JP3594465B2 - Stripping method and stripping apparatus for optical disk duplication stamper - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a duplicate stamper peeling method and a stamper peeling apparatus in a method of manufacturing a stamper for manufacturing an optical disc, and to a damage in a peeling step of peeling a duplicate stamper (a stamper copied from a master stamper or the like) from a master stamper or a mother stamper. Can be reduced as much as possible, and the stripping operation can be simplified to improve the work efficiency.
[0002]
[Prior art]
When manufacturing an optical disk, first, information bits are formed on a glass disk surface, and then nickel plating (other metals such as aluminum as well as nickel is used on the surface). The nickel plating layer is peeled off from the glass disc to form a negative master copy (stamper) made of nickel with respect to the bit on the glass disc (this is usually referred to as “a stamper”). It is called "master stamper"). Then, an oxide film is formed on the surface of the master stamper or a release agent is applied thereto (usually referred to as "peeling treatment") to facilitate peeling, and then nickel plating is further performed. A duplicate stamper (a negative stamper for the master stamper, but a positive stamper for the glass master disc, which is usually called a “mother stamper”) is formed by peeling.
Further, after the surface of the mother stamper is subjected to a peeling treatment in the same manner as described above, nickel plating is performed, and the nickel stamping is performed to form a duplicate stamper (this becomes a positive type with respect to the master stamper. Is what is called "sun stamper"). The sun stamper is mounted on a mold of a plastic injection molding machine, and mass-produced optical disc substrates made of polycarbonate or acrylic resin. In order to separate these "master stamper from mother stamper" or "mother stamper from sun stamper" respectively, make a cut with a sharp blade such as a cutter on the periphery of the overlapping surface of both, then pull apart by hand Was peeled off.
A method of duplicating a stamper by electroforming and an apparatus therefor are conventionally known, and the structure of the electroforming jig is schematically shown in FIG. This is composed of a mounting plate 11 and a fixing ring 12 which covers the mounting plate 11 and fixes the stacked master stamper 15. The fixing ring 12 has a lower surface and an outer peripheral upper surface of the mounting plate 11. There is an O-ring 13 for sealing the space between them, and an O-ring 14 for pressing the upper surface of the master stamper 15 and sealing the space with the upper surface.
While the outer periphery of the master stamper 15 is pressed by the O-ring 14 while covering the fixing ring 12, the electroforming jig G is mounted on the electroforming tank, and an aluminum metal film is formed on the upper surface of the master stamper 15 (by deposition). Let it. Although the thickness of the aluminum metal film formed on the upper surface of the master stamper 15 is uniform, it is thinner in the vicinity of the O-ring 14 as it is closer to the O-ring 14, and the thickness is zero when it comes into contact with the O-ring 14. Is well known. As described above, since the replication stamper is extremely thin in the vicinity of the O-ring 14, that is, in the outer peripheral portion, the adhesion force to the master stamper is weak, and the strength of the outer peripheral portion is also weak. For this reason, when the fixing ring 12 is detached from the mounting plate, a local peeling occurs on the outer periphery of the duplication stamper at the moment when the O-ring 14 separates from the surface of the master stamper 15, and the gap between the master stamper 15 and the duplication stamper is generated. Electroforming liquid or air may suddenly enter the contact surface and damage the stamper.
Also, when the replication stamper is peeled off, the electroforming liquid may enter the close contact surface between the master stamper and the replication stamper, adhere to the back surface of the replication stamper, and stain it. To prevent this, the electroforming jig is taken out of the electroforming tank, washed with water and dried, and then the electroforming jig is disassembled and the polymer of the master stamper and the duplicate stamper is removed. , And then the duplicate stamper is peeled off from the master stamper.
By the way, when the duplication stamper is manually peeled off from the master stamper, there is a possibility that a gap between the two stampers is likely to occur during the peeling operation due to a weak adhesion between the both surfaces, and the accuracy of the recorded pit information may be impaired. There is. For this reason, it is known that a stamper is peeled off by a master peeling device so that no displacement occurs between the two during the peeling operation (see Japanese Patent Application Laid-Open No. Hei 8-235646). The outline of this known peeling device will be described with reference to FIGS.
