JP3763183B2

JP3763183B2 - Humidity sensor and manufacturing method thereof

Info

Publication number: JP3763183B2
Application number: JP12368597A
Authority: JP
Inventors: 揮好池内; 信治築地
Original assignee: Panasonic Corp; Matsushita Electric Industrial Co Ltd
Current assignee: Panasonic Corp; Panasonic Holdings Corp
Priority date: 1997-05-14
Filing date: 1997-05-14
Publication date: 2006-04-05
Anticipated expiration: 2017-05-14
Also published as: JPH10318960A

Description

【０００１】
【発明の属する技術分野】
本発明は、湿度センサおよびその製造方法に関するものである。
【０００２】
【従来の技術】
従来の技術は、特開昭５８−９９７４０号公報に開示されたものが知られている。
【０００３】
以下、従来の湿度センサおよびその製造方法について、図面を参照しながら説明する。
【０００４】
図８（ａ）は従来の湿度センサの上面図、図８（ｂ）は図８（ａ）のＡ−Ａ線の断面図である。
【０００５】
図において、１は絶縁基板である。２は絶縁基板１の上面に設けられた一対の端子電極層である。３は絶縁基板１の上面に端子電極層２の一部と重なるように設けられた一対の櫛形対向電極層である。４は絶縁基板１の上面の櫛形対向電極層３が相対向する対向電極間部である。５は櫛形対向電極層３の表面と対向電極間部４を覆うように設けられた感湿抵抗層である。６は端子電極層２の上面に導通するように設けたリード端子である。７は端子電極層２とリード端子６のはんだ接続部である。
【０００６】
以上のように構成された従来の湿度センサについて、以下にその製造方法を図面を参照しながら説明する。
【０００７】
図９は従来の湿度センサの製造法の要部であるシート基板の上面図、図１０は従来の湿度センサの製造法のリード端子接続図である。
【０００８】
まず、図９に示すように、シート基板８の上面の分割溝９で囲まれた部分に、それぞれ一対の端子電極層１０を塗着形成する。
【０００９】
次に、端子電極層１０の一部と重なるようにシート基板８の上面に櫛形対向電極層１１を塗着形成する。
【００１０】
次に、櫛形対向電極層１１の表面と対向電極間部１２を覆うように感湿抵抗層１３を塗着形成する。
【００１１】
次に、分割溝９に沿って図１０に示す個片基板１４に分割する。
【００１２】
最後に、端子電極層１０とリード端子１５をはんだ接続し、従来の湿度センサを製造していた。
【００１３】
以上のように構成され、かつ製造された従来の湿度センサについて、以下にその動作と電子機器への取り付け方法について説明する。
【００１４】
この種の湿度センサは、電気抵抗式の湿度センサとして開発されたものであり、湿度変化に対応した抵抗値やインピーダンス値の変化を検出することで、測定対象となる環境の湿度変化や対象物の表面状態の変化を検知するものである。検出方法としては、湿度の変化に影響しない抵抗器などと組み合わせて、電位変化として制御回路に取り込んでいる。
【００１５】
電子機器への取り付けは、リード端子６をプリント基板の配線ランド穴に直接挿入する方法や、コネクタ、ハーネスなどを介してプリント基板およびその他の部位に取り付けるなど種々の方法が用いられている。
【００１６】
【発明が解決しようとする課題】
しかしながら、上記従来の構成では、リード端子６だけを保持して電子機器へ取り付けるに際して、細長く軟質性のリード端子は掴みにくい上に、確実に掴もうとするとリード端子自身が変形するなどの問題があり、絶縁基板１の大部分の面積を占める感湿抵抗層５を保持した状態で取り付けねばならず、湿度変化を検知する感湿抵抗層５への機械的ストレスによる傷や、手作業であれば油脂付着などの汚れによる品質上の課題を有していた。
【００１７】
また、その対策として、保護ケース、保護フィルタまたは保護皮膜付きの湿度センサが開発された経過があるが、保護ケース、保護フィルタや保護膜の取り付けにより製造コストの増加となる課題を有していた。
【００１８】
さらに、上記従来の製造方法では、シート基板８に端子電極層１０、対向電極層１１または感湿抵抗層１３を塗着形成するに際して、シート基板８をステージなどに保持しておく必要があるが、一般的な保持手段である金属系ガイドでのチャッキングによるストレスで、シート基板８の外周端面部に微小なクラックやカケが発生し、端面部近傍の対向電極層１１または感湿抵抗層１３が破損する課題を有していた。
【００１９】
また、その対策として、図１１に示すように、シート基板８などの外周部に空白部を有するシート基板１６を使用する製造方法もあるが、外周空白部１７を外周分割溝１８で分割し、取り除くための余分な工程と、外周空白部１７の材料コストや廃棄コストなど製造コストの増加となる課題を有していた。
【００２０】
本発明は、上記従来の課題を解決するもので、製造コストを増加させることなく、機械的ストレスや油脂付着による感湿抵抗層の傷や汚れなどのない電子機器への取り付けが可能で、端子電極層、対向電極層および感湿抵抗層の破損が少ない湿度センサおよびその製造方法を提供することを目的とするものである。
【００２１】
【課題を解決するための手段】
上記目的を達成するために本発明の湿度センサは、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部とを備え、前記位置基準部を前記対向電極層または前記感湿抵抗層の少なくともいずれかと同一材料で構成したものである。
【００２２】
また、上記目的を達成するために本発明の湿度センサは、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部とを備え、前記位置基準部を前記対向電極層または前記感湿抵抗層のいずれかと同一材料からなる第一の位置基準部と、前記第一の位置基準部と相違する対向電極層または感湿抵抗層のいずれかと同一材料からなる第二の位置基準部とで構成したものである。
【００２３】
また、上記目的を達成するために本発明の湿度センサは、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部と、前記絶縁基板と前記対向電極層との間に設けられ、かつ前記リード端子と導通する端子電極層とを備え、前記位置基準部を前記端子電極層、前記対向電極層または前記感湿抵抗層の少なくともいずれかと同一材料で構成したものである。
【００２４】
また、上記目的を達成するために本発明の湿度センサは、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部と、前記絶縁基板と前記対向電極層との間に設けられ、かつ前記リード端子と導通する端子電極層とを備え、前記位置基準部を前記端子電極層、前記対向電極層または前記感湿抵抗層のいずれかと同一材料からなる第一の位置基準部と、前記第一の位置基準部と相違する端子電極層、対向電極層または感湿抵抗層のいずれかと同一材料からなる第二の位置基準部と、前記第一の位置基準部および前記第二の位置基準部と相違する端子電極層、対向電極層または感湿抵抗層のいずれかと同一材料からなる第三の位置基準部とで構成したものである。
【００２５】
また、上記目的を達成するために本発明の湿度センサの製造方法は、分割溝を有するシート基板の上面の分割溝で囲まれた複数の部分に一対の対向電極層を形成する工程と、前記対向電極層間を導通するように感湿抵抗層を形成する工程と、前記感湿抵抗層を形成してなる分割溝を有するシート基板を個片基板に分割する工程と、前記個片基板の対向電極層とリード端子を導通する工程とを有する製造方法からなり、前記感湿抵抗層を形成してなる分割溝を有するシート基板の上面の側部に前記対向電極層および前記感湿抵抗層の存在しない空白部を配置し、かつこの空白部に前記端子電極層、前記対向電極層または前記感湿抵抗層の少なくともいずれかと同時に前記シート基板の外周端面に対する位置基準となる位置基準部を形成したものである。
