JP3634241B2 - Heat exchanger - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat exchanger for heating or cooling a fluid such as a solution flowing inside.
[0002]
[Prior art]
Conventionally, as a heat exchanger for exchanging heat between a cooler or heater attached to an outer surface portion and a fluid circulated inside, it has already been disclosed in Japanese Patent Laid-Open No. 9-196589 proposed by the present applicant. Heat exchangers are known.
[0003]
The heat exchanger disclosed in this publication forms a passage that communicates between the heat exchange flow paths by notching a side that contacts the heat transfer substrate of the partition plate, and has a small hole on the side that contacts the side wall body of the partition plate. Alternatively, a sub-passage composed of small cutouts is formed, thereby providing the advantages of good heat exchange efficiency and control responsiveness, simple structure, and less accumulation of impurities.
[0004]
[Problems to be solved by the invention]
By the way, the conventional heat exchanger mentioned above forms the circulation space provided in a circle | round | yen from the request | requirement of workability, and provides the partition plate in this circulation space, and forms the zigzag flow path.
[0005]
For this reason, in order to increase the heat exchange capacity, it is necessary to increase the diameter of the circulation space, and when installing in a relatively narrow space, it becomes difficult to ensure the necessary heat exchange capacity, etc. In addition to difficulties in flexibility, versatility, and developability with respect to installation conditions, on the other hand, in order to secure the necessary heat exchange capacity, the size and shape will be determined according to this heat exchange capacity, so install There were still issues to be improved such as increased costs and increased size, such as forced design changes and increased installation space.
[0006]
The present invention solves such problems existing in the prior art, and provides a heat exchanger that is excellent in flexibility, versatility, and developability with respect to installation conditions, and that can contribute to cost reduction and miniaturization. Objective.
[0007]
[Means for Solving the Problems and Embodiments]
When the heat exchanger 1 that performs heat exchange between the cooler or the heater attached to the outer surface portions 2p and 2q and the fluid F circulated therein is provided, the present invention includes a plurality of independent blocks inside the main body block 2. The distribution spaces 3a (3b) and 3u are arranged in a row, and the forward path formation hole 4i and the return path formation hole 4o penetrating from the circulation space 3a located at one end to the circulation space 3u located at the other end are different from each other. The reciprocating path partition plate 15 is disposed in the other distribution space (shared distribution space) 3a (3b) excluding the distribution space (return distribution space) 3u located at the other end, and the return path space 3ai (3bi) and the return path Partitioned into a space 3ao (3bo) and provided with one or more flow path forming plates 16 in the forward path space 3ai (3bi) and the return path space 3ao (3bo) to form zigzag flow paths Ri and Ro, respectively. Do Both Ichimata to fold circulation space 3u is characterized by comprising forming a zigzag passage Ru leading to return-formed holes 4o from disposed two or more flow path forming plate 17 ... are forward-formed hole 4i.
[0008]
In this case, according to a preferred embodiment, the body block 2 sandwiches the inner plate 12 from both sides, and the inner plate 12 in which a plurality of openings 11a, 11u constituting the circulation spaces 3a (3b), 3u are sequentially formed. A pair of outer plates 13 and 14 can be provided. The forward path forming hole 4i and the return path forming hole 4o can be provided on both sides in the direction perpendicular to the arrangement direction of the flow spaces 3a (3b) and 3u. In addition, the electronic module 18 ... can be used for a cooler or a heater.
[0009]
Thereby, according to the heat exchanger 1 which concerns on this invention, while using the distribution | circulation space which agree | coincides structurally with the conventional heat exchanger comprised independently, as the return | circulation circulation space 3u where the distribution | circulation of the fluid F reverses, One or two or more arbitrarily selected shared distribution spaces 3a (3b)... Are arranged with respect to the return distribution space 3u, and each of the shared distribution spaces 3a (3b). Since the space 3ao... Is provided, for example, even when the width of the installation space is limited, the heat exchange capability can be increased without changing the design of the part to be installed. In addition, the manufacturability (mass productivity) and workability of the heat exchanger 1 at this time are ensured in the same manner as a conventional heat exchanger configured independently.
