JP3545167B2

JP3545167B2 - Substrate transfer cassette

Info

Publication number: JP3545167B2
Application number: JP15216997A
Authority: JP
Inventors: 雅克糸魚川
Original assignee: Sharp Corp
Current assignee: Sharp Corp
Priority date: 1997-06-10
Filing date: 1997-06-10
Publication date: 2004-07-21
Anticipated expiration: 2017-06-10
Also published as: JPH10340949A

Description

【０００１】
【発明の属する技術分野】
本発明は、液晶基板などの基板の格納、検査、破棄、搬送、又は補充などに使用される基板用搬送カセットに関するものである。
【０００２】
【従来の技術】
従来の基板用搬送カセットは、図８や図９に示すカセットケース１を備え、このカセットケース１に液晶基板Ｌを格納する。カセットケース１は、その一端面である正面（図８の斜め左側）と他端面である背面（図９の斜め左側）とがそれぞれ開口した箱形に構成され、背面の両側における天板４と複数の窓穴９を備えた底板８の間には基板用の基板着脱規制バー３６がそれぞれ固定して立て設けられている。
【０００３】
カセットケース１の天板４には一対のハンドル５が支点部材６を介し回転可能にそれぞれ取り付けられ、この一対のハンドル６が前後方向に離れて対向している。さらに、カセットケース１の両側板は、各側板に方形の窓穴１１が並べて開けられ、各側板の内壁には基板用の搭載リブ１２が上下方向に所定のピッチで並べ設けられるとともに、各側板の正面側内壁縁には基板用の抜け止めリブ３８が上下方向に所定のピッチで並べ設けられており、各抜け止めリブ３８が搭載リブ１２上から液晶基板Ｌの脱落するのを有効に防止する。
【０００４】
以上のように構成された基板用搬送カセットは、カセットケース１に単数又は複数枚の液晶基板Ｌを複数の搭載リブ１２を介して収容し、この格納状態で図示しないプロセス生産装置、検査装置、又はカセット一時保管庫などに代表される複数の装置間を専用の搬送車（図示せず）により、又は作業者（図示せず）により搬送される。なお、作業者が運搬、搬送する場合、カセットケース１が多少傾くことがあるが、カセットケース１の背面側には基板着脱規制バー３６が設けられて基板着脱規制方向とされ、カセットケース１の正面のみが実質的に開口しているので、液晶基板Ｌの脱落や落下を有効に防止することができる。
【０００５】
ところで、プロセス生産装置などの装置は、さまざまなタイプがあるが、搬入された基板用搬送カセットから液晶基板Ｌを一枚ずつ取り出して所定の処理や検査を施す枝葉処理式のタイプが多い。このような装置のタイプや特徴などを考慮すると、基板用搬送カセットの液晶基板Ｌの着脱方向を予め装置の処理側方向に向けた方が自動化や生産性などの点で有利であり、しかも、こうすれば、基板用搬送カセットを特定の方向に回転、位置決めするターンテーブルなどの回転機構や専用の装置を省略することも可能となる（なお、カセットの回転に関する先行技術文献として実開昭６３ー１３７９３８号公報参照）。
【０００６】
そこで、従来、基板用搬送カセットは、カセットケース１の正面が装置処理用開口部２として装置の処理側方向に向けられ、基板着脱規制バー３６を備えた背面が搬送通路側に向くようセットされる。
【０００７】
【発明が解決しようとする課題】
従来の基板用搬送カセットは、以上のように液晶基板Ｌの着脱方向が一方向であり、液晶基板Ｌの着脱方向が装置の処理側方向を向くようセットされるので、液晶基板Ｌの検査、破棄、又は補充などの場合に問題を生じていた。この点に関して詳説すると、例えば生産ラインの立ち上げ当初のとき、新機種を生産ラインに投入したとき、又はこれらの装置で処理された基板用搬送カセットを次工程に搬送するなどの場合、液晶基板Ｌ中に欠陥や不良箇所があるか否か、あるいは液晶基板Ｌに対する処理が適正か否かを作業者が目視で検査、確認したいことがある。
【０００８】
これらの場合、先ず、基板用搬送カセットを装置の搬入、搬出位置で持ち上げて装置処理用開口部２を液晶基板Ｌを取り出し可能な方向に向け、必要な液晶基板Ｌを取り出して検査、確認し、液晶基板Ｌが良品であれば元の位置に戻し、不良品であれば破棄する。この際、良品の液晶基板Ｌの枚数が少なければ、以後の工程の搬送効率や生産効率などを考慮して液晶基板Ｌを挿入、補充する。こうして作業が終了したら、基板用搬送カセットの向きを元に戻して搬送車や作業者により搬送、運搬する。
【０００９】
このように液晶基板Ｌの検査、破棄、又は補充などの作業の場合、基板用搬送カセットの装置処理用開口部２の方向を変えなければならないので、作業が不便で遅延化や煩雑化を招くという問題があった。この問題を解消するには、前記した回転機構や専用の装置を設置すれば良いが、これらの装置は構成が複雑で高価であり、しかも、クリーンルームに専用スペースを設けなければならず、必ずしも現実的な方法であるとはいえない。
【００１０】
本発明は、前記従来の問題点に鑑みなされたもので、比較的安価、簡易な構成で、向きを変えることなく、基板の検査などの作業を円滑に行うことのできる基板用搬送カセットを提供することを目的としている。
【００１１】
【課題を解決するための手段】
本発明においては、前記課題を解決するため、一端面が開口したカセットケースに基板を水平状態に格納するものにおいて、
前記カセットケースの他端面に形成された作業者用の作業開口部と、前記カセットケースの移動時には該作業開口部に対する前記基板の着脱を規制し、作業者の作業時には該作業開口部に対する該基板の着脱を可能とする基板着脱制御手段とを備え、
