JP2000348392A - Method for peeling stamper for optical disk and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a stamper peeling device which is capable of sagely executing a peeling start point processing in a stamper reproduction stage with good workability without damaging stamper surfaces. SOLUTION: This apparatus is provided with a work holding station 20 which has a turntable 21 for vacuum attracting works and a releaser 30 for vacuum attracting the one stamper of the works as a work releasing mechanism and is further provided with injection nozzles for injecting compressed air to the outer peripheral parts of the tight contact parts of the stampers in the works with each other on the turntable 21. The releaser 30 is made freely movable relatively with respect to the turntable 21 and apart in a direction perpendicular to the tight contact surface of the works by a lifting mechanism. In the peeling start point processing, the works are held by the turntable 21 and the releaser 30 and while there are integrally rotated, the compressed air is blown from the injection nozzles to the works.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a master stamper and a mother stamper which are in close contact with each other after electroforming in a family making process of a stamper for an optical disk for duplicating a mother stamper from a master stamper or duplicating a sun stamper from the mother stamper. Alternatively, the present invention relates to a method of separating a mother stamper and a sun stamper from each other, and an apparatus suitable for performing the method.

[0002]

2. Description of the Related Art A conventional method for manufacturing a stamper for manufacturing an optical disk will be described. First, information pits are formed on a glass disk by using a photoresist. Based on this, nickel electroforming is performed, and the master stamper deposited in a negative manner on the glass disk is peeled off from the glass disk. Next,
Similarly, the electrodes are repeated to duplicate the master stamper from the mother stamper and the sun stamper from the mother stamper (generally referred to as family making), and provide them as stampers for molding optical disks.

[0003] In the step of separating the mother stamper from the master stamper and the sun stamper from the mother stamper, an operator firstly prepares a polymer of the mother stamper and the master stamper and a polymer of the sun stamper and the mother stamper (these are used as workpieces). Is cut using a sharp tool such as a cutter (this is a process for peeling only the outer peripheral portion of the stamper, and is referred to as a peeling start point process). Thereafter, the two are separated by hand.

[0004]

However, in the above-mentioned peeling starting point treatment, all the operations have to be performed manually, and it also requires skill, which is inefficient and the production efficiency is low. Furthermore, since a sharp tool such as a cutter is used, there is a possibility that an injury may occur or a stamper surface (the above-mentioned polymerized surface) may be damaged.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a stamper peeling method and a stamper peeling method capable of performing a peeling start point treatment in a stamper duplication step with good workability and without damaging the stamper surface. It is to provide the device.

[0006]

According to a first aspect of the present invention, there is provided a method for separating an optical disk stamper from a master stamper or a sun stamper from a mother stamper. Work in close contact after electroforming, ie, master stamper and mother stamper,
When the mother stamper and the sun stamper are peeled off from each other, a pressurized gas is blown from the outer peripheral side of the work to the contact portion between the stampers in the work in the peeling start point treatment to peel off the outer peripheral part of the work, and then one stamper is removed from the other. These stampers are separated by moving them away from each other in the direction perpendicular to the contact surfaces between the stampers.

According to a second aspect of the present invention, there is provided an optical disk stamper separating apparatus for performing the method of the first aspect, wherein the optical disk stamper holds a work holding station as a work separating mechanism and one of the stampers of the work. And a pressurized gas ejecting means for blowing a pressurized gas to a contact portion between stampers of the work held in the work holding station, and at least one of the work peeling mechanism. Is moved relative to the other workpiece peeling mechanism by the lifting mechanism, and
The stamper is characterized in that it can move freely in the direction perpendicular to the contact surface between the stampers.

According to a third aspect of the present invention, in the optical disk stamper peeling device, the work holding station includes a rotatable (rotating) turntable for vacuum-sucking the work. I do.

According to a fourth aspect of the present invention, there is provided an optical disk stamper peeling device, wherein the turntable is capable of adjusting a rotation speed and is provided with a brake mechanism for forcibly stopping the rotation. It is characterized by having.

[0010] According to a fifth aspect of the present invention, in the optical disk stamper peeling device, the releaser can be moved relatively to and away from the work holding station and vacuum suction of the work is performed. Means is provided.

According to a sixth aspect of the present invention, in the optical disc stamper peeling device, the releaser is capable of adjusting a moving speed of the releaser relative to the work holding station.

