JP3756237B2 - Thin foil holding device and hanging thin foil holding device - Google Patents

Thin foil holding device and hanging thin foil holding device Download PDF

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Publication number
JP3756237B2
JP3756237B2 JP05195596A JP5195596A JP3756237B2 JP 3756237 B2 JP3756237 B2 JP 3756237B2 JP 05195596 A JP05195596 A JP 05195596A JP 5195596 A JP5195596 A JP 5195596A JP 3756237 B2 JP3756237 B2 JP 3756237B2
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Japan
Prior art keywords
thin foil
holding device
side portion
horizontal
pair
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JP05195596A
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JPH09248780A (en
Inventor
野 幸 範 佐
村 昭 広 中
元 宏 志 野
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Nippon Mektron KK
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Nippon Mektron KK
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Description

【0001】
【発明が属する技術分野】
本発明は、薄箔に洗浄などの処理を施すために保持する装置に係り、とくに薄箔を垂直状態に挟持して保持する薄箔保持装置、およびこの薄箔保持装置を吊り下げる吊り下げ治具を組み合わせた吊り下げ式薄箔保持装置に関する。
【0002】
【従来の技術】
たとえば可撓性薄箔基板のような薄箔状ワークを洗浄する場合、その保持のためには次のような点に留意する必要がある。すなわち、(a)ワークの両面を一時に洗浄できること、(b)洗浄には超音波を使用するため、ワークの表面には何も接触しない状態にしておけること、(c)ワークを確実に保持できること、および(d)生産量を考慮し、複数枚を同時に洗浄でき、洗浄から乾燥まで同一の保持構造で処理できること、である。
【0003】
このようなワークを処理する既存の洗浄装置は、回路基板その他の加工部品などの洗浄用に製作されており、大別して次の2つに分けられる。その1は、洗浄槽が複数個に分かれており、網などで製作された篭が順に洗浄槽に抜き差しされていく構造のものである。その2は、ワークがコンベア上を横方向に搬送されて洗浄、乾燥各工程を流れていく機構を持つものである。
【0004】
【発明が解決しようとする課題】
このうち前者つまり洗浄槽を持つものは、網状の箱やスリットを設けたラックなどのワークに合致した収納用具が必要である上に、可撓性基板を周囲のラック部材に接触させずに確実に保持する機構は現在まで存在せず、そのままでは十分な洗浄ができない。
【0005】
他方、後者つまりコンベア搬送を行うものは、洗浄時に上方から噴射される洗浄液により薄箔自体が反り、うねりなどの変形をもたらすため、ワーク1つづつについて見ても全体的に均一に洗浄、乾燥することができない。また、搬送をローラによって行うため、ワークの下面に接する下ローラの存在により裏面の洗浄が不十分となるとともに、ローラによる汚れの転写および傷付きなどがあり、精密洗浄方法として適切ではない。
【0006】
本発明は上述の点を考慮してなされたもので、薄箔状のワークをその両面をできるだけ露出させかつ平坦な状態で保持し得る薄箔保持装置を提供することを目的とする。
【0007】
【課題を解決するための手段】
上記目的達成のため、本発明では、
請求項1記載の、水平辺部、およびこの水平辺部の両端から垂直に延びる一対の垂直辺部が相互に固着され前記垂直辺部の下端部間が開放端となって全体的にコ字状をなすように形成された枠組み部材と、一対の前記枠組み部材を前記水平辺部で連結し、前記開放端側が相互に開閉できるように支持するヒンジ部と、弾性材により形成され、前記枠組み部材の垂直辺部における互いに対応する位置に基端部が固定されて先端同士が対向配置される、前記枠組み部材1個当たり少なくとも4個ずつのワーク挟み込み用爪と、をそなえ、
前記ワーク挟み込み用爪は、その先端部同士が平面接触し得るように構成され、かつその先端が基端部よりも上方を向いて固着されたことを特徴とする箔保持装置、および
請求項2記載の、(a)水平辺部、この水平辺部の両側から垂直に延びる一対の垂直辺部が相互に固着されて前記垂直辺部の下端部間が開放端となって全体的にコ字状をなすように形成された一対の枠組み部材と、一対の前記枠組み部材を前記水平辺部で連結し、前記開放端側が相互に開閉できるように支持するヒンジ部と、弾性材により形成され、前記枠組み部材の垂直辺部における互いに対応する位置に基端部が固定されて先端同士が対向配置される前記枠組み部材1個当たりが少なくとも4個ずつのワーク挟み込み用爪と、をそなえた薄箔保持装置、(b)前記薄箔保持装置における前記枠組み部材の前記水平辺部が嵌入する少なくとも1以上の水平溝を有する水平部材と、この水平部材に固着され、前記水平部材を吊り下げる吊り部材と、をそなえた吊り下げ治具装置、とを組み合わせた吊り下げ式薄箔保持装置、
を提供するものである。
【0008】
【発明の実施の形態】
図1(a)、(b)および(c)は、本考案に係る薄箔保持装置の一実施例を示す正面図、右側面図および下面図である。この図に示すように、正面から見た形状が下向きのコ字状、つまり上部に水平辺がありその両側から垂直辺が垂下する形状で、開放部が下にある一対の枠組み部材1、2が、上部の水平辺部の両端寄りに設けられた2つのヒンジ3により相互に連結されており、枠組み部材1、2の下方開放端同士を開くことができる。
【0009】
そして、一対の枠組み部材1、2の開放端寄り部分には、挟み込み用爪4が設けられる。この挟み込み用爪4は、たとえばステンレススティール、リン青銅、ベリリウム銅、各種エンジニアリングプラスティックなどの弾性材料により構成する。そして、挟み込み用爪4は、1つの枠組み部材当たり4個づつ設けられており、一対の枠組み部材1、2は互いに対応する位置に対向するように挟み込み用爪4を有する。挟み込み用爪4は、第1の枠組み部材1と第2の枠組み部材2とを閉じ合わせたときに、両部材1、2の挟み込み用爪4同士が丁度ピンセットのように作用して、その間に薄箔を挟み込むものである。枠組み部材1、2にはそれぞれ4個づつの挟み込み用爪4が設けられているから、両部材1、2を閉じ合わせると4個のピンセットが形成されることになる。この4個のピンセットにより、ワークである薄箔Xの4隅が保持される。
【0010】
