JP3575565B2 - Ultrasonic probe - Google Patents

Ultrasonic probe Download PDF

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Publication number
JP3575565B2
JP3575565B2 JP25484895A JP25484895A JP3575565B2 JP 3575565 B2 JP3575565 B2 JP 3575565B2 JP 25484895 A JP25484895 A JP 25484895A JP 25484895 A JP25484895 A JP 25484895A JP 3575565 B2 JP3575565 B2 JP 3575565B2
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Prior art keywords
vibrators
contact surface
vibrator
groove
shape
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JPH0996627A (en
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雄司 西
船戸一寛
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石川島播磨重工業株式会社
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/044Internal reflections (echoes), e.g. on walls or defects

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、原子炉圧力容器等の溶接部の超音波探傷検査に使用する超音波探触子に関するもので、詳しくは原子炉圧力容器等の溶接部に発生するブローホール等の欠陥を超音波により探傷検査するために使用する超音波探触子に関するものである。
【0002】
【従来の技術】
従来の原子炉圧力容器等の溶接部の超音波探傷検査においては、超音波探触子の接触面と被検査面との間に、安定した超音波を伝播,入射させるため接触媒質として水,グリセリン等の液体を供給しながら、あるいは一旦塗布した後、超音波の入射角度を変化させながら走査していた。
【0003】
図8は、従来の超音波探触子の一部を切り欠いた側断面図で、1は超音波探触子(以下「探触子」という。)で、アクリル樹脂等で構成されている。そして、その探触子1の内部には圧電素子等で構成された3個の振動子5,6,7が埋め込まれている。この振動子5,6,7は、信号線14,15,16によりコネクタ12と接続し、そこから外部の監視装置(図示せず)と接続している。また、上記3個の振動子は、振動面の角度がそれぞれ異なる。そのうちの中央の振動子5は、この振動子5により発振させた超音波が被検査体へ屈折角0°で入射するように振動面が上記接触面2に平行に埋め込まれており、その両側の2個の振動子6,7は、超音波が被検査体へ屈折角45°ならびに60°で入射するように振動面が接触面2の一方の長辺の方向を向いて所定の角度をもってそれぞれ埋め込まれている。この接触面2には接触媒質(以下「水」という。)供給のための溝3が形成されており、その溝3の下端部に2個の接触媒質供給孔4(以下「水供給孔」という。)があり、水ホースを通じてポンプ(いずれも図示せず)に連通されている。なお、10は水ホース継手であり、11は探触子1を検査装置等(図示せず)に取り付ける取付具である。
【0004】
図9は、図8のA−A矢視図で、探触子1の接触面2には、コの字状で開口部を下向きに形成した溝3が設けられており、その下端部には2個の水供給孔4が設けられている。
【0005】
上記探触子1により探傷検査を行なう時は、探触子1を取付具11により検査装置(図示せず)に取り付け、スプリング等(図示せず)で被検査体の被検査面に押し当て、3種類の屈折角度を有する振動子5,6,7により、同時に超音波を発振させ、その超音波を被検査体に向けて発射する。そして、被検査体から反射して戻ってきた反射波を受信し、アンプを通じて増幅した後、オシロスコープに送り、自動的に走査しながらその波形の大きさを検視するようにしている。その際、探触子1の接触面2と被検査面との間には正確で安定した超音波を伝播,入射させるため、接触面2に設けた溝3に、その下端部に設けた2個の水供給孔4から、例えば水を流し、超音波の向きを変化させながら走査している。
【0006】
【発明が解決しようとする課題】
しかしながら、探傷検査を行なう被検査体は、一般に鉛直方向に配置されている場合が多いばかりか、被検査面の表面は必ずしも平坦でないことが多い。また、従来の探触子1は、接触面2に設けた水供給のための溝3がコの字状で開口部を下向きになるように形成されていて、しかも、その水は溝3の下端部に連通して設けられている2個の水供給孔4から供給されているため、水は重力で下方に流れてしまい、本来、溝3を通って上方にまで届くはずの水が届かず、したがって被検査面と接触面2との間で超音波を伝播する部分に必要な水が十分に充填されなくなる。そのため、正確な超音波が入射されなくなり探傷感度が低下してしまう問題があった。また、上辺の溝のため斜め上向きに発射される振動子6,7からの超音波が乱れてしまい、これも探傷感度に影響を与えた。