According to a seventh aspect of the present invention, there is provided an optical disk stamper peeling device according to the second, third, fourth, fifth, or sixth aspect.
At least one of the pressure of the pressurized gas, the pressure of the pressurized gas, the injection angle of the pressurized gas to the workpiece, the hole diameter of the injection port, and the separation distance between the injection port and the work is variable, and the separation distance is variable. In some cases, the injection port is freely movable toward and away from the workpiece.

[0013]

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a flowchart showing a manufacturing process of the mother stamper, and FIG. 2 is a cross-sectional view showing a main structure of an electroforming jig used in the electroforming process of FIG. FIG. 3 is FIG.
(A) is a plan view showing a polymer (work) of a mother stamper and a master stamper obtained in the electroforming process of FIG.
(B) is a front view. FIG. 4 is a schematic plan view showing the surface form of the mother stamper obtained in the electroforming step of FIG. FIG. 5 is a schematic longitudinal sectional view showing a peeling device for a stamper for an optical disk, and FIG. 6 is an explanatory diagram showing a peeling start point process of the stamper by the peeling device of FIG. FIG. 7 is a configuration explanatory view of a compressed air injection device for performing the separation starting point processing of FIG.

First, the structure of the electroforming jig will be described with reference to FIG. 2. This electroforming jig defines a mounting plate 11 on which a master stamper A (see FIG. 3) is mounted and a deposition range of a duplicate stamper. O-rings for sealing specified
3. A member such as a clamp (not shown) for connecting the upper part 14 of the electroforming jig and the lower part 15 of the electroforming jig is provided. The electroforming jig upper part 14 is a lid part having O-rings 12 and 13, and the electroforming jig lower part 15 is a mounting plate 11.
Is a part mainly constituted. In FIG. 2, reference numeral 16 indicates an insertion portion of the electroforming apparatus into the shaft. The mounting plate 11 is made of a conductive material because it serves to flow an electric current to the master stamper A mounted on the mounting plate 11, and is usually made of titanium or stainless steel.

Next, a mother stamper B (see FIG. 3)
The replication electroforming step and the peeling step of peeling the mother stamper B obtained here from the master stamper A will be described with reference to the flowchart of FIG. Upper and lower electroforming jig 1
4 and 15, and the master stamper A is placed on the mounting plate 11 (step S1). Next, the electroforming jig is immersed in an electroforming tank (not shown) to perform electroforming (step S2). After the electroforming is completed, the electroforming jig is lifted up, subjected to simple washing and drying, and the electroforming jig is disassembled (steps S3 to S5). After taking out the polymer (work) as it is (Step S6),
The mother stamper B is separated from the master stamper A by the following device / method (step S7). When copying the sun stamper from the mother stamper B, the mother stamper B is placed on the mounting plate 11 instead of the master stamper A (not shown).

The shape of the work is as shown in FIGS. 3 (a) and 3 (b), where φMa is the diameter of the master stamper A, φ
Mb indicates the diameter of the mother stamper B (φMa
Is larger than φMb). In FIG. 3B, the lower surface of the mother stamper B overlaps and adheres to the groove forming surface of the master stamper A.
The groove G of the master stamper A is transferred as shown in FIG. For example, as shown in FIG. 4, the diameter of the mother stamper B is φ215 to φ240 (the unit is mm, the same applies hereinafter), and the outer diameter × inner diameter of the groove area is φ120 × φ4.
4 respectively.

Next, the mother stamper B obtained in the electroforming step is peeled off from the master stamper A (or
The structure of an apparatus for peeling off the sun stamper from the mother stamper and a peeling method using the apparatus will be described with reference to FIGS.

This peeling apparatus includes a work holding station 20 having a turntable 21 for mounting and vacuum-sucking a work (not shown), a releaser 30 for vacuum-sucking one of the stampers constituting the work, and a work holding. A supporting / driving unit 40 for supporting and driving the station 20 and the releaser 30, and a compressed air injection device 50 for blowing compressed air to a contact portion between the stampers of the work held on the turntable 21 (see FIG. 7). And

The turntable 21 includes a support / drive unit 40
The vacuum suction hole formed on the surface (upper surface) of the turntable 21 communicates with a flow path 22a formed on the rotating shaft 22, and the flow path 22a is further depressurized. It is connected to a vacuum pump (not shown) via a pipe 23. In addition, the rotating shaft 22,
Accordingly, the turntable 21 is rotated by a rotating device including the motor 24, the pair of pulleys 25 and 26, and the belt 27.