この4個のピンセットは、その先端が少し上向きになるように、各挟み込み用爪4が枠組み部材1、2に固定されている。こうして、洗浄液が挟み込み用爪4からワークXに垂れ落ちないようにしている。また、挟み込み用爪4の各先端は、ワークに面接触するように基端部に対してある角度をなすよう斜めになっている。これにより、一対の枠組み部材1、2を閉じ合わせたとき、ワークXは4個のピンセットの弾性を伴う保持作用によって平坦状態で確実に保持される。
【0011】
処理すべきワークとしては、材料的には、厚さ数μmないし数10μmの金属箔のみの場合、および金属箔の少なくとも一方の面に絶縁材層、さらには金属薄膜とか回路配線パターンまどが設けられていて可撓性を有するものであり、また寸法的には、概ね数10mm角から数100mm角程度のものである。
【0012】
図2は、図1に示した保持装置に対するワークの装着の仕方を示したものである。この場合、第2の枠組み部材2を下にしてヒンジ3が右側になるように、保持装置を置く。したがって、第1および第2の枠組み部材1、2の開放端が図における左側になる。そして、上側にある第1の枠組み部材1の開放端を持ち上げて第2の枠組み部材2との間に角度を持った隙間を形成した状態とする。
【0013】
次いで、第2の枠組み部材2における4個の挟み込み用爪4の上にワークXを載せる。そして、第1の枠組み部材1を第2の枠組み部材2に向けて下降回動させ、さらに両枠部材1、2同士を閉じ合わせることにより、ワークXを4個のピンセットによって確実に保持することができる。
【0014】
図3(a)および(b)は、図1および図2に示した実施例を複数個吊り下げて保持する治具を示したものである。この場合は、薄箔保持装置を4個吊り下げる構成となっており、そのために薄箔保持装置の水平辺が嵌入する4つの溝が設けられている。
【0015】
すなわち、保持装置懸垂部11には、薄箔保持装置の水平辺が嵌入する4個の溝12が適宜間隔を開けて平行配置されており、重心部に吊り金具13が設けられている。
【0016】
図4(a)、(b)は、図3に示した治具に薄箔保持装置を4個吊り下げた状態の左側面図および正面図である。図示のように、保持装置懸垂部11に、4個の薄箔保持装置を懸垂させる。保持装置懸垂部11の溝が適宜間隔を開けて設けられているから、薄箔保持装置同士は相互間に適度の隙間を保った状態で吊り下げれている。その状態で上方から洗浄液を放散すると、薄箔に対して洗浄液が万遍なく降りかかって各ワークにつき全面均一な洗浄ができる。
【0017】
洗浄終了の後、各薄箔保持装置を保持装置懸垂部11から引き外し、さらに図2により説明したように、第1および第2の枠組み部材1、2を押し開いて保持装置から薄箔Xを取り外す。
【0018】
【発明の効果】
本発明は上述のように構成したことにより、次のような効果を奏する。
【0019】
まず請求項1記載の構成により、コ字状をなすように形成された一対の枠組み部材をヒンジ部により各水平辺部で連結し、開放端側が相互に開閉できるように支持し、各枠組み部材の垂直辺部における互いに対応する位置に挟み込み用爪を設けたため、一対の枠組み部材を開いて薄箔状のワークを挟み込み用爪位置に置き、両枠組み部材を互いに閉じることにより、ワークを確実に挟んで保持することができる。そして、一対の枠組み部材を再び開けば、ワークを簡単に取り出すことができる。
【0023】
そして、請求項2記載の構成により、薄箔保持装置を吊り下げ治具装置に吊り下げてワークの処理を行うことができる。
【図面の簡単な説明】
【図1】同図(a)、(b)および(c)は、本考案に係る薄箔保持装置の一実施例を示す正面図、右側面図および下面図。
【図2】図1に示した保持装置に対するワークの装着の仕方を示した説明図。
【図3】同図(a)および(b)は、図1および図2に示した実施例を複数個吊り下げ保持する治具を示した左側面図および正面図。
【図4】同図(a)、(b)は、図3に示した治具に薄箔保持装置を4個吊り下げた状態の左側面図および正面図。
【符号の説明】
1 第1の枠組み部材
2 第2の枠組み部材
3 ヒンジ
4 挟み込み用爪
11 保持装置懸垂部
12 溝
13 吊り金具
X ワーク
[0001]
[Technical field to which the invention belongs]
The present invention relates to an apparatus for holding a thin foil to perform a process such as cleaning, and in particular, a thin foil holding apparatus for holding and holding a thin foil in a vertical state, and a hanging treatment for suspending the thin foil holding apparatus. The present invention relates to a hanging thin foil holding device in which tools are combined.
[0002]
[Prior art]
For example, when a thin foil-like workpiece such as a flexible thin foil substrate is washed, it is necessary to pay attention to the following points for holding the workpiece. That is, (a) Both surfaces of the workpiece can be cleaned at once, (b) Ultrasonic waves are used for cleaning, so that nothing can come into contact with the surface of the workpiece, and (c) The workpiece is securely held. And (d) Considering the production amount, a plurality of sheets can be washed at the same time, and can be processed with the same holding structure from washing to drying.
[0003]
Existing cleaning apparatuses for processing such workpieces are manufactured for cleaning circuit boards and other processed parts, and are roughly divided into the following two types. The first is a structure in which the washing tank is divided into a plurality of pieces, and the baskets made of a net or the like are sequentially inserted into and removed from the washing tank. No. 2 has a mechanism in which the work is transported laterally on the conveyor and flows through the cleaning and drying processes.
