JP3769750B2 - ICP emission analyzer - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ICP emission analyzer.
[0002]
[Prior art]
An elemental analyzer using a high frequency inductively coupled plasma (ICP) as a light source is known. High frequency inductively coupled plasma is plasma excited by high frequency induction. An ICP light source generally forms a plasma by winding an induction coil around a discharge tube called a plasma torch to flow a high-frequency current (for example, 27.12 MHz) to generate an induction electric field, and introducing argon gas into the plasma torch. To do. A mist-like sample is fed into the plasma by an argon carrier gas. In ICP emission analysis, light excited and emitted by ICP is dispersed with a spectroscope equipped with a prism, a diffraction grating, etc. to obtain an atomic spectrum, and the wavelength and intensity of this atomic spectral line are measured to determine the type and concentration of the atom. .
[0003]
In this ICP emission analysis, there are known axial observation in which light emitted from the axial direction of plasma is taken out and observed, and lateral observation in which light emitted from the lateral direction of plasma is taken out and observed. By switching between this axial direction observation and lateral direction observation, samples from minute amounts to high concentrations are analyzed.
As a configuration for switching the observation direction of plasma, a configuration in which a bending mirror is taken in and out with respect to an optical path and a configuration in which the position of a plasma torch is moved are known.
[0004]
5 and 6 are schematic views for explaining a mechanism for switching the observation direction of plasma in a conventional ICP emission spectrometer.
In the configuration shown in FIG. 5, the two optical paths 120 and 121 connecting the plasma 103 of the plasma torch 102 and the entrance slit 105 of the spectroscope 104 are switched by moving the folding mirror. Bending mirrors 106, 107, 108 and a lens 109 are arranged on the optical paths 120, 121, and the plasma 103 is observed in the axial direction through the optical path 120, and laterally observed through the optical path 121. An optical path 120 is an optical path that does not pass through an optical system such as a bending mirror or a lens, and an optical path 121 is an optical path that passes through an optical system such as the bending mirrors 106, 107, and 108 and the lens 109.
[0005]
The axial observation is performed by removing the folding mirror 108 from the optical path 120 as shown in FIG. 5B, and the lateral observation is performed by arranging the folding mirror 108 on the optical path 120 as shown in FIG. 5C. This is done by forming the optical path 121. At this time, the optical path length between the plasma 103 and the entrance slit 105 differs between the optical path 120 and the optical path 121. For example, the optical path length of the optical path 120 is (D1 + D0), the optical path length of the optical path 121 is (d1 + d2 + d3 + D0), and even if the lengths of D1 and d2 are equal, the optical path lengths differ by the distance of (d1 + d3). become. In order to form an image of the plasma observation point in the entrance slit of the spectrometer in both the axial direction and the lateral direction, a lens for correcting the focal length is required at any observation position. In FIG. 5, the change in the optical path length is corrected by taking in and out the lens 109 for correcting the focal length.
[0006]
In the configuration shown in FIG. 6, the two optical paths 122 and 123 connecting the plasma 103 of the plasma torch 102 and the entrance slit 105 of the spectrometer 104 are switched by moving the position of the plasma torch 102. The plasma torch 102 side is configured to be movable with respect to the spectrometer side (not shown). Observation of the plasma 103 in the axial direction is performed through the optical path 122 as shown in FIG. 6A, and lateral observation is performed through the optical path 123 as shown in FIG. 6B. The optical path 123 is formed through the bending mirror 108 while moving on the plasma torch side. At this time, the optical path length between the plasma 103 and the entrance slit 105 differs between the optical path 122 and the optical path 123. Therefore, in order to correct the change in the optical path length, it is necessary to adjust the focal length correction lens 109.
[0007]
[Problems to be solved by the invention]
In the conventional ICP emission spectrometer, in order to switch the observation direction of the plasma, a mechanism for putting in and out the bending mirror and a mechanism for moving the plasma torch position are provided, thereby switching the optical path for each observation direction. . Since the switching of the optical path is accompanied by a change in the optical path length, a mechanism for switching the focal length correction lens in the optical path is required.
