JP3653363B2

JP3653363B2 - Information recording medium and manufacturing method

Info

Publication number: JP3653363B2
Application number: JP01479497A
Authority: JP
Inventors: 康秀藤原
Original assignee: Ricoh Co Ltd
Current assignee: Ricoh Co Ltd
Priority date: 1997-01-11
Filing date: 1997-01-11
Publication date: 2005-05-25
Anticipated expiration: 2017-01-11
Also published as: JPH10199043A

Description

【０００１】
【発明の属する技術分野】
本発明は、ＣＤ−Ｒ（ＣｏｍｐａｃｔＤｉｓｋＲｅｃｏｒｄａｂｌｅ）等の情報記録媒体（光ディスク）と、その型であるスタンパ及びその製造方法と、光ディスクの製造装置である露光装置に関し、とりわけ深さの異なるピットとグルーブを同一面上に持つ情報記録媒体とその型であるスタンパ及びその製造方法と露光装置に関するものである。
【０００２】
【従来の技術】
従来のＣＤ−Ｒ等の光ディスクの作成方法を図９〜図１６に示す。図９で、円盤状のガラス板１にフォトレジスト膜2を形成し、図１０に示されるように、これを回転させながら露光装置でレーザ光３を照射してフォトレジスト膜２にらせん状の潜像４を形成する。これを現像すると潜像部分は溶解して、グルーブ５を形成する（図１１参照）。これに導電膜をつけて電鋳し（図１２参照）、スタンパ７が作成される（図１３参照）。スタンパ７を型として成形板８を多量に複製する（図１４参照）。これに色素等の記録剤９を塗布し（図１５参照）、反射層１０、保護層１１を形成し光ディスクが作成される（図１６参照）。
【０００３】
つぎに、図１７に基づいて露光装置を説明する。光量制御信号２１によって制御されるアナログ変調器２２で光量調整されたレーザ光３は、デジタル変調器２４でデジタル信号２３によりパルス光に変調され（ピットの場合）、ビームエキスパンダー２７で拡張されたのち、対物レンズ２８で集光されてガラス板１上のフォトレジスト２を照射する。ガラス板１はターンテーブル２９で回転しながら一定速度で移動するので、図１９のように一定ピッチでらせん状に潜像４が形成される。これを現像すれば、ピット、グルーブ５が形成される。
【０００４】
ＣＤ−Ｒの場合、ピッチ１．６μｍで幅約０．３〜０．７μｍ、フォトレジスト膜厚と同じ深さの台形状のグルーブが情報領域１５に形成される。一方、情報領域１５の内側の内周ミラー面１６と、外側の外周ミラー面１７は露光されず、グルーブ５は形成されない。
【０００５】
一般のＣＤ−Ｒの場合、情報領域１５にのみグルーブが形成され、ここにＣＤライターで情報が後で記録されるが、ハイブリッドＣＤ−Ｒは、一部に露光装置で情報が予め記録される。このようなハイブリッドＣＤ−Ｒの従来例として、特開平８−１２９７８０号公報によれば、深いピットと浅いグルーブを露光光量で作り分け、フォトレジスト膜厚と同じ深いピットと、フォトレジスト膜厚より浅いグルーブを持つスタンパを作成する。これを成形して全面に記録剤９を塗布し、反射層１０、保護層１１を形成して、一部に露光装置で情報が予め記録されたハイブリッドＣＤ−Ｒが作成される。
【０００６】
また、特許０１９１１７８７号公報によれば、深いピットと浅いグルーブの作り分けを、中間層を使用し、２層のフォトレジスを形成し露光する。これにより、深いピットは、上層フォトレジスト１２の上面から下層フォトレジスト２の下面までの深さを持ち、浅いグルーブは、上層フォトレジスト１２の上面から下層フォトレジスト２の上面までの深さになるので、上下フォトレジスト２、１２の膜厚でピットとグルーブの深さが制御される。
【０００７】
次に、図１８〜図２０に基づいて、二層のフォトレジストを使用してハイブリッドＣＤ−Ｒを作成する方法を説明する。図１８に示されるように、円盤状のガラス板１にフォトレジスト膜２を形成し、その上に上層フォトレジスト１２を形成する。中間層を使用する場合は、上層フォトレジスト１２の前に中間層を形成する。図１９に示されるように、これを露光装置で回転させながらレーザ光３を照射してフォトレジスト膜２にらせん状の潜像４を形成する。グルーブ部は上層フォトレジスト１２のみ露光されるように露光し、ピット部は下層フォトレジスト２まで露光されるように露光する。これを現像すると潜像部分は溶解して、深いピット１３と浅いグルーブ１４が形成される（図２０）。
【０００８】
ハイブリッドＣＤ−Ｒの場合、ピッチ１．６μｍで幅約０．３〜０．７μｍ深さ約８００〜２０００オングストロームの溝と、ピッチ１．６μｍで幅約０．３〜０．７μｍ深さ約１０００〜５０００オングストロームのピットが情報領域１５に形成され、情報領域１５の内側の内周ミラー面１６と、外側の外周ミラー面１７は露光されず、ピット１３、グルーブ１４は形成されない。
【０００９】
情報領域１５のピット１３が形成された領域をＲＯＭ領域１８、グルーブ１４が形成された領域を記録領域１９と呼ぶ。これ以降は一般のＣＤ−Ｒと同様であり、これに導電膜をつけ電鋳してスタンパを作り、このスタンパを型として成形板を多量に複製する。これに色素等の記録剤を塗布し、反射層、保護層を形成してハイブリッドＣＤ−Ｒが製造される。
【００１０】
【発明が解決しようとする課題】
しかしながら、前記のような従来例の光ディスクでは、図２１のようにガラス板１の上に塗布されたフォトレジスト膜２は、ガラス板１を回転させながらフォトレジストを滴下して形成されるので、遠心力の小さい最も内周はフォトレジスト膜厚が不均一になり、それがスタンパに転写され、さらに成形板８に転写されるので、内周ミラー面１６の平面性が悪く、色素等の記録剤塗布時に塗布ムラが発生しやすい問題点があった。また、内周ミラー面１６は全く現像されないので、フォトレジスト塗布時にできた異物欠陥３０がそのままスタンパに転写され、さらに図２２のように成形板８に転写され、塗布ノズル３１から記録剤３２を塗布時に塗布ムラが発生する問題点があった。
【００１１】
また、特許０１９１１７８７号公報に開示されたような、従来の２層のフォトレジストを使ったスタンパ作成工法においては、電鋳後のスタンパをガラス板１から剥離後残った２層のフォトレジスト２、１２と中間層を洗浄する際に、内周ミラー面１６と外周ミラー面１７は、２層のフォトレジスト２、１２と中間層全てが残っているので他の部分より洗浄されにくく、特に、情報領域１５とミラー面の境界３３にフォトレジストの残渣が残ってしまう問題点があった（図２３参照）。
【００１２】
前記のような、従来の製造方法における欠点によって、製造された光ディスク媒体に記録および再生時のエラーが発生するという不都合があった。本発明は、前記のような従来技術における問題点を解決するためなされたもので、記録または及び再生時のエラーの少ない情報記録媒体と、内周ミラー面の平面性が良く、欠陥が少ないスタンパ及びその作成方法と、記録または及び再生時のエラーの少ないハイブリッドＣＤ−Ｒと、内周ミラー面の平面性が良く、欠陥が少ないハイブリッドスタンパ及びその作成方法と、外周ミラー面の平面性が良く、欠陥が少ないハイブリッドスタンパ及びその作成方法と、内外周ミラー面に現像後にレジストが残らないように露光できるようにする露光装置と、内周または外周ミラー面の平面性が良く、欠陥が少ないスタンパを作成する方法、をそれぞれ提供することを目的とする。
【００１３】
【課題を解決するための手段】
前記課題を解決するため本発明に係る情報記録媒体は、内周ミラー面とグルーブ面を備えて色素等の記録材料を塗布してなる情報記録媒体であって、前記内周ミラー面が前記グルーブの底面と同じ高さであることを特徴とする。この構成により、内周ミラー面の平面性が改善され、色素等の塗布ムラで発生する記録再生時のエラーが低減される。
【００１４】
本発明に係る情報記録媒体のスタンパは、内周ミラー面とグルーブ面を備えて色素等の記録材料を塗布してなる情報記録媒体の製造に用いられるスタンパであって、内周ミラー面が、グルーブの底面と同じ高さであることを特徴とする。この構成により、内周ミラー面の平面性が良く、欠陥が少なくなり、高品質な成形板を成形できる。
【００１５】
本発明に係る情報記録媒体のスタンパの作成方法は、円盤状のガラス板上に形成されたフォトレジスト膜を露光現像して情報を原盤上に刻み、これを電鋳して複製することによりスタンパを作成する方法であって、情報領域の内周を露光現像して、該情報領域の内周のフォトレジストを除去することを特徴とする。この構成により、原盤のレジスト膜厚バラツキがスタンパに転写されないので、従来に比べ内周ミラー面の平面性が良く、また、原盤のレジスト欠陥もスタンパに転写されないので、欠陥が少ないスタンパが作成される。
【００１６】
本発明に係る情報記録媒体は、深さの異なるピット及びグルーブが形成された円盤状の基板上に記録層を有する情報記録媒体であって、内周ミラー面または外周ミラー面が、前記ピットの底面と同じ高さであることを特徴とする。この構成により、従来に比べ内周ミラー面の平面性が良くなり、成形時の異常転写及び色素等の塗布ムラで発生する記録再生時のエラーが低減される。
【００１７】
本発明に係るスタンパは、深さの異なるピット及びグルーブが形成された円盤状の基板上に記録層を有する情報記録媒体の製造用スタンパであって、内周ミラー面が、前記ピットの底面と同じ高さであることを特徴とする。この構成により、従来に比べ内周ミラー面平面性が良く、欠陥が少なく、内周ミラー面のレジスト残渣がなくなることで、高品質な成形板が成形される。
【００１８】
本発明に係るスタンバの作成方法は、円盤状のガラス板上に形成された２層のフォトレジスト膜を露光現像して情報を原盤上に刻み、これを電鋳して複製することによりスタンパを作成する請求項５記載のスタンパの作成方法であって、情報領域の内周を露光現像して、該情報領域の内周のフォトレジストを除去することを特徴とする。この構成により、原盤から剥離後の内周ミラー面のスタンパ洗浄が必要なくなるので、洗浄時間が短縮され、さらに従来に比べ内周ミラー面の欠陥が少ないスタンパが提供される。
【００１９】
本発明に係るスタンパは、深さの異なるピット及びグルーブが形成された円盤状の基板上に記録層を有する情報記録媒体の製造用スタンパであって、外周ミラー面が、ピットの底面と同じ高さであることを特徴とする。この構成により、従来に比べ外周ミラー面の平面性が良く、欠陥が少なく、内周ミラー面のレジスト残渣がなくなるので、高品質な成形板が成形される。
【００２０】
