JP3838060B2 - Heater lamp - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heater lamp, and more particularly to a heater lamp used for industrial heating.
[0002]
[Prior art]
FIG. 4 shows an example of a heater lamp conventionally used in an industrial heating furnace or the like. In this heater lamp, a filament coil wound in a coil shape is disposed in a tube bulb that is sealed at both ends. As shown in a partially enlarged view of the filament coil in FIG. 5, this filament is formed by winding a filament filament made of tungsten into a coil shape.
[0003]
In recent years, in a semiconductor manufacturing process, a light irradiation type heating device that uses heat including infrared light emitted from a heater lamp to perform processing such as film formation, diffusion, and annealing on a semiconductor wafer is used. . In any of these processes, the semiconductor wafer is heated at a high temperature. However, when used in a light irradiation type heat treatment apparatus, the semiconductor wafer can be rapidly heated. The temperature can be raised to a temperature of ℃ or higher. Moreover, if light irradiation is stopped, it can cool rapidly.
[0004]
A heater lamp used for such an application needs to have a high output. Therefore, it is necessary to wind a large number of filament coils in a small volume of a tubular bulb instead of a single filament coil. Therefore, a heater lamp in which filaments are wound in multiple directions in the bulb tube axis direction has been proposed.
[0005]
However, when multiple filament coils are wound around the bulb tube axis, for example, when using a filament wire with high rigidity, there is no problem, but when the heater lamp has high power and a short light emission length, the filament Larger coil diameter and weakly rigid filament wire may be used, and there is a high risk that the inner filament coil and the outer filament coil will enter each other's pitch, causing the filament coil to be short-circuited (pitch short). There was a problem.
[0006]
[Problems to be solved by the invention]
Therefore, the problem to be solved by the present invention is to provide a structure that suppresses a short circuit of the filament coil in a multi-filament coil heater lamp used for industrial heating.
[0007]
[Means for Solving the Problems]
In order to solve the above problem, the invention according to claim 1 is a heater lamp in which a plurality of filament coils are arranged in a tube axis direction in a tube-type bulb.
The filament coil is made by winding a filament wire into a coil are arranged in multiple in the valve tube axis direction, the A _n outside of the filament _coil, the inner filaments of the outer filament coil A _n A and _n-1, the wire diameter of the filament coil _{a n,} winding pitch of the filament coil _{a n,} and the winding angle of the filament coil _{a n} .phi.A _n respectively, _a n L, and .theta.A _n, the filament coil _{a n-} ΦA _n = ₁ wire diameter, filament coil A _n-1 winding pitch width, and filament coil A _n-1 winding angle are φA _n-1 , A _n-1 L, and θA _{n-1 respectively.} The heater lamp is characterized in that φA _n−1 and An _n L ≠ AL or θA _n ≠ θA _n−1 .
[0008]
In the present application, subscripts n and n−1 of A _n and A _n−1 representing the filament coil indicate the coil arrangement of the multifilament coil, and n = 2 is the filament coil outside the double coil, In the case, _An-1 represents the filament coil inside the double coil. n is n ≧ 2 or more.
[0009]
According to a second aspect of the present invention, in the heater lamp in which a plurality of filament coils are arranged in a tube axis direction in a tube type bulb, the filament coil is formed by winding a filament wire in a coil shape, are arranged in multiple in a direction, the outer filament coil and a _n, the inner filament coil of the outer filament coil a _n and a _n-1, the wire diameter of the filament coil a _n, filament coils a _n winding pitch widths of each .phi.A _n of the _{a n} L, and wire diameter of the filament coil _{a n-1,} the filament coil _{a n-1} of the winding pitch widths respectively and _{φA n-1, a n-} 1 L ΦA _n ≠ φA _n−1 and φA _n > A _n−1 L or φA _n−1 > A _n L and φA _n + A _n L ≠ φA _n−1 + The heater lamp is characterized by being A _n-1 L.
