JP3584269B2 - X-ray fluorescence analyzer - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an X-ray fluorescence spectrometer that determines the distribution of the amount of components contained in a strip-shaped sample composed of a plurality of layers and conveyed in the longitudinal direction.
[0002]
[Prior art]
As a fluorescent X-ray analyzer that is incorporated in various production lines, in a production line where silicone is coated on one side and peeled off while transporting the longitudinal direction of the strip of paper as the flow direction, the amount of coated silicone layer can be measured. X-ray fluorescence analyzer (Japanese Patent Application No. 2000-214278) or X-ray fluorescence analyzer for determining the amount of Zn deposited on a line for plating Zn on both front and back surfaces while transporting a steel sheet in the longitudinal direction There is. For example, in the latter case, as shown in FIG. 6, the distribution in the width direction and the flow direction for the surface and back sides of Zn adhered amount, that is, four kinds of distribution is considered, conventionally, as shown in FIG. 7, the operation At the request of the operator, a layout combining the graphs of the respective distributions is prepared in advance by the manufacturer of the apparatus, and the operator switches the graph display of the distributions in the respective layouts to one screen of a display such as a CRT. Is displayed.
[0003]
[Problems to be solved by the invention]
However, in this case, even if the operator later thinks of a layout of the graph in which the distribution situation is easy to understand, it cannot be displayed on a layout that is not prepared. In this example, it is impossible to simultaneously display the distribution of the surface Zn deposition amount in the width direction and the flow direction, and it is not possible to cope with a change in the layer structure of the sample or a component to be analyzed. On the other hand, if all expected layouts are prepared in consideration of the number of graphs to be included in one layout and the change of the sample, the number of layouts to be switched increases and the operation becomes complicated. It is conceivable to use the Windows (registered trademark) multi-document interface. However, from a plurality of cascaded graphs, an arbitrary graph is selected and moved to the foreground, and the size of each graph is changed. If all the selected graphs are arranged so as to fit on one screen without overlapping, the operation is still complicated.
[0004]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and is directed to an X-ray fluorescence analyzer for determining the distribution of the amount of components contained in a strip-shaped sample composed of a plurality of layers and conveyed in the longitudinal direction. It is an object of the present invention to provide a device which can easily and quickly perform a graph display in which the distribution situation is easy to understand.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, an X-ray fluorescence spectrometer according to the first aspect of the present invention includes a sample orthogonal to the flow direction on at least one surface of a strip-shaped sample composed of a plurality of layers and transported in a longitudinal direction as a flow direction. While reciprocating the X-ray tube and the detector in the width direction, the intensity of the fluorescent X-rays generated by irradiating the primary X-rays was measured, and the amount of the component contained in the layer or the content was measured. An X-ray fluorescence analyzer for obtaining a distribution in the width direction or the flow direction, comprising the following graph creating means, layout registering means, and layout display means. ("Adhesion amount or content rate" includes "adhesion amount and content rate", and "width direction or flow direction" includes "width direction and flow direction. The same applies hereinafter.)
[0006]
The graph creating means creates a graph of the distribution for each component to be analyzed and for each direction of the distribution. The layout registration unit creates a layout for dividing the screen of the display unit based on the number of selected graphs and displaying each graph simultaneously for each of a plurality of graphs selected by the operator from the graphs created by the graph creation unit. ,register. The layout display means causes the display to display a graph included in the layout specified by the operator among the layouts registered in the layout registration means.
[0007]
According to the device of the first aspect of the present invention, the operator simply selects a plurality of graphs, and a layout for dividing the screen of the display device and simultaneously displaying each graph is appropriately created and registered. By simply specifying the desired layout from the registered layouts, the graph is displayed on the display unit with that layout, making it easy to create a layout that makes it easy for the operator to understand the distribution situation and display the graph in that layout Can be done easily and quickly.
