JP3578038B2 - Communication simulator - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a communication simulator that simulates communication between a semiconductor manufacturing apparatus and a host system that controls the semiconductor manufacturing apparatus.
[0002]
[Prior art]
2. Description of the Related Art In recent years, control of a semiconductor manufacturing line has been increasingly sophisticated due to the development of computer technology and information technology.
[0003]
FIG. 3 shows a schematic example of a semiconductor production line.
In FIG. 3, semiconductor manufacturing apparatuses 21 to 23 and a host system 30 are connected on a network 10. The network 10 is, for example, a communication line based on the SECS protocol, the HSMS protocol, and the like.
Semiconductor manufacturing apparatuses 21 to 23 (semiconductor manufacturing apparatuses are abbreviated as apparatuses) are apparatuses used for manufacturing semiconductors, and include, for example, an oxidation apparatus, a film forming apparatus, and an ion implantation apparatus. The host system 30 (the host system is abbreviated as a host) controls the semiconductor manufacturing apparatuses 21 to 23.
[0004]
The device and the host are connected to a network in order to remotely instruct the device from the host or to send various data from the device to the host for monitoring.
In order to connect the device and the host to the network, both the device and the host require online software. The online software differs depending on the device and the manufacturer of the host. Because online software is still unique among companies, when connecting devices and hosts to a network, users conduct communication tests to confirm that communication is normal.
[0005]
As a tool for executing a communication test before assembling an actual device, there has been a simulator that simulates a communication operation of a device or a host. For example, when the actual device of the device is assembled, the simulator simulates the communication operation of the host, and when the actual device of the host is assembled, the simulator simulates the communication operation of the device.
[0006]
FIG. 4 is a configuration diagram of a conventional example of the above-described simulator.
The example in the figure shows a case where the device is a real machine and the host is a simulator.
The actual semiconductor manufacturing apparatus 21 and the host simulator 40 are connected to the network 10.
[0007]
The storage unit 401 stores simulator software 402 for executing a simulation. The display unit 404 displays, for example, a data setting screen. The setting unit 405 sets the setting data input from the data setting screen in the simulator software 402.
[0008]
The execution means 406 simulates the communication operation of the host using the simulator software 402. The communication driver 407 communicates with the semiconductor manufacturing apparatus 21 when the execution unit 406 executes the simulation. Communication driver 407 performs communication according to a communication protocol corresponding to the type of network.
The test unit 408 performs a communication test with the semiconductor manufacturing apparatus 21 via the network 10. The result of the communication test is stored in the log file 409 in a text data format. In the test, data is sent from the simulator 40 to the semiconductor manufacturing apparatus 21, and whether or not the semiconductor manufacturing apparatus 21 has returned response data as expected in response to the data is determined.
[0009]
However, the conventional simulator has the following problems.
{Circle around (1)} Since various data to be set in the simulator software must be input from the screen, a great deal of man-hours are required. In addition, since a manual input is performed, an input error easily occurs.
(2) Only one device or host can be connected to one simulator. Therefore, the efficiency of the communication test is low.
{Circle around (3)} In the simulator generated in the development environment, no data change is allowed when the simulator is actually connected. Therefore, when changing data, it is necessary to disconnect the simulator and input the correction data again in the development environment.
{Circle around (4)} The response data of the semiconductor manufacturing apparatus 21 obtained in the communication test is dumped out of the log file. However, it is impossible to judge whether or not the communication test is possible without human intervention.
[0010]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and can significantly reduce the number of steps required for constructing a communication simulation environment, can improve the efficiency of a communication test, and can execute data communication even in a communication test execution environment. It is an object of the present invention to realize a communication simulator that can change the test result and can easily analyze the test result.
[0011]
[Means for Solving the Problems]
The present invention is a communication simulator having the following configuration.