【００２６】
【発明の実施の形態】
本発明の請求項１に記載の発明は、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部とを備え、前記位置基準部を前記対向電極層または前記感湿抵抗層の少なくともいずれかと同一材料で構成したものである。
【００２７】
また、請求項２に記載の発明は、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部とを備え、前記位置基準部を前記対向電極層または前記感湿抵抗層のいずれかと同一材料からなる第一の位置基準部と、前記第一の位置基準部と相違する対向電極層または感湿抵抗層のいずれかと同一材料からなる第二の位置基準部とで構成したものである。
【００２８】
また、請求項３に記載の発明は、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部と、前記絶縁基板と前記対向電極層との間に設けられ、かつ前記リード端子と導通する端子電極層とを備え、前記位置基準部を前記端子電極層、前記対向電極層または前記感湿抵抗層の少なくともいずれかと同一材料で構成したものである。
【００２９】
また、請求項４に記載の発明は、絶縁基板の上面に対向するように設けられた一対の対向電極層と、前記絶縁基板の上面に前記対向電極層と導通するように設けられた感湿抵抗層と、前記対向電極層と導通するように設けられた一対のリード端子と、前記絶縁基板の上面の前記対向電極層の反対側に設けられた空白部と、前記空白部に前記感湿抵抗層から隔離して形成され、かつ前記絶縁基板の外周端面に対する位置基準となる少なくとも一つの位置基準部と、前記絶縁基板と前記対向電極層との間に設けられ、かつ前記リード端子と導通する端子電極層とを備え、前記位置基準部を前記端子電極層、前記対向電極層または前記感湿抵抗層のいずれかと同一材料からなる第一の位置基準部と、前記第一の位置基準部と相違する端子電極層、対向電極層または感湿抵抗層のいずれかと同一材料からなる第二の位置基準部と、前記第一の位置基準部および前記第二の位置基準部と相違する端子電極層、対向電極層または感湿抵抗層のいずれかと同一材料からなる第三の位置基準部とで構成したものである。
【００３０】
また、請求項５に記載の発明は、分割溝を有するシート基板の上面の分割溝で囲まれた複数の部分に一対の対向電極層を形成する工程と、前記対向電極層間を導通するように感湿抵抗層を形成する工程と、前記感湿抵抗層を形成してなる分割溝を有するシート基板を個片基板に分割する工程と、前記個片基板の対向電極層とリード端子を導通する工程とからなり、前記感湿抵抗層を形成してなる分割溝を有するシート基板の上面の側部に前記対向電極層および前記感湿抵抗層の存在しない空白部を配置し、かつこの空白部に前記端子電極層、前記対向電極層または前記感湿抵抗層の少なくともいずれかと同時に前記シート基板の外周端面に対する位置基準となる位置基準部を形成したものである。
【００３１】
また、請求項６に記載の発明は、請求項５に記載の位置基準部を、対向電極層と同時に対向電極位置基準部を形成する工程と、感湿抵抗層と同時に前記対向電極位置基準部の上面に感湿抵抗位置基準部を形成する工程とで構成したものである。
【００３２】
また、請求項７に記載の発明は、請求項５に記載の位置基準部を、端子電極層と同時に端子電極位置基準部を形成する工程と、対向電極層と同時に前記端子電極位置基準部の上面に対向電極位置基準部を形成する工程と、感湿抵抗層と同時に前記対向電極位置基準部の上面に感湿抵抗位置基準部を形成する工程とで構成したものである。
【００３３】
これらの構成および製造方法により、絶縁基板の上面の空白部と裏面を挟み込むように保持して電子機器へ取り付けることができるので、感湿抵抗層への機械的ストレスや汚染などの影響をなくすことができる。
【００３４】
さらに、シート基板の上面の側部に空白部を配置して、対向電極層および感湿抵抗層を形成することにより、シート基板を保持する際のチャッキング部は、空白部となるシート基板の上面の側部と接するシート基板端面部とすることで、微少なクラックやカケによる対向電極層や感湿抵抗層の破損を少なくすることができるという作用を有するものである。
【００３５】
（実施の形態１）
以下、本発明の実施の形態１における湿度センサおよびその製造方法について、図面を参照しながら説明する。
【００３６】
図１は、本発明の実施の形態１における湿度センサの上面図である。
【００３７】
図１において、２１はアルミナなどからなる約縦１７ｍｍ×横１０ｍｍの矩形状の絶縁基板である。２２は絶縁基板２１の上面に設けられた銀を主成分とし、パラジウム、白金および硼珪酸鉛ガラスなどを含む混合材料からなる一対の端子電極層である。２３は絶縁基板２１の上面の端子電極層２２と反対側の側部に設けられた端子電極層２２と同材質の銀を主成分とし、パラジウム、白金および硼珪酸鉛ガラスなどを含む混合材料からなる約０．５ｍｍ角の端子電極位置基準部である。２４は絶縁基板２１の上面に端子電極層２２の一部と重なるように設けられたカーボンブラックなどの導電粒子と、フェノール樹脂やエポキシ樹脂などとの混合材料からなる一対の櫛形対向電極層である。２５は絶縁基板２１の上面の櫛形対向電極層２４が相対向する対向電極間部である。２６は少なくとも櫛形対向電極層２４の上面と対向電極間部２５を覆うように設けられたカーボンブラックなどの導電粒子と、２−ヒドロキシエチルメタクリレートとグリシジルメタクリレートからなる共重合体を主成分とし、硬化剤ジアミノジフェニルメタンにより架橋構造体とした吸湿性樹脂との混合材料からなる約縦５ｍｍ×横８．５ｍｍの感湿抵抗層である。２７は絶縁基板２１の上面の端子電極層２２および櫛形対向電極層２４と反対側に設けられた約縦７ｍｍ×横１０ｍｍの空白部である。２８は端子電極層２２の上面に導通するように設けられた銅や銅合金や銅を下地めっきした鉄または鉄系合金などに錫を主成分とするはんだめっきを施した一対のリード端子であり、それぞれの間隔は約５ｍｍである。２９は端子電極層２２とリード端子２８を接続する錫、鉛および銀などからなるはんだ接続部である。
【００３８】
以上のように構成された湿度センサについて、以下にその製造方法を図面を参照しながら説明する。
【００３９】
図２、図３、図４、図５、図６、図７は本発明の実施の形態１における湿度センサの製造方法を示す工程図である。
【００４０】
まず図２に示すように、縦横の分割溝３０を有するアルミナなどからなるシート基板３１の上面の分割溝３０で囲まれた部分に、それぞれ一対の銀を主成分とし、パラジウムおよび硼珪酸鉛ガラスなどを含む無機混合物と、エチルセルロースおよびテレピネオールなどとの有機ビヒクルからなる混合ペースト材料をスクリーン印刷し、約１５０℃で数分間乾燥して、ベルト式連続焼成炉によって、ピーク温度域が約８５０℃で５分前後の時間となるような温度プロファイルを用いて焼成し、端子電極層３２および端子電極位置基準部３３を同時に形成する。
【００４１】
次に、図３に示すように、端子電極層３２の一部と重なるようにシート基板３１の上面にカーボンブラックなどの導電粒子と、フェノール樹脂やエポキシ樹脂などとの混合物にベンジルアルコールなどの有機溶剤を加えた混合ペースト材料を分割溝３０で囲まれた最外部の個片基板の空白部３４が、シート基板３１の外側になるように配置して、スクリーン印刷し、約１００℃で数分間予備乾燥して、熱風循環式乾燥機によって、１９０℃前後で約１時間の硬化乾燥を行い、櫛形対向電極層３５を形成する。
【００４２】
次に、図４に示すように、櫛形対向電極層３５の表面とシート基板３１の上面の櫛形対向電極層３５の対向電極間部を覆うようにカーボンブラックなどの導電粒子と、２−ヒドロキシエチルメタクリレートとグリシジルメタクリレートからなる共重合体を主成分とし、硬化剤ジアミノジフェニルメタンにより架橋構造体とした吸湿性樹脂との混合材料にベンジルアルコールなどの有機溶剤を加えた混合ペースト材料を分割溝３０で囲まれた最外部の個片基板の空白部３４が、シート基板３１の外側になるように配置して、スクリーン印刷し、８０℃から１５０℃で１時間から２時間の硬化乾燥を行い、感湿抵抗層３６を形成する。
【００４３】
次に、図５に示すように、図４の分割溝３０の横方向の分割溝でシート基板３１を短冊基板３７に空白部３４または端子電極層３２と端子電極層間３８を作用点としてモーメント力により一次分割する。
