JP3753222B2 - Sample feeder - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a sample supply apparatus for supplying a sample (particle) to a plasma generation unit of an element analyzer using, for example, microwave induction plasma (hereinafter referred to as “MIP”).
[0002]
[Prior art]
First, an elemental analyzer to which the sample supply device of the present invention is applied will be briefly described. The element analyzer is composed of a disperser and an analyzer.
As a disperser, an apparatus for supplying a sample to a plasma generator (see Japanese Patent Application Laid-Open No. 4-5554), and as an analyzer, an emission spectroscopic detector (see Japanese Patent Application Laid-Open No. Hei 4). No.-5555 is known).
[0003]
In other words, the disperser converts the rotation of the first motor to the horizontal rotational motion of all arms, the aspirator, the arm on which the sample holder for fixing the filter with the sample attached is mounted. A fixed shaft that rotates, and a ball screw that converts the rotation of the second motor into a linear motion in the vertical direction of the arm, and the carrier gas is in a state where the suction port of the aspirator is close to a certain distance from the filter. When supplied to the aspirator, the sample is sucked by the aspirator and supplied to the plasma generation unit using the discharge tube.
[0004]
The analyzer includes, for example, a discharge tube located on the disperser side, a cavity that causes microwaves to resonate in the cavity to generate MIP in the outer tube of the discharge tube, an optical system that extracts and collects in the axial direction of the outer tube, In addition, a signal processing unit for spectrally processing the light collected by the optical system and performing signal processing is provided to detect the element to be measured in the sample.
[0005]
FIG. 5 is a diagram for explaining an apparatus for supplying a sample to the plasma generation unit.
In the figure, 100 is a disperser which is a sample introduction device, 101 is a carrier gas introduction port for introducing a carrier gas made of Ar or He, 102 is a substitution gas introduction port for introducing a substitution gas such as Ar or He, and 103a 103 to 103e are on-off valves, 104 and 105 are gas discharge ports, 106 is a suction pump, 107 is a filter with fine particles attached to the surface, 108 is an aspirator, 109 is a discharge tube, 110 is a cavity, 111 is microwave induction Plasma.
[0006]
In such a configuration, when the center of the cavity 110 is irradiated with microwaves from a microwave generator (not shown), the carrier gas in the discharge tube 109 inserted in the center of the cavity 110 is excited. Thus, microwave induction plasma 111 is generated.
[0007]
6 (a) and 6 (b) show the main parts of a disperser used in such a sample supply device. 1 is configured to prevent leakage of air from the outside with screws, seal members, etc. 2 is an aspirator for sucking a sample on a filter (not shown) and supplying it to a discharge tube (see FIG. 6), 2 ′ is a suction port of the aspirator, 3 is a nozzle closing member, 4 Is a first arm having a nozzle closing member 3 attached to the tip. The chamber 1 constitutes a gas replacement part and the like and communicates with the aspirator 2 through a suction port 2 '.
[0008]
The nozzle closing member 3 is attached in the vicinity of the tip of the first arm 4, and the first arm 4 is attached to the column 6 together with the second arm 8. The nozzle closing member 3 blocks the communication between the suction port 2 ′ and the chamber 5 by covering the suction port 2 ′ by raising and lowering the first arm 4 based on the rotation of the column 6.
[0009]
A filter (not shown) from which a sample has been collected is mounted on a filter holder 7 provided near the tip of the second arm 8. The distance between the filter mounted on the filter holder 7 and the suction port of the aspirator 2 is controlled to be 0.1 mm or less, for example. The replacement window 9 is used when removing the filter from the filter holder 7.
[0010]
In such a configuration, the operation is as follows.
First, as shown in FIG. 7, the filter assembly (not shown) in which the first and second arms are arranged at the position of the replacement window 9 and the replacement window 9 is opened to collect the sample (particle) is attached to the filter holder 7. Put it on. Next, the column 6 is rotated, and the sample holder 7 and the nozzle closing member 3 are lowered via the first arm 4 and the second arm 8.
[0011]
Thereafter, the first arm 4 and the second arm 8 are rotated in the direction indicated by the thick arrow F in FIG. 7 to obtain the state shown in FIG. In this state, the column 6 is rotated to raise the nozzle closing member 3 and seal the suction port 2 '.
[0012]
Thereafter, the on-off valves 103b and 103d in FIG. 5 are closed and the on-off valve 103c is opened. In this state, the suction pump 106 is driven to suck the air in the chamber 5 to make the chamber vacuum.