[0010]
[Action]
By adopting the structure of the present invention, the pitch width of the filament coil or the winding angle of the filament coil is made different so that the filament coils do not enter each other's pitch width, thereby preventing a pitch short circuit (short circuit). Illuminance stability can be maintained.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a partial cross-sectional view showing a configuration of a heater lamp according to an embodiment of the present invention.
Here, a description will be given of a heater lamp in which filament coils are arranged in a double manner.
[0012]
In FIG. 1, 1 is a tube bulb of a heater lamp, 2 is an outer filament coil housed in the tube axis direction of the tube bulb 1, and 3 is housed in the tube axis direction of the tube bulb 1 and is an outer filament. An inner filament coil disposed inside the coil 2, 4 is a filament supporter that supports the outer filament coil 2 and the inner filament coil 3 at a plurality of locations in the tubular valve 1, and 5 is provided at both ends inside the tubular valve 1. The inner lead rod connected to the ends of the outer filament coil 2 and the inner filament coil 3 to be provided, 6 is a sealing portion for sealing both ends of the tubular valve 1, and 7 is provided at both ends outside the tubular valve 1 The external lead rod 8 is a metal foil, the external lead rod 7 is connected to one end, and the internal lead rod 5 is connected to the other end. It has been set.
[0013]
In the present application, the filament coil winding angle is defined by the angle between the line connecting the centers of the filament coil cross sections and the center line in the filament coil axial direction, as shown in FIG. Also, the winding pitch width of the filament coil is the interval between adjacent filament coils as shown in FIG. 2, and is not the interval between adjacent filament centers of filament filaments.
[0014]
FIG. 2 shows the positional relationship of the filament coil as an embodiment of the invention of claim 1.
An example of a double filament coil, (n = 2 in _{A n)} is outside of the filament coil _A 2, inner filament coil represents a _(n = 2 in _{A n-1) A 1.}
As an example of the case where the element diameter is φA ₂ = φA ₁ and the pitch width A ₂ L ≠ A ₁ L or the filament coil winding angle θA ₂ ≠ θA ₁ , a heater of 150 V to 2000 W will be described. The strand diameters φA ₂ and φA ₁ of the outer and inner filaments are both 0.272, the pitch width A ₂ L is 0.137, the pitch width A ₁ L is 0.085, and the filament coil winding angle at this time is θA ₂ ≈ 86.2 ° and θA ₁ ≈85.9 °. In this example of a double filament coil with n = 2, _where A _n D and A _n−1 D are filament coil inner diameters representing the diameter of the cylindrical space formed inside the coil, A ₂ D = 2.8. , A ₁ D is 2.2.
[0015]
It was confirmed that by making the heater lamp with the filament coil shown in FIG. 2, the filament coils do not enter each other's pitch width, and pitch short-circuit (short circuit) can be prevented and the illuminance stability of the heater can be maintained. It was.
[0016]
FIG. 3 shows the positional relationship of the filament coil as an embodiment of the invention of claim 2.
This is also an example of a double filament coil.
As an example in the case of φA ₂ ≠ φA ₁ and φA ₂ > A ₁ L or φA ₂ > A ₁ L and φA ₂ + A ₂ L ≠ φA ₁ + A ₁ L, a heater of 200V-2500W is used. State the case. The outer filament has a diameter φA ₂ = 0.265, a pitch width A ₂ L = 0.137, and φA ₂ + A ₂ L = 0.402. Inner filament diameter .phi.A ₁ = 0.272, the pitch width _A 1 L = 0.056, is _{φA 1 + A 1 L = 0.328} .
[0017]
By producing a heater lamp using the filament coil shown in FIG. 3, the filament coils do not enter each other's pitch width as in the case of the embodiment of FIG. 2, and pitch short-circuit (short circuit) is prevented. It was confirmed that the illuminance stability of the heater can be maintained.
[0018]
FIG. 4 shows an example of a triple filament coil as another embodiment of the invention of claim 1. Filament coil outermost _A 3 (n = 3 in _{A n),} of the just inside, _(n = 3 in _{A n-1)} filament coil _A 2 in the middle, innermost filament coil _A 1 ( look just in relation to the outer filament coil _is in _{a n-1} and _{a 1} as n = 2).
