JP3629227B2 - Excimer lamp device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an excimer lamp device having a cooling mechanism, and more particularly to an excimer lamp device having excellent cooling medium sealing performance of a cooling mechanism.
[0002]
[Prior art]
In recent years, surface treatment technology for an object to be processed made of metal, glass, and other materials, and ultraviolet treatment technology as an oxide film formation technology have been developed and put into practical use. Conventionally, a low-pressure mercury lamp has been used as a lamp for performing ultraviolet treatment, but recently, an excimer lamp using light emitted from excimer molecules has been developed.
[0003]
In the excimer lamp, the illuminance increases as the input power is increased. However, as the input power increases, the lamp temperature also rises, and this temperature rise affects the luminous efficiency and the lamp life. May affect. Therefore, an excimer lamp device has been proposed in which a cooling medium is used to cool the lamp itself in order to realize a high-illuminance lamp configuration depending on the application.
[0004]
FIG. 5 is a cross-sectional view of a conventional excimer lamp device having a cooling mechanism. The excimer lamp 51 has a double tube structure constituted by an outer tube 53 and an inner tube 52, and one electrode 56 is provided on the surface of the outer tube 53, and the other electrode 55 is provided inside the inner tube 52, thereby providing an outer tube. A discharge space 54 is formed between the inner tube 52 and the inner tube 52. The discharge space 54 is filled with a rare gas or a mixed gas of a rare gas and a halogen gas.
[0005]
Further, ring-shaped gaskets 59 are disposed at the end portions 51a and 51b in the axial direction of the excimer lamp 51 so as to contact the end portions 51a and 51b. The gasket 59 has a through hole at the center, and the diameter of the through hole is substantially the same as the diameter of the internal space 57 formed by the inner tube 52 of the excimer lamp 51. Then, by connecting the electrodes 55 and 56 of the excimer lamp 51 to an AC power supply (not shown), excimer discharge is started and light is emitted.
[0006]
The joint mechanism 58 includes the gasket 59 described above. By rotating the joint mechanism 58, the gasket 59 is applied to the end portions 51 a and 51 b of the excimer lamp 51 and pressed, and the end portions 51 a and 51 b are pressed. A gasket 59 is in close contact. A through hole communicating with the through hole of the gasket 59 is formed inside the joint mechanism 58. Since the through hole has a structure communicating with the inner hole of the cooling medium conduit 60, the cooling medium passes through the through hole of the joint mechanism 58 and the through hole of the gasket 59 and enters the inner space 57 formed by the inner pipe 52. The excimer lamp 51 is cooled from the inner tube 52.
[0007]
FIG. 6 is a cross-sectional view of another excimer lamp device provided with a cooling mechanism. The excimer lamp 101 has a double tube structure composed of an outer tube 103 and an inner tube 102, and one electrode 106 is provided on the surface of the outer tube 103, and the other electrode 105 is provided on the inner side of the inner tube 102, thereby providing an outer tube. A discharge space 104 is formed between the tube 103 and the inner tube 102, and the discharge space 104 is filled with a rare gas or a mixed gas of a rare gas and a halogen gas.
[0008]
The inner tube 102 extends out of the discharge space 104 and has a cylindrical extension tube portion 102 </ b> A, and the outer peripheral surface 102 </ b> A <b> 1 of the end portion of the extension tube portion 102 </ b> A is longer than the end portion 101 </ b> A forming the discharge space 104. A space indicated by L is closely held by the joint mechanism 108 connected to the cooling medium conduit 113.
[0009]
As shown in FIG. 7, the joint mechanism 108 includes a body 109, an O-ring 110, a ferrule 111, and a cap nut 112. The connection between the joint mechanism 108 and the extension pipe portion 102A is achieved by connecting the cap nut 112 to the extension pipe portion 102A. It is inserted in advance, and the ferrule 111 is inserted in front of the cap nut 112. Further, the O-ring 110 is inserted in front of the ferrule 111 so as to be in contact with the entire outer peripheral surface of the extension pipe portion 102A, and then cooled on one end. The body 109 to which the medium conduit 113 is connected is fitted. In this state, by rotating the cap nut 112 while pressing it against the body 109, the screw groove of the cap nut 112 and the screw groove of the body 109 are screwed together, so that the O-ring 110 is deformed and the gap between the body 109 and the ferrule 111 is reached. And tightly hold the outer peripheral surface of the end portion 102A1 of the extension tube portion 102A in an airtight manner.