[0013]
When the inside of the chamber 1 reaches a certain degree of vacuum, the on-off valve 103c is closed and the on-off valve 103b is opened to fill the chamber 5 with a replacement gas.
When the replacement gas is filled and the inside of the chamber 1 reaches atmospheric pressure, the on-off valve 103d is opened to release the inside of the chamber 5 to the atmosphere. At the same time, the column 6 shown in FIG. 6B is rotated to lower the nozzle closing member 3, and the first arm 4 and the second arm 8 are further rotated to the position shown in FIG.
[0014]
Thereafter, the column 6 is rotated to raise the sample holder 7. After the sample holder 7 has stopped rising at a predetermined position, the suction of the sample is started.
[0015]
[Problems to be solved by the invention]
By the way, in such a conventional sample supply apparatus, when exchanging the sample holder, it is necessary to remove the exchange window 9 and set the sample holder on the filter holder 7 from the upper part. There was a problem that the sample holder might be dropped.
The present invention has been made to solve the above-described problems of the prior art, and an object of the present invention is to provide a sample supply device that improves workability and simplifies operability.
[0016]
[Means for Solving the Problems]
The configuration of the present invention for achieving such an object is as follows.
A sample introducing means on which a sample tray is placed and provided so as to be able to be taken in and out of the chamber from a predetermined position in the chamber;
A sample tray storage means arranged along a side surface of the sample introduction means , and storing a plurality of sample trays on a straight line at a predetermined interval;
A slider that moves above a line connecting the center of the sample tray placed in the state where the sample introduction means is located outside the chamber and the center of the sample tray stored in the sample tray storage means;
Comprising sample tray gripping means provided on the slider;
The sample tray holding means is controlled so that the sample tray on which the sample that has been measured is placed and the sample tray on which the unmeasured sample is placed are exchanged with the sample introduction means being located outside the chamber. It is characterized by having constituted so .
[0017]
A sample introducing means on which a sample tray is placed and provided so as to be able to be taken in and out of the chamber from a predetermined position in the chamber;
A sample holder storing means arranged along a side surface of the sample introducing means , and storing a plurality of sample holders on a straight line at a predetermined interval;
A slider that moves above a line connecting the center of the sample tray placed in the state where the sample introduction means is located outside the chamber and the center of the sample holder stored in the sample holder storage means;
A sample holder holding means provided on the slider;
The sample holder gripping means is controlled to exchange the sample holder on which the measured sample is placed and the unmeasured sample holder in a state where the sample introduction means is located outside the chamber . [0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an example of an embodiment of claim 1 of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing an outline of a sample supply apparatus according to the present invention, FIG. 2 is a perspective view showing a relationship between a sample tray and sample introduction means, and FIG. 3 shows a state in which the slider and the sample tray are positioned on the sample introduction means. It is a perspective view.
[0023]
In FIG. 1, reference numeral 1 a denotes a chamber, which is different from the conventional chamber 1 shown in FIG. 6 in that an opening 11 for inserting and removing the sample introduction means 10 is provided on the lower side surface of the exchange window 9.
[0024]
Reference numeral 20 denotes a sample supply means configured to include the sample introduction means 10. The sample supply means 20 is fixed in close contact with the side surface of the chamber 1a, and has a sample tray storage means 22 for storing the sample tray 21 at a predetermined position and interval.
[0025]
On the sample tray 21, as shown in the enlarged view of FIG. 2, five sample holders 41a to 41e are placed at equal intervals on the circumference of a disc partly cut out. The individual sample holders 41a are used for checking.
[0026]
21a is a positioning hole, and 21b is a through-hole into which a taper shaft 10a for rotating the sample tray is inserted. Although not shown in the figure, the rotation mechanism (not shown) is in a state where the sample introduction means 10 is inserted into the chamber 1a. The sample holder 21 is sequentially sent to a predetermined position (aspirator suction port: see FIGS. 6 and 7). 21c is a protrusion held by the claw 30a of the chuck 30 shown in FIG.
[0027]
Returning to FIG. 1, the first support column 23 is fixed to one end of the sample tray storage means 22, and the second support column 25 incorporating the motor 24 is fixed to the other end. The two shafts 26 are stretched in parallel.