本発明に係るスタンバの作成方法は、円盤状のガラス板上に形成された２層のフォトレジスト膜を露光現像して情報を原盤上に刻み、これを電鋳して複製することによりスタンパを作成する請求項７記載のスタンパの作成方法であって、情報領域の外周を露光現像して、情報領域の外周のフォトレジストを除去することを特徴とする。この構成により、原盤から剥離後の外周ミラー面のスタンパ洗浄が必要なくなるので、洗浄時間が短縮され、さらに従来に比べ外周ミラー面の欠陥が少ないスタンパが提供される。
【００２１】
本発明に係る露光装置は、フォトレジスト膜が形成された円盤状のガラス板を回転させながら集光したレーザ光をらせん状に照射して前記フォトレジスト膜に情報を記録する情報記録媒体の露光装置であって、内周または及び外周ミラー面を、グルーブまたはピット幅以下のピッチで送って内周または及び外周ミラー面を隙間無く露光する機能を有することを特徴とする。この構成により、現像後にレジストが残らないように露光できる。
【００２２】
本発明に係るスタンパの作成方法は、前記のスタンパの作成方法であって、内周または外周ミラー面の情報領域と接する部分を前記のの露光装置で露光し、さらに、情報領域と前記露光装置で露光された領域以外に紫外線を照射することを特徴とする。この構成により、露光時間が短縮できまた、全面照射の際に情報領域のマスクと原盤の位置合わせが簡単になる。
【００２３】
【発明の実施の形態】
以下、この発明の実施の形態を説明する。本発明に係る情報記録媒体の製造方法の第１の実施形態を図１〜図４に示す。なお露光工程以外の情報記録媒体の製造工程は、前記図９〜図１６に示された従来の方法と同様である。ガラス板１上のフォトレジスト２は、図１に示された従来のように、内周ミラー面１６に異物欠陥３０を含み、また内周ミラー面１６の膜厚のバラツキも、情報領域１５に比べ大きいものとする。
【００２４】
本発明にあっては従来と異なり、この内周ミラー面１６のフォトレジスト全体を露光する。これにより現像後は、図２に示されるように、内周ミラー面１６のフォトレジスト及びフォトレジスト内及び上に乗った異物３０は全て除去され、ガラス面が露出する。これをスタンパ７に複製するので、図３に示されるように、スタンパの内周ミラー面１６の面精度はガラス板１と同等になる。さらにこのまま成形板８に転写されるので、よって本発明の情報記録媒体の成形板の内周ミラー面１６の面精度は、ガラス板１と同等とすることができる（図４参照）。また、スタンパ欠陥の約半数以上がフォトレジスト塗布に起因した欠陥なので、欠陥は半分以下に減少する。
【００２５】
次に本発明の露光装置を説明する。本発明の露光装置は、情報領域の露光とは別に、内周ミラー面１６を露光する機能を有する。その他の構成は、従来例（図１７）と同等である。本発明の露光装置による、内周ミラー面１６のフォトレジスト露光を、図７に基づいて説明する。なお従来構成と同じ部分は、図１７を援用する。内周ミラー面１６を露光する場合は、まず対物レンズ２８をフォトレジストを除去する領域の最内周に移動させ、現像後に形成される溝幅よりも狭いピッチで送りながら、螺旋状に情報領域と内周ミラーの境界３３まで露光する。これにより、露光された領域は現像により、ガラス面が露出する。
【００２６】
フォトレジストを除去する領域全てを前記露光装置で露光する他の方法として、情報領域をマスク３６で遮蔽してＵＶ光３５を全面に照射する方法を図８に示す。この場合、マスク３６と情報領域１５の位置合わせをする必要があるが、露光は前記方法より短時間になる。また、さらに別の方法として、情報領域と内周ミラーの境界３３付近は、前記露光装置で露光し、それ以外の内周ミラー境界１６はＵＶ光３５を全面に照射する方法もある。
【００２７】
本発明に係る情報記録媒体の製造方法の第２の実施形態を図５〜図６に示す。露光工程以外の情報記録媒体の作成工程は、従来例（図１７参照）と同様である。下層２にフォトレジストＴＳＭＲ８９００を塗布し、中間層としてＰＶＡを形成し、さらに上層フォトレジスト１２にフォトレジストＴＳＭＲ８９００を塗布する。ついでこれらを、グルーブについては低い光量で、ピットについては高い光量で露光する。さらに内周ミラー面全面を第１の実施形態同様に露光する。さらに、外周ミラー面全面を第１の実施形態同様に露光する。これをアルカリ水溶液で現像し、導電膜を付与後約０．３ｍｍＮｉを電鋳する。これをガラス板１から剥離して、図５の状態とする。
【００２８】
この工程によって、スタンパ７の内周ミラー面１６および外周ミラー面１７には、全くフォトレジストは残らない。ついでスタンパ７を現像液と溶剤で洗浄して、スタンパ７を作成する。このスタンパを用いた成形工程によって、図６のハイブリッドＣＤ−ＲメディアをＣＤ−Ｒと同様に作成することができる。
【００２９】
【発明の効果】
以上詳述したように、請求項１の情報記録媒体においては、従来に比べ内周ミラー面の平面性が良いので、色素等の塗布ムラで発生する記録再生時のエラーを低減できる。請求項２の情報記録媒体のスタンパにおいては、従来に比べ内周ミラー面の平面性が良く、欠陥が少ないので、高品質な成形板を成形できる。
【００３０】
請求項３の情報記録媒体のスタンパの作成方法においては、原盤のレジスト膜厚バラツキがスタンパに転写されないので、従来に比べ内周ミラー面の平面性が良く、また、原盤のレジスト欠陥もスタンパに転写されないので、欠陥が少ないスタンパを作成できる。請求項４の深さの異なるピットとグルーブを有する情報記録媒体においては、従来に比べ内周ミラー面の平面性が良いので、成形時の異常転写及び色素等の塗布ムラで発生する記録再生時のエラーが低減される。
【００３１】
請求項５の深さの異なるピットとグルーブを有する情報記録媒体のスタンパにおいては、従来に比べ内周ミラー面平面性が良く、欠陥が少なく、内周ミラー面のレジスト残渣がないので、高品質な成形板を成形できる。請求項６の深さの異なるピットとグルーブを有する情報記録媒体のスタンパの作成方法においては、原盤から剥離後の内周ミラー面のスタンパ洗浄が必要なくなるので、洗浄時間が短縮でき、さらに従来に比べ内周ミラー面の欠陥が少ないスタンパを提供できる。
【００３２】
請求項７の深さの異なるピットとグルーブを有する情報記録媒体のスタンパにおいては、従来に比べ外周ミラー面の平面性が良く、欠陥が少なく、内周ミラー面のレジスト残渣がないので、高品質な成形板を成形できる。請求項８の深さの異なるピットとグルーブを有する情報記録媒体のスタンパの作成方法においては、原盤から剥離後の外周ミラー面のスタンパ洗浄が必要なくなるので、洗浄時間が短縮でき、さらに従来に比べ外周ミラー面の欠陥が少ないスタンパを提供できる。
【００３３】
請求項９の情報記録媒体の露光装置においては、グルーブまたはピット幅以下のピッチで送って露光する機能を有するので、現像後にレジストが残らないように露光できる。請求項１０の情報記録媒体のスタンパの作成方法においては、内周または外周ミラー面と情報領域の境界部は請求項９の露光装置で露光し、それ以外の内周または外周ミラー面は紫外線を全面照射して露光するので、露光時間が短縮できまた、全面照射の際に情報領域のマスクと原盤の位置合わせが簡単になるという効果を奏する。
【図面の簡単な説明】
【図１】本発明に係る情報記録媒体の製造方法の第１の実施形態の工程説明図である。
【図２】図１に続く製造工程の説明図である。
【図３】図２に続く製造工程の説明図である。
【図４】図３に続く製造工程の説明図である。
【図５】本発明に係る情報記録媒体の製造方法の第２の実施形態の工程説明図である。
【図６】図５に続く製造工程の説明図である。
【図７】本発明の露光装置による内周ミラー面のフォトレジスト露光操作の説明図である。
【図８】本発明の露光装置による内周ミラー面のフォトレジスト露光操作の説明図である。
【図９】従来の光ディスクの製造工程の説明図である。
【図１０】図９に続く製造工程の説明図である。
【図１１】図１０に続く製造工程の説明図である。
【図１２】図１１に続く製造工程の説明図である。
【図１３】図１２に続く製造工程の説明図である。
【図１４】図１３に続く製造工程の説明図である。
【図１５】図１４に続く製造工程の説明図である。
【図１６】図15に続く製造工程の説明図である。
【図１７】従来の露光装置の構成の説明図である。
【図１８】従来のハイブリッドＣＤ−Ｒの作成工程の説明図である。
【図１９】図１８に続く作成工程の説明図である。
【図２０】図１９に続く作成工程の説明図である。
【図２１】従来工程による現像後のガラス板の説明図である。
【図２２】従来工程による成形板の説明図である。
【図２３】従来の２層のフォトレジストを使ったスタンパ作成工法の断面図である。
【符号の説明】
１ガラス板
２フォトレジスト膜
４潜像
５グルーブまたはピット
７スタンパ
８成形板
１５情報領域
１６内周ミラー面
３０欠陥[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an information recording medium (optical disk) such as a CD-R (Compact Disk Recordable), a stamper that is a type of the information recording medium, a manufacturing method thereof, and an exposure apparatus that is an optical disk manufacturing apparatus. glue Bed an information recording medium having on the same surface as the stamper and a manufacturing method thereof is the type which relates to an exposure apparatus.
[0002]
[Prior art]
A method for producing a conventional optical disc such as a CD-R is shown in FIGS. In FIG. 9, a photoresist film 2 is formed on a disk-shaped glass plate 1, and as shown in FIG. 10, a laser beam 3 is irradiated with an exposure apparatus while rotating the photoresist film 2, and a spiral film is formed on the photoresist film 2. A latent image 4 is formed. When developing the latent image portion is dissolved to form a glue Bed 5 (see FIG. 11). This is electroformed with a conductive film (see FIG. 12), and the stamper 7 is created (see FIG. 13). Using the stamper 7 as a mold, the molding plate 8 is duplicated in large quantities (see FIG. 14). A recording agent 9 such as a dye is applied thereto (see FIG. 15), and a reflective layer 10 and a protective layer 11 are formed to produce an optical disc (see FIG. 16).
