JP3633323B2 - Ferrule support member and optical element module using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical element module configured by combining an optical fiber that functions as a waveguide and an optical element, and a ferrule support member used in the optical element module.
[0002]
[Prior art]
For example, an optical element module in which an optical element such as a light emitting element or a light receiving element and an optical fiber are combined is widely used in the field of optical information communication. For example, as disclosed in U.S. Pat. No. 4,865,410, such an optical element module includes a housing to which an optical element is fixed, a ferrule (sleeve) to which a tip portion of an optical fiber is inserted and fixed, a ferrule and a housing. It is mainly provided with a ferrule support member (washer) to be connected. In such an optical element module, the housing and the ferrule are fixed by inserting the ferrule into the ferrule insertion hole of the ferrule support member and fixing the ferrule support member to the housing. In such an optical element module, the ferrule support member into which the ferrule is inserted is fixed to the housing, and then the ferrule is moved with the insertion portion to the ferrule support member as a fulcrum, so that the tip position of the optical fiber relative to the optical element can be finely adjusted. Adjustment is performed to increase the optical coupling efficiency between the optical element and the optical fiber.
[0003]
[Problems to be solved by the invention]
However, the optical element module has the following problems. That is, in the above optical element module, after the ferrule support member into which the ferrule is inserted is fixed to the housing, the ferrule is moved with the insertion portion to the ferrule support member as a fulcrum, so that the tip position of the optical fiber relative to the optical element can be finely adjusted. Since the adjustment is performed, the ferrule is bent at the insertion portion to the ferrule support member. As a result, the optical fiber contained in the ferrule is also bent, and the propagation efficiency of light propagating through the optical fiber is lowered.
[0004]
In particular, when a resonator is formed using an optical fiber with a built-in diffraction grating and a light emitting element to configure a light emitting element module, the interval between the diffraction gratings changes, and the output efficiency of the light emitting element module decreases. End up.
[0005]
Accordingly, the present invention solves the above-described problems, and an optical element module capable of finely adjusting the tip position of the optical fiber with respect to the optical element without deteriorating the characteristics of the optical fiber contained in the ferrule, and to this It is an object to provide a ferrule support member to be used.
[0006]
[Means for Solving the Problems]
In order to solve the above-described problems, a ferrule support member of the present invention connects an optical element support member on which an optical element is supported and a ferrule on which an end portion of the optical fiber is inserted and fixed, so that the tip of the optical fiber with respect to the optical element A ferrule support member used for positioning, comprising a substrate portion that has a ferrule insertion hole for inserting a ferrule and is fixed to the optical element support member, At the periphery of the ferrule insertion hole in the substrate part, when positioning, the ferrule is moved with the insertion part to the substrate part as a fulcrum to prevent the ferrule from bending, and the tip of the optical fiber relative to the optical element A thin part is formed to fine-tune the position. It is characterized by that.
[0007]
By forming a thin portion around the ferrule insertion hole, even if the tip of the optical fiber relative to the optical element is finely adjusted by moving the ferrule with the insertion portion to the ferrule support member as a fulcrum, It is possible to prevent the thin-walled portion from being deformed and bending of the ferrule or the optical fiber included in the ferrule.
[0008]
In the ferrule support member of the present invention, the substrate portion has two surfaces facing each other, and the thin portion is formed by providing a groove portion on at least one of the two surfaces facing each other. Good.
[0009]
By forming the thin portion by providing the groove portion, the thin portion can be easily formed.
[0010]
In the ferrule support member of the present invention, the groove portion may be provided at a position corresponding to both of the two surfaces facing each other.
[0011]
By providing the groove portions at corresponding positions on both of the two surfaces facing each other, the thin portion can be easily formed, and the thin portion can be more easily deformed.
[0012]
The ferrule support member of the present invention may further include a cylindrical portion that is fixed to the substrate portion and extends the ferrule insertion hole in the longitudinal direction of the ferrule.
