JP3729931B2 - Tilt angle detector - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inclination angle detector used in a reference plane setting device.
[0002]
[Prior art]
For example, Japanese Patent Laid-Open No. 5-322563 discloses a reference plane setting device having a rotary head. Such a reference plane setting device is used to irradiate laser light in a direction perpendicular to the rotation axis of the rotary head from the side surface of the rotary head, and to set one reference plane on the surrounding wall surface or the like. When the rotation axis is set to be vertical, the reference plane becomes a horizontal plane, and when the reference plane setting device is tilted sideways and the rotation axis is made horizontal, a vertical reference plane can be set. Therefore, the reference plane setting device detects an inclination in two directions perpendicular to the rotation axis and makes the rotation axis vertical, and a rotation axis when the reference plane setting device is turned over. A tilt angle detector for leveling is incorporated.
[0003]
As such an inclination angle detector, for example, as disclosed in Japanese Patent Laid-Open No. 2-42311, a bubble tube in which a concave lens whose inner side is recessed in a substantially spherical shape is embedded, or a circular bubble tube in which a lens plate recessed in a cylindrical shape is fitted. A device is known in which the angle of inclination in the XY direction is detected from the position of the shadow of a bubble obtained by a photoelectric sensor that transmits light from a light source and receives transmitted light.
[0004]
In addition, when a pair of induction coils facing each other with a bubble interposed between them are wound around a rod-shaped bubble tube in which bubbles are enclosed with a magnetic fluid, the rod-shaped bubble tube is inclined and the bubble moves toward one induction coil. An inclination angle detector is known in which the amount of magnetic fluid in the portion corresponding to the core of the induction coil decreases and the inductance changes, and the inclination angle is detected from the amount of change in the inductance.
[0005]
In addition, on the inner surface of a bubble tube in which bubbles are sealed together with a liquid dielectric, a pair of detection electrodes opposed to each other with the bubbles interposed therebetween, and a base arranged in a direction perpendicular to the opposing direction of both detection electrodes An inclination angle detector having an electrode and detecting an inclination angle from a change in capacitance between a detection electrode and a base electrode due to movement of bubbles is known.
[0006]
Further, according to Japanese Patent Publication No. 3-45322, a sealed container filled with approximately half the amount of a transparent liquid so that a liquid surface is formed, a transparent light incident / exit surface, and one side of the light incident / exit light surface An orthogonal reflecting surface is provided, and a light source facing the light entrance / exit surface and a light source irradiated from the light source, reflected by the liquid surface through the light entrance / exit surface, then reflected by the reflective surface, and again reflected by the liquid surface There is known a tilt angle detector that includes a light receiving sensor that receives light emitted from a rear light incident / exiting surface and detects a tilt angle from a change in a light receiving position of the light receiving sensor due to a tilt of a liquid surface.
[0007]
[Problems to be solved by the invention]
Since the conventional inclination angle detector can only detect inclinations in one direction or two directions perpendicular to each other with one detector, it is necessary to detect inclinations in three directions like a reference plane setting device. In such a case, at least two inclination angle detectors must be used, which causes a problem that the reference plane setting device is enlarged.
[0008]
An object of the present invention is to provide a small tilt angle detector capable of detecting tilt in three directions.
[0009]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention relates to a bubble tube in which a concave lens whose inside is recessed in a substantially spherical shape is fitted, and a bubble tube in which a lens plate that allows movement of bubbles in at least one direction is fitted, The lens plate is positioned relative to each other at right angles to each other, and light from the light source is transmitted through both bubble tubes, and the angle of inclination from the position of the bubble shadow in each bubble tube obtained by a photoelectric sensor that receives the transmitted light. In the inclination angle detector for detecting the light, at least one of the light source and the photoelectric sensor is shared.
[0010]
In addition, while forming two surfaces perpendicular to each other in the bubble tube, a concave lens whose inner surface is recessed in a substantially spherical shape is fitted on one surface, and a lens plate that allows movement of bubbles in at least one direction is fitted on the other surface, The bubble tube may be shared, and in that case, at least one of the light source and the photoelectric sensor can be shared.
[0011]
By the way, when supplying the bubble tube, the bubble tube is filled with a magnetic fluid, and two pairs of induction coils facing each other with the center of the concave lens sandwiched therebetween are wound so that the opposing directions are perpendicular to each other, and the lens A pair of induction coils facing in the one direction are wound around the center of the plate.
