JP2002005590A - Heat exchanger - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a heat exchanger which enhances flexibility of installation conditions, versatility and developability while contributing to reduction in cost and size. SOLUTION: A plurality of distribution spaces 3a, 3u are arranged independently in a body block 2, a supply passage forming hole 4i and a return passage forming hole 4o are made to extend externally from the distribution space 3a located at one end to the distribution space 3u located at the other end at different positions, and distribution spaces (shared distribution space) 3a other than the distribution space (turn back distribution space) 3u located at the other end are partitioned into a supply passage space 3ai and a return passage space 3ao thus forming zigzag channels Ri, Ro in the relevant supply passage space 3ai and return passage space 3ao and a zigzag channel Ru extending from the supply passage forming hole 4i to the return passage forming hole 4o in the turn back distribution space 3u.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat exchanger for heating or cooling a fluid such as a solution flowing therein.

[0002]

2. Description of the Related Art Heretofore, as a heat exchanger for exchanging heat between a cooler or a heater attached to an outer surface and a fluid circulated therein, a heat exchanger already proposed by the present applicant has been disclosed in Japanese Patent Application Laid-Open No. 9-1965.
A heat exchanger disclosed in Japanese Patent Publication No. 89 is known.

In the heat exchanger disclosed in the publication, a side of the partition plate that is in contact with the heat transfer board is cut out to form a passage communicating between the heat exchange flow paths, and a side of the partition plate that is in contact with the side wall body. A sub-passage formed of a small hole or a small cutout is formed, thereby obtaining advantages that heat exchange efficiency and control response are good, the structure is simple, and impurities hardly accumulate.

[0004]

In the above-mentioned conventional heat exchanger, the circulation space provided inside is formed in a circular shape in view of the requirement of workability, and a partition plate is provided in the circulation space to form a zigzag flow path. Has formed.

Therefore, in order to increase the heat exchange capacity,
It is necessary to increase the diameter of the distribution space, and when installing in a relatively narrow space, it is difficult to secure the necessary heat exchange capacity.
Although it is difficult to be general-purpose and developable, on the other hand, in order to secure the necessary heat exchange capacity, the size and shape are determined according to this heat exchange capacity, so the design change of the installation site and the installation space There was also a problem to be solved, such as an increase in costs and an increase in cost and size.

The present invention has been made to solve the problems existing in the prior art, and is excellent in flexibility in installation conditions, versatility and developability, and can contribute to cost reduction and miniaturization. The purpose is to provide.

[0007]

According to the present invention, a heat exchanger 1 for exchanging heat between a cooler or a heater attached to outer surface portions 2p and 2q and a fluid F circulated therein is provided. In doing so, a plurality of independent circulation spaces 3a (3b) and 3u are provided in the main body block 2 in an arrayed manner and penetrate from the outside to the circulation space 3u located at one end to the circulation space 3u located at the other end. The forward path forming holes 4i and the return path forming holes 4o are provided at different positions, respectively, and the other flow spaces (shared flow spaces) 3a (3b) except the flow space (return flow space) 3u located at the other end are moved to the forward flow space 3ai (3).
bi) and the return path space 3ao (3bo), the forward path space 3ai (3bi) and the return path space 3ao
(3bo), zigzag flow paths Ri, Ro are respectively formed in the inside, and the outward flow forming holes 4 are formed in the return flow space 3u.
A zigzag flow path Ru from i to the return path forming hole 4o is formed.

In this case, according to a preferred embodiment, the main body block 2 includes an inner plate 12 in which a plurality of openings 11a and 11u forming the flow spaces 3a (3b) and 3u are sequentially formed. It can be configured to include a pair of outer plates 13 and 14 sandwiched from both sides. Further, the outward path forming hole 4i and the return path forming hole 4o are formed in the flow space 3a.
(3b) It can be provided on both sides in a direction perpendicular to the arrangement direction of 3u. Furthermore, the shared distribution space 3a
In (3b), a reciprocating path partition plate 15 is provided so that
ai and return space 3ao,
One or two or more flow path forming plates 16 are provided in the outward space 3ai and the return space 3ao, respectively, to form zigzag flow paths Ri, R.
o can be formed. Also, one or two or more flow path forming plates 17 are disposed in the folded flow space 3u, and the zigzag flow path Ru from the outward path forming hole 4i to the return path forming hole 4o is provided.
Can be formed. The electronic modules 18 can be used for the cooler or the heater.

