JP3746089B2 - Compressor performance deterioration diagnosis device - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a nondestructive abnormality diagnosis of a compressor, and more particularly to a method and an apparatus for diagnosing an abnormality in compression performance of a compressor by vibration.
[0002]
[Prior art]
As a compressor, there is a compressor that compresses a refrigerant such as used in a freezing and refrigeration apparatus. This compressor is usually connected to a refrigeration system, and has a basic function of sucking low-temperature and low-pressure refrigerant gas, adiabatically compressing in the compressor, and discharging high-temperature and high-pressure refrigerant gas.
[0003]
However, the compression element portion of the compressor is made of metal, and there are many sliding portions between the metals. For this reason, for example, when foreign matters such as dust are mixed in the sliding portion, the foreign matter causes the sliding portion to be scratched and cause a decrease in compression performance (for example, freezing capacity) due to refrigerant leakage during compression. Due to scratches on the sliding parts, the sliding parts wear and cause compression failure.
[0004]
In addition, a clearance may be largely assembled due to a mistake in assembling the compressor, and a prescribed compression performance may not be output due to refrigerant leakage during compression.
[0005]
For this reason, in order to determine a decrease in compression performance or a compression failure due to these refrigerant leaks, the compressor was separated from the refrigeration system and evaluated with a calorie measuring device.
[0006]
However, this was expensive and time consuming, and it was practically impossible to manage the numbers. In addition, it is conceivable to detect the temperature in the freezer compartment, but not only the performance of the compressor, but also various causes, such as refrigerant gas, heat exchanger, heat insulation performance, temperature detection method, etc. It was not something that could be diagnosed correctly.
[0007]
For this reason, a method for efficiently and accurately diagnosing the degree of performance deterioration of the compressor has been desired.
[0008]
In order to meet these demands, there is a method of determining whether the compressor is operating abnormally by detecting a current value such as current or gas pressure and a pressure value.
[0009]
In addition, in order to detect abnormalities inside the compressor at an early stage, a method for detecting and diagnosing vibration, sound, and AE signals transmitted to the outer shell of the compressor has been devised.
[0010]
For example, Japanese Patent Laid-Open Nos. 62-75095 and 2-205728 have been proposed, and Japanese Patent Laid-Open No. 62-75095 discloses compression for detecting abnormalities such as cylinder flaws and garbage in the compressor. There is a method in which noise or vibration generated from a machine is detected, and an abnormality is determined by comparing with a reference value based on a ratio between a maximum value and a minimum value of an integrated fluctuation amount of a signal for each section divided in a wavelength direction.
[0011]
Japanese Patent Laid-Open No. 2-205728 discloses an AE signal generated from a compressor in order to detect defects such as scratches and wear on a sliding portion, and one cycle is obtained from a signal obtained by detecting the AE signal by envelope detection. A method has been devised in which an abnormality is determined by comparing with a reference value based on the number of AE signals generated exceeding a certain threshold value and the intensity of the rotational tuning component.
[0012]
[Problems to be solved by the invention]
However, in the configuration as described above, the current detection cannot determine that the compressor does not cause a relatively strong deterioration that causes compression failure, and detects a subtle change in compression performance due to gas leakage during compression. I can't.
[0013]
The same applies to gas pressure detection. Furthermore, in the method disclosed in Japanese Patent Laid-Open No. 62-75095, it can be judged only that the abnormality can be recognized even by a sense of hearing such as foreign matter mixed in the compressor, and basically the fluctuation of the mechanical vibration is extracted. The compression performance cannot be determined.
[0014]
Further, even in the diagnosis using the AE signal in Japanese Patent Laid-Open No. 2-205728, the feature of the AE signal due to the damage of the sliding portion is quantified, and there is a problem that the compression performance of the compressor cannot be diagnosed. there were.
[0015]
The present invention has been made in view of the above problems, and an object of the present invention is to provide a compressor performance deterioration diagnosis apparatus capable of efficiently and accurately diagnosing the degree of compression performance deterioration of a compressor.