[0012]
Alternatively, when the bubble tube is shared, two pairs of detection electrodes facing each other across the center of the concave lens are provided so that the opposing directions are perpendicular to each other, and facing the one direction across the center of the lens plate a pair of detection electrodes provided provided a base electrode to the electrostatic capacitance is generated between the respective sensing electrodes.
[0013]
On the other hand, a sealed container filled with a transparent liquid in such an amount that an unfilled space is formed is provided with a transparent incident / exit light surface and a reflection surface intersecting one side of the incident / exit light surface, A light source sensor that receives the light emitted from the input / output surface after being reflected from the light source, reflected by the liquid surface through the light input / output surface, then reflected by the reflective surface, and reflected again by the liquid surface In a tilt angle detector that detects the tilt angle from the light receiving position of the light receiving sensor, a second reflecting surface parallel to the reflecting surface that intersects the opposite side of the one side of the light incident / exiting surface is provided. Features.
[0014]
In addition, you may make it provide the 2nd light-in / out light surface parallel to the said light-in / out light surface which cross | intersects the other side of an intersection with the top light-in / out light surface of the said reflective surface.
[0015]
In the case where the light from the light source is transmitted through the bubble tube and received by the photoelectric sensor, the number of parts can be reduced by sharing at least one of the light source and the photoelectric sensor. Becomes smaller.
[0016]
By the way, the reference plane setting device does not detect the inclination angles in the three directions at the same time, and normally detects the inclination angles in the two directions perpendicular to the rotation axis of the rotary head, and in one state, i.e. What is necessary is just to detect the inclination angle in the rotation axis direction. Therefore, the bubble tube is shared by providing two surfaces perpendicular to each other, detecting the inclination angle in two directions perpendicular to each other on one surface, and detecting the inclination angle in one direction on the other surface. . In addition, when sharing a bubble tube in this way, further miniaturization can be achieved by sharing a light source and a photoelectric sensor.
[0017]
By the way, filling the bubble tube with magnetic fluid and detecting the tilt angle from the change in inductance of the induction coil, or filling the liquid dielectric and tilt angle from the change in capacitance between the detection electrode and the base electrode It is possible to share the bubble tube even if it detects the inclination angle, and the inclination angle detector can be miniaturized.
[0018]
In the case of detecting a tilt angle by filling a transparent liquid and reflecting light at the liquid surface, the first and second pairs parallel to each other intersecting one side of the light incident / exiting surface and the opposite side thereof. By providing the reflection surface, the inclination angle is detected by reflection on the first reflection surface, and the rollover is caused by reflection on the second reflection surface in a state rotated 90 degrees toward the second reflection surface. The inclination angle can be detected.
[0019]
And a second light incident / exit surface parallel to the first light incident / exit surface intersecting the opposite side of the first light incident / exit light surface of the reflecting surface. A first sensor unit having a light source and a light receiving sensor corresponding to the light incident / exiting surface, and a second sensor unit having a light transmitting portion and a light receiving portion corresponding to the second light incident / exiting surface. Also good.
Thus, when providing the second incident / exiting surface parallel to the incident / exiting surface that intersects the opposite side of the intersecting side of the reflecting surface with the incident / exiting surface, it is rotated by turning 90 degrees toward the second incident / exiting surface. Can be detected.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIG. 1, reference numeral 1 denotes a first bubble tube, at least one surface 11 is formed to be transparent or translucent, and a circular window hole 12 is formed on the surface opposite to the one surface 11. It is formed so as to communicate with the internal space. Then, the bubble tube 1 is filled with a transparent liquid in such an amount that bubbles are formed, and the window hole 12 is closed with a concave lens L1 whose one surface is recessed in a spherical shape. Then, when the concave lens L1 is in the upper surface (the state shown in the figure), the bubble is positioned at the center of the concave lens L1, and when the bubble tube 1 is tilted in the X-axis direction or the Y-axis direction, the bubble moves relative to the concave lens L1. . Therefore, the photoelectric sensor S1 divided into four is attached to the upper surface of the concave lens L1, and the light from the light source 3 is collimated through the