Thus, according to the heat exchanger 1 of the present invention, the circulation space which is identical in construction with the conventional heat exchanger which is constituted alone is replaced with the folded circulation space 3 where the circulation of the fluid F is reversed.
u, and one or two or more arbitrarily selected numbers of shared distribution spaces 3
a (3b)... and each shared distribution space 3a (3
b), the forward space 3ai and the return space 3ao are provided in the interior space. For example, even when the width of the installation space is limited, without changing the design of the installation site, etc. Heat exchange capacity can be increased. In addition, the manufacturability (mass productivity) and workability of the heat exchanger 1 at this time are ensured in the same manner as the conventional heat exchanger configured alone.

[0010]

Next, preferred embodiments according to the present invention will be described in detail with reference to the drawings.

First, the configuration of the heat exchanger 1 according to the present embodiment will be described with reference to FIGS.

As shown in FIG. 3, the heat exchanger 1 includes a main body block 2, and the main body block 2 has an inner plate 12 formed in a rectangular shape and having a certain thickness, and the inner plate 12 It is constituted by a pair of outer plates 13 and 14 to be sandwiched. The inner plate 12 and the outer plates 13 and 14 can be formed using a material having good thermal conductivity, for example, aluminum or the like, and can be coated with a fluororesin as needed to provide a chemical resistant film.

The inner plate 12 has a shared distribution space (distribution space) 3a and a folded distribution space (distribution space) 3a.
The two independent openings 11a and 11u constituting the b are formed side by side. The openings 11 a and 11 u are formed in a circular shape and penetrate through the front and back surfaces of the inner plate 12. Further, in the inner plate 12, a forward path forming hole 4i and a return path forming hole 4o penetrating from the outside to the common flow space 3a located at one end to the flow space 3u located at the other end are respectively provided at different positions, specifically, as shown in FIG. As shown in FIG. 2, they are provided on both sides in a direction perpendicular to the arrangement direction of the shared circulation space 3a and the folded circulation space 3u. In this case, the forward path forming hole 4i and the return path forming hole 4o
Can be easily provided by drilling with a relatively long drill.

On the other hand, a reciprocating path partition plate 15 and a flow path forming plate 16 are provided inside the shared circulation space 3a. The length of the reciprocating path partition plate 15 and the flow path forming plate 16 both substantially match the diameter of the shared circulation space 3a, and the height of the inner plate 1
2 corresponds to the thickness. Reciprocating path partition plate 15 and flow path forming plate 1
6 can be assembled in a cross by inserting the assembly slits formed in the center. Round-trip divider 15
When the whole is formed in the shape of a strip and assembled inside the common distribution space 3a, the common distribution space 3a is divided into two to form the outward path space 3ai and the return path space 3ao. When assembled inside the shared circulation space 3a, the passage forming plate 16 forms zigzag passages Ri and Ro inside the outward space 3ai and the inside of the return space 3ao, respectively. As shown in FIG. 2, the paths of the zigzag flow channels Ri and Ro are formed by notches 21ai..., 21ao provided on the long sides of the flow channel forming plate 16.
.. And the positions of the forward path forming hole 4i and the return path forming hole 4o. 22 are small notches formed on the short sides of the reciprocating path partition plate 15 and the flow path forming plate 16 for preventing stagnation.

On the other hand, two flow path forming plates 17 are provided inside the folded flow space 3u. The length of the flow path forming plates 17 is shorter than the diameter of the folded flow space 3u, and the height thereof is equal to the thickness of the inner plate 12. Each channel forming plate 17
Are inclined at a predetermined angle with respect to the forward path forming hole 4i (return path forming hole 4o) and are arranged in parallel with each other when assembled inside the folded circulation space 3u, as shown in FIG. The zigzag flow path Ru is formed by dividing the folded flow space 3u into three. The path of the zigzag channel Ru is as shown in FIG.
It is determined by the positions of the cutouts 23u provided on the long sides, the forward path forming holes 4i and the return path forming holes 4o. In addition, 24 ...
Are small notches formed on the short sides of the flow path forming plates 17 to prevent stagnation.