A fixed base 28 is fixed to the upper surface of the gantry 21, and a lower clamp member 29 is placed on the fixed base 28, and is fixed by an appropriate mounting bracket. The lower clamp member 29 is disposed directly below the upper clamp member 25. A horizontal mounting surface 30 is provided on the upper surface of the lower clamp member 29, and an annular magnet 31 is embedded in the mounting surface 30.
The outer diameter of the upper clamp member 25 is smaller than the diameter of the polymer of the master stamper (master) A and the stamper B (replica stamper; the same applies hereinafter), and the outer diameter of the lower clamp member 29 is also smaller than that of the polymer. Smaller than the diameter.
After an oxidizing agent film is formed on the surface of the master stamper A, a nickel stamp is applied to form a stamper B, and a polymer of the master stamper A and the stamper B is placed on the lower clamp member 29 with the master stamper A down. It is mounted on the mounting surface 30. At this time, since the mounting surface 30 is a horizontal surface, the overlapping surface of the master stamper A and the stamper B is also horizontal. Next, the upper clamp member 25 immediately above the lower clamp member 29 is lowered in the vertical direction, and the master stamper A and the stamper B are sandwiched by both clamp members 25 and 29. Therefore, the master stamper A and the stamper B are immovably restrained by the clamp members 25 and 29, the master stamper A is attracted by the magnet 31, and the stamper B is attracted by the magnet 27.
Next, when the upper clamp member 25 is raised by driving the cylinder 24 fixed to the bracket 23 of the column 22, the stamper B attracted by the magnet 27 of the upper clamp member 25 rises together with the upper clamp member 25. I do. That is, since the stamper B rises in a direction exactly perpendicular to the overlapping surface with the master stamper A, the stamper B is not displaced from the master stamper A at all and is separated from the master stamper A. Therefore, the precision of the bit information recorded by the master stamper A and the stamper B being locally rubbed during the peeling operation is not impaired. In the above, the polymer of the master stamper A and the stamper B is detached from the electroforming jig G, and attached to the lower clamp member 29 to prepare for the peeling operation of the stamper B. By the way, the thickness of the stamper B (usually about 0.3 mm), which is a plating layer, is extremely thin because the periphery thereof is defined by the O-ring of the electroforming jig. Close to zero. For this reason, when the electroforming jig G is disassembled and the master stamper (master) is removed therefrom, the periphery of the duplicating stamper is peeled off, and the peeling is performed on the vacuum layer between the master stamper A (master) and the stamper B. Air suddenly enters from the portion, and the stamper B is further peeled off locally. Then, the stamper B vibrates in the local peeling portion, and the master stamper A and the stamper B repeat contact and separation violently. As a result, there is a large possibility that the information recording bit and the groove are damaged. In order to reduce the occurrence of such damage as much as possible, it is necessary to disassemble the electroforming jig G to remove the master and the duplicate stampers A and B, and to mount the stampers A and B on a peeling device. Be very careful. This makes the operation inefficient. These problems are attributable to the necessity of removing the master and duplicate stampers A and B from the electroforming jig G and attaching them to the lower clamp member of the peeling device. This is a problem that can be solved by making the removal and mounting work unnecessary.
[0003]
[Problem to be solved]
An object of the present invention is to devise a method of mounting a master stamper (master) in a peeling device and a mechanism for holding the master stamper in a peeling device so as to solve or avoid the above-mentioned problems of the conventional technology.
[0004]
[Measures taken to solve the problem]
Means taken to solve the above problem is configured by the following elements, assuming a peeling method or a peeling device for peeling a duplicate stamper from a master stamper using a peeling device having a lower clamp member and an upper clamp member. Things.
