibrator unit 8, and the piezoelectric vibrators 9 and 9. , 9... Are formed on the base material 33 by providing conductive patterns 32, 32, 32,... For supplying drive signals corresponding to the segment electrodes 24.
[0015]
In this embodiment, when a drive signal is supplied from the external drive circuit via the flexible cable 13, the piezoelectric vibrator 9 that should eject ink droplets is connected to one of the conductive patterns 32 and the segment electrode 24 of the flexible cable 13. The drive signal is received by the internal electrode 21 which is a pole, and by the internal electrode 22 which is the other pole via the grounding conductive pattern 31, the fixed substrate 16 and the common electrode 26, and is displaced from the nozzle opening 2 by displacement due to the piezoelectric constant d31. Ink droplets are ejected.
[0016]
As described above, each piezoelectric vibrator 9 has a small common electrode 26 in contact with the fixed substrate 16 and connected in parallel by the conductive surface 26b formed by increasing the thickness of the opposing surface of the fixed substrate 16. The resistor is connected to the ground conductive pattern 31 of the flexible cable 16.
[0017]
Next, a manufacturing method of the above-described piezoelectric vibrator unit 8 will be described with reference to FIGS. While sandwiching the piezoelectric material 43, a conductive material 41 serving as an internal electrode serving as one pole extending from the front end to the terminal end of the active region and a conductive material serving as an internal electrode serving as the other pole extending from the rear end to the vicinity of the front end. Two piezoelectric diaphragms 44, 44 formed by laminating and baking after drying are prepared (FIG. 6 (I)).
[0018]
The piezoelectric diaphragms 44 and 44 are opposed to each other with two spacers 45 and 45 interposed therebetween so as to form an interval L that allows the external connection electrode forming material to slightly wrap around during deposition. The mask material 46, 46 is fixed to the boundary region between the segment electrode and the common electrode on the exposed front surface and back surface of 44 (FIG. 6 (II)), and the electrode forming material for external connection is deposited on the entire circumference. Electrode layers 47 and 48 are formed. In the process of vapor deposition, the external connection electrode forming material slightly wraps around as much as there is an interval L between the two piezoelectric diaphragms 44, 44, and slightly from the planes 44a, 44a of the piezoelectric diaphragms 44, 44. Exposed layers 47a and 48a are formed (FIG. 6 (III)).
[0019]
When the two piezoelectric diaphragms 44 and 44 are separated and the mask materials 46 and 46 are removed at the stage where the vapor deposition is completed, the front end surface, one surface, the rear end surface, and the opposed surface side are projected slightly. Two piezoelectric diaphragms 50 and 50 having conductive layers 47 and 48 formed only on three surfaces can be obtained (FIG. 6 (IV)).
[0020]
The region where only the other internal electrode 52 is formed, that is, the inactive region is positioned by positioning the metal or the fixed substrate 53 having the conductive layer formed on the fixed surface (FIG. 7 (I)). The layer 48a exposed from the end surface to the opposite surface is fixed with an adhesive so as to come into contact with the fixed substrate 53.
[0021]
Next, slits 56, 56, 56,... Are formed by a dicing saw or wire saw cutting tool 55 from the free end to at least the conductive layer 47 serving as the segment electrode and the rear end of the conductive material 41. When the vibration region as the child 9 and the region to be the segment electrode are cut into comb teeth, the piezoelectric vibrator unit is completed.
[0022]
When forming the slits 56, 56, 56,..., Both end portions are cut out slightly wide to form dummy piezoelectric vibrators 9 ′ and 9 ′ that are slightly wide and do not participate in vibration, and the conductive layer 48 is continuously formed. Leaving it in this state helps to lower the electrical resistance of the common electrode.
[0023]
【The invention's effect】
As described above, according to the present invention, the common electrode of the piezoelectric vibrator can be connected in parallel to the fixed substrate in the thickened region to reduce the electrical resistance, and the common electrode formed on the piezoelectric vibrator can be substantially formed. The effect equivalent to that formed on the three surfaces can be obtained while reducing the cost by reducing the area for forming the external connection electrodes only on the two surfaces.
[Brief description of the drawings]
FIG. 1 is an assembled perspective view showing an embodiment of an ink jet recording head of the present invention.
FIG. 2 is a view showing a cross-sectional structure of the apparatus.
FIG. 3 is a cross-sectional view showing a connection structure between a dummy piezoelectric vibrator and a flexible cable of the recording head.
FIGS. 4A and 4B are perspective views showing an embodiment of a piezoelectric vibration unit used in the recording head. FIG.
FIG. 5 is a diagram showing an example of a flexible cable.
FIGS. 6 (I) to (IV) are diagrams showing an electrode forming process in the manufacturing process of the vibrator unit used for the recording head.
FIGS. 7 (I) to (III) are diagrams showing up to the dividing step in the manufacturing process of the vibrator unit used in the recording head.
FIG. 8 is a cross-sectional view showing an example of a conventional ink jet recording head using a piezoelectric vibrator having a piezoelectric constant d31.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Flow path unit 8 Vibrator unit 9 Piezoelectric vibrator 9 'Dummy piezoelectric vibrator 13 Flexible cable 16 Fixed substrate 25 Segment electrode 26 Common electrode 26b Conductive surface formed by increasing the end face of the common electrode

