JP3783556B2 - Thin film assembly, liquid coating apparatus, and liquid coating method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a liquid coating apparatus, and more particularly to a thin film assembly having a thin film wetted by a liquid, and a liquid coating apparatus and a liquid coating method for applying a liquid to a wet film.
[0002]
[Prior art]
Conventionally, an apparatus has been proposed in which the thickness of the catalyst applied to the electrode material is made uniform and the applied catalyst is dried at an early stage (for example, Japanese Patent Publication No. 6-90928). The coated electrode material is passed through a non-heated roller with adjusted thickness to make the thickness of the catalyst layer applied to the electrode material uniform, and this is heated through a roller heated to a temperature suitable for drying the catalyst. Then, it is dried in a dryer controlled at a temperature suitable for drying the catalyst.
[0003]
There has also been proposed a method of applying an ink prepared by dispersing a catalyst in a solvent to a thin film that exhibits proton conductivity in a wet state (for example, Japanese Patent Application Laid-Open No. 5-507583). In this method, ink prepared by dispersing a catalyst in a solvent is directly applied to a thin film, and the ink is dried by heating and suction.
[0004]
[Problems to be solved by the invention]
However, in these apparatuses, the performance of the thin film may be deteriorated. When a liquid is applied to a thin film to be wet and the thin film wet by this application is heated and dried, the shape of the thin film changes due to the wet or dry of the thin film. A change in the shape of the thin film, for example, a change in thickness, has a great influence on the use of the thin film. As an example, consider the case where a catalyst layer used for electrode reaction is applied to a proton-conductive thin film in a wet state used as an electrolyte for fuel cells. In addition, it is known that the performance of the fuel cell itself is greatly affected.
[0006]
One object of the liquid coating apparatus of the present invention is to maintain the performance of the thin film by reducing deformation due to the liquid coating of the thin film. Another object of the liquid coating apparatus of the present invention is to make the apparatus compact. Furthermore, it is an object of the liquid coating apparatus of the present invention to apply a liquid to both surfaces of the thin film while reducing deformation of the thin film.
[0007]
An object of the liquid coating method of the present invention is to provide a method for reducing deformation due to liquid coating of a thin film. Another object of the liquid application method of the present invention is to provide a method of applying a liquid to both surfaces of the thin film while reducing deformation of the thin film.
[0008]
[Means for solving the problems and their functions and effects]
Liquid applying apparatus and a liquid coating method of the present invention employs the following means in order to achieve at least part of the above objects.
[0013]
The liquid coating apparatus of the present invention is
A liquid application apparatus for applying a liquid to a thin film in the thin film assembly of the present invention,
When the thin film joined body is supplied so as to be in a predetermined direction, a conveying means for sucking and heating the surface of the thin film joined body on the support film side, and
The gist of the present invention is to provide an application means for applying the liquid to one surface on the thin film side of the transported thin film assembly.
[0014]
In this liquid coating apparatus of the present invention, when the thin film joined body is supplied so as to be in a predetermined direction, the transport means sucks the surface of the thin film joined body on the support film side and transports it while heating, and the coating means transports. The liquid is applied to one surface on the thin film side of the thin film joined body conveyed by the means. Since the thin film is supported by the support film, deformation can be further reduced even when wet. Further, if the support film is formed of a heat-resistant resin, the deformation can be reduced even when the wet thin film is heated and dried.
[0015]
Such a liquid coating apparatus of the present invention may further include a peeling means for peeling the support film from the thin film assembly coated by the coating means. In this way, the thin film coated with the liquid can be taken out from the thin film assembly.
[0016]
In the liquid coating apparatus of the present invention, the transport unit includes a belt having a plurality of suction holes on the surface and transporting the thin film assembly around the surface, and a heating unit capable of heating the belt. And a support member that generates negative pressure in the plurality of suction holes of the belt. In this aspect of the liquid application apparatus according to the present invention, the support members are arranged at both ends of the belt, and a plurality of suction members that suck and circulate the belt and generate negative pressure in the suction holes of the sucked belt. It is also possible to provide two rotating members having a plurality of suction holes. Moreover, in the liquid application apparatus of the present invention of this aspect, the support member may include a plurality of rolling elements that come into contact with the belt and rotate as the belt rotates. In this way, the thin film can be transported with less power.