[0008]
Therefore, the conventional ICP emission analysis apparatus has a problem that the structure of the light guide portion is complicated, and there is also a problem that the manufacturing cost increases accordingly.
[0009]
Accordingly, the present invention solves the above-described conventional problems, and aims to prevent the optical path length from changing even if the observation direction is changed in the ICP emission analyzer, and to correct the change in the focal length due to the change in the optical path length. It is an object to eliminate the need for a mechanism to perform.
[0010]
[Means for Solving the Problems]
The present invention provides an ICP emission analyzer that performs axial and lateral observations of plasma at the intersection of the optical path for axial observation and the optical path for lateral observation on the optical path between the plasma observation point and the entrance slit of the spectrometer. An optical path switching unit is provided, and in the optical path between the plasma observation point and the optical path switching unit, the optical path length of the optical path by the axial observation of the plasma and the optical path length of the optical path by the lateral observation are made the same length.
[0011]
By making the optical path length of the optical path by the axial direction observation of the plasma and the optical path length of the optical path by the lateral direction observation the same, the distance between the plasma observation point and the entrance slit of the spectrometer is the same in any observation direction. The optical path lengths of the optical paths are the same. Therefore, a mechanism such as a focal length correcting lens and a moving mechanism that corrects the change in the focal length is unnecessary.
[0012]
The optical path switching means switches at one of the optical path for the axial observation and the optical path for the lateral observation of the plasma by reflection and / or shielding at the crossing position of the optical path for the axial observation and the optical path for the lateral observation. Connect to the optical path of the entrance slit.
[0013]
The axial direction of the plasma torch and the optical axis direction of the spectrometer can be parallel or orthogonal to each other. Further, the axial direction of the plasma torch and the optical axis direction of the spectroscope can be in an arbitrary angular relationship.
[0014]
In another aspect of the present invention, the number of reflecting means arranged on the optical path by the axial observation of the plasma and the reflection arranged on the optical path by the lateral observation of the plasma between the plasma observation point and the optical path switching point. The number of means may be the same, and the number of reflections on both optical paths may be the same. By setting the number of reflections to the same number, the influence of attenuation of the light intensity due to reflection can be reduced, and the difference between the intensity of the observation in the axial direction of the plasma and the intensity of the observation light path in the lateral direction can be reduced.
[0015]
Furthermore, in another aspect of the present invention, a spectroscope is arranged in a direction at a predetermined angle with respect to a plane formed by the observation direction for plasma axial observation and the observation direction for plasma lateral observation. It can also be configured.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic diagram for explaining an ICP emission analyzer of the present invention.
FIG. 1 shows a configuration example in which the axial direction of the plasma torch and the optical axis direction of the spectroscope are parallel. Two optical paths 10 and 11 are formed between the plasma 3 formed by the plasma torch 2 and the entrance slit 5 of the spectroscope 4, and both optical paths are switched by the optical path switching means. The optical path switching means can be constituted by a folding mirror M2 that is movably disposed at a position Q where the two optical paths 10, 11 intersect.
[0017]
An optical path 10 (one-dot chain line in FIG. 1A) guides light in the axial direction of the plasma to the spectrometer 4, and an optical path 11 (two-dot chain line in FIG. 1A) splits the light in the lateral direction of the plasma. Guide to vessel 4. On the optical path 10, a folding mirror M1 is fixed and a folding mirror M2 is provided so as to be freely inserted into and removed from the optical path 10. Further, a bending mirror M3 is fixed on the optical path 11, and a bending mirror M2 is provided so as to be freely inserted into and removed from the optical path 11. The bending mirror M2 is shared by the optical paths 11 and 12, and constitutes an optical path switching means. By moving the folding mirror M2 with respect to the optical path, the plasma observation point P and the entrance slit 5 of the spectroscope 4 can be optically connected by the optical path 10 or the optical path 11.
