CN209775207U - Film stretching machine frock - Google Patents

Abstract

The utility model relates to a film stretching machine frock, which comprises a closed shell and a film stretching machine main body positioned in the inner cavity of the shell; the film stretching machine body is controlled by a rotating device and is configured to rotate under the driving of the rotating device until a film expanding plane of the film stretching machine body faces downwards; further comprising a ventilation system configured to: providing air flow from top to bottom for the film stretching machine body. The tool realizes the function of clearing away extra silicon slag in the film expanding process, reduces extra damage caused by the silicon slag, and plays a role in increasing efficiency and reducing defective rate of subsequent processes of products, thereby saving cost.

Description

Film stretching machine frock

Technical Field

The utility model relates to a film stretching machine, more specifically, the utility model relates to a film stretching machine frock.

Background

At present, to the wafer that laser cutting has been accomplished, need adopt the film stretching machine to carry out the platform lifting to tensile pad pasting expands in order to the clearance between wafer and wafer, thereby reaches the clearance of demand (between 0.03 mm-0.085 mm), makes things convenient for developing of follow-up other processes.

The existing film stretching machine has single function, and the silicon slag after laser cutting can be remained on the surface of a wafer element film and is difficult to remove, so that the cutting quality of the wafer element is reduced. The film cannot be removed after the film stretching process of the film stretching machine, which is not beneficial to the development of the subsequent process.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a film stretching machine frock.

According to one aspect of the utility model, a film stretching machine tool is provided, which comprises a closed shell and a film stretching machine main body positioned in the inner cavity of the shell; the film stretching machine body is controlled by a rotating device and is configured to rotate under the driving of the rotating device until a film expanding plane of the film stretching machine body faces downwards; further comprising a ventilation system configured to: providing air flow from top to bottom for the film stretching machine body.

Optionally, the ventilation system includes an air inlet disposed at an upper end of the housing, and an air outlet disposed at a lower end of the housing;

The air conditioner also comprises an induced draft fan arranged at the air inlet and/or an exhaust fan arranged at the air outlet.

Optionally, the air inlet is further provided with a filter screen.

Optionally, the housing comprises a frame; the film stretching machine main body is rotatably connected to the rack through rotating shafts positioned on two sides of the film stretching machine main body; the rotating device is in transmission connection with a rotating shaft on one side of the film stretching machine body.

Optionally, the electrostatic eliminator is fixed on the frame; the static eliminator is configured to: eliminating static electricity on the film expanding plane turned downwards.

Optionally, the rotating device comprises a motor and a speed reducer connected with the motor; the output end of the speed reducer is in transmission connection with a rotating shaft on one side of the film stretching machine body.

Optionally, the output end of the speed reducer is in transmission connection with a rotating shaft on one side of the film stretching machine main body through a coupler.

Optionally, the apparatus further comprises a disc brake assembly disposed between the mask frame body and the frame, the disc brake assembly configured to: resistance is provided for the rotation of the film stretching machine main body all the time.

Optionally, the disc brake disc assembly comprises a disc brake disc fixed on the film stretcher main body or the rotating shaft, and a disc brake block arranged on the frame; the disc brake block is always matched with the disc brake disc.

Optionally, the number of the disc brake blocks is two, and the two disc brake blocks are respectively matched with two sides of the disc brake disc through a support arranged on the rack.

The utility model discloses a stretch film machine frock, the motor can drive and make the upset stretch film machine main part expand the membrane plane down, cooperate top-down's air current in the casing to can make the silicon sediment on wafer surface drop. The tool realizes the function of clearing away extra silicon slag in the film expanding process, reduces extra damage caused by the silicon slag, and plays a role in increasing efficiency and reducing defective rate of subsequent processes of products, thereby saving cost.

Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments of the invention, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.

Fig. 1 is the external structure schematic diagram of the film stretching machine tool of the utility model.

Fig. 2 is the utility model discloses the inner structure schematic diagram of membrane stretching machine frock.

Fig. 3 is a schematic view of the matching structure of the motor and the film stretching machine main body.

fig. 4 is the utility model discloses stretch out membrane machine frock's section schematic diagram.

Detailed Description

Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: unless specifically stated otherwise, the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

Techniques and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be considered a part of the specification where appropriate.

