JP3844151B2 - Surface treatment equipment - Google Patents

Description

【００８２】
【表２】

【００８３】
以上から、本発明の実施例１、２では、オモテ面のみが効果的に表面改質されており、ウラ面には全く影響がないのが分かる。また放電も安定しており、均一に処理されていることが分かる。一方比較例１では、処理雰囲気ガス中に占めるヘリウムガスの濃度が５０％未満であるため、安定したグロー放電プラズマが得られず、処理の均一性が低い。また比較例２ではオモテ面、ウラ面ともに同様の特性を有する表面となり、表裏面の表面特性を異にすることは出来ない。さらに本発明の実施例３では、オモテ面を撥水性に、ウラ面を親水性に同時に表面改質されていることが分かる。加えて本発明の大気圧グロー放電プラズマ処理方法を用いることで、高価な処理雰囲気ガスの使用量を大幅に抑えることが出来ると言える。
【００８９】
【発明の効果】
請求項１記載の発明によれば、重ね合わされた被処理物の両端を接合してチューブ状の被処理物とする密着機構と、この密着機構で密着された被処理物を通し、内部空間を有する立体にチューブ状の被処理物が通過可能な被処理物通過口を設けてなる処理室と、前記処理室の内部で前記被処理物が通る通路に対向させてそれぞれ配置した電極と、前記各電極を通過したチューブ状の被処理物を圧接する圧接機構部と、前記密着機構側からチューブ状の被処理物内部に突設してなるガス供給ノズルと、前記圧接機構部を通過したチューブ状の被処理物の両端接合部を切断する切断機構とを備えたので、被処理物の片面のみをプラズマ処理することができる。
【００９０】
請求項２記載の発明によれば、重ね合わされた被処理物の両端を接合してチューブ状の被処理物とする密着機構と、この密着機構で密着された被処理物を通し、内部空間を有する立体にチューブ状の被処理物が通過可能な被処理物通過口を設けてなる処理室と、前記処理室の内部で前記被処理物が通る通路に対向させてそれぞれ配置した電極と、前記各電極を通過したチューブ状の被処理物を圧着する圧接機構部と、前記密着機構側からチューブ状の被処理物内部に突設してなるガス供給ノズルと、前記処理室処理室に設けたガス吸排気口と、前記圧接機構部を通過したチューブ状の被処理物の両端接合部を切断する切断機構とを備えたので、被処理物の両面をプラズマ処理することができる。
【図面の簡単な説明】
【図１】本発明の第１の実施の形態を示す斜視図である。
【図２】同第１の実施の形態を示す横断面図である。
【図３】同第２の実施の形態を示す横断面図である。
【図４】従来装置を示す断面図である。
【符号の説明】
５１、５１ａ 処理室
５３、５４ 電極
５５ 高圧電源
５６ 圧接機構部
５７ 両端切断機構
５８ 補助ローラ
５９ ガス供給ノズル
６０ 被処理物通過口
６５ｕ、６５ｄ 被処理物[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface treatment apparatus using atmospheric pressure plasma discharge suitable for flat objects such as sheets, films, foils, strips or plates.
[0002]
[Prior art]
Surface treatment methods for flat objects such as sheets, films, foils, strips, plates, etc. include wet treatment methods such as coating treatment, immersion treatment in acid alkali, corona discharge treatment, frame There have been proposed photo-modification treatment methods such as treatment and ultraviolet rays, or dry treatment methods such as low-temperature plasma treatment. Among these treatment methods, the low-temperature plasma treatment method has no influence on the material due to heat, can be processed in a non-contact, high-speed and uniform manner, and does not require treatment such as cleaning or drying after treatment. Widely used. Note that the low-temperature plasma treatment here refers to a method of performing surface modification by bringing the surface of an object to be processed into contact with a processing atmosphere in a low-temperature plasma state.
[0003]
In addition, the low-temperature plasma state is “a plasma state defined as a state in which a large number of positive ions and negative ions (including electrons) that can move freely exist macroscopically while maintaining electrical neutrality. It is defined as “a plasma state in which the average energy of electrons among the species constituting the plasma is larger than the average energy of ions and neutral species”, and is also called a non-equilibrium plasma state.
[0004]
However, since low temperature plasma is generated only in vacuum, there is a problem that the apparatus becomes large and the process becomes complicated. In addition, since processing is performed in a vacuum apparatus, there is a problem that it is difficult to continuously process sheet-like materials.
