JP3615242B2 - Turntable drive mechanism for heat treatment equipment - Google Patents

Turntable drive mechanism for heat treatment equipment Download PDF

Info

Publication number
JP3615242B2
JP3615242B2 JP21096194A JP21096194A JP3615242B2 JP 3615242 B2 JP3615242 B2 JP 3615242B2 JP 21096194 A JP21096194 A JP 21096194A JP 21096194 A JP21096194 A JP 21096194A JP 3615242 B2 JP3615242 B2 JP 3615242B2
Authority
JP
Japan
Prior art keywords
heating chamber
turntable
bearing
air introduction
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21096194A
Other languages
Japanese (ja)
Other versions
JPH0878155A (en
Inventor
章男 上岡
宏 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimak Corp
Original Assignee
Fujimak Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP21096194A priority Critical patent/JP3615242B2/en
Application filed by Fujimak Corp filed Critical Fujimak Corp
Priority to PCT/JP1994/001710 priority patent/WO1995010738A1/en
Priority to DE69429722T priority patent/DE69429722T2/en
Priority to CA002512912A priority patent/CA2512912C/en
Priority to EP00112405A priority patent/EP1045617B1/en
Priority to EP00112427A priority patent/EP1045207B1/en
Priority to DE69434288T priority patent/DE69434288T2/en
Priority to DE69434248T priority patent/DE69434248T2/en
Priority to US08/436,453 priority patent/US5747775A/en
Priority to CA002151733A priority patent/CA2151733C/en
Priority to CA002512321A priority patent/CA2512321C/en
Priority to EP00112428A priority patent/EP1045208B1/en
Priority to DE69433803T priority patent/DE69433803T2/en
Priority to EP94929647A priority patent/EP0696710B1/en
Publication of JPH0878155A publication Critical patent/JPH0878155A/en
Priority to US09/015,797 priority patent/US5928541A/en
Priority to US09/015,547 priority patent/US5954986A/en
Priority to US09/293,055 priority patent/US6218650B1/en
Application granted granted Critical
Publication of JP3615242B2 publication Critical patent/JP3615242B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Constitution Of High-Frequency Heating (AREA)