前記基板着脱制御手段は、前記カセットケースの移動時にカセットケースの天板に取り付けられた回転可能なハンドルを起こして当該ハンドルに連結部材を介し連結された該天板上の第一スライダを天板の他端部から一端部方向に離隔させ、作業者の作業時には前記ハンドルを該天板の他端部側に倒して該第一スライダを天板他端部に接近させる操作機構と、前記第一スライダの離隔時に第一スライダに前記天板他端部の複数の運動方向変換部材を連動させて運動方向変換部材に設けられて上下方向に伸びる一対のバーをそれぞれ作業開口部側方の基板着脱可能位置から作業開口部内の基板着脱規制領域に移動させ、前記第一スライダの接近時には第一スライダに該運動方向変換部材を連動させて該バーをそれぞれ該基板着脱規制領域から該基板着脱可能位置に移動させる制御機構とを含み、
前記複数の運動方向変換部材を一対の第二スライダとして各第二スライダを前記天板他端部の側部近傍上に後退用のばね部材を介して設置し、各第二スライダを前記第一スライダに形成した傾斜面に接触させ、各第二スライダにバーの上部を支持させて残部を前記天板と前記カセットケースの底板との間に位置させ、各第二スライダを前記第一スライダの離隔に基づいて該天板他端部の中央部方向に後退させるとともに、各第二スライダを該第一スライダの接近に基づいて該天板他端部の側部方向に進出させるようにし、
前記各バーには、前記基板用の抜け止め部材を上下方向に並べ設けて前記基板の背面側端部に接触可能としたことを特徴としている。
【００１２】
なお、前記第一スライダと前記第二スライダの少なくともいずれか一方にガイド孔を設け、このガイド孔に、前記天板に立て設けたガイド部材を嵌め入れてその突出上部にはがたつき防止部材を設けることが好ましい。
また、前記第一スライダの傾斜面に接触する前記第二スライダの接触部を回転子とすることが好ましい。
【００１３】
本発明によれば、基板用搬送カセットを移動させる場合、起伏部材であるハンドルを起こせば良い。すると、スライダである第一スライダがスライドしてカセットケースの天板の他端部から遠ざけられ、運動方向変換部材である第二スライダに対する干渉を緩和する。これにより、第二スライダが動作して基板着脱規制部材である各バーが作業開口部の基板着脱可能位置から作業開口部内の中央部方向寄り、すなわち基板規制領域に移動する。各バーが移動すると、カセットケースの作業用開口部が閉そくされて基板の着脱が規制される。
【００１４】
これに対し、作業者が基板の検査、破棄、補充等の作業を行いたい場合には、起きた状態のハンドルを天板の他端部側に倒せば良い。すると、第一スライダがカセットケースの天板の他端部側に接近して第二スライダに対する干渉を強める。これにより、第二スライダが動作して各バーが作業開口部の基板規制領域から基板着脱可能位置に移動する。この移動作用により、カセットケースの作業用開口部が開放されて基板の着脱が可能になる。
【００１５】
また、ハンドルが回転すると、このハンドルの回転運動が連結部材の伝達作用で直線運動に変換され、スライダがスライドしてカセットケースの天板の他端部から離れたり、あるいは天板の他端部に接近する。
【００１６】
【発明の実施の形態】
以下、図面を参照して本発明の実施の形態を説明する。本実施形態における基板用搬送カセットは、図１などに示すように、カセットケース１Ａを備え、このカセットケース１Ａの天板４Ａ及び作業開口部３の両側部には基板着脱制御手段１３を設置している。
【００１７】
カセットケース１Ａは、図１や図２に示すように、アルミ合金や各種の合成樹脂（例えば、ポリプロピレンやポリカーボネートなど）などを材料として既存のものと基本的には寸法が同一の箱形に構成され、その一端面である正面（図１の斜め右上側）と他端面である背面（図１の斜め左下側）とがそれぞれ開口形成されており、正面が装置処理用開口部２Ａとして、背面が作業者用の作業開口部３として利用される。カセットケース１Ａの天板４Ａは、その一端部側寄りにほぼ逆Ｕ字形のハンドル５が一対の支点部材６を介し９０度回転可能に取り付けられ、反対の他端部の両側には後述する基板着脱規制バー用の切り欠き７がそれぞれ方形に切り欠かれている。
【００１８】
また、カセットケース１Ａの底板８Ａは、同図に示すように、方形を呈した作業用の複数の窓穴９Ａがマトリックスに開けられ、その他端部の両側には上方の切り欠き７に対向するガイドみぞ１０がそれぞれ開けられている。各ガイドみぞ１０は、ほぼ小判形に形成され、底板８Ａの他端部縁に平行に形成されている。また、カセットケース１Ａの両側板は、各側板に作業用の方形の窓穴１１Ａが並べて開けられるとともに、各側板の内壁には断面ほぼ台形状の搭載リブ１２Ａが上下方向に所定のピッチで並べ設けられ、各搭載リブ１２Ａの突出上部に液晶基板Ｌが支持されるようになっている。
【００１９】
また、基板着脱制御手段１３は、運搬用のハンドル１６及び一対の第一スライダ１８とからなる操作機構１４と、一対の第二スライダ２７及び一対の基板着脱規制バー３６Ａとからなる制御機構１５とを備えている。操作機構１４のハンドル１６は、図１や図２に示すように、ほぼ逆Ｕ字形に形成され、その両側部には連結支点ボス１７がそれぞれ水平に挿着されており、天板４Ａの他端部側寄りに一対の支点部材６を介して９０度回転可能に取り付けられている。また、各第一スライダ１８は、縦断面ほぼＬ字形に形成され、天板４Ａの他端部寄り上にスライド可能に搭載されている。
【００２０】
各第一スライダ１８のスライド部１９は、天板４Ａの他端部側の端面が傾斜面２０に形成され、長さの異なる一対のガイドみぞ孔２１がカセットケース１Ａの両端部方向、換言すれば、スライド方向に向けて開けられており、各ガイドみぞ孔２１には天板４Ａから垂直上方に突出した制御軸受２２付きのガイドピン２３がすきまを介して嵌められるとともに、このガイドピン２３の上部にはがたつき防止フランジ２４が半径外方向に水平に張り出して一体形成されている。なお、制御軸受２２は一方のガイドピン２３にのみ嵌められている。各第一スライダ１８の起立部には連結支点ボス貫通用の縦みぞ孔２５が上下方向に開けられ、起立部の下部には復帰スプリング３２用の貫通長孔２６がカセットケース１Ａの両端部方向に向けて開けられている。
【００２１】