【００４４】
次に、図６に示すように、図５の短冊基板３７を図５の個片分割溝３９で個片基板４０に二次分割する。
【００４５】
最後に、図７に示すように、個片基板４０の端子電極層３２の上面に銅や銅合金や銅を下地めっきした鉄または鉄系合金などに錫を主成分とするはんだめっきを施したリード端子４１を錫、鉛および銀などからなるはんだで接続して、湿度センサを製造するものである。
【００４６】
以上のように構成され、かつ製造された湿度センサについて、以下にその特性を説明する。
【００４７】
図１に示すように、約１７ｍｍ×１０ｍｍの絶縁基板２１の上面のはんだ接続部２９と反対側に約７ｍｍ×１０ｍｍの空白部２７を設けたことにより、この空白部２７と、絶縁基板２１の空白部２７の裏面部とをはさみ込むように保持して電子機器のプリント基板などの取り付け部に容易に実装することができる。
【００４８】
特に、空白部２７の面積は約７０ｍｍ²で感湿抵抗層２６の面積約４２．５ｍｍ²より大きくしてあるため、一般的にカーボンブラックなどを含む黒色系の感湿抵抗層２６と、一般的にアルミナなどの白色系の絶縁基板２１とのコントラストから空白部２７の認識性が向上し、手作業で取り付ける場合においても誤って感湿抵抗層２６に触れることがないので、取り扱いが簡単で能率良く作業を行うことができる。
【００４９】
また、図３、図４に示すように、シート基板３１の最外部の分割溝３０で囲まれた個片基板の空白部３４が、シート基板３１の外側になるように配置したので、シート基板３１のそれぞれの空白部３４が近接する短辺側の端面部は任意の箇所をチャッキングでき、他方の長辺側の端面部は空白部３４と接する端面部を選択してチャッキングすることで、端子電極層３２、櫛形対向電極層３５および感湿抵抗層３６の破損を少なくすることができる。
【００５０】
そしてまた、図５、図６に示すように、シート基板３１を分割する際にも、空白部３４を分割の作用点として使えば櫛形対向電極層３５や感湿抵抗層３６に機械的なストレスを与えることはない。
【００５１】
さらに、図２に示すように、端子電極層３２をシート基板３１にスクリーン印刷する際に、端子電極位置基準部３３とシート基板３１の外周端面との間隔を目標にして形成位置をあわせることができるので、認識性の低い分割溝３０と端子電極層３２との間隔を目標にするよりも容易に位置を決定することができる。
【００５２】
さらにまた、それぞれの工程で形成位置の確認を行う際に、端子電極位置基準部３３の形成位置が、シート基板３１からはみ出すほどに外れた場合、容易に目視の外観検査により確認することができる。
【００５３】
なお、実施の形態１では、図２、図３、図４に示すようにシート基板３１の中心にある横方向の分割溝３０で線対称となるように端子電極層３２、櫛形対向電極層３５および感湿抵抗層３６を形成したが、この配置に限定されるものではなく、シート基板３１の最外部の双方に空白部３４が形成される配置であれば同様の効果が得られるものであり、シート基板３１の最外部の一方に空白部３４が形成される配置であっても、湿度センサとして最も重要な構成要素である感湿抵抗層３６の破損を少なくすることができる。
【００５４】
また、本発明の実施の形態１では、端子電極位置基準部３３を分割溝３０で囲まれた全ての個片基板に、それぞれ、二個一対として形成したが、特定の個片基板に一個ずつ形成しても同様の効果が得られるものである。
【００５５】
そしてまた、本発明の実施の形態１では、端子電極位置基準部３３を位置基準部としたが、櫛形対向電極層３５や感湿抵抗層３６と同時にスクリーン印刷して形成した対向電極位置基準部や感湿抵抗位置基準部であってもよい。
【００５６】
特に、端子電極位置基準部と対向電極位置基準部と感湿抵抗位置基準部を順次重ねて形成する構成および製造方法であれば、それぞれの形成位置の位置認識用の形成パターンとして利用することもできるという効果がある。
【００５７】
さらに、上記実施の形態１では、湿度センサを端子電極層と櫛形対向電極層と感湿抵抗層の構成で説明したが、端子電極層を兼ねた櫛形対向電極層と感湿抵抗層の構成であっても同様である。
【００５８】
さらにまた、上記実施の形態１では、感湿抵抗層と導通する対向電極層は櫛形形状の構成で説明したが、この櫛形形状に限定されるものではなく、一対の任意形状の対向電極層の構成であっても同様の効果が得られるものである。
【００５９】
【発明の効果】
以上のように本発明によれば、絶縁基板の上面の対向電極層と反対側に空白部を設け、この空白部に位置基準部を設けているため、前記空白部を保持して機械的ストレスや油脂付着による感湿抵抗層の傷や汚れなどのない電子機器への取り付けを容易に行うことができ、また、シート基板の上面の側部に空白部を配置して形成することにより、シート基板のチャッキング時に、クラックやカケで対向電極層や感湿抵抗層が破損することを少なくすることができ、さらに端子電極の形成時における位置合わせを容易にすることができる湿度センサおよびその製造方法を提供できるものである。
【００６０】
また、スクリーン印刷直後のシート基板は、一般的な移し替え手段である吸着パットなどでシート基板の上面を真空吸着する方法が、シート基板のほぼ全面に印刷形成された場合、ペースト材料が乾燥や焼成処理を行うまでできないが、本発明によれば、空白部を真空吸着部として外周空白部を有するシート基板と同様に吸着式搬送法が利用できるとともに、保護膜を使用した湿度センサよりも応答性の良い、非常に合理的で品質、信頼性および性能の優れた湿度センサおよびその製造方法を提供できるものである。
【図面の簡単な説明】
【図１】本発明の実施の形態１における湿度センサの上面図
【図２】同製造法を示す工程図
【図３】同工程図
【図４】同工程図
【図５】同工程図
【図６】同工程図
【図７】同工程図
【図８】（ａ）従来の湿度センサの上面図
（ｂ）同図８（ａ）のＡ−Ａ線断面図
【図９】同製造法の要部であるシート基板の上面図
【図１０】同製造法のリード端子接続図
【図１１】同シート基板の上面図
【符号の説明】
２１絶縁基板
２２端子電極層
２３端子電極位置基準部
２４櫛形対向電極層
２６感湿抵抗層
２７空白部
２８リード端子[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a humidity sensor and a manufacturing method thereof.
[0002]
[Prior art]
As a conventional technique, one disclosed in Japanese Patent Application Laid-Open No. 58-99740 is known.
[0003]
Hereinafter, a conventional humidity sensor and a manufacturing method thereof will be described with reference to the drawings.
[0004]
8 (a) is a top view of a conventional humidity sensor, FIG. 8 (b) is a cross-sectional view of line A-A of FIG. 8 (a).
[0005]