【0007】
本発明は、上記の従来のような問題点を解決しようとするもので、被検査面と、探触面2との間が水で十分に満たされ、かつ、溝からの影響のない正確で安定した超音波を伝播,入射させることのできる超音波探触子を提供することを目的とするものである。
【0008】
【課題を解決するための手段】
上記目的を達成するために、本発明の第1の発明では、被検査面との接触面が長方形で、振動子が埋め込まれた箱型状の超音波探触子であって、振動子は長辺方向に並んで3個埋め込まれており、中央の振動子は振動面が上記接触面に平行に埋め込まれ、その両側の2個の振動子は振動面が接触面の一方の長辺の方向を向いて所定の角度をもって埋め込まれており、接触面には被検査面との間に接触媒質を供給するための溝が設けられており、溝の形状は漢字の巨の字状であり、中央の振動子は巨の字状のうちロの字状の部分に囲まれた位置に配置されており、両側の2個の振動子は巨の字状のうちロの字状の部分とこのロの字状の両側を形成するLの字状及び逆Lの字状の部分との間の位置にそれぞれ配置されており、巨の字状の縦の線は前記両側の2個の振動子の振動面が向いていない方の長辺側に沿っており、しかも、溝の少なくとも4隅に接触媒質供給孔を連通して設けている。
【0009】
第2の発明では、被検査面との接触面が長方形で、振動子が埋め込まれた箱型状の超音波探触子であって、振動子は長辺方向に並んで3個埋め込まれており、かつ、それら3個の振動子のうち、端の1個は振動面が上記接触面に平行に埋め込まれ、他の2個は振動面が接触面の一方の長辺の方向を向いて所定の角度をもって埋め込まれており、接触面には被検査面との間に接触媒質を供給するための溝が設けられており、溝の形状は、上記振動面が接触面に平行に埋め込まれた振動子の位置では振動子を囲むようにロの字状を形成し、他の2個の振動子の位置ではLの字状に形成してその一辺が前記ロの字状の一辺と同一直線状に連通しており、このロの字状の一辺と連通しているLの字状の一辺は前記他の2個の振動子の振動面が向いていない方の長辺側に沿っており、しかも、溝の少なくとも4隅に接触媒質供給孔を連通して設けている。
【0010】
上述した本発明の構成によれば、被検査体の被検査面の向きが垂直であったり、斜めであるような条件の下で探傷検査を行なう場合であっても、水を溝3の少なくとも4隅から供給するので、上方にまで十分に届かせることができるから、被検査体に正確で安定した超音波を伝播、入射させることができるとともに被検査体からも正確で安定した反射波を伝播、受信することができる。
【0011】
【発明の実施の形態】
以下、本発明の好ましい実施形態を図面に基づいて説明する。なお、従来のものと共通の部材については同じ符号を用いており説明を省略する。
図1は本発明の探触子1の正面図、図2は図1に示した探触子の背面図、図3は探触子の一部を切り欠いた側面図、図4は探触子を被検査体の被検査面に当接し、使用している状態を示す概要図、図5はオシロスコープに表示された超音波の波形図、図6は、本発明の使用概念図である。
【0012】
図1ないし図3において、1はアクリル樹脂等で構成された長方形で、かつ、箱型状の探触子である。また、その探触子1の内部には圧電素子等で構成された3個の振動子5,6,7が埋め込まれている(図1および図2)。この振動子5,6,7は、信号線14,15,16(図3)によりコネクタ12と接続し、そこから外部の監視装置(図示せず)と接続している。また、上記3個の振動子は、振動面の角度がそれぞれ異なる。そのうちの中央の振動子5は、この振動子5により発振させた超音波が被検査体へ屈折角0°で入射するように振動面が上記接触面2に平行に埋め込まれており、その両側の2個の振動子6,7は、超音波が被検査体へ屈折角45°ならびに60°で入射するように振動面が接触面2の一方の長辺の方向を向いて所定の角度をもってそれぞれ埋め込まれている。なお、これらの構造は、従来の探触子と同じである。この接触面2には、図1に示すように、漢字の巨の字状を形成した溝3が設けられており、しかも、その巨の字状の縦の線は探触子1の長辺に沿って平行に設けられている。中央の振動子5は巨の字状のうちロの字状の部分に囲まれた位置に配置されており、両側の2個の振動子6、7は巨の字状のうちロの字状の部分とこのロの字状の両側を形成するLの字状及び逆Lの字状の部分との間の位置にそれぞれ配置されている。巨の字状の縦の線は前記両側の2個の振動子6、7の振動面が向いていない方の長辺側に沿っている。また、溝3の4隅には水供給孔4が4個連通して設けられ、外部の水供給装置(図示せず)と接続しているホース継手10と接続している。そして、検査の際には、この水供給孔4から被検査面との間に水が供給される。なお、11は探触子1を検査装置等に取り付けるための取付具である。両端の振動子6、7の部分の長辺に沿った溝3が一方の長辺側のみに設けられ、他方の長辺側に設けられていないのは、他方の側に溝3を設けると、その溝3により超音波の発振、受信が影響を受け、正確な反射波が検出しにくいからである。