また、制御機構１５の各第二スライダ２７は、平面ほぼＬ字形に形成され、天板４Ａの他端部の側部近傍上にスライド可能に搭載されている。各第二スライダ２７には長さの異なる一対のガイドみぞ孔２８がカセットケース１Ａの両側部方向（図３の上下方向）、換言すれば、スライド方向に向けて開けられ、各ガイドみぞ孔２８には天板４Ａから垂直上方に突出した制御軸受２９付きのガイドピン３０がすきまを介して嵌められており、このガイドピン３０の上部にはがたつき防止フランジ３１が半径外方向に水平に張り出して一体形成されている。なお、制御軸受２９は一方のガイドピン３０にのみ嵌められている。
【００２２】
各第二スライダ２７の両端部の内側と天板４Ａとの間には復帰スプリング３２がフックボス３３を介してそれぞれ介在され、ハンドル１６寄りの復帰スプリング３２が第一スライダ１８の貫通長孔２６を貫通している。これら複数のフックボス３３は、各第二スライダ２７の表面と天板４Ａの表面からそれぞれ垂直上方に突出している。各第二スライダ２７のハンドル１６寄りの端部の内部にはローラからなる回転子３４が支持軸３５を介して隠蔽支持され、回転子３４の露出部が第一スライダ１８のスライド部１９の傾斜面２０に点接触するよう作用する（図５参照）。
【００２３】
さらに、各基板着脱規制バー３６Ａは、図１や図２に示すように、既存のものと基本的には寸法が同一の棒状に構成され、その縮径に構成された上部が第二スライダ２７の天板４Ａ他端部側の角部に円筒形のかしめ部３７を介して嵌着支持され、下部が底板８Ａのガイドみぞ１０にスライド可能に嵌め入れられている。各基板着脱規制バー３６Ａの相互に対向する対向面にはブロック状の抜け止めリブ３８Ａが上下方向に所定のピッチで並べ設けられ、各抜け止めリブ３８Ａが各搭載リブ１２Ａの上部とほぼ同位するようになっている。各抜け止めリブ３８Ａは、搭載リブ１２Ａ上の液晶基板Ｌの背面側の端部に接触してその位置ずれ、脱落、又は落下などを有効に防止するよう作用する。
【００２４】
前記構成の基板用搬送カセットは、カセットケース１Ａに単数又は複数枚の液晶基板Ｌを複数の搭載リブ１２Ａを介して水平状態に収容し、この格納状態で図示しないプロセス生産装置、検査装置、又はカセット一時保管庫などに代表される複数の装置間を専用の搬送車（図示せず）により、又は作業者（図示せず）により搬送される。なお、各基板着脱規制バー３６Ａには液晶基板Ｌに接触する抜け止めリブ３８Ａが所定のピッチで並べ設けられているので、装置の移載アームで液晶基板Ｌを水平移動させるなどの場合、液晶基板Ｌの位置ずれ、脱落、又は落下などを有効に防止することができる。
【００２５】
また、液晶基板Ｌの着脱方向が装置の処理側方向を向いた場合において、基板用搬送カセットを作業者が運搬、搬送するとき、倒れている一対のハンドル５、１６を運搬位置に起こして手で握れば良い。すると、ハンドル１６の回転に伴い各第一スライダ１８がガイドピン２３に案内されつつそれぞれカセットケース１Ａの正面側に直線的に後退して接触している各第二スライダ２７に対する圧接、干渉を緩和する。この際、ガイドみぞ孔２１とガイドピン２３の間に位置する制御軸受２２が各第一スライダ１８のスライドをスムーズにする。また、がたつき防止フランジ２４は、各第一スライダ１８の上下方向のがたつきを有効に制御防止し、この防止作用により、各第一スライダ１８がスムーズにスライドする。
【００２６】
これにより、各第二スライダ２７が復帰スプリング３２のばね作用で天板４Ａの他端部の側部から中央部方向にガイドピン３０に案内されつつ直線的に後退し、各基板着脱規制バー３６Ａが作業開口部３の側部、すなわち基板着脱可能位置から作業開口部３内の中央部方向寄り、すなわち基板規制領域の基板規制位置にガイドみぞ１０に案内されつつスライドする。この際、各第一スライダ１８の傾斜面２０に各第二スライダ２７の回転子３４が転がり接触しつつ回転するので、各第二スライダ２７は円滑にスライドする。また、ガイドみぞ孔２８とガイドピン３０の間に位置する制御軸受２９が各第二スライダ２７のスライドをスムーズにする。
【００２７】
また、がたつき防止フランジ３１は、各第二スライダ２７の上下方向のがたつきを有効に制御防止し、この防止作用により、各第二スライダ２７が滑らかにスライドする。以上のように各基板着脱規制バー３６Ａがスライドすると、カセットケース１Ａの作業開口部３の両側が閉そくされて液晶基板Ｌの着脱が禁止され、作業者は、安心して基板用搬送カセットを運搬、搬送することができる。
【００２８】
これに対し、作業者が液晶基板Ｌの検査、破棄、又は補充などの作業を行いたい場合には、起立しているハンドル１６を天板４Ａの作業開口部側に倒せば良い。すると、ハンドル１６の回転に伴い各第一スライダ１８がガイドピン２３に案内されつつそれぞれカセットケース１Ａの背面側に直線的に進出して接触している各第二スライダ２７に対する圧接、干渉を強める。なお、この際、がたつき防止フランジ２４は前記と同様に機能する。
【００２９】
これにより、各第二スライダ２７が復帰スプリング３２のばね作用に抗して天板４Ａの他端部の中央部から側部方向にガイドピン３０に案内されつつ直線的に進出し、各基板着脱規制バー３６Ａが作業開口部３の基板規制領域の基板規制位置及びその残部の基板着脱軌跡から基板着脱可能位置にガイドみぞ１０に案内されつつスライドする。このスライド作用でカセットケース１Ａの作業開口部３から障害物がなくなり、作業者は、安心して液晶基板Ｌの検査、破棄、又は補充などの作業を行うことができる。なお、この際、回転子３４、制御軸受２９、及びがたつき防止フランジ３１は前記と同様に機能する。
【００３０】
前記構成によれば、カセットケース１Ａに対する液晶基板Ｌの着脱を二方向からできるので、例え液晶基板Ｌの検査、破棄、又は補充などの作業の場合でも、基板用搬送カセットの装置処理用開口部２Ａの方向を変える必要性が全くなく、作業が容易で作業の遅延化や煩雑化を確実に防止することができる。また、これにより、回転機構や専用の装置を設置する必要もなく、さらにクリーンルームに専用スペースを設ける必要性もない。また、構成が比較的簡素であるから、メンテナンスも容易で、安価が期待できる。