collimator lens 31 and then irradiated onto the one surface 11. In the state where the bubble is located at the center of the concave lens L1, the output of each cell of the photoelectric sensor S1 divided into four is the same, but when the bubble moves with respect to the concave lens L1, the shadow of the bubble is one of the cells. And the output of the cell decreases. Therefore, if it is known which cell is in what output reduction state, the inclination direction and inclination angle of the bubble tube 1 can be obtained. The second bubble tube 2 is provided in a relatively positioned state so as to be rotated by 90 degrees with respect to the first bubble tube 1, and the side surface 21 facing the first bubble tube 1 is transparent or In addition to being made translucent, a rectangular window hole 22 was opened on the surface facing the side surface 21. Then, after filling the second bubble tube 2 with a transparent liquid, the window hole 22 was closed with a lens plate L2 whose one surface was recessed in a cylindrical shape. The curvature of the cylindrical portion of the lens plate L2 was set to be the same as the curvature of the concave lens L1. Therefore, the sensitivity when the concave lens L1 is used is the same as the sensitivity when the lens plate L2 is used. Further, the photoelectric sensor S2 divided into two so as to face the axial direction of the depression of the lens plate L2 was attached to the outer surface of the lens plate L2. Further, a beam splitter 4 is disposed between the collimator lens 31 and the first bubble tube 1 so that the light from the light source 3 is branched to the second bubble tube 2. Accordingly, when the lens plate L2 is rotated 90 degrees clockwise around the Y axis so that the mounting surface of the lens plate L2 is on the upper surface, the bubble is inclined along the Z-axis direction, so that the bubble is the axis of the depression of the lens plate L2. Move relatively along the direction. Then, the output of one of the two cells of the photoelectric sensor S2 divided into two decreases, and the inclination direction and the inclination angle of the bubble tube 2 can be known from the reduction amount of the output. Incidentally, in the embodiment shown in FIG. 1, the beam splitter 4 is disposed between the collimator lens 31 and the first bubble tube 1, but may be disposed between the light source 3 and the collimator lens 31. In this case, however, it is necessary to add a collimator lens 31 separately between the beam splitter 4 and the second bubble tube 2.
[0021]
Incidentally, although the light source 3 is shared in the one shown in FIG. 1, the photoelectric sensor may be shared as shown in FIG. Note that the photoelectric sensor S1 divided into four is used in the one shown in FIG. Since the movement of the shadow of the bubble can be detected by the photoelectric sensor S1 divided into four, the amount of tilting of the Z axis can also be detected from the amount of movement of the shadow of the bubble in the Z direction. It is also possible to share both the light source 3 and the photoelectric sensor as shown in FIG. In FIG. 3, 4 is a reflecting mirror, and A is a bubble.
[0022]
1 to 3, two circular bubble tubes are used. However, as shown in FIG. 4, a single bubble tube 6 may be used in common with the bubble tube. The bubble tube 6 is provided with window holes on two surfaces perpendicular to each other and fitted with a concave lens L1 and a lens plate L2. Therefore, in the state shown in FIG. 4, the bubble is positioned at the approximate center of the concave lens L1, but when the circular bubble tube 6 is rotated 90 degrees so that the lens plate L2 is on the upper surface, the bubble moves inside the circular bubble tube 6. The bubbles move to the lower surface of the lens plate L2. In addition, as shown in FIG. 5, you may share the light source 3, a bubble tube, and a photoelectric sensor.
[0023]
Incidentally, in the case shown in FIG. 4, the light from the light source 3 is transmitted through the bubble tube 6 and the inclination angle is detected from the position of the bubble shadow. As shown in FIG. You may make it fill with a magnetic fluid. In that case, two pairs of induction coils (helm foil coils) 71, 71, 72, 72 facing each other across the center of the concave lens L1, and a pair of induction coils 73, facing each other across the center of the lens plate L2. 73 is wound around the bubble tube 6. With this configuration, when the bubble tube is not tilted and the bubble is positioned at the center of the concave lens L1 or the lens plate L2, the inductances of the induction coils facing each other with the bubble interposed therebetween are equal. However, when the bubble tube 6 is tilted and the bubble moves, the amount of magnetic fluid in the portion corresponding to the core of the induction coil on the side where the bubble has moved decreases, and the inductance changes. Therefore, in the state shown in FIG. 6, the inclination direction and the inclination angle of the bubble tube 6 can be detected from the amount of change in inductance of the two pairs of induction coils 71, 71, 72, 72. If the bubble tube 6 is rotated 90 degrees so that the lens plate L2 is on the upper surface, the inclination angle of the bubble tube can be detected from the amount of change in inductance of the pair of induction coils 73 and 73.