[0004]
[Problems to be solved by the invention]
Of these, the former, that is, those having a cleaning tank, require storage tools that match the work, such as a net-like box or a rack with slits, and the flexible substrate can be securely contacted with the surrounding rack members. There is no mechanism for holding the material until now, and sufficient cleaning cannot be performed as it is.
[0005]
On the other hand, the latter, that is, conveyor transport, causes the thin foil itself to warp and swell due to the cleaning liquid sprayed from above at the time of cleaning. Can not do it. Further, since the conveyance is performed by the roller, the back surface is not sufficiently cleaned due to the presence of the lower roller in contact with the lower surface of the workpiece, and the transfer of the dirt and scratches are caused by the roller, which is not suitable as a precision cleaning method.
[0006]
The present invention has been made in consideration of the above-described points, and an object of the present invention is to provide a thin foil holding device capable of holding a thin foil-like work in a flat state with both surfaces exposed as much as possible.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, in the present invention,
The horizontal side portion according to claim 1 and a pair of vertical side portions extending vertically from both ends of the horizontal side portion are fixed to each other, and the lower end portion of the vertical side portion is an open end so as to be generally U-shaped. A frame member formed so as to form a shape, a hinge portion that connects a pair of the frame members at the horizontal side portion, and supports the open end sides so that they can be opened and closed with each other, and an elastic material. At least four workpiece clamping jaws per one of the framework members, wherein the base end portions are fixed at positions corresponding to each other in the vertical side portion of the member and the distal ends thereof are opposed to each other;
3. The foil holding device, wherein the workpiece clamping nail is configured so that tip portions thereof can come into flat contact with each other, and the tip end is fixed upward with respect to the base end portion, and (A) a horizontal side portion and a pair of vertical side portions extending vertically from both sides of the horizontal side portion are fixed to each other so that the lower end portion of the vertical side portion is an open end and is generally U-shaped. A pair of frame members formed to form a shape, a pair of the frame members connected by the horizontal side portion, and a hinge portion that supports the open end sides to be opened and closed with each other, and an elastic material, A thin foil comprising at least four workpiece clamping claws per frame member in which base ends are fixed at positions corresponding to each other in the vertical side portions of the frame member and the tips are opposed to each other Holding device, (b) said thin A suspension treatment comprising: a horizontal member having at least one horizontal groove into which the horizontal side portion of the frame member of the foil holding device is fitted; and a suspension member fixed to the horizontal member to suspend the horizontal member. A suspension type thin foil holding device in combination with a device,