[0028]
A slider 27 is held through the two shafts 26 and is moved along the shafts 26 according to the movement of the timing belt 28 engaged with the rotation shaft (not shown) of the motor 24 incorporated in the second support column 25. Move.
[0029]
The slider 27 incorporates a chuck drive mechanism 29 that can move in a direction perpendicular to the movement of the slider, and a chuck 30 having three claws 30 a is fixed below the chuck drive mechanism 29. .
[0030]
The rotation timing of the motor 24, the vertical movement of the chuck drive mechanism 29, the opening and closing of the chuck 30, the loading and unloading of the sample introduction means 10, and the rotation of the sample tray 21 are controlled by a control device (not shown). Further, the centers of the three sample trays 21 are arranged so as to coincide with the center of the taper shaft 10a in a state where the sample introduction means 10 is pulled out.
[0031]
In the above configuration, first, the three sample trays 21 to which the sample holders 41 are mounted are placed on the sample tray storage means 22. Next, when the control means is instructed to start measurement, the sample introduction means 10 is pulled out of the chamber 1 a, and the motor 24 rotates to drive the timing belt 28 and is attached to the slider 27. The center of the chuck 30 is moved onto the sample tray 21 at the position “a”.
[0032]
Next, the chuck drive mechanism 29 is driven downward, and the claw 30a lowered to a predetermined position grasps the protrusion 21c of the sample tray 21 and rises to the original position. Next, when the motor 24 rotates and the timing belt 28 is driven, the slider 27 moves onto the sample introduction means 10, and the chuck drive mechanism 29 descends from that position, and the sample tray 21 is moved as shown in FIG. A through hole 21b formed at the center of the sample is inserted into the tapered shaft 10a of the sample introduction means 10, and the positioning hole 21a is inserted into the positioning pin 10b (see FIG. 2) to restrict the movement in the rotational direction.
[0033]
Next, when the claw 30a is opened and the chuck driving mechanism 29 is moved upward to return to the original position, the sample introduction means 10 is inserted into the chamber 1a and the sample holder 41 placed on the sample tray 21 is shown. The sample is sucked by the aspirator by being transported to a predetermined position by the driving means that does not.
[0034]
When all the samples on the sample tray 21 have been measured, the sample insertion means 10 is pulled out, and the sample tray 21 is conveyed to the original position B by an operation reverse to the above. Next, the sample placed on the sample tray 21 at the positions of (2) and (2) is measured by the same operation, and the process ends.
[0035]
FIG. 4 shows an example of the embodiment of claim 2 . In the figure, the same elements as those in FIG. In this embodiment, one sample tray 21 is disposed in the sample introduction means 10 and is rotatable by a motor 24a and a drive arm 24b that engages with a rotation shaft of the motor.
[0036]
In this embodiment, the sample holder 41 is arranged on the sample storage means 22 on a straight line at equal intervals, and the center of the sample tray is positioned on the extension of the straight line.
[0037]
Here, the slider 27 grips the sample holders 41 one by one, conveys them to the sample tray 21 arranged in the sample introduction means 10 and places them at a predetermined position, and the chuck driving means 29 returns to the original position. At this point, the sample tray 21 is controlled to rotate at a predetermined angle, and then the sample holder 41 is positioned to be placed.
[0038]
The slider 27 conveys the sample holders 21 to i to the sample introduction means 10 in accordance with a sequence programmed in advance. When the conveyance is completed, the drive arm 24b moves to a position where there is no hindrance to the insertion of the sample introduction means 10.
[0039]
Thereafter, the sample introduction means 10 is inserted into the chamber 1a, and the sample on the sample holder 41 is sucked by the aspirator.
[0040]
When all of the samples on the sample tray 21 have been measured, the sample insertion means 10 is pulled out, and the sample holder 41 is sequentially conveyed to the original positions (i) to (e) by an operation reverse to the above. Next, the sample holder 41 in the position of H is measured by the same operation, and the process is completed.
[0041]
Although not shown in the figure, the sample supply means generates dust when driving the motor, slider, sample introduction means, and the like. Therefore, the whole or a part of the sample supply means may be enclosed by a cover, or dust generated by vacuuming the enclosed part may be sucked.
[0042]
The foregoing description of the present invention has only shown certain preferred embodiments for purposes of illustration and illustration. Accordingly, it will be apparent to those skilled in the art that the present invention can be modified and modified in many ways without departing from the essence thereof. For example, the chuck 30 and the sample tray 21 can be arbitrarily designed in addition to the illustrated shapes, and the driving method of the slider 27 is not limited to the illustrated one.