[0012]
(1) In a communication simulator that simulates communication between a semiconductor manufacturing apparatus and a host system that controls the semiconductor manufacturing apparatus,
When a real semiconductor manufacturing device is prepared, it is provided on the host system side,
Transfer means for transferring electronic data from an electronic file of a communication specification in the real semiconductor manufacturing apparatus ,
An environment construction means for providing the transcribed electronic data to the simulator software and constructing a communication simulation environment;
Communication means for performing communication simulation with the real semiconductor manufacturing apparatus under the environment constructed by the environment construction means;
A communication simulator comprising:
[0013]
(2) The communication simulator according to (1), wherein the electronic data transferred by the transfer unit includes data of a communication procedure.
[0014]
(3) setting means for setting data used in the communication simulation;
A data file for saving the data set by this setting means as a file,
Reading means for reading data used for communication from the data file and expanding the data on a memory;
Setting change means for changing the settings of the data developed on the memory,
The communication simulator according to (1), comprising:
[0015]
(4) determining means for determining whether or not the real semiconductor manufacturing apparatus has returned data as expected when the data was sent to the real semiconductor manufacturing apparatus;
Editing means for editing the determination result of the determination means in a table format;
Display means for displaying the edited judgment result on a screen,
The communication simulator according to (1), comprising:
[0016]
(5) The communication simulator according to (1), wherein the communication unit performs a communication simulation with a plurality of real semiconductor manufacturing apparatuses connected on a network by multitask processing.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a configuration diagram showing one embodiment of the present invention. In FIG. 1, the same components as those described above are denoted by the same reference numerals.
The example in the figure shows a case where the device is a real machine and the host is a simulator.
In FIG. 1, a real semiconductor manufacturing apparatus 21 to 23 and a simulator 50 for simulating a communication operation of a host are connected to the network 10.
[0018]
The transfer unit 501 transfers electronic data from an electronic file of a communication specification in the semiconductor manufacturing apparatuses 21 to 23. The electronic data to be transcribed includes, for example, data on communication procedures and communication contents. Some semiconductor manufacturing apparatuses store communication specifications in the form of electronic data in an electronic file. Communication specifications vary depending on the manufacturer, model, and the like of the semiconductor manufacturing apparatus.
[0019]
The environment construction means 502 constructs a communication simulation environment by giving the transferred electronic data to the simulator software 503. The simulator software 503 describes a program for the simulator 50 to simulate the communication operation of the real host. The simulator software 503 is stored in the storage unit 504.
[0020]
The communication unit 505 performs a communication simulation with the semiconductor manufacturing apparatuses 21 to 23 under the environment constructed by the environment construction unit 502. The communication unit 505 performs a communication simulation with the plurality of semiconductor manufacturing apparatuses 21 to 23 by executing the multitask program 506. Thus, a communication test can be performed on a plurality of devices on the network 10 at the same time.
The setting unit 507 sets data used in the communication simulation. The data file 508 stores the data set by the setting unit 507 as a file. The reading unit 509 reads data used for communication from the data file 508 and expands the data on the memory 510. The setting change unit 511 changes the setting of the data developed on the memory.
[0021]
The determination unit 512 determines whether or not the semiconductor manufacturing apparatuses 21 to 23 have returned data as expected when the data has been sent to the semiconductor manufacturing apparatuses 21 to 23.
The editing unit 513 edits the determination result of the determination unit 512 into a table. The display unit 514 displays the edited determination result on a screen.
[0022]
With such a communication simulator, electronic data such as communication procedures and communication contents are transferred (cut and pasted) from electronic files of communication specifications in the semiconductor manufacturing apparatuses 21 to 23. The communication content here is, for example, a message format. The environment construction means 502 reflects the transferred electronic data on the simulator software 503. As a result, a communication simulation environment corresponding to the model of the semiconductor manufacturing apparatus is constructed without manually inputting data.
[0023]
The communication unit 505 performs a communication simulation with the plurality of semiconductor manufacturing apparatuses 21 to 23 by executing the multitask program 506. Thus, a communication test can be performed on a plurality of devices on the network 10 at the same time.