[0008]
The apparatus according to the first aspect of the present invention preferably includes an enlarged display unit that enlarges one graph designated by an operator among the graphs displayed on the display by the layout display unit and displays the enlarged graph on the display. .
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an X-ray fluorescence analyzer according to a first embodiment of the present invention will be described with reference to the drawings. As shown in the front view of FIG. 1, this apparatus applies the flow direction to each of the front and back surfaces of a band-shaped sample 4 composed of a plurality of layers and transported in a longitudinal direction as a flow direction Z (for example, upward in a vertical direction). While reciprocating the X-ray tube and the detectors 7A and 7B in the width direction X (horizontal direction) of the sample 4 perpendicular to Z, the fluorescent X-rays 6A and 6B generated by irradiating the primary X-rays 5A and 5B are generated. This is an X-ray fluorescence spectrometer that measures the intensity (see the plan view of FIG. 2) and obtains the distribution of the components (elements) contained in the layer in the width direction X and the flow direction Z. The longitudinal direction (flow direction) of the sample is not limited to the vertical direction, and may be, for example, a horizontal direction.
[0012]
More specifically, the sample 4 is a plated steel sheet, and as shown in the plan view of FIG. 2, five layers 4a to 4e, that is, a steel sheet 4a, a Zn plating layer 4b below the surface, and Ni plating above the surface. It is composed of a layer 4c, a lower Zn plating layer 4d on the lower surface, and an upper Ni plating layer 4e on the lower surface. This apparatus is provided with movement measuring means 1A and 1B and position detecting means 2A and 2B for each of the front and back surfaces of the sample 4.
[0013]
The movement measuring means 1A, 1B includes a head including an X-ray tube for generating primary X-rays 5A, 5B, and a detector for generating a number of pulses per unit time according to the intensity of the incident fluorescent X-rays 6A, 6B. As shown in FIG. 1, horizontal rails 9A and 9B (only the front side 9A is shown) fixed to the floor via legs 8A and 8B (only the front side 8A is shown) as shown in FIG. ) Is reciprocated in the width direction X of the sample 4 by a pulse motor, a ball screw, etc. (not shown) built in the rails 9A and 9B. Thereby, the movement measuring means 1A, 1B in FIG. 2 irradiates the primary X-rays 5A, 5B to both the front and back surfaces of the sample 4 while reciprocating in the width direction X of the sample 4, thereby generating fluorescent light. A number of pulses corresponding to the intensity of the X-rays 6A and 6B are generated per unit time.
[0014]
The position detecting means 2A and 2B are each a pair of reflective photosensors mounted side by side in the width direction X of the sample 4 on the movement measuring means 1A and 1B to detect ends A and W in the width direction X of the sample 4. 10A (10Aa, 10Ab), 10B (10Ba, 10Bb), a rotary encoder (not shown) connected to a pulse motor built in the rails 9A, 9B and detecting the number of rotations, and the like. The movement distance (more specifically, the rotation speed of the pulse motor) of the movement measuring means 1A, 1B from the end A, W is detected as the position of the movement measuring means 1A, 1B.
[0015]
As shown in FIG. 1, an operation means 3 is connected to the movement measuring means 1A, 1B (only 1A on the near side is shown) and the position detecting means 2A, 2B (only 2A on the near side is shown). Indicates the number of pulses generated by the movement measuring means 1A and 1B and the movement measurement in each section of the sample 4 divided in the width direction X based on the positions of the movement measuring means 1A and 1B detected by the position detecting means 2A and 2B. The movement time of the means 1A and 1B is determined, and the amount of the component contained in each plating layer is determined for each section based on the measured intensity obtained by dividing the number of pulses by the movement time for each section. Note that what is required is not limited to the amount of adhesion, but may be the content rate.
