JP3638061B2 - Thin plate manufacturing method and apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a measurement control technology for a gap dimension which is a structure that regulates a plate thickness when manufacturing a thin plate of several millimeters or less, such as a gap between a roll and a roll or a gap between a roll and a melt discharge nozzle. The present invention relates to a method and an apparatus suitable for producing a metal ribbon of about several tens of microns.
[0002]
[Prior art]
In the production of a thin plate, a method of rolling with a roll is generally used to reduce the plate thickness. In the production of a so-called metal ribbon, which is a metal ultrathin long plate having a plate thickness of about several tens of microns, it is rotated. The molten metal is poured onto a roll, quenched, and rolled with another roll while forming a ribbon. At this time, the factor determining the plate thickness is the gap size of the gap between the rolls, and it is necessary to control the gap size in order to obtain a plate thickness with a predetermined accuracy.
In addition, a method for manufacturing a metal ribbon includes a method called a single roll method in which molten metal is simply poured into one rotating roll. In order to determine the thickness of the metal ribbon by the single roll method, it is necessary to control the gap size of the gap between the roll surface and the nozzle tip which is the molten metal pouring portion.
The metal ribbon thus manufactured has an amorphous or fine crystallized structure and has excellent magnetic properties and is applied to various technical fields. However, it needs to have a small thickness variation in terms of quality. Has been. In order to reduce the thickness variation, it is preferable to keep the gap within a variation range of about 10 μm or less during molten metal pouring, but conventionally, the gap has varied about 100 μm.
[0003]
By the way, at present, the single roll method is often used for the production of the metal ribbon, and the actual application 62-062167 discloses a control method for reducing gap size variation by the single roll method. In this method, the displacement between the tip of the nozzle and the rotating roll surface is individually measured, and the fluctuation of the gap is relatively calculated. In measuring the displacement of the nozzle, the tip of the nozzle is imaged with a CCD camera through a microscope and measured by image processing. The roll surface displacement is measured by a displacement sensor provided close to the roll surface. The gap measurement value is calculated using the two measured values, and the nozzle position control means is controlled so as to eliminate the fluctuation value, and the gap is kept at the set value.
[0004]
[Problems to be solved by the invention]
However, the prior art has the following problems.
1) The CCD camera does not have a light source, and the tip of the nozzle can capture a clear image only when the molten metal (hereinafter also referred to as molten metal) after the mother alloy is melted is in a red hot state. For this reason, the gap control cannot be performed unless after the start of the molten metal pouring, the control is delayed, and the quality such as the thickness of the initial metal ribbon is not stable.
2) The absolute dimension of the gap cannot be measured. For this reason, when the vessel, which is a heat-resistant container containing the mother alloy, is in a cold state, the gap must be set with a gap gauge or the like. For this reason, it is necessary to correct the displacement of the nozzle immediately before the dispensing, but this displacement measurement is difficult. For example, when the displacement is measured by a contact displacement meter such as a dial gauge, the displacement cannot be measured accurately due to expansion or the like due to heat transfer of the measuring instrument itself.
3) The surface displacement of the roll cannot be measured accurately. That is, the temperature of the displacement sensor itself increases due to the temperature rise of the roll surface, and the interval between the roll surface and the displacement sensor becomes narrow due to the expansion of the roll surface, and the measurement value includes an error.
Therefore, in order to solve these problems, the present invention measures the gap dimension that defines the thickness dimension of the thin sheet or the thickness of the thin sheet that has passed through the gap, and controls the gap dimension so that the gap dimension becomes the target value. It is an object to provide a method and apparatus.
[0005]
[Means for Solving the Problems]
To the object, the present invention is irradiated with a parallel beam with a clearance gap in formic cap width or more width that is between the nozzle tip to dispense with the outer peripheral surface of the roll to rapidly cool the molten metal to the molten metal, Light that has passed through the gap is detected, noise removal processing is performed on the detected data, data averaging processing is performed to measure the gap size, and gap size control is performed based on the data that has been subjected to data averaging processing. A thin plate manufacturing method for performing a data averaging process of calculating a moving average for the data output as time passes , and measuring a gap size while rotating a roll while performing a gap measurement by a nozzle that has become hot. as characterized in that the gap dimension control after the peripheral speed of the outer peripheral surface of the roll has reached a fluctuation predetermined speed suppressing air occurring That.