【００３１】
なお、基板の着脱を二方向から可能とする技術的思想については、特開平６―２７１００４号公報に開示されているが、この技術は本願と技術的思想や構成が著しく異なり、しかも、作業開口部３を開閉する基板着脱制御手段１３についてはなんら記載がないとともに、それを示唆する記載すら見当たらない。したがって、本願の目的を到底達成することができず、しかも、移動の際の位置ずれ、脱落、又は落下を本願のように有効に防止することができないものである。
【００３２】
なお、前記実施形態では、液晶基板Ｌを例に説明したが、なんらこれに限定されるものではなく、各種の基板や半導体ウェーハなどを格納する場合にも用いることができる。また、既存のカセットケース１や基板着脱規制バー３６を流用して構成することも可能である。また、同様の作用効果が期待できるのであれば、ハンドル５、１６や連結支点ボス１７の位置、構成、又は機構などを必要に応じ適宜変更することができる。また、同様の作用が期待できるのであれば、復帰スプリング３２としてコイルばね以外のばねを使用したり、ばねの本数を適宜増減することも可能である。
【００３３】
また、同様の作用効果が期待できるのであれば、各基板着脱規制バー３６Ａを板形や扉形などに適宜変更構成しても良い。さらに、第一スライダ１８の進出で各第二スライダ２７が回転し、各基板着脱規制バー３６Ａが作業開口部３の基板規制領域の基板規制位置から基板着脱可能位置に弧を描きつつ揺動する構成などでも良いのはいうまでもない。
【００３４】
以上のように本発明によれば、前記カセットケースの他端面に形成された作業者用の作業開口部と、前記カセットケースの移動時には該作業開口部に対する前記基板の着脱を規制し、作業者の作業時には該作業開口部に対する該基板の着脱を可能とする基板着脱制御手段とを備え、前記基板着脱制御手段は、前記カセットケースの移動時にカセットケースの天板に取り付けられた回転可能なハンドルを起こして当該ハンドルに連結部材を介し連結された該天板上の第一スライダを天板の他端部から一端部方向に離隔させ、作業者の作業時には前記ハンドルを該天板の他端部側に倒して該第一スライダを天板他端部に接近させる操作機構と、前記第一スライダの離隔時に第一スライダに前記天板他端部の複数の運動方向変換部材を連動させて運動方向変換部材に設けられて上下方向に伸びる一対のバーをそれぞれ作業開口部側方の基板着脱可能位置から作業開口部内の基板着脱規制領域に移動させ、前記第一スライダの接近時には第一スライダに該運動方向変換部材を連動させて該バーをそれぞれ該基板着脱規制領域から該基板着脱可能位置に移動させる制御機構とを含み、前記複数の運動方向変換部材を一対の第二スライダとして各第二スライダを前記天板他端部の側部近傍上に後退用のばね部材を介して設置し、各第二スライダを前記第一スライダに形成した傾斜面に接触させ、各第二スライダにバーの上部を支持させて残部を前記天板と前記カセットケースの底板との間に位置させ、各第二スライダを前記第一スライダの離隔に基づいて該天板他端部の中央部方向に後退させるとともに、各第二スライダを該第一スライダの接近に基づいて該天板他端部の側部方向に進出させるようにし、前記各バーには、前記基板用の抜け止め部材を上下方向に並べ設けて前記基板の背面側端部に接触可能とするので、従来例に比べ安価、簡素な構成でカセットケースの向きを変更することなく、基板の検査等の作業を円滑に行うことができるという効果がある。
特に、簡易な構成のリンク機構とスライド機構とを利用してカセットケースの向きを変更することなく、基板の検査等の作業を容易に行うことができる。
また、前記第一スライダと前記第二スライダの少なくともいずれか一方にガイド孔を設け、このガイド孔に、前記天板に立て設けたガイド部材を嵌め入れてその突出上部にはがたつき防止部材を設ければ、第一スライダが鉛直方向や水平方向にふらつくことなく、所定の方向にスムーズに運動させることができる。
さらに、前記第一スライダの傾斜面に接触する前記第二スライダの接触部を回転子とすれば、第一、第二のスライダが噛み合ったり、接触に伴い故障したりすることがないので、第二スライダを滑らかに摺動させることが可能になる。
【図面の簡単な説明】
【図１】本発明に係る基板用搬送カセットの実施の形態を示す説明図で、各基板着脱規制バーが作業開口部の基板規制領域に位置する状態を示す斜視図である。
【図２】本発明に係る基板用搬送カセットの実施の形態を示す説明図で、各基板着脱規制バーが作業開口部の基板着脱可能位置に位置する状態を示す斜視図である。
【図３】本発明に係る基板用搬送カセットの実施の形態を示す要部拡大説明図である。
【図４】図３のＡ―Ａ線断面図である。
【図５】図３のＢ―Ｂ線断面図である。
【図６】図３のＣ―Ｃ線断面図である。
【図７】図１のＰ方向からみた説明図である。
【図８】従来の基板用搬送カセットを基板着脱方向からみた状態を示す斜視図である。
【図９】従来の基板用搬送カセットを基板着脱規制方向からみた状態を示す斜視図である。
【符号の説明】
１Ａカセットケース
２Ａ装置処理用開口部
３作業開口部
４天板
８Ａ底板
１３基板着脱制御手段
１４操作機構
１５制御機構
１６ハンドル（起伏部材）
１８第一スライダ（スライダ）
２０傾斜面
２１ガイドみぞ孔（ガイド孔）
２３ガイドピン（ガイド部材）
２４がたつき防止フランジ（がたつき防止部材）
２７第二スライダ（運動方向変換部材）
２８ガイドみぞ孔（ガイド孔）
３０ガイドピン（ガイド部材）
３１がたつき防止フランジ（がたつき防止部材）
３２復帰スプリング（ばね部材）
３４回転子
３６Ａ基板着脱規制バー
Ｌ液晶基板（基板）[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a substrate transport cassette used for storing, inspecting, discarding, transporting, or replenishing a substrate such as a liquid crystal substrate.