[0005]
In order to solve such a problem, a processing method called an atmospheric pressure plasma discharge processing method has been proposed. This atmospheric pressure plasma discharge treatment method is a method of filling a gap between opposed electrodes with a dielectric with helium gas or a mixed gas containing helium gas as a main component and applying a high voltage between the electrodes. The surface of the object to be processed is processed by using the generated atmospheric pressure low temperature plasma discharge region.
[0006]
This atmospheric pressure low temperature plasma treatment has been proposed as a method for continuously discharging a sheet-like object to be treated as described in JP-A-3-143930.
[0007]
FIG. 4 is a schematic view of a conventional surface treatment apparatus using atmospheric pressure plasma discharge. In this figure, a processing chamber 101 is constituted by a hollow solid body, and a processing object passage path 102 is provided in the processing chamber 101. An electrode 103 provided with a dielectric is provided inside the processing chamber 101 so as to face the workpiece passage 102. A high voltage can be applied between these electrodes 103 from a high-voltage power supply 104. The processing chamber 101 is provided with a gas supply port 105 and a gas exhaust port 106. The gas supply port 105 can be supplied with helium gas or a mixed gas containing helium gas as a main component. The helium gas or mixed gas inside the processing chamber 101 can be exhausted from the gas exhaust port 106. Then, the workpiece 107 passes between the electrodes 103 through the workpiece passage 102.
[0008]
In this surface treatment apparatus, helium gas or a mixed gas containing helium gas as a main component is supplied to the processing chamber 101 via the gas supply port 105, and helium gas or mixed gas inside the processing chamber 101 is supplied to the gas exhaust port 106. Exhausted from.
[0009]
[Problems to be solved by the invention]
However, the conventional atmospheric pressure plasma continuous processing apparatus has helium gas or helium gas as a main component in the inside of the discharge chamber 101 provided with the opposed electrodes 103 as described in Japanese Patent Laid-Open No. 3143939. Since the discharge is performed in a state of being filled with the mixed gas, the gas composition located on both sides of the surface to be processed is inevitably the same, and the discharge state is also the same. As a result, there is a problem that it is impossible to obtain a workpiece having different treatment effects on both surfaces.
[0010]
The first object of the present invention is to provide a surface treatment apparatus capable of performing a desired surface treatment on only one surface of an object to be treated. Moreover, this invention makes it the 2nd objective to provide the surface treatment apparatus which can obtain the to-be-processed object from which the characteristic of the processed front and back is different.
[0018]
[Means for Solving the Problems]
To achieve the first object, the surface treatment apparatus according to the first aspect of the present invention, and can pass through the flat object to be processed between a pair of electrodes disposed opposite said planar object to be processed In a surface treatment apparatus for treating the object to be processed by generating a plasma discharge region by applying a high voltage between the electrodes while exposing the atmosphere to an atmosphere of an atmosphere gas,
An adhesion mechanism that joins both ends of the superposed workpieces to form a tubular workpiece;
A processing chamber provided with a processing object passage port through which a tube-shaped processing object can pass through a solid body having an internal space through the processing object closely adhered by the adhesion mechanism;
An electrode disposed opposite to a passage through which the object to be processed passes inside the processing chamber, and a pressure contact mechanism unit that presses the tube-shaped object to be processed that has passed through the electrodes,
A gas supply nozzle that protrudes from the contact mechanism side into the tube-shaped workpiece;
And a cutting mechanism that cuts both end joints of the tube-shaped workpiece that has passed through the press-contact mechanism .
[0019]
In order to achieve the second object, a surface treatment apparatus according to a second aspect of the present invention allows a flat workpiece to pass between a pair of electrodes provided opposite to each other, and the flat workpiece. In the surface treatment apparatus for treating the object to be processed by generating a plasma discharge region by applying a high voltage between the electrodes while exposing the object to the atmosphere of the atmosphere gas,
An adhesion mechanism that joins both ends of the superposed workpieces to form a tubular workpiece;
A processing chamber provided with a processing object passage port through which a tube-shaped processing object can pass through a solid body having an internal space through the processing object closely adhered by the adhesion mechanism;
An electrode disposed opposite to a passage through which the object to be processed passes inside the processing chamber;
A pressure-contacting mechanism portion that press-contacts the tube-shaped workpiece that has passed through each of the electrodes;
A gas supply nozzle that protrudes from the contact mechanism side into the tube-shaped workpiece;
A gas inlet / outlet provided in the processing chamber;
And a cutting mechanism that cuts both end joints of the tube-shaped workpiece that has passed through the press-contact mechanism .
