JP3831654B2 - Semiconductor device lead electrode cutting apparatus and method - Google Patents

Semiconductor device lead electrode cutting apparatus and method Download PDF

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JP3831654B2
JP3831654B2 JP2001368998A JP2001368998A JP3831654B2 JP 3831654 B2 JP3831654 B2 JP 3831654B2 JP 2001368998 A JP2001368998 A JP 2001368998A JP 2001368998 A JP2001368998 A JP 2001368998A JP 3831654 B2 JP3831654 B2 JP 3831654B2
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die
cutting
lead electrode
semiconductor device
chip
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JP2003170229A (en
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高之 増田
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Ueno Seiki Co Ltd
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Ueno Seiki Co Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、半導体装置のリード電極切断装置及び方法に関し、詳しくは、ダイとパンチを有し、半導体装置のリード電極を所定長さに切断する切断金型と、切断によって発生するリード電極の切屑を回収、除去する切屑回収機構を有する、半導体装置のリード電極切断装置及び方法に関するものである。
【0002】
【従来の技術】
半導体装置のパッケージ技術として、大量生産を意図して、樹脂で半導体素子を封入するレジンモールドパッケージが採用されており、この種の半導体装置にあっては、パッケージ本体から外方に延出する複数のリード電極を備えている。このような半導体装置は、その製造過程で、半導体素子を樹脂で封入した後に、パッケージ本体から外方に向けて延出するリード電極の曲げ加工を行い、さらに、リード電極を所定長さに切断するようになっている。このリード電極切断では、切断金型を利用するのが一般的である。
【0003】
上記のリード電極切断においては切屑が発生する。この切屑が切断金型に付着すると、切断金型の破損、リード電極が所定寸法、所定形状で切断できない欠陥などの問題が発生するため、リード電極切断後に、吸引や気体吹付による吹き飛ばしなどの方法で切屑を除去、回収している。
【0004】
ところが、実際には、切断金型に切屑が強く付着し、吸引やガス吹付によっても切屑の除去、回収できないことが多い。また、切屑の除去や回収の際に吸引力や吹き飛ばし力を強くすると、切屑が飛散してリード電極切断装置各部に付着して残存することが多い。
【0005】
このような問題を解決するため、特開2000−40782号公報には、外力付加手段を設け、リード電極切断時に切屑に対し切屑落下方向に外力を加え、切屑の除去、回収を確実化させようとする技術が開示されている。
また、特開2001−210772号公報には、切断金型を、切屑が1点のみで接触する形状とし、かつ、切屑がその接触点を支点としてそのまわりに回転して、エア吹付などによる切屑除去を容易化する技術が開示されている。
【0006】
ところで、上記のような半導体装置は、長尺のリードフレームに多数搭載されたものから一括して製造されるのが一般的である。そして最近ではより多数の半導体装置を効率よく製造するため、搭載された半導体装置間の間隔が短くなってきている。このような場合、リード電極切断時に生じる切屑の寸法が小さくなり、上記公報に開示された技術を用いても、切屑が除去、回収できない事態が生じる恐れがある。
【0007】
【発明が解決しようとする課題】
そこで、本発明は、このような従来技術の問題点を解消し、リード電極切断時に生じる切屑が短い場合であっても、容易にかつ確実に切屑の除去、回収ができる、半導体装置のリード電極切断装置及び方法を提供することをその課題とする。
【0008】
【課題を解決するための手段】
かかる技術的課題は、本発明によれば、下記の技術的手段の採用により解決される。
(1)ダイとパンチを有し、半導体装置のリード電極を所定長さに切断する切断金型と、切断によって発生するリード電極の切屑を回収、除去する切屑回収機構を有する、半導体装置のリード電極切断装置において、
該ダイが水平方向にスライド可能に構成され、かつ、
該切屑回収機構の該ダイのスライド面に接して設けられ、スライドするダイに付着した切屑に当たり切屑をダイから離脱させる切屑離脱手段を備えていることを特徴とする半導体装置のリード電極切断装置。
(2)ダイとパンチを有する切断金型を用い、半導体装置のリード電極を所定長さに切断するとともに、切断によって発生するリード電極の切屑を回収、除去する、半導体装置のリード電極切断方法において、
該ダイを水平方向にスライドさせ、ダイに付着した切屑を切屑離脱手段に当てることにより、切屑をダイから離脱させることを特徴とする半導体装置のリード電極切断方法。
【0009】
【発明の実施の形態】
以下、本発明の実施の形態を好ましい実施例に基づいて詳述する。
本発明で対象となる半導体装置とは、ミニモールドトランジスタ、IC等の半導体素子などの、リード電極を有し、リードフレームを用いて一括して製造される各種部品を意味する。下記の実施例ではICの場合を例に説明する。
【0010】