[0010]
[Problems to be solved by the invention]
However, since the end portions 51a and 51b of the excimer lamp 51 shown in FIG. 5 are formed by welding the outer tube 53 and the inner tube 52, unevenness occurs and the smoothness is low. For this reason, when the gasket 59 is pressed against the end portions 51a and 51b to be in close contact with each other, if the pressure is weak, a gap is generated at the close contact portion between the gasket 59 and the end portions 51a and 51b, and the cooling medium leaks from the gap. There is a problem that the cooling efficiency of the lamp is lowered. Further, when the cooling medium also has a dielectric between the electrodes 55 and 56, the leakage of the cooling medium causes the excimer lamp 51 not to be lit.
[0011]
Therefore, it is necessary to smooth the end portions 51a and 51b of the excimer lamp 51, and the end portions 51a and 51b are ground. When a load due to pressing of the gasket 59 is applied to the excimer lamp 51 subjected to such a grinding load, a damage mechanism is caused. Therefore, a joint mechanism with a small load on the excimer lamp 51 is desired.
[0012]
Further, the excimer lamp 101 shown in FIG. 6 is proposed to solve the problem of the excimer lamp 51 shown in FIG. 4, and is not an end portion 101A having a low smoothness but an extension pipe portion having a high smoothness. The end 102A1 of 102A is in close contact with the joint mechanism 108. Although effective from the point of not causing leakage from the close contact point, the excimer lamp 101 is held only by the extension tube portion 102A of the inner tube 102. Therefore, when an unexpected external force is applied to the excimer lamp 101, the excimer lamp The external force is concentrated on the extension pipe portion 102A having a diameter smaller than that of the diameter 101, and there is a problem that the extension pipe portion 102A of the excimer lamp 101 is easily damaged at the end surface of the joint mechanism 108 on the excimer lamp 101 side. Further, since the space L is provided between the excimer lamp 101 and the joint mechanism 108, there is a problem that the excimer lamp 101 is more easily damaged.
[0013]
Therefore, the present invention was created to solve such problems, and its purpose is to provide an excimer lamp having a joint mechanism that reliably prevents leakage of the cooling medium and improves cooling efficiency. It is an object of the present invention to provide an excimer lamp device in which the load on the excimer lamp is reduced and the excimer lamp is not damaged by an external force.
[0014]
[Means for Solving the Problems]
In order to solve the above problems, the invention according to claim 1 is characterized in that a discharge space is formed by a cylindrical outer tube and an inner tube arranged coaxially, and electrodes are arranged on both sides of the discharge space, An excimer lamp in which the cooling medium flows into the internal space formed by the pipe via the cooling medium conduit, a left and right joint mechanism that holds both ends of the excimer lamp and is connected to the cooling medium conduit, and an inner surface portion of the left and right joint mechanism And an end portion of the excimer lamp located in a space formed by each of the first and second seal lids fitted on the outer peripheral surface of the end portion of the excimer lamp, and both of the seal lids and the left and right joint mechanisms. and first and second sealing member that is fitted on the outer circumferential surface, characterized in that connected to the right and left joint mechanism at a two pipe ends and the clearance of the excimer lamp Ekishimara Those configured as up device.
[0015]
With this configuration, the screw groove formed on the outer surface portion of the seal lid and the screw groove formed on the inner surface portion of the joint mechanism are screwed together, and the seal member is connected to the joint mechanism and the seal lid by this screwing. The outer peripheral surface of the end portion of the excimer lamp and the inner surface portion of the joint mechanism are held in close contact with each other, and a gap is not formed at the contact portion. At this time, the end of the excimer lamp is not pressed.
[0016]
According to the second aspect of the present invention, a discharge space is formed by a cylindrical outer tube and an inner tube arranged coaxially, electrodes are arranged on both sides of the discharge space, and an inner space formed by the inner tube is formed in the inner space. An excimer lamp through which the cooling medium flows through the cooling medium conduit, a left and right joint mechanism that holds both ends of the excimer lamp and is connected to the cooling medium conduit, an outer surface portion of the left and right joint mechanism, and an outer periphery of the end portion of the excimer lamp First and second seal lids to be inserted into the surface, and first and second seal lids which are located in spaces formed by both of the seal lids and the left and right joint mechanisms, respectively, and are inserted into the outer peripheral surface of the end portion of the excimer lamp. and a 1 and a second sealing member, which is configured as an excimer lamp apparatus characterized by connecting the right and left joint mechanism at a two pipe ends and the clearance of the excimer lamp A.