Description

【0001】
【産業上の利用分野】
本発明は、加熱処理装置のターンテーブルを回転させるためのターンテーブル駆動機構、更に言えば、駆動軸と軸受けの隙間に不要物が流入するのを防止する手段を施したターンテーブル駆動機構に関する。
【0002】
【従来の技術】
ターンテーブルの駆動機構には、モータ等の駆動源の他に、駆動源で発生された回転トルクを加熱室内部のターンテーブルに伝達する駆動軸と、この駆動軸を固定する軸受けが必要とされる。これら駆動軸と軸受けの間には、駆動軸の回転を可能とするために微細な隙間が設けてあるが、この隙間は、以下に掲げるような問題を生じさせることがある。
【0003】
【発明が解決しようとする課題】
一般に、加熱処理装置の加熱室内部では、加熱処理によって加熱と冷却が繰り返されているため、加熱室内部と軸受け内部に圧力変動が生じるが、この圧力変動は、駆動軸と軸受けとの隙間に呼吸作用を及ぼす原因となり、このため、調理時に発生した汚染物がこの隙間に流入するおそれが生じる。また、加熱室内部を洗剤等で洗浄する際にも、洗剤の界面活性剤等によって同様のおそれが生じる。更に、駆動軸と軸受けの間の隙間は微細なものであることから、毛細管現象が発生することがあるが、この現象も同様のおそれを生じさせる。従来、この問題に対して特に有効な対策がとられてこなかったため、これらの隙間に入り込んだ汚染物等により、駆動軸の円滑な回転に支障を生じさせるという問題が生じていた。
故に、本発明は、駆動軸と軸受けの間に不要物が流入するのを有効に防止する装置を提供する。
【0004】
【課題を解決するための手段】
本発明は、加熱処理装置の加熱室内部に配置されたターンテーブルを加熱室外部に配置した駆動源によって回転駆動させるためのターンテーブル駆動機構に関する。この駆動機構では、ターンテーブルは加熱室の下部に配置され、駆動源は加熱室の上部に配置されており、駆動源からの回転トルク加熱室の上部板を通じてターンテーブルに伝達するように加熱室の上部と下部の間に延びる駆動軸と、該駆動軸を上部板に対して回転し得るように固定するための軸受けと、加熱室の上部にあって駆動軸と軸受けとの間に存在する駆動軸の回転を可能とするための微細な隙間を通じて加熱室の外部から内部へと下方に向かう空気流を発生させるための空気導入手段が含まれる。
なお、空気導入手段は、軸受けの側壁の加熱室外部における外周に設けられた空気導入口と、該空気導入口に接続された空気導入管を備える。
以下、添付図面を参照して本発明を説明する。
【0005】
【実施例】
理解を容易にするため、加熱処理装置の構成部材のうち、本発明に係わるターンテーブルと、このターンテーブルのための駆動系のみを図1に示している。
駆動源であるモータ1は、加熱室上部の、加熱室の外部に設けられている。ターンテーブル9は、加熱室内部に設けられているため、モータで発生した回転トルクをこのターンテーブル9に伝達するために連結シャフト3,5等が使用される。モータ1で発生された回転トルクは、連結シャフト3を通じてスパイラルマイタ歯車11に伝達され、更に、これと噛み合わされたスパイラルマイタ歯車13を通じて連結シャフト5に伝達される。連結シャフト3とモータ1の間に設けられた連結シャフトジョイント15は、連結シャフト5とモータ1との係合を外すために設けられており、ターンテーブル9に過負荷がかかったときに、圧縮コイルバネの働きによって連結シャフト3,5等に加わるストラス荷重を逃す働きをするものである。連結シャフト5の端部にターンテーブル駆動歯車7を設けて、これをターンテーブル9の歯と噛み合わせることにより、ターンテーブル9を回転させる。
【0006】
連結シャフト5を所定位置に保持するため、加熱室の上部板22に軸受け40を固定して設ける。上部板22には、連結シャフト5を貫通させる貫通穴がもうけてある。連結シャフト5は、この貫通穴を通じて加熱室外部と内部の間にて、軸受け40により回転可能に保持される。軸受け40と連結シャフト5の拡大図を図2に示す。
図2を参照すれば明らかなように、連結シャフト5は、その上部に拡張部52を有する。連結シャフト5上部の突起部54にスパイラスマイタ歯車13が固定され、連結シャフト5とスパイラルマイタ歯車13間の回転トルクの伝達が可能とされている。連結シャフト5は、その拡張部52の下部において、軸受け40下部に設けたメタル軸受42によって受け止められて、所定高さに保持される。拡張部52の下部側面は、メタル軸受け42の外側に固定して設けた側壁44によって包囲される。側壁44と加熱室の上部板22の間に隙間は存在しない。
連結シャフト5の拡張部52の上部を、スリーブ45によって包囲する。スリーブ45上端部の内側に、連結シャフト5と回転可能に密着するシーリング部材41が設けてある。スリーブ45のこの上端部以外と拡張部52との間には、隙間が設けてある。スリーブ45の外周部に、このスリーブ45に固定されるナット43を設ける。連結シャフト3を支持する支持板6がスリーブ45の下まで延長されており、ナット43はこの延長部上に固定される。ナット43と支持板6の間に隙間は存在しない。ナット43により、スリーブ45が所定位置に保持される。
【0007】
ナット43を貫通する空気導入口46を設けて、ファン(図示していない)によって加圧された空気を、ホース48を通じてこの導入口46から軸受け内部に送り込む。ファンは、この目的のためだけに設けてもよいが、マグネトロン等の部品を冷却するために使用するファンを共用するようにして使用してもよい。つまり、この目的に使う空気の流量は、微小であるため、マグネトロン等の部品を冷却するために設けられたファンによって発生した空気の一部を、空気導入口46に導くようにしてもよい。
軸受け40と連結シャフト5の拡張部52の間には比較的大きな隙間が存在しており、空気導入口46から導入された空気がその隙間に入り易くされている。この比較的大きな隙間に導入された空気は、更に、拡張部52の下部、更にまた、拡張部52の側面部に沿って下方に導かれ、加熱室内部に流出している。
【0008】
【発明の効果】
本発明の構成によれば、連結シャフト5と軸受け40の隙間を通じて、軸受け40の内部から加熱室の内部に常に微小な空気を流出させることが可能とされる。この結果、連結シャフト5と軸受け40の間に汚染物等が流入してしまうことを有効に防止することができ、従って、連結シャフトの回転に支障が生じることも減少する。
【図面の簡単な説明】
【図1】本発明による実施例による加熱処理装置を、その駆動系とターンテーブルのみを用いて示した図。
【図2】本発明による軸受け20と連結シャフト5の拡大図。
【符号の説明】
1 モータ
3 連結シャフト
5 連結シャフト
6 支持板
7 ターンテーブル駆動歯車
9 ターンテーブル
11 スパイラルマイタ歯車
13 スパイラルマイタ歯車
15 連結シャフトジョイント
22 上部板
40 軸受け
41 シーリング部材
42 メタル軸受
43 ナット
44 側壁
45 スリーブ
46 空気導入口
52 拡張部
54 突起部
[0001]
[Industrial application fields]
The present invention relates to a turntable drive mechanism for rotating a turntable of a heat treatment apparatus, and more particularly to a turntable drive mechanism provided with a means for preventing unwanted materials from flowing into a gap between a drive shaft and a bearing.
[0002]
[Prior art]
In addition to a drive source such as a motor, the drive mechanism for the turntable requires a drive shaft that transmits rotational torque generated by the drive source to the turntable in the heating chamber, and a bearing that fixes the drive shaft. The A minute gap is provided between the drive shaft and the bearing to enable rotation of the drive shaft, but this gap may cause the following problems.
[0003]
[Problems to be solved by the invention]
Generally, in the heating chamber of the heat treatment apparatus, heating and cooling are repeated by the heat treatment, so that pressure fluctuation occurs in the heating chamber and in the bearing. This pressure fluctuation is generated in the gap between the drive shaft and the bearing. This causes a respiratory effect, and therefore, there is a risk that contaminants generated during cooking flow into the gap. Further, when the inside of the heating chamber is washed with a detergent or the like, the same fear is caused by the detergent surfactant or the like. Furthermore, since the gap between the drive shaft and the bearing is fine, a capillary phenomenon may occur. This phenomenon also causes the same fear. Conventionally, no particularly effective measures have been taken against this problem, and therefore, there has been a problem that the smooth rotation of the drive shaft is hindered by contaminants or the like that have entered these gaps.
Therefore, the present invention provides a device that effectively prevents unwanted materials from flowing between the drive shaft and the bearing.
[0004]
[Means for Solving the Problems]
The present invention relates to a turntable driving mechanism for rotationally driving a turntable disposed inside a heating chamber of a heat treatment apparatus by a drive source disposed outside the heating chamber. In this driving mechanism, the turntable is arranged below the heating chamber, the drive source is arranged on top of the heating chamber, the heating so as to transmit to the turntable rotational torque from a drive source through a heating chamber of the upper plate A drive shaft extending between the upper and lower portions of the chamber, a bearing for fixing the drive shaft so as to rotate relative to the upper plate , and located between the drive shaft and the bearing at the upper portion of the heating chamber air introducing means for generating an air flow towards the interior downwardly from the outside of the heating chamber through the fine gaps to allow rotation of the drive shaft that is included.