Claims (10)

変位軸方向に延びる2つの極の内部電極を圧電材料を挟んで交互に積層され、一方の極となる前記内部電極が先端面に延び、また他方の極となる前記内部電極が後端面に延びて圧電定数d31を有する複数の圧電振動子を、その後端側を固定基板に固定し、また前記圧電振動子の前記先端面を圧力発生室の一部を構成する弾性板に当接させ、フレキシブルケーブルにより前記圧電振動子のそれぞれに駆動信号を供給して前記圧力発生室の容積を膨張、収縮させてノズル開口からインク滴を吐出させるインクジェット式記録ヘッドにおいて、
前記固定基板の少なくとも前記圧電振動子の固定面が導電性を有し、また前記圧電振動子の前記先端面、及び前記固定基板に接着されていない側の面に、隣接する前記圧電振動子と電気的に独立し、かつ前記フレキシブルケーブルに接続されるセグメント電極が形成され、また前記セグメント電極から一定の間隔をおいて前記固定基板に接着されていない側の面から前記圧電振動子の前記後端面に延び、かつ前記固定基板と対向する領域が前記固定基板と接触できる程度に増厚された共通電極が形成され、さらに前記共通電極の増厚された領域が前記固定基板の表面と導電関係を形成して前記固定基板の表面の導電性により前記共通電極が後端面側で連続するように接続されているインクジェット式記録ヘッド。
Internal electrodes of two poles extending in the displacement axis direction are alternately stacked with a piezoelectric material in between, the internal electrode serving as one pole extends to the front end surface, and the internal electrode serving as the other pole extends to the rear end surface. A plurality of piezoelectric vibrators having a piezoelectric constant d31 are fixed to the fixed substrate at the rear end side, and the tip end face of the piezoelectric vibrator is brought into contact with an elastic plate constituting a part of the pressure generating chamber. In an ink jet recording head that supplies a drive signal to each of the piezoelectric vibrators by a cable to expand and contract the volume of the pressure generating chamber to eject ink droplets from a nozzle opening,
The fixed surface of at least the piezoelectric vibrator of the fixed substrate has conductivity, and the piezoelectric vibrator adjacent to the tip surface of the piezoelectric vibrator and the surface not bonded to the fixed substrate, A segment electrode that is electrically independent and connected to the flexible cable is formed, and the rear surface of the piezoelectric vibrator is separated from the surface that is not bonded to the fixed substrate at a certain distance from the segment electrode. A common electrode extending to an end surface and thickened to such an extent that a region facing the fixed substrate can contact the fixed substrate is formed, and the thickened region of the common electrode is electrically conductive with the surface of the fixed substrate. An ink jet recording head in which the common electrode is continuously connected on the rear end surface side by the conductivity of the surface of the fixed substrate.
変位軸方向に延びる2つの極の内部電極を圧電材料を挟んで交互に積層され、一方の極となる前記内部電極が先端面に露出し、また他方の極となる前記内部電極が後端面に露出して圧電定数d31を有する複数の圧電振動子を、その後端側を固定基板に固定し、また前記圧電振動子の前記先端面を圧力発生室の一部を構成する弾性板に当接させ、フレキシブルケーブルにより前記圧電振動子のそれぞれに駆動信号を供給して前記圧力発生室の容積を膨張、収縮させてノズル開口からインク滴を吐出させるインクジェット式記録ヘッドにおいて、
前記固定基板の少なくとも前記圧電振動子の固定面が導電性を有し、また前記圧電振動子の前記先端面、及び前記固定基板に接着されていない側の面に、前記フレキシブルケーブルに接続されるセグメント電極が隣接する前記圧電振動子と電気的に独立するように自由端側の先端側からスリットが形成され、前記スリットの後端側は、前記共通電極が後端側で連続するように、前記セグメント電極から一定の間隔をおいて前記固定基板に接着されていない側の面から前記圧電振動子の前記後端面に延びた導電層を前記隣接する圧電素子間で連続させるよう形成され、さらに前記導電層と連続し前記固定基板と対向する領域の前記固定基板と接触できる程度に増厚された導電層が形成され、前記共通電極の増厚された領域は、前記固定基板の表面と導電関係を形成して前記固定基板の表面の導電性により接続されているインクジェット式記録ヘッド。
Internal electrodes of two poles extending in the displacement axis direction are alternately stacked with a piezoelectric material interposed therebetween, and the internal electrode serving as one pole is exposed on the front end surface, and the internal electrode serving as the other pole is disposed on the rear end surface. A plurality of piezoelectric vibrators exposed and having a piezoelectric constant d31 are fixed at their rear ends to a fixed substrate, and the tip surfaces of the piezoelectric vibrators are brought into contact with an elastic plate constituting a part of the pressure generating chamber. In an ink jet recording head that supplies a drive signal to each of the piezoelectric vibrators by a flexible cable to expand and contract the volume of the pressure generating chamber to eject ink droplets from a nozzle opening,