[0017]
Furthermore, the liquid coating apparatus of the present invention may further include a supply / exhaust unit that supplies and exhausts air to and from the coating surface of the thin film. In this way, the wet thin film can be dried at an early stage. In this aspect of the liquid application apparatus of the present invention, the air supply / exhaust means may be disposed at a position opposite to the position where the application means is disposed with the position of the transport means as the center. In this way, the wet thin film can be dried quickly and the apparatus can be made more compact.
[0018]
In the liquid application apparatus according to the aspect of the invention including the peeling unit, the liquid membrane is applied to the thin film assembly supplied so as to be in the predetermined direction, and the thin film assembly is opposite to the predetermined direction. When the thin film composite is supplied with its surface turned upside down so as to be in the direction, the second means identical to the conveying means for sucking and heating while heating the one surface of the thin film coated with the liquid by the coating means. The peeling means is a means for peeling the support film in a state where the one surface of the thin film is sucked by the second transport means, and the peeling means further removes the support film. A second coating means for coating the liquid on the other surface opposite to the one surface of the peeled thin film may be provided. If it carries out like this, a liquid can be apply | coated to both surfaces, reducing the deformation | transformation by the liquid application of a thin film more. In this aspect of the liquid coating apparatus of the present invention, the transport unit and the second transport unit are disposed to face each other substantially horizontally, and the thin film is interposed between the transport unit and the second transport unit. A supply unit that supplies the joined body to the transport unit and a recovery unit that recovers the thin film transported from the second transport unit may be provided. In this way, the device can be made compact.
[0019]
In the liquid coating apparatus of the present invention, the coating unit may be a unit that sprays and applies the liquid onto the thin film.
[0020]
In the liquid coating apparatus of the present invention, the liquid may be a liquid obtained by dispersing carbon powder supporting a catalyst in a solvent.
[0021]
The liquid application method of the present invention includes:
A liquid application method for applying a liquid to a thin film to be wetted,
An adhering step of adhering a support film supporting the thin film to the thin film;
A transporting step of sucking and heating the thin film to which the support film is bonded from the support film side; and
An application step of applying the liquid to one surface of the thin film conveyed together with the support film;
A gist is provided with a peeling step of peeling the thin film coated with the liquid and the support film.
[0022]
In the liquid coating method of the present invention, the support film that supports the thin film is adhered to the thin film, and in this state, the thin film is transported while being sucked and heated, and after the liquid is applied to the thin film, the support film is peeled off. A thin film with less deformation due to can be produced.
[0023]
In such a liquid coating method of the present invention, the second transporting step of sucking and transporting one surface of the thin film coated with the liquid in the coating step, and the other surface of the thin film transported And a second application step of applying the liquid. By doing so, it is possible to manufacture a thin film coated with liquid on both sides without causing deformation of the thin film.
[0024]
In the liquid coating method of the present invention, the peeling step may be a step of peeling in a state where one surface of the thin film is sucked by the second transporting step. In this way, the thin film is not damaged when the support film is peeled off.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described using examples. FIG. 1 is a configuration diagram showing an outline of the configuration of a liquid coating apparatus 10 according to an embodiment of the present invention, and FIG. 2 schematically shows a cross section of a single-side coating apparatus 20 provided in the liquid coating apparatus 10 of the embodiment. It is sectional drawing shown. As shown in the drawing, the liquid coating apparatus 10 of the embodiment has a catalyst layer 28 (see FIG. 2) on one surface of the two-layer thin film assembly 24 composed of a thin film 22 to be wet and a support film 23 supplied by a roll 12. ) By coating, a support film peeling device 30 for peeling the support film 23 from the thin film assembly 24 in which the catalyst layer 28 is formed on one side of the thin film 22, and a single stage coating device 20. And a single-side coating apparatus 20B that forms a catalyst layer 28 on the other surface of the thin film 22 from which the support film 23 has been peeled off. The thin film 22 having the catalyst layer 28 formed on both sides by the single-side coating apparatuses 20 and 20B is collected by the roll 16. The liquid coating apparatus 10 includes tension rolls 13, 14, and 15 that apply a slight tension so that the thin film assembly 24 and the thin film 22 are stretched and supplied to the single-side coating apparatuses 20, 20B and the roll 16. Is provided.
