JP3661680B2 - Optical lens, optical head device, and optical disk device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical lens, an optical head device, and an optical disk device for focusing light on an information medium having a transparent portion via the transparent portion.
[0002]
[Prior art]
Optical memory technology using optical disks with pit-like patterns as high-density and large-capacity storage media has been put into practical use while expanding applications with digital audio disks, video disks, document file disks, and data files. . The mechanism by which information is successfully recorded and reproduced on an optical disc through a finely focused light beam with high reliability depends solely on the optical system. The basic functions of the optical head device, which is the main part of the optical system, can be broadly divided into light-collecting properties that form diffraction-limited microspots, focus control and tracking control of the optical system, and detection of pit signals. . These are manifested by a combination of various optical systems and photoelectric conversion detection methods depending on the purpose and application. In particular, in recent years, light using holograms has been used to reduce the size and thickness of optical pickup head devices. A pickup head device is disclosed.
[0003]
FIG. 49 shows, as a conventional example, a configuration diagram of an optical head device that we previously devised and applied for a patent (Japanese Patent Laid-Open No. Hei 4-212730).
[0004]
In FIG. 49, 2 is a radiation light source such as a semiconductor laser. The light beam 3 (laser light) emitted from this light source passes through a blazed hologram 105 (hereinafter simply referred to as a hologram) integrated with the objective lens 4 as shown in FIG. 50 (a) or (b). , Enters the objective lens 4 and is focused on the information medium 5. The light beam reflected by the information medium 5 follows the original optical path (return path) and enters the hologram 105. The + 1st order diffracted light 6 in the return path generated from the hologram 105 enters the photodetector 7. A servo signal and an information signal can be obtained by calculating the output of the photodetector 7.
[0005]
Here, the reason why the hologram 105 is blazed is that unnecessary diffracted light generated from the hologram 105 in the forward path from the radiation light source 2 to the information medium 5 is reflected by the information medium 5 and enters the photodetector 7. This is to prevent this.
[0006]
The present invention also relates to an optical microscope. Conventionally used objective lenses of optical microscopes have only one focal plane and can only be observed within the depth of focus.
[0007]
The present invention also relates to an exposure apparatus. In a process of forming a fine circuit on a semiconductor, a process of applying a photosensitive material on a sample such as a semiconductor and exposing through a photomask is essential. The present invention also relates to an exposure apparatus used in this exposure process. For example, in the manufacturing process of high frequency circuits (III-V compound microwave circuits), photoelectric conversion elements (opto-electronic detectors), solid state lasers (solid state lasers) using III-V compound semiconductors, When a pattern is formed and the relative position of this pattern and the photomask are transferred with high precision, the pattern is transferred onto the surface. Conventionally, the back and front surfaces of the sample are simultaneously observed with a microscope with a low magnification and a deep depth of focus. Was aligned.
[0008]
[Patent Document 1]
JP-A-4-221730
[0009]
[Problems to be solved by the invention]
2. Description of the Related Art In recent years, optical discs having higher storage capacity than conventional ones have been developed due to advances in optical system design technology and shorter wavelengths of semiconductor lasers as light sources. As an approach for increasing the density, it has been studied to increase the numerical aperture (NA) on the optical disc side of the condensing optical system that finely focuses the light beam onto the optical disc. At that time, the problem is an increase in the amount of aberration caused by the tilt of the optical axis (so-called tilt). Increasing the NA increases the amount of aberration that occurs with respect to tilt. In order to prevent this, the thickness (base material thickness) of the substrate of the optical disk may be reduced. FIG. 51 shows the relationship between the substrate thickness and NA, where a certain amount of aberration occurs at the same tilt. For example, in order to obtain the same amount of tilt tolerance as when NA = 0.5 and the substrate thickness t1 = 1.2 mm, the substrate thickness t2 = 0.8 mm may be used when NA = 0.6. . In this specification, the substrate thickness refers to the thickness from the surface on which the light beam is incident on the optical disc (or information medium) to the information recording surface.
[0010]
For the above reasons, it is desirable to reduce the thickness of the substrate in a high-density optical disc. For this reason, it is considered that the substrate thickness of the next-generation high-density optical disc is thinner than many conventional optical discs including a compact disc (CD) already on the market. Naturally, an optical disc apparatus capable of recording and reproducing both a conventional optical disc and a next-generation high-density optical disc is required. For this purpose, an optical head device equipped with a condensing optical system capable of condensing a light beam to the diffraction limit on an optical disk having a different substrate thickness is required.
[0011]
However, all of the optical head devices known so far can only record and reproduce on an optical disk having a specific substrate thickness. For example, the optical head device mentioned in the conventional example is no exception, and aberrations such as spherical aberration occur for optical discs with substrate thicknesses outside the specified range (differing by about ± 0.1 mm or more), making recording and reproduction impossible. It is. Therefore, the conventional technique has a problem that an optical disc apparatus capable of recording and reproducing both a conventional optical disc and a next-generation high-density optical disc cannot be realized.
[0012]
Therefore, in the present invention, in view of the above-described problems, a light beam can be condensed to the diffraction limit on an information medium (optical disk) having a different substrate thickness by using a hologram lens having sufficient intensity of transmitted light. It is an object of the present invention to constitute a condensing optical system, an optical head device and an optical disk device capable of recording / reproducing optical disks having different substrate thicknesses.
[0013]
Regarding the optical microscope, the objective lens of the conventionally used optical microscope can observe only within the focal depth of one focal plane, and the magnification and the observation range in the optical axis direction are in a trade-off relationship, and the high magnification However, there is a problem that it is impossible to observe the optical axis direction over a wide range.
[0014]
With regard to the exposure apparatus, when a predetermined pattern is formed in advance on the back side of the sample and the pattern and the photomask are aligned with high accuracy and transferred to the surface, a microscope with a low depth of focus is conventionally used. Thus, since the alignment is performed by simultaneously observing the back surface and the front surface of the sample, there is a problem that it is impossible to perform alignment with an accuracy of 5 μm or less.
[0015]
[Means for Solving the Problems]
The present invention Optical lens In order to solve the above-mentioned problem, is an optical lens for focusing light on an information medium having a transparent portion through the transparent portion, and has a plurality of regions corresponding to the transparent portions having different thicknesses. The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region, the light passing through the first region, and the second region Both the light that has passed through the second area is focused on the information medium via the transparent part having the first thickness, and only the light that has passed through the second area passes through the transparent part having the second thickness. And focusing on the information medium, and the first thickness is smaller than the second thickness. It is characterized by that.
[0016]
The following invention Optical head device Comprises a light source and an optical lens that receives light emitted from the light source and focuses the light on the information medium having the transparent part via the transparent part, and the optical lens has a different thickness. A plurality of regions according to the transparent part The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region, the light passing through the first region, and the second region Both the light that has passed through the second area is focused on the information medium via the transparent part having the first thickness, and only the light that has passed through the second area passes through the transparent part having the second thickness. And focusing on the information medium, and the first thickness is smaller than the second thickness. It is characterized by that.
[0017]
The following invention Optical disk devices Includes an optical head device that focuses light on an optical disc having a transparent portion through the transparent portion and records or reproduces information on the optical disc, a moving unit that moves the optical head device, and the optical disc And the optical head device includes a light source, and an optical lens that receives the light emitted from the light source and focuses the light on the optical disc via the transparent portion. The optical lens includes a plurality of regions corresponding to the transparent portions having different thicknesses. The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region, the light passing through the first region, and the second region Both the light that has passed through the second area is focused on the information medium via the transparent part having the first thickness, and only the light that has passed through the second area passes through the transparent part having the second thickness. And focusing on the information medium, and the first thickness is smaller than the second thickness. It is characterized by that.
[0018]
By using the above means,
(1) By combining a hologram lens that diffracts a part of incident light and an objective lens, a condensing spot that is condensed to the diffraction limit can be formed on optical disks having different substrate thicknesses (t1 and t2). A bifocal lens can be realized. The diffraction efficiency of the hologram lens is less than 100%, and the side of the condensed beam formed by the transmitted light is obtained by using a combination of a hologram lens and an objective lens having sufficient intensity for the transmitted light (0th order diffracted light) of the light beam. The lobe can be kept low. Further, by blazing the hologram lens, the sum of the amounts of transmitted light and + 1st order diffracted light forming a bifocal light beam can be increased, and the light utilization efficiency can be increased.
[0019]
(2) By using the hologram lens as a convex lens, chromatic aberration does not occur.
[0020]
(3) An optical head device is constituted by using the bifocal lens of the present invention, and a single wavefront converting means and photodetector are used in common, so that light of small size, light weight and low cost can be obtained with a small number of parts. Although it is a head device, recording and reproduction of optical disks having different substrate thicknesses can be performed by one optical head device.
[0021]
Alternatively, by forming an optical head device using the bifocal lens of the present invention and using two sets of wavefront converting means and photodetectors, a thick (t1) optical disk such as a CD can only be reproduced and the thickness of the substrate can be increased. In a thin (t2) high-density optical disc, an optical disc apparatus that performs recording and reproduction can increase the light utilization efficiency, so that a signal with a high S / N ratio can be obtained and a stable optical head device can be obtained.
[0022]
(4) The thickness of the substrate of a portion having high density pits or a recordable portion is t2 (about 0.4 mm to 0.8 mm). The thickness of the substrate in the region where the pits having information that can determine that the thickness of the substrate is t2 is t1 (about 1.2 mm). As a result, when a portion of the substrate thickness t1 is first reproduced by performing focus control corresponding to the substrate thickness t1, and the information that the substrate thickness is t2 is recognized, it automatically corresponds to the substrate thickness t2. Focus control can be performed.
[0023]
(5) A pit having a recording density lower than that of a CD, that is, a large pit having information capable of determining that the thickness of the substrate is t2, is written on a part of the optical disk. The recordable area is t2 (about 0.4 mm to 0.8 mm) over the entire surface of the information medium. When recording and reproducing this optical disk, first, the portion having the thickness t1 of the substrate is reproduced by performing focus control corresponding to the thickness t1 of the substrate. Naturally large aberrations occur, but the recording can be reproduced because the recording density is very low. If the information that the thickness of the substrate is t2 is recognized, the focus control corresponding to the thickness t2 of the substrate can be automatically performed. Naturally, the portion of the substrate thickness t1 is first reproduced by performing the focus control corresponding to the substrate thickness t1, and if there is no information that the substrate thickness is t2, the focus control corresponding to the substrate thickness t1 is performed as it is. Just go and keep playing. In addition, since the thickness of the substrate is constant, the information medium can be manufactured easily and inexpensively, and the information medium can be thinned.
[0024]
(6) When the information signal is detected by moving the optical head to the position where the information for determining the thickness of the substrate is recorded on the optical disk device, for example, the innermost circumference, and the information that the thickness of the substrate is t2 is recognized. If there is no information that the thickness of the substrate is t2, the focus control corresponding to the thickness t1 of the substrate is performed as it is, and the reproduction is continued. As long as the high-density optical disk is that of the embodiment of the present invention, the thickness of the substrate can be determined quickly and extremely accurately, and recording and reproduction of the optical disk on the two types of thickness substrates can be performed stably. .
[0025]
(7) In the optical disk apparatus, for example, the optical head is moved to the innermost circumference, and then focus control corresponding to the thickness t1 of the substrate is performed. Then, tracking control is performed to detect an information signal, and when the amplitude of the information signal cannot be obtained beyond a certain value, focus control corresponding to the substrate thickness t2 is automatically performed. When the amplitude of the information signal is obtained above a certain value, the focus control corresponding to the thickness t1 of the substrate is performed as it is and the reproduction is continued. This makes it possible to determine the substrate thickness of all the optical disks, and to stably perform recording and reproduction of the optical disks on the two kinds of substrates.
[0026]
(8) Since the microscope lens of the present invention uses a hologram lens having sufficient intensity for both transmitted light and diffracted light, the two focal planes can be focused simultaneously. It has the effect that images in a plane can be observed simultaneously.
[0027]
Further, by blazing the hologram lens, it is possible to increase the amount of transmitted light and + 1st order diffracted light focused on two locations, and a bright image can be obtained.
[0028]
Further, when an image is observed through a substrate having different thicknesses for transmitted light and diffracted light, aberration caused by the difference in thickness of the substrate can be corrected by the hologram lens so that the best image can be observed.
[0029]
Furthermore, by combining the microscope lens and the eyepiece lens of the present invention, it is possible to configure a microscope having an effect that it is possible to simultaneously observe clear images on two planes having different positions in the optical axis direction.
[0030]
(9) An exposure apparatus using a bifocal microscope lens of the present invention or a bifocal microscope using this microscope lens forms a predetermined pattern on the back surface of the sample in advance, and increases the relative position between this pattern and the photomask. It has the effect that the pattern can be transferred to the surface with the accuracy. Since the exposure apparatus of the present invention uses a two-focus microscope, it is not necessary to increase the depth of focus, and a high-power microscope can be used. The relative position of the photomask and the pattern on the backside of the sample can be matched with the following high accuracy.
[0031]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0032]
FIG. 1 is a block diagram of a first embodiment of the present invention. 4 is an objective lens, and 107 is a hologram lens. Further, FIG. 2 shows the hologram lens 107 viewed from the optical axis direction of FIG. The hologram lens 107 is formed on the substrate 9 that is transparent to the light beam 3, the grating pattern 107 a is concentric, and its center, that is, the optical axis coincides with the objective lens 4 within an assembly error. The diffraction efficiency of the + 1st order diffracted light of the hologram lens 107 is less than 100%, and the transmitted light (0th order diffracted light) 61a of the light beam 3a is designed to have sufficient intensity. For this purpose, for example, when the hologram lens 107 is formed in a concavo-convex shape as shown in FIG. 1 (relief type), the height h of the concavo-convex is smaller as h <λ / (n−1). That is, it can be easily realized by making the amplitude of the phase change given to the light beam by the grating portion 107a smaller than 2π. Here, λ is the wavelength of the light beam 3 and n is the refractive index of the transparent substrate 9. As described above, by allowing the transmitted light to have a sufficient intensity at any position of the hologram lens 107, it is possible to suppress the side lobe of the condensed beam formed by the transmitted light. Here, the side lobe will be described with reference to FIG. FIG. 3 shows the light intensity distribution of the focused spot on the information medium. In FIG. 3, a main lobe 380 is a light amount necessary for recording and reproduction, and a side lobe 381 is an unnecessary light amount that causes deterioration of a recording pit shape and a reproduction signal.