The releaser 30 is supported by a support member 43 provided at the upper end of an elevating shaft 42 of the support / drive unit 40 and extends in the horizontal direction. And a member 32. The suction hand 31 is freely rotatable around a central axis 33 (which can be manually turned), and the suction member 32 is connected to a vacuum pump (not shown) via a pressure reducing pipe 34. The elevating shaft 42 and thus the releaser 30 are vertically movable integrally with the support member 43 in the vertical direction. Further, a spring is provided at a tip end portion (lower end portion in FIG. 5) of the suction member 32 to reduce an impact when the suction member contacts the work surface.

As shown in FIG. 7, the compressed air injection device 50 includes an air source 51, a filter 52, a regulator 5
The 3, 2 port valve 54, the flow control valve 55, and the compressed air injection nozzle 56 are connected in this order, and the injection port of the compressed air injection nozzle 56 is arranged so as to face the upper surface of the turntable 21. This compressed air injection nozzle 5
In No. 6, (1) the injection pressure of the compressed air, (2) the injection angle of the compressed air to the work, (3) the hole diameter of the injection port, and
(4) Both the separation distance between the injection port and the work is variable, and the injection port is freely movable toward and away from the work.

In this embodiment, the releaser 30 can move up and down in the vertical direction, and the turntable 21 has a fixed vertical position. On the contrary, only the turntable 21 can move up and down in the vertical direction. , Both the turntable 21 and the releaser 30 (suction hand 31) can be moved up and down in the vertical direction. In any case,
It is sufficient that at least one of these members can be moved relative to the other by a lifting mechanism, and can be freely moved in the direction perpendicular to the contact surfaces between the stampers.

Further, the rotation speed of the turntable 21 is made variable, automatic and manual brake mechanisms for forcibly stopping the rotation of the turntable 21 are provided, and the suction hand 31 for the turntable 21 is provided.
It is preferable that the moving speed of the separation can be adjusted freely.

Next, a method of separating the stamper by the above-described separating apparatus will be described. The work W in the form shown in FIG. 3 is placed on the turntable 21 in FIG. 5 as shown in FIG. 6, and the work W is sucked by reducing the pressure in the flow path 22a. The suction hand 31 is gradually lowered, and the suction member 32 is
Is pressed against the surface of the work W at a low pressure, and the injection port of the injection nozzle 56 is directed to the contact portion of the work W between the stampers. Next, the turntable 21 is rotated at an appropriate speed by the motor 24. Thereby, the releaser 30 rotates integrally with the turntable 21 as shown in FIG. In this state, compressed air is injected from the injection nozzle 56. This is the separation starting point processing.

In the electroforming step, the gap between the stampers that are in close contact with each other is in a vacuum state. By sending compressed air to the entire outer peripheral portion of the contact surface by the peeling start point treatment, vacuum breakage is promoted, and the outer peripheral portion of the contact surface is efficiently peeled over the entire surface. Next, the surface of the work W is sucked by the suction hand 31, and the elevating shaft 42 is gradually raised.
Thereby, the above-mentioned contact surface is peeled over the entire surface, and the step of peeling the stamper is completed. In this case, since the master stamper A and the mother stamper B are separated from each other in a direction perpendicular to the contact surface, the bit information accuracy of these stampers is reduced due to the displacement of the stamper at the time of separation. Never do.

In the compressed air injection device 50, (1) the compressed air injected to the stamper surface is purified by the filter 52, and (2) the pressure of the compressed air injected to the stamper surface is controlled by the regulator 53. (3)
Compressed air is injected at an arbitrary timing by the two-port valve 54, and (4) the amount of compressed air injected to the stamper surface is controlled by the flow control valve 55.

In the above-described embodiment, one compressed air injection nozzle 56 is provided and the work W is rotated. However, a large number of compressed air injection nozzles 56 are provided at equal angular intervals so as to surround the work W. When it is arranged, the rotation mechanism of the work W can be omitted. Although both the turntable 21 and the suction hand 31 hold the work by vacuum suction, a mechanical chuck or a magnetic chuck may be employed instead.

[0028]

As apparent from the above description, the following effects can be obtained according to the present invention. (1) The invention according to Claims 1 and 2 Since the starting point treatment of the stamper is performed by injection of pressurized gas, the starting point treatment can be performed safely with good workability and damage to the stamper surface. And careful work is reduced.

(2) The invention according to claim 3 Since the turntable for vacuum-sucking the work is provided, the separation starting point treatment can be performed uniformly and efficiently over the entire outer peripheral portion of the work, and the pressure of the pressurized gas can be reduced. It is sufficient to provide one injection nozzle.

(3) The invention according to claim 4 Since the rotation speed is adjustable and the turntable provided with the brake mechanism is provided, the separation starting point processing can be performed more efficiently.