[0016]
[Means for Solving the Problems]
In order to achieve the above object, a compressor performance deterioration diagnosis device according to the present invention includes a sensor for detecting a vibration waveform generated by fluid vibration generated in the process of compressing refrigerant in a compressor, and a vibration waveform. An amplifier for amplifying, a waveform recording apparatus for recording a signal output from the amplifier, a filter for removing noise components of a signal output from the waveform recording apparatus or the amplifier, and a signal output from the filter as A / An A / D converter for D conversion, a waveform processor for processing the characteristics of a signal output from the A / D converter, and determining a performance deterioration degree from the waveform processing value, and these results It consists of a display to display and a recording device to record these results, and by quantifying the unsteady component of fluid vibration generated in the compression process of the compressor in the waveform processor With judges ability deterioration degree, the quantification process of non-stationary component of the fluid vibration is performed by the waveform processor, means for dividing an input vibration waveform for each cycle, averaging the divided waveform for each this period Means for processing; means for calculating a difference waveform between the divided waveform and the waveform obtained by the averaging process; means for calculating a square of the difference; and averaging the squared waveform to obtain a distributed waveform. Means for obtaining, means for obtaining the dispersion power by integrating the dispersion waveform, means for obtaining the vibration power by taking the root mean square of the vibration waveform, and means for obtaining the relative dispersion value by calculating the ratio of the dispersion power and the vibration power Thus, the degree of performance deterioration is determined.
[0018]
Further, as means for dividing the vibration waveform input to the waveform processor for each period, the vibration waveform is divided for each period using autocorrelation analysis processing.
[0019]
Further, in the means for integrating the dispersed waveform in the waveform processor, the dispersion waveform is smoothed and then integrated.
[0020]
Further, in the means for integrating the distributed waveform performed by the waveform processor, the integration is performed while the valve of the compressor is open.
[0021]
In addition, in the means for determining the integration range of the dispersion waveform, the integration range while the valve of the compressor is open is provided with a threshold value for the dispersion waveform and obtained from the intersection.
[0022]
[Action]
In the present invention, the sensor detects the vibration waveform up to the ultrasonic region using the vibration of the fluid transmitted to the outer shell of the compressor as the excitation source, and the detected signal is a minute signal. This signal is amplified. This signal is then recorded in a waveform recorder so that it can be processed later. The filter removes a low frequency component and a high frequency component in order to remove noise components generated from other than the compressor of the signal output from the waveform recording device or the amplifier. The filtered signal is converted from an analog signal to a digital signal by an A / D converter and output to a waveform processor having a DSP. In this waveform processor, unsteady vibration generated due to the influence of fluid vibration of the input signal is quantified. Furthermore, the compression performance of the compressor is determined from a database representing the compression performance (for example, refrigeration capacity) corresponding to the quantified numerical value. These results are output on a screen or the like by a display, and the degree of performance deterioration can be confirmed. Further, the result is stored in a recording device such as a hard disk, and data is accumulated.
[0023]
Further, in the waveform processor, the input vibration waveform is divided for each period, and the divided vibration waveform is subjected to an averaging process. Next, the difference between the average waveform and the waveform divided for each period is obtained, and then the square of the difference is calculated for each waveform divided for each period. Further, the calculated waveform is subjected to addition averaging processing, and the average of the dispersed waveforms of the respective divided waveforms with respect to the average waveform of one period is calculated. Subsequently, integration is performed on this waveform, and the dispersion power is calculated. On the other hand, root mean square is performed on the input vibration waveform to obtain the vibration power. Finally, a ratio between the calculated vibration power and dispersion power is calculated, and a relative dispersion value is obtained. Thereby, the unsteady component of the fluid vibration corresponding to the compression performance of the compressor can be quantified, and the compression performance can be accurately determined.
[0024]
Further, an autocorrelation analysis calculation is performed in order to determine a periodic pitch for dividing the vibration waveform input to the waveform processor for each period. As a result, the rotation cycle appears as a peak of the correlation analysis waveform, and the interval between the peaks represents a pitch of one cycle. Based on this pitch, the vibration waveform is divided for each cycle. Thereby, there is no error in each waveform due to division, and accurate waveform division can be performed.
[0025]
Further, during the calculation of the dispersion power from the dispersion waveform, the dispersion waveform is once smoothed, and then integrated to calculate the dispersion power. Thereby, the clarification of the integration range and the data are simplified, and the calculation speed can be improved and the data can be easily handled.
[0026]
Furthermore, when integrating the dispersion waveform, it is integrated while the compressor valve is open, so that the dispersion power related to the fluid vibration corresponding to the compression performance can be extracted accurately, and the deterioration of the compression performance can be accurately detected. Diagnose well.
[0027]
Further, in determining the range in which the valve of the compressor is opened, the range in which the valve is opened is determined from the intersection of the threshold value and the dispersion waveform. Thereby, the opening range of the valve can be detected with high accuracy.
[0028]
【Example】
Here, it demonstrates in detail taking the compressor used for a refrigerator etc. as an example.