[0033]
In the present application, the term “condensation” is used. However, in the present application, “condensation” is defined as “to converge diverging light or parallel light to a diffraction-limited fine spot”.
[0034]
Furthermore, the hologram lens 107 can be blazed as shown in FIG. 4, for example, to increase the light amount sum of transmitted light and + 1st order diffracted light forming a bifocal light beam as will be described later. The effect is that can be increased.
[0035]
In this embodiment, the objective lens 4 has a numerical aperture NA of 0.6 or more and, as shown in FIG. 1A, when the light beam 61 transmitted through the hologram lens 107 without being diffracted is incident, the substrate 37 Is designed so that a diffraction-limited focused spot can be formed on an optical disk having a small thickness (t2). In the present embodiment, the grating pattern 107 of the hologram lens 107 is formed only within a diameter smaller than the opening determined by the objective lens 4. Accordingly, no diffraction occurs at the portion 107b where the grating pattern of the hologram lens 107 is not formed, and the amount of light of the high NA focused spot 38a is increased.
[0036]
Note that the phase of the 0th-order diffracted light (transmitted light) of the grating pattern 107a in FIG. 2 is an average value of the amount of phase modulation given by the grating pattern 107a. On the other hand, it is desirable to improve the light condensing performance by matching the phase of the transmitted light of the region 107b without the lattice pattern to the same extent. Therefore, for example, when the hologram lens 107a has a relief pattern as shown in FIG. 1, as shown in FIG. Adjust the height. In particular, the cross-sectional shape as shown in FIG. 5 is etched twice (etching depth h ₁ And h ₂ In the case of realizing blazing, the peripheral portion is only once (depth h). ₁ Or h ₂ Etching can provide an effect that the light collecting performance can be improved by adjusting the phase of the transmitted light of the lattice pattern 107a and the region 107b without the lattice pattern to be approximately the same. .
[0037]
Note that the step-like cross-sectional shape as shown in FIG. 5 can be considered to be a shape that approximates the cross-sectional shape shown by the wavy line in FIG. Therefore, in order to ensure that the amount of transmitted light is sufficient, the height h of the shape of the wavy line is made smaller as h <λ / (n−1), that is, given to the light beam at the grating portion. This can be easily realized by making the amplitude of the phase change smaller than 2π. Here, λ is the wavelength of the light beam, and n is the refractive index of the transparent substrate. In particular, in the case of an N-step stepped cross-sectional shape, the step per step is set to λ / ((n−1) · N), and the phase modulation amount is set to less than 2π / N radians per step. .
[0038]
Next, FIG. 1B shows that the focused spot 38b can be focused on the diffraction limit on the information medium 5 with a low NA and a thick substrate (thickness t1) according to the present invention. The + 1st order diffracted light 64 diffracted by the hologram lens 107 is condensed on the information medium 5 by the objective lens 4. Here, the + 1st-order diffracted light 64 is subjected to aberration correction so as to be narrowed down to the diffraction limit through the substrate 37 having a thickness t1. A method for designing the hologram lens 107 having such an aberration correction function is, for example, that a spherical wave diverging from the condensing spot 38b passes through the substrate 37 having a thickness t1 and then passes through the objective lens 4 to form the hologram lens 107. The interference pattern (hologram lens grating pattern 107a) between the light beam transmitted through the transparent substrate 9 and the light beam obtained by inverting the phase of the light beam 3 in FIG. The hologram lens 107 can be easily manufactured by a computer generated hologram (CGH) method or the like.
[0039]
In this way, by combining the hologram 107 that diffracts a part of the incident light and the objective lens 4, a condensing spot that is condensed to the diffraction limit can be formed on the optical disks having different substrate thicknesses (t1 and t2). It is a feature of the present invention that it has an effect that a bifocal lens that can be realized is realized.
[0040]
Here, since the hologram lens 107 has a lens action, the positions of the two focal points in the optical axis direction are different, and when information is recorded / reproduced at one focal spot, the light beam having the other focal point as the focal point. Is widely spread and the light intensity is small and does not affect recording and reproduction. For example, as shown in FIG. 1A, when the condensing spot 38a is at the in-focus position with respect to the information medium 51, the + 1st order diffracted light 64 is greatly spread on the information recording surface of the information medium 51. Does not affect. The same applies to the case of FIG. The difference between the two focal positions is such that when information is recorded / reproduced at one focal spot, the light beam having the other focal point as a condensing point spreads greatly, and the light intensity is small and does not affect recording / reproduction. In order to achieve this, it is desirable to make it as large as possible with 50 μm or more. Further, since the substrate thickness t1 of a compact disc (CD) or laser disc (LD) is about 1.2 mm and the substrate thickness t2 of the high-density optical disc is considered to be appropriate from 0.4 mm to 0.8 mm, the objective lens In consideration of the movable range of the actuator responsible for the focus servo operation, it is desirable that the difference between the two focal positions does not greatly exceed the difference of about 0.8 mm between t1 and t2. Therefore, when the focal length of the condensing spot 38a corresponding to a thin substrate with high NA as shown in FIG. 1 is shortened, the difference between the two focal positions is set to 50 μm or more and 1 mm or less. Here, as shown in FIG. 1, when the focal length of the condensing spot 38b corresponding to a thick substrate with low NA is increased, that is, when the hologram lens 107 is used as a concave lens, the difference between the two focal lengths is increased to about 1 mm. When recording / reproducing information at one focal spot, the light beam with the other focal point as the condensing point can be greatly expanded to reduce the light intensity, so that recording / reproduction is not affected at all. It has the effect.
[0041]
In this embodiment, the hologram lens 107 can be designed in a convex lens shape. In this case, the difference between the two focal positions needs to be 0.5 mm or less in consideration of the movable range of the actuator responsible for the focus servo operation of the objective lens. However, there is an effect that chromatic aberration does not occur as described below.
[0042]
If the focal length of the hologram lens 107 when the wavelength is λ0 is fhoe0, the focal length fhoe1 when the wavelength is λ1 is
fhoe1 = fhoe0 × λ0 / λ1. . . (1)
It becomes. If the refractive index of the refractive objective lens 4 is n (λ) and the focal length is f (λ),
f (λ1) = f (λ0) × (n (λ0) −1) / (n (λ1) −1). . . (2)
It becomes.
[0043]
From formula (1) and formula (2)
λ1 / (fhoe1 × λ0) + (n (λ1) −2) / (f (λ0) × (n (λ0) −1)) = 1 / fhoe0 + 1 / f (λ0). . . (3)
Thus, chromatic aberration correction, so-called chromatic aberration correction can be performed. Here, when the wavelength becomes longer, the focal length becomes shorter in the equation (1), and the focal length becomes longer in the equation (2), so that the positive and negative signs of fhoe1 and f (λ0) are made to satisfy the equation (3). If you choose, you can erase. Further, even if Equation (3) does not hold strictly, there is an effect that chromatic aberration is greatly reduced.
[0044]
Since the hologram is a diffractive element in this way, the wavelength dependence of the focal length of the hologram lens constructed using the hologram is opposite to that of the refractive index type lens, and the hologram lens and the refractive index lens having positive power. Achromaticity can be achieved by combining hologram lenses with negative power and refractive index lenses, so the curvature of the lens can be relatively small, and the hologram lens is a flat element, so it is lightweight. There are many advantages, such as excellent mass production. For the principle of achromatism, see, for example, Reference 1-D. Faklis and M. Morris (1991) Photonics Spectra Novenver 205 & December 131 (D. (December issue 131 pages), Reference 2-MAGan et al. (1991) SPIE Vol. 1507 p116 (M, A, Gun et al. (1991) S, P, I, E 1507, Volume 116), Reference 3-P. Twardowski and P. Meirueis (1991) SPIE Vol.1507 p55 (P, Toward Uski and P, Mail Ace (1991) S, P, I, E 1507, 55).
[0045]
As described above, the diffraction efficiency of the hologram lens 107 is designed so that the diffraction efficiency of the + 1st order diffracted light is less than 100%, and the transmitted light (0th order diffracted light) also has sufficient intensity. For example, when the bifocal lens of the present invention is used for a read-only optical disk device, the diffraction efficiency of + 1st order diffracted light is set to about 30% to 70%, which also allows an optical disk with a thick substrate (t1) such as a CD. The thin (t2) high-density optical disc having the thin substrate thickness also has an effect that information can be reproduced using the same amount of light. Conversely, there is an effect that the output of the light source can be saved.
[0046]
Further, when the bifocal lens of the present invention is used for an optical disk apparatus that performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2), such as a CD with a thick substrate thickness (t1), such as a CD, + 1st order diffracted light An information medium for recording information on a high-density optical disk having a thin substrate thickness (t2) because the transmittance of the hologram lens (the diffraction efficiency of the 0th-order diffracted light) is large by setting the diffraction efficiency to 30% or less. There is an effect that the light use efficiency on the (optical disk) can be increased. In other words, the light source output during recording can be saved.
[0047]
FIG. 6 shows a second embodiment of the present invention. Reference numeral 108 denotes a hologram lens. This embodiment is different from the first embodiment in the following points. In this embodiment, the grating pattern 108a of the hologram lens is formed to have the same or larger diameter as the aperture determined by the objective lens 4, and the diffraction efficiency is high at the inner peripheral portion, and the + 1st order diffraction efficiency at the outer peripheral portion. Is gradually lowered. For this purpose, for example, in the case where the hologram lens 108 is produced with a concavo-convex shape as shown in FIG. 6 (relief type), the height h of the concavo-convex is gradually lowered at the outer periphery, or the hologram lens 108 is formed. As shown in FIG. 5, the cross-sectional shape is a step-like cross-sectional shape, and a large inclination angle is approximated by setting a> b as shown in (A) at the inner peripheral portion and as shown in (B) at the outer peripheral portion. A small inclination angle is approximated by a <b. As described above, the diffraction efficiency is increased at the inner peripheral portion, and the diffraction efficiency is gradually decreased at the outer peripheral portion, so that the diffraction does not occur much at the outer peripheral portion of the hologram lens 108, and the light amount of the high NA condensing spot 38a. There is an effect that increases. Further, when the far field pattern (FFP) of the incident light beam 3 has a Gaussian distribution as shown in FIG. 7A, a large amount of light is diffracted little by little from the outer periphery toward the center. The FFP of the transmitted light 61 becomes smooth as shown in FIG. Accordingly, the side lobes 381 described above with reference to FIG. 3 can be further reduced, and the optical head device configured using the lens of this embodiment has an effect that recording and reproduction can be performed without deterioration. .
[0048]
Further, the sectional shape of the hologram lens 108 is set to a = b as shown in FIG. 5C at the inner peripheral portion, so that the amount of necessary diffracted light (0th order diffracted light and + 1st order diffracted light) can be increased. In the outer peripheral portion, the same effect as described above can be obtained by setting a <b as shown in FIG.
[0049]
As for the outer peripheral portion, a <b is gradually reduced as a <b, and when a becomes thin (about 1 μm) so that it is difficult to manufacture, a stepped cross-sectional shape of two steps is formed as shown in FIG. Furthermore, for the outer periphery, as shown in (E), b ₁ <B ₂ As b ₂ The same effect can be obtained by gradually reducing the size.
[0050]
Of course, also in this embodiment, by combining the hologram lens 108 that diffracts a part of incident light and the objective lens 4, the condensing spot that is condensed to the diffraction limit on the optical disks having different substrate thicknesses (t 1 and t 2). It is possible to realize a bifocal lens capable of forming the lens.
[0051]
As described above, the diffraction efficiency of the hologram lens 108 is designed so that the diffraction efficiency of the + 1st order diffracted light is less than 100% and the transmitted light (0th order diffracted light) has sufficient intensity. For example, when the bifocal lens of the present invention is used for a read-only optical disk device, the diffraction efficiency of + 1st order diffracted light is set to about 30% to 70%, which also allows an optical disk with a thick substrate (t1) such as a CD. The thin (t2) high-density optical disc having the thin substrate thickness also has an effect that information can be reproduced using the same amount of light. Conversely, there is an effect that the output of the light source can be saved.
[0052]
Further, when the bifocal lens of the present invention is used for an optical disk apparatus that performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2), such as a CD with a thick substrate thickness (t1), such as a CD, + 1st order diffracted light An information medium for recording information on a high-density optical disk having a thin substrate thickness (t2) because the transmittance of the hologram lens (the diffraction efficiency of the 0th-order diffracted light) is large by setting the diffraction efficiency to 30% or less. There is an effect that the light use efficiency on the (optical disk) can be increased. In other words, the light source output during recording can be saved.
[0053]
In the case of designing so that the + 1st order diffracted light generated from the hologram lens corresponding to the substrate thickness t1 can be condensed to the diffraction limit as in this embodiment, the amount of the + 1st order diffracted light is small because the numerical aperture NA is small. Become. However, if the diffraction efficiency of the + 1st order diffracted light is too high, the amount of light at the inner periphery of the transmitted light, which is a light beam corresponding to the substrate thickness t2, is greatly reduced. Sidelobe can be slightly larger. Therefore, when a semiconductor laser is used as the light source, it is utilized that the light beam has a so-called Gaussian distribution in which the light intensity decreases toward the outer periphery. As shown in FIG. 8A, the outer peripheral portion having lower strength is taken into the objective lens aperture, that is, the numerical aperture NA on the light source side is increased. Then, the diffraction efficiency of the + 1st order diffracted light is increased as shown in FIG. With such a configuration, it is possible to obtain an effect that the amount of light that can be taken into the objective lens and used can be increased, and the amount of light spot that can be condensed corresponding to the substrate thickness t1 can be increased. In addition, since the amount of light in the peripheral portion is originally weak, if the diffraction efficiency of the + 1st order diffracted light is increased, the amount of transmitted light is close to a uniform distribution as shown in FIG. There is also an effect that can be done.