Is to provide.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
1 (a), (b) and (c) are a front view, a right side view and a bottom view showing an embodiment of a thin foil holding device according to the present invention. As shown in the figure, a pair of frame members 1 and 2 with a U-shape that is downward facing from the front, that is, with a horizontal side at the top and a vertical side hanging from both sides, with the open part below. Are connected to each other by two hinges 3 provided near both ends of the upper horizontal side, and the lower open ends of the frame members 1 and 2 can be opened.
[0009]
And the nail | claw 4 for pinching is provided in the part near the open end of a pair of frame members 1 and 2. As shown in FIG. This nail | claw 4 for pinching is comprised with elastic materials, such as stainless steel, phosphor bronze, beryllium copper, various engineering plastics, for example. And four nail | claws 4 for pinching are provided per one frame member, and a pair of frame members 1 and 2 have the nail | claw 4 for pinching so that it may oppose the position which mutually respond | corresponds. When the first frame member 1 and the second frame member 2 are closed, the sandwiching claws 4 act just like tweezers between the sandwiching claws 4 of both members 1 and 2. A thin foil is sandwiched between them. Since each of the frame members 1 and 2 is provided with four clamping claws 4, four tweezers are formed when the members 1 and 2 are closed. The four tweezers hold the four corners of the thin foil X that is the workpiece.
[0010]
Each of the four tweezers is fixed to the frame members 1 and 2 so that the tips of the tweezers 4 are slightly upward. In this way, the cleaning liquid is prevented from dripping down onto the workpiece X from the nail 4 for pinching. Moreover, each front-end | tip of the nail | claw 4 for pinching is slanting so that a certain angle may be made with respect to a base end part so that a surface may be contacted. As a result, when the pair of frame members 1 and 2 are closed, the workpiece X is reliably held in a flat state by the holding action accompanied by the elasticity of the four tweezers.
[0011]
As a workpiece to be processed, in the case of a metal foil only having a thickness of several μm to several tens of μm, and an insulating material layer on at least one surface of the metal foil, a metal thin film or a circuit wiring pattern It is provided and has flexibility, and in terms of dimensions, it is about several tens of mm square to several hundred mm square.
[0012]
FIG. 2 shows how the work is mounted on the holding device shown in FIG. In this case, the holding device is placed so that the hinge 3 is on the right side with the second frame member 2 facing down. Therefore, the open ends of the first and second frame members 1 and 2 are on the left side in the drawing. Then, the open end of the first frame member 1 on the upper side is lifted to form a gap having an angle with the second frame member 2.
[0013]
Next, the workpiece X is placed on the four clamping claws 4 in the second frame member 2. Then, the work frame X is securely held by the four tweezers by rotating the first frame member 1 downwardly toward the second frame member 2 and closing the frame members 1 and 2 together. Can do.
