JP3679664B2 - Soundproof box - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
This invention is a disturbance component for an analysis and measurement instrument such as a probe microscope for observing the shape and state of a sample surface having a mechanism for detecting physical quantities such as atomic force and magnetic force received from the sample and the sample. The present invention relates to a soundproof box that attenuates external sound components.
[0002]
[Prior art]
In general, a probe microscope for observing the shape and state of a sample surface is a rough positioning-based coarse that relatively moves three-dimensionally relative to a sample and a mechanism for detecting physical quantities such as atomic force and magnetic force received from the sample. A moving mechanism, a fine positioning fine movement mechanism, a control means for maintaining a constant distance between the sample and a mechanism for detecting a physical quantity such as an atomic force and a magnetic force, and vibration transmission from the installation environment to the apparatus. The structure includes a vibration isolation mechanism to be reduced, a control unit that controls the entire apparatus, and a computer. It is known that a probe microscope has a very high resolution and can confirm an atomic structure. On the other hand, since the resolution is good, it can be said that the sensitivity to disturbance is also sensitive. Disturbances are mixed with signal components and cause a reduction in resolution. As a disturbance, vibrations coming from the floor are usually dealt with by configuring the physical quantity detection mechanism, the detection mechanism or the coarse movement mechanism and the fine movement mechanism for moving the sample on the vibration isolation mechanism. The acoustic energy coming from other than the floor may vibrate the part of the device that detects the signal, and the signal component may be mixed as a disturbance, reducing the resolution. In order to protect against this acoustic energy, it is common to construct the device part for detecting signals in a soundproof box. As the soundproof box, there is a soundproof box as shown in FIGS. The soundproof box can be opened in order to operate a device portion for detecting a signal installed in the soundproof box during sample handling or measurement preparation work.
[0003]
[Problems to be solved by the invention]
In order to improve the soundproofing characteristics of the soundproofing box, there is a mass effect, and for the increase in the mass of the component members and the acoustic components with long wavelengths (low frequency components), the plate members constituting the soundproofing box are made thicker. There is a need to. This means that a certain size and weight is required for the target device that protects the soundproof box against acoustic disturbances. Since the soundproof box as shown in FIGS. 8A and 8B is normally attached to the surface plate 58 or the vibration isolation table cover 59 of the vibration isolation table (vibration isolation mechanism) as shown in FIG. The center of gravity of the device moves to the top, and there is a possibility that the risk of falling will increase when moving or during an earthquake. Although it is conceivable to increase the vibration isolation mechanism equipped with the soundproof box, if the surface plate or outer frame of the vibration isolation table is unnecessarily enlarged, the rigidity of the component members decreases, resulting in the vibration isolation of the vibration isolation mechanism. There is a possibility of deteriorating characteristics.
[0004]
[Means for Solving the Problems]
The present invention is not fixed on a vibration isolation mechanism (vibration isolation table) equipped with a target device that protects against acoustic disturbances, but is configured to be movable independently of the device, so that the entire device to be protected is soundproofed. It was configured to be.
[0005]
[Action]
Since this invention does not fix on the vibration isolation mechanism (vibration isolation stand) by taking the above-mentioned means, the center of gravity of the entire apparatus does not rise to the top even if the soundproof box is attached. The apparatus can be stabilized at the time of movement and installation without attaching the balance weight and unnecessarily heavy the apparatus situation.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
The present invention provides a soundproof box that protects a device against acoustic components from the surroundings, and has a leg structure that can be moved independently of the device and that can move up and down for movement and a wheel (caster) for installation and fixing. Yes.
Moreover, it has the open door structure for operating the apparatus used as a protection object with respect to an acoustic component in a front part.
[0007]
Moreover, it has the sound insulation member which can be adjusted in the height direction for filling the clearance gap between the apparatus installed inside the said sound insulation box, and the said sound insulation box.
The soundproof box may be configured to use a multilayered structure plate in which a sound insulating sheet material that attenuates vibration of a metal plate and a metal plate due to sound, or a composite material thereof and a sound absorbing material having pores that absorb acoustic components are bonded together. good.
[0008]
A damping steel plate may be used as the composite material that attenuates the vibration component due to the sound.
The above soundproof box may be formed of a mountain-shaped sound absorbing member on the inside.