[0016]
Further, the calculation means 3 is connected to a display 30 such as a CRT via the display control means 11. The display control means 11 includes the following graph creation means 12, layout registration means 13, layout display means 14, and enlarged display means 15. The graph creating means 12 receives the data of the amount of adhesion from the calculating means 3 and, for each of the components to be analyzed, in this embodiment Zn for the front surface, Ni for the front surface, Zn for the back surface, and Ni for the back surface, and the direction of the distribution. That is, a graph of the distribution of the attached amount is created for each of the width direction X and the flow direction Z. In this case, as shown in FIG. 3, there are eight graphs (1) to (8).
[0017]
In the case where the same element is contained in different layers, the components (elements) to be analyzed may be distinguished by the same element or in which layer on which surface, , The same element contained in the above can be collectively treated as one component to be analyzed. Usually, the graph of the distribution in the width direction X is based on the data of the latest one scan (A to W or W to A) of the movement measuring means 1A and 1B in FIG. It is based on data averaged in the width direction X for each scan. Further, each graph may display an upper limit value and a lower limit value of the setting of the adhesion amount.
[0018]
The layout registration unit 13 divides the screen of the display 30 based on the number of selected graphs for each of a plurality of graphs selected by the operator from the graphs generated by the graph generation unit 12, and displays the graphs simultaneously. Create and register. For example, the operator uses the input means (not shown) connected to the display control means 11 to obtain (1) and (3), (2) and (6), (1), When three combinations of (2), (5) and (6) are selected, the layout registration means 13 (FIG. 1) selects each combination as shown in layout-1, layout-2 and layout-3 of FIG. The layout of the screen of the display unit 30 (FIG. 1) is divided based on the number of graphs selected in (in this case, divided into two vertically or vertically divided into four), and a layout for simultaneously displaying each graph is created and registered. You. The number of graphs in one layout is not limited to two or four.
[0019]
The operator can also specify the position of each graph in each layout, for example, to arrange the graph of (1) above in the layout-1 by using the input means. In addition, it is possible to delete an unnecessary layout. The creation, registration, and deletion of this layout are not limited to before the start of analysis, that is, before the start of the operation of the plating process on the steel sheet, and the operator can perform the layout at any time by the layout registration unit 13 in FIG.
[0020]
The layout display unit 14 causes the display 30 to display a graph included in the layout specified by the operator among the layouts registered in the layout registration unit 13. That is, during the analysis (during the operation of the plating process), when the operator presses, for example, the button of “layout-1” provided on the input means, the layout display means 14 uses the designated layout-1, ie, As shown on the left side of FIG. 4, the graphs of (1) and (3) are displayed on the display 30 of FIG.
[0021]
As described above, according to the apparatus of the first embodiment, the operator simply selects a plurality of graphs, and a layout for dividing the screen of the display 30 and simultaneously displaying each graph is appropriately created and registered. Also, by simply designating a desired one of the registered layouts, a graph is displayed on the display 30 in the layout, so that it is easy to create a layout in which the distribution situation is easy for the operator to understand. Easy and quick graph display in layout.
[0022]
In some cases, the operator wants to enlarge and display individual graphs included in each layout in order to understand the distribution situation in more detail. However, when each graph is registered as an independent layout, the number of registered layouts becomes too large, and the selection operation may be complicated.
[0023]
Therefore, in the apparatus according to the first embodiment, the enlarged display unit 15 enlarges one graph designated by the operator among the graphs displayed on the display 30 by the layout display unit 14 and displays the enlarged graph on the display 30. . For example, in the above case, the display 30 displays the graphs (1) and (3) in the layout-1 as shown on the left side of FIG. Each time a button for enlarged display provided on the input means is pressed, the display on the display 30 is enlarged as shown in FIG. 5 (center in FIG. 5) and displayed as graph (3). The display is switched to an enlarged display (the right side in FIG. 5) and a simultaneous display of the graphs (1) and (3) in the original layout-1 (the left side in FIG. 5).
[0024]
As described above, by further providing the enlarged display means 15, individual graphs included in each layout can be displayed in an enlarged manner without increasing the number of registered layouts and complicating the operation. Can easily and quickly display graphs that are easy to understand.
