JP3837883B2 - Pulse power supply - Google Patents

Description

【００３１】
また、タンクの構造は、各実施形態の組み合わせ構造とすることもできる。
【００３２】
【発明の効果】
以上のとおり、本発明によれば、主回路の底板をタンクやシールドカバーの底板と兼用し、さらにタンクの側板と上蓋の一体化や側板と底板と一体化し、ステンレスに代えてアルミ製にするようにしたため、主回路の接地抵抗を小さくして安定化動作を得、高周波ノイズの発生を抑え、組み立てやメンテナンスも容易になる効果がある。
【図面の簡単な説明】
【図１】本発明の実施形態１を示すパルス電源の組み立て構造。
【図２】本発明の実施形態２を示すパルス電源の組み立て構造。
【図３】本発明の実施形態３を示すパルス電源の組み立て構造。
【図４】本発明の実施形態４を示すパルス電源の組み立て構造。
【図５】本発明の実施形態５を示すパルス電源の組み立て構造。
【図６】パルス電源の回路例。
【図７】従来のパルス電源の組み立て構造。
【符号の説明】
１…主回路
２、２Ａ…底板
３、３Ｂ、３Ｂ’…タンクの側板
３Ａ、３Ａ’…タンクの上蓋
３Ｃ…一体化したタンク
４、４Ａ…シールドカバー[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a pulse power source that generates high-voltage, large-current short pulses, and more particularly to an assembly structure in which a main circuit is housed in a tank sealed with insulating oil or the like and further covered with an electromagnetic shield cover.
[0002]
[Prior art]
As a pulse power source for pulse laser excitation, pulse plasma generation, pulse denitration apparatus, etc., there is a combination of a saturable reactor or a saturable transformer that becomes a semiconductor switch and a magnetic switch.
[0003]
FIG. 6 shows a circuit example of a pulse power source in which a semiconductor switch and a saturable reactor are combined. In the figure, a first-stage energy storage capacitor C ₀ is initially charged by a charger DCHV that is a high-voltage DC power source including an inverter and a rectifier circuit. The semiconductor switch SW indicated by GTO is a first-stage switch configured with one semiconductor switching element, its gate control circuit, and a snubber circuit. The saturable reactor SI ₀ serves as a magnetic assist means for reducing the switching loss of the switch SW with a delay until the saturation with respect to the discharge pulse current I _{0 in the} path indicated by the arrow from the capacitor C ₀ when the switch SW is turned on.
[0004]
The pulse transformer PT boosts the pulse voltage applied to the primary winding by the discharge pulse current I ₀ and charges the capacitor C ₁ . The saturable reactor SI ₁ is saturated when the charge of the capacitor C ₁ reaches a predetermined level, becomes a low impedance, and serves as a magnetic pulse compression means that generates a discharge pulse current I ₁ from the capacitor C ₁ to the capacitor C ₂ . Become.
[0005]
Similarly, the saturable reactor SI ₂ will magnetic pulse compression means for generating a discharge pulse current I ₂ to peaking capacitor C _P at the charging capacitor C _2.
[0006]
Peaking capacitor C _P becomes a load of the pulse power source to constitute a laser oscillator with the laser head LH, is a high-pressure charged by the magnetic pulse compression pulse current, supplies a discharge pulse current to the laser head LH in charge up to a certain voltage.
[0007]
The configuration of the pulse power supply is not limited to that shown in FIG. 6, and there are various modifications such as a configuration using a saturable transformer instead of the pulse transformer PT and a configuration in which a plurality of transformers are provided. For the semiconductor switch SW, a thyristor, GTO, IGBT, FET or the like is used.
[0008]
In the pulse power supply having such a configuration, except for the charger DCHV, it is integrated type of matches from the first stage capacitor C ₀ to the peaking capacitor C _P front in one housing.
[0009]
In order to obtain a short pulse by magnetic pulse compression, it is required to minimize the inductance component when the LC oscillation current is generated, so that the circuit elements are arranged at a close distance.
[0010]
FIG. 7 shows an assembly structure in which the main circuit is stored in the tank. The main circuit 1 is assembled on a base aluminum plate 2, which is housed in a stainless steel tank 3, and the tank 3 is filled with insulating oil or perfluorocarbon for insulation and cooling, Cover with stainless steel top lid 3A. Further, an aluminum cover 4 for a magnetic shield is provided on the outer periphery of the tank 3. 5 and 6 are metal spacers.
[0011]
[Problems to be solved by the invention]
In the conventional assembly structure, the ground current of the main circuit 1 flows from the aluminum plate 2 through the tank 3 and the aluminum cover 4.
[0012]
For this reason, the ground resistance becomes large, the ground potential of the main circuit is floated, and there is a possibility that an unstable operation is caused in the connection with the load or the connection with the control circuit. In particular, in a high-performance pulse power supply that requires a sharp pulse output width, the pulse waveform may be distorted.
[0013]
Further, high frequency noise is generated at the joint surface between the aluminum plate 2 of the main circuit 1, the tank 3 and the aluminum cover 4, and the magnetic shield by the aluminum cover 4 becomes large.
[0014]
For assembly, assemble the main circuit on the aluminum plate 2, place it in the tank 3 and attach it, fill it with insulating oil, seal it with the upper lid 3A, and attach the aluminum cover 4 on it. As a result, the number of assembly steps is increased, and it takes time to pull out the main circuit for maintenance.
[0015]