[0017]
With this configuration, the screw groove formed on the inner surface portion of the seal lid and the screw groove formed on the outer surface portion of the joint mechanism are screwed together, and by this screwing, the seal member is connected to the joint mechanism and the seal lid. The outer peripheral surface of the end portion of the excimer lamp and the inner surface portion of the joint mechanism are held in close contact with each other, and a gap is not formed at the contact portion. At this time, the end of the excimer lamp is not pressed.
[0018]
The invention according to claim 3 is configured as an excimer lamp device according to claim 1 or 2, wherein a spacer is interposed between the seal lid and the seal member.
[0019]
With this configuration, the spacer narrows the deformation space of the seal member, and the amount of deformation of the seal member becomes larger than that of the invention according to claim 1 or 2, and in addition, the position of the seal member. More stable, the degree of contact between the outer peripheral surface of the end portion of the excimer lamp and the inner surface of the joint mechanism is increased, and there is no gap at the contact portion. Also at this time, the end of the excimer lamp is not pressed.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view of an excimer lamp device. As shown in FIG. 1, the excimer lamp device includes an excimer lamp 1, a joint mechanism 8, a seal lid 11, and a seal member 10.
[0021]
The excimer lamp 1 has a double tube structure in which an inner tube 2 and an outer tube 3 made of synthetic quartz are coaxially arranged. The inner tube 2 and the outer tube 3 are welded at both end portions 1a and 1b to form a discharge space 4. Forming. The discharge space 4 is filled with a rare gas or a mixed gas of a rare gas and a halogen gas as a discharge gas. An inner space 7 through which the cooling medium flows is formed by the inner tube 2.
[0022]
A substantially cylindrical (tubular) internal electrode 5 is disposed on the inner surface of the inner tube 2, and an outer electrode 6 formed in a net shape so as to transmit ultraviolet rays is disposed on the outer surface of the outer tube 3. The internal electrode 5 and the external electrode 6 are connected to an AC power source (not shown).
[0023]
On the other hand, the joint mechanism 8 is made of metal or plastic, has a through hole for inserting the seal lid 11 and the seal member 10 therein, a thread groove is formed at one end thereof, and the outer surface portion of the seal lid 11 The excimer lamp 1 is held in close contact with the outer peripheral surfaces 3 a and 3 b of the outer tube 3 by deforming the seal member 10.
[0024]
The seal lid 11 is a set screw made of metal or plastic, and has a thread groove for fitting with the joint mechanism 8 on the outer surface portion, and has a through-hole through which the outer tube 3 of the excimer lamp 1 is inserted.
[0025]
The seal member 10 is made of a material that is deformed by an external force, and is made of, for example, fluororubber (trade name: Viton). At its center, there is a through hole through which the outer tube 3 of the excimer lamp 1 is inserted. The cross-sectional shape of the seal member is not particularly limited, such as a circle, an ellipse, or a quadrangle. However, the seal member is deformed when the excimer lamp 1 is held by the joint mechanism 8, and the outer peripheral surface of the end portion of the outer tube 3 is deformed. 3 a (3 b), the end surface of the seal lid 11, and the cross-sectional area that can be surely sealed so that the cooling medium does not leak out from the space 9 formed by the inner surface of the joint mechanism 8.
[0026]
Further, a cooling medium conduit 12 is connected to the other end of the through hole of the joint mechanism 8, and the cooling medium conduit 12 and the internal space 7 of the excimer lamp 1 are communicated with each other. It cools from the pipe 2.
[0027]
A method of connecting the excimer lamp 1 and the joint mechanism 8 will be described with reference to FIG. 1. The seal lid 11 is fitted in advance on the outer peripheral surface of the outer tube 3 of the excimer lamp 1 on the one end 1 a side, and then the seal member 10 is joined to the joint of the seal lid 11. It fits so that it may be located in front of the mechanism 8 side. The excimer lamp 1 is inserted into the through hole of the joint mechanism 8, the seal lid 11 is fitted into the joint mechanism 8, and tightened with a fitting wrench. By tightening the seal lid 11, the screw groove formed on the outer surface portion of the seal lid 11 and the screw groove formed on the inner surface portion of the joint mechanism 8 are screwed together, and the seal member 10 disposed in the space 9 is The joint mechanism 8 and the inner wall surface of the seal lid 11 are pressed and deformed. As a result, the outer peripheral surface 3 a of the end portion of the outer tube 3 of the excimer lamp 1 is held in close contact with the inner surface of the joint mechanism 8. The same applies to the other end 1b of the outer tube 3 of the excimer lamp 1.