In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

Referring to fig. 1 and 2, the present invention provides a film stretching machine tool, which includes a closed housing 1 and a film stretching machine main body 3 located in the inner cavity of the housing 1 and controlled by a rotating device. The utility model discloses a casing 1 can include frame 2, stretches tight membrane machine main part 3 and rotates to be connected in frame 2.

Specifically, referring to fig. 2 and 3, the film stretcher main body 3 is rotatably connected to the frame 2 through rotating shafts 8 located at both sides thereof. One end of a rotating shaft 8 positioned at two sides of the film stretching machine main body 3 is supported on the frame 2 through a bearing 4, and the other end is fixed on the film stretching machine main body 3. The rotation of the film stretching main body 3 on the frame 2 is realized through the rotating shafts 8 which are symmetrically arranged on the two sides.

The rotating device of the present invention may be a structure known to those skilled in the art such as the motor 5. The output end of the motor 5 can be directly connected with the rotating shaft 8 at one side of the film stretching machine main body 3. Optionally, a speed reducer 6 is further disposed between the motor 5 and the rotating shaft 8, an output end of the motor 5 is connected to an input end of the speed reducer 6, and an output end of the speed reducer 6 is connected to the rotating shaft 8. The output torque transmitted to the rotating shaft 8 by the motor 5 can be improved through the speed reducer 6, so that the motor 5 can drive the film stretching machine main body 3 with larger mass to turn over. It is further preferred that the output of the reducer 6 is connectable to the shaft 8 by means of a coupling, the use of which is common knowledge to those skilled in the art and will not be described in detail herein.

The upset of stretching tight membrane machine main part 3 can be realized through the drive of motor 5, makes the membrane plane of expanding of stretching tight membrane machine main part 3 down to make the silicon sediment on wafer surface drop when expanding the membrane. In a specific embodiment, the motor 5 may drive the film stretching machine body 3 to turn 180 °, and the film expanding plane of the film stretching machine body 3 faces to the right lower side. The motor 5 can also drive the film stretching machine main body 3 to overturn less than or more than 180 degrees, so that the film expanding plane of the film stretching machine main body 3 faces downwards in an inclined mode.

Whole membrane machine main part 3 that stretches tight is at the upset in-process, owing to stretch tight membrane machine main part 3's asymmetric structure, in addition the weight of self can produce very big eccentric moment, and this kind of eccentric moment can be backward transmits the reduction gear through the shaft coupling, causes extra burden to the inside worm gear mechanism of reduction gear, aggravates the damage of reduction gear, can cause the profile of tooth to destroy when serious.

In order to solve this problem, a disc brake assembly is provided between the film stretching machine main body 3 and the frame 2, the disc brake assembly being configured to always provide resistance to rotation of the film stretching machine main body 3. When the motor 5 drives the film stretching machine main body 3 to rotate, the resistance of the disc brake assembly to the film stretching machine main body 3 needs to be overcome, and the problems of the motor 5 and the speed reducer 6 are solved. Simultaneously, this resistance also can resist the eccentric moment of stretching tight membrane machine main part 3 to motor 5, reduction gear to can guarantee the stability of upset, also can protect motor, reduction gear not damaged.

In a specific embodiment of the utility model, the disc brake disc assembly comprises a disc brake disc 7 fixed on the film stretching machine main body 3, and the disc brake disc 7 can be fixed on the side wall of the film stretching machine main body 3 through screws; of course, for those skilled in the art, the disc brake disc 7 may also be fixed on the rotating shaft 8, so that the disc brake disc 7 can rotate with the membrane stretching machine body 3. The disc brake disc assembly further comprises a disc brake block 10 arranged on the frame 2. Referring to fig. 3, the disc brake block 10 can be installed on the frame 2 through the bracket 9, the disc brake block 10 extends to the position of the disc brake disc 7 through the bracket 9, and is always in contact fit with the disc brake disc 7, so that the disc brake block 10 provides resistance for the rotation of the disc brake disc 7.

Preferably, two disc brake blocks 10 are provided, and are respectively matched with two sides of the disc brake disc 7 through the bracket 9.

The utility model discloses a stretch film machine frock still includes ventilation system, ventilation system is configured: providing air flow from top to bottom for the film stretching machine body.

Specifically, referring to fig. 1 and 4, the ventilation system includes an air inlet disposed at an upper end of the housing 1 and an air outlet disposed at a lower end of the housing. The air inlet and the air outlet which are respectively arranged at the two ends of the shell body and the fan can lead the air flow to circulate from top to bottom in the closed space of the shell body 1.