[0013]
By providing the cylindrical portion and extending the ferrule insertion hole, the area of the portion where the inner wall of the ferrule insertion hole and the outer wall of the ferrule overlap is increased, and the ferrule and the ferrule support member are firmly fixed. Further, since the area of the portion where the inner wall of the ferrule insertion hole and the outer wall of the ferrule overlap is increased, the external force applied to the ferrule is dispersed when fine adjustment of the tip position of the optical fiber with respect to the optical element is performed.
[0014]
In order to solve the above problems, an optical element module according to the present invention connects an optical element support member that supports an optical element, a ferrule in which a tip portion of an optical fiber is inserted and fixed, and an optical element support member and a ferrule. And a ferrule support member used for positioning the tip of the optical fiber with respect to the optical element, the ferrule support member having a ferrule insertion hole for inserting the ferrule and the optical element support member A substrate portion fixed to At the periphery of the ferrule insertion hole in the substrate part, when positioning, the ferrule is moved with the insertion part to the substrate part as a fulcrum to prevent the ferrule from bending, and the tip of the optical fiber relative to the optical element A thin part is formed to fine-tune the position. It is characterized by that.
[0015]
When using a ferrule support member with a thin-walled part formed around the ferrule insertion hole, the ferrule is moved around the ferrule support member as a fulcrum to finely adjust the tip position of the optical fiber relative to the optical element Even so, it is possible to prevent the thin-walled portion from being deformed and bending of the ferrule or the optical fiber included in the ferrule.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
An optical element module according to an embodiment of the present invention will be described with reference to the drawings. The optical element module according to the present embodiment is a light emitting element module that includes an optical fiber having a built-in diffraction grating and a light emitting element, and forms a resonator between the light emitting element and the diffraction grating. In addition, the ferrule support member which concerns on embodiment of this invention is contained in the light emitting element module which concerns on this embodiment.
[0017]
First, the configuration of the light emitting element module according to this embodiment will be described. FIG. 1 is a partially cutaway perspective view of a light emitting element module according to this embodiment, and FIG. 2 is a cross-sectional view of the internal structure of the light emitting element module according to this embodiment.
[0018]
The light emitting element module 2 includes a support substrate (optical element support member) 6 on which a semiconductor light emitting element (optical element) 4 is supported, a ferrule 10 on which a tip portion of an optical fiber 8 in which a diffraction grating is built is inserted and fixed, A lower ring (ferrule support member) 12 used for connecting the support substrate 6 and the ferrule 10 and positioning the tip of the optical fiber 8 with respect to the semiconductor light emitting element 4 is provided inside the housing 14. .
[0019]
The housing 14 is formed of Kovar, and is configured by connecting a rectangular parallelepiped body portion 16 and a cylindrical tubular portion 18. The housing 14 is filled with an inert gas (for example, nitrogen gas) in order to prevent deterioration of the semiconductor light emitting element 4 and other components contained therein. In addition, a plurality of external leads 20 are provided on both sides of the main body 16 of the housing 14 for use in supplying drive current to the semiconductor light emitting element 4, taking out a light reception signal of a photodiode described later, and the like.
[0020]
The semiconductor light emitting device 4 included in the housing 14 is configured by sandwiching an active layer made of InGaAsP with a clad layer made of InP, and by supplying a current to the active layer to form an inversion distribution, stimulated emission light is formed. It is a light emitting element which generates. Here, in particular, in the semiconductor light emitting device 4, a low reflection with a reflectivity of about 0.1 to 1% at one end face (hereinafter referred to as a light emitting end face) of both end faces including the end of the active layer. A film is formed, and a highly reflective film having a reflectance of about 85% is formed on the other end face (hereinafter referred to as a light reflecting end face).