[0003]
Next, the exposure apparatus will be described with reference to FIG. The laser light 3 whose light amount is adjusted by the analog modulator 22 controlled by the light amount control signal 21 is modulated into pulse light by the digital signal 23 by the digital modulator 24 (in the case of a pit), and is expanded by the beam expander 27. Then, the light is condensed by the objective lens 28 and irradiated with the photoresist 2 on the glass plate 1. Since the glass plate 1 moves at a constant speed while rotating on the turntable 29, the latent image 4 is formed in a spiral shape at a constant pitch as shown in FIG. If developed, pits, glue Bed 5 is formed.
[0004]
For CD-R, the width at a pitch 1.6μm to about 0.3 to 0.7 [mu] m, trapezoidal glue blanking the same depth as the photoresist thickness is formed on the information area 15. On the other hand, the inside of the inner peripheral mirror surface 16 of the information area 15, outside the outer peripheral mirror surface 17 is not exposed, glue Bed 5 is not formed.
[0005]
For a general CD-R, is the glue blanking is formed only in the information area 15, here is information on a CD writer is recorded later, the hybrid CD-R, the information is recorded in advance in the exposure apparatus in a part The As a conventional example of such a hybrid CD-R, according to Japanese Patent Laid-Open No. 8-129780, separately formed deep pits and shallow glue Bed with exposure light quantity, and the same deep pits photoresist thickness, the photoresist film thickness to create a stamper with a more shallow glue blanking. This is molded, the recording agent 9 is applied to the entire surface, the reflective layer 10 and the protective layer 11 are formed, and a hybrid CD-R in which information is recorded in advance by an exposure apparatus is created.
[0006]
Further, according to Japanese Patent 01911787, the separate formation of the deep pits and shallow glue blanking, using an intermediate layer is formed by exposing the photoresist in two layers. Thus, deep pits has a depth from the upper surface of the upper photoresist 12 to the lower surface of the lower photoresist 2, a shallow glue blanking is the depth from the upper surface of the upper photoresist 12 to the upper surface of the lower photoresist 2 since the depth of the pits and glue blanking is controlled by the thickness of the upper and lower photoresist 2,12.
[0007]
Next, a method for producing a hybrid CD-R using a two-layer photoresist will be described with reference to FIGS. As shown in FIG. 18, a photoresist film 2 is formed on a disk-shaped glass plate 1, and an upper layer photoresist 12 is formed thereon. When an intermediate layer is used, the intermediate layer is formed before the upper photoresist 12. As shown in FIG. 19, a spiral latent image 4 is formed on the photoresist film 2 by irradiating a laser beam 3 while rotating it with an exposure apparatus. Glue Bed unit is exposed as exposed only the upper layer photoresist 12, the pit portion is exposed so as to be exposed to the lower photoresist 2. Latent image portion is dissolved when developed, deep pits 13 shallow glue Bed 14 is formed (FIG. 20).
[0008]
In the case of a hybrid CD-R, a groove having a pitch of 1.6 μm and a width of about 0.3 to 0.7 μm and a depth of about 800 to 2000 angstroms, and a pitch of 1.6 μm and a width of about 0.3 to 0.7 μm and a depth of about 1000 5000 angstroms of pits formed in the information area 15, the inside of the inner peripheral mirror surface 16 of the information area 15, outside the outer peripheral mirror surface 17 is not exposed, pits 13, glue Bed 14 is not formed.
[0009]
Pit 13 ROM region 18 a region formed of information area 15, the area where glue Bed 14 is formed is referred to as a recording area 19. After this, it is the same as a general CD-R. A conductive film is attached to the CD-R to form a stamper, and a large number of molded plates are duplicated using this stamper as a mold. This is coated with a recording agent such as a dye, and a reflective layer and a protective layer are formed to produce a hybrid CD-R.
[0010]
[Problems to be solved by the invention]