[0019]
As an example in the case where the strand diameter φA ₃ = φA ₂ = φA ₁ and the pitch width A ₃ L ≠ A ₂ L ≠ A ₁ L or the filament coil winding angle θA ₁ ≠ θA ₂ ≠ θA ₃ , 200V− The case of a 3000 W heater will be described. The strand diameters φA ₃ , φA ₂ , and φA ₁ of the outer, middle, and inner filaments are all 0.261, the pitch width A ₃ L is 0.360, the pitch width A ₂ L is 0.211, and the pitch width A ₃ L is The filament coil winding angle at this time is θA ₃ ≈83.3 ° and θA ₂ ≈83.5 ° θA ₁ ≈83.6 °. Further, the filament coil inner diameter A ₃ D = 2.4 representing the diameter of the cylindrical space formed inside the coil, A ₂ D is 1.8, and A ₁ D is 1.2.
[0020]
By manufacturing the heater lamp with the filament coil shown in FIG. 4, the filament coils do not enter each other in the pitch width in the same manner as in the embodiments of FIGS. It was confirmed that the illuminance stability of the heater can be maintained.
[0021]
【The invention's effect】
As described above, according to the configuration of the present invention, the filament coil does not enter each other's pitch width, is not short-circuited, and can be a heater lamp that emits uniform heat energy without uneven illuminance. .
[Brief description of the drawings]
FIG. 1 is a partial cross-sectional view showing a configuration of a heater lamp according to an embodiment of the present invention.
FIG. 2 is a partially enlarged view of the configuration of the filament structure of the heater lamp according to one embodiment of the present invention.
FIG. 3 is a partially enlarged view of the configuration of the filament structure of the heater lamp according to the second embodiment of the present invention.
FIG. 4 is a partially enlarged view of a configuration of a filament structure of a heater lamp according to another embodiment of the present invention.
FIG. 5 is a diagram showing an example of a heater lamp used for industrial heating applications according to the prior art.
6 is a partially enlarged view of the filament structure shown in FIG.
[Explanation of symbols]
1 Tubular Valve 2 Outer Filament 3 Inner Filament 4 Filament Supporter 5 Internal Lead Bar 6 Seal Part 7 External Lead Bar

Claims (2)

In the heater lamp in which a plurality of filament coils are arranged in the tube axis direction in the tube type bulb,
The filament coil is made by winding a filament wire into a coil are arranged in multiple in the valve tube axis direction, the A _n outside of the filament _coil, the inner filament coils of the outer filament coil A _n and a _n-1, the wire diameter of the filament coil _{a n,} and winding pitch widths of the filament coils _{a n,} .phi.A _n the winding angle of the filament coil _{a n,} respectively, _a n L, and .theta.A _n, the filament coil _{a n} wire diameter of _-1, filament coils _{a n-1} of the winding pitch, .phi.A the winding angle of the filament coil _{a n-1,} respectively _{n-1, a n-1} L, when the θA _n-1, φA _n = ΦA _n-1 , and A _n L ≠ A _n−1 L or θA _n ≠ θA _n−1 . In the heater lamp in which a plurality of filament coils are arranged in the tube axis direction in the tube type bulb,
The filament coil is made by winding a filament wire into a coil are arranged in multiple in the valve tube axis direction, the A _n outside of the filament _coil, the inner filament coils of the outer filament coil A _n and a _n-1, the wire diameter of the filament coil _{a n,} filament coils _{a n} winding pitch widths of each .phi.A _n of the _{a n} L, the filament wire diameter of the coil _{a n-1,} the filament coil _{a n −1} , when the winding pitch width of the filament coil is φA _n−1 and A _n−1 L, respectively, φA _n ≠ φA _n−1 and φA _n > A _n−1 L or φA _n−1 > a is _n L, and _{φA n + a n L ≠ φA} n-1 + a n-1 heater lamp, which is a L.

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