[0029]
Example 1
A compressor performance deterioration diagnosis apparatus according to an embodiment of the present invention will be described below with reference to the drawings.
[0030]
In FIG. 1, 1 is a compressor which compresses CFCs and the like, and 2 is a four-point weld that fixes a compression element to a sealed case 3 which is an outer shell. A sensor 4 detects a vibration waveform, and can detect a vibration component from the fundamental wave of the compressor to about 100 KHz. The sensor 4 is installed at one point of the four-point weld 2 which is the place where the signal from the compressor 1 is transmitted most strongly. Reference numeral 5 denotes an amplifier for a signal detected by the sensor 4, and reference numeral 6 denotes a waveform recording device for recording this signal. Reference numeral 7 denotes a filter for removing noise of signals from the waveform recording device 6 and the amplifier 5. Reference numeral 8 denotes an A / D converter for A / D converting the signal output from the filter 7. 9 shows waveform processing for quantifying the unsteady component resulting from fluid vibration in the compression process of the compressor 1 from the A / D converted signal, and the degree of performance degradation from the database of performance degradation corresponding to the quantified numerical value. A waveform processor equipped with a DSP or the like for determining Reference numeral 10 denotes a display for outputting and displaying the result on a screen or a printer. These results are recorded in a recording device 11 such as a hard disk. A database is also recorded in the recording device 11.
[0031]
Here, the structure and vibration waveform of the compressor will be described.
2 and 3 show the structure of the compressor 1, and an electric motor 12 and a compression element 13 are arranged inside the sealed case 3. The compression element 13 is housed in the crankshaft 14 that mainly transmits the rotational motion of the electric motor 12, the main bearing 15 that supports the crankshaft 14, the auxiliary bearing 16, the cylinder 17, the roller 18, the vane 19, and the auxiliary bearing 16. And a valve 20. For sliding between the components of the compression element 13, lubricating oil 21 is lubricated and slid. 22 is a suction pipe, and 23 is a discharge pipe.
[0032]
The refrigerant passes through the suction pipe 22 from a cooling system (not shown), and is sucked into the suction chamber 24 in the cylinder 17 from the suction port 23 of the cylinder 17. Next, the roller 19 rotates in the cylinder 17 by the rotational movement of the crankshaft 14, whereby the volume is reduced and the refrigerant is adiabatically compressed to become a high-temperature and high-pressure refrigerant.
[0033]
Here, since the vane 18 follows the roller 19 and reciprocates when the roller 19 rotates, the vane 18 becomes a partition in the cylinder 17 to form the suction chamber 24 and the compression chamber 25, and the refrigerant is efficiently compressed. The
[0034]
The refrigerant gas that has become high temperature and high pressure pushes up the valve 20 and is led into the muffler 27 from the discharge cutout 26. Thereafter, the air is discharged from a discharge hole (not shown) of the muffler 27 into the discharge space 28 of the sealed case 3 and is guided from the discharge pipe 23 to the cooling system.
[0035]
FIG. 4 shows the relationship between the vibration waveform of one rotation measured by the sensor 4 and the behavior of the mechanical component in one rotation of the compression element 13 in the cylinder 17. As for the behavior of the mechanical parts, the state of A to D is set to one rotation, and the refrigerant is repeatedly compressed.
[0036]
The state of (a) represents the state of the compression start point, and the vane 18 is most retracted into the cylinder 17. In this state, the low-temperature and low-pressure refrigerant is sucked into the suction chamber 24.
[0037]
This state is defined as a rotation angle of 0 degree, and is particularly called top dead center. At the top dead center, a large shock wave is generated in the vibration waveform due to the collision between the vane 18 and other parts.
[0038]
The state of (a) is a state in which the rotation is advanced by 180 degrees, and the vane 18 protrudes most into the cylinder 17 and is called a bottom dead center. In this state, the volume of the suction chamber 24 is reduced to become the compression chamber 25, and a new suction chamber 24 'is formed. Further, in the vibration waveform, the vane 18 becomes unstable and a small shock wave is generated.
[0039]
The state C is a state in which the rotation is advanced by 270 degrees. The gas pressure load in the compression chamber 25 exceeds the pressing force of the valve 20, and the valve 20 is pushed up to discharge the compressed refrigerant to the outside of the cylinder 17.