In the figure, reference numeral 1 denotes an insulating substrate. Reference numeral 2 denotes a pair of terminal electrode layers provided on the upper surface of the insulating substrate 1. Reference numeral 3 denotes a pair of comb-shaped counter electrode layers provided on the upper surface of the insulating substrate 1 so as to overlap a part of the terminal electrode layer 2. Reference numeral 4 denotes a portion between the counter electrodes where the comb-shaped counter electrode layer 3 on the upper surface of the insulating substrate 1 faces each other. Reference numeral 5 denotes a moisture-sensitive resistance layer provided so as to cover the surface of the comb-shaped counter electrode layer 3 and the portion 4 between the counter electrodes. Reference numeral 6 denotes a lead terminal provided to be electrically connected to the upper surface of the terminal electrode layer 2. Reference numeral 7 denotes a solder connection portion between the terminal electrode layer 2 and the lead terminal 6.
[0006]
A manufacturing method of the conventional humidity sensor configured as described above will be described below with reference to the drawings.
[0007]
FIG. 9 is a top view of a sheet substrate, which is a main part of a conventional method of manufacturing a humidity sensor, and FIG. 10 is a lead terminal connection diagram of the conventional method of manufacturing a humidity sensor.
[0008]
First, as shown in FIG. 9 , a pair of terminal electrode layers 10 is applied and formed on portions surrounded by the dividing grooves 9 on the upper surface of the sheet substrate 8.
[0009]
Next, a comb-shaped counter electrode layer 11 is formed by coating on the upper surface of the sheet substrate 8 so as to overlap a part of the terminal electrode layer 10.
[0010]
Next, a moisture-sensitive resistance layer 13 is applied and formed so as to cover the surface of the comb-shaped counter electrode layer 11 and the counter electrode inter-electrode portion 12.
[0011]
Then divided along the dividing grooves 9 into individual substrate 14 shown in FIG. 10.
[0012]
Finally, the terminal electrode layer 10 and the lead terminal 15 are connected by soldering to manufacture a conventional humidity sensor.
[0013]
About the conventional humidity sensor comprised as mentioned above and manufactured, the operation | movement and the attachment method to an electronic device are demonstrated below.
[0014]
This type of humidity sensor was developed as an electrical resistance type humidity sensor. By detecting changes in resistance and impedance values corresponding to changes in humidity, humidity changes in the environment to be measured and objects It detects a change in the surface state of the surface. As a detection method, a change in potential is incorporated into a control circuit in combination with a resistor that does not affect the change in humidity.
[0015]
Various methods such as a method of directly inserting the lead terminal 6 into a wiring land hole of the printed circuit board or a method of attaching to the printed circuit board and other parts via a connector, a harness or the like are used for the attachment to the electronic device.
[0016]
[Problems to be solved by the invention]
However, in the conventional configuration, when only the lead terminal 6 is held and attached to the electronic device, the long and soft lead terminal is difficult to grasp, and the lead terminal itself is deformed if it is surely grasped. Yes, it must be attached while holding the moisture sensitive resistance layer 5 occupying most of the area of the insulating substrate 1, whether it is a scratch caused by mechanical stress on the moisture sensitive resistance layer 5 that detects humidity change, or manual work It had quality problems due to dirt such as oil and fat adhesion.
[0017]
As countermeasures, humidity sensors with protective cases, protective filters, or protective coatings have been developed. However, there is a problem that the manufacturing cost increases due to the installation of protective cases, protective filters, and protective films. .
