JP3843493B2 - Small diaphragm automatic valve - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a valve (valve) structure, and more particularly, to a small diaphragm automatic valve using a diaphragm that controls passage and blocking of fluid.
[0002]
[Prior art]
Conventionally, this type of diaphragm automatic valve has been put to practical use such as a manually operated type or a type automatically operated by air or the like.
[0003]
In general, this type of diaphragm automatic valve is used in a clean room designed to manufacture semiconductor devices, etc., and many valves are used to conduct and shut off special gases. Because of the large number of components used, there has been a demand for the development of a small and powerful diaphragm automatic valve.
[0004]
[Problems to be solved by the invention]
As described above, conventionally, there has been a demand for the development of a small and powerful diaphragm automatic valve used in a clean room.
[0005]
The present invention has been made in order to cope with the above-mentioned demands in view of the above-mentioned actual situation, and an object of the present invention is to provide a novel diaphragm automatic valve which is small and powerfully operated.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, a small diaphragm automatic valve according to the present invention includes a body having a first flow path for allowing fluid to flow in and a second flow path for allowing fluid to flow out,
A cylinder connected to the body by a connection nut;
At least a pair of cams rotatably supported on a camshaft fixed to the connection nut and always given a force to spread outwardly;
A piston that is movably disposed in the cylinder and is constantly receiving force in one direction by a push spring;
Two rollers provided in the piston and pivotally supported in correspondence with the cam so as to control the degree of opening to expand outward of the cam according to the movement of the piston;
A plate-shaped presser plate arranged and formed so that one surface side contacts the lower end of the cam;
A diaphragm push pin disposed in contact with the other side of the press plate;
A diaphragm that is deformed by movement of the presser plate in the direction of movement of the piston in the direction of movement of the piston via the diaphragm pushpin and closes or conducts the first and second flow paths;
Further, the cam has a lower end shape in which a distance between the lower end portion of the cam contacting the one surface side of the presser plate and the cam shaft changes as the cam rotates.
In that case, a surface on which the roller on the outer side in the longitudinal direction of the cam rolls is formed into a curved surface, and further, a part of the lower end portion of the cam is formed in a flat shape, and the flat portion and the presser are turned on when the valve is in conduction. The plate may be in surface contact so that the distance between the lower end of the cam and the camshaft is the shortest.
[0007]
【Example】
Next, a preferred embodiment of the present invention will be described in detail with reference to the drawings.
[0008]
FIGS. 1A and 1B are cross-sectional views showing the internal structure of an embodiment of the present invention. Among them, FIG. 1A shows that the flow path is closed (blocked) without air being injected into the cylinder. (B) shows a state in which the cylinder is filled with air and the flow path is opened (conducted).
[0009]
Referring to FIGS. 1 (a) and 1 (b), reference numeral 1 indicates a cam which is one of the essential parts of the present invention, and this cam 1 is composed of two pairs (two cams are paired together). 4) and is rotatably supported by a camshaft 8 fixed to a main body (cylinder 9) and a connecting nut 17 of the body. The two pairs of cams 1 have the same shape and structure when the front and the back are reversed, and are arranged symmetrically with respect to the camshaft 8 with the front and back reversed.
[0010]
The two pairs of cams 1 are urged to expand outward with respect to the camshaft 8. These cams 1 are also formed such that the side surfaces in contact with a roller 4 described later are curved and the other side surfaces are flat. The cam 1 further has a part of the end face (lower end face) on the side pivotally supported by the camshaft 8 formed on the plane 1a, and a part of the other end face (upper end face) is also formed on the plane 1b.
[0011]
The piston 15 having the piston ring 10 is disposed in the cylinder 9 so as to be movable in the longitudinal direction (vertical direction), and two roller pins 3 are disposed in the piston 15. Two rollers 4 that rotate in contact with the curved surfaces of the two pairs of cams are rotatably supported on the two roller pins 3.
[0012]
The main body including the cylinder 9 is connected to the body 14 by a connection nut 17. The body 14 is formed with a flow path 14a through which fluid flows and a flow path 14b through which fluid flows out.