[0018]
As shown in FIG. 1B, the optical path 10 optically connects the plasma observation point P, the bending mirror M1, the bending mirror M2, and the entrance slit 5 by introducing the bending mirror M2 to the intersection position Q. In the optical path 10, the distance between the plasma observation point P and the fixed folding mirror M 1 is A, the distance between the fixed folding mirror M 1 and the upper folding mirror M 2 is B, and the folding mirror on the crossing position Q is B. When the distance between M2 and the entrance slit 5 in front of the spectroscope 4 is C, the optical path length is represented by (A + B + C). At this time, the optical path (two-dot chain line in the figure) passing through the bending mirror M3 is blocked by introducing the bending mirror M2 at the intersection position Q, and the light in the plasma lateral direction is not introduced into the entrance slit 5.
[0019]
On the other hand, as shown in FIG. 1C, the optical path 11 optically connects the plasma observation point P, the folding mirror M3, and the entrance slit 5 by removing the folding mirror M2 from the intersection position Q. In the optical path 11, the distance between the plasma observation point P and the fixed folding mirror M3 is b, the distance between the fixed folding mirror M3 and the intersection position Q is a, and the intersection position Q and the entrance in front of the spectroscope 4 If the distance of the slit 5 is c, the optical path length is represented by (a + b + c). At this time, the optical path (the one-dot chain line in the figure) passing through the bending mirrors M1 and M2 is not formed because the bending mirror M2 deviates from the intersection position Q, and the light in the plasma axis direction is not introduced into the entrance slit 5.
[0020]
Here, since the distance C and the distance c are common, the distance A on the optical path 10 and the distance a on the optical path 11 have the same length, and the distance B on the optical path 10 and the distance b on the optical path 11 Are made the same length, the optical path length (a + b + c) of the optical path 10 and the optical path length (A + B + C) of the optical path 11 can be made the same length. As a result, even if the optical path is switched by inserting and removing the folding mirror M2, an axial image and a lateral image at the plasma observation point P use a lens for focal length correction such as a lens. Both images are formed on the entrance slit 5.
[0021]
The distances A and a and the distances B and b can be adjusted by determining the intersecting position Q and the arrangement positions of the bending mirrors M1 and M2 with respect to the positions of the plasma observation point P and the entrance slit 5. .
[0022]
FIG. 2 is a schematic view for explaining another embodiment of the ICP emission analyzer of the present invention. FIG. 2 shows a configuration example in which the axial direction of the plasma torch and the optical axis direction of the spectroscope are orthogonal to each other. As in the configuration shown in FIG. 1, two optical paths 10 and 11 are formed between the plasma 3 formed by the plasma torch 2 and the entrance slit 5 of the spectroscope 4, and both optical paths are switched by the optical path switching means. . The optical path switching means can be constituted by a folding mirror M2 that is movably disposed at a position Q where the two optical paths 10, 11 intersect.
[0023]
An optical path 10 (one-dot chain line in FIG. 2A) guides the light in the lateral direction of the plasma to the spectroscope 4, and an optical path 11 (two-dot chain line in FIG. 2A) splits the light in the axial direction of the plasma. Guide to vessel 4. On the optical path 10, a folding mirror M1 is fixed and a folding mirror M2 is provided so as to be freely inserted into and removed from the optical path 10. Further, a bending mirror M3 is fixed on the optical path 11, and a bending mirror M2 is provided so as to be freely inserted into and removed from the optical path 11. The bending mirror M2 is shared by the optical paths 11 and 12, and constitutes an optical path switching means. By moving the folding mirror M2 with respect to the optical path, the plasma observation point P and the entrance slit 5 of the spectroscope 4 can be optically connected by the optical path 10 or the optical path 11.