[0018]
Furthermore, in the conventional manufacturing method described above, when the terminal electrode layer 10, the counter electrode layer 11, or the moisture sensitive resistance layer 13 is applied to the sheet substrate 8, it is necessary to hold the sheet substrate 8 on a stage or the like. Due to the stress due to chucking by a metal guide which is a general holding means, minute cracks and chips are generated on the outer peripheral end surface portion of the sheet substrate 8, and the counter electrode layer 11 or the moisture sensitive resistance layer 13 in the vicinity of the end surface portion. Had the problem of breaking.
[0019]
In addition, as a countermeasure, as shown in FIG. 11 , there is a manufacturing method using a sheet substrate 16 having a blank portion on the outer peripheral portion such as the sheet substrate 8, but the outer peripheral blank portion 17 is divided by the outer peripheral dividing groove 18, There were an extra process for removing and a problem that increased manufacturing cost such as material cost and disposal cost of the outer peripheral blank portion 17.
[0020]
The present invention solves the above-mentioned conventional problems, and can be attached to an electronic device free from scratches or dirt on the moisture-sensitive resistance layer due to mechanical stress or oil and fat adhesion without increasing the manufacturing cost. An object of the present invention is to provide a humidity sensor in which the electrode layer, the counter electrode layer, and the moisture-sensitive resistance layer are less damaged, and a method for manufacturing the same.
[0021]
[Means for Solving the Problems]
In order to achieve the above object, the humidity sensor of the present invention is provided with a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate and to be electrically connected to the counter electrode layer on the upper surface of the insulating substrate. A moisture resistance layer, a pair of lead terminals provided to be electrically connected to the counter electrode layer, a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate, and the blank portion At least one position reference portion that is formed separately from the moisture sensitive resistance layer and serves as a position reference with respect to the outer peripheral end surface of the insulating substrate, and the position reference portion is formed on the counter electrode layer or the moisture sensitive resistance layer. It is composed of at least the same material .
[0022]
In order to achieve the above object, the humidity sensor of the present invention has a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and is electrically connected to the counter electrode layer on the upper surface of the insulating substrate. A provided moisture-sensitive resistance layer; a pair of lead terminals provided to be electrically connected to the counter electrode layer; a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate; and the blank At least one position reference portion that is formed separately from the moisture-sensitive resistance layer and serves as a position reference with respect to the outer peripheral end surface of the insulating substrate, and the position reference portion is the counter electrode layer or the humidity-sensitive resistor. A first position reference portion made of the same material as any one of the layers, and a second position reference portion made of the same material as either the counter electrode layer or the moisture sensitive resistance layer different from the first position reference portion It is a thing.
[0023]
In order to achieve the above object, the humidity sensor of the present invention has a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and is electrically connected to the counter electrode layer on the upper surface of the insulating substrate. A provided moisture-sensitive resistance layer; a pair of lead terminals provided to be electrically connected to the counter electrode layer; a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate; and the blank At least one position reference part that is formed in a part so as to be separated from the moisture-sensitive resistance layer and serves as a position reference with respect to the outer peripheral end surface of the insulating substrate; and between the insulating substrate and the counter electrode layer; and A terminal electrode layer that conducts with the lead terminal, and the position reference portion is made of the same material as at least one of the terminal electrode layer, the counter electrode layer, and the moisture-sensitive resistance layer.
[0024]
In order to achieve the above object, the humidity sensor of the present invention has a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and is electrically connected to the counter electrode layer on the upper surface of the insulating substrate. A provided moisture-sensitive resistance layer; a pair of lead terminals provided to be electrically connected to the counter electrode layer; a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate; and the blank At least one position reference part that is formed in a part so as to be separated from the moisture-sensitive resistance layer and serves as a position reference with respect to the outer peripheral end surface of the insulating substrate; and between the insulating substrate and the counter electrode layer; and A terminal electrode layer electrically connected to the lead terminal, the position reference portion being a first position reference portion made of the same material as any of the terminal electrode layer, the counter electrode layer, and the moisture sensitive resistance layer; One position reference part and A second position reference portion made of the same material as any of the different terminal electrode layer, counter electrode layer, or moisture sensitive resistance layer, and the terminal electrode layer different from the first position reference portion and the second position reference portion And a third position reference portion made of the same material as either the counter electrode layer or the moisture sensitive resistance layer.
[0025]
In order to achieve the above object, a method of manufacturing a humidity sensor according to the present invention includes a step of forming a pair of counter electrode layers in a plurality of portions surrounded by the dividing grooves on the upper surface of the sheet substrate having the dividing grooves, Forming a moisture-sensitive resistance layer so as to conduct between the counter electrode layers; dividing a sheet substrate having a dividing groove formed with the moisture-sensitive resistance layer into individual substrates; and opposing the individual substrates And a step of electrically connecting the electrode layer and the lead terminal. The counter electrode layer and the moisture sensitive resistance layer are formed on a side portion of the upper surface of the sheet substrate having a dividing groove formed with the moisture sensitive resistance layer. A non-existing blank portion was arranged , and a position reference portion serving as a position reference with respect to the outer peripheral end surface of the sheet substrate was formed in the blank portion simultaneously with at least one of the terminal electrode layer, the counter electrode layer, and the moisture-sensitive resistance layer. thing A.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
According to the first aspect of the present invention, a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and a feeling provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer. A moisture resistance layer; a pair of lead terminals provided to be electrically connected to the counter electrode layer; a blank portion provided on an opposite side of the counter electrode layer on the upper surface of the insulating substrate; And at least one position reference portion that is formed separately from the moisture resistance layer and serves as a position reference with respect to the outer peripheral end surface of the insulating substrate, and the position reference portion is at least one of the counter electrode layer and the moisture sensitive resistance layer. It is composed of the same material .
[0027]
According to a second aspect of the present invention, there is provided a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and a moisture sensitivity provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer. A resistance layer; a pair of lead terminals provided so as to be electrically connected to the counter electrode layer; a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate; and the moisture sensitive portion in the blank portion. At least one position reference portion that is formed separately from the resistance layer and serves as a position reference with respect to the outer peripheral end surface of the insulating substrate, and the position reference portion is the same as either the counter electrode layer or the moisture sensitive resistance layer A first position reference portion made of a material and a second position reference portion made of the same material as either the counter electrode layer or the moisture sensitive resistance layer different from the first position reference portion .
[0028]
According to a third aspect of the present invention, there is provided a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and a moisture sensitivity provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer. A resistance layer; a pair of lead terminals provided so as to be electrically connected to the counter electrode layer; a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate; and the moisture sensitive portion in the blank portion. It is formed separately from the resistance layer, and is provided between at least one position reference portion serving as a position reference with respect to the outer peripheral end surface of the insulating substrate, the insulating substrate and the counter electrode layer, and is electrically connected to the lead terminal. And the position reference portion is made of the same material as at least one of the terminal electrode layer, the counter electrode layer, and the moisture sensitive resistance layer .