[0028]
In this connection method, not the end portions 1a and 1b of the excimer lamp 1 with low smoothness but the end portion outer peripheral surfaces 3a and 3b of the excimer lamp 1 with high smoothness are held in close contact with each other, so that there is no unevenness at the close contact portions. I can't. Therefore, the leakage of the cooling medium can be surely prevented, and the cooling efficiency of the excimer lamp 1 can be improved. Further, there is no need to smooth the outer peripheral surface of the end portion of the excimer lamp 1 by grinding, and there is no need to press a gasket or the like on the excimer lamp 1 to increase the degree of adhesion. Therefore, the load is reduced. Further, since the entire excimer lamp 1 is held by the joint mechanism 8, even if an unexpected external force is applied to the excimer lamp 1, the excimer lamp 1 may be damaged at the end surface of the seal lid 11 on the excimer lamp 1 side. There is no.
[0029]
In addition, you may interpose the spacer 13 when inserting the sealing member 10 as shown in FIG. FIG. 2 is a partially enlarged cross-sectional view of the joint mechanism 8. The spacer 13 is made of metal or plastic, and its cross-sectional shape is not particularly limited, such as a circle, an ellipse, or a quadrangle, and the screw groove of the seal lid 11 and the joint mechanism 8 is screwed in the cross-sectional area. It is sufficient that the sealing member 10 has an area that can be reliably deformed by being pressed. When the spacer 13 is interposed between the seal lid 11 and the seal member 10, the seal when the screw groove formed on the outer surface portion of the seal lid 11 and the screw groove formed on the inner surface portion of the joint mechanism 8 are screwed together is sealed. The amount of deformation of the member 10 increases, the degree of close contact between the end outer peripheral surfaces 3a and 3b of the excimer lamp 1 and the inner surface of the joint mechanism 8 increases, and a gap cannot be formed at the close contact portion. Further, the interposition of the spacer 13 reduces the rotational load applied to the seal member 10 when the seal lid 11 is tightened, and makes the position of the seal member 10 more stable. Therefore, the degree of adhesion of the excimer lamp 1 to the joint mechanism 8 Will increase, and there will be no gap in the contact area. As a result, leakage of the cooling medium is further prevented, and the cooling efficiency of the excimer lamp 1 is further improved.
[0030]
Next, another method for connecting the excimer lamp and the joint mechanism will be described. In addition, about the same member as the above-mentioned structure, the same code | symbol is attached | subjected and description is abbreviate | omitted. FIG. 3 is a partially enlarged sectional view of the joint mechanism 14. In the configuration described here, the male and female thread grooves of the seal lid and the joint mechanism in FIG. 1 are reversed. As shown in FIG. 3, when the seal lid 15 is fitted into the joint mechanism 14 and tightened with a fitting wrench, the screw groove formed on the inner surface portion of the seal lid 15 and the screw groove formed on the outer surface portion of the joint mechanism 14 are screwed. The seal member 10 arranged in the space 9 is pressed against the inner wall surfaces of the joint mechanism 14 and the seal lid 15 to be deformed. As a result, the outer peripheral surface 3 a of the end portion of the outer tube 3 of the excimer lamp 1 is held in close contact with the inner surface of the joint mechanism 14. The same applies to the other end of the outer tube 3 of the excimer lamp 1.
[0031]
Also in this connection method, as in the case of FIG. 1, since it is held tightly on the outer peripheral surface of the end portion with high smoothness, there is no unevenness in the contacted portion, no gap is formed, and leakage of the cooling medium is reliably prevented, Cooling efficiency is improved. Further, since the excimer lamp 1 is not smoothed by grinding or pressed by a gasket or the like, stress due to the pressure on the excimer lamp 1 is not applied, and the load on the excimer lamp 1 is reduced.
[0032]
In addition, you may interpose the spacer 13 when inserting the sealing member 10 as shown in FIG. FIG. 4 is a partially enlarged sectional view of the joint mechanism 14. As shown in FIG. 4, when the spacer 13 is interposed between the seal lid 15 and the seal member 10, the deformation amount of the seal member 10 increases, and in addition, the position of the seal member 10 becomes more stable, and the excimer lamp The degree of adhesion of the outer peripheral surface of the end portion 1 to the inner surface of the joint mechanism 14 is increased, and a gap is not formed at the contact portion. As a result, leakage of the cooling medium is further prevented, and the cooling efficiency of the excimer lamp 1 is further improved.