[0021]
The semiconductor light emitting element 4 is fixed on a pedestal 22, and the pedestal 22 is a first L-shaped support substrate 6 composed of a first flat plate portion 6 a and a second flat plate portion 6 b that are perpendicular to each other. Is fixed on the flat plate portion 6a. Therefore, the semiconductor light emitting element 4 is supported on the support substrate 6 via the pedestal 22. Here, the pedestal 22 is made of CuW, and the support substrate 6 is made of Kovar, so that the heat generated in the semiconductor light emitting element 4 can be effectively released.
[0022]
In order to guide the light emitted from the light emitting end face of the semiconductor light emitting element 4 to the optical fiber 8 in the portion of the second flat plate portion 6 b of the support substrate 6 facing the light emitting end face of the semiconductor light emitting element 4. The hole 6c is provided. In addition, a photodiode 26 that detects the intensity of light generated by the semiconductor light emitting element 4 is fixed to the support substrate 6 behind the light reflecting end face of the semiconductor light emitting element 4. By feeding back the intensity of light detected by the photodiode 26 to the drive current of the semiconductor light emitting element 4, the intensity of light emitted from the semiconductor light emitting element 4 can be made constant.
[0023]
A Peltier element 28 is provided below the support substrate 6, and the first flat plate portion 6 b of the support substrate 6 is fixed in contact with the Peltier element 28. Here, the Peltier element is an element having cooling ability by the Peltier effect, and heat generated from the semiconductor light emitting element 4 or the optical fiber 8 is effectively removed by the Peltier element 28. In addition, the Peltier element 28 is fixed to the inner wall of the main body 16 of the housing 14, and as a result, the semiconductor light emitting element 4, the base 22, the support substrate 6, the photodiode 26, and the Peltier element 28 are mounted on the housing 14. It is fixed against.
[0024]
The optical fiber 8 is inserted into the cylindrical portion 18 of the housing 14 and is provided with a tip that is polished into a substantially spherical shape facing the light emitting end face of the semiconductor light emitting element 4. A plurality of diffraction gratings 30 are formed at predetermined intervals in the interior of the position retracted from the tip of the optical fiber 8 (particularly the core portion). The interval between the diffraction gratings 30 is determined according to the wavelength of the laser beam to be output. That is, if the wavelength of the laser beam to be output is λ, the refractive index of the core of the optical fiber 8 is n, and the interval of the diffraction grating 30 is d,
2nd = mλ (m is an arbitrary integer) (1)
The distance d of the diffraction grating 30 is determined so as to satisfy the above. By configuring the diffraction grating 30 as described above, a resonator is formed between the light reflection end face of the semiconductor light emitting element 4 and the diffraction grating 30, and laser light having a wavelength λ is generated.
[0025]
A ferrule 10 for protecting the tip portion of the optical fiber 8 is provided at the tip portion of the optical fiber 8. The ferrule 10 is a cylindrical container made of stainless steel, and the distal end portion of the optical fiber 8 is protected from impact or the like by inserting and fixing the distal end portion of the optical fiber 8 inside the ferrule 10.
[0026]
A lower ring 12 is provided at the distal end of the ferrule 10 (the end closer to the distal end of the optical fiber 8), an upper ring 36 is provided at the rear end of the ferrule 10, and A cylindrical cup 38 that covers the ferrule 10 is provided between the upper ring 36 and the upper ring 36.
[0027]
The lower ring 12 is made of stainless steel and has a disk-shaped substrate portion 12a as shown in the cross-sectional view of FIG. 2 and the perspective view of FIG. A ferrule insertion hole 12b having a diameter slightly larger than the outer diameter of the ferrule 10 is formed in the central portion of the substrate portion 12a. The tip of the ferrule 10 is inserted into the ferrule insertion hole 12b of the lower ring 12. Yes. Furthermore, an annular groove 12e is provided at a position corresponding to both of the two surfaces 12c and 12d facing each other so as to surround the periphery of the ferrule insertion hole 12b, and the groove 12e is provided. In this portion, the thickness of the substrate part 12a is a thinner part than other parts.