In the soundproof box, the plate member constituting the soundproof box may have a honeycomb structure, and a sound absorbing material may be embedded in a hollow portion of the honeycomb structure.
In addition, a probe microscope having a mechanism for detecting physical quantities such as atomic force and magnetic force received from the sample and the sample and observing the shape and state of the sample surface may be a target to be protected from surrounding acoustic components. .
[0009]
【Example】
The first embodiment will be described below with reference to the drawings.
FIG. 1 is an external view of the first embodiment. There is a front door 1 on the front, which can be fixed by a clamp 2. Surfaces other than the front door 1 are covered with soundproof plates 3 to 6. A caster 7 is fixed to the lower part and can be moved only by the soundproof box body. After the movement, the leg 8 that can be moved up and down can be used and fixed at the installation location.
[0010]
In the soundproof box of the present invention, as shown in FIG. 2, the soundproof plates 3 to 6, casters 7 and legs 8 are fixed to the frame member 9. In addition, each of the soundproof plates 3 to 6 is screwed through an elastic material composed of several layers so as not to generate a gap that causes a decrease in soundproof characteristics. In this example, square sponge rubber was attached to the frame member on the surface to which the three rows of soundproof plates were fixed. Further, the front door not shown in FIG. 2 is also hinge-fixed, and when it is closed, an elastic material is similarly applied to the frame member portion in contact with the front door.
[0011]
The frame member A10 and the frame member B11 are fixed by screws so that they can be removed when the apparatus is inserted. That is, as shown in FIG. 3, after installing the soundproof box 20, the internal device 23, which is a target device to be protected against acoustic disturbance, mounted on the vibration isolation table 22 with the frame member A 10 and the frame member B 11 removed. It will be installed in the soundproof box 20. A through hole 21 is formed in the lower part of the back surface of the soundproof box 20 to allow wiring related to the internal device 23 and the controller 24 and piping related to the vibration isolation table 22 to pass through. In addition, the elastic material 26 is fixed at a position in contact with the vibration isolation table fixing frame portion 25 so that there is no gap in the back surface when the internal device is installed.
[0012]
FIG. 4 is a view showing a cross section near the center of the soundproof box. This is an embodiment in which the internal soundproof plates 30 to 32 are formed inside as a method for improving the soundproofing characteristics. As shown in FIG. 5A, the sound absorbing plate and the front door are metal plates 40, 43, a sound insulating sheet 41 which is a sheet material having excellent sound insulating properties, and a sound absorbing material which is a sheet material having excellent sound absorbing properties. The sheet 42 has a multilayer structure. In this embodiment, a sound insulating material in which lead fibers are embedded in a resin is used. In addition, a sound absorbing material having a fine sponge-like hole in which metal powder was formed was used. Further, as shown in FIG. 5B, the internal soundproof plate is formed with a mountain-shaped sound absorbing material 44 having a mountain shape in the inner direction in order to reduce reflection of sound inside. In addition, when used in a clean room that dislikes dust, if a sound-absorbing material with innumerable pores appears on the surface, it will cause dust generation. The thing of the structure similar to a soundproof board was used. Depending on the level of acoustic disturbance, the weight of the soundproof box body may be reduced, and the internal soundproof plate may be removed. Further, in order to prevent the soundproofing plate from vibrating due to acoustic disturbances, the soundproofing characteristics are not deteriorated, so that a sound absorbing material 46 is formed in a honeycomb structure 45 as shown in FIG. 5C.
[0013]
If there is a gap between the soundproof box and the device installed inside, it is possible that sound enters from the bottom and lowers the soundproofing characteristics. Therefore, in this embodiment, as shown in FIG. This is achieved by bringing the elastic material 26 into contact with the vibration isolation table fixing frame portion 25. Further, as shown in FIG. 6, the side face was dealt with by adjusting the shielding plate 47 capable of position adjustment (up and down) so as to be in contact with the vibration isolation base fixing frame portion 25 in the same manner. As a matter of course, the anti-vibration table fixing frame portion 25 has a structure in which a hole is blocked and has a sound insulation effect.
[0014]
As described above, by configuring the soundproof box, instability during movement is eliminated, and a soundproof box with good soundproof performance can be formed. As a result of using a probe microscope for measuring a minute surface shape and various physical properties as a target device to be protected from acoustic disturbance, a sufficient resolution could be obtained.