[0034]
DETAILED DESCRIPTION OF THE INVENTION
First Embodiment
FIG. 1 and FIG. 2 are for explaining a first embodiment of the present invention. FIG. 1 is a perspective view of the apparatus, and FIG. 2 is a transverse sectional view of the apparatus.
[0035]
In these figures, the surface treatment apparatus includes an adhesion mechanism 50, a treatment chamber 51, electrodes 53 and 54, a high voltage power supply 55, a nip roll portion 56, a both-end cutting mechanism 57, an auxiliary roller 58, and a gas supply nozzle. 59, and is configured as follows. A first workpiece 65u is wound around the upper feeder portion Rau, and a second workpiece 65d is wound around the lower feeder portion Rad.
[0036]
The upper feeder portion Rau is disposed on the left upper side of the contact mechanism 50 in the figure. In addition, the second object 65d is disposed on the lower left side of the contact mechanism 50 in the figure. The upper feeder portion Rau and the lower feeder portion Rad are rotated at a predetermined speed by a driving device (not shown), and the first workpiece 65u and the second workpiece 65d are rotated at a predetermined speed. It has come out.
[0037]
The contact mechanism 50 can superimpose the first object 65u and the second object 65d and can form both ends of the overlapped objects 65u and 65d in a tube shape. As a configuration. In the close contact mechanism 50, heat seal such as heat seal, impulse seal, high frequency seal, glue seal for applying hot melt adhesive paste, or the like is employed.
[0038]
A processing chamber 51 is disposed on the right side of the contact mechanism 50 in the figure. The process chamber 51 has a space therein, provided opposite the tubular object to be processed surface 65u, 65d can pass the object to be treated passes through port 60, respectively, said the object to be treated passes through port 60 Tube-shaped workpieces 65u and 65d can pass through.
[0039]
Electrodes 53 and 54 are respectively disposed inside the first object 65u and the second object 65d so as to face the path through which the objects 65u and 65d move. The electrodes 53 and 54 are each covered with a dielectric material such as ceramic.
[0040]
On the right side of the electrodes 53 and 54 in the drawing, a nip roll portion 56 as a pressure contact mechanism portion is disposed. The nip roll portion 56 presses the tube-shaped workpieces 65u and 65d so that the mixed gas does not leak to the right side of the nip roll portion 56 in the figure.
[0041]
Further, the gas supply nozzle 59 is fixed at a certain height, and is provided so as to project from the left side of the contact mechanism 50 to the inside of the tubular objects 65u and 65d and immediately before the electrodes 53 and 54. Has been. The gas supply nozzle 59 is in communication with the mixed gas supply device 61. The gas supply nozzle 59 has a cylindrical shape in the figure, but may have a flat and flat shape.
[0042]
Further, a both-end cutting mechanism 57 is disposed on the right side of the nip roll portion 56 in the drawing. The both-end cutting mechanism 57 cuts both ends of the processed objects 65u ′ and 65d ′ that have been tube-shaped and finished the processing, and again separate the first processed object 65u ′ and the second processed object 65d ′. It is a mechanism for enabling separation.
[0043]
A pair of auxiliary rollers 58, 58 are arranged on the right side of the both end cutting mechanism 57, and press the first object 65 u ′ and the second object 65 d ′ to function the both end cutting mechanism 57. It comes to assist.
[0044]
The first workpiece 65u ′ and the second workpiece 65d ′ that have passed through the auxiliary rollers 58 and 58 are wound around the feeder portions Rbu and Rbd, respectively. The feeder parts Rbu and Rbd can be rotated at a constant rotational speed by a driving device (not shown).
[0045]
The electrodes 53 and 54 are connected to a high voltage power supply 55 so that power can be supplied from the high voltage power supply 55.
[0046]
The operation of the first embodiment configured as described above will be described. The workpieces 65u and 65d are supplied from the feeder units Rau and Rad. These objects to be processed 65u and 65d are overlapped in the contact mechanism 50, and both ends of the objects to be processed 65u and 65d are in close contact with each other. Thereby, these to-be-processed objects 65u and 65d are formed in a tube shape.