The air introduction means includes an air introduction port provided on the outer periphery of the bearing side wall outside the heating chamber, and an air introduction tube connected to the air introduction port.
Hereinafter, the present invention will be described with reference to the accompanying drawings.
[0005]
【Example】
For easy understanding, FIG. 1 shows only the turntable according to the present invention and the drive system for this turntable among the components of the heat treatment apparatus.
A motor 1 that is a drive source is provided outside the heating chamber above the heating chamber. Since the turntable 9 is provided in the heating chamber, the connecting shafts 3, 5, etc. are used to transmit the rotational torque generated by the motor to the turntable 9. The rotational torque generated by the motor 1 is transmitted to the spiral miter gear 11 through the connecting shaft 3 and further transmitted to the connecting shaft 5 through the spiral miter gear 13 meshed therewith. The connection shaft joint 15 provided between the connection shaft 3 and the motor 1 is provided to release the engagement between the connection shaft 5 and the motor 1 and is compressed when an overload is applied to the turntable 9. The function of the coil spring is to release the strass load applied to the connecting shafts 3, 5 and the like. A turntable drive gear 7 is provided at the end of the connecting shaft 5 and meshed with the teeth of the turntable 9 to rotate the turntable 9.
[0006]
In order to hold the connecting shaft 5 in a predetermined position, a bearing 40 is fixedly provided on the upper plate 22 of the heating chamber. The upper plate 22 has a through hole through which the connecting shaft 5 passes. The connecting shaft 5 is rotatably held by a bearing 40 between the outside and inside of the heating chamber through the through hole. An enlarged view of the bearing 40 and the connecting shaft 5 is shown in FIG.
As apparent from FIG. 2, the connecting shaft 5 has an extension 52 at the top thereof. The spiral miter gear 13 is fixed to the protrusion 54 at the upper part of the connecting shaft 5, so that rotational torque can be transmitted between the connecting shaft 5 and the spiral miter gear 13. The connecting shaft 5 is received by a metal bearing 42 provided at the lower portion of the bearing 40 at the lower portion of the extended portion 52 and is held at a predetermined height. The lower side surface of the extended portion 52 is surrounded by a side wall 44 that is fixedly provided outside the metal bearing 42. There is no gap between the side wall 44 and the upper plate 22 of the heating chamber.
The upper portion of the extension portion 52 of the connecting shaft 5 is surrounded by the sleeve 45. A sealing member 41 is provided inside the upper end of the sleeve 45 so as to be in close contact with the connecting shaft 5 in a rotatable manner. A gap is provided between the portion other than the upper end portion of the sleeve 45 and the extended portion 52. A nut 43 fixed to the sleeve 45 is provided on the outer periphery of the sleeve 45. A support plate 6 that supports the connecting shaft 3 is extended to below the sleeve 45, and the nut 43 is fixed on the extension. There is no gap between the nut 43 and the support plate 6. The sleeve 45 is held in place by the nut 43.
[0007]
An air inlet 46 penetrating the nut 43 is provided, and air pressurized by a fan (not shown) is sent from the inlet 46 into the bearing through the hose 48. The fan may be provided only for this purpose, but may be used so as to share a fan used for cooling a part such as a magnetron. That is, since the flow rate of the air used for this purpose is very small, a part of the air generated by a fan provided for cooling a part such as a magnetron may be guided to the air inlet 46.
There is a relatively large gap between the bearing 40 and the extended portion 52 of the connecting shaft 5, and air introduced from the air introduction port 46 can easily enter the gap. The air introduced into the relatively large gap is further guided downward along the lower portion of the extension portion 52 and further along the side surface portion of the extension portion 52 and flows out into the heating chamber.
[0008]
【The invention's effect】
According to the configuration of the present invention, minute air can always flow out from the inside of the bearing 40 to the inside of the heating chamber through the gap between the connecting shaft 5 and the bearing 40. As a result, it is possible to effectively prevent contaminants and the like from flowing between the connecting shaft 5 and the bearing 40, and therefore, the occurrence of troubles in the rotation of the connecting shaft is reduced.
[Brief description of the drawings]
FIG. 1 is a view showing a heat treatment apparatus according to an embodiment of the present invention using only a drive system and a turntable.
FIG. 2 is an enlarged view of a bearing 20 and a connecting shaft 5 according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Motor 3 Connection shaft 5 Connection shaft 6 Support plate 7 Turntable drive gear 9 Turntable 11 Spiral miter gear 13 Spiral miter gear 15 Connection shaft joint 22 Upper plate 40 Bearing 41 Sealing member 42 Metal bearing 43 Nut 44 Side wall 45 Sleeve 46 Air Inlet 52 Expansion part 54 Projection part