[0054]
Further, as shown in FIG. 9, a hologram lens grating pattern 107a (or 108a) is provided on the inner periphery of the hologram lens 111, and the transmittance is controlled on the outer periphery such as 111a to d. A diffraction region may be provided. By doing in this way, it can prevent that the outer peripheral part of transmitted light becomes larger than necessary, and the effect that the side lobe of a condensing spot can be suppressed lower can be acquired. Here, the directions of the gratings of the transmittance correction regions 111a to 111d are all different directions, for example, the light diffracted by the diffraction region 111a is collected by the objective lens 4 and reflected by the information medium, and enters the diffraction region 111c. Sometimes it can be prevented from being diffracted in a direction parallel to the optical axis. As a result, it is possible to obtain an effect that the diffracted light in the transmittance correction region can be prevented from being mixed as stray light on the optical axis.
[0055]
A third embodiment will be described with reference to FIG. In this embodiment, as shown in FIG. 10A, the + 1st order diffracted light 66 diffracted by the hologram lens 109 is designed so as to be condensed to the diffraction limit with respect to the information medium 51 having a thin thickness t2 of the substrate 37. The objective lens 4 is designed so that a diffraction limited condensing spot can be formed on an optical disk having a thick substrate 37 (t1) when the transmitted light 61 is incident as shown in FIG. A method for designing the hologram lens 109 having such an aberration correcting function is, for example, that a spherical wave that diverges from the condensing spot 38a passes through the substrate 37 having a thickness t1 and then passes through the objective lens 4 to form the hologram lens 109. What is necessary is just to calculate the interference pattern of the light beam which permeate | transmitted the transparent substrate 9 and the light beam which reversed the positive / negative phase of the light beam 3 of Fig.10 (a). Then, the hologram lens 109 can be easily manufactured by the CGH method or the like. Further, when the focused spot 38a is sufficiently closer to the objective lens side than the focused spot 38b, the hologram lens 109 is designed to have a convex lens action as shown in FIG. In the present embodiment, the hologram lens 109 has a convex lens action, and the + 1st order diffracted light 66 is condensed by the objective lens 4 to obtain a high NA focused spot 38a, so that the curvature of the objective lens does not have to be increased too much. Alternatively, there is an effect that it is not necessary to use a glass material having a high refractive index. In addition, the difference in distance between the two focal points can be increased to about 1 mm. When information is recorded / reproduced at one focal spot, the light intensity with the focal point at the other focal point is greatly expanded to increase the light intensity. Can be reduced, and the recording / reproduction can be prevented from being affected at all. Further, since the hologram lens 109 is used as a convex lens, there is an effect that chromatic aberration does not occur as described above.
[0056]
In other words, since the hologram is a diffractive element, the wavelength dependence of the focal length of the hologram lens constructed using the hologram is opposite to that of the refractive index type lens. Since the achromaticity can be achieved by combining the lenses, the curvature of the lens can be relatively small, and the hologram lens is a flat element, so it is lightweight and has excellent mass productivity. effective.
[0057]
The diffraction efficiency of the hologram lens 109 is designed so that the diffraction efficiency of the + 1st order diffracted light is less than 100% and the transmitted light (0th order diffracted light) has sufficient intensity, as in the hologram lens 107 and the hologram lens 108. For example, when the bifocal lens of the present invention is used for a read-only optical disk device, the diffraction efficiency of + 1st order diffracted light is set to about 30% to 70%, which also allows an optical disk with a thick substrate (t1) such as a CD. The thin (t2) high-density optical disc having the thin substrate thickness also has an effect that information can be reproduced using the same amount of light. Conversely, there is an effect that the output of the light source can be saved.
[0058]
In addition, when the bifocal lens of the present invention is used for an optical disk apparatus that performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2), the optical disk apparatus having a thick substrate thickness (t1) such as a CD is used. The diffraction efficiency is set to 70% or more. By doing so, the diffraction efficiency of the + 1st order diffracted light of the hologram lens 109 is large, so that an information medium (optical disk) for recording information on a high-density optical disk with a thin substrate thickness (t2) There is an effect that the utilization efficiency of light upward can be increased. Conversely, there is an effect that the output of the light source can be saved.
[0059]
Furthermore, by increasing the diffraction efficiency at the outer peripheral portion and gradually decreasing the + 1st-order diffraction efficiency at the inner peripheral portion, it is possible to increase the amount of light for recording / reproducing with respect to the high-density optical disc. For this purpose, for example, in the case where the hologram lens 109 is produced in a concavo-convex shape as shown in FIG. 10 (relief type), the height h of the concavo-convex is gradually lowered at the inner periphery, or the hologram lens The cross-sectional shape of 109 is changed to a cross-sectional shape on a staircase as shown in FIG. 5, and a large inclination angle is approximated by setting a> b as shown in (A) at the outer peripheral portion and (B) at the inner peripheral portion. Thus, a small inclination angle is approximated by setting a <b. As described above, the diffraction efficiency is increased at the outer peripheral portion, and the diffraction efficiency is gradually decreased at the inner peripheral portion, so that diffraction does not occur much at the inner peripheral portion of the hologram lens 109, and the high NA condensing spot 38a. There is an effect that the amount of light increases. Further, when the far field pattern (FFP) of the incident light beam 3 has a Gaussian distribution, the FFP of the diffracted light 66 is smoothed by diffracting a large amount of light little by little from the outer periphery toward the center. become. Accordingly, the side lobes 381 described above with reference to FIG. 3 can be further reduced, and the optical head device configured using the lens of this embodiment has an effect that recording and reproduction can be performed without deterioration. .
[0060]
In addition, the hologram lens 109 has a cross-sectional shape with a = b as shown in FIG. 5C at the outer peripheral portion, so that the amount of necessary diffracted light (0th order diffracted light and + 1st order diffracted light) can be increased. In the inner periphery, the same effect as described above can be obtained by setting a <b as shown in FIG.
[0061]
As for the inner peripheral portion, a <b is set so that the inner peripheral portion is gradually made smaller, and when a becomes so thin that it is difficult to manufacture (about 1 μm), as shown in FIG. For the inner periphery, as shown in (E), b ₁ <B ₂ As b ₂ The same effect can be obtained by gradually reducing the size.
[0062]
Note that when the design is made so that the 0th-order diffracted light transmitted through the hologram lens corresponding to the substrate thickness t1 can be condensed to the diffraction limit as in this embodiment, the amount of transmitted light is reduced by the smaller numerical aperture NA. However, if the diffraction efficiency (transmittance) of the 0th-order diffracted light is too high, the amount of light at the inner periphery of the + 1st-order diffracted light, which is a light beam corresponding to the substrate thickness t2, is greatly reduced, so that the light beam corresponding to the substrate thickness t2 There is a possibility that the side lobe of the light condensing spot becomes slightly larger. Therefore, when a semiconductor laser is used as the light source, it is utilized that the light beam has a so-called Gaussian distribution in which the light intensity decreases toward the outer periphery. As shown in FIG. 11A, the outer peripheral portion having lower strength is taken into the objective lens aperture, that is, the numerical aperture NA on the light source side is increased. Then, the transmittance is increased as shown in FIG. With such a configuration, the amount of light that can be taken into the objective lens and used can be increased, and the amount of light of the light spot that can be condensed corresponding to the substrate thickness t1 can be increased. In addition, since the amount of light in the peripheral portion is originally weak, if the transmittance is increased, the amount of light of the + 1st order diffracted light is close to a uniform distribution as shown in FIG. 11C, and the side lobe of the focused spot can be kept low. There is also.
[0063]
Of course, also in this embodiment, by combining the hologram 109 that diffracts a part of the incident light and the objective lens 4, a condensing spot that is condensed to the diffraction limit on the optical disks having different substrate thicknesses (t1 and t2) respectively. This has the effect of realizing a bifocal lens that can be formed.
[0064]
In the above embodiments, the hologram lens has been described as a relief type. However, as disclosed in Japanese Patent Laid-Open Nos. 61-189504 and 63-241735, a part of the lithium niobate substrate is protonated. A phase-modulation hologram lens can be similarly produced by exchanging or using a liquid crystal cell.
[0065]
Further, in the above embodiment, an example in which the grating pattern of the hologram lens is formed on the opposite side of the objective lens is illustrated. By forming the grating pattern of the hologram lens on the opposite side of the objective lens, there is an effect that the reflected light from the surface of the hologram lens can be prevented from returning as stray light. That is, the light incident on the side where the hologram lens is formed is simultaneously diffracted when reflected by this surface, so that the light is scattered. Since the transmitted light is also diffracted, the amount of light reflected by the other surface is small, and when transmitted through the hologram lens surface again, it is diffracted and scattered.
[0066]
However, the grating pattern of the hologram lens can be formed on the side close to the objective lens by applying an antireflection film or preventing the plane wave from being incident on the hologram lens. For example, in FIG. 1, the grating pattern 107 a of the hologram lens 107 is formed on the side close to the objective lens 4. With such a configuration, it is not necessary to consider the effect of refraction by the transparent substrate 9 when designing the lattice pattern, so that the design can be simplified. Of course, the same applies to the hologram lens 108, 111 or 109.
[0067]
All the bifocal lenses from the first to third embodiments shown so far are composed of a combination of an objective lens and a hologram lens. Therefore, similarly to the case where the hologram 105 and the objective lens 4 are integrated in FIG. 50, as a fourth embodiment, any one of the hologram lenses 107 to 109 or 111 and the objective lens 4 are used in the present invention as shown in FIG. As shown in FIG. 4B, the two components may be integrated by connecting them using the packaging means 210 or by directly forming a grating pattern of the hologram lens on the objective lens 4. By doing so, the optical axis shift between the hologram lens and the objective lens can be reduced, and the off-axis aberration of the + 1st order diffracted light of the hologram lens can be further reduced.
[0068]
Furthermore, as a fifth embodiment, as shown in FIG. 12B, any grating pattern of the hologram lenses 107 to 109 or 111 may be formed on the information medium (optical disc) side of the objective lens 4. good. With such a configuration, since the objective lens has a smaller curvature on the information medium (optical disk) side and can be made flat, any one of the hologram lenses 107 to 109 or 111 can be easily formed at low cost. effective.
[0069]
However, on the contrary, when the hologram lens is designed to tilt with respect to the optical axis, the positional relationship is fixed by a method such as fixing the hologram lens and the radiation light source 2 on the same base. Thus, it is also possible to obtain an effect that the aberration with respect to the optical axis of the hologram lens can be suppressed.
[0070]
An optical head device configured using the bifocal lens shown in the first to fifth embodiments as a sixth embodiment will be described with reference to FIGS. Note that the xyz axes inserted in the drawings of FIGS. 13 to 18 are all common.
[0071]
In FIG. 13, reference numeral 2 denotes a radiation light source such as a semiconductor laser. The light beam 3 emitted from the radiation light source 2 is converted into substantially parallel light by the collimator lens (122), passes through the beam splitter 36, enters the hologram lens 107 and the objective lens 4, and is either on the information medium 5 or the information medium 51. It is focused on. The light beam reflected by the information medium 5 or 51 follows the original optical path in reverse, and the transmitted light 61 is transmitted again through the hologram lens 107 as indicated by the solid line, and the + 1st order diffracted light 64 is a dotted line. In this way, the hologram lens 107 diffracts the light again as + 1st order diffracted light, both of which are reflected by the beam splitter 36 through the same optical path as when the light first passes through the beam splitter 36, and are collected by the converging lens (121). After the wavefront is converted so that a focus servo signal and a tracking error signal can be obtained by wavefront conversion means such as, the light is incident on the photodetector 7. A servo signal (focus error signal and tracking error signal) and an information signal can be obtained by calculating the output of the photodetector 7. Here, the objective lens 4 needs to be moved at high speed by the driving unit 110. However, even if the hologram lens is integrated with the objective lens as in the fourth and fifth embodiments, the hologram lens 107 is a planar optical element. Since it is lightweight (several tens of milligrams or less), the hologram lens 107 and the objective lens 4 can be combined and driven by the driving unit 110. Further, as shown in FIG. 12, the hologram lens 107 is integrally formed directly on the objective lens 4 to further reduce the weight and cost. In this embodiment, the transmitted light 61 transmitted when the light beam 3 first passes through the hologram lens 107 and the light beam transmitted again through the hologram lens 107 and the light beam 3 first passes through the hologram lens 107. The + 1st order diffracted light, which is diffracted by the diffracted + 1st order diffracted light 64 by the hologram lens 107, is reflected by the beam splitter 36 through the same optical path as when it first passed through the beam splitter 36, and is collected by the converging lens (121). Servo signals are detected using the obtained light beam. Therefore, the condensing point 39 on the light detector side of the light beam reflected from the two focal points coincides with the exit point of the radiation light source 2 in a mirror image relationship. For this reason, a single servo signal detection means such as the hologram 103 and the photodetector 7 can be used in common, and the optical head device of a small size, light weight and low cost with a small number of parts can be used on different substrates. This has the effect that recording / reproduction of a thick optical disk can be performed with a single optical head device.
[0072]
Next, a servo signal detection method will be described. First, an example of the hologram 103 is schematically shown in FIG. Here, a case where a spot size detection method (SSD method) is used as an example of a focus servo signal detection method will be described. As disclosed in Japanese Patent Laid-Open No. 2-185722, the SSD method is a detection method that can remarkably ease the assembly tolerance of the optical head device and can stably obtain a servo signal even with respect to wavelength fluctuation. .