(B) After forcibly drying the electroformed jig taken out of the electroforming tank and washed with water, the electroformed jig is directly mounted on a peeling device;
(B) adsorbing the master stamper to the mounting plate of the electroforming jig; (c) connecting the upper clamp member of the peeling device to the fixing ring of the electroforming jig and adsorbing the duplicate stamper to the upper clamp member. thing.
[0005]
[Action]
The procedure from electroforming to stamper peeling in the prior art is as follows.
"Set the master stamper on the electroforming jig" ... "Electroforming" ... "Rinse the back of the electroforming jig and the duplicating stamper" ... "Dry the back of the electroforming jig and the duplicating stamper"-"Electroforming jig disassembly" ... "Removal of polymer from master stamper and copy stamper" ... "Mounting of polymer of master stamper and copy stamper to stamper peeling device" ... "Stamper Peeling ".
On the other hand, the procedure from electroforming to stamper peeling in the present invention is as follows. "Set the master stamper on the electroforming jig" ... "Electroforming" ... "Rinse the back of the electroforming jig and copy stamper" ... "Forcibly dry the back of the electroforming jig and copy stamper" .. "Attaching the electroforming jig holding the master stamper to the stamper peeling device" ... "simultaneous dismantling of the electroforming jig and stamper peeling".
In short, it is the basic idea of the present invention to eliminate the above-mentioned problem by simultaneously performing the dismantling operation of the electroforming jig and the peeling operation of peeling the duplicate stamper from the master stamper, and from the electroforming to the stamper peeling. Is a simple difference between the present invention and the prior art.
Next, the operation will be described with reference to FIG.
By forcibly drying the electroforming jig G taken out of the electroforming tank, the cleaning water adhered to the surface of the replication stamper 16 and the surface of the electroforming jig G is completely removed, and the periphery of the master stamper 15 is pressed. The cleaning water that has entered the gap between the O-ring 14 and the outer peripheral edge of the duplicating stamper 16 is completely removed. The forcibly dried electroforming jig G is mounted on the lower clamp member 41 of the peeling device, the upper clamping member 42 is connected to the fixing ring 12 of the electroforming jig G, and the duplicate stamper 16 is attracted to the upper clamping member 42. Let it. During this time, since the O-ring 14 remains in close contact with the outer peripheral edge of the master stamper 15, the outer periphery of the duplication stamper 16 does not peel off locally from the master stamper 15, and the above-mentioned local peeling accompanies this local peeling. There is no possibility that such a problem will occur.
Since the master stamper 15 is held by suction on the mounting plate 11, and the replica stamper 16 is sucked by the suction means 43 of the upper clamp member, the upper clamp member 42 is moved upward as in the above-mentioned conventional peeling apparatus. When moved, the fixing ring 12 is disengaged from the lower clamp member 41, and at the same time, the replication stamper 16 is peeled off from the master stamper 15 and removed.
When the O-ring 14 comes off the outer peripheral edge of the master stamper 15, the entire copy stamper 16 is simultaneously peeled off from the master stamper 15, so that local peeling occurs, and the close contact surface between the master stamper 15 and the copy stamper 16 therefrom. The outside air does not suddenly enter (the contact surface has a negative pressure and suddenly enters due to vacuum breakage at this portion), and as a result, the copy stamper 16 does not vibrate locally. When local contact (retouch) between the duplication stamper and the master stamper is repeated due to this local vibration, fine grooves of the duplication stamper and bits for recording information are damaged by this. As described above, the local vibration of the replication stamper is prevented, so that the above-mentioned damage due to the vibration is avoided.
In addition, when the electroforming jig is dried to the extent that is usually performed, there is a high possibility that a small amount of moisture remains in the minute gap between the O-ring 14 and the master stamper 15. For this reason, when the copy stamper 16 is peeled off at the same time as the O-ring 14 separates from the upper surface of the master stamper 15, the O-ring 14 is generated on the outer periphery of the copy stamper at the moment when the “crush” disappears and the O-ring 14 rises from the upper surface of the master stamper 15. The above-mentioned residual moisture rapidly penetrates from the locally peeled surface, and damages the replication stamper. On the other hand, the present invention completely removes the residual moisture by forcibly drying the washed electroformed jig and completely removing the residual moisture, thereby disassembling the electroformed jig and removing the stamper. At the same time.