[0024]
Data set for performing the communication test is filed and stored in the data file 508. When performing communication, the reading unit 509 reads data from the data file 508 and expands the data on the memory 510. By changing the setting of the data on the expanded memory, the numerical value, the attribute, and the like of the data can be changed even in the communication test execution environment.
[0025]
In the communication test, known data is sent to the semiconductor manufacturing apparatuses 21 to 23. On the other hand, when the semiconductor manufacturing apparatuses 21 to 23 return response data as expected, the determination unit 510 determines “OK”. If it is different from the expected value, it is determined as “No”.
The editing means 511 edits the determination result obtained in this way using spreadsheet software. The display unit 512 displays the determination result edited in a table format on a screen.
[0026]
FIG. 2 is a diagram showing a display example of a determination result edited in a table format.
As shown in FIG. 2, transmission data sent to the semiconductor manufacturing apparatus, response data returned by the semiconductor manufacturing apparatus, expected values, and determination results are displayed in a list. This facilitates analysis of test results.
[0027]
Note that the host may be configured with an actual device, and the device may be configured with a simulator.
[0028]
【The invention's effect】
According to the present invention, the following effects can be obtained.
[0029]
According to the first and second aspects of the present invention, the simulator transcribes electronic data of a communication specification from a real device, and constructs a communication simulation environment based on the transcribed data. As a result, the man-hour required for constructing the communication simulation environment can be significantly reduced. In addition, since manual input of data is not required, human error can be prevented.
[0030]
According to the third aspect of the present invention, data set for performing a communication test is stored in a data file by storing it in a file, and when communication is performed, data is read from the data file and developed on a memory. Settings are changed on the memory that has been set. As a result, numerical values, attributes, and the like of data can be changed even in the communication test execution environment.
[0031]
According to the fourth aspect of the invention, the determination result of the communication test is edited in a table format and is displayed on the screen, so that the analysis of the test result becomes easy.
[0032]
According to the fifth aspect of the invention, communication simulation with a plurality of devices is performed by multitask processing. Thereby, a communication test can be performed simultaneously with a plurality of devices, and the test efficiency can be improved.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing one embodiment of the present invention.
FIG. 2 is a diagram showing an example of a test result according to the present invention.
FIG. 3 is a diagram showing a schematic example of a semiconductor production line.
FIG. 4 is a configuration diagram of a conventional example of a communication simulator.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Network 21-23 Semiconductor manufacturing apparatus 50 Simulator 501 Transfer means 502 Environment construction means 503 Simulator software 505 Communication means 506 Multitask program 507 Setting means 508 Data file 509 Reading means 510 Memory 511 Setting change means 512 Judgment means 513 Editing means

Claims (5)

In a communication simulator that simulates communication between a semiconductor manufacturing apparatus and a host system that controls the semiconductor manufacturing apparatus,
When a real semiconductor manufacturing device is prepared, it is provided on the host system side,
Transfer means for transferring electronic data from an electronic file of a communication specification in the real semiconductor manufacturing apparatus ,
An environment construction means for providing the transcribed electronic data to the simulator software and constructing a communication simulation environment;
Communication means for performing communication simulation with the real semiconductor manufacturing apparatus under the environment constructed by the environment construction means;
A communication simulator comprising: 2. The communication simulator according to claim 1, wherein the electronic data transferred by the transfer unit includes data of a communication procedure. Setting means for setting data used in the communication simulation;
A data file for saving the data set by this setting means as a file,
Reading means for reading data used for communication from the data file and expanding the data on a memory;
Setting change means for changing the settings of the data developed on the memory,
The communication simulator according to claim 1, comprising: Determining means for determining whether or not the real semiconductor manufacturing apparatus has returned data as expected when sending data to the real semiconductor manufacturing apparatus,
Editing means for editing the determination result of the determination means in a table format;
Display means for displaying the edited judgment result on a screen,
The communication simulator according to claim 1, comprising: 2. The communication simulator according to claim 1, wherein the communication unit performs a communication simulation with a plurality of real semiconductor manufacturing apparatuses connected on a network by multitask processing. 3.

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