However, in the conventional optical disc as described above, the photoresist film 2 applied on the glass plate 1 is formed by dropping the photoresist while rotating the glass plate 1 as shown in FIG. At the innermost periphery where the centrifugal force is small, the photoresist film thickness is non-uniform, which is transferred to the stamper and further transferred to the molding plate 8, so that the planarity of the inner peripheral mirror surface 16 is poor and recording of pigments and the like is difficult. There was a problem that uneven coating was likely to occur during coating of the agent. Further, since the inner peripheral mirror surface 16 is not developed at all, the foreign matter defect 30 formed at the time of applying the photoresist is transferred to the stamper as it is, and further transferred to the molding plate 8 as shown in FIG. There was a problem that uneven coating occurred during coating.
[0011]
Further, in the conventional stamper making method using the two-layer photoresist as disclosed in Japanese Patent No. 09111787, the two-layer photoresist 2 remaining after the electroformed stamper is peeled off from the glass plate 1, When cleaning the intermediate layer 12 and the intermediate layer 12, the inner peripheral mirror surface 16 and the outer peripheral mirror surface 17 are less likely to be cleaned than other portions because the two layers of the photoresists 2 and 12 and the intermediate layer all remain. There is a problem that a residue of the photoresist remains at the boundary 33 between the region 15 and the mirror surface (see FIG. 23).
[0012]
Due to the drawbacks of the conventional manufacturing method as described above, there has been a disadvantage that errors in recording and reproduction occur in the manufactured optical disk medium. The present invention has been made to solve the above-described problems in the prior art, and is an information recording medium with few errors during recording and reproduction, and a stamper with good flatness of an inner peripheral mirror surface and few defects. And its production method, a hybrid CD-R with less errors during recording or reproduction, a flatness of the inner peripheral mirror surface, a hybrid stamper with less defects, and a production method thereof, and a flatness of the outer peripheral mirror surface A hybrid stamper with few defects and a method for producing the same, an exposure apparatus that allows exposure so that no resist remains on the inner and outer mirror surfaces after development, and a stamper that has good flatness on the inner or outer mirror surface and less defects The purpose of each is to provide a method.
[0013]
[Means for Solving the Problems]
In order to solve the above problems, an information recording medium according to the present invention is an information recording medium comprising an inner peripheral mirror surface and a groove surface and coated with a recording material such as a dye, wherein the inner peripheral mirror surface is the groove. It is characterized by having the same height as the bottom surface of. With this configuration, the planarity of the inner peripheral mirror surface is improved, and errors during recording and reproduction that occur due to uneven coating of pigments and the like are reduced.
[0014]
The stamper of the information recording medium according to the present invention is a stamper used for manufacturing an information recording medium having an inner peripheral mirror surface and a groove surface and coated with a recording material such as a dye, and the inner peripheral mirror surface is characterized in that it is flush with the bottom surface of the glue blanking. With this configuration, the flatness of the inner peripheral mirror surface is good, defects are reduced, and a high-quality molded plate can be formed.
[0015]
The method for producing a stamper for an information recording medium according to the present invention comprises exposing and developing a photoresist film formed on a disk-shaped glass plate, engraving information on the master, and electroforming and replicating the stamper. In which the inner circumference of the information area is exposed and developed, and the photoresist on the inner circumference of the information area is removed. With this configuration, the resist film thickness variation of the master disk is not transferred to the stamper, so the flatness of the inner mirror surface is better than before, and the resist defect of the master disk is not transferred to the stamper, so a stamper with fewer defects is created. The
[0016]
Information recording medium according to the present invention is an information recording medium having a recording layer to different depths pits and a disk-shaped substrate having glue blanking is formed, the inner peripheral mirror surfaces or the outer peripheral mirror surface, the pit It is characterized by having the same height as the bottom surface of. With this configuration, the flatness of the inner peripheral mirror surface is improved as compared with the prior art, and errors during recording and reproduction that occur due to abnormal transfer during molding and uneven coating of pigments and the like are reduced.