【0013】
図4は探触子1を被検査体Pの被検査面P1に当接し、使用している状態を示す概要図で、13は被検査面P1と接触面2との間に供給された水である。
【0014】
図5は監視装置であるオシロスコープに表示された超音波の波形図で、dは被検査体P(図6)内に内在する欠陥までの路程を表し、tおよび2tは同一の欠陥から得られた波高値を示している。そして、このtは、従来の探触子1を使用して行なった検査により得られた欠陥からの反射エコーの大きさを、2tは本発明の探触子1を使用して行なった検査により得られた欠陥からの反射エコーの大きさをそれぞれ示している。
【0015】
図6は本発明の使用概念図である。そして、図4同様に探触子1を被検査体Pの被検査面P1に押し当てながら監視装置であるアンプ8およびオシロスコープ9により検視する。
【0016】
次に実施形態の作用を説明する。
図1ないし図3に示すように構成された探触子1によって、被検査体Pの探傷検査を行なう時は、探触子1を取付具11により検査装置等(図示せず)に取り付け、スプリング等(図示せず)により被検査体の被検査面に押し当て、被検査面と接触面2との間に設けた溝3より水13を流して、それらの間に形成される隙間を水で十分充填する。次に図4および図6に示すように探触子1を被検査体Pの被検査面P1に押し当て、振動子5,6,7により発生した超音波を被検査体Pに向けて発射し、被検査体Pから反射して戻ってきた超音波を受信し、アンプ8を通じて増幅した後、オシロスコープ9に送り、自動的に走査しながらその波形の大きさを検視する。
【0017】
図7は本発明の他の実施形態を示すものである。1はアクリル樹脂等で構成された長方形で、かつ、箱型状の探触子である。また、その探触子1の内部には圧電素子等で構成された3個の振動子5,6,7が埋め込まれているが、これらの構成は、本発明の前記実施形態と同じである。そして、前記実施形態とは、上記3個の振動子5,6,7のうち、中央の振動子5を端に設けるとともに振動子6,7を並べて設けた点と、接触面2に水13を供給するための溝3が、振動子5の位置では振動子を囲むようにロの字状を形成し、振動子6,7の位置ではLの字状に形成してその一辺が前記ロの字状の一辺と同一直線状に連通させた点で相違している。このロの字状の一辺と連通しているLの字状の一辺は前記他の2個の振動子の振動面が向いていない方の長辺側に沿っている。なお、溝3の少なくとも4隅に水供給孔4を連通して設けている点も前記実施形態と同じである。
【0018】
なお、本発明者が行なった実験結果によると、本発明に基づき溝3の4隅から水13を供給した場合、図5に示すように、従来の2隅から水13を供給した場合と比較し、感度が向上されるため、監視装置のオシロスコープ9に表示される波高が高くなる。これにより、探傷条件が悪く、欠陥からの反射エコー高さが上がらないなどにより、不合格欠陥のものを合格として判定してしまうというような問題も解消することが確認された。
【0019】
【発明の効果】
以上述べたように、本発明によれば、探触子の接触面に形成された水供給溝に少なくとも4隅から水を供給するようにしたので接触面と被検査面との隙間が水で十分に満たされる。また、両側の振動子の向いた方向の接触面の長辺には近接して溝が設けられていないので、斜め方向を向いて発射される超音波が乱されることがなく、正確で安定した超音波を伝播,入射させることができる効果を有する。
【図面の簡単な説明】
【図1】本発明の探触子の一実施形態を示した正面図。
【図2】図1に示した探触子の裏面図。
【図3】本発明の探触子の一部を切り欠いた右側面図。
【図4】探触子を被検査体の被検査面に押し当てて使用している状態を示す概要図。
【図5】オシロスコープに表示された超音波の波形図。
【図6】本発明の使用概念図である。
【図7】本発明の他の実施形態を示した正面図。
【図8】従来探触子の一部を切り欠いた右側面図。
【図9】従来の探触子の一実施形態を示した正面図。
【符号の説明】
1 超音波探触子
2 接触面
3 溝
4 水供給孔
5、6、7 振動子
8 アンプ
9 オシロスコープ
10 ホース継手
13 水
14、15、16 信号線
P 被検査体
P1 被検査面
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultrasonic probe used for ultrasonic inspection of a welded portion of a reactor pressure vessel or the like, and more particularly, to an ultrasonic probe for detecting defects such as blowholes generated in a welded portion of a reactor pressure vessel or the like. The present invention relates to an ultrasonic probe used for flaw detection inspection by using an ultrasonic probe.