[0047]
From the gas supply nozzle 59, a processing gas of a single component gas of helium gas or a mixed gas containing helium gas as a main component is always supplied to the inside of the tubular processing objects 65u and 65d. The processing gas needs to be helium gas or a mixed gas containing helium gas as a main component, and preferably an inert gas having a composition of helium gas 50 to 100% by volume and argon 0 to 50% by volume. It is preferable that it is 95 volume% or more of the whole mixed gas. The gas added to these discharge gases can be selected from various gases depending on the purpose of the surface treatment. For example, in order to increase the hydrophilicity, adding an inorganic gas such as oxygen, carbon dioxide, nitrogen, hydrogen, and monoxide gas makes the hydrophilicity more than a single component gas composed of helium gas or a mixed gas composed mainly of helium gas. Has the effect of increasing. In order to improve the water repellency of the treated surface of the object to be treated, a hydrocarbon such as methane or ethylene, or a gas having a low polarity such as CF ₄ may be added. By supplying this processing gas to the tube-shaped workpieces 65u and 65d, the workpieces 65u and 65d pass between the electrodes 53 and 54 in a state of swelling to a predetermined width as shown in the figure.
[0048]
In addition, when a high voltage is applied to the electrodes 53 and 54 from the high-voltage power supply 55, the processing gas is filled in the space that the processing objects 65u and 65d include, so that the processing objects 65u and 65d are included. A stable glow discharge plasma is generated in the space, and only the inner surfaces of the tube-shaped workpieces 65u and 65d are processed by the glow discharge plasma.
[0049]
Then, the tube-shaped workpieces 65u ′ and 65d ′ that have been processed pass through the nip roll portion 56, and both ends of the tube-shaped workpieces 65u ′ and 65d ′ are cut off by the both-end cutting mechanism 57. After passing through the auxiliary roller 58, the first object 65u ′ is wound around the feeder part Rbu and the second object 65d ′ is wound around the feeder part Rbd.
[0050]
According to the first embodiment as described above, the tube-shaped workpieces 65u and 65d are passed between the electrodes 53 and 54 in the processing chamber 51, and the processing gas of the single component gas or the mixed gas is brought into the close contact mechanism. The inside of the tube-shaped workpieces 65u and 65d is filled from the 50 side through the gas supply nozzle 59, and a high voltage is applied between the electrodes 53 and 54 to thereby set the atmospheric pressure plasma discharge region inside the workpieces 65u and 65d. Can be generated only on one side, and only one side of the workpieces 65u, 65d can be subjected to atmospheric pressure plasma discharge treatment.
[0051]
In the first embodiment, both ends of the two workpieces 65u and 65d are brought into close contact with each other to form the tube-like workpieces 65u and 65d. Instead of this, one workpiece 65 is flowed in the flow direction. Alternatively, the two ends may be folded into a tube shape. In this case, it is necessary to insert the arrangement state of the gas supply nozzle 59 from the side to be overlapped.
[0052]
In addition, a guide belt is disposed between the contact mechanism 50 and the electrodes 53 and 54, and the ends of the objects to be processed 65u and 65d are sandwiched between the guide belts so that the objects to be processed 65u and 65d are formed into a tube shape. You may make it provide the space enclosed by the processed material 65u and 65d. In this case, all of the guide belt and the member for fixing the guide belt need to be made of a dielectric material that does not affect the discharge.
[0053]
Further, in the above-described embodiment, the pressure contact mechanism portion is a method in which the nip roll portion 56 presses the workpieces 65u and 65d with a roll, but is not limited thereto, and is included in the tube-shaped workpieces 65u and 65d. Any structure may be used as long as the processing gas filled in the space does not flow out. For example, by providing a seal bar and sealing, the processing gas filled in the space enclosed by the tube-shaped workpieces 65u and 65d may be prevented from flowing out. In this case, sealing is intermittently performed, and a bag-like structure in which only the inner surface is treated can be obtained.
[0054]
Second Embodiment
FIG. 3 is a sectional view for explaining a second embodiment of the present invention. In the second embodiment, a mixed gas can be introduced also into the processing chamber 51 in the first embodiment. Accordingly, the embodiment and the same components of the first embodiment will not be described are denoted by the same reference numerals.