[0026]
In the embodiment, the thin film 22 is formed of a polymer material showing good proton conductivity in a wet state, for example, a perfluorosulfonate ionomer (trade name “Nafion” manufactured by DuPont) to a thickness of about 10 to 300 μm. Is used. In the catalyst layer 28, an ink 27 prepared by dispersing carbon powder carrying a catalyst made of platinum or an alloy of platinum and another metal in ethanol is applied to the thin film 22 by spraying using a spray coating machine 26 as a coating means. And dried to form. The thin film 22 having the catalyst layer 28 formed on both sides thereof is used as a power generation layer of a polymer electrolyte fuel cell.
[0027]
The support film 23 is formed of a heat-resistant resin, for example, a fluorine resin such as polytetrafluoroethylene so as to have the same thickness as the thin film 22. The support film 23 and the above-described thin film 22 are overlapped and applied to form a two-layer thin film assembly 24. The degree of adhesion between the thin film 22 and the support film 23 when forming the thin film assembly 24 is such that the thin film 22 can be transported together with the support film 23 in an adhered state, and after the ink 27 is applied, the support film is not damaged. It is adjusted to such an extent that 23 can be peeled off.
[0028]
As shown in FIG. 2, the single-side coating apparatus 20 includes a transporter 40 that circulates and transports in a U shape while holding the support film 23 side of the thin film assembly 24, and the thin film 22 of the thin film assembly 24 that is transported. A spray applicator 26 that applies ink 27 to one side of the side by spraying, and an upper drying duct 50 and a lower drying duct 52 that promote drying of the applied ink 27 are provided. In the embodiment, the ink 27 is applied by the spray applicator 26 in four steps, and the spray applicator 26 and the upper drying duct 50 provided immediately after the application are set. Four stations are continuously arranged in the transport direction. Of course, the ink 27 may be applied only once, or may be divided into two times, three times, or five times. At this time, the number of stations is determined according to the number of times of application. The lower drying duct 52 is disposed at a position (lower side in the figure) opposite to the position (upper side in the figure) of the spray applicator 26 with the position of the transport device 40 as the center. That is, the lower drying duct 52 is formed as a linear duct extending in the conveying direction from the U-shaped folding position by the conveying device 40 after the spray coating device 26 is applied, and is applied to the thin film 22. The ink 27 can be completely dried.
[0029]
As shown in FIG. 2, the transporter 40 includes a transport belt 42 having a plurality of pores 44 formed on the entire surface, a support base 60 that supports the transport belt 42, and a transport belt feed roll 46 that moves the transport belt 42. With.
[0030]
The support base 60 is formed with a hollow space 62 and an air suction path 64 communicating from the space 62 to the upper surface and the lower surface. The air suction path 64 becomes negative pressure by sucking the empty chamber 62 with a suction blower (not shown). FIG. 3 is an explanatory diagram for explaining the structure of the support base 60. As shown in FIG. 3, a plurality of rolling elements 67 and rolling bearings 68 that rotatably support the rolling elements 67 are provided on the upper and lower surfaces of the support base 60. The upper surface can be moved with low friction. A space formed by the support base 60 and the conveyor belt 42 is connected to an air suction path 64 so that negative pressure is introduced. Therefore, when the thin film assembly 24 is placed on the moving conveyor belt 42, the thin film assembly 24 is attracted and moved by the plurality of pores 44 formed in the conveyor belt 42.
[0031]
In addition, the support base 60 is provided with a heater 66 so that the transport belt 42 can be heated. Therefore, the heated transport belt 42 sucks the thin film 22 so that the wet thin film 22 can be dried. The heater 66 is adjusted to a temperature suitable for drying the ink 27 within a range where the surface temperature of the conveyor belt 42 does not affect the performance of the thin film 22.
[0032]
FIG. 4 is an explanatory view illustrating the structure of the transport belt feed roll 46. As shown in the drawing, the conveyance belt feeding roll 46 has a cylindrical vacant chamber 47 formed therein, and a suction hole 48 communicating with the vacant chamber 47 is formed on the outer peripheral surface. The diameter of the suction hole 48 is formed to be large so as to include the pore 44 of the transport belt 42. If the vacant chamber 47 connected to the suction hole 48 is sucked by a suction blower (not shown), a negative pressure is formed in the suction hole 48, and the conveyance belt 42 is sucked and a negative pressure is formed in the pore 44. It is like that. Therefore, the conveyor belt 42 can be moved while the thin film assembly 24 is sucked by rotating the conveyor belt feed roll 46 in this state. At this time, since the support base 60 supports the conveyor belt 42 via the rolling elements 67 that rotate with low friction, the conveyor belt 42 can be moved with less power.