[0002]
[Prior art]
In the conventional ultrasonic flaw inspection of a welded portion of a reactor pressure vessel, etc., water is used as a couplant to steadily propagate and inject ultrasonic waves between a contact surface of the ultrasonic probe and a surface to be inspected. Scanning was performed while changing the incident angle of the ultrasonic wave while supplying or once applying a liquid such as glycerin.
[0003]
FIG. 8 is a side sectional view of a conventional ultrasonic probe with a part cut away. Reference numeral 1 denotes an ultrasonic probe (hereinafter, referred to as a "probe"), which is made of acrylic resin or the like. . Then, inside the probe 1, three vibrators 5, 6, 7 constituted by piezoelectric elements or the like are embedded. The vibrators 5, 6, 7 are connected to the connector 12 by signal lines 14, 15, 16 and from there to an external monitoring device (not shown). Further, the three vibrators have different angles of vibrating surfaces. The vibrating surface of the center vibrator 5 is embedded parallel to the contact surface 2 so that the ultrasonic wave oscillated by the vibrator 5 is incident on the object to be inspected at a refraction angle of 0 °. The two vibrators 6 and 7 have a predetermined angle with the vibrating surface facing one long side of the contact surface 2 so that the ultrasonic wave enters the test object at a refraction angle of 45 ° and 60 °. Each is embedded. A groove 3 for supplying a couplant (hereinafter referred to as “water”) is formed in the contact surface 2, and two couplant supply holes 4 (hereinafter “water supply holes”) are formed at the lower end of the groove 3. ), And are connected to a pump (neither is shown) through a water hose. Reference numeral 10 denotes a water hose joint, and reference numeral 11 denotes a fixture for attaching the probe 1 to an inspection device or the like (not shown).
[0004]
FIG. 9 is a view taken in the direction of arrows AA in FIG. 8. The contact surface 2 of the probe 1 is provided with a U-shaped groove 3 having an opening formed downward, and a lower end thereof. Is provided with two water supply holes 4.