[0043]
Also, the control sequence can be arbitrarily changed. In short, any control sequence may be used as long as a plurality of samples can be automatically measured in sequence. The scope of the present invention defined by the description in the appended claims is intended to include modifications and variations within the scope.
[0044]
【The invention's effect】
As described above in detail with reference to the embodiments , according to claim 1 of the present invention, there is provided a sample introducing means on which a sample tray is placed, and is provided so as to be freely inserted into and removed from a predetermined position in the chamber. ,
A sample tray storage means arranged along a side surface of the sample introduction means , and storing a plurality of sample trays on a straight line at a predetermined interval;
A slider that moves above a line connecting the center of the sample tray placed in the state where the sample introduction means is located outside the chamber and the center of the sample tray stored in the sample tray storage means;
Comprising sample tray gripping means provided on the slider;
The sample tray holding means is controlled so that the sample tray on which the sample that has been measured is placed and the sample tray on which the unmeasured sample is placed are exchanged with the sample introduction means being located outside the chamber. and then, is, it is possible to work with efficiency because no fear of dropping the sample unit within the chamber, and automatically interchangeable configurable using the control unit a plurality of samples .
[0045]
Further, Oite to claim 2, the sample tray is placed, a sample introduction means provided freely out from a predetermined position in the chamber outside the chamber,
A sample holder storing means arranged along a side surface of the sample introducing means , and storing a plurality of sample holders on a straight line at a predetermined interval;
A slider that moves above a line connecting the center of the sample tray placed in the state where the sample introduction means is located outside the chamber and the center of the sample holder stored in the sample holder storage means;
A sample holder holding means provided on the slider;
The sample holder gripping means is controlled to exchange the sample holder on which the measured sample is placed and the unmeasured sample holder in a state where the sample introduction means is located outside the chamber . As a result, there is no fear of dropping the sample unit inside the chamber, and a plurality of samples can be automatically exchanged using the control means, so that work efficiency can be improved.
[0046]
[Brief description of the drawings]
FIG. 1 is a perspective view showing an outline of a sample supply device of the present invention.
FIG. 2 is a perspective view showing a relationship between a sample tray and sample introduction means.
FIG. 3 is a perspective view showing a state in which a slider and a sample tray are positioned on a sample introduction unit.
FIG. 4 is a perspective view showing an outline of another sample supply device of the present invention.
FIG. 5 is a diagram for explaining a conventional technique.
FIG. 6 is a diagram for explaining a conventional technique.
FIG. 7 is a diagram for explaining a conventional technique.
FIG. 8 is a diagram for explaining a conventional technique.
[Explanation of symbols]
1a chamber 10 sample introduction means 10a taper shaft 11 opening 20 sample supply means 21 sample tray 22 sample tray storage means 23 first support 24, 24a motor 25 second support 26 shaft 27 slider 28 timing belt 29 chuck drive mechanism 30 chuck 30a Claw 41 Sample holder

Claims (2)

A sample introduction means on which a sample tray is placed, and is provided so as to be freely inserted into and removed from a predetermined position in the chamber;
A sample tray storage unit disposed along a side surface of the sample introduction unit and storing a plurality of sample trays in a straight line at a predetermined interval;
A slider that moves above the line connecting the center of the sample tray placed in the state where the sample introduction means is located outside the chamber and the center of the sample tray stored in the sample tray storage means;
A sample tray holding means provided on the slider;
Controlling the sample tray holding means so that the sample tray on which the sample that has been measured is placed and the sample tray on which the unmeasured sample is placed are exchanged in a state where the sample introduction means is located outside the chamber. A sample introduction device characterized by being configured to do so . A sample introduction means on which a sample tray is placed, and is provided so as to be freely inserted into and removed from a predetermined position in the chamber;
A sample holder storage means arranged along a side surface of the sample introduction means , and storing a plurality of sample holders on a straight line at a predetermined interval;
A slider that moves above a line connecting the center of the sample tray placed in the state where the sample introduction means is located outside the chamber and the center of the sample holder stored in the sample holder storage means;
A sample holder holding means provided on the slider;
The sample holder holding means is configured to be controlled so that the sample holder on which the measured sample is placed and the unmeasured sample holder are exchanged with the sample introduction means positioned outside the chamber . A sample introduction device characterized by that.

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