[0033]
The single-side coating apparatus 20B is configured as the same as the single-side coating apparatus 20 in the previous stage, and is disposed substantially horizontally facing the single-side coating apparatus 20 as shown in FIG. Between the single-side coating apparatus 20B and the single-side coating apparatus 20, a roll 12 for supplying the thin film assembly 24 and a roll 16 for collecting the liquid-coated thin film 22 are disposed. In addition, about each structure of the single-side coating apparatus 20B, since it is the same as the structure of the single-side coating apparatus 20 of the front | former stage, the same number is attached | subjected and the description is abbreviate | omitted.
[0034]
The support film peeling device 30 is installed in the vicinity of the conveyance start of the conveyance belt 42 of the single-side coating apparatus 20B so as to sandwich the thin film assembly 24 by the conveyance belt 42, and a support film peeling roll 32 that peels the support film 23. And a roll 34 for recovering the peeled support film 23. Since the support film 23 is peeled off while being sucked by the conveyor belt 42, the thin film 22 is not damaged by the peeling. The support film peeling apparatus 30 is provided with a tension roll 36 so that the support film 23 is supplied to the roll 34 in a stretched state. Such a support film peeling apparatus 30 is disposed between the single-side coating apparatus 20 and the single-side coating apparatus 20B.
[0035]
The operation of applying the ink 27 of the liquid applying apparatus 10 configured in this way will be described. First, the two-layer thin film assembly 24 composed of the thin film 22 and the support film 23 supplied from the roll 12 is sucked by the transport belt 42 of the single-side coating apparatus 20 from the surface on the support film 23 side, and the transport is started. An ink 27 is applied to one surface of the thin film 22 by the spray application machine 26. At this time, the thin film 22 is wetted by the ink 27, but is quickly dried by heating from the conveyor belt 42 by the heater 66 and supply / exhaust by the upper drying duct 50. After the application and drying of the ink 27 are repeated by the four spray coating machines 26 and the upper drying duct 50, the ink 27 is folded back and conveyed in a folded state. In the return conveyance, the thin film 22 wetted by the ink 27 is completely dried by supplying and exhausting air from the lower drying duct 52. When coating is performed by the preceding single-side coating device 20, the surface of the thin film assembly 24 on the thin film 22 side (the surface coated by the preceding single-side coating device 20) is then transported by the subsequent single-side coating device 20B. The suction is started by 42 and the conveyance is started. When one surface of the thin film assembly 24 on the thin film 22 side is sucked, only the support film 23 is peeled off from the thin film assembly 24 by the support film peeling roll 32 sandwiched by the transport belt 42 of the single-side coating apparatus 20B. After the support film 23 has been peeled off, the ink 27 is applied to the other surface of the thin film 22 (the surface from which the support film 23 has been peeled off) by the spray coater 26. At this time, the thin film 22 is dried by the heater 66, the upper drying duct 50, and the lower drying duct 52 as in the case of the single-side coating apparatus 20 in the previous stage. In this way, the ink 27 is applied to both surfaces of the thin film 22 to form the catalyst layer 28. It should be noted that the downstream single-side coating device 20B is aligned with the catalyst layer 28 formed on the one side of the thin film 22 by the single-side coating device 20 so that the catalyst layer 28 formed on the other surface of the thin film 22 by the downstream single-side coating device 20B is aligned. The application timing of the ink 27 by the spray applicator 26 is adjusted.
[0036]
According to the thin film joined body 24 of the embodiment described above, the support film 23 that supports the thin film 22 to be wetted is attached to the thin film 22, so that even when the thin film 22 is wetted, deformation thereof can be further reduced. Moreover, since the support film 23 is formed of a heat-resistant resin, the deformation of the thin film 22 can be further reduced even when the wet thin film 22 is dried by heating.