An object of the present invention is to provide a pulse power supply that reduces the ground resistance of a main circuit, suppresses the generation of high-frequency noise, and facilitates assembly and maintenance.
[0016]
[Means for Solving the Problems]
In the present invention, the bottom plate of the main circuit is also used as the bottom plate of the tank or the shield cover, and the tank is changed to an integrated or aluminum product, and has the following assembly structure.
[0017]
An assembly structure of a pulse power source that has a main circuit configured by combining a semiconductor switch and a saturable reactor or a saturable transformer that becomes a magnetic switch, and supplies a short pulse of high voltage / current to a load,
Assembling the main circuit on the aluminum plate as a bottom plate and a ground plate with a thickness of the aluminum plate to obtain the desired mechanical strength and contact resistance reduction,
It has a side plate and an upper lid for housing the main circuit with the aluminum plate as a bottom plate, and constitutes a tank filled with insulating oil or perfluorocarbon for insulation and cooling inside,
The aluminum plate is used as a bottom plate and a magnetic shield is provided by an aluminum cover that covers an outer portion of the tank.
[0018]
The tank is stainless steel or aluminum structure with integrated side plate and the upper cover, or the structure of the side plates integral with the bottom plate, or characterized by structure combining respective structures.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is an assembly structure showing an embodiment of the present invention. In the figure, the aluminum plate 2 which is the base of the main circuit 1 is made thicker than the conventional one in order to reduce mechanical strength and contact resistance, and the main circuit 1 is assembled on this aluminum plate 2. As a bottom plate, a stainless steel side plate 3B and an upper lid 3A constitute a tank. Further, a magnetic shield is constituted by an aluminum cover 4A with the aluminum plate 2 as a bottom plate.
[0020]
According to this assembly structure, the bottom plate of the conventional tank and the bottom plate of the aluminum cover can be omitted, and the aluminum plate 2 serving as the bottom plate of the main circuit 1 can be used in common.
[0021]
As a result, the ground resistance between each circuit element of the main circuit is reduced, and the ground resistance between the load (laser head) can be reduced, and there is no floating of potential between the main circuit circuit elements and between the loads. The generation and compression operation can be stabilized and supplied to the load, and applied to a high-performance pulse power source that requires a sharp pulse output width, and the pulse waveform can be eliminated.
[0022]
As for noise shielding, since only the aluminum plate 2 is interposed in the ground current path, unnecessary contact resistance is eliminated, and generation of high-frequency noise can be suppressed.
[0023]
As for assembly and maintenance, the main circuit 1, the tank side plate 3B, the upper lid 3A, and the aluminum cover 4A can be attached to or removed from the aluminum plate 2 in this order, eliminating the need for extra spacers and simplifying the work. .
[0024]
In addition, there are no extra spacers, bottom plates, etc. in terms of component configuration, and the cost can be reduced.
[0025]
2 to 5 show another embodiment of the present invention. In FIG. 2, the tank side plate 3B and the upper lid 3A of FIG. 1 are integrated into a stainless steel tank 3C. The tank 3C can be created by stainless steel welding. Although this structure is inferior to the case of FIG. 1 in terms of assembly and maintenance, the seal portion of the tank 3C can be reduced.
[0026]
In FIG. 3, instead of the side plate 3B and the upper lid 3A of the tank of FIG. 1, an aluminum side plate 3B ′ and an upper lid 3A ′ are used. In this structure, since the tank is changed from stainless steel to aluminum, the effect of suppressing high frequency noise is enhanced.
[0027]
In FIG. 4, instead of the integrated stainless steel tank 3C of FIG. 2, an integrated aluminum tank 3C ′ is used. The tank 3C ′ can be formed by aluminum welding or cutting, or in the case of mass production by aluminum molding. In the case of this structure, it is possible to increase the noise suppression effect while reducing the seal portion of the tank.
[0028]
In FIG. 5, the tank side plate 3B ′ of FIG. 3 and the bottom plate 2 of the main circuit 1 are integrated into a bottom plate 2A. In the case of this structure, as compared with other structures, since there is no seal portion between the bottom plate and the bottom plate, leakage of insulating oil or the like can be reliably prevented.
[0029]
In each of the above embodiments, the comparison results on the effects are shown in the following table. The double circle symbol in the table indicates “particularly excellent”, “◯” indicates “excellent”, and Δ indicates “inferior compared to others”. In addition, the component cost in the case of FIGS. 3 to 5 is a Δ symbol, but can be a double circle symbol in mass production.
[0030]
[Table 1]