Therefore, when assembling, the inner plate 12 is overlaid on one of the outer plates 13, and the reciprocating path partitioning plate 1 is assembled in the shared circulation space 3a.
5 and the flow path forming plate 16 are assembled, and the flow path forming plates 17 are assembled inside the folded circulation space 3u. In this case, the reciprocating path partition plate 15 is arranged in parallel to the outward path forming hole 4i (return path forming hole 4o), and the flow path forming plate 17
Are inclined at a predetermined angle with respect to the forward path forming hole 4i (return path forming hole 4o) and arranged in parallel with each other. The reciprocating path partition plate 15 and the flow path forming plates 16, 17... Can be fixed by locking both ends to recesses and the like provided on the inner peripheral surfaces of the respective flow spaces 3 a, 3 u.

Further, the other outer plate 14 is superimposed on the inner plate 12 and tightened by bolts and nuts (not shown) penetrating from the outer plate 14 to the outer plate 13, whereby the main body block 2 can be obtained. In FIG. 1, 25 ... indicate a plurality of bolt through-holes provided around the shared circulation space 3a and the folded circulation space 3u. Then, a pipe-shaped inflow port (inflow pipe) 26 is press-fitted and fixed in the outward path forming hole 4i opened to the outside of the main body block 2, and the return path forming hole 4o opened to the outside.
Then, if the pipe-shaped outlet (outflow pipe) 27 is press-fitted and fixed, the assembly of the heat exchanger 1 is completed.

Further, as shown in FIG.
The cooling surfaces 18c of the electronic modules 18 using a Peltier element (cooling unit or heating unit) are attached to the outer surface portions 2p and 2q serving as the upper and lower surfaces with mounting screws (not shown). Heat dissipation surface 1 on the opposite side
If cooling devices 31 and 32 of the water cooling type are attached to 8h, respectively, a cooling device M (FIG. 5) can be obtained.

Next, a method of using the heat exchanger 1 according to this embodiment will be described with reference to the drawings.

The heat exchanger 1 (cooling device M) according to the present embodiment
Can be used, for example, as a cooling device of a cooling solution (fluid) F for cooling a processed portion of an etcher in a semiconductor manufacturing apparatus. F is the first outbound space 3
ai, flows through the zigzag flow path Ri shown in FIG. 2, and then flows into the return flow space 3u via the outward path forming hole 4i. Then, in the folded circulation space 3u, the zigzag channel Ru is formed.
Flows into the return path space 3ao via the return path forming hole 4o. Further, in the return space 3ao, the zigzag flow path R
After flowing through o, it flows out from the outlet 26. At this time, since the outer plates 13 and 14 are cooled by the cooling surfaces 18c of the electronic modules 18, cooling (heat exchange) of the returned cooling solution F is performed efficiently.

As described above, according to the heat exchanger 1 according to the present embodiment, the circulation space which is identical in construction with the conventional heat exchanger which is constituted alone is changed to the folded circulation space 3u where the flow of the fluid F is reversed. And the shared circulation space 3a is provided side by side with respect to the folded circulation space 3u, and the forward circulation space 3ai and the return passage space 3ao are provided in the common circulation space 3a. For example, the width of the installation space is limited. Even when the heat exchange is performed, the heat exchange capacity can be increased without changing the design of the installation site. Moreover,
At this time, the manufacturability (mass productivity) and workability of the heat exchanger 1 are ensured in the same manner as in a conventional heat exchanger configured alone. In addition, the basic operation and effect that the heat exchange efficiency and the control response are good, the structure is simple, and impurities hardly accumulate can be enjoyed.

The embodiment has been described in detail above.
The present invention is not limited to such an embodiment,
The configuration, shape, quantity, material, and the like of the details can be arbitrarily changed, added, or deleted without departing from the gist of the present invention.

Particularly, in the embodiment, one shared distribution space 3a
Is shown, but it can be carried out with two or more arbitrary quantities. FIG. 6 shows a modified embodiment in which two shared distribution spaces 3a and 3b are provided. When a plurality of shared distribution spaces 3a are provided, the shared distribution spaces 3a may be arranged in order as shown in FIG.
... can be configured similarly to the shared distribution space 3a shown in FIGS. Further, the modified embodiment is different from the shared distribution spaces 3a, 3
b is provided with three flow path forming plates 16..., and three flow path forming plates 17 are provided in the folded circulation space 3 u, and the angles of the flow path forming plates 17 are shown in FIG. The case of performing at different angles has been exemplified. In this manner, the number, angle, etc. of the flow path forming plates 16,. In FIG. 6, 3bi indicates a forward space, and 3bo indicates a backward space. In FIG. 6, the same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and the configuration is clarified.