[0040]
The state of (d) represents a state where the compression is completed after one rotation. In the vibration waveform, a shock wave is generated from this 270 degree to the top dead center, and it is considered that the gas pressure load is generated because the peripheral part slides while pressing the peripheral part against the supporting part. . Further, the refrigerant is theoretically sealed in the cylinder 17 by an oil seal between the components, but there are some refrigerant leaks during one rotation.
[0041]
In particular, since the refrigerant becomes high temperature and high pressure from the rotation angle of 270 degrees to the top dead center, the refrigerant is discharged to the outside of the cylinder as the valve is opened, and the leakage of the refrigerant particularly leaks to the outside of the compression chamber 25.
[0042]
For this reason, this gas release and gas leakage have a great influence on the gas pressure load of the refrigerant that greatly contributes to the generation of the shock wave having the vibration waveform. Furthermore, although the shock wave of the vibration waveform looks periodic macroscopically, in the micro portion, the fluctuation of the gas pressure load causes the unsteady vibration to be repeated every rotation.
[0043]
Moreover, this unsteady component tends to be large when the refrigeration capacity of the compressor is large and small when the refrigeration capacity is small.
[0044]
The operation of the embodiment configured as described above will be described.
The vibration component generated from the inside of the compressor 1 is transmitted through the machine part and transmitted to the four-point weld 2. This transmitted vibration is detected by a sensor 4 installed at one point of the four-point weld 2 and converted into a voltage signal or the like.
[0045]
This signal is amplified by the amplifier 5, and the output signal is once recorded in the waveform recording device 6 and reproduced and output to the filter 7 or directly to the filter 7.
[0046]
The signal input to the filter 7 is mainly mixed with low-frequency noise from the outside depending on the conditions under which the vibration of the compressor 1 is measured, and aliasing noise when A / D conversion is performed at a high-frequency. I am worried about the occurrence.
[0047]
Therefore, the filter 7 removes these noise components and outputs them to the A / D converter 8.
[0048]
For example, in this case, filtering was performed by setting the lower limit frequency to 300 Hz and the upper limit frequency to 100 KHz. In the A / D converter 8, the input analog signal is converted into a digital signal and output to the waveform processor 9.
[0049]
For example, in this case, the sampling frequency is 300 KHz. In the waveform processor 9, waveform processing operations such as quantifying the unsteady component of the vibration waveform described above are performed using a DSP or the like, and then a database (for example, in this case) showing correspondence between these calculation results and compression performance The compression performance is determined from a database of refrigeration capacity and waveform processing values. The determined result is output to the display unit 10 and can be confirmed.
[0050]
Further, these results are stored in the recording device 11 and a database for each compressor is constructed. From the above, the performance deterioration degree of the compressor can be efficiently determined by vibration.
[0051]
(Example 2)
A second embodiment of the present invention will be described below with reference to the drawings.
[0052]
In contrast to the first embodiment, in order to accurately determine the performance deterioration degree of the compressor, the waveform processing means relating to the quantification of the unsteady component of the vibration waveform performed by the waveform processor 9 is defined.
[0053]
In FIG. 5, the vibration waveform is input to the waveform processor 9 at 27. For example, in this case, vibration waveforms for 20 cycles were input. The input vibration waveform is divided every cycle at 28, and an addition average waveform of vibration waveforms for 20 cycles is calculated at 29. Next, the difference between each of the vibration waveforms divided at 28 with respect to the vibration waveform obtained by averaging at 30 is obtained for each waveform, and at 31, the difference is squared for each vibration waveform.
[0054]
Further, at 32, an averaging process is performed on each squared waveform to calculate a dispersed waveform. In 33, the dispersion waveform is integrated, and the dispersion power representing the unsteady component of the vibration waveform is calculated. On the other hand, the root mean square of the vibration waveforms input at 27 at 34 is performed, and the vibration power is calculated. Finally, at 35, the ratio between the dispersion power and the vibration power is calculated, and the relative dispersion value is obtained. From 36, the calculation result is output.
[0055]
FIG. 6 shows vibration waveforms 37 and 38 and dispersion waveforms 39 and 40 of a large refrigerating capacity product and a small refrigerating capacity product, and the size of the hatched portion of the dispersed waveforms 39 and 40 represents the dispersion power. It can be seen that the larger the capacity, the larger the area. That is, the greater the dispersion power, the greater the refrigeration capacity.
[0056]
The ratio with the vibration power is calculated in order to exclude fluctuations in the distributed power due to the load on the compressor or the model. From the above, by calculating the relative dispersion value with this waveform processing means, it is possible to efficiently determine the refrigeration capacity as the compression performance.
[0057]
Example 3
A third embodiment of the present invention will be described below with reference to the drawings.