[0017]
Stamper according to the present invention is a manufacturing stamper for an information recording medium having a recording layer to different depths pits and glue blanking are formed disk-shaped substrate, the inner peripheral mirror surface, a bottom surface of the pit It is characterized by the same height. With this configuration, the flatness of the inner peripheral mirror surface is better than before, there are few defects, and there is no resist residue on the inner peripheral mirror surface, so that a high-quality molded plate is formed.
[0018]
In the stamper manufacturing method according to the present invention, a two-layer photoresist film formed on a disk-shaped glass plate is exposed and developed, and information is engraved on the master, and the stamper is copied by electroforming and replicating. 6. The method for producing a stamper according to claim 5, wherein the inner circumference of the information area is exposed and developed, and the photoresist on the inner circumference of the information area is removed. With this configuration, it is not necessary to perform stamper cleaning of the inner peripheral mirror surface after peeling from the master, so that the cleaning time is shortened, and a stamper with fewer defects on the inner peripheral mirror surface as compared with the prior art is provided.
[0019]
Stamper according to the present invention is a manufacturing stamper for an information recording medium having a recording layer to different depths pits and a disk-shaped substrate having glue blanking is formed, the outer peripheral mirror surface is identical to the bottom surface of the pit It is characterized by its height. With this configuration, the flatness of the outer peripheral mirror surface is better than before, there are few defects, and there is no resist residue on the inner peripheral mirror surface, so a high-quality molded plate is formed.
[0020]
In the stamper manufacturing method according to the present invention, a two-layer photoresist film formed on a disk-shaped glass plate is exposed and developed, and information is engraved on the master, and the stamper is copied by electroforming and replicating. 8. The stamper creating method according to claim 7, wherein the outer periphery of the information area is exposed and developed, and the photoresist on the outer periphery of the information area is removed. This configuration eliminates the need for stamper cleaning of the outer peripheral mirror surface after peeling from the master, thereby reducing the cleaning time and providing a stamper with fewer defects on the outer peripheral mirror surface as compared with the prior art.
[0021]
An exposure apparatus according to the present invention exposes an information recording medium that records information on the photoresist film by spirally irradiating a focused laser beam while rotating a disk-shaped glass plate on which the photoresist film is formed. an apparatus, an inner periphery or and outer mirror surface, and having a function of exposure without clearance the inner circumference or and outer mirror surface by sending the following pitch glue blanking or pit width. With this configuration, exposure can be performed so that no resist remains after development.
[0022]
The stamper creation method according to the present invention is the stamper creation method described above, wherein a portion of the inner circumference or outer circumference mirror surface that is in contact with the information area is exposed by the exposure apparatus, and the information area and the exposure apparatus are further exposed. The method is characterized by irradiating ultraviolet light to a region other than the region exposed by (1). With this configuration, the exposure time can be shortened and the masking of the information area and the master can be easily aligned when the entire surface is irradiated.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below. 1st Embodiment of the manufacturing method of the information recording medium based on this invention is shown in FIGS. The manufacturing process of the information recording medium other than the exposure process is the same as the conventional method shown in FIGS. The photoresist 2 on the glass plate 1 includes the foreign matter defect 30 on the inner peripheral mirror surface 16 as in the conventional case shown in FIG. 1, and the variation in the film thickness of the inner peripheral mirror surface 16 is also present in the information region 15. Bigger than that.
[0024]