Claims (2)

加熱処理装置の加熱室内部に配置されたターンテーブルを加熱室外部に配置した駆動源によって回転駆動させるためのターンテーブル駆動機構において、
前記ターンテーブルは前記加熱室の下部に配置され、前記駆動源は前記加熱室の上部に配置されており、前記駆動源からの回転トルク前記加熱室の上部板を通じて前記ターンテーブルに伝達するように前記加熱室の上部と下部の間に延びる駆動軸と、該駆動軸を前記上部板に対して回転し得るように固定するための軸受けと、前記加熱室の上部にあって前記駆動軸と前記軸受けとの間に存在する前記駆動軸の回転を可能とするための微細な隙間を通じて前記加熱室の外部から内部へと下方に向かう空気流を発生させるための空気導入手段とを備えたことを特徴とするターンテーブル駆動機構。
In a turntable drive mechanism for driving a turntable disposed inside the heating chamber of the heat treatment apparatus to rotate by a drive source disposed outside the heating chamber,
The turntable is disposed in the lower portion of the heating chamber, wherein the driving source is disposed in an upper portion of the heating chamber, so as to transmit rotational torque from the driving source to the turntable through the top plate of the heating chamber A driving shaft extending between an upper portion and a lower portion of the heating chamber, a bearing for fixing the driving shaft so as to be rotatable with respect to the upper plate , and a driving shaft disposed on the upper portion of the heating chamber. and an air introduction means for generating an air flow towards the interior downwardly from the outside of the heating chamber through the fine gaps to allow rotation of the drive shaft is present between the bearing A turntable drive mechanism characterized by that.
前記空気導入手段は、前記軸受けの側壁の前記加熱室外部における外周に設けられた空気導入口と、該空気導入口に接続された空気導入管を備える請求項1記載のターンテーブル駆動機構。2. The turntable drive mechanism according to claim 1, wherein the air introduction unit includes an air introduction port provided on an outer periphery of the side wall of the bearing outside the heating chamber, and an air introduction pipe connected to the air introduction port.
JP21096194A 1993-10-14 1994-09-05 Turntable drive mechanism for heat treatment equipment Expired - Fee Related JP3615242B2 (en)