The above means can be further characterized by a thin plate manufacturing method as follows . In this method, it is effective to use a nozzle having a light-shielding property and the light emitting inhibitory. It is also possible to combine the technical means for performing formic cap size measurement noise removal by software low-pass filter.
[0006]
As the apparatus unit, the outer circumference of the roll rotating molten metal comprising a heat-resistant container, which are extracted from the nozzle for molten metal having a light-shielding property and the light emitting inhibitory and having at one end a nozzle the molten metal is extracted in the production apparatus of the thin plate due to out Note rapidly cooled on the surface, irradiating the Yukimitsu Taira flux having a width larger than that of the gap is a gap between the outer peripheral surface of the said nozzle roll to include the gap irradiating means, a length measuring means for measuring the size of the gap by receiving a detection element was irradiated light from the disposed opposite to the irradiating means across the gap the irradiation unit, the measuring A filter processing unit that removes high-frequency output from the means and outputs the data, a data processing unit that outputs a moving average of the output from the filter processing unit that is output over time, and a data And compared with the target value set in advance with the output from the processing unit and a control means having a feedback processing section for creating a feedback command value for controlling constant the size of said gap, said control means, said The size of the gap is controlled based on the feedback command value after the number of rotations of the roll reaches a predetermined number of rotations .
[0007]
DETAILED DESCRIPTION OF THE INVENTION
As a first embodiment, a case where a metal ribbon is manufactured by a one-roll method will be described.
Although the apparatus configuration is shown in FIG. 1, the heat-resistant container 1 capable of holding and pouring the roll 5 and the molten metal is a known arrangement. The collimator 2 and the line sensor camera 6 via the special telephoto lens are installed almost horizontally so as to face each other with the heat-resistant container 1 sandwiched in the circumferential tangent direction of the roll 5. The collimator 2 has a special lens group, and the light from the halogen-based light source introduced by the optical fiber is converted into a parallel light beam 7 having excellent directivity in the gap between the nozzle 4 at the tip of the heat-resistant container 1 and the roll surface. Irradiation toward a gap 3 is received by the line sensor camera 6.
The collimated light beam 7 of the collimator 2 can irradiate an area having a diameter of several tens of millimeters. However, the line sensor camera 6 measures a range of several millimeters at a measurement position by forming an image on an internal line sensor using a special telephoto lens. . The input of the light receiving element is converted into a voltage and output in analog form, and the sampling speed is about several hundreds per second at the maximum.
[0008]
The heat-resistant container 1 is manufactured with a material in which at least the nozzle 4 which is a molten metal pouring portion at the tip has a light shielding property such as silicon nitride and suppresses light emission. Thereby, the light received by the line sensor camera 6 is only the light that has passed through the gap 3 among the parallel light beams 7 irradiated so as to strike both the nozzle 4 and the roll 5 within a range of several mm in the vertical direction. .
The heat-resistant container 1 is attached to a movable body whose position can be controlled by a servo drive means 8 such as a pulse motor or a servo motor, and the position of the surface of the nozzle 4 and the roll 5 can be controlled. That is, the dimension of the gap 3 can be controlled in accordance with a predetermined control command.
[0009]
The servo control unit 9 includes an A / D conversion unit, a filter processing unit 10, a data processing unit 11, and a feedback processing unit 12 for an input from the line sensor camera 6. The A / D converter digitizes the analog input from the line sensor camera 6 and outputs it. The filter processing unit 10 is a filter that removes noise, and in particular removes high-frequency components of the input signal. The data processing unit 11 averages the output signal from the filter processing unit 10 at a predetermined sampling period. The feedback processing unit 12 compares the signal that has passed through the data processing unit 11 with the target gap value to create a feedback command value and outputs it to the servo drive unit 8. Further, the signal passing through the data processing unit 11 can be taken out as a monitor signal.