図1に本発明の一実施例に係る半導体装置のリード電極切断装置を模式的に示す。図中1は半導体装置(IC)、2は半導体装置1のリード電極、3はパンチ、4は固定治具、5はダイ、6は切屑離脱手段としての切屑ストッパ、7は切屑回収孔、8は切屑である。
【0011】
本実施例のリード電極切断装置における切断金型は、基本的に、パンチ3、固定治具4及びダイ5から構成されている。パンチ3及び固定治具4は図示しない上下動機構により上下動可能になっている。また、ダイ5は処理対象となる半導体装置1に対して、図示しないスライド機構により水平面内にて前後(図中、左右)にスライド可能になっており、半導体装置1の位置合わせを行うガイドの役割を兼用している。パンチ3と固定治具4は、リード電極切断時に半導体装置1を挟んで固定し、その状態で半導体装置1を上昇させ、パンチ3とダイ5によりリード電極2を所定長さに切断するようになっている。
【0012】
また、本実施例のリード電極切断装置における切屑回収機構は、切屑ストッパ6と切屑回収孔7から構成されている。切屑ストッパ6はダイ5をスライドさせ、ダイ5に付着した切屑8を当てて、切屑8をダイ5から離脱させる役割をする。このため切屑ストッパ6はダイ5の下面に接するように設けられ、その水平面内での位置は固定されており、またその先端位置は、ダイ5のリード電極切断時の先端位置よりも後退し、かつ切断前のリード電極2の先端位置よりも後退した位置となるように設定されている。切屑回収孔7はリード電極切断により発生した切屑8を落下させ、回収する孔である。切屑回収孔7内は図示しない吸引機構により吸引させるようにする。この吸引により、ダイ5に付着した切屑8を除去し、切屑回収孔7内に確実に回収される。切屑回収孔7内の吸引は常時行ってもよいし、回収時のみ行ってもよい。
【0013】
次に、上記構成のリード電極切断装置の動作について図2を参照して述べる。先ず、図2(a)に示すように、図示しない搬入手段(真空吸着ノズル等)により半導体装置1を本実施例の切断金型に搬入し、パンチ3の上に載置した後、搬入手段を上昇させ、別の位置に移動させる。次にダイ5を半導体装置1側に前進させ、半導体装置1の水平方向での位置決めを行った後、固定治具4により半導体装置1を固定する(図2(b))。
次にダイ5を切断位置に移動(後退)させ、パンチ3と固定治具4で半導体装置1を固定した状態で上昇させ、パンチ3とダイ5によりリード電極2を所定長さに切断する(図2(c))。リード電極切断後、固定治具4を上昇させ、別の位置に移動させる。その後、図示しない搬出手段(上記搬入手段と同じでも異なっていてもよい)により半導体装置1を次の処理位置に搬出する(図2(d))。このとき、切屑8はダイ5の下面に付着した状態となっている。
上記搬出と同時にダイ5の水平面内での後退を開始し、所定位置まで後退させると、切屑8が切屑ストッパ6に当たり(図2(e))、さらにダイ5を後退させダイ5の先端位置が切屑ストッパ6の先端位置より後側になると、切屑8がダイ5から離脱し、切屑回収孔7内を落下し、回収される(図2(f))。
以上の工程により、リード電極切断時に生じる切屑が短い場合であっても、容易にかつ確実に切屑の除去、回収ができるようになる。
【0014】
以上本発明を実施例に基づいて説明してきたが、本発明は上記実施例に限定されるものではなく、種々の変形、変更が可能である。
例えば、パンチ、ダイ、固定治具、切屑回収孔の形状、配置は例示したものに限定されず、上下逆等とした配置でも構わない。
また、切屑の回収方法は、上記では吸引だけではなく、切屑回収孔の反対側からの気体又は液体の吹付、回収方向への外力、振動の付加、ブラシ等による掃引などでもよい。
さらに、上記ではダイが位置決めのためのガイドを兼ねていたが、別々のものとしてもよい。
【0015】
【発明の効果】
本発明によれば、半導体装置のリード電極切断時に、切屑が付着したダイをスライドさせ、切屑を切屑離脱手段に当てることにより、小さな切屑であっても、確実にかつ容易にダイから離脱させ、確実な切屑の除去、回収が実現できる。
【図面の簡単な説明】
【図1】本発明に従う実施例に係る半導体装置のリード電極切断装置の構造を模式的に示す図である。
【図2】図1の実施例のリード電極切断装置によるリード電極切断動作の工程説明図である。
【符号の説明】
1 半導体装置(IC)
2 リード電極
3 パンチ
4 固定治具
5 ダイ
6 切屑ストッパ
7 切屑回収孔
8 切屑
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor device lead electrode cutting apparatus and method, and more particularly, to a cutting die having a die and a punch and cutting the lead electrode of the semiconductor device to a predetermined length, and lead electrode chips generated by the cutting. The present invention relates to an apparatus and method for cutting a lead electrode of a semiconductor device having a chip collection mechanism for collecting and removing the semiconductor chip.
[0002]
[Prior art]
As a semiconductor device package technology, a resin mold package in which a semiconductor element is encapsulated with a resin is employed for mass production. In this type of semiconductor device, a plurality of pieces are extended outward from the package body. The lead electrode is provided. In such a semiconductor device, after the semiconductor element is encapsulated with resin in the manufacturing process, the lead electrode extending outward from the package body is bent, and the lead electrode is further cut into a predetermined length. It is supposed to be. In this lead electrode cutting, a cutting die is generally used.