[0005]
When performing the flaw detection inspection using the probe 1, the probe 1 is attached to an inspection device (not shown) by the fixture 11, and is pressed against the inspection surface of the inspection object by a spring or the like (not shown). Ultrasonic waves are simultaneously oscillated by vibrators 5, 6, and 7 having three types of refraction angles, and the ultrasonic waves are emitted toward the object to be inspected. Then, the reflected wave reflected from the test object and returned is received, amplified through an amplifier, sent to an oscilloscope, and visually inspected for the magnitude of the waveform while automatically scanning. At this time, in order to propagate and make an accurate and stable ultrasonic wave between the contact surface 2 of the probe 1 and the surface to be inspected, a groove 3 provided in the contact surface 2 is provided at a lower end thereof. For example, water flows from the individual water supply holes 4 and scanning is performed while changing the direction of the ultrasonic wave.
[0006]
[Problems to be solved by the invention]
However, the inspected object for which the flaw detection is to be performed is generally arranged in a vertical direction in many cases, and the surface of the inspected surface is not always flat. Further, in the conventional probe 1, the groove 3 for supplying water provided on the contact surface 2 is formed in a U-shape so that the opening is directed downward. Since the water is supplied from the two water supply holes 4 provided in communication with the lower end, the water flows downward by gravity, and the water that should have reached the upper part through the groove 3 does not reach. Therefore, the portion for transmitting ultrasonic waves between the inspection surface and the contact surface 2 is not sufficiently filled with necessary water. For this reason, there has been a problem that accurate ultrasonic waves are not incident and the flaw detection sensitivity is reduced. Further, the ultrasonic waves emitted from the vibrators 6 and 7 emitted obliquely upward due to the grooves on the upper side were disturbed, which also affected the flaw detection sensitivity.
[0007]
The present invention is intended to solve the above-described conventional problems. The space between the surface to be inspected and the probe surface 2 is sufficiently filled with water, and the space between the surface to be inspected and the probe surface 2 is accurate without any influence from the groove. It is an object of the present invention to provide an ultrasonic probe capable of transmitting and entering stable ultrasonic waves.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, according to a first aspect of the present invention, there is provided a box-shaped ultrasonic probe in which a contact surface with a surface to be inspected has a rectangular shape and a vibrator is embedded therein. Three vibrating surfaces are buried parallel to the contact surface in the center vibrator, and two vibrators on both sides of the vibrating surface are buried in one long side of the contact surface. The contact surface is provided with a groove for supplying a couplant between the contact surface and the surface to be inspected, and the shape of the groove is a large Chinese character. The central vibrator is located at the position surrounded by the square-shaped part of the giant figure, and the two vibrators on both sides are the square-shaped part of the giant figure. And the L-shaped and inverted L-shaped portions forming both sides of the square shape, respectively, are arranged, and the giant vertical line is Serial and along the two long sides towards the vibrating surface does not face the vibrator on both sides, moreover, is provided in communication with at least four corners couplant supply hole of the groove.
[0009]
In the second invention, a box-shaped ultrasonic probe having a rectangular contact surface with the surface to be inspected and having a vibrator embedded therein, wherein three vibrators are embedded in the long side direction. Of these three vibrators, one of the ends has a vibrating surface embedded in parallel with the contact surface, and the other two vibrating surfaces face the direction of one long side of the contact surface. The contact surface is provided with a groove for supplying a couplant between the contact surface and the surface to be inspected, and the shape of the groove is such that the vibrating surface is embedded parallel to the contact surface. A vibrator is formed at the position of the vibrator, and an L-shape is formed at the positions of the other two vibrators, and one side is the same as one side of the U-shape. communicates in a straight line, shape of one side of the L in communication with the shaped side of the b is not the plane of vibration of the other two transducers are oriented There way is along the long side of, moreover, is provided in communication with at least four corners couplant supply hole of the groove.