[0010]
Next, the operation will be described.
First, a predetermined amount of the mother alloy 13 is put into the heat-resistant container 1 and heated by the heating means 14 arranged around the heat-resistant container 1. From the time when the mother alloy 13 starts to melt, the inside of the heat-resistant container 1 is controlled to be depressurized so that the molten metal does not drop by gravity from the opening of the nozzle 4 (depressurization control means is not shown). At this time, the heat-resistant container 1 is the position when the metal ribbon is actually manufactured with respect to the roll 5, and only the gap dimension is slightly larger than the set gap dimension when manufacturing, that is, the nozzle 4 even if the heat-resistant container 1 expands. The tip of is not allowed to hit the surface of the roll 5. In this state, the collimator 2 irradiates the parallel light beam 7, and the light passing through the gap 3 is received by the line sensor camera 6, and measurement of the gap dimension is started. As shown in FIG. 2, the parallel light beam 7 is irradiated so as to hit the tip of the nozzle 4 and the surface of the roll 5 as described above at a position not shielded by the molten metal or the metal ribbon formed when the metal ribbon is manufactured.
[0011]
The roll 5 is rotated in the direction of arrow A, for example, from the time when the mother alloy 13 is completely dissolved. When the rotation of the roll reaches the set rotation speed for producing the metal ribbon and the master alloy 13 is prepared in the heat-resistant container 1 as a molten metal, the movement of the heat-resistant container 1 is controlled so as to approach the roll surface. During this time, as described above, the gap dimension is measured, and the movement is stopped when the predetermined gap value is reached.
In this movement control, feedback control may be performed from the beginning based on the gap target value and the measured value, but the movement is performed at a constant speed to a predetermined position near the gap target value, and then feedback control is performed. May be. Alternatively, the servo driving means 8 may be driven by manually operating means (not shown) provided separately while monitoring the gap dimension value.
[0012]
By the way, when the heat-resistant container 1 is heated and the nozzle 4 is also heated by the molten metal inside, the air density in the vicinity of the gap 3 becomes non-uniform. As a result, so-called air fluctuations occur, the light traveling through the gap 3 is prevented from going straight, and the detection values of the line sensors vary. However, when the roll 5 is rotated, air is dragged and flows to the roll surface, so that this fluctuation can be suppressed.
The filter processing unit 10 removes noise generated from other peripheral devices and carried on the line sensor output signal. For example, a low-pass filter of about several Mhz is effective against power noise for the high-frequency coil 14 used for melting the mother alloy 13 placed in the heat-resistant container 1. Further, the data processing unit 11 averages fluctuations in the amount of light passing through the gap due to rotational blur due to the eccentricity of the roll 5, minute vibrations of the heat-resistant container 1, and the like, and takes it out as a stable gap measurement value.
By these means, it is possible to stabilize the output from the line sensor camera 6 and to obtain a highly accurate and highly reliable measurement value. Thereby, the gap 3 immediately before pouring the molten metal can be positioned at a predetermined target dimension without being affected by the thermal expansion of the heat-resistant container 1 due to heating.
[0013]
Thereafter, the metal ribbon is continuously produced by pouring the molten metal onto the outer periphery of the rotating roll. If the roll rotates in the arrow A direction, the metal ribbon jumps out in the arrow B direction according to the roll rotation direction. As the molten metal is poured out, the weight of the heat-resistant container decreases, so that the elastic deflection of the member holding the heat-resistant container is restored. Further, since the heat capacity also decreases, the heat-resistant container 1 contracts and the gap 3 widens due to the temperature decrease. On the other hand, although the roll side is cooling the inside, the outer peripheral portion becomes high temperature and thermally expands, and the gap 3 goes in the direction of narrowing.