[0013]
A push spring 2 is disposed along the circumferential surface of the piston 15 between the upper portion of the piston 15 and the connection nut 17. The push spring 2 functions to always press the piston 15 upward when air is not injected into the cylinder 9 via the joint 11.
[0014]
A diaphragm 6 having a hemispherical cross section is disposed at the connection portion between the flow path 14a and the flow path 14b in the upper part of the body 14, and the periphery of the diaphragm 6 is pressed by the diaphragm presser 13. The central part is fixed so that it can move up and down (deform). A packing 5 is disposed around the end face of the flow path 14 a below the diaphragm 6. Further, a diaphragm push pin 16 is disposed at an upper center portion of the diaphragm 6, and a press plate 7 whose upper portion is in contact with the lower end portion of the cam 1 is provided thereon.
[0015]
Since the diaphragm 6 has a spring property, the diaphragm pressing pin 16 and the pressing plate 7 are always pressed upward in FIG. Further, since the presser plate 7 is always pressed upward by the diaphragm 6 and the diaphragm pressing pin 16, the two pairs of cams 1 and 1 always open to the left and right unless the pressing force of the rollers 4 and 4 is applied. The power to be added.
[0016]
2A and 2B show a combined state of a piston and a cam according to the present invention, wherein FIG. 2A is a front sectional view and FIG. 2B is a side sectional view.
[0017]
In FIG. 2, the cam 1 is formed by overlapping four sheets. More specifically, the cam 1 is formed by two pairs of cam elements, that is, a pair of cam elements 1a and 1b disposed on the outer side and a pair of cam elements 1c and 1d disposed on the inner side. ing. The reason why the cam 1 is composed of a pair of cam elements 1a and 1b and another pair of cam elements 1c and 1d is that the force applied to the presser plate 7 of the cam 1 is dispersed to 3 to 4 places on average. This is to extend the life of the cam and the presser plate. Here, the cam elements 1c and 1d may be connected to form one cam element (can be formed by a single plate).
[0018]
Next, the operation of the present invention will be described with reference to FIGS.
[0019]
3 (a) to 3 (d) and FIGS. 4 (a) to 4 (d) are diagrams for explaining the operation of the present invention. Of these, FIGS. 3 (a) to 3 (d) show that the valve is closed. 4A to 4D show sequences when the valve operates from the open state to the closed state, respectively.
[0020]
First, the case of FIG. 3 will be described. In the case of FIG. 3A, air is not injected into the cylinder 9, so that the piston 15 is pushed up to the uppermost position by the spring force of the push spring 2. Yes. Further, the two cams 1 are urged to the most closed state by the corresponding two rollers 4, and the lower ends thereof are measured from the position of the camshaft 8 and are in the longest state. As a result, a maximum force is applied to the presser plate 7 by the cam 1, and therefore, the diaphragm push pin 16 disposed below the presser plate 7 presses the diaphragm 6 with the maximum force, and the diaphragm 6 becomes a flat plate and the packing 5 The flow paths 14 a and 14 b are closed or blocked by the diaphragm 6.
[0021]
Next, in FIG. 3B, air is injected from the tube 12 into the cylinder 9, and the piston 15 begins to drop due to the air pressure. As the piston 15 descends, the roller 4 starts to rotate, and its peripheral surface rolls on the curved surface of the cam 1, whereby the two pairs of cams 1 begin to open. As a result, the tip (lower end) of the cam 1 is actuated in such a direction that the distance from the position of the cam shaft 8 to the lower end decreases, and the presser plate 7 operates so as to gradually move (rise) upward. In FIG. 3C, the same operation as in FIG.
[0022]
When the state shown in FIG. 3D is obtained through the operations shown in FIGS. 3B and 3C, the cylinder 9 is filled with air, and the two pairs of cams 1 are completely opened. At this time, the flat plate 1a at the lower end of the two pairs of cams 1 is brought into contact with the entire upper surface of the presser plate 7 by the pressing force upward of the diaphragm 6, and the presser plate 7 is arranged at the highest value. Diaphragm 6 is restored to its spherical shape by its own restoring force, and as a result of being separated from packing 5, the blocking of the flow path is removed and flow paths 14a and 14b are conducted.