[0028]
The ferrule 10 and the lower ring 12 are fixed by spot welding a plurality of points (for example, two points) using a YAG laser or the like.
[0029]
The upper ring 36 is made of stainless steel and has a disk shape. An insertion hole 36 a having a diameter slightly larger than the outer diameter of the ferrule 10 is formed in the center portion of the disk shape, and the rear end portion of the ferrule 10 is inserted into the insertion hole 36 a of the upper ring 36. . The ferrule 10 and the upper ring 36 are fixed by spot welding at a plurality of points.
[0030]
The cup 38 is made of stainless steel, and its opening and one surface 12c of the lower ring 12 are fixed by spot welding at a plurality of points. Further, a hole 38a through which the ferrule 10 is inserted is formed at the bottom of the cup 38, and the bottom of the cup 38 and the edge of the upper ring 36 are fixed by spot welding at a plurality of points. .
[0031]
The lower ring 12 is disposed so that the other surface 12d faces the second flat plate portion 6b of the support substrate 6, and is positioned so that the tip of the optical fiber 8 and the light emitting end face of the semiconductor light emitting element 4 face each other. In this state, the plurality of points are spot-welded to be fixed to the second flat plate portion 6 b of the support substrate 6.
[0032]
More specifically, the positioning of the tip of the optical fiber 8 with respect to the light emitting end face of the semiconductor light emitting element 4 is performed by a method as shown in FIG. That is, first, as shown in FIG. 4A, the tip of the ferrule 10 provided at the tip of the optical fiber 8 is inserted into the hole 6 c of the support substrate 6.
[0033]
Subsequently, the lower ring 12 is fitted to the tip of the ferrule 10, and after roughly positioning the tip of the optical fiber 8 with respect to the light emitting end face of the semiconductor light emitting element 4, as shown in FIG. The lower ring 12, the lower ring 12, and the support substrate 6 are sequentially fixed by spot welding at locations S1 and S2 in FIG. 4B, respectively.
[0034]
Thereafter, the cup 38 and the upper ring 36 are placed on the ferrule 10 to fix the opening of the cup 38 and the lower ring 12, and then the ferrule 10 is moved using the fixing point of the ferrule 10 and the lower ring 12 as a fulcrum. Fine adjustment of the tip position of the optical fiber 8 with respect to the light emitting end face of the light emitting element 4 is performed. After the fine adjustment is completed, as shown in FIG. 4 (c), the ferrule 10 and the upper ring 36, and the upper ring 36 and the cup 38 are sequentially spotted at locations S3 and S4 in FIG. 4 (c), respectively. Secure by welding. By such a method, the positioning of the tip of the optical fiber 8 with respect to the light emitting end face of the semiconductor light emitting element 4 is accurately performed.
[0035]
Then, the effect | action and effect of the light emitting element module which concern on this embodiment are demonstrated. In the light emitting element module 2 according to the present embodiment, the thin portion is formed around the ferrule insertion hole 12b, thereby moving the ferrule 10 with the insertion portion (fixed point) to the lower ring 12 as a fulcrum. Even when the tip position of the optical fiber 8 is finely adjusted, the thin-walled portion is prevented from being deformed and bending of the ferrule 10 or the optical fiber 8 included in the ferrule 10 is prevented.
[0036]
This point will be described in more detail with reference to FIG. At the time of manufacturing the light emitting element module, fine adjustment of the tip position of the optical fiber 8 with respect to the semiconductor light emitting element 4 is performed by moving the ferrule 10 with the fixed point between the ferrule 10 and the lower ring 12 as a fulcrum as described above. Therefore, when the conventional lower ring 12 having no thin portion is used, the ferrule 10 is curved at the fixing point between the ferrule 10 and the lower ring 12 as shown in FIG. As a result, the optical fiber 8 included in the ferrule 10 is also bent, the propagation efficiency of light propagating in the optical fiber is lowered, the interval of the diffraction grating 30 is changed, and the output efficiency of the light emitting element module is increased. It will decline.