[0024]
As shown in FIG. 2B, the optical path 10 optically connects the plasma observation point P, the bending mirror M1, the bending mirror M2, and the entrance slit 5 by introducing the bending mirror M2 to the intersection position Q. The optical path length is represented by (A + B + C) as in FIG. At this time, the optical path 11 (two-dot chain line in the figure) passing through the bending mirror M3 is blocked by introducing the bending mirror M2 at the intersection position Q, and light in the plasma axis direction is not introduced into the entrance slit 5. .
[0025]
On the other hand, as shown in FIG. 2C, the optical path 11 optically connects the plasma observation point P, the folding mirror M3, and the entrance slit 5 by removing the folding mirror M2 from the intersection position Q. It is represented by (a + b + c) as in FIG. At this time, the optical path 10 (dotted line in the figure) passing through the bending mirrors M1 and M2 is not formed by removing the bending mirror M2 from the intersection position Q, and the light in the plasma lateral direction enters the entrance slit 5. Not introduced.
[0026]
Here, since the distance C and the distance c are common, the distance A on the optical path 10 and the distance a on the optical path 11 have the same length, and the distance B on the optical path 10 and the distance b on the optical path 11 Are made the same length, the optical path length (a + b + c) of the optical path 10 and the optical path length (A + B + C) of the optical path 11 can be made the same length. As a result, even if the optical path is switched by inserting and removing the folding mirror M2, an axial image and a lateral image at the plasma observation point P use a lens for focal length correction such as a lens. Both images are formed on the entrance slit 5.
[0027]
The distances A and a and the distances B and b can be adjusted by determining the intersection position Q and the positions of the bending mirrors M1 and M2 with respect to the positions of the plasma observation point P and the entrance slit 5.
[0028]
FIG. 3 is a schematic view for explaining another embodiment of the ICP emission analyzer of the present invention. FIG. 3 shows a configuration example in which the optical axis direction of the spectrometer with respect to the axial direction of the plasma torch is an arbitrary direction. Two optical paths 12 and 13 are formed between the plasma 3 formed by the plasma torch 2 and the entrance slit 5 of the spectroscope 4, and both optical paths are switched by the optical path switching means. The optical path switching means can be constituted by a bending mirror M2 that is rotatably arranged at a position Q where the two optical paths 12 and 13 intersect, and is a spectroscope provided in an arbitrary direction with respect to the axial direction of the plasma torch 2 Guide the light to 4. 3 shows an example in which the spectroscope 4 and the entrance slit 5 are arranged at opposite angular positions with respect to the optical path 12 and the optical path 13. FIG.
[0029]
The optical path 12 (one-dot chain line in FIG. 3A) guides the light in the lateral direction of the plasma to the spectroscope 4, and the optical path 13 (two-dot chain line in FIG. 3A) splits the light in the axial direction of the plasma. Guide to vessel 4. A bending mirror M1 is fixed on the optical path 12, a bending mirror M3 is fixed on the optical path 13, and a bending mirror M2 is rotatably provided at an intersection position Q between the optical paths 12 and 13. By rotating the bending mirror M2 with respect to the optical paths 12 and 13, the optical path 12 or the optical path 13 can be selected and optically connected between the plasma observation point P and the entrance slit 5 of the spectroscope 4. .
[0030]
As shown in FIG. 3B, the optical path 12 optically connects the plasma observation point P, the folding mirror M1, the folding mirror M2, and the entrance slit 5 by rotating the folding mirror M2 on the intersection position Q. . In the optical path 12, the distance between the plasma observation point P and the fixed folding mirror M1 is A, the distance between the fixed folding mirror M1 and the rotatable folding mirror M2 is B, and the bending mirror M2 and the spectroscope 4 When the distance of the front entrance slit 5 is C, the optical path length is represented by (A + B + C). At this time, light passing through the bending mirror M3 is blocked by the bending mirror M2 or reflected in a direction other than the entrance slit 5, and light in the plasma axis direction is not introduced into the entrance slit 5.