[0003]
Chips are generated in the above lead electrode cutting. If this chip adheres to the cutting die, problems such as breakage of the cutting die and defects in which the lead electrode cannot be cut with a predetermined size and shape will occur. Therefore, after cutting the lead electrode, a method such as blowing by suction or gas blowing is used. The chips are removed and recovered.
[0004]
In practice, however, chips are strongly attached to the cutting mold, and it is often impossible to remove and collect chips even by suction or gas blowing. In addition, when the suction force or blowing force is increased during the removal or collection of chips, the chips are often scattered and adhered to each part of the lead electrode cutting device.
[0005]
In order to solve such a problem, Japanese Patent Application Laid-Open No. 2000-40782 is provided with an external force adding means, and when cutting the lead electrode, an external force is applied to the chip in the chip falling direction to ensure chip removal and recovery. The technology is disclosed.
Further, in Japanese Patent Laid-Open No. 2001-210773, a cutting die is shaped so that chips come into contact with only one point, and the chips rotate around the contact point as a fulcrum and are blown by air blowing or the like. A technique for facilitating removal is disclosed.
[0006]
By the way, the semiconductor devices as described above are generally manufactured collectively from those mounted on a long lead frame. Recently, in order to efficiently manufacture a larger number of semiconductor devices, the interval between the mounted semiconductor devices has been shortened. In such a case, the size of the chips generated at the time of cutting the lead electrode becomes small, and even if the technique disclosed in the above publication is used, there is a possibility that the chips cannot be removed and collected.
[0007]
[Problems to be solved by the invention]
Therefore, the present invention eliminates the problems of the prior art, and even if the chips generated at the time of cutting the lead electrode are short, the chip can be easily and reliably removed and collected. It is an object of the present invention to provide a cutting apparatus and method.
[0008]
[Means for Solving the Problems]
According to the present invention, this technical problem is solved by employing the following technical means.