[0029]
According to a fourth aspect of the present invention, a pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, and a moisture sensitivity provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer. A resistance layer; a pair of lead terminals provided so as to be electrically connected to the counter electrode layer; a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate; and the moisture sensitive portion in the blank portion. It is formed separately from the resistance layer, and is provided between at least one position reference portion serving as a position reference with respect to the outer peripheral end surface of the insulating substrate, the insulating substrate and the counter electrode layer, and is electrically connected to the lead terminal. A first position reference portion made of the same material as any of the terminal electrode layer, the counter electrode layer, and the moisture-sensitive resistance layer, and the first position reference portion. Different terminal electrode layer and pair A second position reference portion made of the same material as either the electrode layer or the moisture sensitive resistance layer, and a terminal electrode layer, a counter electrode layer, or a moisture sensitivity different from the first position reference portion and the second position reference portion It is composed of any one of the resistance layers and a third position reference portion made of the same material .
[0030]
According to a fifth aspect of the present invention, there is provided a step of forming a pair of counter electrode layers in a plurality of portions surrounded by the split grooves on the upper surface of the sheet substrate having the split grooves, and conducting between the counter electrode layers. A step of forming a moisture-sensitive resistance layer; a step of dividing a sheet substrate having a dividing groove formed by forming the moisture-sensitive resistance layer into individual substrates; and an electrical connection between the counter electrode layer of the individual substrate and the lead terminal. A blank portion where the counter electrode layer and the moisture sensitive resistance layer are not present is disposed on a side portion of the upper surface of the sheet substrate having a dividing groove formed by forming the moisture sensitive resistance layer , and the blank portion. A position reference portion serving as a position reference with respect to the outer peripheral end surface of the sheet substrate is formed simultaneously with at least one of the terminal electrode layer, the counter electrode layer, and the moisture-sensitive resistance layer .
[0031]
According to a sixth aspect of the present invention, there is provided the step of forming the reference electrode position reference portion simultaneously with the counter electrode layer, and the counter electrode position reference portion simultaneously with the moisture-sensitive resistance layer. Kanshime resistant position reference portion on the upper surface of which is constituted by a step of forming a.
[0032]
According to a seventh aspect of the present invention, there is provided the position reference portion according to the fifth aspect, wherein the terminal electrode position reference portion is formed simultaneously with the terminal electrode layer, and the terminal electrode position reference portion is formed simultaneously with the counter electrode layer. forming a counter electrode position reference portion on the upper surface, which is constituted by a step of forming a Kanshime resistant position reference portion on the upper surface of the counter electrode position reference part simultaneously with moisture-sensitive resistive layer.
[0033]
With these configurations and manufacturing methods, the insulating substrate can be attached to an electronic device while holding the gap between the upper surface and the back surface, eliminating the effects of mechanical stress and contamination on the moisture sensitive resistance layer. Can do.
[0034]
Further, by arranging a blank portion on the side of the upper surface of the sheet substrate and forming the counter electrode layer and the moisture-sensitive resistance layer, the chucking portion when holding the sheet substrate is the blank portion of the sheet substrate. By using the sheet substrate end surface portion in contact with the side portion of the upper surface, the counter electrode layer and the moisture-sensitive resistance layer can be prevented from being damaged by minute cracks and chips.
[0035]
(Embodiment 1 )
Hereinafter, a humidity sensor and a manufacturing method thereof according to Embodiment 1 of the present invention will be described with reference to the drawings.
[0036]
FIG. 1 is a top view of a humidity sensor according to Embodiment 1 of the present invention.
[0037]
In FIG. 1 , reference numeral 21 denotes a rectangular insulating substrate made of alumina or the like and having a length of about 17 mm and a width of 10 mm. Reference numeral 22 denotes a pair of terminal electrode layers made of a mixed material containing silver as a main component and including palladium, platinum, lead borosilicate glass, and the like provided on the upper surface of the insulating substrate 21 . Reference numeral 23 denotes a main component of silver of the same material as the terminal electrode layer 22 provided on the side opposite to the terminal electrode layer 22 on the upper surface of the insulating substrate 21 , and a mixed material containing palladium, platinum, lead borosilicate glass, and the like. This is a terminal electrode position reference portion of about 0.5 mm square. Reference numeral 24 denotes a pair of comb-shaped counter electrode layers made of a mixed material of a conductive particle such as carbon black provided on the upper surface of the insulating substrate 21 so as to overlap a part of the terminal electrode layer 22 and a phenol resin or an epoxy resin. . Reference numeral 25 denotes a portion between the counter electrodes where the comb-shaped counter electrode layer 24 on the upper surface of the insulating substrate 21 faces each other. 26 is composed mainly of a conductive particle such as carbon black provided so as to cover at least the upper surface of the comb-shaped counter electrode layer 24 and the counter electrode portion 25 and a copolymer of 2-hydroxyethyl methacrylate and glycidyl methacrylate. It is a moisture-sensitive resistance layer having a length of about 5 mm and a width of 8.5 mm made of a mixed material with a hygroscopic resin made into a crosslinked structure with the agent diaminodiphenylmethane. Reference numeral 27 denotes a blank portion of about 7 mm length × 10 mm width provided on the upper surface of the insulating substrate 21 on the side opposite to the terminal electrode layer 22 and the comb-shaped counter electrode layer 24 . Reference numeral 28 denotes a pair of lead terminals that are provided so as to be electrically connected to the upper surface of the terminal electrode layer 22 and that is obtained by applying a solder plating mainly composed of tin to iron or an iron-based alloy in which copper is ground-plated. , Each interval is about 5 mm. Reference numeral 29 denotes a solder connection portion made of tin, lead, silver or the like that connects the terminal electrode layer 22 and the lead terminal 28 .
[0038]
A manufacturing method of the humidity sensor configured as described above will be described below with reference to the drawings.
[0039]
2, FIG. 3, FIG. 4, FIG. 5, FIG. 6, and FIG. 7 are process diagrams showing a method of manufacturing a humidity sensor according to Embodiment 1 of the present invention.
[0040]
First, as shown in FIG. 2 , a portion surrounded by the dividing grooves 30 on the upper surface of the sheet substrate 31 made of alumina or the like having vertical and horizontal dividing grooves 30 is composed mainly of a pair of silver, palladium and lead borosilicate glass. A mixed paste material consisting of an inorganic mixture containing, for example, and an organic vehicle such as ethyl cellulose and terpineol is screen-printed, dried at about 150 ° C. for several minutes, and then at a peak temperature range of about 850 ° C. by a belt-type continuous firing furnace. The terminal electrode layer 32 and the terminal electrode position reference part 33 are formed at the same time by firing using a temperature profile that takes about 5 minutes.