[0058]
With respect to the second embodiment, a means for obtaining the number of pitches in one cycle for dividing the input waveform of 20 cycles into one cycle is defined.
[0059]
FIG. 7 shows a relationship 41 of the autocorrelation analysis value with respect to the number of sample data. Correlation analysis calculation is performed while shifting the time axis of one time waveform of the waveforms for 20 periods input to the waveform processor 9.
[0060]
For this reason, a peak of the correlation analysis value appears every N times the time axis shift. This peak represents an average period of 20 periods. Thereby, as shown in FIG. 7, by counting the number of samples from the initial state to the first peak 42, the number of pitches in one cycle can be obtained efficiently and accurately. In this case, it was about 5,130 points.
[0061]
(Example 4)
A fourth embodiment of the present invention will be described below with reference to the drawings.
[0062]
In the second embodiment, a means for calculating the dispersion power 33 by integrating from the dispersion waveform 32 performed by the waveform processor 9 is defined.
[0063]
The distributed waveform 32 has a very large number of samples, and if this is integrated as it is, the numerical value appears to be an enormous number, and the integration range is unclear and causes an error. Therefore, the distributed waveform 32 is smoothed and the distributed power 33 is calculated. did. In this case, the smoothing process was performed at intervals of 60 points, or 0.2 msec.
[0064]
FIG. 8 shows the distributed waveform 43 before the smoothing process and the distributed waveform 44 after the smoothing process, and the shape of the dispersed waveform, which is very frequent after the process, is clearer than before the process. I understand. Thereby, the integration range becomes clear and the dispersion power can be calculated with high accuracy. Moreover, the overflow due to the enlarging of the numerical value is eliminated and the processing speed is improved.
[0065]
(Example 5)
A fifth embodiment of the present invention will be described below with reference to the drawings.
[0066]
The integration range is defined for the integration processing performed to calculate the dispersion power 33 from the dispersion waveform 32 performed by the waveform processor 9 of the second embodiment.
[0067]
FIG. 9 shows the vibration waveform 45 and the dispersion waveform 46. While the valve in the vicinity of the rotation angle 270 degrees of the vibration waveform 45 is opened and closed, the fluid vibration that is the excitation source fluctuates every period due to the release of the refrigerant gas and the gas leakage, and the vibration waveform 45 is unsteady. This is the part where the components are particularly large.
[0068]
In addition, a shock wave with a large top dead center is largely caused by mechanical vibrations, and since it has a sharp peak, it is a significant cause of error during waveform processing. For this reason, by integrating in the integration range 50 between the valve opening point 48 and the valve closing point 49 where the unsteady component is largely generated, the dispersion power 33 with higher accuracy corresponding to the compression performance can be obtained.
[0069]
(Example 6)
A sixth embodiment of the present invention will be described below with reference to the drawings.
[0070]
In the definition of the integration range of the waveform processing of the fifth embodiment, the recognition means for the integration range is specified.
[0071]
In the distributed waveform 51 of FIG. 10, by using the threshold value 52 as a trigger level and searching from the top dead center peak 53 in the reverse rotation direction to obtain the intersection A54, and further searching from the vicinity of the rotation angle of 270 degrees to obtain the intersection B55. The integration range 56 can be obtained efficiently and accurately.
[0072]
【The invention's effect】
As described above, the present invention
A sensor for detecting a vibration waveform generated by fluid vibration generated in the process of compressing a refrigerant in a compressor, an amplifier for amplifying the vibration waveform, and a waveform recording device for recording a signal output from the amplifier A filter for removing a noise component of a signal output from the waveform recording device or the amplifier, an A / D converter for A / D converting the signal output from the filter, and the A / D converter It consists of a waveform processor that performs waveform processing on the characteristics of the output signal and determines the degree of performance degradation from this waveform processing value, a display that displays these results, and a recording device that records these results. cage, in the performance deterioration diagnosis device of a compressor of the non-stationary component it is possible to determine the performance degradation degree by quantifying the fluid vibration generated in the compression process of the compressor in the waveform processor Thus, in the quantification processing of the unsteady component of the fluid vibration performed by the waveform processor, means for dividing the input vibration waveform for each period, and means for adding and averaging the waveforms divided for each period Means for calculating a difference waveform between the divided waveform and the waveform obtained by the averaging process, a means for calculating a square of the difference, a means for calculating a square of the squared waveform, and calculating a dispersion waveform, Means for obtaining a relative dispersion value by means for integrating the dispersion waveform to obtain the dispersion power, means for obtaining the vibration power by taking the root mean square of the vibration waveform, and means for calculating the ratio of the dispersion power and the vibration power. By performing the vibration waveform processing, it is possible to efficiently and accurately determine the performance deterioration degree.