In the present invention, unlike the prior art, the entire photoresist on the inner peripheral mirror surface 16 is exposed. Thus, after development, as shown in FIG. 2, the photoresist on the inner peripheral mirror surface 16 and the foreign matter 30 riding on and in the photoresist are all removed, and the glass surface is exposed. Since this is copied to the stamper 7, the surface accuracy of the inner peripheral mirror surface 16 of the stamper is equivalent to that of the glass plate 1 as shown in FIG. Furthermore, since it is transferred to the molding plate 8 as it is, the surface accuracy of the inner peripheral mirror surface 16 of the molding plate of the information recording medium of the present invention can be made equivalent to that of the glass plate 1 (see FIG. 4). Further, since about half or more of the stamper defects are defects caused by the photoresist application, the defects are reduced to half or less.
[0025]
Next, the exposure apparatus of the present invention will be described. The exposure apparatus of the present invention has a function of exposing the inner peripheral mirror surface 16 separately from the exposure of the information area. Other configurations are the same as those of the conventional example (FIG. 17). Photoresist exposure of the inner peripheral mirror surface 16 by the exposure apparatus of the present invention will be described with reference to FIG. In addition, FIG. 17 is used for the same part as a conventional structure. When exposing the inner peripheral mirror surface 16, first, the objective lens 28 is moved to the innermost periphery of the area where the photoresist is removed, and the information area is spirally moved while being sent at a pitch narrower than the groove width formed after development. To the boundary 33 of the inner mirror. Thereby, the glass surface is exposed in the exposed region by development.
[0026]
FIG. 8 shows a method of irradiating the entire surface with the UV light 35 while shielding the information region with the mask 36 as another method of exposing the entire area where the photoresist is removed by the exposure apparatus. In this case, it is necessary to align the mask 36 and the information area 15, but the exposure takes a shorter time than the above method. As still another method, there is a method in which the vicinity of the boundary 33 between the information region and the inner peripheral mirror is exposed by the exposure apparatus, and the other inner peripheral mirror boundary 16 is irradiated with UV light 35 over the entire surface.
[0027]
A second embodiment of the information recording medium manufacturing method according to the present invention is shown in FIGS. The production process of the information recording medium other than the exposure process is the same as the conventional example (see FIG. 17). A photoresist TSMR 8900 is applied to the lower layer 2, PVA is formed as an intermediate layer, and a photoresist TSMR 8900 is applied to the upper layer photoresist 12. Then these, a low amount of light for glue blanking, exposure with high light intensity for the pit. Further, the entire inner mirror surface is exposed as in the first embodiment. Further, the entire surface of the outer peripheral mirror surface is exposed as in the first embodiment. This is developed with an alkaline aqueous solution, and after applying a conductive film, about 0.3 mm Ni is electroformed. This is peeled from the glass plate 1 to obtain the state shown in FIG.
[0028]
By this step, no photoresist remains on the inner peripheral mirror surface 16 and the outer peripheral mirror surface 17 of the stamper 7. Subsequently, the stamper 7 is washed with a developer and a solvent to prepare the stamper 7. By the molding process using this stamper, the hybrid CD-R media shown in FIG. 6 can be produced in the same manner as the CD-R.
[0029]
【The invention's effect】
As described above in detail, in the information recording medium of claim 1, since the planarity of the inner peripheral mirror surface is better than the conventional one, errors in recording / reproduction caused by coating unevenness of a pigment or the like can be reduced. In the stamper of the information recording medium according to the second aspect, since the flatness of the inner peripheral mirror surface is better and the number of defects is smaller than in the prior art, a high quality molded plate can be formed.
[0030]
In the method for producing the stamper of the information recording medium according to claim 3, since the resist film thickness variation of the master disk is not transferred to the stamper, the planarity of the inner peripheral mirror surface is better than before and the resist defect of the master disk is also a stamper. Since it is not transferred, a stamper with few defects can be created. In the information recording medium having a depth different pits and glue Bed according to claim 4, since the good flatness of the peripheral mirror surface compared to the conventional recording and reproducing occurring in uneven coating such as the abnormal transfer and dye during molding Time error is reduced.