[0073]
In order to realize the SSD method, the diffracted light generated from the hologram 103 is designed to be two types of spherical waves having different curvatures. FIG. 15 is a part of FIG. 13 and shows an enlarged view from the collimating lens 122 to the photodetector 7. The grating pattern of the hologram 103 is actually obtained by using a two-beam interference method as interference fringes between a spherical wave having a focal point on the front side b of the plane of the photodetector 7 in FIG. The interference fringes are recorded or the interference fringes are formed using a computer generated hologram (CGH) technique. Then, as shown in FIG. 16, the diffracted lights 64 and 65 of + 1st order and −1st order diffracted lights, which are conjugate diffracted lights, are received by the six-divided photodetectors S1 to S6 formed on the photodetector 7. Here, (b) is the just focus state, and (a) and (c) represent the defocus state. Therefore, the focus error signal FE is
FE = (S1 + S3-S2)-(S4 + S6-S5). . . (4)
It is obtained by the operation.
[0074]
It has been previously described that the diffracted light generated from the hologram 103 is designed to be two types of spherical waves having different curvatures. As can be seen from FIG. 16, the SSD method uses the shape of the diffracted light in the Y direction. Since the change is utilized, the two light beams need only have one-dimensional focal positions in a predetermined direction on the front side and the rear side of the photodetector, and are not limited to spherical waves. For example, it may include astigmatism.
[0075]
Further, in order to take out a change in the light amount distribution on the hologram due to a change in the relative position of the focused spot on the information medium 51 and the track groove as a tracking error signal TE, as shown in FIG. May be provided on the hologram pattern 150. As shown in FIG. 17, tracking error signal detection light detection regions 72 are provided on both sides of the focus error signal detection light detection region, and tracking errors from the diffraction regions 153 and 154 as shown in FIG. The signal detection diffracted light 163 is received by the tracking error signal detection light detection region 72, and the tracking error signal TE can be obtained by the calculation shown in Expression (5).
[0076]
TE = S7-S8-S9 + S10. . . (5)
In this way, by adding wavefront conversion and splitting action to the hologram 103 and using it as an optical element for generating a servo signal (wavefront conversion means), the number of parts of the optical head device can be reduced, thus reducing the weight and the number of manufacturing steps. Reduction, reliability improvement, cost reduction, and the like.
[0077]
An example in which a so-called astigmatism method is used as a focus servo signal detection method will be described with reference to FIG. In FIG. 19, reference numeral 130 denotes astigmatism generating means such as a parallel plate. This embodiment is substantially the same as the configuration of FIG. 13 except that a so-called astigmatism method is used as a focus servo signal detection method. In FIG. 19, the light beam 41 is a substantially spherical wave and has astigmatism because it passes through the parallel plate 130. Then, the light beam 41 is received by the four-divided photodetectors S1 to S4 as shown in FIG. Here, (b) is the just focus state, and (a) and (c) represent the defocus state. Therefore, the focus error signal FE is
FE = (S1 + S4)-(S2 + S3). . . (6)
It is obtained by the operation.
[0078]
Note that S1 to S4 in the equation (6) are unrelated to S1 to S4 in the equation (4).
[0079]
Further, when the direction corresponding to the tangential (groove extension direction) and radial direction of the information medium 5 is the direction shown in FIG. 20, the hologram is generated by the relative position change between the focused spot on the information medium 5 and the track groove. The tracking error signal TE can be obtained by the calculation shown in Expression (7) using the above change in the light amount distribution.
[0080]
TE = S1 + S3- (S2 + S4). . . (7)
Note that S1 to S4 in the formula (7) are also unrelated to S1 to S4 in the formula (4).
[0081]
Also, a tracking error signal can be obtained by performing a so-called phase difference method based on the result of the equation (6).
[0082]
In this embodiment, the case where the FE signal detection is performed by the SSD method and the case where the astigmatism method is performed has been described as the hologram lens 107, but this is replaced by the hologram lens 108 or 111 and the hologram lens 109. However, it is self-evident that an optical head can be configured with the same configuration, and it is still a compact, lightweight, low-cost optical head device with a small number of parts, but one optical head device can record and reproduce optical disks with different substrate thicknesses. Thus, there is an effect that it can be performed.
[0083]
Further, when the hologram lens is provided in a parallel light beam as in this embodiment, the reflected light from the hologram lens may become stray light. However, as shown in FIG. There is an effect that the stray light can be prevented from entering the photodetector 71 by tilting 107 slightly (about 1 °). As shown in FIG. 21, a cylindrical lens 131 may be used as the astigmatism generating means. The cylindrical lens 131 can be integrally molded with the converging lens 121 to obtain an effect of reducing the cost.
[0084]
Further, in order to improve the light use efficiency and improve the S / N ratio of the signal, a polarization beam splitter 42 and a quarter wavelength plate 15 are used as shown in FIG. What is necessary is just to set to the direction which permeate | transmits the polarizing beam splitter 42 completely. As is well known, with such a configuration, the light beam 3 emitted from the radiation source 2 passes through the polarization beam splitter 42 and reaches the information medium 5 (or 51), is reflected, and is reflected again. 42 and is totally reflected.
[0085]
Further, as shown in FIG. 23, the quarter wavelength plate 15 is provided between the hologram lens 107 and the objective lens 4 so that the reflected light from the hologram lens 107 does not enter the photodetector 71. You can also. In the configuration of FIG. 23, since the reflected light of the hologram lens 107 is totally transmitted through the polarization beam splitter 42, there is an effect that it does not enter the photodetector 71 and does not become stray light.
[0086]
Furthermore, the light utilization efficiency can be improved by using beam shaping means such as a wedge prism 35 as shown in FIG.
[0087]
In the present invention, a part of the light that has been collected on the information recording surface and read the information largely spreads on the photodetector. For example, when reproducing the information medium 51 (when the thickness of the substrate is t2) with the optical head device of the present invention using the hologram lens 107, the light collected on the information recording surface and reading the information is the hologram lens. The servo signal and the information signal are read out using the light transmitted through 107. Here, the light that has been collected on the information recording surface and read the information and diffracted by the hologram lens 107 is greatly spread like the first-order diffracted light 430 shown in FIG. Therefore, a large (1 mm square or more) photodetector 75c is provided around the photodetector 75 to receive the light, and the sum of the output of the photodetector 75 and the output of the photodetector 75c is an information signal. By doing this, it is possible to obtain an effect that S / N can be improved and frequency characteristics can be improved.
[0088]
Furthermore, an embodiment in which focusing is performed in the optical head device of the present invention will be described. In the embodiment using the hologram lens 107 or 108 or 111 in the optical head device of the present invention, the focus error (FE) signal is as shown in FIG. That is, the light condensed with respect to the thickness t2 of the substrate has a large NA, and therefore the amount of light is large, which is sufficiently larger than an unnecessary FE signal generated by other light. Therefore, in order to perform focusing, first, the objective lens 4 is moved closer to the information medium 51, and when the FE signal exceeds a certain threshold, the focus servo loop is turned ON and FE = 0. Focus so that Further, the light condensed with respect to the thickness t1 of the substrate has a small NA, and therefore the amount of light is small, and an unnecessary FE signal generated by other light is large, but the objective lens 4 is generated near the information medium 5. Therefore, in order to perform focusing, the objective lens 4 is moved closer to the information medium 5 from a distance, and when the FE signal exceeds a certain threshold, the focus servo loop is turned on and FE = 0. Focus so that In this way, the objective lens 4 is moved closer to the information medium, and when the FE signal exceeds a certain threshold, the focus servo loop is turned on and focusing is performed so that FE = 0. Regardless of whether the substrate thickness of the information medium is t1 or t2, a common procedure is performed by changing the threshold value or performing auto gain control (AGC: normalizing the FE signal with the total amount of light on the photodetector). Thus, it is possible to perform focusing, and it is possible to obtain an effect that the cost of the circuit system can be reduced.
[0089]
When 109 is used as the hologram lens, since the FE signal has opposite characteristics of “far” and “close” between the objective lens 4 and the information medium, the objective lens 4 should be moved away from the proximity of the information medium. When the FE signal exceeds a certain threshold, the focus servo loop is turned on and focusing is performed so that FE = 0, so that the substrate thickness of the information medium is t1 or t2. As long as the threshold is changed or auto gain control (AGC: standardizes the FE signal with the total amount of light on the photodetector), focusing can be performed using a common procedure, reducing the cost of the circuit system. The effect that it can be done can be obtained.
[0090]
An optical head device constituted by using the bifocal lens shown in the first, second, fourth or fifth embodiment as a seventh embodiment will be described with reference to FIGS.
[0091]
In FIG. 27, 2 is a radiation light source such as a semiconductor laser. The light beam 3 emitted from the radiation light source 2 becomes substantially parallel light by the collimator lens (122) and passes through the beam splitter. Further, the transmitted light 61 transmitted through the hologram lens 107 enters the objective lens 4 and is condensed on the information medium 51. The transmitted light 61 reflected by the information medium 51 follows the original optical path as indicated by the solid line, passes through the hologram lens 107 again, is reflected by the beam splitter 36, and is collected by the converging lens (121). The wavefront is reflected by the beam splitter 361 and converted into a focus servo signal and tracking error signal by wavefront conversion means such as the hologram 103 as in the sixth embodiment. Incident. As in the sixth embodiment, servo signals (focus error signal and tracking error signal) and information signals can be obtained by calculating the output of the photodetector 7.
[0092]
Further, the + 1st order diffracted light 64 diffracted by the hologram lens 107 is incident on the objective lens 4 as shown by a dotted line and is condensed on the information medium 5. The + 1st-order diffracted light 64 reflected by the information medium 5 follows the original optical path in reverse, passes through the hologram lens 107, is reflected by the beam splitter 36, is collected by the converging lens (121), and passes through the beam splitter 361. To do. Since the light beam 40 is reflected by the information medium 5 and then transmitted without being diffracted by the hologram lens 107, the light beam 40 has no mirror image relation with the emission point of the radiation light source 2. Therefore, the condensing point 39a of the light beam 40 is shifted from the condensing point 39 in the optical axis direction. Therefore, in this embodiment, the servo signal (focus error signal and tracking error signal) and the information signal can be obtained by calculating the output of the photodetector 71 separately provided by separating the optical path by the beam splitter 361. An example of this servo signal detection method will be described with reference to FIGS. In FIG. 27, the light beam 40 is a substantially spherical wave and has astigmatism because it passes through a beam splitter 361 whose surface is coated on a parallel plate. Therefore, the light beam 40 is received by the four-divided photodetectors S1 to S4 as shown in FIG. 20 near the condensing point 39a. Here, (b) is the just focus state, and (a) and (c) represent the defocus state. Therefore, the focus error signal FE is
FE = (S1 + S4)-(S2 + S3). . . (6)
Note that S1 to S4 in the equation (6) are unrelated to S1 to S4 in the equation (4).
It is obtained by the operation.
[0093]
Further, when the direction corresponding to the tangential (groove extension direction) and radial direction of the information medium 5 is the direction shown in FIG. 20, the hologram is generated by the relative position change between the focused spot on the information medium 5 and the track groove. The tracking error signal TE can be obtained by the calculation shown in Expression (7) using the above change in the light amount distribution.
[0094]
TE = S1 + S3- (S2 + S4). . . (7)
Note that S1 to S4 in the formula (7) are also unrelated to S1 to S4 in the formula (4).
[0095]
Also, a tracking error signal can be obtained by performing a so-called phase difference method based on the result of the equation (6).
[0096]
This embodiment also has an effect that recording / reproduction of optical disks having different substrate thicknesses can be performed by one optical head device. Furthermore, it has the following effects. The first, second, fourth, or fifth embodiment is shown for an optical disk apparatus that performs only reproduction on a (t1) optical disk with a thick substrate such as a CD, and performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2). In the case of using a bifocal lens, the diffraction efficiency of the + 1st order diffracted light is set to 30% or less. By doing so, the hologram lens has a high transmittance, so that information recording is performed on a (t2) high density optical disk with a thin substrate thickness. However, at this time, since the transmittance of the hologram lens is high, the light reflected from the optical disk (information medium) is reflected. By using the internally transmitted light for servo detection and information signal detection as in this embodiment, a signal with a high S / N ratio can be obtained and a stable optical head device can be obtained. There is an effect.
[0097]
In this embodiment, the hologram lens is described as 107. However, it is obvious that the optical head can be configured with the same configuration even if the hologram lens is replaced with the hologram lens 108 or 111, and the same effect is obtained.
[0098]
An optical head device constituted by using the bifocal lens shown in the first, second, fourth or fifth embodiment as an eighth embodiment will be described with reference to FIGS. The x1 and y1 axes inserted in FIGS. 28 and 29 are common.
[0099]
In FIG. 28, the light beam 3 emitted from the radiation light source 2 becomes substantially parallel light by the collimator lens (122) and passes through the beam splitter 36. Further, the transmitted light 61 transmitted through the hologram lens 107 enters the objective lens 4 and is condensed on the information medium 51. The transmitted light 61 reflected by the information medium 51 follows the original optical path as indicated by the solid line, passes through the hologram lens 107 again, is reflected by the beam splitter 36, and is collected by the converging lens (121). As described in the seventh embodiment, it passes through the beam splitter 362 and has astigmatism, and this can be received by the photodetector 71 to obtain a focus servo signal and a tracking error signal. Further, the information signal can be obtained as in the seventh embodiment.
[0100]
Further, the + 1st order diffracted light 64 diffracted by the hologram lens 107 enters the objective lens 4 and is condensed on the information medium 5. The + 1st order diffracted light 64 reflected by the information medium 5 follows the original optical path as shown by the dotted line, passes through the hologram lens 107, is reflected by the beam splitter 36, and is collected by the converging lens (121). Then, the light is reflected and diffracted by the reflection hologram 104 provided in the beam splitter 362. Since the light beam 40 is reflected by the information medium 5 and then transmitted without being diffracted by the hologram lens 107, the light beam 40 has no mirror image relation with the emission point of the radiation light source 2. Therefore, in this embodiment, the servo path (focus error signal and tracking error signal) and the information signal are calculated by calculating the outputs of the optical detector 7 and the optical detector 71 separately provided by separating the optical path by the beam splitter 362. Is the same as the seventh embodiment. In this embodiment, the reflection hologram 104 is formed on the surface of the beam splitter 362 as shown in FIG. 28, the light beam 40 is reflected and diffracted, and the diffracted light is received by the photodetector 7 to receive servo signals and information signals. It is the feature to obtain. FIG. 29 shows an example of this reflection hologram pattern. A focus error signal detection diffracted light generation region and a tracking error signal generation region are formed, diffracted light is generated, and the diffracted light is received by a photodetector. As in the sixth embodiment, servo signals and information signals are generated. Get.