[0002]
[Prior art]
A conventional substrate transfer cassette includes a cassette case 1 shown in FIGS. 8 and 9 and stores a liquid crystal substrate L in the cassette case 1. The cassette case 1 is formed in a box shape in which a front surface (oblique left side in FIG. 8) as one end surface and a rear surface (oblique left side in FIG. 9) as the other end surface are respectively opened. Between the bottom plate 8 having the plurality of window holes 9, a substrate attachment / detachment regulating bar 36 for the substrate is fixedly provided upright.
[0003]
A pair of handles 5 are rotatably attached to the top plate 4 of the cassette case 1 via fulcrum members 6, and the pair of handles 6 are opposed to each other in the front-rear direction. Further, on both side plates of the cassette case 1, rectangular window holes 11 are opened in each side plate, and mounting ribs 12 for substrates are provided on the inner wall of each side plate at a predetermined pitch in the vertical direction. The retaining ribs 38 for the substrate are vertically arranged at a predetermined pitch on the inner wall edge on the front side of the liquid crystal panel, and each retaining rib 38 effectively prevents the liquid crystal substrate L from falling off from the mounting rib 12. I do.
[0004]
In the substrate transport cassette configured as described above, one or more liquid crystal substrates L are accommodated in the cassette case 1 via the plurality of mounting ribs 12, and in this stored state, a process production device, an inspection device, Alternatively, a plurality of apparatuses typified by a cassette temporary storage are transported by a dedicated transport vehicle (not shown) or by an operator (not shown). When the operator carries or conveys the cassette case 1, the cassette case 1 may be slightly inclined. However, a substrate attachment / detachment regulating bar 36 is provided on the back side of the cassette case 1, and the substrate attachment / detachment regulation direction is set. Since only the front surface is substantially open, it is possible to effectively prevent the liquid crystal substrate L from falling off or falling.
[0005]
By the way, there are various types of apparatuses such as a process production apparatus, and there are many types of branch processing type in which liquid crystal substrates L are taken out one by one from a loaded substrate transport cassette and subjected to predetermined processing and inspection. In consideration of the type and characteristics of such an apparatus, it is advantageous in terms of automation, productivity, and the like to direct the attaching / detaching direction of the liquid crystal substrate L of the substrate transfer cassette to the processing side of the apparatus in advance, and This makes it possible to omit a rotation mechanism such as a turntable for rotating and positioning the substrate transfer cassette in a specific direction and a dedicated device. -137938).
[0006]
Therefore, conventionally, the substrate transport cassette is set such that the front surface of the cassette case 1 is directed toward the processing side of the device as the device processing opening 2 and the rear surface provided with the substrate attachment / detachment regulating bar 36 is directed toward the transport passage. You.
[0007]
[Problems to be solved by the invention]
As described above, the conventional substrate transfer cassette is set such that the mounting and dismounting direction of the liquid crystal substrate L is one direction and the mounting and dismounting direction of the liquid crystal substrate L is directed to the processing side of the apparatus. There was a problem in the case of discarding or refilling. To explain this point in detail, for example, at the start of the production line, when a new model is put into the production line, or when the substrate transport cassette processed by these devices is transported to the next process, the liquid crystal substrate An operator may want to visually inspect and confirm whether or not there is a defect or a defective portion in L, or whether or not processing of the liquid crystal substrate L is appropriate.
[0008]
In these cases, first, the substrate transfer cassette is lifted at the loading / unloading position of the apparatus, the apparatus processing opening 2 is oriented in a direction in which the liquid crystal substrate L can be taken out, and the necessary liquid crystal substrate L is taken out for inspection and confirmation. If the liquid crystal substrate L is non-defective, it is returned to the original position, and if defective, it is discarded. At this time, if the number of non-defective liquid crystal substrates L is small, the liquid crystal substrates L are inserted and replenished in consideration of transfer efficiency and production efficiency in the subsequent steps. When the operation is completed in this manner, the orientation of the substrate transport cassette is returned to the original position, and the substrate is transported and transported by a transport vehicle or an operator.
[0009]
As described above, in the case of work such as inspection, discarding, or replenishment of the liquid crystal substrate L, the direction of the device processing opening 2 of the substrate transfer cassette must be changed, which is inconvenient and causes delay and complexity. There was a problem. In order to solve this problem, the above-described rotating mechanism and a dedicated device may be installed. However, these devices are complicated and expensive, and a dedicated space must be provided in a clean room. This is not a typical method.
[0010]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described conventional problems, and provides a substrate transfer cassette that can perform operations such as substrate inspection smoothly with a relatively inexpensive and simple configuration without changing its direction. It is intended to be.
[0011]
[Means for Solving the Problems]
In the present invention, in order to solve the above-mentioned problem, in a case where the substrate is stored in a horizontal state in a cassette case having an open end,
A work opening for the operator formed at the other end surface of the cassette case, and the attachment / detachment of the substrate to / from the work opening when the cassette case is moved; Board attachment / detachment control means for enabling attachment / detachment of
The substrate attaching / detaching control means raises a rotatable handle attached to a top plate of the cassette case when the cassette case is moved, and moves the first slider on the top plate connected to the handle via a connecting member to the top plate. An operating mechanism for moving the handle toward the other end of the top plate to move the first slider closer to the other end of the top plate when the worker is working, At the time of separation of one slider, the plurality of movement direction conversion members at the other end of the top plate are interlocked with the first slider, and a pair of bars provided on the movement direction conversion member and extending in the vertical direction are respectively provided on the substrate on the side of the work opening. It is moved from the detachable position to the substrate attachment / detachment restriction area in the work opening, and when the first slider approaches, the movement direction conversion member is linked to the first slider to move the bars from the substrate attachment / detachment restriction area. And a control mechanism for moving the plate removable position,
Each of the plurality of movement direction converting members is provided as a pair of second sliders, and each second slider is installed via a spring member for retreat on a side near the other end of the top plate, and each second slider is attached to the first slider. The second slider is brought into contact with the inclined surface formed on the slider, the upper portion of the bar is supported by each second slider, and the remaining portion is positioned between the top plate and the bottom plate of the cassette case. While retreating toward the center of the other end of the top plate based on the separation, each second slider is advanced toward the side of the other end of the top plate based on the approach of the first slider,
Each of the bars is provided with a retaining member for the substrate, which is arranged in the up-down direction so as to be able to come into contact with the rear end of the substrate.