(1) A semiconductor device lead having a die having a die and a punch, and having a cutting die for cutting the lead electrode of the semiconductor device to a predetermined length, and a chip recovery mechanism for recovering and removing chips of the lead electrode generated by the cutting. In the electrode cutting device,
The die is configured to be horizontally slidable, and
2. A lead electrode cutting device for a semiconductor device, comprising: a chip detachment means provided in contact with the slide surface of the die of the chip recovery mechanism and configured to contact the chip attached to the sliding die and release the chip from the die.
(2) In a lead electrode cutting method for a semiconductor device, using a cutting die having a die and a punch, cutting the lead electrode of the semiconductor device to a predetermined length, and collecting and removing chips of the lead electrode generated by the cutting. ,
A method for cutting a lead electrode of a semiconductor device, comprising: sliding the die in a horizontal direction, and applying chips to the chip release means to release chips from the die.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail based on preferred examples.
The semiconductor device that is the subject of the present invention means various components that have lead electrodes such as mini-mold transistors and ICs and that are manufactured together using a lead frame. In the following embodiment, an IC will be described as an example.
[0010]
FIG. 1 schematically shows a lead electrode cutting device for a semiconductor device according to an embodiment of the present invention. In the figure, 1 is a semiconductor device (IC), 2 is a lead electrode of the semiconductor device 1, 3 is a punch, 4 is a fixing jig, 5 is a die, 6 is a chip stopper as a chip detachment means, 7 is a chip collection hole, 8 Is chips.
[0011]
The cutting die in the lead electrode cutting apparatus of the present embodiment basically includes a punch 3, a fixing jig 4 and a die 5. The punch 3 and the fixing jig 4 can be moved up and down by a vertical movement mechanism (not shown). The die 5 is slidable back and forth (left and right in the figure) in a horizontal plane with respect to the semiconductor device 1 to be processed by a slide mechanism (not shown), and serves as a guide for aligning the semiconductor device 1. I also have a role. The punch 3 and the fixing jig 4 are fixed by sandwiching the semiconductor device 1 at the time of cutting the lead electrode, and the semiconductor device 1 is raised in that state, and the lead electrode 2 is cut to a predetermined length by the punch 3 and the die 5. It has become.
[0012]
In addition, the chip collection mechanism in the lead electrode cutting apparatus of the present embodiment includes a chip stopper 6 and a chip collection hole 7. The chip stopper 6 slides the die 5 and applies the chip 8 attached to the die 5 to cause the chip 8 to be detached from the die 5. For this reason, the chip stopper 6 is provided so as to contact the lower surface of the die 5, its position in the horizontal plane is fixed, and its tip position recedes from the tip position of the die 5 when cutting the lead electrode, In addition, the position is set so as to be retracted from the tip position of the lead electrode 2 before cutting. The chip collection hole 7 is a hole for dropping and collecting the chip 8 generated by cutting the lead electrode. The inside of the chip collection hole 7 is sucked by a suction mechanism (not shown). By this suction, the chips 8 attached to the die 5 are removed, and the chips 8 are reliably recovered in the chip recovery holes 7. Suction in the chip collection hole 7 may be performed constantly or only during collection.
[0013]
Next, the operation of the lead electrode cutting apparatus having the above configuration will be described with reference to FIG. First, as shown in FIG. 2A, the semiconductor device 1 is loaded into the cutting die of the present embodiment by a loading means (vacuum suction nozzle or the like) (not shown), placed on the punch 3, and then the loading means. And move it to a different position. Next, the die 5 is advanced to the semiconductor device 1 side, and after positioning the semiconductor device 1 in the horizontal direction, the semiconductor device 1 is fixed by the fixing jig 4 (FIG. 2B).
Next, the die 5 is moved (retracted) to the cutting position, raised while the semiconductor device 1 is fixed by the punch 3 and the fixing jig 4, and the lead electrode 2 is cut to a predetermined length by the punch 3 and the die 5 ( FIG. 2 (c)). After cutting the lead electrode, the fixing jig 4 is raised and moved to another position. Thereafter, the semiconductor device 1 is unloaded to the next processing position by unillustrated unloading means (which may be the same as or different from the above-described loading means) (FIG. 2D). At this time, the chips 8 are attached to the lower surface of the die 5.