[0101]
This embodiment also has an effect that recording / reproduction of optical disks having different substrate thicknesses can be performed by one optical head device. Furthermore, it has the following effects. The first, second, fourth, or fifth embodiment is shown for an optical disk apparatus that performs only reproduction on a (t1) optical disk with a thick substrate such as a CD, and performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2). In the case of using a bifocal lens, the diffraction efficiency of the + 1st order diffracted light is set to 30% or less. By doing so, the hologram lens has a high transmittance, so that information recording is performed on a (t2) high density optical disk with a thin substrate thickness. However, at this time, since the transmittance of the hologram lens is high, the light reflected from the optical disk (information medium) is reflected. Of these, the transmitted light can be used for servo detection and information signal detection as in this embodiment, so that the light utilization efficiency can be increased. Is an effect of obtaining a stable optical head device. In particular, since the total light amount of the light beam 40 is diffracted by the reflection hologram 104 and used for signal detection, a signal having a high S / N ratio can be obtained and a stable optical head device can be obtained.
[0102]
In this embodiment, the hologram lens is described as 107. However, it is obvious that the optical head can be configured with the same configuration even if the hologram lens is replaced with the hologram lens 108 or 111, and the same effect is obtained.
[0103]
An optical head device constituted by using the bifocal lens shown in the first, second, fourth or fifth embodiment as a ninth embodiment will be described mainly with reference to FIGS. The x1, y1 axes inserted in FIGS. 30 and 31 and the x, y, z axes inserted in FIGS. 30 and 32 are common.
[0104]
In this embodiment as well as in the eighth embodiment, in FIG. 30, the light beam 3 emitted from the radiation light source 2 becomes substantially parallel light by the collimator lens (122) and passes through the beam splitter 36. Further, the transmitted light 61 transmitted through the hologram lens 107 is incident on the objective lens 4 and is condensed on the information medium 51 as shown in FIG. 28 although not shown in FIG. In the following, although not shown in FIG. 30, the case of recording / reproducing information on the information medium 51 having the substrate thickness t2 will be described with reference to FIG. The transmitted light 61 reflected by the information medium 51 follows the original optical path as indicated by the solid line, passes through the hologram lens 107 again, is reflected by the beam splitter 36, and is collected by the converging lens (121). Then, it passes through the beam splitter 362 and has astigmatism as described in the seventh embodiment, and this is received by the photodetector 76 (shown as the photodetector 71 in FIG. 28) and received as a focus servo signal or tracking. An error signal can be obtained. Further, the information signal can be obtained as in the seventh embodiment.
[0105]
Next, a case where information recording / reproduction of the information medium 5 having the substrate thickness t1 is performed in this embodiment will be described. In FIG. 30, the + 1st order diffracted light 64 diffracted by the hologram lens 107 enters the objective lens 4 and is condensed on the information medium 5. The + 1st order diffracted light 64 reflected by the information medium 5 follows the original optical path as shown by the dotted line, passes through the hologram lens 107, is reflected by the beam splitter 36, and is collected by the converging lens (121). Then, it is diffracted by the transmission hologram 1041 provided in the beam splitter 362. Since the light beam 40 is reflected by the information medium 5 and then transmitted without being diffracted by the hologram lens 107, the light beam 40 has no mirror image relation with the emission point of the radiation light source 2. Therefore, in this embodiment, for example, the position of the optical detector 76 in the optical axis direction is appropriately adjusted so that the light beam 40 is minimally confused when, for example, the transmitted light 61 of the hologram lens 107 is in a focused state on the information medium 5. The photo detector 76 is arranged at a position where it becomes a circle. The focus error signal, tracking error signal, and information signal are obtained by calculating the output of the light detector 76, as in the seventh embodiment. In particular, if the tracking error signal is detected by the phase difference method, it is sufficient to handle only a relatively high frequency (several KHz or more), so that it is possible to avoid the influence of DC fluctuations such as the temperature drift of the offset of the head amplifier output. There is an effect that can be obtained.
[0106]
In the present embodiment, when information recording / reproduction is performed on the information medium 5 having the substrate thickness t1, it is possible to use a larger amount of light by obtaining the focus error signal from the transmitted light 61 of the hologram lens 107. In FIG. 30, the light beam 3 emitted from the radiation light source 2 becomes substantially parallel light by the collimator lens (122) and passes through the beam splitter 36. Further, the transmitted light 61 transmitted through the hologram lens 107 enters the objective lens 4 and is irradiated onto the information medium 5, but is defocused on the recording surface. The transmitted light 61 reflected by the information medium 5 is transmitted again through the hologram lens 107 as shown by a solid line in FIG. 30, and is reflected by the beam splitter 36 (light beam 43). The light beam 43 is collected by the converging lens (121), passes through the beam splitter 362, and is diffracted by the hologram 1041 formed on the surface of the beam splitter 362 as shown in FIG. The photodetector 76 receives this diffracted light and obtains a servo signal and an information signal. FIG. 31 shows an example of the pattern of this transmission hologram. Focus error signal detection diffracted light generation regions 151 and 152 are formed, diffracted light is generated, and the diffracted light is received by a six-divided photodetector 76a formed on the photodetector 76, and a focus error signal is generated. obtain. In FIG. 31, for example, a region 151 generates a spherical wave 141 (FIG. 32) having a focal point on the front side of the photodetector, and a region 152 generates a spherical wave 142 (FIG. 32) having a focal point on the rear side of the photodetector. Let The far field pattern of the wavefront diffracted from the hologram pattern as shown in FIG. 31 is partially missing as shown in FIG. 32 reflecting the fact that the hologram pattern is divided, but it does not affect the focus servo signal. As shown in FIG. 32, the diffracted beams 141 and 142 are received by the six-divided photodetector 76a. Here, (b) is the just focus state, and (a) and (c) represent the defocus state. Therefore, the focus error signal FE is FE = (S10 + S30−S20) − (S40 + S60−S50). . . (8)
Is obtained based on the SSD method.
[0107]
The present embodiment is characterized in that the light beam 43 is diffracted by a hologram 1041 formed on the surface of the beam splitter 362, and the diffracted light is received by a photodetector 76 to obtain a focus error signal. This embodiment also has an effect that recording / reproduction of optical disks having different substrate thicknesses can be performed by one optical head device. Furthermore, it has the following effects. The first, second, fourth, or fifth embodiment is shown for an optical disk apparatus that performs only reproduction on a (t1) optical disk with a thick substrate such as a CD, and performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2). In the case of using a bifocal lens, the diffraction efficiency of the + 1st order diffracted light is set to 30% or less. By doing so, the hologram lens has a high transmittance, so that information recording is performed on a (t2) high density optical disk with a thin substrate thickness. However, at this time, since the transmittance of the hologram lens is high, the light reflected from the optical disk (information medium) is reflected. Of these, the transmitted light can be used for servo detection and information signal detection as in this embodiment, so that the light utilization efficiency can be increased. Is an effect of obtaining a stable optical head device. Particularly, since the light beam 43 with a large amount of light is diffracted by the hologram 1041 and used for signal detection, the effect of obtaining a focus optical signal having a high S / N ratio and a stable optical head device is remarkable. Moreover, since the servo signal and the information signal can be obtained from only one photodetector 76, there is a remarkable effect that an optical head device with a small number of parts, a small size and a low cost can be configured. .
[0108]
In this embodiment, the hologram lens is described as 107. However, it is obvious that the optical head can be configured with the same configuration even if the hologram lens is replaced with the hologram lens 108 or 111, and the same effect is obtained.
[0109]
Next, a tenth embodiment will be described with reference to FIG. This embodiment is an optical head device configured by using the bifocal lens shown in the third, fourth or fifth embodiments.
[0110]
In FIG. 33, 2 is a radiation light source such as a semiconductor laser. The light beam 3 emitted from the radiation light source 2 becomes substantially parallel light by the collimator lens (122) and passes through the beam splitter. Further, the transmitted light 61 transmitted through the hologram lens 109 enters the objective lens 4 and is condensed on the information medium 5. The transmitted light 61 reflected by the information medium 5 follows the original optical path as indicated by the dotted line, is diffracted by the hologram lens 109, reflected by the beam splitter 36, and collected by the converging lens (121). The wavefront is reflected by the beam splitter 361 and converted into a focus servo signal and tracking error signal by wavefront conversion means such as the hologram 103 as in the sixth embodiment. Incident. As in the sixth embodiment, servo signals (focus error signal and tracking error signal) and information signals can be obtained by calculating the output of the photodetector 7.
[0111]
Further, after being emitted from the radiation light source 2, the + 1st order diffracted light 66 diffracted by the hologram lens 109 enters the objective lens 4 and is condensed on the information medium 51. The + 1st order diffracted light 66 reflected by the information medium 51 follows the original optical path as shown by the solid line, diffracted by the hologram lens 109, reflected by the beam splitter 36, and condensed by the converging lens (121). And transmitted through the beam splitter 361. Then, by calculating the output of the separately provided photodetector 71, a servo signal (focus error signal and tracking error signal) and an information signal can be obtained in the same manner as in the seventh embodiment.
[0112]
This embodiment also has an effect that recording / reproduction of optical disks having different substrate thicknesses can be performed by one optical head device. Furthermore, it has the following effects. The third or fourth or fourth optical disk device configured using a hologram lens 109 is used for an optical disk apparatus that performs only reproduction on a (t1) optical disk with a thick substrate such as a CD and performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2). In the case of using the bifocal lens shown in the fifth embodiment, the diffraction efficiency of the + 1st order diffracted light is set to 70% or more. By doing so, the diffraction efficiency of the hologram lens is high, and thus the substrate thickness is thin (t2) high. Although there is an effect that it is possible to increase the use efficiency of light on the optical disk (information medium) when recording information on the density optical disk, the diffraction efficiency of the hologram lens is high at this time, so that the light is reflected from the optical disk. Of these lights, the use efficiency of light can be increased by using diffracted light for servo detection and information signal detection as in this embodiment. , There is an effect of obtaining a stable optical head apparatus obtained a signal with a high S / N ratio. In addition, since the hologram lens 109 is used, the difference in distance between the two focal points can be increased to about 1 mm, and the other focal point is condensed when information is recorded / reproduced at one focal spot. The light beam as a point can be greatly expanded to reduce the light intensity, and the recording / reproduction can be prevented from being affected at all. Further, since the hologram lens 109 is used as a convex lens, there is an effect that chromatic aberration does not occur as described above.
[0113]
An optical head device constituted by using the bifocal lens shown in the third, fourth or fifth embodiment as the eleventh embodiment will be described with reference to FIG.
[0114]
In FIG. 34, the light beam 3 emitted from the radiation light source 2 becomes substantially parallel light by the collimator lens (122) and passes through the beam splitter 36. Then, the transmitted light 61 transmitted through the hologram lens 109 enters the objective lens 4 and is condensed on the information medium 5. The transmitted light 61 reflected by the information medium 5 follows the original optical path as indicated by the dotted line, diffracted by the hologram lens 109, reflected by the beam splitter 36, and condensed by the converging lens (121). As described in the seventh embodiment, it passes through the beam splitter 362 and has astigmatism. The photodetector 71 can receive this to obtain a focus servo signal and tracking error signal. Further, the information signal can be obtained as in the seventh embodiment.
[0115]
Further, as indicated by the solid line, the + 1st order diffracted light 66 diffracted by the hologram lens 109 enters the objective lens 4 and is condensed on the information medium 51. The + 1st order diffracted light 66 reflected by the information medium 51 follows the original optical path in the reverse direction, is diffracted again by the hologram lens 109, reflected by the beam splitter 36, and collected by the converging lens (121). Reflected and diffracted by a reflection hologram 104 formed in part. The servo signal (focus error signal and tracking error signal) and the information signal are obtained by calculating the outputs of the photodetectors 7 and 71 provided separately, which is the same as in the seventh embodiment. . In this embodiment, a reflection hologram 104 is formed on the surface of the beam splitter 362 as shown in FIG. 34, the light beam 40 is reflected and diffracted, and the diffracted light is received by the photodetector 7 to receive servo signals and information signals. Get. FIG. 29 shows an example of this reflection hologram pattern. A focus error signal detection diffracted light generation region and a tracking error signal generation region are formed, diffracted light is generated, and the diffracted light is received by a photodetector. As in the sixth embodiment, servo signals and information signals are generated. Get.
[0116]
This embodiment also has an effect that recording / reproduction of optical disks having different substrate thicknesses can be performed by one optical head device. Furthermore, it has the following effects. The third or fourth or fourth optical disk device configured using a hologram lens 109 is used for an optical disk apparatus that performs only reproduction on a (t1) optical disk with a thick substrate such as a CD and performs recording and reproduction on a high-density optical disk with a thin substrate thickness (t2). In the case of using the bifocal lens shown in the fifth embodiment, the diffraction efficiency of the + 1st order diffracted light is set to 70% or more. By doing so, the hologram lens has a high diffraction efficiency, so that the substrate thickness is thin (t2). This has the effect of increasing the light utilization efficiency on the optical disk (information medium) when recording information on the high-density optical disk. At this time, the diffraction efficiency of the hologram lens is high, so that the light is reflected from the optical disk. Of this light, diffracted light can be used for servo detection and information signal detection as in this embodiment, so that the light utilization efficiency can be increased. Since, there is an effect of obtaining a stable optical head apparatus obtained a signal with a high S / N ratio. In particular, since the total amount of light beam 40 is diffracted by the reflection hologram 104 and used for signal detection, a signal with high light utilization efficiency and a high S / N ratio can be obtained and a stable optical head device can be obtained. It is remarkable. In addition, since the hologram lens 109 is used, the difference in distance between the two focal points can be increased to about 1 mm, and the other focal point is condensed when information is recorded / reproduced at one focal spot. The light beam as a point can be greatly expanded to reduce the light intensity, and the recording / reproduction can be prevented from being affected at all. Further, since the hologram lens 109 is used as a convex lens, there is an effect that chromatic aberration does not occur as described above.