[0041]
Next, as shown in FIG. 3 , an organic material such as benzyl alcohol is mixed with a mixture of conductive particles such as carbon black and phenol resin or epoxy resin on the upper surface of the sheet substrate 31 so as to overlap a part of the terminal electrode layer 32. The mixed paste material to which the solvent is added is arranged so that the blank portion 34 of the outermost individual substrate surrounded by the dividing grooves 30 is outside the sheet substrate 31 , screen-printed, and about 100 ° C. for several minutes. Preliminarily dried and cured and dried at about 190 ° C. for about 1 hour with a hot air circulation dryer to form the comb-shaped counter electrode layer 35 .
[0042]
Next, as shown in FIG. 4, the conductive particles such as carbon black so as to cover the counter electrode between the portions of the comb-shaped counter electrode layer 35 of the top surface and the sheet substrate 31 of the comb counter electrode layer 35, 2-hydroxyethyl A mixed paste material obtained by adding an organic solvent such as benzyl alcohol to a mixed material of a hygroscopic resin having a copolymer of methacrylate and glycidyl methacrylate as a main component and a cross-linked structure with a curing agent diaminodiphenylmethane is surrounded by a dividing groove 30 . Place the blank part 34 of the outermost individual substrate on the outside of the sheet substrate 31 , screen print, cure and dry at 80 ° C. to 150 ° C. for 1 hour to 2 hours, and moisture sensitive A resistance layer 36 is formed.
[0043]
Next, as shown in FIG. 5 , the moment force with the sheet substrate 31 and the strip substrate 37 acting as the point of action of the blank portion 34 or the terminal electrode layer 32 and the terminal electrode layer 38 in the horizontal dividing groove of the dividing groove 30 of FIG. 4. To perform primary division.
[0044]
Next, as shown in FIG. 6, secondary divided into individual substrates 40 in the piece dividing groove 39 in FIG. 5 the strip substrate 37 in FIG.
[0045]
Finally, as shown in FIG. 7 , the upper surface of the terminal electrode layer 32 of the individual substrate 40 was subjected to solder plating mainly composed of tin on copper, a copper alloy, iron or an iron-based alloy plated with copper, or the like. The humidity sensor is manufactured by connecting the lead terminals 41 with solder made of tin, lead, silver or the like.
[0046]
The characteristics of the humidity sensor configured and manufactured as described above will be described below.
[0047]
As shown in FIG. 1, by providing a blank portion 27 of about 7 mm × 10 mm on the opposite side of the solder connection portion 29 on the upper surface of the insulation substrate 21 of about 17 mm × 10 mm, the blank portion 27 and the insulating substrate 21 The blank portion 27 can be easily mounted on a mounting portion such as a printed circuit board by holding the blank portion 27 so as to be sandwiched.
[0048]
In particular, since the area of the blank portion 27 is made larger than the area of about 42.5 mm ² of the moisture-sensitive resistive layer 26 at about 70 mm ^2, and generally moisture-sensitive resistive layer 26 blackish, including carbon black, generally In particular, the recognizability of the blank portion 27 is improved from the contrast with the white insulating substrate 21 such as alumina, and the moisture sensitive resistance layer 26 is not accidentally touched even when manually attached, so that the handling is easy. You can work efficiently.
[0049]
Further, as shown in FIGS. 3 and 4, the blank portion 34 of the individual substrate surrounded by the outermost dividing groove 30 of the sheet substrate 31, so arranged to run in the outside of the sheet substrate 31, the sheet substrate The end surface portion on the short side where each of the blank portions 34 of the 31 is adjacent can be chucked at an arbitrary position, and the end surface portion on the other long side is selected and chucked by selecting the end surface portion in contact with the blank portion 34. In addition, damage to the terminal electrode layer 32 , the comb-shaped counter electrode layer 35, and the moisture sensitive resistance layer 36 can be reduced.
[0050]
Further , as shown in FIGS. 5 and 6, when the sheet substrate 31 is divided, if the blank portion 34 is used as an action point of division, mechanical stress is applied to the comb-shaped counter electrode layer 35 and the moisture sensitive resistance layer 36. It is not to give.
[0051]
Furthermore, as shown in FIG. 2, when the screen printing terminal electrode layer 32 on the sheet substrate 31, that adjust the spacing forming position to the goal of the outer peripheral end surface of the terminal electrode position reference unit 33 and the sheet substrate 31 Therefore, the position can be determined more easily than the target of the interval between the division groove 30 and the terminal electrode layer 32 with low recognizability.
[0052]
Furthermore, when the formation position is confirmed in each step, if the formation position of the terminal electrode position reference portion 33 deviates from the sheet substrate 31, it can be easily confirmed by visual inspection. .
[0053]
In the first embodiment, as shown in FIGS. 2, 3, and 4, the terminal electrode layer 32 and the comb-shaped counter electrode layer 35 are symmetric with respect to the horizontal dividing groove 30 at the center of the sheet substrate 31. and to form a Kanshime resistive layer 36, but it is not limited to this arrangement, which the same effect can be obtained if the arrangement blank portion 34 is formed on both of the outermost sheet substrate 31 Even in the arrangement in which the blank portion 34 is formed on one of the outermost sides of the sheet substrate 31 , it is possible to reduce damage to the moisture-sensitive resistance layer 36 that is the most important component as a humidity sensor.
[0054]
Further, in the first embodiment of the present invention, the terminal electrode position reference portion 33 is formed as a pair on each of the individual substrates surrounded by the dividing grooves 30 , but one on each specific individual substrate. Even if formed, the same effect can be obtained.
[0055]
In the first embodiment of the present invention, the terminal electrode position reference portion 33 is used as the position reference portion. However, the counter electrode position reference portion formed by screen printing simultaneously with the comb-shaped counter electrode layer 35 and the moisture sensitive resistance layer 36. Or a moisture-sensitive resistance position reference portion.
[0056]
In particular, if the terminal electrode position reference part, the counter electrode position reference part, and the moisture-sensitive resistance position reference part are sequentially stacked and formed, the manufacturing method can also be used as a formation pattern for position recognition of each formation position. There is an effect that can be done.
[0057]
Furthermore, in Embodiment 1 described above , the humidity sensor has been described with the configuration of the terminal electrode layer, the comb-shaped counter electrode layer, and the moisture-sensitive resistance layer, but the configuration of the comb-shaped counter electrode layer that also serves as the terminal electrode layer and the humidity-sensitive resistance layer is used. Even if there is, it is the same.