[0012]
A guide hole is provided in at least one of the first slider and the second slider, and a guide member provided on the top plate is fitted into the guide hole, and a rattling preventing member is provided on an upper part of the protrusion. Is preferably provided.
Further, it is preferable that a contact portion of the second slider that contacts the inclined surface of the first slider is a rotor.
[0013]
According to the present invention, when the substrate transport cassette is moved, the handle, which is the undulating member, may be raised. Then, the first slider as the slider slides away from the other end of the top plate of the cassette case, and the interference with the second slider as the movement direction changing member is reduced. As a result, the second slider operates to move each bar, which is a board attachment / detachment regulating member, from the position where the board can be attached / detached at the work opening toward the center in the work opening, that is, to the board regulation area. When each bar moves, the work opening of the cassette case is closed, and the attachment / detachment of the substrate is regulated.
[0014]
On the other hand, when the operator wants to perform operations such as inspecting, discarding, and refilling the board, the handle in the raised state may be tilted to the other end of the top plate. Then, the first slider approaches the other end of the top plate of the cassette case to increase the interference with the second slider. As a result, the second slider operates to move each bar from the substrate regulating region of the work opening to the substrate removable position. By this movement, the work opening of the cassette case is opened, and the substrate can be attached and detached.
[0015]
When the handle rotates, the rotational motion of the handle is converted into a linear motion by the transmitting action of the connecting member, and the slider slides away from the other end of the top plate of the cassette case, or the other end of the top plate. Approach.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. As shown in FIG. 1 and the like, the substrate transfer cassette according to the present embodiment includes a cassette case 1A, and a substrate attachment / detachment control unit 13 is provided on both sides of the top plate 4A and the work opening 3 of the cassette case 1A. ing.
[0017]
As shown in FIGS. 1 and 2, the cassette case 1A is made of an aluminum alloy or various synthetic resins (for example, polypropylene or polycarbonate) or the like, and has a box shape having basically the same dimensions as existing ones. The front surface (obliquely upper right side in FIG. 1) which is one end surface and the back surface (obliquely lower left side in FIG. 1) which is the other end surface are each formed with an opening. Is used as the work opening 3 for the worker. The top plate 4A of the cassette case 1A has a substantially inverted U-shaped handle 5 attached to one end side thereof so as to be rotatable by 90 degrees via a pair of fulcrum members 6, and a substrate to be described later on both sides of the other end. The notches 7 for the attachment / detachment control bars are each cut in a square shape.
[0018]
As shown in the figure, the bottom plate 8A of the cassette case 1A is provided with a plurality of window holes 9A for work having a square shape, and is opposed to the upper notch 7 on both sides of the other end. Guide grooves 10 are each opened. Each guide groove 10 is formed in a substantially oval shape, and is formed in parallel with the edge of the other end of the bottom plate 8A. On both side plates of the cassette case 1A, rectangular window holes 11A for work are arranged and opened in each side plate, and mounting ribs 12A having a substantially trapezoidal cross section are arranged on the inner wall of each side plate at a predetermined pitch in the vertical direction. The liquid crystal substrate L is provided on the protruding upper portion of each mounting rib 12A.
[0019]
The board attachment / detachment control unit 13 includes an operation mechanism 14 including a transport handle 16 and a pair of first sliders 18, and a control mechanism 15 including a pair of second sliders 27 and a pair of board attachment / removal restriction bars 36A. It has. As shown in FIGS. 1 and 2, the handle 16 of the operating mechanism 14 is formed in a substantially inverted U-shape, and connection fulcrum bosses 17 are horizontally inserted on both sides thereof. It is attached to the end side side via a pair of fulcrum members 6 so as to be rotatable by 90 degrees. Each of the first sliders 18 has a substantially L-shaped vertical section, and is slidably mounted on the top plate 4A near the other end.
[0020]
The slide portion 19 of each first slider 18 has an end surface on the other end side of the top plate 4A formed on the inclined surface 20, and a pair of guide groove holes 21 having different lengths are formed in opposite end portions of the cassette case 1A, in other words. For example, a guide pin 23 with a control bearing 22 projecting vertically upward from the top plate 4A is fitted into each guide groove hole 21 through a gap, and the guide pin 23 is An anti-rattle flange 24 is integrally formed at the upper portion so as to protrude horizontally in a radially outward direction. The control bearing 22 is fitted on only one of the guide pins 23. Vertical groove holes 25 for connecting fulcrum bosses are vertically formed in the upright portions of the first sliders 18, and long slots 26 for return springs 32 are formed in the lower portions of the upright portions toward both end portions of the cassette case 1A. Opened to
[0021]
Each of the second sliders 27 of the control mechanism 15 is formed in a substantially L-shaped plane, and is slidably mounted on the side near the other end of the top plate 4A. Each of the second sliders 27 has a pair of guide groove holes 28 having different lengths, which are opened toward both sides of the cassette case 1A (vertical direction in FIG. 3), in other words, in the sliding direction. A guide pin 30 with a control bearing 29 projecting vertically upward from the top plate 4A is fitted through a clearance, and a rattling preventing flange 31 is horizontally mounted on the upper portion of the guide pin 30 in a radially outward direction. It overhangs and is integrally formed. The control bearing 29 is fitted on only one of the guide pins 30.
[0022]
A return spring 32 is interposed between the inside of both ends of each second slider 27 and the top plate 4A via a hook boss 33, and the return spring 32 close to the handle 16 closes the through hole 26 of the first slider 18. Penetrates. The plurality of hook bosses 33 project vertically upward from the surface of each second slider 27 and the surface of the top plate 4A, respectively. A rotor 34 composed of a roller is concealed and supported by a support shaft 35 inside the end of each second slider 27 near the handle 16, and the exposed portion of the rotor 34 is inclined by the inclination of the slide portion 19 of the first slider 18. It acts to make point contact with the surface 20 (see FIG. 5).