FIG. 7 shows an external view of the second embodiment. As described above, in order to improve the soundproofing characteristics, the soundproofing board is given a certain amount of weight. The same applies to the front door 1 shown in FIG. At times (for example, sample exchange), the front door 1 is opened and closed. Therefore, in order to reduce the operation of the heavy door as much as possible, instead of the single door shown in FIG. 1, the front door is opened as shown in FIG. Divided. In the case of this configuration, when the internal device is inserted, the soundproof plate 49 below the front is removed and the front door 48 is opened. After the installation of the internal device, the soundproof plate 49 is fixed to the main body with screws.
[0015]
It is also conceivable to form a window so that the internal state can be observed. In that case, it is desirable to have a double structure so as not to lower the soundproofing characteristics.
[0016]
【The invention's effect】
With the configuration shown above, it is not fixed on the vibration isolation mechanism (vibration isolation stand), so even if the soundproof box is attached, the center of gravity of the entire device does not rise upward, so the weight and shape of the soundproof box A soundproof box with good performance can be provided without being restricted by a target device that protects the sound from surrounding acoustic components. And by using this soundproof box, the noise of the device due to the sound disturbance can be reduced, and as a result, the analysis sensitive to the sound disturbance such as a probe microscope, the resolution of the measuring device and the reliability of the data are improved. There is an effect that can be done.
[Brief description of the drawings]
FIG. 1 is an external view of a soundproof box according to a first embodiment of the present invention.
FIG. 2 is a diagram showing a soundproof box assembled state according to the embodiment of the present invention.
FIG. 3 is a diagram illustrating a state in which the device is assembled in the soundproof box according to the embodiment of the present invention.
FIG. 4 is a view showing a cross section near the center of the soundproof box according to the embodiment of the present invention.
FIGS. 5A, 5B, and 5C are views showing the structure of a soundproof plate used in a soundproof box according to an embodiment of the present invention.
FIG. 6 is a view showing an attached state of the shielding plate used in the soundproof box according to the embodiment of the present invention.
FIG. 7 is a diagram showing an external view of a soundproof box according to a second embodiment of the present invention.
8A and 8B are diagrams showing a conventional soundproof box. FIG.
FIG. 9 is a view showing a state in which a conventional soundproof box is attached.
[Explanation of symbols]
1, 48 Front door 3, 4, 5, 6, 49 Soundproof plate 7 Casters
8 Leg 9 Frame member 10 Frame member A
11 Frame member B
30, 31, 32 Internal soundproof plate 47 Shield plate

Claims (8)

  A mechanism for detecting a physical quantity provided on the vibration isolation mechanism;
In an analytical measurement instrument comprising a soundproof box for protecting the detection mechanism from acoustic disturbances,
  An analytical measurement instrument comprising the soundproof box covered by the vibration isolation mechanism and the physical quantity detection mechanism, and having a wheel for moving to the soundproof box and a leg for fixing.   2. The analytical measurement instrument according to claim 1, further comprising an open door for taking in and out the vibration isolation mechanism and the physical quantity detection mechanism from the soundproof box on at least one surface of the soundproof box.   The analytical measurement according to claim 1, further comprising a sound insulation member adjustable in a height direction for filling a gap between the inside of the soundproof box, the vibration isolation mechanism, and the physical quantity detection mechanism. machine. Claim wherein the soundproof box, sound insulating sheet material to damp the vibration of the metal plate by a metal plate and the acoustic or characterized by using a multilayer structure formed by laminating a sound absorbing material having pores for absorbing acoustic component The analytical measurement instrument according to any one of 1 to 3 . 5. The analytical measurement instrument according to claim 4 , wherein the soundproof box uses a damping steel plate in order to attenuate a vibration component due to sound . Analysis measuring device according to any of claims 1 to 3, characterized in that hill-shaped sound-absorbing member is configured on the inside of the soundproof box. 4. The analytical measurement instrument according to claim 1, wherein the plate member constituting the soundproof box has a honeycomb structure, and a sound absorbing material is embedded in a hollow portion of the honeycomb structure . Analysis measuring device according to any of claims 1 to 7, characterized in that the blanking microscope - the vibration damping said physical quantity detecting mechanism provided on the mechanism, pro to observe the shape and state of the sample surface.

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