[0031]
On the other hand, as shown in FIG. 3C, the optical path 13 optically moves the plasma observation point P, the folding mirror M3, the folding mirror 2, and the entrance slit 5 by rotating the folding mirror M2 at the intersection position Q. tie. In the optical path 13, the distance between the plasma observation point P and the fixed folding mirror M3 is b, the distance between the fixed folding mirror M3 and the intersection position Q is a, and the intersection position Q and the entrance in front of the spectroscope 4 If the distance of the slit 5 is c, the optical path length is represented by (a + b + c). At this time, light passing through the folding mirrors M1 and M2 is blocked by the folding mirror M2 at the intersection position Q or reflected in a direction other than the entrance slit 5, and light in the plasma lateral direction is not introduced into the entrance slit 5.
[0032]
Here, since the distance C and the distance c are common, the distance A on the optical path 12 and the distance a on the optical path 13 have the same length, and the distance B on the optical path 12 and the distance b on the optical path 13 Are made the same length, the optical path length (a + b + c) of the optical path 12 and the optical path length (A + B + C) of the optical path 13 can be made the same length. As a result, even if the optical path is switched by rotating the bending mirror M2, the focal length correction lens such as a lens is used for the axial image and the lateral image at the plasma observation point P. Both images are formed on the entrance slit 5.
[0033]
The distances A and a and the distances B and b can be adjusted by determining the intersection position Q and the positions of the bending mirrors M1 and M2 with respect to the positions of the plasma observation point P and the entrance slit 5.
The bending mirror M2 can be a double-sided mirror, or one surface can be a mirror surface and the other surface can be a shielding surface.
[0034]
FIG. 4 is a schematic view for explaining another embodiment of the ICP emission spectrometer of the present invention. FIG. 4 shows a three-dimensional configuration example in which a spectroscope is provided in a predetermined angular direction with respect to a plane formed by the axial direction and the lateral direction of plasma. Two optical paths 14 and 15 are formed between the plasma 3 formed by the plasma torch 2 and the entrance slit 5 of the spectroscope 4, and both optical paths are switched by the optical path switching means. The optical path switching means can be constituted by bending mirrors M1 and M3 that are movably provided on each optical path, or a folding mirror M2 that is rotatably arranged at a position Q where the two optical paths 14 and 15 intersect. The spectroscope 4 and the entrance slit 5 are arranged in a predetermined angle direction with respect to the plane formed by the axial direction and the lateral direction of the plasma. In FIG. 4, the spectroscope 4 and the entrance slit 5 are arranged in a direction perpendicular to the plane, the plasma observation points P and the folding mirrors M1, M2, M3 are arranged at the four corners of the bottom surface of the quadrangular prism, The structure which has arrange | positioned the entrance slit 5 in the corner of the upper surface is shown. 4A to 4C show configuration examples in which the folding mirrors M1 and M3 are movable, and FIGS. 4D to 4E show configuration examples in which the folding mirror M2 is rotatable. Yes.
[0035]
In the configuration example shown in FIGS. 4A to 4C, the optical path 14 (the chain line in FIG. 4A) guides the light in the plasma axial direction to the spectroscope 4, and the optical path 15 (FIG. 4A). The middle two-dot chain line) guides the light in the lateral direction of the plasma to the spectrometer 4. The bending mirror M1 on the optical path 14 and the bending mirror M3 on the optical path 15 are movable, and the bending mirror M2 is fixed at the intersection position Q between the optical paths 12 and 13. By moving the bending mirrors M1, M3 with respect to the optical paths 14, 15, the plasma observation point P and the entrance slit 5 of the spectroscope 4 are selected by the optical path 14 or the optical path 15 and optically connected. be able to.