[0014]
FIGS. 3A and 3B show a jig for suspending and holding a plurality of the embodiments shown in FIGS. In this case, four thin foil holding devices are suspended, and for this purpose, four grooves into which the horizontal sides of the thin foil holding device are fitted are provided.
[0015]
That is, four grooves 12 into which the horizontal sides of the thin foil holding device are fitted are arranged in parallel at appropriate intervals in the holding device suspension portion 11, and a hanging metal fitting 13 is provided at the center of gravity.
[0016]
FIGS. 4A and 4B are a left side view and a front view of a state where four thin foil holding devices are suspended from the jig shown in FIG. As shown in the drawing, four thin foil holding devices are suspended from the holding device suspension 11. Since the groove | channel of the holding device suspension part 11 is provided with the space | interval suitably, the thin foil holding devices are suspended in the state which maintained the moderate clearance gap between each other. In this state, when the cleaning liquid is diffused from above, the cleaning liquid uniformly falls on the thin foil, and the entire surface can be uniformly cleaned for each workpiece.
[0017]
After completion of the cleaning, each thin foil holding device is pulled off from the holding device suspending portion 11, and as described with reference to FIG. 2, the first and second frame members 1 and 2 are pushed open to remove the thin foil X from the holding device. Remove.
[0018]
【The invention's effect】
Since the present invention is configured as described above, the following effects can be obtained.
[0019]
First, according to the structure of claim 1, a pair of frame members formed in a U-shape are connected to each horizontal side by hinges and supported so that the open ends can be opened and closed with each other. Since the claws for pinching are provided at positions corresponding to each other on the vertical side, the pair of frame members are opened, the thin foil-like workpiece is placed at the pinch nail position, and the two frame members are closed to each other to ensure the workpiece. Can be sandwiched and held. And if a pair of frame member is opened again, a workpiece | work can be taken out easily.
[0023]
And the structure of Claim 2 can suspend a thin foil holding | maintenance apparatus to a suspending jig apparatus, and can process a workpiece | work.
[Brief description of the drawings]
FIGS. 1A, 1B, and 1C are a front view, a right side view, and a bottom view showing an embodiment of a thin foil holding device according to the present invention.
FIG. 2 is an explanatory view showing how to attach a workpiece to the holding device shown in FIG. 1;
FIGS. 3A and 3B are a left side view and a front view showing a jig for suspending and holding a plurality of the embodiments shown in FIGS. 1 and 2; FIG.
FIGS. 4A and 4B are a left side view and a front view of a state in which four thin foil holding devices are suspended from the jig shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st frame member 2 2nd frame member 3 Hinge 4 Claw 11 Clamping | holding apparatus suspension part 12 Groove | channel 13 Suspension metal fitting X Workpiece