[0055]
That is, in the second embodiment, a gas intake port 67 is provided on one surface of the processing chamber 51a, and a gas exhaust port 68 is provided on the other surface of the processing chamber 51a. The other configuration is the first embodiment. The configuration is exactly the same as the embodiment.
According to the second embodiment, the gas in the atmosphere contained in the tube-shaped workpieces 65u and 65d is formed inside the processing chamber 51a using the gas inlet port 67 and the gas outlet port 68. Gases with different compositions can be filled.
For this reason, different surface treatments can be simultaneously performed on the front and back surfaces of the workpieces 65u and 65d.
[0056]
【Example】
Less than. Specific examples of the present invention will be described.
[0076]
(Examples 1 to 3 )
As the substrate to be treated, two films of a biaxially stretched polyethylene terephthalate film (25 μm) having a width of 300 mm and having both ends coated with a heat seal lacquer in the flow direction with a width of 10 mm are used . By heat-sealing the two end portions of the two processing substrates, a tube shape is formed, and the material is passed between opposing electrodes 53 and 54 whose surfaces are covered with a dielectric. The tubular treated substrate 65u, the space enclosing the 65d, the treatment atmosphere gas shown in the section of the inner process gas in Table 1, was supplied at notation flow into the process chamber 51 in FIG. 2, Table The processing atmosphere gas shown in the section of the outer processing gas in No. 1 was supplied at the indicated flow rate. A glow discharge plasma is generated in a space where the tubular substrate to be treated is enclosed between the electrodes by a high frequency power source of 5 KHz, or a different glow discharge plasma is generated inside and outside the tubular substrate to be treated, Atmospheric pressure glow discharge plasma treatment was applied. Thereafter, the heat-sealed portion was cut with a both-end cutting mechanism 57 to obtain an independent surface-modified base material. The processing speed was 20 m / min, and the discharge output was 1.5 kW. Table 1 shows the discharge state.
[0077]
( Comparative Example 1 )
The atmospheric pressure glow discharge plasma treatment was performed in the same manner as in Example 1 except that the treatment atmosphere gas supplied to the space included in the tubular substrate to be treated was changed as described in Table 1 , and the surface modification group The material was obtained. Table 1 shows the discharge state.
[0078]
( Comparative Example 2 )
As the treated substrate, using the biaxially stretched polyethylene terephthalate film of 300mm width (25.mu.), using an atmospheric pressure glow discharge plasma treatment apparatus as shown in FIG. 3, in Table 1 the processing chamber 51 in FIG. 3 A process atmosphere gas shown in the section of the outer process gas is filled at the indicated flow rate, a glow discharge plasma is generated between opposing electrodes whose surfaces are covered by a high frequency power source of 5 KHz, and an atmospheric pressure glow discharge plasma treatment is performed. A treated substrate was obtained. The processing speed was 20 m / min, and the discharge output was 1.5 kW. Table 1 shows the discharge state.
[0079]
( Comparative Example 3 )
As Comparative Example 3 , a biaxially stretched polyethylene terephthalate film (25 μm) that was not surface-modified was used.
[0080]
With respect to the surface modified substrate thus obtained, the contact angle of distilled water on the front and back surfaces and the surface wetting index by the wetting test solution were measured according to the following methods . The results are shown in Table 2 . In addition, the to-be-processed base material made the inner surface at the time of shape | molding in tube shape the front surface, and made the outer surface the back surface.
Water contact angle ... The contact angle of pure water on each surface of the workpiece was measured using a contact angle meter (Kyowa Interface Science Co., Ltd., CA-Z type). The unit is an angle.
[0081]
[Table 1]

[0082]
[Table 2]

[0083]
From the above, it can be seen that in Examples 1 and 2 of the present invention, only the front side is effectively surface-modified, and the back side is not affected at all. It can also be seen that the discharge is stable and is uniformly processed. On the other hand, in Comparative Example 1 , since the concentration of helium gas in the processing atmosphere gas is less than 50%, a stable glow discharge plasma cannot be obtained, and the processing uniformity is low. In Comparative Example 2 , both the front and back surfaces have the same characteristics, and the surface characteristics of the front and back surfaces cannot be made different. Further, in Example 3 of the present invention, it can be seen that the front surface is water-repellent and the back surface is hydrophilic at the same time. In addition, it can be said that by using the atmospheric pressure glow discharge plasma processing method of the present invention, the amount of expensive processing atmosphere gas used can be significantly reduced.