[0117]
A twelfth embodiment will be described with reference to FIGS. 35 and 36, reference numeral 182 denotes a noise canceling diffracted light generation region, and reference numeral 75 denotes a noise canceling signal detecting photodetector. In FIG. 35, 2 is a radiation light source such as a semiconductor laser. The light emitted from this light source is reflected by the beam splitter 363, enters the objective lens 4, and is condensed on the information medium 5 or 51. The light beam reflected by the information medium 51 (or 5) follows the original optical path (return path) and enters the beam splitter 363. The light beam that has passed through the beam splitter 363 is incident on the photodetector 77. By calculating the output of the photodetector 77, a servo signal and an information signal can be obtained. As shown in FIG. 36, the noise-cancelling diffracted light generation region 182 is provided on the outer peripheral portion of the grating pattern 107a of the hologram lens.
[0118]
In the present embodiment, noise for a signal can be reduced based on the principle disclosed in Japanese Patent Laid-Open Nos. 60-138748 and 61-131245. In this embodiment, the noise canceling diffracted light 164 generated from the noise canceling diffracted light generating region 182 is received by the noise canceling signal detecting photodetector 75 and the output signal of the noise canceling signal detecting photodetector 75 is received. S90 is obtained. Then, the information signal RF is detected by the following calculation to reduce noise.
[0119]
RF = (S1 + S2 + S3 + S4) + R × S90. . . (9)
Here, R is a coefficient for weighting the noise cancellation signal S90. In this embodiment, unlike JP-A-60-138748 and JP-A-61-131245, since the light amount of the light beam is divided on the hologram lens, the setting allowable accuracy of the photodetector can be increased by about 100 times. is there. In addition, by using a hologram pattern having a lens action for the noise canceling signal detection light detector 75, unnecessary diffracted light generated in the forward path is defocused on the information medium 5 so as to spread widely. It is also possible to obtain the effect of not including noise for the information signal. Furthermore, by providing the noise canceling diffracted light generation region 182, the transmittance of the outer peripheral portion of the hologram lens becomes substantially the same as that of the inner peripheral portion, so that the side lobe of the light beam (condensed spot) is formed on the information medium. It is also possible to obtain an effect that a reproduction signal with lower characteristics can be obtained.
[0120]
In FIG. 37, the noise canceling diffracted light generation region 183 is divided into a plurality (two in the figure). The noise canceling diffracted light 164 diffracted from each divided region is received by the noise canceling signal detecting photodetectors 75a and 75b, and output signals S91 and S92 are obtained. Then, the information signal RF is detected by the calculation of the expression (10) to reduce noise.
[0121]
RF = (S1 + S2 + S3 + S4) + R × (S91 + S92). . . (10)
Here, R is a coefficient for weighting the noise cancellation signal S90. In this embodiment, unlike JP-A-60-138748 and JP-A-61-131245, since the light amount of the light beam is divided on the hologram, there is an effect that the setting allowable accuracy of the photodetector can be increased by about 100 times. . In this embodiment, the noise canceling diffracted light generation region 183 is divided into a plurality of parts as shown in FIG. 38, so that unnecessary diffracted light in the forward path is also divided into multiple parts, and each divided area has an NA (numerical aperture). , And the diffracted light spreads greatly, so that the information signal (noise) obtained on the information medium 5 when the sum of these is taken is averaged and the amplitude is reduced. Further, by receiving a plurality of noise canceling diffracted lights (164a and 164b) with respective photodetectors (75a and 75b), the noises are further reduced by changing the weights of the respective noise canceling signals. The effect that things are also possible can be obtained. That is, the information signal RF is detected by the calculation of the expression (11) to reduce noise.
[0122]
RF = (S1 + S2 + S3 + S4) + (R1 × S91 + R2 × S92). . . (11)
Here, R1 and R2 are coefficients for weighting the noise cancellation signals S91 and S92. In addition, by dividing the noise canceling diffracted light generation region 183 into a plurality of portions as described above, it is possible to prevent the diffracted light unnecessary for the forward path from entering the signal detection region of the photodetector. This will be described below with reference to FIG. In FIG. 39, P1 and P2 indicate locations where the noise canceling diffracted beams 164a and 164b are incident on the photodetector, respectively. When the noise canceling diffracted lights 164a and 164b are referred to as + 1st order diffracted light in the return path, the forward path + 1st order diffracted light generated from the noise canceling diffracted light generating area 183b is incident on the noise canceling diffracted light generating area 183a and is generated. + 1st order diffracted light enters P3. Here, the distance C2 between P3 and the center of the photodetector 71 is equal to the distance between P1 and P2. Therefore, by setting C2> C1 when half the length of one side of the photodetector 71 is C1, P3 can be prevented from entering the photodetector 71, and the influence of unnecessary stray light is avoided. There is an effect that can be. The point P4 is the same as the point P3. Of the + 1st order diffracted light generated from the diffracted light generation area 183 for noise cancellation, the transmitted light (0th order diffracted light) on the return path is incident on the positions P5 and P6 and does not enter the photodetector 71. Further, when a semiconductor laser is used as the light source 2, the direction in which the noise canceling diffracted light generation regions 183 a and b are provided (the direction X 2 in FIG. 38) is made to coincide with the direction in which the emission angle of the semiconductor laser is wide. Since the light intensity distribution of the light beam becomes more constant, the side lobe of the light beam (condensed spot) is lowered on the information medium, and it is possible to obtain an effect that a reproduction signal having excellent characteristics can be obtained.
[0123]
Further, a thirteenth embodiment will be described with reference to FIGS. In FIG. 40, 107 is a hologram lens. As the hologram lens, the hologram lens 107 described as the first embodiment will be described here, but the hologram lens 108, 111, 109 described in any of the second to fifth embodiments may be used. Further, as shown in the twelfth embodiment, a noise canceling diffracted light generation region can be provided on the outer periphery of the hologram lens. The hologram 173 is a polarization anisotropic hologram. A polarization anisotropy hologram can be produced by proton exchange of a part of a lithium niobate substrate or using a liquid crystal cell as disclosed in Sho 61-189504 and Sho 63-241735. It acts as a diffracting hologram for linearly polarized light in a certain polarization direction (XP direction) and does not diffract linearly polarized light in a direction perpendicular to this (YP direction). have. In this embodiment, the radiation light source 2 is a linearly polarized light source, and the polarization direction is set to the XP direction. The light beam emitted from the radiation light source 2 passes through the hologram 173 (outward), becomes a circularly polarized light beam by the λ / 4 plate 15, and is divided into two focus light beams by the hologram lens 107. When reflected by the medium 5 or 51, the rotation direction of the circularly polarized light is reversed, and again enters the λ / 4 plate 15, and becomes linearly polarized light in the direction perpendicular to the beginning (YP direction). Is diffracted by (return path) and enters the photodetector 274. By calculating the output of the photodetector, a servo signal and an information signal can be obtained as in the above-described embodiment. The present embodiment has the following effects. 1. Since the hologram lens is used, information can be recorded / reproduced with respect to information media having two types of substrate thicknesses using only one optical head device. 2. Since it is not diffracted in the forward path and diffracted in the return path, it is possible to obtain a servo signal and an information signal having a high S / N ratio even when the light use efficiency is high and the emission power of the radiation light source is low. 3. The beam splitter is not required to be used, and the optical head device can be reduced in size, weight, and cost. 4). It is a configuration that does not require the use of a beam splitter, and almost all optical components are arranged on one optical axis. (When the optical axis is bent using a rising mirror, there is no branching. Therefore, it is possible to obtain an optical head device that operates stably against temperature changes and changes with time. 5. In the return path, the transmitted light of the hologram 173 is unnecessary, so that the diffraction efficiency may be increased and the transmittance may be designed to be almost zero. By designing the transmittance to be almost zero, the hologram 173 and the quarter-wave plate 15 function as an isolator that eliminates the return light to the light source 2. Almost does not enter the active layer. Therefore, it is possible to avoid the problem of semiconductor laser noise caused by the return light.
[0124]
In addition, since the photodetector 274 in the present embodiment can be arranged close to the radiation light source 2, the relative position accuracy can be easily increased with the configuration shown in FIG. The assembly cost can be reduced. In addition, the optical head device can be further reduced in size, weight, and cost. In FIG. 41, 2 is a radiation light source, 3 is a light beam, and 274 is a photodetector. The photodetector 274a and the photodetector 274b are formed on one photodetector substrate. And a recessed part (notch part) is provided between the photodetector 274a and the photodetector 274b, the mirror 7a is provided as shown in FIG. 41, and the radiation light source 2 is installed in a hybrid. In this embodiment, since the photodetector 274a and the photodetector 274b are formed on one photodetector substrate, the relative positions of the photodetector 274a and the photodetector 274b can be easily changed to μm by the manufacturing process of the integrated circuit. There is an effect that it can be set with high accuracy of the order. Furthermore, connection is necessary for electrical connection between the hybrid element of FIG. 41 and the outside. In this embodiment, all the surfaces for connecting these connections are the X3 / Y3 plane of FIG. 41. The direction in which the wires are brought closer is common, and automatic assembly is facilitated. Furthermore, since the reference line at the time of assembly need only be provided on the X3 / Y3 plane, the relative positions of the photodetector 274a, the photodetector 274b, and the radiation source 2 can be easily set with high accuracy.
[0125]
In this embodiment, the configuration using the polarization anisotropic hologram has been described as an example. However, when the amount of light from the radiation light source 2 is sufficient, the polarization anisotropic hologram 173 is replaced with a hologram having a small grating pitch, or a blaze. The following effects can still be obtained even if the holographic hologram is used. 1. Since the hologram lens is used, information can be recorded / reproduced with respect to information media having two types of substrate thicknesses using only one optical head device. 2. The beam splitter is not required to be used, and the optical head device can be reduced in size, weight, and cost. 3. Since the configuration does not require the use of a beam splitter and the optical components are arranged almost on one optical axis, an optical head device that operates stably with respect to temperature changes and changes with time can be obtained.
[0126]
A fourteenth embodiment will be described with reference to FIG. In FIG. 42, reference numeral 2a denotes a radiation source that emits a linearly polarized light beam, and 190 denotes a polarization separation that totally reflects the linearly polarized light beam 3b emitted from the radiation light source 2a and totally transmits the linearly polarized light beam perpendicular thereto. A film 15 is a λ / 4 plate. This embodiment is characterized in that the hologram lens 107 is provided, the polarization separation film 190 and the quarter wavelength plate 15 are used, and the reflection hologram 220 is formed on the back side of the transparent substrate 9. Here, the hologram lens will be described using the hologram lens 107 described as the first embodiment, but the hologram lens 108, 111, or 109 described in any of the second to fifth embodiments may be used. . Further, as shown in the twelfth embodiment, a noise canceling diffracted light generation region can be provided on the outer periphery of the hologram lens. The light beam 3b (linearly polarized laser light) emitted from the radiation light source 2a is totally reflected by the polarization separation film 190 formed on the side of the transparent substrate 9 close to the radiation light source 2a (hereinafter referred to as the front side) and is λ / 4. A first pass through the plate is performed. Then, it enters the objective lens 4 and is condensed on the information medium 5. The light beam reflected by the information medium 5 follows the original optical path in the reverse direction and is transmitted through the λ / 4 plate for the second time, whereby the polarization direction of the light beam is rotated by 90 °. The light beam passes through the polarization separation film 190 and enters the reflection hologram 220. The diffracted light 68 in the return path generated from the reflection hologram 220 is totally transmitted through the polarization separation film 190 and enters the photodetector 78. By calculating the output of the photodetector 78, a servo signal and an information signal can be obtained. When the collimating lens is used as exemplified here, the light beam incident on the reflection film 190 is parallel light, and thus the reflectance and transmittance are uniform, and the reflected light in the forward path can be more easily transmitted on the information medium 5. Condensed to the diffraction limit. In addition, since the + 1st order diffracted light in the return path becomes uniform, there is an effect that the servo signal is less likely to be offset. There are also the following effects: Since the hologram lens is used, information can be recorded / reproduced with respect to information media having two types of substrate thicknesses using only one optical head device. 2. Since it is not diffracted in the forward path and diffracted in the return path, it is possible to obtain a servo signal and an information signal having a high S / N ratio even when the light use efficiency is high and the emission power of the radiation light source is low. 3. Since the beam splitter is also used as the rising mirror, the optical head device can be reduced in size, weight, and cost. 4). Since the optical components are almost arranged on one optical axis, an optical head device that operates stably with respect to temperature changes and changes with time can be obtained. 5. Since the polarization separation film 190 and the quarter-wave plate 15 function as an isolator that eliminates the return light to the light source 2a, almost no return light enters the active layer when a semiconductor laser is used as the light source 2a. Therefore, it is possible to avoid the problem of semiconductor laser noise caused by the return light.
[0127]
In addition, by making the reflection hologram 220 blazed, the diffraction efficiency of the + 1st order diffracted light can be brought close to 1, and signal detection can be performed using only the + 1st order diffracted light without loss of light quantity. When signal detection is performed using + 1st order diffracted light, the aberration of the diffracted light for signal detection can be compensated by the hologram 220, so that an effect that stable servo signal detection can be performed can be obtained. Further, the configuration in which the collimating lens is inserted between the radiation light source and the transparent substrate has been described as an example, but a configuration in which the collimating lens is omitted is also possible, and in this case, the same effect as described above can be obtained.