Further, the case where the main body block 2 is constituted by the inner plate 12 and the pair of outer plates 13 and 14 sandwiching the inner plate 12 from both sides has been shown, but the inner plate 12 and the outer plate 13 are integrally formed. That is, a hole with a bottom corresponding to each of the flow spaces 3a may be formed in the upper surface of the plate member having a certain thickness.

[0025]

As described above, the heat exchanger according to the present invention has the following features.
Inside the main body block, a plurality of independent circulation spaces are arranged and provided, and the outward path formation hole and the return path formation hole penetrating from the outside to the circulation space located at one end from the circulation space located at the other end are respectively located at different positions. By providing a zigzag flow path inside the forward space and the return space by partitioning the shared flow space other than the return flow space located at the other end into a forward space and a return space, the return flow space is formed. Since the zigzag flow path from the outward path forming hole to the return path forming hole is formed, the following remarkable effects are obtained.

(1) Even in the case of installation in a relatively narrow space, it is easy to secure the necessary heat exchange capacity, and it is excellent in flexibility for installation conditions, versatility and developability.

(2) The heat exchange capacity can be increased without changing the design of the installation site or enlarging the installation space, thereby contributing to cost reduction and downsizing.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a heat exchanger according to a preferred embodiment of the present invention;

FIG. 2 is a partially broken plan view showing an inner plate in the heat exchanger.

FIG. 3 is a cross-sectional side view in which the internal structure of the heat exchanger is partially omitted;

FIG. 4 is a sectional view of the heat exchanger taken along line AA in FIG. 2;

FIG. 5 is a side view of a cooling device using the heat exchanger,

FIG. 6 is a schematic plan view of a heat exchanger according to a modified embodiment of the present invention,

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heat exchanger 2p Outer surface part 2q Outer surface part 3a Distribution space (shared distribution space) 3b Distribution space (shared distribution space) 3u Distribution space (returned distribution space) 3ai Outgoing space 3ao Incoming space 3bi Outgoing space 3bo Incoming space 4i Outgoing hole 4o Return path forming hole 11a Opening 11u Opening 12 Inner plate 13 Outer plate 14 Outer plate 15 Reciprocating path partition plate 16 ... Flow path forming plate 17 ... Flow path forming plate 18 ... Electronic module F Fluid (cooling solution) Ri zigzag flow path Ro zigzag channel Ru zigzag channel

Continuation of the front page (72) Inventor Shinji Yokoyama 246 Koyuki, Oaza, Suzaka-shi, Nagano F-term in Orion Machinery Co., Ltd. 3L103 AA05 AA37 CC01 DD13

Claims (6)

[Claims] 1. A heat exchanger for exchanging heat between a cooler or a heater attached to an outer surface and a fluid circulated therein, and a plurality of independent circulating spaces are arranged inside a main body block. At the same time, a forward path forming hole and a return path forming hole that penetrate from the outside to the circulation space located at one end to the circulation space located at the other end are provided at different positions, excluding the circulation space (return circulation space) located at the other end. By dividing the other distribution space (shared distribution space) into a forward space and a return space, a zigzag flow path is formed inside each of the forward space and the return space, and in the return circulation space,
A heat exchanger, wherein a zigzag flow path from the outward path forming hole to the return path forming hole is formed. 2. The apparatus according to claim 1, wherein the main body block includes an inner plate having a plurality of openings sequentially forming the circulation space, and a pair of outer plates sandwiching the inner plate from both sides. Heat exchanger. 3. The heat exchanger according to claim 1, wherein the outward path forming hole and the return path forming hole are provided on both sides in a direction perpendicular to the arrangement direction of the flow spaces. 4. A reciprocating path partition plate for partitioning the forward flow space and the return flow space in the shared circulation space, and one or more flow path formations forming a zigzag flow path in the forward flow space and the return flow space, respectively. The heat exchanger according to claim 1, wherein a plate is provided. 5. The method according to claim 1, wherein one or two or more flow path forming plates for forming a zigzag flow path from the outward path forming hole to the return path forming hole are provided in the return flow space. The heat exchanger as described. 6. The heat exchanger according to claim 1, wherein the cooler or the heater is an electronic module.