JP3790898B2 - Method for producing metal ultrafine particles - Google Patents
Method for producing metal ultrafine particles Download PDFInfo
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- JP3790898B2 JP3790898B2 JP2002275947A JP2002275947A JP3790898B2 JP 3790898 B2 JP3790898 B2 JP 3790898B2 JP 2002275947 A JP2002275947 A JP 2002275947A JP 2002275947 A JP2002275947 A JP 2002275947A JP 3790898 B2 JP3790898 B2 JP 3790898B2
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- metal particles
- plasma
- ultrafine metal
- particles
- fine particles
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Description
【０００１】
【発明の属する技術分野】
本発明は、大気中でも酸化しにくい金属超微粒子の製造方法である。
【０００２】
【従来の技術及び発明が解決しようとする課題】
現在多くの電子機器の導線として、導電性ペーストが使用されている。このペーストの中には金属粒子が分散されており、ペーストの揮発成分を蒸発させることにより、任意の形状の導線が作製できる。電子部品の小型化の要求により、このペースト厚も薄膜化が要求されているが、そのためにはペースト中の金属粒子の粒径を小さくすることが必要とされていた。
【０００３】
一方、金属粒子を小さくすると、比表面積が大きくなり、酸化速度が増大する。このため、金属微粒子は高価な不活性ガス中で保存する必要があり、金属微粒子の作製とその保存は困難であった。このため、金属微粒子の作製、ひいては電子部品の小型化への大きな障害となっていた。
【０００４】
本発明は、電子部品小型化のための導電ペースト中金属微粒子の粒径低下が求められていることに着目し、酸化しにくい金属微粒子を作製することが技術的課題である。
【０００５】
【課題を解決するための手段】
添付図面を参照して本発明の要旨を説明する。
【０００６】
ニッケル若しくは銅を含む金属細線にパルス大電流を通電し、この際に生じるプラズマを急冷することにより金属超微粒子を作製する金属超微粒子の製造方法であって、前記プラズマを急冷することによる金属超微粒子の作製若しくは前記プラズマを急冷して作製した金属超微粒子の回収を、油の霧の中で行うことで、油で表面が被覆された粒径が５〜１００ｎｍの金属超微粒子を製造することを特徴とする金属超微粒子の製造方法に係るものである。
【０００７】
【発明の実施の形態】
好適と考える本発明の実施の形態（発明をどのように実施するか）を、図面に基づいてその作用効果を示して簡単に説明する。
【０００８】
金属細線にパルス電流を通電することにより、金属プラズマを発生させ、これを油の霧の中で急冷することにより油被膜を有する金属超微粒子を作製した。
【０００９】
【実施例】
本発明の具体的な実施例について図面に基づいて説明する。
【００１０】
直径０.２５ｍｍ、長さ４５ｍｍの銅線を、圧力２００Ｔｏｒｒのアルゴンガスおよび鉱物油の霧を充填したチャンバーに設置した。これを６ｋＶに充電した容量２０μＦのコンデンサーに接続し、パルス大電流放電によって銅線を加熱・プラズマ化させた。プラズマの冷却によって作製した微粒子は、フィルターを介して脱気することにより回収した。
【００１１】
図１に作製した微粒子の透過型電子顕微鏡写真を示す。直径５〜１００ｎｍの微粒子が作製できた。
【００１２】
図２にこの微粒子を室温大気中に３ヶ月保存し、その後測定した粉末Ｘ線回折図形を示す。すべてのピークは金属銅のそれに一致した。一方、酸化物は検出されなかった。
【００１３】
図３にこの微粒子の電子回折図形と高分解能透過型電子顕微鏡写真を示す。回折図形中に回折ピークが観察され、図１と同様、すべての回折ピークは金属銅のそれと一致した。顕微鏡写真には黒い直径５０ｎｍの金属銅微粒子が写っており、その外側には、薄い色で厚さ約１０ｎｍの被覆が写っている。色が薄いことからこれは有機物からなっていることがわかる。この有機物（油）被覆によって酸化しやすい銅微粒子が、室温、大気中で３ヶ月間金属状態を保ったことがわかった。
【００１４】
尚、本発明は、本実施例に限られるものではなく、各構成要件の具体的構成は適宜設計し得るものである。
【００１５】
【発明の効果】
本発明は上述のように構成したから、高密度プラズマから高速で微粒子が製造でき、しかも、よりコストの安いニッケル、銅の使用を可能にして、表面が油で被覆され、室温、大気中で酸化しにくい金属微粒子を安価に作製できることとなった。
【図面の簡単な説明】
【図１】 本実施例における微粒子の透過型電子顕微鏡写真である。
【図２】 本実施例における微粒子の粉末Ｘ線回折図形である。
【図３】 本実施例における微粒子の電子回折図形と高分解能透過型電子顕微鏡写真である。[0001]
BACKGROUND OF THE INVENTION
The present invention is a method for producing a hardly oxidized metal ultrafine fine particles in the atmosphere.