[0037]
On the other hand, when the lower ring 12 provided with the thin portion is used like the light emitting element module 2 according to the present embodiment, the thin portion is not the ferrule 10 but the thin portion as shown in FIG. Due to the deformation, it is possible to avoid the bending of the ferrule 10 and the optical fiber 8 included in the ferrule 10. Therefore, it is possible to finely adjust the tip position of the optical fiber 8 with respect to the semiconductor light emitting element 4 while maintaining the light propagation efficiency in the optical fiber 8 and the output efficiency of the light emitting element module 2 in an extremely high state.
[0038]
Further, in the light emitting element module 2 according to the present embodiment, the thin portion is formed by providing the groove portion 12e at the corresponding position on both of the two surfaces 12c and 12d facing the substrate portion 12a. The thin-walled portion can be easily formed, and the thin-walled portion can be shaped to be extremely easily deformed.
[0039]
Then, the modification of the light emitting element module which concerns on the said embodiment is demonstrated. Here, each modified example is a modified example in which the shape of the lower ring 12 is modified, and the other components are the same as those of the light-emitting element module 2 according to the above embodiment. Therefore, only the shape of the lower ring 12 will be described below. explain.
[0040]
FIG. 6 is a cross-sectional view showing the shape of the lower ring 40 according to the first modification. The lower ring 40 according to this modification is different from the lower ring 12 according to the above embodiment in that the lower ring 12 according to the above embodiment corresponds to both of the two surfaces 12c and 12d facing the substrate portion 12a. Whereas the groove portion 12e is provided at the position and the thin portion is formed, in the lower ring 40 according to the present modification, the two surfaces 40c and 40d facing the substrate portion 40a face the support substrate 6. The groove 40e is provided only on the surface 40d on the side to form a thin portion. By forming the groove portion 40e on only one of the two surfaces 40c and 40d facing the substrate portion 40a to form the thin portion, the thin portion can be easily formed as compared with the case where the groove portion is provided on both surfaces. It becomes possible.
[0041]
FIG. 7 is a cross-sectional view showing the shape of the lower ring 42 according to the second modification. The lower ring 42 according to this modification is different from the lower ring 40 according to the first modification in that, in the lower ring 40 according to the first modification, two surfaces 40c facing the substrate portion 40a, A thin wall portion was formed by providing an annular groove 40e on the surface 40d on the side facing the support substrate 6 of 40d and at a position away from the outer periphery of the ferrule insertion hole 40b by a predetermined distance. However, in the lower ring 42 according to this modification, of the two surfaces 42c and 42d facing the substrate portion 42a, on the surface 42d facing the support substrate 6 and on the outer periphery of the ferrule insertion hole 42b. In contact therewith, an annular groove 42e is provided to form a thin portion. Even if the groove 42e is formed in this way, the position of the tip of the optical fiber 8 relative to the semiconductor light emitting element 4 can be kept small while maintaining the light propagation efficiency in the optical fiber 8 and the output efficiency of the light emitting element module 2 extremely high. Adjustments can be made.
[0042]
FIG. 8 is a cross-sectional view showing the shape of the lower ring 44 according to the third modification. The difference between the lower ring 44 according to the present modification and the lower ring 42 according to the second modification is that, in the lower ring 42 according to the second modification, two surfaces 42c facing the substrate portion 42a, 42d, the groove portion 42e is provided on the surface 42d on the side facing the support substrate 6 to form a thin portion. However, in the lower ring 44 according to this modification, two surfaces 44c facing the substrate portion 44a are provided. 44d, a groove 44e is provided on the surface 44c on the side not facing the support substrate 6 to form a thin portion. Even if the groove portion 44e is formed in this way, the light propagation efficiency in the optical fiber 8 and the output efficiency of the light-emitting element module 2 are kept extremely high, and the tip position of the optical fiber 8 with respect to the semiconductor light-emitting element 4 is very small. Adjustments can be made.