[0023]
4 (a) to 4 (d) are steps reverse to those in FIGS. 3 (a) to 3 (d). That is, FIG. 4A shows a state where the cylinder 9 is filled with air and the flow path is conducted. From this state, air is started to be extracted from the cylinder 9 in FIG. At that time, the piston 15 starts to rise by the pressing spring 2 and the two pairs of cams 1 start to close inwardly. As a result, the distance from the lower end portion of the cam 1 to the camshaft 8 gradually increases, and the presser plate 7 is pressed by the lower end portion of the cam 1 and descends.
[0024]
When the air is completely exhausted from the cylinder through FIGS. 4B and 4C, the state shown in FIG. 4D is obtained. At this time, the piston 15 is completely raised, the distance from the camshaft 8 position of the cam 1 to the lower end of the cam is maximized, and the presser plate 7 pressed by the cam 1 is also at the lowermost position. Therefore, the diaphragm 6 becomes a flat plate and is brought into contact with the packing 5, and as a result, the flow path 14a and the flow path 14b are closed (blocked).
[0025]
【The invention's effect】
The present invention is configured and operates as described above. Therefore, according to the present invention, it is possible to easily configure an automatic diaphragm valve that is extremely small and powerfully operated, especially when used in a clean room. The effect that the apparatus of (1) can be formed compactly is obtained.
[Brief description of the drawings]
1A and 1B are cross-sectional views showing an embodiment of the present invention, in which FIG. 1A is a cross-sectional view showing a state where a valve is opened and a flow path is conducted, and FIG. It is sectional drawing which shows the state which is obstruct | occluded.
FIG. 2 shows a combined state of a piston and a cam used in the present invention, (a) is a front sectional view, and (b) is a side sectional view.
FIGS. 3A to 3D are cross-sectional views showing the operation of the present invention, and are sequence diagrams until a valve is changed from a closed state to an open state.
FIGS. 4A to 4D are cross-sectional views showing the operation of the present invention, and are sequence diagrams until the valve changes from an open state to a closed state.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Cam 2 ... Pressing spring 3 ... Roller pin 4 ... Roller 5 ... Packing 6 ... Diaphragm 7 ... Holding plate 8 ... Cam shaft 9 ... Cylinder 10 ... Piston ring 11 ... Air coupling 12 ... Tube 13 ... Diaphragm presser 14 ... Body 14a, 14b ... Flow path 15 ... Piston 16 ... Diaphragm push pin 17 ... Connector nut between main body and body

Claims (2)

A body having a first flow path for flowing fluid and a second flow path for flowing fluid;
A cylinder connected to the body by a connection nut;
At least a pair of cams rotatably supported on a camshaft fixed to the connection nut and always given a force to spread outwardly;
A piston that is movably disposed in the cylinder and is constantly receiving force in one direction by a push spring;
Two rollers provided in the piston and pivotally supported in correspondence with the cam so as to control the degree of opening to expand outward of the cam according to the movement of the piston;
A plate-shaped presser plate arranged and formed so that one surface side contacts the lower end of the cam;
A diaphragm push pin disposed in contact with the other side of the press plate;
A diaphragm that is deformed by movement of the presser plate in the direction of movement of the piston in the direction of movement of the piston via the diaphragm pushpin and closes or conducts the first and second flow paths;
Further, the cam has a lower end shape in which a distance between a lower end portion of the cam contacting the one surface side of the presser plate and the cam shaft changes as the cam rotates. valve. A surface on which the roller on the outer side in the longitudinal direction of the cam rolls is formed in a curved surface, and a part of the lower end portion of the cam is formed in a flat shape, and the flat portion and the presser plate are connected when the valve is in conduction. 2. The small diaphragm automatic valve according to claim 1, wherein the distance between the lower end portion of the cam and the cam shaft is shortest due to surface contact, and the distance is shortest.

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