[0010]
【Example】
Next, preferred embodiments according to the present invention will be given and described in detail with reference to the drawings.
[0011]
First, the structure of the heat exchanger 1 which concerns on a present Example is demonstrated with reference to FIGS. 1-4.
[0012]
The heat exchanger 1 includes a main body block 2, and the main body block 2 includes an inner plate 12 having a certain thickness formed in a rectangular shape and a pair of sandwiching the inner plate 12 from both sides as shown in FIG. The outer plates 13 and 14 are used. The inner plate 12 and the outer plates 13 and 14 can be formed using a material having good thermal conductivity, such as aluminum, and can be coated with a fluororesin as necessary to be provided with a chemical resistant film.
[0013]
The inner plate 12 is formed with two independent openings 11a and 11u that constitute a shared distribution space (distribution space) 3a and a return distribution space (distribution space) 3b. The openings 11 a and 11 u are formed in a circular shape and penetrate the front and back surfaces of the inner plate 12. Further, the inner plate 12 has a forward passage forming hole 4i and a backward passage forming hole 4o penetrating from the shared circulation space 3a located at one end to the circulation space 3u located at the other end from the outside, respectively. As shown in FIG. 2, it is provided on both sides in the direction perpendicular to the arrangement direction of the shared distribution space 3a and the return distribution space 3u. In this case, the forward path forming hole 4i and the backward path forming hole 4o can be easily provided by drilling with a relatively long drill.
[0014]
On the other hand, a reciprocating path partition plate 15 and a flow path forming plate 16 are provided inside the shared distribution space 3a. Both the reciprocating path partition plate 15 and the flow path forming plate 16 have a length substantially equal to the diameter of the shared circulation space 3 a and a height equal to the thickness of the inner plate 12. The reciprocating path partition plate 15 and the flow path forming plate 16 can be assembled in a cross shape by inserting assembly slits formed at the center. The reciprocating path partition plate 15 is formed in a strip shape as a whole and, when assembled inside the shared distribution space 3a, divides the shared distribution space 3a into two, thereby forming the forward path space 3ai and the return path space 3ao. Further, the flow path forming plate 16 forms zigzag flow paths Ri and Ro in the forward path space 3ai and the return path space 3ao, respectively, when assembled in the shared distribution space 3a. As shown in FIG. 2, the paths of the zigzag flow paths Ri and Ro depend on the positions of the notches 21ai..., 21ao... Provided on the long side of the flow path forming plate 16, and the forward path forming holes 4i and the return path forming holes 4o. It is determined. In addition, 22 ... is a small notch part for preventing the stagnation formed in the short side of the reciprocating path partition plate 15 and the flow path forming plate 16.
[0015]
On the other hand, two flow path forming plates 17 are provided in the folded circulation space 3u. The length of the flow path forming plate 17 is shorter than the diameter of the folded circulation space 3u, and the height matches the thickness of the inner plate 12. Each flow path forming plate 17 is inclined at a predetermined angle with respect to the forward path forming hole 4i (return path forming hole 4o) as shown in FIG. By arranging them in parallel, the folded circulation space 3u is divided into three to form the zigzag channel Ru. As shown in FIG. 2, the path of the zigzag channel Ru is determined by the positions of the notches 23u... Provided in the long side part, the forward path forming hole 4i, and the return path forming hole 4o. In addition, 24 ... is a small notch part for preventing the stagnation formed in the short side of the flow-path formation board 17 ....
[0016]
Therefore, when assembling, the inner plate 12 is overlapped on one outer plate 13, and the reciprocating path partition plate 15 and the flow path forming plate 16 assembled in a cross are assembled inside the shared circulation space 3a. The flow path forming plates 17 are assembled in the folded circulation space 3u. In this case, the reciprocating path partition plate 15 is arranged in parallel with the forward path forming hole 4i (return path forming hole 4o), and the flow path forming plates 17 are arranged with respect to the forward path forming hole 4i (return path forming hole 4o). Inclined by a predetermined angle and arranged parallel to each other. The reciprocating path partition plate 15 and the flow path forming plates 16, 17... Can be fixed, for example, by engaging both ends with recesses or the like provided on the inner peripheral surfaces of the circulation spaces 3 a, 3 u.