[0006]
Embodiment
Embodiment 1
Place the electroforming jig in an oven and heat it for a specified time to dry it.
Since the forced drying by the oven is performed by evaporating the cleaning water to remove the water, the water remaining in the fine grooves and gaps can be completely and completely removed in a short time.
Embodiment 2
Blow hot air on the electroforming jig for a predetermined time to force dry.
Note that the higher the heating temperature and hot air temperature in Embodiments 1 and 2, the shorter the drying treatment time, but if the temperature is high, the thermal deterioration of the master and the duplicate stamper, or the time between the stamper and the master stamper, It is needless to say that the heating temperature should be limited to the limit that does not damage the stamper (it depends on the metal material, the thickness of the stamper, etc., so it cannot be decided unconditionally) because the stamper may be damaged due to the difference in thermal expansion of the stamper .
Embodiment 3
The fixing ring of the electroforming jig is detachably connected to the upper clamp member of the peeling device by magnetic force.
The above-mentioned magnetic force only needs to be strong enough to support the weight of the fixing ring. Since the fixing ring is lightweight, it is relatively easy to remove the fixing ring from the upper clamp member against the magnetic force.
Embodiment 4
The fixing ring of the electroforming jig is detachably connected to the upper clamp member of the peeling device by the suction cup.
Embodiment 5
The fixing ring of the electroforming jig is detachably connected to the upper clamp member of the peeling device by vacuum suction means.
Embodiment 6
The fixing ring of the electroforming jig is detachably connected to the upper clamp member of the peeling device by a hook provided on the upper clamp member and capable of being detached.
Since the retaining ring is mechanically connected to the upper clamp by hooks, the connection is not disconnected.
When the upper clamp member is lowered to approach the fixing ring, the hook provided on the outer periphery of the upper clamp member contacts the outer periphery of the fixing ring, and is automatically engaged with the outer periphery of the fixing ring by the biasing spring. What should I do? The mechanism of such an automatic locking hook itself is conventionally known.
Embodiment 7
The means for adsorbing the master stamper on the mounting plate of the electroforming jig and the means for adsorbing the duplicate stamper on the upper clamp member are vacuum suction means. The attachment and detachment of the master stamper to and from the mounting plate and the attachment and detachment of the duplicate stamper to the upper clamp member can be performed easily and easily.
Embodiment 8
The mounting plate and the suction plate of the upper clamp member are porous plates, and the master stamper or the duplicated stamper is directly vacuum-sucked to the mounting plate or the suction plate of the upper clamp member.
The entire lower surface of the master stamper or the entire upper surface of the duplicating stamper can be adsorbed to the upper surface of the mounting plate or the lower surface of the adsorbing plate of the upper clamp member with a uniform adsorbing force. It does not cause any adverse effects.
Embodiment 9
The mounting plate and the suction plate of the upper clamp member are formed of a porous plate formed by processing a fine hole having a diameter of 2 mm or less.
The distribution of micropores in the porous plate can be made uniform over the entire surface.
Embodiment 10
The means for adsorbing the master stamper on the mounting plate of the electroforming jig and the means for adsorbing the duplicate stamper on the upper clamp member are magnetic attraction means. Since the peeling resistance from the stamper is very small, the attraction force of these magnets may be very small, and therefore, the master stamper from the mounting plate or the duplicate stamper from the upper clamp member can be easily and easily removed.
Embodiment 11
The support bracket 44 of the upper clamp member (see FIG. 4) is vertically movably supported by the vertical support 45, and the support bracket 44 is driven in the vertical direction by the vertical drive means 46 built in the vertical support 45.
The vertical guide mechanism for the support bracket 44 by the vertical support 45 can be made precise. Therefore, the stamper can be accurately separated from the master stamper in the vertical direction.