[0031]
In stamper information recording medium having a depth different pits and glue Bed according to claim 5, good inner mirror surface flatness than the conventional, small defects, since there is no resist residues of the inner peripheral mirror surfaces, high A quality molded plate can be formed. In stamper creating a depth different pits and an information recording medium having a glue Bed according to claim 6, since the stamper cleaning of the inner peripheral mirror surface after peeling from the master is not required, it can be shortened cleaning time, yet conventional A stamper with fewer defects on the inner peripheral mirror surface can be provided.
[0032]
In stamper information recording media having different pits and glue blanking depths of claim 7, conventionally well flatness of the outer peripheral mirror surface compared to less defects, because there is no resist residues of the inner peripheral mirror surfaces, high A quality molded plate can be formed. In stamper creating a depth different pits and an information recording medium having a glue Bed according to claim 8, since the stamper cleaning of the outer mirror surface after peeling from the master is not required, can be shortened cleaning time, more conventional A stamper with fewer defects on the outer peripheral mirror surface can be provided.
[0033]
In the exposure apparatus of the information recording medium of claim 9, because it has a function of exposing sent by glue blanking or pit width less pitch can be exposed so that the resist does not remain after development. In the method for producing a stamper for an information recording medium according to claim 10, the boundary between the inner or outer mirror surface and the information area is exposed by the exposure apparatus according to claim 9, and the other inner or outer mirror surface is exposed to ultraviolet rays. Since exposure is performed by irradiating the entire surface, the exposure time can be shortened, and the effect of simplifying the alignment of the mask of the information area and the master during the entire surface irradiation is achieved.
[Brief description of the drawings]
FIG. 1 is a process explanatory diagram of a first embodiment of a method of manufacturing an information recording medium according to the present invention.
FIG. 2 is an explanatory diagram of a manufacturing process that follows FIG. 1;
3 is an explanatory diagram of the manufacturing process subsequent to FIG. 2. FIG.
4 is an explanatory diagram of the manufacturing process subsequent to FIG. 3. FIG.
FIG. 5 is a process explanatory diagram of a second embodiment of a method for manufacturing an information recording medium according to the present invention.
6 is an explanatory diagram of the manufacturing process subsequent to FIG. 5. FIG.
FIG. 7 is an explanatory view of a photoresist exposure operation on an inner peripheral mirror surface by the exposure apparatus of the present invention.
FIG. 8 is an explanatory diagram of a photoresist exposure operation on the inner peripheral mirror surface by the exposure apparatus of the present invention.
FIG. 9 is an explanatory diagram of a manufacturing process of a conventional optical disc.
10 is an explanatory diagram of the manufacturing process subsequent to FIG. 9. FIG.
11 is an explanatory diagram of the manufacturing process subsequent to FIG. 10. FIG.
12 is an explanatory diagram of the manufacturing process subsequent to FIG. 11. FIG.
13 is an explanatory diagram of the manufacturing process subsequent to FIG. 12. FIG.
FIG. 14 is an explanatory diagram of the manufacturing process that follows FIG. 13;
FIG. 15 is an explanatory diagram of the manufacturing process that follows FIG. 14;
16 is an explanatory diagram of the manufacturing process subsequent to FIG. 15. FIG.
FIG. 17 is an explanatory diagram of a configuration of a conventional exposure apparatus.
FIG. 18 is an explanatory diagram of a conventional hybrid CD-R creation process.
FIG. 19 is an explanatory diagram of the creation process that follows FIG. 18;
FIG. 20 is an explanatory diagram of a creation process following FIG. 19;
FIG. 21 is an explanatory diagram of a glass plate after development by a conventional process.
FIG. 22 is an explanatory diagram of a molded plate according to a conventional process.
FIG. 23 is a cross-sectional view of a conventional stamper making method using a two-layer photoresist.
[Explanation of symbols]
1 Glass plate 2 Photoresist film 4 Latent image 5 Groove or pit 7 Stamper 8 Molding plate 15 Information area 16 Inner mirror surface 30 Defect