Priority Applications (17)

Application Number Priority Date Filing Date Title
JP21096194A JP3615242B2 (en) 1994-09-05 1994-09-05 Turntable drive mechanism for heat treatment equipment
DE69433803T DE69433803T2 (en) 1993-10-14 1994-10-13 Turntable drive mechanism
CA002512912A CA2512912C (en) 1993-10-14 1994-10-13 High speed oven
EP00112405A EP1045617B1 (en) 1993-10-14 1994-10-13 Turntable driving mechanism
EP00112427A EP1045207B1 (en) 1993-10-14 1994-10-13 Turntable heating apparatus
DE69434288T DE69434288T2 (en) 1993-10-14 1994-10-13 Drehtellerheizvorrichtung
DE69434248T DE69434248T2 (en) 1993-10-14 1994-10-13 Cooking chamber with a fan protection device
US08/436,453 US5747775A (en) 1993-10-14 1994-10-13 High speed oven
PCT/JP1994/001710 WO1995010738A1 (en) 1993-10-14 1994-10-13 High speed oven
CA002512321A CA2512321C (en) 1993-10-14 1994-10-13 High speed oven
EP00112428A EP1045208B1 (en) 1993-10-14 1994-10-13 heating chamber with a fan guard
DE69429722T DE69429722T2 (en) 1993-10-14 1994-10-13 RAPID OVEN
EP94929647A EP0696710B1 (en) 1993-10-14 1994-10-13 High speed oven
CA002151733A CA2151733C (en) 1993-10-14 1994-10-13 High speed oven
US09/015,797 US5928541A (en) 1993-10-14 1998-01-29 High speed oven using a jet of heated air
US09/015,547 US5954986A (en) 1993-10-14 1998-01-29 High speed oven
US09/293,055 US6218650B1 (en) 1993-10-14 1999-04-16 High speed oven using a jet of heated air

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21096194A JP3615242B2 (en) 1994-09-05 1994-09-05 Turntable drive mechanism for heat treatment equipment

Publications (2)

Publication Number Publication Date
JPH0878155A JPH0878155A (en) 1996-03-22
JP3615242B2 true JP3615242B2 (en) 2005-02-02

Family

ID=16597983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21096194A Expired - Fee Related JP3615242B2 (en) 1993-10-14 1994-09-05 Turntable drive mechanism for heat treatment equipment

Country Status (1)

Country Link
JP (1) JP3615242B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT241548Y1 (en) * 1996-03-04 2001-05-09 Irca Spa CONVECTOR UNIT

Also Published As

Publication number Publication date
JPH0878155A (en) 1996-03-22

Similar Documents

Publication Publication Date Title
JP3274895B2 (en) Throttle valve
JP3058583B2 (en) Rotary evaporator
JP2003053654A (en) Orbital sander
JP2002206656A (en) Spring return type operating device and spring return type valve device
JP3615242B2 (en) Turntable drive mechanism for heat treatment equipment
JP3031924B2 (en) Granulation coating equipment
JP3228935B2 (en) Rotary sprayer and method of operating the same
EP1437193A4 (en) Frictional agitating connection device and robot with the device
JPH0777193A (en) Insertion type lateral flowing type ventilator
JPH02278081A (en) Mechanical seal
US20020100131A1 (en) Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber
JP2004216525A (en) Pipe inner face polishing device
JPH11309358A (en) Kneading apparatus
CN111102183A (en) Corrosion-resistant pump valve pipeline with impurity filtering device
JPH0419322A (en) Dust removing device for radiator in industrial vehicle
KR19980066373A (en) Computer heat sink
KR100358625B1 (en) Grinding swarf collector
JPH02168098A (en) Rotary fluid machine
KR0134924Y1 (en) Rotating apparatus to grind innerside of metal pipe and connecting pipe
JP2001088006A (en) Dry type burrel device
JPH0428407A (en) Device for controlling surface shape of rolling roll
KR200436736Y1 (en) Valve Seat Lapping Apparatus Having Lapping Plate Supporter and Movable Disk Lapping Apparatus
CN209775207U (en) Film stretching machine frock
JPH0662760U (en) Fan motor
JP4981199B2 (en) Electric press with dust generation prevention mechanism

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040531

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040729

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20041004

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20041029

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071112

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081112

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091112

Year of fee payment: 5

LAPS Cancellation because of no payment of annual fees