These displacements are directly converted into digital data at a very short sampling interval, filtered, averaged, and compared with a target value at a predetermined interval, for example, by PID control. The gap can be maintained at almost the target value over a period of time.
[0014]
As described above, the case where the heat-resistant container 1 is set at the position where the metal ribbon is actually manufactured with respect to the roll 5 from when the mother alloy 13 is melted and the gap is measured has been described. However, if the molten metal leaks from the opening of the nozzle 4, the roll is damaged. In order to avoid such a situation, the heat-resistant container 1 can be placed at a position retracted from the roll 5 until the melting of the mother alloy 13 is completed.
In this case, the collimator 2 and the line sensor camera 6 are provided in the moving part of the heat-resistant container 1, and when the heat-resistant container 1 is positioned on the roll 5 when the metal ribbon is manufactured, the collimator 2, the line sensor camera 6, The mutual positional relationship between the heat-resistant container 1 and the roll 5 is set to be the same as described above.
When the heat-resistant container 1 is in a position retracted from the roll 5, the parallel light beam 7 irradiated from the collimator 2 hits only the nozzle 4, and the line sensor camera 6 can measure the edge position of the nozzle 4. By monitoring this edge position measurement value, it is possible to know the tip position fluctuation of the nozzle 4 and to prevent interference when the heat-resistant container 1 is moved onto the roll 5.
[0015]
Next, as a second embodiment, a case where the sheet thickness is regulated by rolling with a roll will be described.
In this case, it is necessary to control the gap dimension between the rolls, and the gap dimension is also measured. At this time, the line sensor camera 6 can measure the gap between rolls by irradiating the gap between rolls with a parallel light beam from the collimator 2. That is, the basic configuration and operation are the same except that the nozzle 4 is replaced with another roll in the first embodiment.
Moreover, about the comparatively thick thing of several hundred micrometers or more, the board thickness actually formed can also be measured instead of a gap dimension, and a gap dimension can also be controlled using this measured value. In this case, the collimator 2 and the line sensor camera 6 may be disposed so as to irradiate the horizontal light flux 7 in a range wider than the plate thickness in parallel with the plate thickness direction. The light detected by the line sensor camera 6 is light that is not blocked by the plate, but the plate thickness can be measured conversely. The data used for the gap dimension control in this case is the measured plate thickness and the preset target plate thickness, but the basic idea is the same as in the first embodiment.
[0016]
【Example】
Hereinafter, examples in which metal ribbons were actually manufactured by the one-roll method using the present invention will be described.
Finemet (Hitachi Metals registered trademark) of nanocrystalline soft magnetic material was manufactured as a metal ribbon. The metal ribbon was designed to have a width of 50 mm and a thickness of 20 μm, and the target thickness variation was within 2 μm.
The heat-resistant container 1 was preset so that the gap 3 was about 1 mm at a predetermined position for manufacturing a metal ribbon just above the outer periphery of the roll 5, and the master alloy 13 was heated and melted by the high-frequency coil 14. The gap dimension was measured using the collimator 2 and the line sensor camera 6 from the start of dissolution.
The collimator 2 used irradiates an area with a diameter of 40 mm with a parallel light beam 7. The line sensor camera 6 has a resolution of about 1 μm so that a 5 mm vertical range at the measurement position is imaged on a 5000 photodiode photodiode array of the internal line sensor by a special telephoto lens. The inputs of 5000 light receiving elements were sampled every 5 ms, converted to a voltage of 0 to 10 V, and output as analog.
[0017]
The heat-resistant container 1 was heated and pressure control was started, and the inside was set to a preset reduced pressure state so that the molten metal was not dripped from the opening of the nozzle 3. When the mother alloy 13 was almost melted, the rotation of the roll 5 was started. The roll 5 has a rotational speed set so that the outer peripheral peripheral speed is 30 m / s, and it is confirmed that the rotational speed has reached a predetermined rotational speed with a separately provided rotational speed meter, and the mother alloy 13 is completely dissolved. After confirming this, gap control was started.