[0037]
According to the liquid coating apparatus 10 of the embodiment, since the ink 27 is applied in a state where the support film 23 supporting the thin film 22 to be wetted is applied to the thin film 22, both surfaces of the wet thin film 22 are not deformed. The catalyst layer 28 can be formed. Moreover, since the support film 23 is formed of a heat-resistant resin, the deformation of the thin film 22 can be reduced even when the wet thin film 22 is dried by heating. As a result, a high-performance fuel cell can be configured using the thin film 22 having the catalyst layer 28 formed on both sides. In addition, after one surface of the thin film 22 of the thin film assembly 24 is applied, the support film 23 is peeled off while the one surface is sucked by the conveying belt 42 of the single-side coating apparatus 20B, and therefore the thin film 22 is removed when the support film 23 is peeled off. There is no harm.
[0038]
Further, according to the liquid coating apparatus 10 of the embodiment, the single-side coating apparatus 20 and the subsequent single-side coating apparatus 20B are disposed so as to face each other substantially horizontally, and the roll 12 is disposed between the single-side coating apparatus 20 and the single-side coating apparatus 20B. Since the support film peeling apparatus 30 and the roll 16 are disposed, the apparatus can be made compact.
[0039]
Further, according to the liquid coating apparatus 10 of the embodiment, since the lower drying duct 52 is provided in the folded conveyance portion of the conveyance device 40 of the single-side coating apparatus 20 and the single-side coating apparatus 20B, the folding conveyance after the application of the ink 27 is performed. In the process, the coated surface of the thin film 22 can be dried more quickly. As a result, the length of the conveyor belt 42 of the conveyor 40 can be shortened, and the apparatus can be made compact.
[0040]
In the liquid application apparatus 10 of the embodiment, the ink 27 is applied to both surfaces of the thin film 22, but the ink 27 may be applied to only one surface of the thin film 22. In this case, a configuration without the subsequent single-side coating apparatus 20B may be used. However, when the thin film 22 and the support film 23 are peeled from the thin film assembly 24 after the ink 27 is applied, for example, a thin film is used instead of the single-side coating apparatus 20B. A roll or the like that can hold the bonded body 24 on the thin film 22 side is disposed, and the support film 23 may be peeled off by the support film peeling roll 32 in a state where the thin film 22 side is held by this roll. Of course, the support film 23 may not be peeled off.
[0041]
Further, in the liquid coating apparatus 10 of the embodiment, the single-side coating apparatus 20 and the subsequent single-side coating apparatus 20B are disposed so as to face each other substantially horizontally, and the support film peeling apparatus 30 and the rolls 12 and 16 are disposed therebetween. However, any arrangement may be used as long as it does not place a burden on the thin film 22 during the conveyance process. An example of the arrangement of the liquid application device 110 is shown in FIG. As shown in FIG. 5, the single-side coating apparatus 120B at the rear stage is disposed slightly opposite to the lower side so that the direction of the start of conveyance coincides with the direction of conveyance after the application of the single-side coating apparatus 120 at the front stage. ing. If it carries out like this, the burden concerning the thin film 22 can be lessened in the process of conveying from the single-side coating apparatus 120 to the single-side coating apparatus 120B, and the deformation | transformation can be lessened.
[0042]
Furthermore, in the liquid coating apparatus 10 of the embodiment, the thin film assembly 24 in which the thin film 22 and the support film 23 are applied in advance is supplied from the roll 12 to the single-side coating apparatus 20, but the thin film 22 and the support film 23 are used. It is good also as what takes out separately and makes both contact | abut and supply to the single-side coating apparatus 20. FIG.
[0043]
In the liquid coating apparatus 10 of the embodiment, the upper drying duct 50 and the lower drying duct 52 are provided. However, only one of them may be provided, or these may not be provided.
[0044]
Further, in the liquid coating apparatus 10 of the example, a film formed of a polymer material used as an electrolyte of the fuel cell is used as the thin film 22 and the ink 27 for forming the catalyst layer 28 is applied to the thin film 22. However, any film may be used as long as it is the thin film 22, and any ink may be used as the ink 27 to be applied.
[0045]
The embodiments of the present invention have been described using the embodiments. However, the present invention is not limited to these embodiments and can be implemented in various forms without departing from the gist of the present invention. Of course you get.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an outline of a configuration of a liquid coating apparatus 10 according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view schematically showing a cross section of the single-side coating apparatus 20;
FIG. 3 is an explanatory diagram for explaining a partial structure of a support base 60 of the transport machine 40;
FIG. 4 is an explanatory view illustrating the structure of a transport belt feed roll 46 of the transport machine 40.