[0023]
Further, as shown in FIG. 1 and FIG. 2, each of the board attachment / detachment regulating bars 36A is formed in a rod shape whose dimensions are basically the same as those of the existing ones, and the upper portion having a reduced diameter is provided with a second slider 27A. Of the top plate 4A is fitted and supported via a cylindrical caulking portion 37, and the lower portion is slidably fitted in the guide groove 10 of the bottom plate 8A. Block-shaped retaining ribs 38A are vertically arranged at a predetermined pitch on opposing surfaces of the board attachment / removal regulating bars 36A, and each retaining rib 38A is substantially at the same position as the upper part of each mounting rib 12A. It has become. Each retaining rib 38A comes into contact with the rear end of the liquid crystal substrate L on the mounting rib 12A, and acts to effectively prevent its displacement, dropping, or falling.
[0024]
In the substrate transport cassette having the above-described configuration, a single or a plurality of liquid crystal substrates L are housed in a cassette case 1A in a horizontal state via a plurality of mounting ribs 12A. It is conveyed between a plurality of apparatuses represented by a cassette temporary storage or the like by a dedicated carrier (not shown) or by an operator (not shown). Since the retaining ribs 38A that come into contact with the liquid crystal substrate L are provided at a predetermined pitch on each of the substrate attachment / detachment regulating bars 36A, when the liquid crystal substrate L is horizontally moved by the transfer arm of the apparatus, the It is possible to effectively prevent the substrate L from being displaced, dropped, or dropped.
[0025]
Further, when the operator attaches / detaches the liquid crystal substrate L to the processing side of the apparatus and transports / transports the substrate transport cassette, the operator raises the pair of handles 5 and 16 that have fallen down to the transport position and raises the hand. Just hold it with Then, the first sliders 18 are guided by the guide pins 23 with the rotation of the handle 16 and the pressure contact and the interference with the respective second sliders 27 linearly receding to the front side of the cassette case 1A are alleviated. I do. At this time, the control bearing 22 located between the guide slot 21 and the guide pin 23 makes each first slider 18 slide smoothly. In addition, the rattling preventing flange 24 effectively controls and prevents rattling of the first sliders 18 in the vertical direction, and the first sliders 18 slide smoothly by this preventing action.
[0026]
As a result, each second slider 27 recedes linearly from the side of the other end of the top plate 4A toward the central portion by the spring action of the return spring 32 while being guided by the guide pin 30. Slides while being guided by the guide groove 10 toward the center of the work opening 3 from the side of the work opening 3, that is, the board detachable position, that is, to the board regulation position in the board regulation area. At this time, since the rotor 34 of each second slider 27 rotates while rollingly contacting the inclined surface 20 of each first slider 18, each second slider 27 slides smoothly. In addition, a control bearing 29 located between the guide slot 28 and the guide pin 30 makes each second slider 27 slide smoothly.
[0027]
In addition, the rattling preventing flange 31 effectively controls and prevents vertical rattling of each of the second sliders 27, and the second slider 27 slides smoothly by this preventing action. As described above, when each of the substrate attachment / detachment regulating bars 36A slides, both sides of the work opening 3 of the cassette case 1A are closed, and attachment / detachment of the liquid crystal substrate L is prohibited. Can be transported.
[0028]
On the other hand, when the operator wants to perform operations such as inspection, discarding, or replenishment of the liquid crystal substrate L, the upright handle 16 may be tilted to the work opening side of the top plate 4A. Then, with the rotation of the handle 16, each first slider 18 is guided by the guide pin 23, and linearly advances to the rear side of the cassette case 1 </ b> A, and presses and interferes with each second slider 27 that is in contact therewith. . In this case, the rattling preventing flange 24 functions in the same manner as described above.
[0029]
As a result, each second slider 27 linearly advances from the center of the other end of the top plate 4A in the lateral direction while being guided by the guide pins 30 against the spring action of the return spring 32, and allows each substrate to be attached and detached. The regulating bar 36A slides while being guided by the guide groove 10 to a substrate detachable position from a substrate regulating position in the substrate regulating region of the work opening 3 and a substrate attaching / detaching locus of the remaining portion. With this sliding action, there is no obstacle from the working opening 3 of the cassette case 1A, and the worker can perform operations such as inspection, discarding, or replenishment of the liquid crystal substrate L with confidence. At this time, the rotor 34, the control bearing 29, and the rattling preventing flange 31 function in the same manner as described above.
[0030]
According to the above configuration, since the liquid crystal substrate L can be attached to and detached from the cassette case 1A in two directions, even in the case of inspection, discarding, or replenishment of the liquid crystal substrate L, the device processing opening of the substrate transport cassette. There is no need to change the direction of 2A at all, the work is easy, and the delay and complication of the work can be reliably prevented. In addition, there is no need to install a rotating mechanism or a dedicated device, and there is no need to provide a dedicated space in a clean room. Further, since the configuration is relatively simple, maintenance is easy, and low cost can be expected.
[0031]
The technical concept of enabling the mounting and dismounting of the substrate from two directions is disclosed in Japanese Patent Application Laid-Open No. Hei 6-271004. However, this technology has a technical idea and a configuration that are significantly different from those of the present application. There is no description about the board attachment / detachment control means 13 for opening and closing the unit 3, and no description suggesting this is found. Therefore, the object of the present invention cannot be achieved at all, and furthermore, displacement, drop-off, or drop during movement cannot be effectively prevented as in the present application.
[0032]
In the above embodiment, the liquid crystal substrate L has been described as an example. However, the present invention is not limited to this, and can be used for storing various substrates, semiconductor wafers, and the like. Further, it is also possible to divert the existing cassette case 1 and the substrate attachment / detachment regulating bar 36. In addition, if similar effects can be expected, the positions, configurations, mechanisms, and the like of the handles 5, 16 and the connection fulcrum boss 17 can be appropriately changed as necessary. If a similar effect can be expected, a spring other than a coil spring can be used as the return spring 32, or the number of springs can be appropriately increased or decreased.
[0033]
Further, if the same operation and effect can be expected, each board attachment / detachment regulating bar 36A may be appropriately changed to a plate shape or a door shape. Further, each of the second sliders 27 is rotated by the advance of the first slider 18, and each of the board attachment / detachment regulating bars 36A swings while drawing an arc from the board regulation position in the board regulation area of the work opening 3 to the board detachable position. Needless to say, a configuration may be used.