Embodiment 12
The lifting drive means 46 built in the vertical support 45 is an air cylinder.
The lifting drive means can be simplified, and the shock at the start and stop thereof can be reduced.
Embodiment 13
The lifting drive means 46 incorporated in the vertical support 45 is a feed screw mechanism driven by a pulse motor.
The lifting speed of the upper clamp member can be freely and finely controlled, so the peeling speed of the replica stamper from the master stamper, the lifting stroke of the upper clamp member, and the speed and acceleration near the bottom dead center and near the top dead center can be freely adjusted. Can be controlled.
[0007]
【Example】
The electroforming jig is mounted on the lower clamp member of the peeling device, and is fixed by the lower clamp member.
When forcibly drying in an oven, the heating temperature is suitably in the range of 60 to 80 degrees Celsius, depending on the material of the stamper. In this case, the drying can be completed in one hour or less.
In the case of forced drying using hot air, the temperature of the hot air is preferably about 80 degrees Celsius to room temperature, and the flow rate of the hot air around the electroforming jig in this case is desirably 20 m / sec or less.
Further, the attraction force of the upper clamp member to the replica stamper by the attraction means and the attraction force of the mounting plate to the master stamper are somewhat larger than the value corresponding to the sum of the peeling resistance between the master stamper and the replication stamper and the weight of the replication stamper. However, if it is larger than this, it is not easy to separate the master stamper and the replication stamper from their respective suction surfaces. On the other hand, if the suction comes off during the stamper peeling operation, the replication stamper will be completely damaged, and it is necessary to secure such a suction power that absolutely no such phenomenon occurs. For this reason, it is appropriate to have an adsorption force of 1.5 to 3 times the sum of the peel resistance between the master stamper and the replication stamper and the weight of the stamper.
Furthermore, if the separation speed of the upper clamp member from the lower clamp member is too high, the stamper will be damaged. Therefore, it is desirable that the speed is as low as possible from the safety side. However, the duplicate stamper is made of aluminum metal and has a thickness of 0 mm. In the case of 0.3 mm and a diameter of 240 mm, there is no particular problem if the separation speed is 100 mm / sec or less. The optimum speed of the separation is different depending on various conditions such as the material of the replication stamper, the thickness, the diameter, and the like.
[0008]
【The invention's effect】
Take out the electroforming jig from the electroforming tank, rinse it with water, dry it forcibly and completely wipe off the remaining moisture, attach the electroforming jig as it is to the lower clamp member of the peeling device, The fixing ring is connected to the upper clamp member, the master stamper is sucked and held on the mounting plate, and the duplicate stamper is sucked on the upper clamp member with the suction member. At the same time as dismantling, the replica stamper is peeled off from the master stamper, so that damage due to local peeling of the replica stamper can be prevented, product yield can be improved, and product reliability can be improved. Can be.
In addition, since the electroforming jig is mounted on the stamper peeling device without being dismantled and the jig is dismantled and the stamper is peeled off in a single operation, the operation steps are substantially partially omitted. Therefore, work efficiency is improved.
Furthermore, by simply attaching the electroforming jig to the stamper peeling device, all subsequent peeling work can be performed by the stamper peeling device, so that the stamper peeling operation is simpler than when using a conventional peeling device. (In the prior art, a mounting plate is mounted on a lower clamp member. When the mounting plate is sandwiched between the lower clamp member and the upper clamp member, a cutter is easily inserted between the master stamper and the duplicating stamper to facilitate peeling. However, in the present invention, such manual work is not required at all after the electroforming jig is mounted on the lower clamp member.)
Furthermore, since the forcible drying is performed with the electroforming jig as it is, there is no possibility that the stamper may be peeled off with the cleaning water remaining in the fine grooves, pits and the like of the stamper. Therefore, the quality of the duplicating stamper does not deteriorate.
[Brief description of the drawings]
FIG. 1 is a sectional view of an electroforming jig.
FIG. 2 is a perspective view of a conventional stamper peeling device.