[0010]
According to the configuration of the present invention described above, even when the flaw detection inspection is performed under the condition that the direction of the inspection surface of the inspection object is vertical or oblique, Since it is supplied from four corners, it can reach the upper part sufficiently, so that an accurate and stable ultrasonic wave can be propagated and incident on the inspected object, and an accurate and stable reflected wave can be reflected from the inspected object. Propagate and receive.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. Note that the same reference numerals are used for members common to those of the related art, and description thereof is omitted.
1 is a front view of the probe 1 of the present invention, FIG. 2 is a rear view of the probe shown in FIG. 1, FIG. 3 is a side view of the probe with a part cut away, and FIG. FIG. 5 is a schematic diagram showing a state in which the probe is used while the probe is in contact with the surface to be inspected of the object to be inspected, FIG. 5 is a waveform diagram of ultrasonic waves displayed on an oscilloscope, and FIG.
[0012]
1 to 3, reference numeral 1 denotes a rectangular and box-shaped probe made of acrylic resin or the like. Further, three vibrators 5, 6, and 7 each composed of a piezoelectric element or the like are embedded in the probe 1 (FIGS. 1 and 2). The vibrators 5, 6, and 7 are connected to the connector 12 via signal lines 14, 15, 16 (FIG. 3), and from there to an external monitoring device (not shown). Further, the three vibrators have different angles of vibrating surfaces. The vibrating surface of the center vibrator 5 is embedded parallel to the contact surface 2 so that the ultrasonic wave oscillated by the vibrator 5 is incident on the test object at a refraction angle of 0 °. The two vibrators 6 and 7 have a predetermined angle with the vibrating surface facing one long side of the contact surface 2 so that the ultrasonic wave enters the test object at a refraction angle of 45 ° and 60 °. Each is embedded. In addition, these structures are the same as the conventional probe. As shown in FIG. 1, the contact surface 2 is provided with a groove 3 having a large kanji character, and the vertical line of the large character is the long side of the probe 1. Are provided in parallel along. The central vibrator 5 is disposed at a position surrounded by a square-shaped portion of the large character, and the two oscillators 6 and 7 on both sides are square-shaped in the large character. , And the L-shaped and inverted L-shaped portions forming both sides of the square. The giant vertical line extends along the long side of the two vibrators 6 and 7 on both sides where the vibrating surface is not facing. Four water supply holes 4 are provided at four corners of the groove 3 so as to communicate with each other, and are connected to a hose joint 10 which is connected to an external water supply device (not shown). At the time of inspection, water is supplied from the water supply hole 4 to the surface to be inspected. Reference numeral 11 denotes a fixture for attaching the probe 1 to an inspection device or the like. The reason why the grooves 3 along the long sides of the vibrators 6 and 7 at both ends are provided only on one long side and not provided on the other long side is that the grooves 3 are provided on the other side. The reason is that the oscillation and reception of the ultrasonic wave are affected by the groove 3, and it is difficult to detect an accurate reflected wave.
[0013]
FIG. 4 is a schematic view showing a state in which the probe 1 is in contact with the inspection surface P1 of the inspection object P and is in use, and reference numeral 13 denotes water supplied between the inspection surface P1 and the contact surface 2. It is.
[0014]
FIG. 5 is a waveform diagram of an ultrasonic wave displayed on an oscilloscope which is a monitoring device, where d represents a path to a defect existing in the inspection object P (FIG. 6), and t and 2t are obtained from the same defect. The peak value is shown. Here, t is the magnitude of the reflected echo from the defect obtained by the inspection performed by using the conventional probe 1, and 2t is the size of the reflected echo by the inspection performed by using the probe 1 of the present invention. The magnitude of the reflected echo from the obtained defect is shown.
[0015]
FIG. 6 is a conceptual diagram of use of the present invention. Then, as in FIG. 4, the probe 1 is pressed against the inspection surface P1 of the inspection object P, and the monitoring is performed by the amplifier 8 and the oscilloscope 9 as the monitoring device.
[0016]
Next, the operation of the embodiment will be described.