[0034]
As described above, according to the present invention, the work opening for the operator formed on the other end surface of the cassette case, and the attachment and detachment of the substrate to and from the work opening when the cassette case is moved are regulated. Substrate mounting / dismounting control means for enabling the mounting and demounting of the substrate with respect to the work opening during the operation, wherein the substrate mounting / dismounting control means includes a rotatable handle attached to a top plate of the cassette case when the cassette case is moved. To separate the first slider on the top plate connected to the handle via the connecting member in the direction of one end from the other end of the top plate, and when the operator works, the handle is moved to the other end of the top plate. An operation mechanism for causing the first slider to approach the other end of the top plate by inclining the first slider and a plurality of movement direction converting members of the other end of the top plate to interlock with the first slider when the first slider is separated. luck A pair of bars provided in the direction changing member and extending in the vertical direction are respectively moved from the board detachable position on the side of the work opening to the board attachment / detachment restriction area in the work opening, and the first slider is moved to the first slider when the first slider approaches. A control mechanism that moves the bars from the substrate attachment / detachment restriction area to the substrate attachable / detachable position by interlocking the movement direction alteration members, wherein each of the plurality of motion direction alteration members serves as a pair of second sliders. A slider is installed on the side near the other end of the top plate via a spring member for retreat, and each second slider is brought into contact with an inclined surface formed on the first slider, and each second slider has a bar. With the upper part supported, the remaining part is located between the top plate and the bottom plate of the cassette case, and each second slider is retracted toward the center of the other end of the top plate based on the separation of the first slider. In both cases, the respective second sliders are made to advance in the side direction of the other end of the top plate based on the approach of the first slider, and the retaining members for the substrate are arranged in the respective bars in the vertical direction. Since it is provided so as to be able to contact the rear end of the substrate, it is possible to smoothly perform operations such as substrate inspection without changing the direction of the cassette case with a cheaper and simpler configuration than the conventional example. effective.
In particular, operations such as substrate inspection can be easily performed without changing the orientation of the cassette case using a link mechanism and a slide mechanism having a simple configuration.
Further, a guide hole is provided in at least one of the first slider and the second slider, and a guide member provided on the top plate is fitted into the guide hole, and a rattling preventing member is provided on an upper portion of the protrusion. Is provided, the first slider can be smoothly moved in a predetermined direction without wobbling in the vertical or horizontal direction.
Furthermore, if the contact portion of the second slider that comes into contact with the inclined surface of the first slider is a rotor, the first and second sliders do not mesh with each other and do not break down due to the contact. The two sliders can be slid smoothly.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing an embodiment of a substrate transfer cassette according to the present invention, and is a perspective view showing a state in which each substrate attachment / detachment regulating bar is located in a substrate regulating region of a work opening.
FIG. 2 is an explanatory view showing an embodiment of the substrate transfer cassette according to the present invention, and is a perspective view showing a state where each substrate attaching / detaching regulating bar is located at a substrate attaching / detaching position of a work opening.
FIG. 3 is an enlarged explanatory view of a main part showing an embodiment of the substrate transfer cassette according to the present invention.
FIG. 4 is a sectional view taken along line AA of FIG. 3;
FIG. 5 is a sectional view taken along line BB of FIG. 3;
FIG. 6 is a sectional view taken along line CC of FIG. 3;
FIG. 7 is an explanatory diagram viewed from a direction P in FIG. 1;
FIG. 8 is a perspective view showing a state in which a conventional substrate transport cassette is viewed from a substrate attaching / detaching direction.
FIG. 9 is a perspective view showing a state in which a conventional substrate transfer cassette is viewed from a substrate attachment / detachment regulating direction.
[Explanation of symbols]
1A Cassette case 2A Device processing opening 3 Work opening 4 Top plate 8A Bottom plate 13 Substrate attaching / detaching control means 14 Operating mechanism 15 Control mechanism 16 Handle (up / down member)
18 First slider (slider)
20 Slope 21 Guide groove (guide hole)
23 Guide pin (guide member)
24 Anti-rattle flange (rattle prevention member)
27 Second slider (movement direction conversion member)
28 Guide groove (guide hole)
30 Guide pin (guide member)
31 Anti-rattle flange (anti-rattle member)
32 Return spring (spring member)
34 Rotor 36A Board attachment / detachment regulation bar L Liquid crystal board (board)

Claims

In a substrate transfer cassette for storing substrates horizontally in a cassette case having an open end,
A work opening for the operator formed at the other end surface of the cassette case, and the attachment / detachment of the substrate to / from the work opening when the cassette case is moved; Board attachment / detachment control means for enabling attachment / detachment of
The substrate attaching / detaching control means raises a rotatable handle attached to a top plate of the cassette case when the cassette case is moved, and moves the first slider on the top plate connected to the handle via a connecting member to the top plate. An operating mechanism for moving the handle toward the other end of the top plate to move the first slider closer to the other end of the top plate when the worker is working, At the time of separation of one slider, the plurality of movement direction conversion members at the other end of the top plate are interlocked with the first slider, and a pair of bars provided on the movement direction conversion member and extending in the vertical direction are respectively provided on the substrate on the side of the work opening. It is moved from the detachable position to the substrate attachment / detachment restriction area in the work opening, and when the first slider approaches, the movement direction conversion member is linked to the first slider to move the bars from the substrate attachment / detachment restriction area. And a control mechanism for moving the plate removable position,
Each of the plurality of movement direction converting members is provided as a pair of second sliders, and each second slider is installed via a spring member for retreat on a side near the other end of the top plate, and each second slider is attached to the first slider. The second slider is brought into contact with the inclined surface formed on the slider, the upper portion of the bar is supported by each second slider, and the remaining portion is positioned between the top plate and the bottom plate of the cassette case. While retreating toward the center of the other end of the top plate based on the separation, each second slider is advanced toward the side of the other end of the top plate based on the approach of the first slider,
A substrate transfer cassette, wherein the bar is provided with a retaining member for the substrate in a vertical direction so that the bar can come into contact with a rear end of the substrate.

A guide hole is provided in at least one of the first slider and the second slider, and a guide member provided on the top plate is fitted into the guide hole, and a rattling preventing member is provided on an upper portion of the protrusion. The transfer cassette for substrates according to claim 1.

3. The substrate transfer cassette according to claim 1, wherein a contact portion of the second slider that contacts the inclined surface of the first slider is a rotor. 4.