[0058]
Furthermore, in Embodiment 1 described above , the counter electrode layer that is electrically connected to the moisture-sensitive resistance layer has been described as having a comb shape. However, the present invention is not limited to this comb shape, and a pair of counter electrode layers having any shape can be used . Even if it is a structure, the same effect is acquired.
[0059]
【The invention's effect】
As described above, according to the present invention, the blank portion is provided on the opposite side of the upper surface of the insulating substrate from the counter electrode layer, and the position reference portion is provided in the blank portion. It can be easily attached to electronic equipment that does not have scratches or dirt on the moisture-sensitive resistance layer due to adhesion of oil or grease , and the sheet is formed by arranging a blank portion on the side of the upper surface of the sheet substrate. Humidity sensor that can reduce the counter electrode layer and the moisture sensitive resistance layer from being damaged by cracks and chips when the substrate is chucked , and further facilitates alignment during the formation of the terminal electrode, and its manufacture A method can be provided.
[0060]
In addition, when the sheet substrate immediately after screen printing is printed and formed on almost the entire surface of the sheet substrate by a method of vacuum-sucking the upper surface of the sheet substrate with a suction pad that is a general transfer means, the paste material is dried or Although it cannot be performed until the baking process is performed, according to the present invention, the suction conveyance method can be used similarly to the sheet substrate having the outer peripheral blank portion with the blank portion as a vacuum suction portion, and more responsive than the humidity sensor using the protective film. It is possible to provide a humidity sensor with good performance, very reasonable, excellent quality, reliability and performance, and a method for manufacturing the same.
[Brief description of the drawings]
FIG. 1 is a top view of a humidity sensor according to a first embodiment of the present invention. FIG . 2 is a process diagram showing the manufacturing method. FIG. 3 is a process diagram. FIG. 4 is a process diagram. 6] Process diagram [FIG. 7] Process diagram [ FIG. 8 ] (a) Top view of conventional humidity sensor (b) Cross section taken along line AA in FIG. 8 (a) [ FIG. 9 ] Manufacturing method Top view of the sheet substrate, which is the main part of the sheet [ Fig. 10 ] Lead terminal connection diagram of the manufacturing method [ Fig. 11 ] Top view of the sheet substrate [Explanation of symbols]
21 Insulating substrate
22 Terminal electrode layer
23 Terminal electrode position reference section
24 comb counter electrode layer
26 moisture sensitive resistance layer
27 blanks
28 lead terminals

Claims

A pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, a moisture sensitive resistance layer provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer, and electrically connected to the counter electrode layer A pair of lead terminals provided on the insulating substrate, a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate, and the blank portion formed separately from the moisture sensitive resistance layer, and and at least one position reference portion is a position reference with respect to the outer peripheral edge surface of the insulating substrate, a humidity sensor was made of the same material as at least one of the position reference part the counter electrode layer or the humidity-sensitive resistive layer.

A pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, a moisture sensitive resistance layer provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer, and electrically connected to the counter electrode layer A pair of lead terminals provided on the insulating substrate, a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate, and the blank portion formed separately from the moisture sensitive resistance layer, and and at least one position reference portion is a position reference with respect to the outer peripheral edge surface of the insulating substrate, a first position reference portion of the same material as either the position reference portion of the counter electrode layer or the humidity-sensitive resistive layer, A humidity sensor comprising a second position reference portion made of the same material as either the counter electrode layer or the moisture sensitive resistance layer different from the first position reference portion.

A pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, a moisture sensitive resistance layer provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer, and electrically connected to the counter electrode layer A pair of lead terminals provided on the insulating substrate, a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate, and the blank portion formed separately from the moisture sensitive resistance layer, and And at least one position reference portion serving as a position reference with respect to the outer peripheral end surface of the insulating substrate, and a terminal electrode layer provided between the insulating substrate and the counter electrode layer and electrically connected to the lead terminal. The humidity sensor which comprised the part with the same material as at least any one of the said terminal electrode layer, the said counter electrode layer, or the said moisture sensitive resistance layer.

A pair of counter electrode layers provided so as to face the upper surface of the insulating substrate, a moisture sensitive resistance layer provided on the upper surface of the insulating substrate so as to be electrically connected to the counter electrode layer, and electrically connected to the counter electrode layer A pair of lead terminals provided on the insulating substrate, a blank portion provided on the opposite side of the counter electrode layer on the upper surface of the insulating substrate, and the blank portion formed separately from the moisture sensitive resistance layer, and And at least one position reference portion serving as a position reference with respect to the outer peripheral end surface of the insulating substrate, and a terminal electrode layer provided between the insulating substrate and the counter electrode layer and electrically connected to the lead terminal. said part terminal electrode layer, a first position reference portion of the same material as one of the counter electrode layer or the humidity-sensitive resistive layer, wherein the terminal electrode layer different from the first position reference portion, the counter electrode layer or No moisture resistance layer The second position reference portion made of the same material as the first position reference portion and the terminal electrode layer, the counter electrode layer, or the moisture sensitive resistance layer different from the first position reference portion and the second position reference portion. A humidity sensor composed of a third position reference unit.

Forming a pair of counter electrode layers in a plurality of portions surrounded by the split grooves on the upper surface of the sheet substrate having the split grooves, forming a moisture sensitive resistance layer so as to conduct between the counter electrode layers, In a method of manufacturing a humidity sensor, comprising a step of dividing a sheet substrate having a dividing groove formed with a moisture-sensitive resistance layer into individual substrates, and a step of conducting the counter electrode layer of the individual substrates and the lead terminals. The counter electrode layer and a blank portion where the moisture sensitive resistance layer does not exist are arranged on the side portion of the upper surface of the sheet substrate having the divided grooves formed with the moisture sensitive resistance layer, and the terminal electrode layer is formed in the blank portion. , the counter electrode layer or at least one and at the same time the production method of the humidity sensor forming a position reference portion which is a position reference that faces the outer peripheral end surface of the sheet substrate of the humidity-sensitive resistive layer.

The position reference portion includes a step of forming the counter electrode position reference portion simultaneously with the counter electrode layer, and a step of forming the moisture sensitive resistance position reference portion on the upper surface of the counter electrode position reference portion simultaneously with the moisture sensitive resistance layer. The manufacturing method of the humidity sensor of claim | item 5 .

Position reference unit includes the steps of forming simultaneously the terminal electrode position reference portion and the terminal electrode layer, and forming a counter electrode position reference portion on the upper surface of the terminal electrode position reference part simultaneously with the counter electrode layer, the moisture-sensitive resistance layer 6. The method of manufacturing a humidity sensor according to claim 5, further comprising the step of forming a moisture sensitive resistance position reference portion on the upper surface of the counter electrode position reference portion.