(4) The invention according to claim 5 Since the releaser can be moved relatively away from the work holding station, the work holding station can be provided at a fixed position. It will be easier.

(5) The invention according to claim 6 is provided with a releaser capable of adjusting the relative moving speed with respect to the work holding station. By adjusting the separating moving speed in accordance with the difficulty of peeling,
The peeling step after the peeling start point treatment can be performed more reliably.

(6) The invention according to claim 7 Since the pressurized gas injection means having a predetermined structure is provided, the separation starting point treatment can be performed under optimum conditions. For example, when the injection hole diameter and the air pressure of the compressed air injection nozzle are made variable, it is possible to perform a peeling start point process suitable for electroforming specifications (adhesion strength and the like) of the stamper. In addition, by making the injection angle and injection distance of the compressed air variable, it is possible to perform a start point process that meets specifications such as the outer diameter of the stamper.

[Brief description of the drawings]

FIG. 1 is a flowchart showing a manufacturing process of a mother stamper according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a main structure of an electroforming jig used in the electroforming step of FIG.

FIGS. 3A and 3B show a work obtained by superimposing a mother stamper and a master stamper (or a sun stamper and a mother stamper) obtained by electroforming, wherein FIG. 3A is a plan view and FIG. 3B is a front view.

FIG. 4 is a schematic plan view showing a surface form of a mother stamper obtained by electroforming.

FIG. 5 is a schematic longitudinal sectional view showing an optical disk stamper peeling device according to the embodiment of the present invention.

FIG. 6 is an explanatory diagram showing a separation start point process of a stamper by the separation device of FIG. 5;

7 is an explanatory diagram of a configuration of a compressed air injection device for performing a separation start point process of FIG. 6;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Mounting plate 14 Electroforming jig upper part 15 Electroforming jig lower part 20 Work holding station 21 Turntable 22 Rotating shaft 22a Flow path 23 Decompression piping 24 Motor 25 Pulley 26 Pulley 27 Belt 30 Releaser 31 Suction hand 32 Suction member 33 Center shaft 34 Decompression pipe 40 Supporting / driving part 41 Mounting base 42 Elevating shaft 43 Support member 50 Compressed air injection device 56 Compressed air injection nozzle A Master stamper B Mother stamper G Groove W Work

Claims (7)

[Claims] In a family making process of a stamper for an optical disc for duplicating a mother stamper from a master stamper or duplicating a sun stamper from a mother stamper, a work in an intimate contact state after electroforming, that is, a master stamper and a mother stamper or a mother stamper. When the stamper and the sun stamper are separated from each other, a pressurized gas is blown from the outer peripheral side of the work to the contact portion between the stampers on the work to separate the outer peripheral portion of the work in the separation starting point treatment, and then one stamper is replaced with the other stamper. A stamper for an optical disk, wherein the stamper is separated from the stamper by moving the stamper relative to the stamper in a direction perpendicular to the contact surface between the stampers. 2. A closely contacted work after electroforming, that is, a master stamper and a mother stamper or a mother stamper in a family making process of an optical disk stamper for copying a mother stamper from a master stamper or copying a sun stamper from the mother stamper. In a device for separating a stamper and a sun stamper from each other,
A work holding station and a releaser for holding one of the stampers of the work are provided as a work peeling mechanism, and a pressurized gas is blown to a contact portion between the stampers in the work held by the work holding station. Pressurized gas ejecting means, at least one of the workpiece peeling mechanisms is relatively movable with respect to the other workpiece peeling mechanism by the lifting mechanism, and in the direction perpendicular to the contact surface between the stampers. An optical disc stamper peeling device. 3. The optical disk stamper peeling device according to claim 2, wherein the work holding station includes a rotatable turntable for vacuum-sucking the work. 4. The optical disk stamper according to claim 3, wherein the turntable is capable of adjusting a rotation speed and includes a brake mechanism for forcibly stopping the rotation. Stripping device. 5. The releaser is relatively movable relative to the work holding station, and
5. The optical disk stamper peeling device according to claim 2, further comprising vacuum suction means for a workpiece. 6. The optical disk stamper peeling apparatus according to claim 5, wherein the releaser is capable of adjusting a relative moving speed relative to the work holding station. 7. The pressurized gas injection means is configured to change at least one of a pressure of the pressurized gas, an injection angle of the pressurized gas to the workpiece, a hole diameter of the injection port, and a separation distance between the injection port and the work. 7. The optical disk stamper peeling device according to claim 2, wherein when the separation distance is variable, the injection port is allowed to approach and separate from the work. .