[0128]
Furthermore, when the light amount of the light source 2a is sufficient, it is possible to use a reflective film having a reflectance of about 1/3 instead of the polarization separation film 190 and omit the quarter wavelength plate 15. This case also has the following effects: Since the hologram lens is used, information can be recorded / reproduced with respect to information media having two types of substrate thicknesses using only one optical head device. 2. Since the beam splitter is also used as the rising mirror, the optical head device can be reduced in size, weight, and cost. 3. Since the optical components are almost arranged on one optical axis, an optical head device that operates stably with respect to temperature changes and changes with time can be obtained.
[0129]
According to the above embodiment of the present invention, for example, a conventional optical disc having a substrate thickness t1 (about 1.2 mm) such as a CD and a substrate thickness t2 (0.4 mm to 0.8 mm) such as a high density optical disc (information medium). Both of the next generation optical discs can be recorded / reproduced by one optical head device. However, when actually recording / reproducing, the thickness of the substrate of the optical disc to be recorded / reproduced is t1 or t2. It is necessary to judge whether. For this purpose, it is convenient to record discrimination information for discriminating the thickness on the optical disc. Since such discriminating information is not recorded on a conventional optical disc having a substrate thickness t1 (about 1.2 mm) such as a CD, naturally, the substrate thickness t2 (0 It is desirable to write the discriminating information on the next generation optical disc of about 4 mm to 0.8 mm). Therefore, an embodiment of the invention for writing such discrimination information is shown in FIGS. 43 (15th embodiment) and 44 (16th embodiment).
[0130]
FIG. 43 shows a high density optical disk of the fifteenth embodiment. In FIG. 43, 52 is a high-density optical disk (information medium), 55 is a high-density recording pit, 55a is a pit having a recording density of about CD, and the thickness of the substrate is used in most parts of this optical disk to determine the thickness. Has information that can be determined to be t2. The portion having the pit 55 or the recordable portion has a substrate thickness t2 (about 0.4 mm to 0.8 mm), but the region where the pit 55a is formed as shown in FIG. The thickness of the substrate is t1 (about 1.2 mm). When recording / reproducing the optical disk of this embodiment, the portion having the thickness t1 of the substrate is first reproduced by performing focus control corresponding to the thickness t1 of the substrate, and when the information that the thickness of the substrate is t2 is recognized, In particular, there is an effect that the focus control corresponding to the thickness t2 of the substrate can be performed. Naturally, the portion of the substrate thickness t1 is first reproduced by performing the focus control corresponding to the substrate thickness t1, and if there is no information that the substrate thickness is t2, the focus control corresponding to the substrate thickness t1 is performed as it is. Just go and keep playing. Further, in this embodiment, there is an effect that the pit 55a does not need to be excessively large and the storage capacity is not consumed.
[0131]
FIG. 44 shows a high density optical disc of the sixteenth embodiment. In FIG. 44, 52 is a high-density optical disk (information medium), 55 is a high-density recording pit, 56 is a recording pit having a recording density lower than that of a CD, that is, a pit with a large area. The portion has information for determining that the thickness of the substrate is t2. The thickness of the substrate is t2 (about 0.4 mm to 0.8 mm) over the entire surface of the information medium 51 where there are pits and where recording is possible. When recording and reproducing the optical disk of this embodiment, first, the portion of the substrate thickness t1 is reproduced by performing focus control corresponding to the substrate thickness t1. Naturally large aberrations occur, but the recording can be reproduced because the recording density is very low. If the information that the thickness of the substrate is t2 is recognized, the focus control corresponding to the thickness t2 of the substrate can be automatically performed. Naturally, the portion of the substrate thickness t1 is first reproduced by performing the focus control corresponding to the substrate thickness t1, and if there is no information that the substrate thickness is t2, the focus control corresponding to the substrate thickness t1 is performed as it is. Just go and keep playing. Further, in this embodiment, since the thickness of the substrate is constant, the information medium can be manufactured easily and inexpensively, and the information medium can be thinned.
[0132]
Next, as in any of the optical head devices up to the fifth to eleventh embodiments, it has an optical head device capable of recording / reproducing two kinds of substrates, and when actually recording / reproducing, 45 (17th embodiment) and 46 (18th embodiment) of the invention of an optical disc apparatus having a function of automatically judging whether the thickness of the substrate of the optical disc to be recorded / reproduced is t1 or t2. Example).
[0133]
FIG. 45 is a chart for explaining an optical disk apparatus according to the seventeenth embodiment. The optical disk apparatus according to the present embodiment includes an optical head apparatus capable of recording / reproducing two types of substrates as in the optical head apparatus according to any of the fifth to eleventh embodiments, a feeding mechanism of the optical head, and the like. Moving means and a rotating means such as a spindle motor for rotating the information medium. When an optical disk (information medium) is set in the optical disk apparatus of the present invention and the optical disk starts to rotate by the rotating means, information for determining the thickness of the substrate is first recorded in the fifteenth and sixteenth embodiments. The optical head device is moved by the moving means to the position, for example, the innermost circumference, and then focus control corresponding to the substrate thickness t1 is performed. When tracking control is performed to detect an information signal and information that the thickness of the substrate is t2 is recognized, focus control corresponding to the thickness t2 of the substrate is automatically performed. If there is no information that the thickness of the substrate is t2, the focus control corresponding to the thickness t1 of the substrate is performed as it is and the reproduction is continued. As long as the high-density optical disk according to the present embodiment is the fifteenth embodiment or the sixteenth embodiment, the thickness of the substrate can be determined quickly and accurately, and the recording / reproduction of the two types of substrates can be stably performed. It has the effect that it can be performed.
[0134]
FIG. 46 is a chart for explaining the optical disk apparatus according to the eighteenth embodiment. The optical disk apparatus according to the present embodiment includes an optical head apparatus capable of recording / reproducing two types of substrates as in the optical head apparatus according to any of the fifth to eleventh embodiments, a feeding mechanism of the optical head, and the like. Moving means and a rotating means such as a spindle motor for rotating the information medium. When an optical disk (information medium) is set in the optical disk apparatus of the present invention and the optical disk starts rotating by the rotating means, first, the optical head is moved by the moving means to a position where an information signal is surely present, for example, the innermost circumference. Next, focus control corresponding to the thickness t1 of the substrate is performed. Then, tracking control is performed to detect an information signal, and when the amplitude of the information signal cannot be obtained beyond a certain value, focus control corresponding to the substrate thickness t2 is automatically performed. When the amplitude of the information signal is obtained above a certain value, the focus control corresponding to the thickness t1 of the substrate is performed as it is and the reproduction is continued. According to this embodiment, even if the high-density optical disk is not the fifteenth embodiment or the sixteenth embodiment, the thickness of the substrate can be determined, and recording / reproduction of two types of substrates can be performed stably. It has the effect.
[0135]
As a nineteenth embodiment, a bifocal microscope lens having two focal positions and a bifocal microscope using this microscope lens will be described with reference to FIG. In FIG. 47, reference numeral 4107 denotes a + 1st order (or Nth order: N is an integer other than 0) and 0th order diffraction efficiency (that is, transmittance) is sufficiently large, 410 and 411 denote lenses, and 420 denotes these lenses. It is a lens barrel that holds a lens for a microscope composed of components. In this example, a microscope lens is basically configured with the same configuration as the bifocal lens shown in the first to fifth examples. Similarly to the first to fifth embodiments, the hologram lens has a concentric lattice pattern, and its center, that is, the optical axis coincides with the lenses 410 and 420 within an assembly error. The diffraction efficiency of the + 1st order diffracted light of the hologram lens 4107 is less than 100%, and the transmitted light (0th order diffracted light) is designed to have sufficient intensity. For this purpose, for example, in the case where the hologram lens 4107 is formed in a concavo-convex shape as shown in FIG. 47 (relief type), the height h of the concavo-convex is made smaller as h <λ / (n−1). That is, it can be easily realized by making the amplitude of the phase change given to the light beam at the grating portion smaller than 2π. Here, λ is the wavelength of the light beam 3 and n is the refractive index of the transparent substrate 9. In this way, by allowing the transmitted light to have sufficient intensity at any position of the hologram lens 4107,
The light that diverges from the point f2 in FIG. 47 (solid line in FIG. 47) passes through the hologram lens 4107 and the light that diverges from the point f1 (the wavy line in FIG. 47) is diffracted by the hologram lens 4107. And has the same light path after passing through the hologram lens 4107. Accordingly, it is possible to realize a microscope lens having an effect that the points f1 and f2 can be focused simultaneously and the images in the plane PL1 and the plane PL2 can be observed simultaneously.
[0136]
Further, the hologram lens 4107 is blazed in the same manner as the hologram lens 107 shown in FIG. 1, whereby the amount of transmitted light and + 1st order diffracted light focused on two locations can be increased, and a bright image can be obtained. There is an effect that can be done.
[0137]
In addition, as shown in FIG. 48, when an image is observed through a substrate having different thicknesses for transmitted light and diffracted light, aberration caused by the difference in substrate thickness is corrected by a hologram lens so that the best image can be observed. There is an effect that can be done. This is as described with reference to FIG. 1 in the first embodiment. In other words, the + 1st order diffracted light is corrected for aberration of light passing through the substrate. A method for designing a hologram lens having such an aberration correction function is, for example, a method in which a spherical wave that diverges from the condensing spot f1 passes through the substrate and then passes through the lens 410 and light that diverges from the point f2 passes through the lens 410. An interference pattern of the transmitted light on the hologram lens 4107 may be calculated. The hologram lens 4107 can be easily produced by a computer generated hologram (CGH) method or the like.
[0138]
Furthermore, PL1 which is two focal planes is formed by making the lens barrel 420 composed of an inner lens barrel 420a and an outer lens barrel 42b as shown in FIG. And PL2 can be changed, or an effect can be obtained that the adjustment can be made when the thickness of the substrate entering between them changes.
[0139]
Furthermore, by combining the microscope lens and the eyepiece 412 described above, it is possible to configure a microscope having an effect that it is possible to simultaneously observe clear images on the two planes PL1 and PL2 having different positions in the optical axis direction. The light that diverges from the point f2 in FIG. 47 (solid line in FIG. 47) passes through the hologram lens 4107 and the light diffracted by the hologram lens 4107 from the light diverges from the point f1 (wave line in FIG. 47) is the same optical path. Is focused on the point f3 by the lens 411. The image of the plane PL3 on which the point f3 exists can be further magnified by the eyepiece 412 and the PL1 surface and the PL2 surface can be simultaneously observed with the naked eye. A configuration in which the lens 411 is omitted is also possible. Further, by arranging an imaging surface such as a CCD camera on the plane PL3, the PL1 surface and the PL2 surface can be simultaneously observed and photographed by the camera.
[0140]
As a twentieth embodiment, an exposure apparatus using a bifocal microscope lens of the present invention or a bifocal microscope using this microscope lens will be described with reference to FIG. In a process of forming a fine circuit on a semiconductor, a process of applying a photosensitive material on a sample such as a semiconductor and exposing through a photomask is essential. This embodiment is an exposure apparatus used in this exposure process. In FIG. 48, reference numeral 432 denotes a photomask 431, and 431b denotes a surface of the sample, which may be coated with a photosensitive material, but is omitted in FIG. Further, 414 is a bifocal microscope lens described in the nineteenth embodiment, 415 is a bifocal microscope described in the nineteenth embodiment, 430 is a light source for a microscope, and the wavelength of the sample 431 has a sufficient transmittance. Use one with a wavelength. Of course, the exposure apparatus requires exposure means including an exposure light source and a shutter, and the exposure apparatus is also provided with exposure means in this embodiment, but is omitted in FIG. Further, although the present embodiment also includes an alignment means for aligning the photomask 432 and the sample 431, they are omitted in FIG. In this embodiment, a predetermined pattern is formed in advance on the back surface 431a of the sample 431, and the pattern and the pattern of the photomask surface 432a can be transferred to the front surface 431b by aligning the relative position of this pattern and the photomask 432 with high accuracy. Has an effect. When a pattern of a semiconductor circuit or the like is previously formed on the back surface 431a of the sample 431, in order to align the relative position of this pattern and the photomask 432, the back surface of the sample 431 has been conventionally used with a microscope with a low magnification and a deep focal depth. 431a and photomask surface 432a were observed at the same time for alignment. However, since only a low-magnification microscope can be used, it was impossible to perform alignment with an accuracy of 5 μm or less. Since the exposure apparatus of the present invention uses the bifocal microscope described above, it is not necessary to increase the depth of focus, and a high magnification microscope can be used, and the back surface 431a and the photomask surface 432a are simultaneously observed at a high magnification. Thus, it is possible to align the relative positions of the pattern of the back surface 431a of the sample 431 and the photomask surface 432a of the photomask 432 with high accuracy of 5 μm or less.
[0141]
【The invention's effect】
As is clear from the above description, the present invention provides the following effects.
[0142]
(1) By combining a hologram that diffracts a part of incident light and an objective lens, a condensing spot that is condensed to the diffraction limit is formed on an optical disk (information medium) having different substrate thicknesses (t1 and t2). This has the effect of realizing a bifocal lens capable of operating. The diffraction efficiency of the hologram lens is less than 100%, and the side of the condensed beam formed by the transmitted light is obtained by using a combination of a hologram lens and an objective lens having sufficient intensity for the transmitted light (0th order diffracted light) of the light beam. There is also an effect that the lobe can be kept low. Further, by blazing the hologram lens, it is possible to increase the light amount sum of transmitted light and + 1st order diffracted light forming a bifocal light beam, and there is an effect that the light utilization efficiency can be increased.
[0143]
(2) In the embodiment in which the hologram lens is used as a convex lens, there is an effect that chromatic aberration does not occur.
[0144]
(3) An optical head device is configured using the bifocal lens of the present invention,
By using a single wavefront conversion means and light detector in common, it is possible to record / reproduce optical discs with different substrate thicknesses with a small number of parts, and to record / reproduce optical disks with different substrate thicknesses. This has the effect that it can be performed by the head device.
[0145]
Alternatively, by configuring an optical head device using the bifocal lens of the present invention and using two sets of wavefront conversion means and photodetectors,
In an optical disk apparatus that performs only reproduction on a (t1) optical disk with a large substrate thickness such as a CD and performs recording and reproduction on a high-density optical disk with a small substrate thickness (t2), the light utilization efficiency can be increased. High signal can be obtained, and a stable optical head device can be obtained.