At least a fixed surface of the piezoelectric vibrator of the fixed substrate has conductivity, and is connected to the flexible cable on the tip surface of the piezoelectric vibrator and a surface not bonded to the fixed substrate. A slit is formed from the front end side of the free end side so that the segment electrode is electrically independent of the adjacent piezoelectric vibrator, and the rear end side of the slit is continuous with the rear end side of the common electrode. A conductive layer extending from the surface not bonded to the fixed substrate at a certain distance from the segment electrode to the rear end surface of the piezoelectric vibrator is formed to be continuous between the adjacent piezoelectric elements; A conductive layer that is thick enough to be in contact with the fixed substrate in a region that is continuous with the conductive layer and that faces the fixed substrate is formed, and the thickened region of the common electrode is a surface of the fixed substrate. Ink jet recording head by forming a conductive relationship are connected by the conductive surface of the fixed substrate and.
前記増厚された領域が、前記共通電極を膜形成技術により形成する際の回り込み現象により形成されている請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the thickened region is formed by a wraparound phenomenon when the common electrode is formed by a film forming technique. 前記圧電振動子の固定面が、不活性領域である請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the fixed surface of the piezoelectric vibrator is an inactive region. 前記固定基板と前記圧電振動子とが、導電性接着剤で固定されている請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the fixed substrate and the piezoelectric vibrator are fixed with a conductive adhesive. 前記固定基板が、防錆鋼により構成されている請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the fixed substrate is made of rust-proof steel. 前記固定基板が、セラミックの表面に金属層を形成して構成されている請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the fixed substrate is configured by forming a metal layer on a ceramic surface. 前記圧電振動子は、少なくともセグメント電極が形成されている領域をスリットにより分離されている請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the piezoelectric vibrator has at least a region where a segment electrode is formed separated by a slit. 前記圧電振動子は、少なくとも前記圧電振動子の前記共通電極の一部がスリットにより分離されていない領域を有する請求項1又は2に記載のインクジェット式記録ヘッド。  The ink jet recording head according to claim 1, wherein the piezoelectric vibrator has a region where at least a part of the common electrode of the piezoelectric vibrator is not separated by a slit. 前記固定基板の、複数の前記圧電振動子の列設方向の少なくとも一端側で、かつ前記圧電振動子が存在しない領域に、前記フレキシブルケーブルのアース用の導電パターンが接合される導電層を有する請求項1又は2に記載のインクジェット式記録ヘッド。  A conductive layer to which a conductive pattern for grounding the flexible cable is bonded to at least one end side of the fixed substrate in an arrangement direction of the plurality of piezoelectric vibrators and in a region where the piezoelectric vibrators are not present. Item 3. The ink jet recording head according to Item 1 or 2.
JP2003102601A 2003-04-07 2003-04-07 Inkjet recording head Expired - Lifetime JP3867062B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003102601A JP3867062B2 (en) 2003-04-07 2003-04-07 Inkjet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003102601A JP3867062B2 (en) 2003-04-07 2003-04-07 Inkjet recording head