[0002]
[Prior art and problems to be solved by the invention]
Currently, conductive paste is used as a conductor of many electronic devices. Metal particles are dispersed in the paste, and a conductor having an arbitrary shape can be produced by evaporating the volatile components of the paste. Due to the demand for miniaturization of electronic parts, this paste thickness is also required to be thin. For this purpose, it is necessary to reduce the particle size of the metal particles in the paste.
[0003]
On the other hand, when the metal particles are made smaller, the specific surface area is increased and the oxidation rate is increased. For this reason, it is necessary to store the metal fine particles in an expensive inert gas, and it is difficult to produce and store the metal fine particles. For this reason, it has been a major obstacle to the production of metal fine particles and consequently to the miniaturization of electronic components.
[0004]
The present invention focuses on the need to reduce the particle size of metal fine particles in a conductive paste for downsizing electronic components, and it is a technical problem to produce metal particles that are difficult to oxidize.
[0005]
[Means for Solving the Problems]
The gist of the present invention will be described with reference to the accompanying drawings.
[0006]
A method for producing ultrafine metal particles, in which a pulsed current is applied to a fine metal wire containing nickel or copper, and the plasma generated at this time is rapidly cooled, and the ultrafine metal particles are produced by rapidly cooling the plasma. Production of ultrafine metal particles having a particle diameter of 5 to 100 nm whose surface is coated with oil is performed by producing fine particles or collecting ultrafine metal particles produced by quenching the plasma in an oil mist. The present invention relates to a method for producing ultrafine metal particles .
[0007]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention (how to carry out the invention) considered to be suitable will be briefly described with reference to the drawings, showing its effects.
[0008]
By applying a pulse current to the fine metal wire, a metal plasma was generated, and this was quenched in an oil mist to produce ultrafine metal particles having an oil coating.
[0009]
【Example】
Specific embodiments of the present invention will be described with reference to the drawings.
[0010]
A copper wire having a diameter of 0.25 mm and a length of 45 mm was placed in a chamber filled with argon gas at a pressure of 200 Torr and a mist of mineral oil. This was connected to a capacitor having a capacity of 20 μF charged to 6 kV, and the copper wire was heated and turned into plasma by pulsed high current discharge. Fine particles produced by cooling the plasma were recovered by deaeration through a filter.
[0011]
FIG. 1 shows a transmission electron micrograph of the produced fine particles. Fine particles having a diameter of 5 to 100 nm were prepared.
[0012]
FIG. 2 shows a powder X-ray diffraction pattern obtained by storing these fine particles in room temperature atmosphere for 3 months and then measuring them. All peaks matched that of metallic copper. On the other hand, no oxide was detected.
[0013]
FIG. 3 shows an electron diffraction pattern and a high-resolution transmission electron micrograph of the fine particles. Diffraction peaks were observed in the diffraction pattern, and all diffraction peaks coincided with those of metallic copper, as in FIG. The micrograph shows a metallic copper fine particle with a black diameter of 50 nm, and a thin coating with a thickness of about 10 nm is shown on the outside. The light color indicates that it is made of organic matter. It was found that the copper fine particles that are easily oxidized by the organic substance (oil) coating maintained a metal state for 3 months at room temperature in the atmosphere.
[0014]
Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.
[0015]
【The invention's effect】
Since the present invention is configured as described above , fine particles can be produced at high speed from high-density plasma, and nickel and copper can be used at a lower cost, and the surface is coated with oil, at room temperature and in the atmosphere. It became possible to produce metal microparticles that are difficult to oxidize at low cost.
[Brief description of the drawings]
FIG. 1 is a transmission electron micrograph of fine particles in the present example.
FIG. 2 is a powder X-ray diffraction pattern of fine particles in this example.
FIG. 3 is an electron diffraction pattern of a fine particle and a high-resolution transmission electron micrograph in this example.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002275947A JP3790898B2 (en) | 2002-09-20 | 2002-09-20 | Method for producing metal ultrafine particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002275947A JP3790898B2 (en) | 2002-09-20 | 2002-09-20 | Method for producing metal ultrafine particles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004107784A JP2004107784A (en) | 2004-04-08 |
| JP3790898B2 true JP3790898B2 (en) | 2006-06-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002275947A Expired - Fee Related JP3790898B2 (en) | 2002-09-20 | 2002-09-20 | Method for producing metal ultrafine particles |
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| Country | Link |
|---|---|
| JP (1) | JP3790898B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012153551A (en) * | 2011-01-25 | 2012-08-16 | Nagaoka Univ Of Technology | Metal-supporting boron nitride nanostructure, and method for producing the same |
-
2002
- 2002-09-20 JP JP2002275947A patent/JP3790898B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012153551A (en) * | 2011-01-25 | 2012-08-16 | Nagaoka Univ Of Technology | Metal-supporting boron nitride nanostructure, and method for producing the same |
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| Publication number | Publication date |
|---|---|
| JP2004107784A (en) | 2004-04-08 |
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