[0017]
Furthermore, if the other outer plate 14 is stacked on the inner plate 12 and tightened with bolts and nuts (not shown) penetrating from the outer plate 14 to the outer plate 13, the main body block 2 can be obtained. In FIG. 1, reference numerals 25... Denote a plurality of bolt through holes provided around the shared distribution space 3a and the return distribution space 3u. Then, a pipe-shaped inlet (inflow pipe) 26 is press-fitted into and fixed to the forward path forming hole 4 i that opens to the outside of the main body block 2, and a pipe-shaped outlet ( If the outflow pipe 27 is press-fitted and fixed, the assembly of the heat exchanger 1 is completed.
[0018]
Further, as shown in FIG. 5, the cooling surfaces 18c of the electronic modules 18 (cooling unit or heating unit) using Peltier elements are not shown on the outer surface parts 2p and 2q which are the upper and lower surfaces of the main body block 2, respectively. The cooling device M (FIG. 5) can be obtained by attaching the water-cooled coolers 31 and 32 to the heat radiating surface 18h... Opposite to the cooling surface 18c.
[0019]
Next, the usage method of the heat exchanger 1 which concerns on a present Example is demonstrated with reference to each figure.
[0020]
The heat exchanger 1 (cooling device M) according to the present embodiment can be used, for example, as a cooling device for a cooling solution (fluid) F that cools a processed portion of an etcher in a semiconductor manufacturing apparatus. If the return cooling solution F is caused to flow, the cooling solution F first flows into the forward path space 3ai, flows through the zigzag flow path Ri shown in FIG. 2, and then passes through the forward path forming hole 4i to return the space 3u. Flow into. And in the return | circulation return space 3u, after flowing through the zigzag flow path Ru, it flows in into the return path space 3ao via the return path formation hole 4o. Furthermore, in the return path space 3ao, after flowing through the zigzag channel Ro, it flows out from the outlet 26. At this time, since the outer plates 13 and 14 are cooled by the cooling surfaces 18c of the electronic modules 18..., The returned cooling solution F is efficiently cooled (heat exchange).
[0021]
Thus, according to the heat exchanger 1 which concerns on a present Example, it uses as the return | circulation circulation space 3u in which the distribution | circulation of the fluid F inverts the distribution | circulation space which agree | coincides structurally with the conventional heat exchanger comprised independently. In addition, since the shared distribution space 3a is provided side by side with respect to the return distribution space 3u, and the forward path space 3ai and the return path space 3ao are provided in the shared distribution space 3a, for example, the width of the installation space is limited. Even if it is a case, heat exchange capability can be improved, without performing the design change etc. of the site | part to install. In addition, the manufacturability (mass productivity) and workability of the heat exchanger 1 at this time are ensured in the same manner as a conventional heat exchanger configured independently. In addition, the basic effects of heat exchange efficiency and control responsiveness, a simple structure, and less accumulation of impurities can be enjoyed.
[0022]
The embodiment has been described in detail above, but the present invention is not limited to such an embodiment, and the detailed configuration, shape, quantity, material, and the like can be arbitrarily set within the scope of the present invention. Can be changed, added or deleted.
[0023]
In particular, the embodiment has shown the case where one shared distribution space 3a is provided, but the embodiment can be carried out with two or more arbitrary quantities. FIG. 6 shows a modified embodiment in which two shared distribution spaces 3a and 3b are provided. When a plurality of shared distribution spaces 3a are provided, the shared distribution spaces 3a may be sequentially arranged as shown in FIG. 6 according to the quantity, and each shared distribution space 3a is shown in FIGS. It can be configured similarly to the shared distribution space 3a. Further, in the modified embodiment, three flow passage forming plates 16 are provided in each of the shared flow spaces 3a and 3b, and three flow passage forming plates 17 are provided in the folded flow space 3u, and the flow passage forming plate 17 is provided. The case where the angle of... Is performed at an angle different from the example shown in FIG. In this way, the number and angle of each flow path forming plate 16..., 17. In FIG. 6, 3bi indicates a forward path space, and 3bo indicates a return path space. In FIG. 6, the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and the configuration is clarified.