When performing the flaw detection inspection of the inspection object P with the probe 1 configured as shown in FIGS. 1 to 3, the probe 1 is attached to an inspection device or the like (not shown) by the fixture 11. A spring 13 or the like (not shown) presses against the surface to be inspected of the object to be inspected, and water 13 flows through a groove 3 provided between the surface to be inspected and the contact surface 2 to remove a gap formed therebetween. Fill well with water. Next, as shown in FIGS. 4 and 6, the probe 1 is pressed against the inspection surface P1 of the inspection object P, and the ultrasonic waves generated by the transducers 5, 6, 7 are emitted toward the inspection object P. Then, the ultrasonic wave reflected and returned from the test object P is received and amplified through the amplifier 8, and then sent to the oscilloscope 9, where the size of the waveform is visually inspected while automatically scanning.
[0017]
FIG. 7 shows another embodiment of the present invention. Reference numeral 1 denotes a rectangular and box-shaped probe made of acrylic resin or the like. In addition, three vibrators 5, 6, and 7 composed of a piezoelectric element or the like are embedded in the probe 1, and these configurations are the same as those in the embodiment of the present invention. . The above embodiment is different from the above-described embodiment in that the center vibrator 5 is provided at the end of the three vibrators 5, 6, 7, and the vibrators 6, 7 are arranged side by side. The groove 3 for supplying the liquid crystal is formed in a rectangular shape so as to surround the vibrator at the position of the vibrator 5, and is formed in the shape of an L at the positions of the vibrators 6 and 7, and one side thereof is formed in the shape of the rectangular shape. It is different in that it communicates with one side of the U-shape in the same straight line. One side of the L-shape communicating with this one side of the square is along the long side of the other two vibrators that does not face the vibrating surface. It should be noted that the water supply holes 4 are provided at at least four corners of the groove 3 so as to communicate with each other, which is the same as the above embodiment.
[0018]
According to the results of experiments conducted by the inventor, when water 13 was supplied from the four corners of the groove 3 according to the present invention, as shown in FIG. Since the sensitivity is improved, the wave height displayed on the oscilloscope 9 of the monitoring device is increased. As a result, it has been confirmed that the problem that the defect is judged to be acceptable because the flaw detection conditions are poor and the height of the reflected echo from the defect does not increase can be solved.
[0019]
【The invention's effect】
As described above, according to the present invention, water is supplied from at least four corners to the water supply groove formed on the contact surface of the probe, so that the gap between the contact surface and the inspection surface is water. Fully satisfied. In addition, since there is no groove near the long side of the contact surface in the direction that the transducers on both sides are facing, ultrasonic waves emitted obliquely are not disturbed, and accurate and stable This has the effect of allowing the transmitted ultrasonic waves to propagate and enter.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of a probe according to the present invention.
FIG. 2 is a back view of the probe shown in FIG. 1;
FIG. 3 is a right side view in which a part of the probe of the present invention is cut away.
FIG. 4 is a schematic diagram showing a state in which a probe is used by being pressed against a surface to be inspected of an object to be inspected.
FIG. 5 is a waveform diagram of an ultrasonic wave displayed on an oscilloscope.
FIG. 6 is a conceptual diagram of use of the present invention.
FIG. 7 is a front view showing another embodiment of the present invention.
FIG. 8 is a right side view in which a part of a conventional probe is cut away.