[0018]
The gap 3 was preset to about 1 mm when cold, but the dimensional change during this time was measured, and it was confirmed that the gap was narrowed to about 700 μm at this time.
In the gap control, the difference between the preset gap target value and the measured value is PI-processed and output to the servo motor 8 as a control output. Analog measurement values from the line sensor camera 6 were converted into digital data every 5 ms and input to the filter processing unit 10. In the filter processing unit 10, low-pass filter processing of 5 Mhz was performed by software processing. In the average value processing unit, moving average processing of 30 data was performed. When the gap dimension reached the target value, the inside of the heat-resistant container 1 was pressurized and the molten metal was poured out from the nozzle.
An example of the measurement result of the gap dimension during this period is shown in FIG. 3, and the variation was within 10 μm.
[0019]
【The invention's effect】
As described above, the present invention has the following effects.
1) Since a parallel light beam is irradiated to a gap formed of a material having light shielding properties and light emission suppression properties, and only light passing through the gap is detected by a light receiving element, the gap size can be directly measured.
2) Gap size control is performed by detecting the light passing through the gap while rotating the roll and suppressing air fluctuations in the gap, so that a measurement value having no abnormal value can be obtained even when the temperature around the gap becomes high. Can do.
3) Since the detection output of the light receiving element is filtered and averaged, the noise component of the gap dimension can be removed, and a highly reliable measurement value can be obtained.
4) Because the gap dimensions are detected directly, the gap dimensions can be accurately measured regardless of the displacement of each nozzle or roll, such as expansion or contraction of the heat-resistant container due to heating or pouring of molten metal, or expansion of the roll surface. The gap dimension can be controlled to be a predetermined target value.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration of the present invention. FIG. 2 is a diagram showing a relationship between a parallel light beam to be irradiated, a nozzle and a roll. FIG. 3 is a diagram showing an example of a gap dimension measurement result.
DESCRIPTION OF SYMBOLS 1 ... Heat-resistant container 2 ... Collimator 3 ... Gap 4 ... Nozzle 5 ... Roll,
6 ... Line sensor camera 7 ... Parallel beam 8 ... Servo drive means 9 ... Servo control means 10 ... Filter processing section 11 ... Data processing section 12 ... Feedback processing section 13 ... Mother alloy A ... Roll rotation direction B ... Metal ribbon pop-out direction

Claims (2)

Molten metal is irradiated with a parallel beam with a rapid cooling to the clearance gap in formic cap width or wider an outer peripheral surface and the nozzle tip the molten metal to dispense a roll, and detect light passing through the gap, A method of manufacturing a thin plate that performs noise removal processing on detected data, performs data averaging processing, measures gap size, and performs gap size control based on the data averaged processing data ,
A data averaging process of calculating a moving average for the data output as time elapses , and measuring the gap size while rotating the roll and suppressing air fluctuation generated in the gap by the nozzle that has become hot The gap dimension control is performed after the peripheral speed of the outer peripheral surface of the roll reaches the speed of the roll. It has a heat-resistant container that melts the metal having light-shielding properties and light-emission suppressing properties at one end and a nozzle from which the molten metal is extracted, and the molten metal extracted from the nozzle is poured onto the outer peripheral surface of the rotating roll In thin plate manufacturing equipment by rapid cooling,
Irradiating means for irradiating a Yukimitsu Taira bundle with a gap a is wider than the width of the gap between the outer peripheral surface of the said nozzle roll to include the gap,
A length measuring means for measuring the size of the gap by receiving a detection element was irradiated light from the disposed opposite to the irradiating means across the gap the irradiation unit,
And filtering unit for outputting to remove high frequency output from the measuring means, and a data processing unit and outputting the moving average output from the filter processing unit output with time, the output from the data processing unit And a control means having a feedback processing unit for creating a feedback command value for controlling the gap size to be constant by comparing a preset target value with
The said control means controls the dimension of the said gap based on the said feedback command value after the rotation speed of the said roll reaches predetermined rotation speed, The manufacturing apparatus of the thin board characterized by the above-mentioned .

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