[0024]
Further, the main body block 2 has been shown to be configured by the inner plate 12 and the pair of outer plates 13 and 14 sandwiching the inner plate 12 from both sides. However, the inner plate 12 and the outer plate 13 are integrally formed, that is, fixed. Alternatively, a bottomed hole corresponding to each distribution space 3a may be formed on the upper surface of the plate member having a thickness of 5 mm.
[0025]
【The invention's effect】
Thus, the heat exchanger according to the present invention is provided with a plurality of independent circulation spaces arranged inside the main body block, and penetrates from the circulation space located at one end to the circulation space located at the other end from the outside. The forward path forming hole and the backward path forming hole are provided at different positions, and a reciprocating path partition plate is disposed in another shared flow space excluding the return flow space located at the other end to partition the forward path space and the return path space. One or more flow path forming plates are arranged inside the space and the return space to form zigzag flow paths, respectively, and one or more flow path forming plates are arranged in the return flow space to form the forward path. Since the zigzag flow path extending from the hole to the return path forming hole is formed, the following remarkable effects can be obtained.
[0026]
(1) Even when installed in a relatively narrow space, it becomes easy to ensure the necessary heat exchange capacity, and it excels in flexibility, versatility and expansibility with respect to installation conditions.
[0027]
(2) Since the heat exchange capability can be increased without being forced to change the design of the part to be installed or to enlarge the installation space, it can contribute to cost reduction and downsizing.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a main part of a heat exchanger according to a preferred embodiment of the present invention,
FIG. 2 is a partially broken plan view clearly showing an inner plate in the heat exchanger,
FIG. 3 is a sectional side view in which the internal structure of the heat exchanger is partially omitted;
FIG. 4 is a cross-sectional view taken along line AA in FIG. 2 in the heat exchanger;
FIG. 5 is a side view of a cooling device using the same heat exchanger;
FIG. 6 is a schematic plan view of a heat exchanger according to a modified embodiment of the present invention,
[Explanation of symbols]
1 heat exchanger 2p outer surface portion 2q outer surface portion 3a distribution space (shared distribution space)
3b Distribution space (shared distribution space)
3u distribution space (return distribution space)
3ai forward path space 3ao return path space 3bi forward path space 3bo return path space 4i forward path formation hole 4o return path formation hole 11a opening hole 11u opening hole 12 inner plate 13 outer plate 14 outer plate 15 reciprocating path partition plate 16 ... flow path forming plate 17 ... flow path Forming plate 18 ... Electronic module F Fluid (cooling solution)
Ri Zigzag channel Ro Zigzag channel Ru Zigzag channel

Claims (4)

In the heat exchanger for exchanging heat between the cooler or heater attached to the outer surface and the fluid circulated inside, a plurality of independent circulation spaces are arranged inside the main body block, and one end from the outside. The other passage space (excluding the circulation space located at the other end (return circulation space)) is provided at different positions, respectively, the forward passage formation hole and the return passage formation hole penetrating from the circulation space located at the other end to the circulation space located at the other end. A reciprocating path partition plate is provided in the common distribution space) to partition the forward path space and the return path space, and one or two or more flow path forming plates are provided inside the forward path space and the return path space, respectively, and each zigzag flow And a zigzag flow path from the forward path formation hole to the return path formation hole by forming one or more flow path forming plates in the folded flow space. Exchanger. 2. The heat exchanger according to claim 1, wherein the main body block includes an inner plate in which a plurality of openings forming the circulation space are sequentially formed, and a pair of outer plates sandwiching the inner plate from both sides. The heat exchanger according to claim 1, wherein the forward path forming hole and the return path forming hole are provided on both sides in a direction perpendicular to the arrangement direction of the circulation space. The heat exchanger according to claim 1, wherein the cooler or the heater is an electronic module.

Images