[0028]
In the present invention, a plurality of sets of X-ray tubes and detectors may be provided on one side of the strip-shaped sample. For example, in a production line that coats silicone (including Si) on one side while conveying a strip of paper containing Si (silicon) in the longitudinal direction, the coating amount is determined when the adhesion amount of the coated silicone layer is determined. On the side to be moved, the above-described movement measuring means including the X-ray tube and the detector are arranged before and after the coating step. Then, the first movement measuring means measures the amount of Si in the base paper before coating, and the second movement measuring means measures the total amount of Si after coating, and subtracts the former from the latter to obtain the adhesion of the coating. The quantity can be determined.
[0029]
In addition, in a line for plating Cr on both front and back surfaces while transporting a steel sheet containing Cr (chromium) in the longitudinal direction, when measuring the amount of deposited Cr, a movement measuring means or the like is used on the surface before and after the plating process. And on the back surface after the plating step. On the surface, the first movement measuring means measures the amount of Cr on the base before plating, and the second movement measuring means measures the total amount of Cr after plating, and corrects the latter using the former. Thus, the adhesion amount of the plating on the surface can be obtained. On the other hand, on the back surface, the total amount of Cr after plating is measured by the third movement measuring means, and correction is performed using the amount of Cr on the underlayer, whereby the amount of adhesion of plating on the back surface can be obtained.
[0030]
【The invention's effect】
As described above, according to the present invention, in a fluorescent X-ray analyzer for determining a distribution such as an attached amount of a component contained in a strip-shaped sample formed of a plurality of layers and conveyed in a longitudinal direction, a distribution situation for an operator. Is a device that can easily and quickly display a graph that is easy to understand.
[Brief description of the drawings]
FIG. 1 is a front view showing a fluorescent X-ray analyzer according to a first embodiment of the present invention.
FIG. 2 is a plan view showing movement measuring means of the apparatus.
FIG. 3 is a diagram showing an example of a graph created by a graph creating unit of the apparatus.
FIG. 4 is a diagram showing an example of a layout created and registered by a layout creation unit of the apparatus and displayed on a display by a layout display unit.
FIG. 5 is a diagram showing an example of an enlarged display which is displayed on a display by an enlarged display means of the apparatus.
FIG. 6 is a diagram showing an example of a graph created by a conventional X-ray fluorescence analyzer.
FIG. 7 is a diagram showing an example of a layout displayed on a display device by the device.
[Explanation of symbols]
4 sample, 4a to 4e plural layers, 5A, 5B primary X-ray, 6A, 6B fluorescent X-ray, 7A, 7B X-ray tube and detector, 12 graph creation means, 13 layout registration Means, 14: Layout display means, 15: Enlarged display means , 30 : Display, X: Width direction of sample, Z: Longitudinal direction (flow direction) of sample.

Claims (2)

Primary X-rays are applied to at least one surface of a strip-shaped sample composed of a plurality of layers and conveyed with the longitudinal direction as the flow direction while reciprocating the X-ray tube and the detector in the sample width direction orthogonal to the flow direction. An X-ray fluorescence analyzer that measures the intensity of the fluorescent X-rays generated by irradiation, and determines the distribution in the width direction or the flow direction for the adhesion amount or the content of the components contained in the layer,
For each component to be analyzed and for each direction of the distribution, a graph creating means for creating a graph of the distribution,
For each of a plurality of graphs selected by the operator from the graphs created by the graph creating means, a layout for dividing the screen of the display unit based on the number of selected graphs and simultaneously displaying each graph is created and registered. Registration means;
An X-ray fluorescence spectrometer comprising: a layout display unit for displaying, on the display, a graph included in the layout specified by the operator among the layouts registered in the layout registration unit. In claim 1,
An X-ray fluorescence spectrometer comprising an enlarged display unit for enlarging one of the graphs specified by the operator among the graphs displayed on the display unit by the layout display unit and displaying the graph on the display unit.

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