[0089]
【The invention's effect】
According to the first aspect of the present invention, a close contact mechanism that joins both ends of the overlapped objects to be processed to form a tube-like object to be processed, and the object to be processed that is in close contact with the close contact mechanism are passed through the internal space. A processing chamber provided with a processing object passage port through which a tube-shaped processing object can pass in a three-dimensional body, electrodes disposed respectively facing a passage through which the processing object passes inside the processing chamber, A pressure- contact mechanism that presses the tube-shaped workpiece that has passed through each electrode, a gas supply nozzle that protrudes from the contact mechanism side into the tube-shaped workpiece, and a tube that has passed through the pressure-contact mechanism. Since the cutting mechanism for cutting the both-end joints of the object to be processed is provided, only one surface of the object to be processed can be plasma-processed.
[0090]
According to the second aspect of the present invention, a close contact mechanism that joins both ends of the overlapped objects to be processed to form a tube-like object to be processed, and the object to be processed that is closely contacted by the close contact mechanism are passed through the internal space. A processing chamber provided with a processing object passage port through which a tube-shaped processing object can pass in a three-dimensional structure, electrodes disposed respectively facing a passage through which the processing object passes inside the processing chamber, and Provided in the processing chamber processing chamber, a press- contact mechanism that crimps the tube-shaped processing object that has passed through each electrode, a gas supply nozzle that protrudes into the tube-shaped processing object from the contact mechanism side, and Since the gas intake / exhaust port and the cutting mechanism for cutting both end joints of the tube-like object to be processed that have passed through the pressure contact mechanism part are provided, both surfaces of the object to be processed can be plasma-treated.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a first embodiment of the present invention.
FIG. 2 is a transverse sectional view showing the first embodiment;
FIG. 3 is a transverse sectional view showing the second embodiment;
FIG. 4 is a cross-sectional view showing a conventional device.
[Explanation of symbols]
51, 51a Processing chambers 53, 54 Electrodes 55 High-voltage power supply 56 Press-contact mechanism 57 Both-end cutting mechanism 58 Auxiliary roller 59 Gas supply nozzle 60 Processed object passage ports 65u, 65d Processed object

Claims (2)

A flat workpiece can be passed between a pair of opposed electrodes, and a plasma discharge region is generated by applying a high voltage between the electrodes while exposing the flat workpiece to an atmosphere of atmospheric gas. In the surface treatment apparatus for treating the object to be treated,
An adhesion mechanism that joins both ends of the superposed workpieces to form a tubular workpiece;
A processing chamber provided with a processing object passage port through which a tube-shaped processing object can pass through a solid body having an internal space through the processing object closely adhered by this adhesion mechanism;
An electrode disposed opposite to a passage through which the object to be processed passes inside the processing chamber;
A pressure-contacting mechanism portion that press-contacts the tube-shaped workpiece that has passed through each electrode;
A gas supply nozzle that protrudes from the contact mechanism side into the tube-shaped workpiece;
A surface treatment apparatus comprising: a cutting mechanism that cuts both end joint portions of a tube-like object to be processed that has passed through the pressure contact mechanism portion . A flat workpiece can be passed between a pair of opposed electrodes, and a plasma discharge region is generated by applying a high voltage between the electrodes while exposing the flat workpiece to an atmosphere of atmospheric gas. In the surface treatment apparatus for treating the object to be treated,
An adhesion mechanism that joins both ends of the superposed workpieces to form a tubular workpiece;
A processing chamber provided with a processing object passage port through which a tube-shaped processing object can pass through a solid body having an internal space through the processing object closely adhered by this adhesion mechanism;
An electrode disposed opposite to a passage through which the object to be processed passes inside the processing chamber;
A pressure-contacting mechanism portion that press- contacts the tube-shaped workpiece that has passed through each electrode;
A gas supply nozzle that protrudes from the contact mechanism side into the tube-shaped workpiece;
A gas inlet / outlet provided in the processing chamber;
A surface treatment apparatus comprising: a cutting mechanism that cuts both end joint portions of a tube-like object to be processed that has passed through the pressure contact mechanism portion .

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