[0043]
FIG. 9 is a cross-sectional view showing the shape of the lower ring 46 according to the fourth modification. The lower ring 46 according to this modification differs from the lower ring 12 according to the above embodiment in that the lower ring 12 according to the above embodiment is composed of a disk-shaped substrate portion 12a. The lower ring 46 is configured to further include a cylindrical portion 46f that is fixed to the substrate portion 46a and extends the ferrule insertion hole 46b in the longitudinal direction of the ferrule 10. By providing the tubular portion 46f and extending the ferrule insertion hole 46b, the area of the portion where the inner wall of the ferrule insertion hole 46b and the outer wall of the ferrule 10 overlap can be increased. Therefore, the ferrule 10 and the lower ring 46 are firmly fixed, and the external force applied to the ferrule 10 can be dispersed when fine adjustment of the tip position of the optical fiber 8 with respect to the semiconductor light emitting element 4 is performed. As a result, the bending of the ferrule 10 and the optical fiber 8 included in the ferrule 10 can be more efficiently suppressed.
[0044]
10, 11, and 12 respectively show a fourth modification in the lower ring 40 according to the first modification, the lower ring 42 according to the second modification, and the lower ring 44 according to the third modification. The lower rings 48, 50, and 52 are provided with cylindrical portions 48f, 50f, and 52f similar to the lower ring 46 according to the example. Even if the lower ring has such a shape, the area of the portion where the inner wall of the ferrule insertion hole 46b and the outer wall of the ferrule 10 overlap can be increased, and the curvature of the ferrule 10 and the optical fiber 8 included in the ferrule 10 can be increased. Can be suppressed more efficiently.
[0045]
The optical element module according to the above embodiment is a light emitting element module that includes an optical fiber incorporating a diffraction grating and a light emitting element, and forms a resonator between the light emitting element and the diffraction grating. Alternatively, it may be a light emitting element module configured to include a normal optical fiber and a light emitting element that do not incorporate a diffraction grating, or a light receiving element module configured to include an optical fiber and a light receiving element.
[0046]
【The invention's effect】
In the ferrule support member of the present invention, since the thin portion is formed in the peripheral portion of the ferrule insertion hole, the thin portion is deformed even when fine adjustment of the tip position of the optical fiber with respect to the optical element is performed. It is possible to prevent the ferrule and the optical fiber from being bent. As a result, it is possible to finely adjust the tip position of the optical fiber with respect to the optical element while maintaining a high light propagation efficiency in the optical fiber. In particular, when the ferrule support member of the present invention is used in a light-emitting element module including an optical fiber incorporating a diffraction grating and a light-emitting element, the output efficiency of the light-emitting element module is maintained in an extremely high state. It becomes possible to finely adjust the tip position of the optical fiber with respect to the light emitting element.
[0047]
Moreover, the ferrule support member of this invention can form the said thin part easily by forming a thin part by providing a groove part.
[0048]
In addition, the ferrule support member of the present invention can easily form a thin-walled portion and easily deform the thin-walled portion by providing grooves at positions corresponding to both of the two surfaces facing each other. Can do.
[0049]
Moreover, the ferrule support member of this invention can increase the area of the part which the inner wall of a ferrule insertion hole and the outer wall of a ferrule overlap by providing a cylindrical part and extending a ferrule insertion hole. Accordingly, the ferrule and the ferrule support member are firmly fixed, and it is possible to disperse the external force applied to the ferrule when finely adjusting the tip position of the optical fiber with respect to the optical element. As a result, it becomes possible to more efficiently suppress the bending of the ferrule and the optical fiber included in the ferrule.