[0036]
As shown in FIG. 4B, the optical path 14 is configured such that the folding mirror M1 is disposed on the optical path 14 and the folding mirror M3 is removed from the optical path 15, thereby causing the plasma observation point P, the folding mirror M1, and the folding mirror M2, And the entrance slit 5 is optically connected. In the optical path 14, the distance between the plasma observation point P and the folding mirror M1 is A, the distance between the folding mirror M1 and the folding mirror M2 is B, and the distance between the folding mirror M2 and the entrance slit 5 in front of the spectroscope 4 is C. Then, the optical path length is represented by (A + B + C). At this time, by moving the folding mirror M3, the light in the plasma lateral direction is not reflected by the folding mirror M3, and thus is not introduced into the entrance slit 5.
[0037]
On the other hand, in the optical path 15, as shown in FIG. 4C, the bending mirror M3 is disposed on the optical path 15, and the bending mirror M1 is removed from the optical path 14, thereby the plasma observation point P, the folding mirror M3, and the folding mirror. M2 and the entrance slit 5 are optically connected. In the optical path 15, the distance between the plasma observation point P and the folding mirror M3 is a, the distance between the folding mirror M1 and the folding mirror M2 is b, and the distance between the folding mirror M2 and the entrance slit 5 in front of the spectroscope 4 is c. Then, the optical path length is represented by (a + b + c). At this time, by moving the folding mirror M1, the light in the plasma axis direction is not reflected by the folding mirror M1, and therefore is not introduced into the entrance slit 5.
[0038]
Here, since the distance C and the distance c are common, the distance A on the optical path 14 and the distance a on the optical path 15 have the same length, and the distance B on the optical path 14 and the distance b on the optical path 15 Are made the same length, the optical path length (A + B + C) of the optical path 14 and the optical path length (a + b + c) of the optical path 15 can be made the same length. Thus, even when the optical path is switched by the rotation of the bending mirror M2, the axial image and the lateral image at the plasma observation point P can be used without using a lens for focal length correction such as a lens. Both images are formed on the entrance slit 5.
[0039]
The distances A and a and the distances B and b can be adjusted by determining the intersection position Q and the positions of the bending mirrors M1 and M2 with respect to the positions of the plasma observation point P and the entrance slit 5.
[0040]
In the configuration example shown in FIGS. 4D to 4F, the optical path 14 (the chain line in FIG. 4D) guides the light in the plasma axial direction to the spectroscope 4, and the optical path 15 (FIG. 4D). The middle two-dot chain line) guides the light in the lateral direction of the plasma to the spectrometer 4. The bending mirror M1 on the optical path 14 and the bending mirror M3 on the optical path 15 are fixed, and the bending mirror M2 at the intersection position Q of the optical paths 12 and 13 is rotatable. By rotating the folding mirror M2, the plasma observation point P and the entrance slit 5 of the spectroscope 4 can be selected by the optical path 14 or the optical path 15 and optically connected.
[0041]
As shown in FIG. 4E, the optical path 14 optically connects the plasma observation point P, the folding mirror M1, the folding mirror M2, and the entrance slit 5 by rotating the folding mirror M2. In the optical path 14, the distance between the plasma observation point P and the fixed folding mirror M1 is A, the distance between the fixed folding mirror M1 and the rotatable folding mirror M2 is B, and the bending mirror M2 and the spectroscope 4 When the distance of the front entrance slit 5 is C, the optical path length is represented by (A + B + C). At this time, as the folding mirror M2 rotates, the light in the plasma lateral direction is not reflected by the folding mirror M2 and is not introduced into the entrance slit 5.
[0042]
On the other hand, as shown in FIG. 4 (f), the optical path 15 optically moves the plasma observation point P, the folding mirror M3, the folding mirror M2, and the entrance slit 5 by rotating the folding mirror M2 on the intersection position Q. Tie to. In the optical path 15, the distance between the plasma observation point P and the folding mirror M3 is a, the distance between the folding mirror M1 and the folding mirror M2 is b, and the distance between the folding mirror M2 and the entrance slit 5 in front of the spectroscope 4 is c. Then, the optical path length is represented by (a + b + c).