[0024]
Alternatively, as shown in FIG. 7, the bubble tube 6 is filled with a liquid dielectric, and the base electrode 81 is attached to the entire inner surface of the surface opposite to the surface to which the concave lens L1 and the lens plate L2 are attached. The detection electrode 82 divided into four may be attached to the inner surface of the concave lens L1, and the detection electrode 83 divided into two may be attached to the inner surface of the lens plate L2. Thus, electrostatic capacitance (capacitance) is generated between the detection electrodes 82 and 83 and the base electrode 81 in the bubble tube 6 filled with the dielectric. Next, when the bubble moves, either part of the detection electrode 82 or the detection electrode 83 is touched, and the contact between the detection electrode of that part and the dielectric is cut off. Then, since the capacitance changes, the inclination direction and the inclination angle are detected from the change.
[0025]
In any of the embodiments described above, the inclination angle of the bubble tube is detected from the movement of the bubbles in the bubble tube. However, as shown in FIGS. A transparent entrance / exit surface 91 is formed on one surface, and one of a pair of surfaces that intersects one side of the entrance / exit surface 91 and the opposite side across the entrance / exit surface 91 is a first reflection surface 92, and the other Was used as the second reflecting surface 93. Then, approximately half of the transparent liquid W was injected into the sealed container 9. Further, the sensor unit 100 is disposed outside the light incident / exit surface 91 with the collimator lens 31 interposed therebetween. The sensor unit 100 includes a light transmitter and a light receiver, and the light emitted from the light transmitter is reflected from the collimator lens 31 through the light entrance / exit surface 91 by the liquid surface WS of the liquid W and then reflected. A plane 92 is reached. Then, the light is reflected by the reflecting surface 92 and is reflected again by the liquid surface WS, and then returns to the light receiving portion of the sensor unit 100 through the input / output light surface 91 and the collimator lens 31. For example, an image sensor such as an image sensor that can detect the position of light returning to the light receiving unit is attached to the light receiving unit. Therefore, when the sealed container 9 is tilted, the liquid level WS is tilted relative to the sealed container 9, and the position of light returning to the light receiving unit changes. The direction and amount of change are detected by the sensor of the light receiving unit, and the tilt direction and tilt angle of the sealed container are detected from the result.
[0026]
In the present embodiment, a second reflecting surface 93 is provided opposite to the light incident / exiting surface 91 and parallel to the reflecting surface 92. Accordingly, when rotated 90 degrees around the Y axis, the state shown in FIG. 8A changes to the state shown in FIG. 8B, and the light emitted from the light transmitting portion of the sensor unit 100 is reflected on the second reflecting surface 93. Is reflected back to the light receiving part.
[0027]
By the way, in the case shown in FIG. 8, the sealed container 9 is provided with one input / output light surface 91 and two reflection surfaces 92 and 93 parallel to each other with the input / output light surface 91 interposed therebetween, but as shown in FIG. A second input / output light surface 94 that is the other surface parallel to the first light input / output surface 91 that is one of a pair of surfaces that intersect one side of the reflection surface 92 and the opposite side across the reflection surface 92. May be provided. In such a configuration, it is necessary to provide the second sensor unit 101 so as to face the second light entrance / exit surface 94 in addition to the sensor unit 100 provided facing the first light entrance / exit surface 91. is there. According to this configuration, in the state shown in FIG. 9A, the light emitted from the first sensor unit 100 passes through the first light entrance / exit surface 91 and is reflected by the liquid surface WS and the reflective surface 92, and again the liquid. After being reflected by the surface WS, the light returns to the sensor unit 100 through the first light entrance / exit surface 91. Then, when the sealed container 9 is rotated by 90 degrees, the state shown in FIG. 9B is obtained, and the light emitted from the second sensor unit 101 passes through the second incident / exit light surface 94 to the liquid surface WS and the reflective surface. After being reflected by the liquid 92 and again by the liquid surface WS, it returns to the sensor unit 101 through the second light entrance / exit surface 94.