For example, an induced draft fan 11 may be disposed at the air inlet, and the induced draft fan 11 may introduce the outside air into the enclosed space of the housing 1.

An exhaust fan 14 may also be disposed at the air outlet, and the air in the enclosed space of the housing 1 is discharged outwards through the exhaust fan 14, so as to realize the circulation of the air flow.

In another embodiment, the induced draft fan 11 may be disposed at the air inlet, the exhaust fan 14 may be disposed at the air outlet, the induced draft fan 11 conveys the outside air into the casing, and the exhaust fan 14 exhausts the air in the casing.

In a preferred embodiment of the present invention, a filter screen 12 is further disposed at the air inlet to filter the air entering the housing 1, so as to prevent the suction of dust or foreign matters.

The utility model discloses a stretch film machine frock is when work, and the motor can drive and make the upset stretch film machine main part 3 expand the membrane plane down, and the cooperation is at casing internal top-down's air current to can make the silicon sediment on wafer surface drop. The motor can then drive the film stretcher body 3 to reset for subsequent operation.

In a preferred embodiment of the present invention, a static eliminator 13 is provided on the frame 2, refer to fig. 4. The static eliminator 13 may be, for example, an ion wind type static eliminator. When the upset of membrane machine main part 3 is tightened in the upset downwards, static eliminator 13 can be in the same place with the cooperation of membrane machine main part 3 that stretches tight to make static eliminator 13 can blow the ion wind toward expanding the planar direction of membrane, eliminate the surperficial static of wafer, thereby reach the purpose of getting rid of the surperficial silica slag of wafer.

The tool realizes the function of clearing away extra silicon slag in the film expanding process, reduces extra damage caused by the silicon slag, and plays a role in increasing efficiency and reducing defective rate of subsequent processes of products, thereby saving cost.

Although some specific embodiments of the present invention have been described in detail by way of illustration, it should be understood by those skilled in the art that the above illustration is only for purposes of illustration and is not intended to limit the scope of the invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims (10)

1. A stretch film machine frock which characterized in that: comprises a closed shell and a film stretching machine main body positioned in the inner cavity of the shell; the film stretching machine body is controlled by a rotating device and is configured to rotate under the driving of the rotating device until a film expanding plane of the film stretching machine body faces downwards; further comprising a ventilation system configured to: providing air flow from top to bottom for the film stretching machine body.

2. The tenter frame tooling of claim 1, characterized in that: the ventilation system comprises an air inlet arranged at the upper end of the shell and an air outlet arranged at the lower end of the shell;

The air conditioner also comprises an induced draft fan arranged at the air inlet and/or an exhaust fan arranged at the air outlet.

3. A tenter frame frock as claimed in claim 2, characterized in that: the air inlet is also provided with a filter screen.

4. The tenter frame tooling of claim 1, characterized in that: the housing includes a frame; the film stretching machine main body is rotatably connected to the rack through rotating shafts positioned on two sides of the film stretching machine main body; the rotating device is in transmission connection with a rotating shaft on one side of the film stretching machine body.

5. The film stretcher tool according to claim 4, characterized in that: the electrostatic eliminator is fixed on the frame; the static eliminator is configured to: eliminating static electricity on the film expanding plane turned downwards.

6. the film stretcher tool according to claim 4, characterized in that: the rotating device comprises a motor and a speed reducer connected with the motor; the output end of the speed reducer is in transmission connection with a rotating shaft on one side of the film stretching machine body.

7. The tenter frame tooling of claim 6, characterized in that: the output end of the speed reducer is in transmission connection with a rotating shaft on one side of the film stretching machine main body through a coupler.

8. The film stretcher tool according to claim 4, characterized in that: still including setting up the dish subassembly of stopping between membrane stretcher main part and frame, the dish subassembly of stopping is configured to: resistance is provided for the rotation of the film stretching machine main body all the time.

9. The film stretcher tool according to claim 8, characterized in that: the disc brake disc assembly comprises a disc brake disc fixed on the film stretcher main body or the rotating shaft and a disc brake block arranged on the rack; the disc brake block is always matched with the disc brake disc.

10. The tenter frame tooling of claim 9, characterized in that: the dish is stopped the piece and is provided with two, is in the same place through the support that sets up in the frame and the both sides cooperation of dish of stopping respectively.