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP18585897A Division JP3456516B2 (en) 1997-06-26 1997-06-26 Method for manufacturing piezoelectric vibrator unit for inkjet recording head

Publications (2)

Publication Number Publication Date
JP2003260800A JP2003260800A (en) 2003-09-16
JP3867062B2 true JP3867062B2 (en) 2007-01-10

Family

ID=28672991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003102601A Expired - Lifetime JP3867062B2 (en) 2003-04-07 2003-04-07 Inkjet recording head

Country Status (1)

Country Link
JP (1) JP3867062B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4973854B2 (en) * 2007-03-28 2012-07-11 セイコーエプソン株式会社 Pressure bonding apparatus and method for manufacturing piezoelectric element unit using the same

Also Published As

Publication number Publication date
JP2003260800A (en) 2003-09-16

Similar Documents

Publication Publication Date Title
JP3381779B2 (en) Piezoelectric vibrator unit, method of manufacturing piezoelectric vibrator unit, and ink jet recording head
US6338549B1 (en) Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head
JP4670225B2 (en) Piezoelectric element forming member, manufacturing method thereof, piezoelectric element unit using the same, and liquid jet head
JP3867062B2 (en) Inkjet recording head
JP3512065B2 (en) Ink jet recording head and piezoelectric vibrator unit suitable for the recording head
JP3456515B2 (en) Method for manufacturing piezoelectric vibrator unit for inkjet recording head
JP3456516B2 (en) Method for manufacturing piezoelectric vibrator unit for inkjet recording head
JP3567989B2 (en) Ink jet recording head
JPH09300609A (en) Ink-jet head
JP3456519B2 (en) Ink jet recording head
JP2003260801A (en) Inkjet recording head
JP3467579B2 (en) Manufacturing method of piezoelectric vibrator unit
JP2000094677A (en) Piezoelectric oscillator unit and ink jet recording head
JP2000094678A (en) Piezoelecric oscillator unit, manufacture thereof, and ink jet recording head
JPH03266644A (en) Ink jet recording head
JP2002273875A5 (en)
JPH07195688A (en) Piezoelectric driving body for ink jet recording apparatus
JP2959056B2 (en) Inkjet print head
JP2959052B2 (en) Inkjet print head
JP3384294B2 (en) Ink jet recording head
JP3734036B2 (en) Piezoelectric vibrator unit
JP3038806B2 (en) Ink jet print head and method of manufacturing the same
JP3541638B2 (en) Ink jet recording head
JP3456518B2 (en) Piezoelectric vibrator unit and ink jet recording head
JP3844188B2 (en) Actuator unit and ink jet recording head

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20040107

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040308

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20040413

A912 Removal of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20040528

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20061006

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101013

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101013

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111013

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121013

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121013

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131013

Year of fee payment: 7

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term