[0050]
Further, the optical element module of the present invention can be used even when fine adjustment of the tip position of the optical fiber with respect to the optical element is performed by using a ferrule support member in which a thin portion is formed around the ferrule insertion hole. The thin-walled portion is prevented from being deformed and bending of the ferrule and the optical fiber is prevented. As a result, it is possible to finely adjust the tip position of the optical fiber with respect to the optical element while maintaining a high light propagation efficiency in the optical fiber. In particular, in a light emitting element module configured to include an optical fiber incorporating a diffraction grating and a light emitting element, the tip of the optical fiber with respect to the light emitting element is maintained while maintaining the output efficiency of the light emitting element module extremely high. The position can be finely adjusted.
[Brief description of the drawings]
FIG. 1 is a partially cutaway perspective view of a light emitting element module.
FIG. 2 is a cross-sectional view of an internal structure of a light emitting element module.
FIG. 3 is a perspective view of a lower ring.
FIG. 4 is an explanatory diagram showing a method for positioning the tip of an optical fiber with respect to a light emitting end face of a semiconductor light emitting device.
FIG. 5 is an explanatory view showing a state when positioning the tip of the optical fiber with respect to the light emitting end face of the semiconductor light emitting element.
FIG. 6 is a perspective view of a lower ring.
FIG. 7 is a perspective view of a lower ring.
FIG. 8 is a perspective view of a lower ring.
FIG. 9 is a perspective view of a lower ring.
FIG. 10 is a perspective view of a lower ring.
FIG. 11 is a perspective view of a lower ring.
FIG. 12 is a perspective view of a lower ring.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 2 ... Light emitting element module, 4 ... Semiconductor light emitting element, 6 ... Support substrate, 8 ... Optical fiber, 10 ... Ferrule, 12, 40, 42, 44, 46, 48, 50, 52 ... Lower ring, 14 ... Housing, 16 DESCRIPTION OF SYMBOLS ... Main part, 18 ... Cylindrical part, 20 ... External lead, 22 ... Base, 26 ... Photodiode, 28 ... Peltier element, 30 ... Diffraction grating, 36 ... Upper ring, 38 ... Cup

Claims (5)

In the ferrule support member used for connecting the optical element support member on which the optical element is supported and the ferrule in which the tip portion of the optical fiber is inserted and fixed, and positioning the tip of the optical fiber with respect to the optical element,
A ferrule insertion hole for inserting the ferrule and a substrate portion fixed to the optical element support member;
The peripheral portion of the ferrule insertion hole in the substrate portion is moved while the positioning is performed by moving the ferrule with the insertion portion to the substrate portion as a fulcrum, thereby preventing the light from being bent in the ferrule. A ferrule support member, characterized in that a thin portion for finely adjusting the tip position of the optical fiber with respect to an element is formed . The substrate portion has two surfaces facing each other,
The ferrule support member according to claim 1, wherein the thin portion is formed by providing a groove on at least one of the two surfaces facing each other. The groove is
The ferrule support member according to claim 2, wherein the ferrule support member is provided at a position corresponding to both of the two surfaces facing each other. The ferrule support member according to any one of claims 1 to 3, further comprising a cylindrical portion that is fixed to the substrate portion and extends the ferrule insertion hole in a longitudinal direction of the ferrule. . An optical element support member on which the optical element is supported;
A ferrule with an optical fiber tip inserted and fixed;
In the optical element module comprising the ferrule support member used for connecting the optical element support member and the ferrule, and positioning the tip of the optical fiber with respect to the optical element.
The ferrule support member is
A ferrule insertion hole for inserting the ferrule and a substrate portion fixed to the optical element support member;
The peripheral portion of the ferrule insertion hole in the substrate portion is moved while the positioning is performed by moving the ferrule with the insertion portion to the substrate portion as a fulcrum, thereby preventing the light from being bent in the ferrule. An optical element module, wherein a thin portion for finely adjusting a tip position of the optical fiber with respect to the element is formed .

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