FIG. 9 is a front view showing an embodiment of a conventional probe.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Ultrasonic probe 2 Contact surface 3 Groove 4 Water supply holes 5, 6, 7 Transducer 8 Amplifier 9 Oscilloscope 10 Hose joint 13 Water 14, 15, 16 Signal line P Inspection object P1 Inspection surface

Claims (2)

被検査面との接触面が長方形で、振動子が埋め込まれた箱型状の超音波探触子であって、
振動子は長辺方向に並んで3個埋め込まれており、中央の振動子は振動面が上記接触面に平行に埋め込まれ、その両側の2個の振動子は振動面が接触面の一方の長辺の方向を向いて所定の角度をもって埋め込まれており、接触面には被検査面との間に接触媒質を供給するための溝が設けられており、溝の形状は漢字の巨の字状であり、中央の振動子は巨の字状のうちロの字状の部分に囲まれた位置に配置されており、両側の2個の振動子は巨の字状のうちロの字状の部分とこのロの字状の両側を形成するLの字状及び逆Lの字状の部分との間の位置にそれぞれ配置されており、巨の字状の縦の線は前記両側の2個の振動子の振動面が向いていない方の長辺側に沿っており、しかも、溝の少なくとも4隅に接触媒質供給孔を連通して設けていることを特徴とする超音波探触子。
A box-shaped ultrasonic probe having a rectangular contact surface with the surface to be inspected and a vibrator embedded therein,
Three vibrators are buried side by side in the long side direction, and the vibrating surface of the central vibrator is buried in parallel with the contact surface, and the two vibrators on both sides have the vibrating surface of one of the contact surfaces. It is embedded at a predetermined angle in the direction of the long side, and a groove for supplying couplant is provided between the contact surface and the surface to be inspected, and the shape of the groove is a large Chinese character Jodea is, the center of the vibrator is disposed at a position surrounded by the shaped portion of the furnace of the giant-shape, each side of the two vibrators are giant hollow square of shaped Are arranged between the L-shaped portion and the L-shaped and inverted L-shaped portions forming both sides of the square, respectively. is along the two long sides towards the vibrating surface does not face the vibrator, moreover, is provided in communication with at least four corners couplant supply hole of the groove Ultrasonic probe is characterized and.
被検査面との接触面が長方形で、振動子が埋め込まれた箱型状の超音波探触子であって、
振動子は長辺方向に並んで3個埋め込まれており、かつ、それら3個の振動子のうち、端の1個は振動面が上記接触面に平行に埋め込まれ、他の2個は振動面が接触面の一方の長辺の方向を向いて所定の角度をもって埋め込まれており、接触面には被検査面との間に接触媒質を供給するための溝が設けられており、溝の形状は、上記振動面が接触面に平行に埋め込まれた振動子の位置では振動子を囲むようにロの字状を形成し、他の2個の振動子の位置ではLの字状に形成してその一辺が前記ロの字状の一辺と同一直線状に連通しており、このロの字状の一辺と連通しているLの字状の一辺は前記他の2個の振動子の振動面が向いていない方の長辺側に沿っており、しかも、溝の少なくとも4隅に接触媒質供給孔を連通して設けていることを特徴とする超音波探触子。
A box-shaped ultrasonic probe having a rectangular contact surface with the surface to be inspected and a vibrator embedded therein,
Three vibrators are embedded side by side in the long-side direction, and among the three vibrators, one end has a vibrating surface embedded parallel to the contact surface, and the other two vibrators are vibrated. The surface is embedded at a predetermined angle in the direction of one long side of the contact surface, and the contact surface is provided with a groove for supplying a couplant with the surface to be inspected. The shape is such that a square shape is formed so as to surround the vibrator at the position of the vibrator where the vibrating surface is buried in parallel with the contact surface, and an L shape is formed at the positions of the other two vibrators. And one side thereof communicates with the one side of the square in the same straight line, and one side of the L-shape communicating with one side of the square has a shape of the other two vibrators. towards the vibrating surface does not face is along the long side, moreover, that is provided in communication with at least four corners couplant supply hole of the groove An ultrasonic probe and butterflies.
JP25484895A 1995-10-02 1995-10-02 Ultrasonic probe Expired - Lifetime JP3575565B2 (en)

Priority Applications (1)

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JP25484895A JP3575565B2 (en) 1995-10-02 1995-10-02 Ultrasonic probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25484895A JP3575565B2 (en) 1995-10-02 1995-10-02 Ultrasonic probe

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JPH0996627A JPH0996627A (en) 1997-04-08
JP3575565B2 true JP3575565B2 (en) 2004-10-13

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Family Applications (1)

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