Claims

An information recording medium comprising an inner peripheral mirror surface and a groove surface and coated with a recording material such as a dye, wherein the inner peripheral mirror surface is the same height as the bottom surface of the groove Medium.

A inner peripheral stamper used for producing the information recording medium a recording material formed by coating a dye or the like provided with a mirror surface and the groove surface, it is the inner peripheral mirror surface is flush with the bottom surface of the glue Bed An information recording medium stamper.

3. The stamper producing method according to claim 2, wherein a stamper is produced by exposing and developing a photoresist film formed on a disk-shaped glass plate to engrave information on the master, and electroforming and replicating the information. Then, the inner circumference of the information area is exposed and developed to remove the photoresist on the inner circumference of the information area.

An information recording medium having a recording layer to different depths pits and the glue blanking is formed disk-shaped substrate, it inner peripheral mirror surfaces or the outer peripheral mirror surface is flush with the bottom surface of the pit An information recording medium characterized by the above.

A manufacturing stamper for an information recording medium having a recording layer to different depths pits and the glue blanking disk-shaped substrate formed, it is an inner peripheral mirror surface is flush with the bottom surface of the pit An information recording medium stamper.

6. A stamper according to claim 5, wherein a stamper is formed by exposing and developing a two-layered photoresist film formed on a disk-shaped glass plate, engraving information on the master disk, and electroforming and replicating the information. A method for producing a stanza, comprising exposing and developing the inner periphery of an information area and removing the photoresist on the inner periphery of the information area.

A manufacturing stamper for an information recording medium having a recording layer to different depths pits and glue blanking are formed disk-shaped substrate, wherein the outer peripheral mirror surface is flush with the bottom surface of the pit An information recording medium stamper.

8. A stamper according to claim 7, wherein a stamper is formed by exposing and developing a two-layered photoresist film formed on a disk-shaped glass plate to engrave information on the master, and electroforming and replicating the information. A method for producing a stamper, the method comprising exposing and developing an outer periphery of an information area and removing a photoresist on the outer periphery of the information area.

An exposure apparatus for an information recording medium for recording information on the photoresist film by spirally irradiating a focused laser beam while rotating a disk-shaped glass plate on which a photoresist film is formed, the inner circumference or and an outer mirror surface, the exposure apparatus of the information recording medium characterized by having an inner periphery or and outer mirror surface by sending the following pitch glue blanking or pit width function of exposure without clearance.

9. The stamper producing method according to claim 3, 6 or 8, wherein a portion of the inner periphery or outer peripheral mirror surface that is in contact with the information area is exposed by the exposure apparatus according to claim 9, and the information area and the exposure apparatus are further exposed. A method for producing a stamper, characterized by irradiating ultraviolet light in a region other than the region exposed in step (1).