FIG. 3 is a perspective view showing a state in which a polymer of a master stamper and a duplicating stamper is sandwiched between an upper crank member and a lower clamp member in the prior art.
FIG. 4 is a schematic view of a stamper peeling device of the present invention.
[Description of sign]
G: Electroforming jig 11: Mounting plate 12: Fixing ring 13: O-ring 14: O-ring 15: Master stamper 16: Duplicating stamper 41: Lower clamp member 42: Upper clamp member 43: Suction means 44: Support bracket 45: Vertical support 46: lifting drive means

Claims (14)

From a master stamper using a peeling device having a lower clamp member and an upper clamp member, in a peeling method of peeling a duplicate stamper,
After taking out from the electroforming tank and forcibly drying the washed electroforming jig, the electroforming jig is directly attached to a peeling device,
Attach the master stamper to the mounting plate of the electroforming jig,
While the upper clamp member of the peeling device is detachably connected to the fixing ring of the electroforming jig, the replica stamper is adsorbed to the upper clamp member,
A method for separating an optical disk duplicating stamper, which raises an upper clamp member, dismantles an electroforming jig, and exfoliates a duplicating stamper from a master stamper. Using a peeling device having a lower clamp member and an upper clamp member, in a peeling device that peels the replication stamper from the master stamper,
An adsorption means for adsorbing the master stamper is provided on the mounting plate of the electroforming jig,
A coupling means for detachably connecting a fixing ring of an electroforming jig and an adsorption means for adsorbing a copy stamper are provided on an upper clamp member supported vertically by a vertical support,
An optical disk duplicating stamper peeling device that lifts an upper clamp member, dismantles an electroforming jig, and peels a duplicating stamper from a master stamper. 2. The method according to claim 1 , wherein the electroforming jig is placed in an oven, heated for a predetermined time and forcedly dried. 2. The method for peeling off an optical disk duplicating stamper according to claim 1 , wherein hot air is blown onto the electroforming jig for a predetermined time to forcibly dry. 3. An apparatus according to claim 2 , wherein the means for detachably connecting the fixing ring of the electroforming jig to the upper clamp member is a magnetic attraction means. 3. An apparatus according to claim 2 , wherein the means for detachably connecting the fixing ring of the electroforming jig to the upper clamp member is a suction cup. 3. The peeling device for an optical disk duplicating stamper according to claim 2 , wherein the means for detachably connecting the fixing ring of the electroforming jig to the upper clamp member of the peeling device is a vacuum suction means. 3. An apparatus according to claim 2 , wherein the means for adsorbing the master stamper on the mounting plate of the electroforming jig and the means for adsorbing the duplicate stamper on the upper clamp member are vacuum suction means. 3. The optical disk duplicating stamper peeling apparatus according to claim 2 , wherein the mounting plate and the adsorbing plate of the upper clamp member are porous plates, and the master stamper or the duplicating stamper is directly vacuum-adsorbed to the mounting plate or the adsorbing plate of the upper clamp member. 3. An apparatus for removing an optical disk duplicating stamper according to claim 2 , wherein the mounting plate and the suction plate of the upper clamp member are formed of a porous plate having a diameter of not more than 2 mm and formed by fine holes. 3. An apparatus according to claim 2 , wherein the means for adsorbing the master stamper to the mounting plate of the electroforming jig and the means for adsorbing the duplicate stamper to the upper clamp member are magnetically attracting means. 3. The optical disk duplicating stamper peeling device according to claim 2 , wherein the support bracket of the upper clamp member is supported on the vertical support so as to be movable up and down, and the support bracket is moved in the vertical direction by means of a vertical drive built in the vertical support. 13. The peeling device for an optical disk duplication stamper according to claim 12 , wherein the lifting drive means incorporated in the vertical support is an air cylinder. 13. The peeling device for an optical disk duplicating stamper according to claim 12 , wherein the lifting drive means incorporated in the vertical support is a feed screw mechanism driven by a pulse motor.

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