[0043]
Here, since the distance C and the distance c are common, the distance A on the optical path 14 and the distance a on the optical path 15 have the same length, and the distance B on the optical path 14 and the distance b on the optical path 15 Are made the same length, the optical path length (A + B + C) of the optical path 14 and the optical path length (a + b + c) of the optical path 15 can be made the same length. Thereby, even when the optical path is switched by the movement of the bending mirrors M1 and M3, the focal length correction lens such as a lens is used for the axial image and the lateral image at the plasma observation point P. Both images are formed on the entrance slit 5.
[0044]
The distances A and a and the distances B and b can be adjusted by determining the intersection position Q and the positions of the bending mirrors M1 and M2 with respect to the positions of the plasma observation point P and the entrance slit 5. The bending mirror M2 can be a curved mirror or can be constituted by two plane mirrors.
[0045]
According to the embodiment of FIGS. 3 and 4, the number of reflections can be the same in each optical path. Thereby, the influence of attenuation of light intensity due to reflection can be matched in each optical path.
[0046]
According to the embodiment of the present invention, the manufacturing cost of the apparatus can be reduced, and stability and reliability can be improved by reducing mechanical parts such as a mechanism for moving the lens.
【The invention's effect】
As described above, according to the present invention, the optical path length does not change even when the observation direction is switched between the plasma axial direction observation and the plasma lateral direction observation in the ICP emission spectrometer, and the focal length due to the change in the optical path length is set. A correction mechanism can be eliminated.
[0047]
[Brief description of the drawings]
FIG. 1 is a schematic view for explaining an ICP emission analyzer of the present invention.
FIG. 2 is a schematic view for explaining another embodiment of the ICP emission analyzer of the present invention.
FIG. 3 is a schematic view for explaining another embodiment of the ICP emission analyzer of the present invention.
FIG. 4 is a schematic view for explaining another embodiment of the ICP emission spectrometer of the present invention.
FIG. 5 is a schematic diagram for explaining a plasma observation direction switching mechanism of a conventional ICP emission spectrometer.
FIG. 6 is a schematic view for explaining a plasma observation direction switching mechanism of a conventional ICP emission spectrometer.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... ICP emission analyzer, 2 ... Plasma torch, 3 ... Plasma, 4 ... Spectroscope, 5 ... Entrance slit, 10-15 ... Optical path, P ... Plasma observation point, Q ... Crossing position, M1-M3 ... Bending mirror, DESCRIPTION OF SYMBOLS 101 ... ICP emission analyzer, 102 ... Plasma torch, 103 ... Plasma, 104 ... Spectroscope, 105 ... Entrance slit, 106-108 ... Bending mirror, 109 ... Lens, 120, 121 ... Optical path.

Claims (4)

In an ICP emission spectrometer that performs axial and lateral observation of plasma,
On the optical path between the plasma observation point and the entrance slit of the spectrometer, an optical path switching means is provided at the intersection of the optical path for axial observation and the optical path for lateral observation,
An ICP emission analyzer characterized in that, in the optical path between the plasma observation point and the optical path switching means, the optical path length of the optical path by the axial observation of the plasma and the optical path length of the optical path by the lateral observation are the same. The optical path switching means switches to one of an optical path for plasma axial observation and an optical path for lateral observation by reflection and / or shielding at the intersection position, and connects to the optical path of the entrance slit of the spectrometer. The ICP emission analyzer according to claim 1, characterized in that it is characterized in that Between the plasma observation point and the optical path switching point, the number of the reflecting means arranged on the optical path by the axial observation of the plasma and the number of the reflecting means arranged on the optical path by the lateral observation of the plasma are the same, and both on the optical path The ICP emission analysis apparatus according to claim 1, wherein the number of reflections is the same. 4. The spectroscope is arranged on an axial direction that forms a predetermined angle with respect to a plane formed by an observation direction for plasma axial observation and an observation direction for plasma lateral observation. The ICP emission analysis apparatus according to any one of the above.

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