Simultaneously with the carrying out, the die 5 starts to be retracted in the horizontal plane, and when the die 5 is retracted to a predetermined position, the chips 8 hit the chip stopper 6 (FIG. 2 (e)), and the die 5 is further retracted so that the tip position of the die 5 is When it comes to the rear side from the tip position of the chip stopper 6, the chip 8 is detached from the die 5, falls in the chip collection hole 7, and is collected (FIG. 2 (f)).
Through the above steps, even when the chips generated when cutting the lead electrode are short, the chips can be easily and reliably removed and collected.
[0014]
The present invention has been described based on the embodiments. However, the present invention is not limited to the above embodiments, and various modifications and changes can be made.
For example, the shape and arrangement of the punch, die, fixing jig, and chip recovery hole are not limited to those illustrated, and may be arranged upside down.
Further, the chip recovery method is not limited to suction as described above, but may be gas or liquid spray from the opposite side of the chip recovery hole, external force in the recovery direction, application of vibration, sweeping with a brush, or the like.
Further, in the above, the die also serves as a guide for positioning, but it may be a separate one.
[0015]
【The invention's effect】
According to the present invention, at the time of cutting the lead electrode of the semiconductor device, by sliding the die to which the chips are attached and applying the chips to the chip removing means, even small chips can be reliably and easily separated from the die, Reliable chip removal and recovery can be realized.
[Brief description of the drawings]
FIG. 1 schematically shows a structure of a lead electrode cutting device for a semiconductor device according to an embodiment of the present invention.
2 is a process explanatory diagram of a lead electrode cutting operation by the lead electrode cutting apparatus of the embodiment of FIG. 1; FIG.
[Explanation of symbols]
1 Semiconductor device (IC)
2 Lead electrode 3 Punch 4 Fixing jig 5 Die 6 Chip stopper 7 Chip recovery hole 8 Chip

Claims (2)

ダイとパンチを有し、半導体装置のリード電極を所定長さに切断する切断金型と、切断によって発生するリード電極の切屑を回収、除去する切屑回収機構を有する、半導体装置のリード電極切断装置において、
該ダイが水平方向にスライド可能に構成され、かつ、
該切屑回収機構の該ダイのスライド面に接して設けられ、スライドするダイに付着した切屑に当たり切屑をダイから離脱させる切屑離脱手段を備えていることを特徴とする半導体装置のリード電極切断装置。
A lead electrode cutting device for a semiconductor device having a die and a punch, a cutting die for cutting the lead electrode of the semiconductor device to a predetermined length, and a chip collecting mechanism for collecting and removing the chip of the lead electrode generated by the cutting In
The die is configured to be horizontally slidable, and
2. A lead electrode cutting device for a semiconductor device, comprising: a chip detaching means provided in contact with the slide surface of the die of the chip collecting mechanism and configured to contact the chips attached to the sliding die and release the chips from the die.
ダイとパンチを有する切断金型を用い、半導体装置のリード電極を所定長さに切断するとともに、切断によって発生するリード電極の切屑を回収、除去する、半導体装置のリード電極切断方法において、
該ダイを水平方向にスライドさせ、ダイに付着した切屑を切屑離脱手段に当てることにより、切屑をダイから離脱させることを特徴とする半導体装置のリード電極切断方法。
In a lead electrode cutting method for a semiconductor device, using a cutting die having a die and a punch, cutting the lead electrode of the semiconductor device to a predetermined length, and collecting and removing chips of the lead electrode generated by the cutting,
A method of cutting a lead electrode of a semiconductor device, wherein the chip is detached from the die by sliding the die in a horizontal direction and applying the chips adhering to the die to the chip removing means.
JP2001368998A 2001-12-03 2001-12-03 Semiconductor device lead electrode cutting apparatus and method Expired - Fee Related JP3831654B2 (en)

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