[0028]
【The invention's effect】
As described above, according to the present invention, the tilt angle detector that detects the tilt angles in the three directions used in the reference plane setting device can be miniaturized.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing a configuration of a first embodiment of the present invention. FIG. 2 is a perspective view showing a configuration of a second embodiment. FIG. 3 shows a configuration of a third embodiment. FIG. 4 is an exploded perspective view showing the configuration of the fourth embodiment. FIG. 5 is a view showing the configuration of the fifth embodiment. FIG. 6 is a perspective view showing the configuration of the sixth embodiment. 7 is a perspective view showing the configuration of the seventh embodiment. FIG. 8A is a perspective view showing the configuration of the eighth embodiment. FIG. 7B is a perspective view showing the state when rotated 90 degrees. (A) Perspective view showing the configuration of the ninth embodiment (B) Perspective view showing the state when rotated 90 degrees [Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st bubble tube 2 2nd bubble tube 3 Light source 4 Beam splitter 6 Bubble tube 9 Sealed container 31 Collimator lens 71 * 72 * 73 Inductive coil 81 Base electrode 82 * 83 Detection electrode 91 1st incident / exit light surface 92 1st 1 reflective surface 93 2nd reflective surface 94 2nd incident / exit light surface 100 1st sensor unit 101 2nd sensor unit L1 Concave lens L2 Lens plate S1 Photoelectric sensor S2 Photoelectric sensor WS Liquid surface

Claims (6)

  A bubble tube in which a concave lens whose inside is recessed in a substantially spherical shape is fitted and a bubble tube in which a lens plate allowing movement of the bubble in at least one direction are mutually connected so that the concave lens and the lens plate are perpendicular to each other. In the tilt angle detector for positioning and detecting the tilt angle from the position of the shadow of the bubble in each bubble tube obtained by a photoelectric sensor that transmits light from the light source to both bubble tubes and receives the transmitted light, the light source and An inclination angle detector characterized by sharing at least one of the photoelectric sensor.   In a tilt angle detector that has a light source that transmits light to a bubble tube in which bubbles are enclosed with liquid and a photoelectric sensor that receives the transmitted light, and detects the tilt angle from the position of the shadow of the bubble obtained by the photoelectric sensor, Two surfaces perpendicular to each other are formed on the bubble tube, and a concave lens whose inner surface is recessed in a substantially spherical shape is fitted on one surface, and a lens plate that allows movement of the bubble in at least one direction is fitted on the other surface. Tilt angle detector.   The tilt angle detector according to claim 2, wherein at least one of the light source and the photoelectric sensor is shared.   In a tilt angle detector for detecting a tilt angle from a change in inductance of at least one of the induction coils by winding a pair of induction coils opposed to each other with a bubble interposed in a bubble tube in which bubbles are enclosed with a magnetic fluid. Two concave surfaces which are perpendicular to each other, a concave lens whose inner surface is recessed in a substantially spherical shape is fitted on one surface, and a lens plate which allows movement of bubbles in at least one direction is fitted on the other surface, and the concave lens Two pairs of induction coils opposed across the center were wound so that the opposing directions were at right angles to each other, and a pair of induction coils opposed in the one direction across the center of the lens plate An inclination angle detector characterized by that.   On the inner surface of a bubble tube in which bubbles are sealed together with a liquid dielectric, a pair of detection electrodes facing each other with the bubbles interposed therebetween, and a base electrode arranged at a right angle to the opposing direction of both detection electrodes In the inclination angle detector for detecting the inclination angle from the change in capacitance between the detection electrode and the base electrode due to the movement of the bubble, the bubble tube is formed with two surfaces perpendicular to each other and on one surface A concave lens whose inside is recessed in a substantially spherical shape is fitted, a lens plate that allows movement of bubbles in at least one direction is fitted on the other surface, and two pairs of detection electrodes facing each other across the center of the concave lens are opposed to each other. An inclination angle detector characterized in that the direction is perpendicular to each other, and a pair of detection electrodes facing the one direction with the center of the lens plate interposed therebetween.   A sealed container filled with a transparent liquid in such an amount that an unfilled space is formed is provided with a transparent light incident / exit surface and a reflective surface intersecting one side of the light incident / exit surface, and is opposed to the light incident / exit surface. A light source and a light receiving sensor that receives light emitted from the light input / output surface after being reflected from the light source, reflected by the liquid surface through the light input / output surface, then reflected by the reflective surface, and again reflected by the liquid surface In the inclination angle detector for detecting the inclination angle from the light receiving position of the light receiving sensor, the input / output light surface is a first input / output light surface, and the opposite side of the intersection of the reflective surface with the first input / output light surface is A first sensor unit having a second light incident / exit surface parallel to the intersecting first light incident / exit light surface, and having the light source and the light receiving sensor corresponding to the first light incident / exit surface. And a second sensor unit having a light transmitting part and a light receiving part corresponding to the second light incident / exiting surface. Inclination detector, characterized in that the.

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