[0074]
Furthermore, as means for dividing the vibration waveform input to the waveform processor for each period, the vibration waveform can be divided for each period with high accuracy by dividing the vibration waveform for each period using autocorrelation analysis processing. it can.
[0075]
Further, the means for integrating the dispersed waveform in the waveform processor performs smoothing processing of the dispersed waveform and then integrates, whereby the dispersed power can be accurately obtained at high speed without error.
[0076]
Furthermore, in the means for integrating the dispersion waveform performed by the waveform processor, the dispersion power of the non-periodic component of the vibration corresponding to the compression performance is calculated by integrating while the valve of the compressor is open. Can do.
[0077]
Also, in the means for determining the integration range of the dispersion waveform, the integration range during the opening of the compressor valve is determined from the intersection of the dispersion waveform with a threshold value, so that the integration range can be obtained efficiently and accurately. Can do.
Accordingly, it is possible to provide a compressor performance deterioration diagnosis device capable of efficiently and accurately diagnosing the compression performance of the compressor with the calorie measurement device.
[Brief description of the drawings]
FIG. 1 is a block diagram of a compressor performance deterioration diagnosis apparatus according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view of a compressor to be diagnosed according to the present invention. FIG. 4 is a cross-sectional view of the compressor taken along the line AA ′. FIG. 4 is a mechanical behavior and vibration waveform diagram to be diagnosed by the present invention. FIG. 7 is an autocorrelation analysis diagram for illustrating the third embodiment of the present invention. FIG. 8 is a diagram illustrating an autocorrelation analysis for illustrating the third embodiment of the present invention. Dispersion waveform diagram before and after smoothing processing for illustrating an example. FIG. 9 is a vibration waveform and dispersion waveform diagram for illustrating a fifth embodiment of the present invention. Dispersion waveform diagram to show an example [Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Compressor 2 4 point welding part 3 Sealed case 4 Sensor 5 Amplifier 6 Waveform recording device 7 Filter 8 A / D converter 9 Waveform processor 10 Display 11 Recording device

Claims (5)

A sensor for detecting a vibration waveform generated by fluid vibration generated in the process of compressing a refrigerant in a compressor, an amplifier for amplifying the vibration waveform, and a waveform recording device for recording a signal output from the amplifier A filter for removing a noise component of a signal output from the waveform recording device or the amplifier, an A / D converter for A / D converting the signal output from the filter, and the A / D converter It consists of a waveform processor that performs waveform processing on the characteristics of the output signal and determines the degree of performance degradation from this waveform processing value, a display that displays these results, and a recording device that records these results. cage, a performance deterioration diagnosis device for determining compressor performance degradation degree by quantifying the unsteady component of the fluid vibration generated in the compression process of the compressor in the waveform processor, the In the non-stationary component quantification process of the fluid vibration performed by the shape processor, the means for dividing the input vibration waveform for each period, the means for adding and averaging the divided waveform for each period, and the divided Means for calculating a waveform of a difference between the waveform and the waveform subjected to the averaging process, means for calculating a square of the difference, means for calculating a square of the squared waveforms, calculating a dispersion waveform, and The vibration waveform includes means for integrating and obtaining dispersion power, means for obtaining the vibration power by taking the root mean square of the vibration waveform, and means for calculating the ratio of the dispersion power and the vibration power, and means for obtaining the relative dispersion value. A compressor performance deterioration diagnosis apparatus characterized by performing processing . 2. The performance degradation diagnosis apparatus for a compressor according to claim 1, wherein the vibration waveform input to the waveform processor is divided into periods using autocorrelation analysis processing as means for dividing the vibration waveform into periods. . 2. The compressor performance deterioration diagnosis apparatus according to claim 1 , wherein the means for integrating the dispersed waveform in the waveform processor performs integration after performing the smoothing processing of the dispersed waveform. 2. The compressor performance deterioration diagnosing apparatus according to claim 1 , wherein the means for integrating the distributed waveform performed by the waveform processor integrates while the valve of the compressor is open. 5. The performance of a compressor according to claim 4 , wherein in the means for determining the integrated range of the dispersion waveform, the integration range while the valve of the compressor is open is obtained from the intersection point of the dispersion waveform provided with a threshold value. Deterioration diagnostic device.

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