[0033]
As an example of the excimer lamp 1, the total length is 380 mm, the outer diameter of the inner tube 2 is approximately φ20 mm, and the outer diameter of the outer tube 3 is approximately φ30 mm. The length of the discharge space 4 is 300 mm. The length of the outer peripheral surfaces 3a and 3b of the end portion of the outer tube 3 of the excimer lamp 1 that is in close contact with the joint mechanism 8 is about 20 mm. The length of the discharge space 4 is adjusted to the position of the seal member 10 inside the joint mechanism 8 by adjusting the length of the internal electrode 5 in consideration of the influence on the seal member 10 by the vacuum ultraviolet rays generated in the discharge space 4. Set the length so that there is no space, shorter than the entire excimer lamp length.
[0034]
Specifically, as a result of performing the lighting experiment with the excimer lamp device of the present invention shown in FIG. 1, the end portions 1a and 1b of the excimer lamp 1 are not ground, so that microcracks due to grinding are not seen, and at the end of lighting. Also, no cracks or damage due to pressing were found at the end of the excimer lamp, and a good surface condition was obtained. As a result, the excimer lamp 1 that had been damaged in about 600 hours in the past was not damaged even after 800 hours or more, and the excimer lamp life was improved.
[0035]
【The invention's effect】
As described above, in the present invention, the left and right joint mechanism that holds both ends of the excimer lamp and is connected to the cooling medium conduit, and the inner surface of the left and right joint mechanism and the outer peripheral surface of the end of the excimer lamp are inserted. First and second seal lids, and first and second seal members which are located in spaces formed by both of the seal lids and the left and right joint mechanisms and are fitted on the outer peripheral surface of the end portion of the excimer lamp. By preventing the leakage of the cooling medium, the cooling efficiency could be improved. In addition, the load on the excimer lamp was reduced.
Further, since the entire excimer lamp is held by the joint mechanism, the excimer lamp is not damaged even if an unexpected external force is applied to the excimer lamp. Furthermore, in the present invention, by interposing a spacer between the seal lid and the seal member, it is possible to further prevent leakage of the cooling medium and improve the cooling efficiency.
[Brief description of the drawings]
FIG. 1 shows a cross-sectional view of an excimer lamp device of the present invention.
FIG. 2 shows a partially enlarged sectional view of the joint mechanism of the present invention.
FIG. 3 is a partially enlarged sectional view showing another connection method of the present invention.
FIG. 4 shows a partially enlarged sectional view of the joint mechanism of the present invention.
FIG. 5 shows a cross-sectional view of a conventional excimer lamp device.
FIG. 6 shows a cross-sectional view of another conventional excimer lamp device.
7 shows an enlarged cross-sectional view of the joint mechanism of FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Excimer lamp 1a, 1b, End part 2 Inner tube 3 Outer tube 3a, 3b End part outer peripheral surface 4 Discharge space 5 Internal electrode 6 External electrode 7 Internal space 8, 14 Joint mechanism 9 Space 10 Seal member 11, 15 Seal Lid 12 Cooling medium conduit 13 Spacer

Claims (3)

A discharge space is formed by a cylindrical outer tube and an inner tube arranged coaxially, electrodes are arranged on both sides of the discharge space, and the cooling medium is passed through the cooling medium conduit in the inner space formed by the inner tube. A flowing excimer lamp, a left and right joint mechanism that holds both ends of the excimer lamp and is connected to a cooling medium conduit, and an inner surface portion of the left and right joint mechanism and an outer peripheral surface of an end portion of the excimer lamp. A second seal lid; and first and second seal members which are located in spaces formed by the seal lids and the left and right joint mechanisms and are fitted to the outer peripheral surface of the end portion of the excimer lamp. The excimer lamp device is characterized in that the left and right joint mechanisms are connected with a gap between both ends of the excimer lamp. A discharge space is formed by a cylindrical outer tube and an inner tube arranged coaxially, electrodes are arranged on both sides of the discharge space, and the cooling medium is passed through the cooling medium conduit in the inner space formed by the inner tube. A flowing excimer lamp, a left and right joint mechanism that holds both ends of the excimer lamp and is connected to a cooling medium conduit, and first and second outer parts of the left and right joint mechanisms and the outer peripheral surface of the end part of the excimer lamp. A second seal lid; and first and second seal members which are located in spaces formed by the seal lids and the left and right joint mechanisms and are fitted to the outer peripheral surface of the end portion of the excimer lamp. The excimer lamp device is characterized in that the left and right joint mechanisms are connected with a gap between both ends of the excimer lamp. The excimer lamp device according to claim 1, wherein a spacer is interposed between the seal lid and the seal member.

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