Claims (2)

水平辺部、およびこの水平辺部の両端から垂直に延びる一対の垂直辺部が相互に固着され前記垂直辺部の下端部間が開放端となって全体的にコ字状をなすように形成された枠組み部材と、
一対の前記枠組み部材を前記水平辺部で連結し、前記開放端側が相互に開閉できるように支持するヒンジ部と、
弾性材により形成され、前記枠組み部材の垂直辺部における互いに対応する位置に基端部が固定されて先端同士が対向配置される、前記枠組み部材1個当たり少なくとも4個ずつのワーク挟み込み用爪と、をそなえ、
前記ワーク挟み込み用爪は、その先端部同士が平面接触し得るように構成され、かつその先端が基端部よりも上方を向いて固着された
ことを特徴とする箔保持装置。
A horizontal side portion and a pair of vertical side portions extending vertically from both ends of the horizontal side portion are fixed to each other, and the lower end portion of the vertical side portion is formed as an open end to form an overall U shape. Framed members,
A pair of the frame members connected at the horizontal side portion, and a hinge portion that supports the open end sides to be opened and closed with each other;
At least four workpiece clamping claws per one frame member, which are formed of an elastic material, and whose base end portions are fixed at positions corresponding to each other in the vertical side portions of the frame member and whose tips are opposed to each other; ,
The workpiece holding nail is configured so that the tip portions thereof can come into planar contact with each other, and the tip end thereof is fixed upward with respect to the base end portion.
下記の薄箔保持装置(a)と吊り下げ治具装置(b)とを組み合わせた吊り下げ式薄箔保持装置。
(a)水平辺部、この水平辺部の両側から垂直に延びる一対の垂直辺部が相互に固着されて前記垂直辺部の下端部間が開放端となって全体的にコ字状をなすように形成された一対の枠組み部材と、
一対の前記枠組み部材を前記水平辺部で連結し、前記開放端側が相互に開閉できるように支持するヒンジ部と、
弾性材により形成され、前記枠組み部材の垂直辺部における互いに対応する位置に基端部が固定されて先端同士が対向配置される前記枠組み部材1個当たりが少なくとも4個ずつのワーク挟み込み用爪と、
をそなえた薄箔保持装置。
(b)前記薄箔保持装置における前記枠組み部材の前記水平辺部が嵌入する少なくとも1以上の水平溝を有する水平部材と、
この水平部材に固着され、前記水平部材を吊り下げる吊り部材と、
をそなえた吊り下げ治具装置。
A hanging thin foil holding device in which the following thin foil holding device (a) and a hanging jig device (b) are combined.
(A) A horizontal side portion and a pair of vertical side portions extending vertically from both sides of the horizontal side portion are fixed to each other, and the lower end portion of the vertical side portion is an open end to form an overall U shape. A pair of frame members formed as follows:
A pair of the frame members connected at the horizontal side portion, and a hinge portion that supports the open end sides to be opened and closed with each other;
At least four workpiece clamping claws per frame member formed of an elastic material and having base ends fixed at positions corresponding to each other in the vertical sides of the frame member and the tips facing each other; ,
A thin foil holding device.
(B) a horizontal member having at least one horizontal groove into which the horizontal side portion of the frame member in the thin foil holding device is fitted;
A suspension member fixed to the horizontal member and suspending the horizontal member;
This is a hanging jig device.
JP05195596A 1996-03-08 1996-03-08 Thin foil holding device and hanging thin foil holding device Expired - Fee Related JP3756237B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05195596A JP3756237B2 (en) 1996-03-08 1996-03-08 Thin foil holding device and hanging thin foil holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05195596A JP3756237B2 (en) 1996-03-08 1996-03-08 Thin foil holding device and hanging thin foil holding device

Publications (2)

Publication Number Publication Date
JPH09248780A JPH09248780A (en) 1997-09-22
JP3756237B2 true JP3756237B2 (en) 2006-03-15

Family

ID=12901306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05195596A Expired - Fee Related JP3756237B2 (en) 1996-03-08 1996-03-08 Thin foil holding device and hanging thin foil holding device

Country Status (1)

Country Link
JP (1) JP3756237B2 (en)

Also Published As

Publication number Publication date
JPH09248780A (en) 1997-09-22

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