FIG. 5 is an explanatory view illustrating the arrangement of a liquid application device 110 according to a modification.
[Explanation of symbols]
10, 110 Liquid coating device, 12, 16, 34, 112, 116 roll, 13, 14, 15, 36 tension roll, 20, 20B, 120, 120B single-side coating device, 22 thin film, 23 support film, 24 thin film assembly , 26 spray coating machine, 27 ink, 28 catalyst layer, 30, 130 support film peeling device, 32 support film peeling roll, 40 transport machine, 42 transport belt, 44 pore, 46 transport belt feed roll, 47 vacant space, 48 Suction hole, 50 upper drying duct, 52 lower drying duct, 60 support base, 62 vacant space, 64 air suction path, 66 heater, 67 rolling element, 68 rolling bearing.

Claims (14)

A liquid application apparatus for applying a liquid to a thin film in a thin film assembly in which a support film supporting the thin film is bonded to a thin film wetted by a liquid,
When the thin film joined body is supplied so as to be in a predetermined direction, a conveying means for sucking and heating the surface of the thin film joined body on the support film side, and
A liquid application apparatus comprising: an application unit that applies the liquid to one surface on the thin film side of the transported thin film assembly. Liquid applying apparatus according to claim 1, further comprising a peeling means for peeling the support film from the thin film bonding material applied by the coating means. The conveying means has a plurality of suction holes on the surface and conveys the thin film assembly around the belt, and a heating means capable of heating the belt, and supports the belt and a plurality of suction of the belt. liquid applying apparatus according to claim 1 or 2, wherein and a support member to produce a negative pressure in the hole. The support member includes two rotating members that are disposed at both ends of the belt and have a plurality of suction holes that suck and circulate the belt and generate negative pressure in the suction holes of the sucked belt. The liquid coating apparatus according to claim 3 . The liquid coating apparatus according to claim 4 , wherein the support member includes a plurality of rolling elements that come into contact with the belt and rotate as the belt circulates. The thin film of air supply and exhaust liquid applying apparatus according to any one claims 1 comprises supply and exhaust means 5 for performing to the coated surface. The liquid coating apparatus according to claim 6 , wherein the air supply / exhaust unit is disposed at a position opposite to a position at which the coating unit is disposed with the position of the transport unit as a center. A liquid application apparatus according to any one of claims 3 to 7 according to claim 2 ,
When the thin film composite is supplied by reversing the front and back so as to be in the direction opposite to the predetermined direction after the liquid is applied to the thin film assembly supplied so as to be in the predetermined direction, The second conveying means that is the same as the conveying means according to any one of claims 1 to 7 , comprising sucking and heating the one surface of the thin film coated with the liquid by the applying means,
The peeling means is means for peeling the support film in a state where the one surface of the thin film is sucked by the second transport means,
Furthermore, a liquid coating apparatus provided with the 2nd application means which apply | coats the said liquid to the other surface opposite to said one surface of the thin film from which the support film was peeled by this peeling means. The liquid coating apparatus according to claim 8 , wherein
The conveying means and the second conveying means are arranged to face each other substantially horizontally,
A liquid comprising: a supply unit that supplies the thin film assembly to the transfer unit between the transfer unit and the second transfer unit; and a recovery unit that recovers the thin film transferred from the second transfer unit Coating device. The coating means, the liquid coating device according to any one of claims 1 to 9, which is a means for applying by spraying the liquid into the thin film. The liquid, catalytic liquid applying apparatus of claims 1, which is a liquid obtained by dispersing in a solvent the carbon powder carrying claimed 10 or the. A liquid application method for applying a liquid to a thin film to be wetted,
An adhering step of adhering a support film supporting the thin film to the thin film;
A transporting step of sucking and heating the thin film to which the support film is bonded from the support film side; and
An application step of applying the liquid to one surface of the thin film conveyed together with the support film;
A liquid coating method comprising: a peeling step of peeling the thin film coated with the liquid and the support film. A liquid application method according to claim 12 ,
A second transporting step of sucking and heating one surface of the thin film coated with the liquid by the coating step;
A liquid coating method comprising: a second coating step of coating the liquid on the other surface of the transported thin film. The liquid coating method according to claim 13 , wherein the peeling step is a step of peeling in a state where one surface of the thin film is sucked by the second transporting step.

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