[0146]
(4) The thickness of the substrate of a portion having high density pits or a recordable portion is t2 (about 0.4 mm to 0.8 mm). The thickness of the substrate in the region where the pits having information that can determine that the thickness of the substrate is t2 is t1 (about 1.2 mm). As a result, when a portion of the substrate thickness t1 is first reproduced by performing focus control corresponding to the substrate thickness t1, and the information that the substrate thickness is t2 is recognized, it automatically corresponds to the substrate thickness t2. There is an effect that focus control can be performed.
[0147]
(5) A pit having a recording density lower than that of a CD, that is, a large pit having information capable of determining that the thickness of the substrate is t2, is written on a part of the optical disk. The recordable area is t2 (about 0.4 mm to 0.8 mm) over the entire surface of the information medium. When recording and reproducing this optical disk, first, the portion having the thickness t1 of the substrate is reproduced by performing focus control corresponding to the thickness t1 of the substrate. Naturally large aberrations occur, but the recording can be reproduced because the recording density is very low. If the information that the thickness of the substrate is t2 is recognized, the focus control corresponding to the thickness t2 of the substrate can be automatically performed. Naturally, the portion of the substrate thickness t1 is first reproduced by performing the focus control corresponding to the substrate thickness t1, and if there is no information that the substrate thickness is t2, the focus control corresponding to the substrate thickness t1 is performed as it is. Just go and keep playing. Further, since the thickness of the substrate is constant, the information medium can be manufactured easily and inexpensively, and the information medium can be thinned.
[0148]
(6) When the information signal is detected by moving the optical head to the position where the information for determining the thickness of the substrate is recorded on the optical disk device, for example, the innermost circumference, and the information that the thickness of the substrate is t2 is recognized. Specifically, the focus control corresponding to the thickness t2 of the substrate is performed, and if there is no information that the thickness of the substrate is t2, the focus control corresponding to the thickness t1 of the substrate is performed and the reproduction is continued. As long as the high-density optical disk is the one of the embodiment of the present invention, the thickness of the substrate can be determined quickly and accurately, and recording and reproduction of the optical disk on the two types of thickness substrates can be performed stably. Has an effect.
[0149]
(7) In the optical disk apparatus, for example, the optical head is moved to the innermost circumference, and then focus control corresponding to the thickness t1 of the substrate is performed. Then, tracking control is performed to detect an information signal, and when the amplitude of the information signal cannot be obtained beyond a certain value, focus control corresponding to the substrate thickness t2 is automatically performed. When the amplitude of the information signal is obtained above a certain value, the focus control corresponding to the thickness t1 of the substrate is performed as it is and the reproduction is continued. This makes it possible to determine the thickness of the substrate of all optical disks, and to stably perform recording and reproduction of the optical disks of the two types of thicknesses.
[0150]
(8) Since the microscope lens of the present invention uses a hologram lens having sufficient intensity for both transmitted light and diffracted light, the two focal planes can be focused simultaneously. It has the effect that images in a plane can be observed simultaneously.
[0151]
Further, by blazing the hologram lens, it is possible to increase the light amounts of transmitted light and + 1st order diffracted light focused on two places, and there is an effect that a bright image can be obtained.
[0152]
In addition, when observing an image through a substrate having different thicknesses for transmitted light and diffracted light, the effect of being able to correct the aberration caused by the difference in substrate thickness with a hologram lens so that the best image can be observed. There is.
[0153]
Furthermore, by combining the microscope lens and the eyepiece lens of the present invention, it is possible to configure a microscope having an effect that it is possible to simultaneously observe clear images on two planes having different positions in the optical axis direction.
[0154]
(9) An exposure apparatus using a bifocal microscope lens of the present invention or a bifocal microscope using this microscope lens forms a predetermined pattern on the back surface of the sample in advance, and increases the relative position between this pattern and the photomask. It has the effect that the pattern can be transferred to the surface with the accuracy. Since the exposure apparatus of the present invention uses a two-focus microscope, it is not necessary to increase the depth of focus, and a high-power microscope can be used. There is an effect that the relative position of the pattern on the back surface of the sample and the photomask can be matched with the following high accuracy.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view of a compound objective lens according to a first embodiment of the present invention.
FIG. 2 is a plan view showing a hologram pattern of a hologram lens according to the first embodiment of the present invention.
FIG. 3 is an explanatory diagram used for explaining a light amount distribution of a focused spot on an information medium.
FIG. 4 is a schematic sectional view of a hologram lens according to a first embodiment of the present invention.
FIG. 5 is a schematic sectional view of a part of a hologram lens used in the second embodiment of the present invention.
FIG. 6 is a schematic sectional view of a compound objective lens according to a second embodiment of the present invention.
FIG. 7 is a schematic cross-sectional view for explaining a light amount distribution of zero-order diffracted light (transmitted light) obtained from a hologram in an embodiment of the present invention.
FIG. 8 is a schematic cross-sectional view for explaining the light amount distribution of zero-order diffracted light (transmitted light) and diffracted light obtained from a hologram in an embodiment of the present invention.
FIG. 9 is a plan view showing a hologram pattern of a hologram lens according to an embodiment of the present invention.
FIG. 10 is a schematic sectional view of a compound objective lens according to a third embodiment of the present invention.
FIG. 11 is a schematic cross-sectional view for explaining a light amount distribution of zero-order diffracted light (transmitted light) and diffracted light obtained from a hologram in a third embodiment of the present invention.
FIG. 12 is a schematic sectional view of a compound objective lens according to a fifth embodiment of the present invention.
FIG. 13 is a schematic sectional view of an optical head device according to a sixth embodiment of the present invention.
FIG. 14 is a plan view showing a hologram pattern of a hologram used in the optical head device of the sixth embodiment, the seventh embodiment and the tenth embodiment of the present invention.
FIG. 15 is a schematic sectional view showing the relationship between the diffracted light generated from the hologram used in the optical head device of the sixth embodiment, the seventh embodiment and the tenth embodiment of the present invention and the photodetector.
FIG. 16 is a plan view for explaining the state of diffracted light on the photodetector used in the optical head device of the sixth to eleventh embodiments of the present invention.
FIG. 17 is a plan view showing a photodetector used in optical head devices according to sixth to eleventh embodiments of the present invention.
FIG. 18 is a schematic perspective view of the main part (hologram pattern and photodetector) of the optical head device of the sixth embodiment, seventh embodiment, ninth embodiment and tenth embodiment of the present invention. Figure
FIG. 19 is a schematic sectional view of an optical head device according to a sixth embodiment of the present invention.
FIG. 20 is a plan view for explaining the photodetector used in the optical head devices of the sixth to eleventh embodiments of the present invention and the state of diffracted light on the photodetector;
FIG. 21 is a schematic cross-sectional view of an optical head device according to an embodiment of the invention.
FIG. 22 is a schematic cross-sectional view of an optical head device according to an embodiment of the invention.
FIG. 23 is a schematic cross-sectional view of an optical head device according to an embodiment of the invention.
FIG. 24 is a schematic cross-sectional view of an optical head device according to an embodiment of the invention.
FIG. 25 is a plan view for explaining the photodetector used in the optical head device of the embodiment of the present invention and the state of diffracted light on the photodetector;
FIG. 26 is a schematic explanatory diagram showing an example of a focus error signal obtained in the optical head device according to the embodiment of the present invention.
FIG. 27 is a schematic sectional view of an optical head device according to a seventh embodiment of the present invention.
FIG. 28 is a schematic sectional view of an optical head device according to an eighth embodiment of the present invention.
FIG. 29 is a plan view showing a hologram pattern of a hologram used in the optical head device according to the eighth and eleventh embodiments of the present invention.
FIG. 30 is a schematic sectional view of an optical head device according to a ninth embodiment of the present invention.
FIG. 31 is a plan view showing a hologram pattern of a hologram used in the optical head device according to the ninth embodiment of the present invention.
FIG. 32 is a plan view for explaining the photodetector used in the optical head device of the ninth embodiment of the present invention and the state of diffracted light on the photodetector;
FIG. 33 is a schematic sectional view of an optical head device according to a tenth embodiment of the present invention.
FIG. 34 is a schematic sectional view of an optical head device according to an eleventh embodiment of the present invention.
FIG. 35 is a schematic sectional view of an optical head device according to a twelfth embodiment of the present invention.
FIG. 36 is a plan view showing a hologram pattern of a hologram used in the optical head device according to the twelfth embodiment of the present invention.
FIG. 37 is a schematic sectional view of an optical head device according to a twelfth embodiment of the present invention.
FIG. 38 is a plan view showing a hologram pattern of a hologram used in the optical head device according to the twelfth embodiment of the present invention.
FIG. 39 is a schematic sectional view of an optical head device according to a twelfth embodiment of the present invention.
FIG. 40 is a schematic sectional view of an optical head device according to a thirteenth embodiment of the present invention.
FIG. 41 is a schematic perspective view of the main parts (radiation light source and photodetector) of the optical head device according to the thirteenth and fourteenth embodiments of the present invention.
FIG. 42 is a schematic sectional view of an optical head device according to a fourteenth embodiment of the present invention.
FIG. 43 is a schematic perspective view (partially sectional view) of an information medium (optical disk) according to a fifteenth embodiment of the present invention.
44 is a schematic perspective view (partially sectional view) of an information medium (optical disc) according to a sixteenth embodiment of the present invention. FIG.
FIG. 45 is an explanatory diagram showing functions of the optical disc apparatus according to the seventeenth embodiment of the present invention.
FIG. 46 is an explanatory diagram showing functions of the optical disc apparatus according to the eighteenth embodiment of the present invention.
47 is a schematic cross-sectional view of a microscope objective lens and a microscope according to a nineteenth embodiment of the present invention. FIG.
FIG. 48 is a schematic sectional view of an exposure apparatus according to a twentieth embodiment of the present invention.
FIG. 49 is a schematic sectional view of a conventional optical head device.
FIG. 50 is a schematic cross-sectional view of a compound objective lens of a conventional example and a fourth embodiment of the present invention.
FIG. 51 is a schematic explanatory diagram used for explaining a conventional problem.
[Explanation of symbols]
2 Radiation light source
3 Light beam
4 Objective lens
5,51 Information media
7,71 photodetector
36 Beam splitter
107, 108, 109, 111 hologram lens
110 Driving means
121 convergent lens
122 collimating lens
123 collimating lens

Claims (15)

An optical lens for focusing light on an information medium having a transparent part via the transparent part,
Comprising a plurality of regions according to the transparent part of different thickness ,
The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region,
Both the light that has passed through the first region and the light that has passed through the second region are focused on the information medium via the transparent portion having a first thickness;
Only the light that has passed through the second region is focused on the information medium through the transparent portion having a second thickness;
The optical lens according to claim 1, wherein the first thickness is smaller than the second thickness . An optical lens for focusing light on an information medium having a transparent part via the transparent part,
Comprising a plurality of regions according to the transparent part of different thickness,
The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region,
Both the light that has passed through the first region and the light that has passed through the second region are focused on the information medium via the transparent portion having a first thickness;
Only the light that has passed through the second region is focused on the information medium through the transparent portion having a second thickness;
The first thickness is smaller than the second thickness,
The numerical aperture for converging light through the transparent portion of the first thickness is larger than the numerical aperture for condensing light through the transparent portion of the second thickness. A featured optical lens. Wherein the plurality of regions, the optical lens according to claim 1 or 2, characterized in that it comprises at least one region formed concentric relief forms. Wherein the plurality of regions, the optical lens according to claim 1 or 2, characterized in that it comprises at least one region forming a hologram. The second region is a region formed of a hologram, the first region is an optical lens according to claim 1 or 2, characterized in that a region that does not form a hologram. Wherein the first region and the second region includes an optical lens according to claim 1 or 2, characterized in that a region forming a hologram. The optical lens according to claim 6 , wherein the hologram in the first region and the hologram in the second region have different diffraction efficiencies. Wherein the hologram and the hologram of the second region of the first region, the optical lens according to claim 6 or 7, characterized in that the phase modulation amount of the lattice pattern is different. The hologram optical lens according to any one of claims 4-8, characterized in that it has a convex lens action. The optical lens according to any one of claims 4 to 9 , wherein a focal point corresponding to a thickness of the transparent portion is obtained by a diffraction action of the hologram. The focus corresponding to different thicknesses, different optical lens according to any one of claims 4 to 10, characterized in that obtained by order diffracted light. The optical lens according to any one of claims 4 to 11 , further comprising a refractive lens fixed in position relative to the plurality of regions. With a refractive lens,
The optical lens according to any one of claims 4 to 11 , wherein the plurality of regions are formed on a surface of the refractive lens. A light source;
An optical lens that receives the light emitted from the light source and focuses the light on the information medium having the transparent part via the transparent part,
The optical lens is
Comprising a plurality of regions according to the transparent part of different thickness ,
The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region,
Both the light that has passed through the first region and the light that has passed through the second region are focused on the information medium via the transparent portion having a first thickness;
Only the light that has passed through the second region is focused on the information medium through the transparent portion having a second thickness;
The optical head device according to claim 1, wherein the first thickness is smaller than the second thickness . An optical head device for focusing light on the optical disc having a transparent portion through the transparent portion and recording or reproducing information on the optical disc;
Moving means for moving the optical head device;
Rotating means for rotating the optical disc;
Comprising
The optical head device includes a light source, and an optical lens that receives light emitted from the light source and focuses the light on the optical disc via the transparent portion,
The optical lens includes a plurality of regions corresponding to the transparent portions having different thicknesses,
The plurality of regions include a first region and a second region closer to the optical axis of the optical lens than the first region,
Both the light that has passed through the first region and the light that has passed through the second region are focused on the information medium via the transparent portion having a first thickness;
Only the light that has passed through the second region is focused on the information medium through the transparent portion having a second thickness;
The optical disk apparatus according to claim 1, wherein the first thickness is smaller than the second thickness .

Images