[0031]
Moreover, the structure of a tank can also be made into the combination structure of each embodiment.
[0032]
【The invention's effect】
As described above, according to the present invention, the bottom plate of the main circuit is also used as the bottom plate of the tank or the shield cover, and the tank side plate and the top cover are integrated, or the side plate and the bottom plate are integrated. As a result, the grounding resistance of the main circuit is reduced to obtain a stabilizing operation, the generation of high frequency noise is suppressed, and assembly and maintenance are facilitated.
[Brief description of the drawings]
FIG. 1 shows an assembly structure of a pulse power supply showing Embodiment 1 of the present invention.
FIG. 2 shows an assembly structure of a pulse power supply showing Embodiment 2 of the present invention.
FIG. 3 shows an assembly structure of a pulse power supply showing Embodiment 3 of the present invention.
FIG. 4 is an assembly structure of a pulse power supply showing Embodiment 4 of the present invention.
FIG. 5 shows an assembly structure of a pulse power supply showing Embodiment 5 of the present invention.
FIG. 6 is a circuit example of a pulse power supply.
FIG. 7 shows an assembly structure of a conventional pulse power supply.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Main circuit 2, 2A ... Bottom plate 3, 3B, 3B '... Tank side plate 3A, 3A' ... Tank upper cover 3C ... Integrated tank 4, 4A ... Shield cover

Claims (2)

An assembly structure of a pulse power source that has a main circuit configured by combining a semiconductor switch and a saturable reactor or a saturable transformer that becomes a magnetic switch, and supplies a short pulse of high voltage / current to a load,
Assembling the main circuit on the aluminum plate as a bottom plate and a ground plate with a thickness of the aluminum plate to obtain the desired mechanical strength and contact resistance reduction,
It has a side plate and an upper lid for housing the main circuit with the aluminum plate as a bottom plate, and constitutes a tank filled with insulating oil or perfluorocarbon for insulation and cooling inside,
A pulse power source characterized in that the aluminum plate is used as a bottom plate and a magnetic shield is provided by an aluminum cover that covers an outer portion of the tank.   2. The pulse according to claim 1, wherein the tank has a structure made of stainless steel or aluminum in which the side plate and the upper lid are integrated, a structure in which the side plate is integrated with the bottom plate, or a structure in which these structures are combined. Power supply.

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