JP3531211B2 - Method of forming electrodes of dielectric resonance component - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has an inner conductor formed in a dielectric block, an outer conductor formed on the outer surface of the dielectric block, and extends over at least one end face of the dielectric block or the end face and side faces. The present invention relates to a method for forming an electrode of a dielectric resonance component in which an electrode is formed.

[0002]

2. Description of the Related Art As a dielectric resonant component having electrodes formed over the end faces and side faces of a dielectric block, for example, there is one having a structure as shown in FIG. In the following figures, the dot-filled portion shows the visible portion (conductor non-forming portion) of the dielectric block.

As shown in FIG. 6, in this dielectric resonance component, three resonator holes 2a, 2b, 2c are formed by penetrating a pair of opposing surfaces of a substantially rectangular parallelepiped dielectric block 1. The inner conductor 3 is formed on the inner surface of each resonator hole 2a, 2b, 2c.
3 and 3 are formed. An outer conductor 4 is formed on substantially the entire outer surface of the dielectric block 1 except one opening surface 1a (hereinafter, referred to as an open end surface) of the resonator holes 2a, 2b, 2c. Each inner conductor 3, 33 is electrically connected (short-circuited) with the outer conductor 4 at the other opening face 1b (hereinafter, referred to as a short-circuit side end face) of the resonator holes 2a, 2b, 2c facing the open side end face 1a. .

On the open side end face 1a, coupling electrodes 5, 5,
5, electrodes such as input / output electrodes 6 and 6 and a ground electrode 7 are formed. Resonator holes 2a, 2b, 2c are formed by the inter-electrode capacitance formed in the gap between these electrodes.
Resonators formed for each are coupled to each other, and a filter and the like are configured by obtaining external coupling capacitance and the like. Input / output electrode 6,
6 a part 6a, 6a (hereinafter referred to as input / output electrode connection part)
Is formed on one side surface 1c (bottom surface) which is a mounting surface.

Conventionally, in the case of manufacturing a dielectric resonance component as shown in FIG. 6, after molding a dielectric block having a resonator hole, an outer conductor, an inner conductor and each electrode are sequentially applied, It is formed by baking.

Specifically, first, Ag paste or the like is sequentially applied to each outer surface of the dielectric block 1 by a method such as screen printing and dried, and then the inner peripheral surface of each resonator hole 2a, 2b, 2c. The Ag conductor or the like is applied to and dried, and then baked to form the outer conductor 4, the inner conductor 3, and the electrodes 5, 6, and 7. That is, the various electrodes 5, 6 of the open side end surface 1a,
7 and the input / output electrode connecting portions 6a on the side surface (bottom surface) are formed by printing Ag paste or the like on a pattern and then baking it.

[0007]

As described above, in the conventional electrode forming method, since various electrodes are formed by screen printing or the like, the electrode size and the gap between the electrodes may be reduced due to the blurring and scraping during printing. There is a problem in that variations and characteristics of the dielectric resonance component vary. Further, there is a problem that the electrode film thickness also varies greatly and the electrode strength also varies. Further, when the electrode is spread over two surfaces, in addition to the problem of positional displacement, multiple printing and drying steps are required, which requires a large number of electrode forming steps, resulting in a high manufacturing cost. .

Therefore, an object of the present invention is to solve the above problems of the conventional electrode forming method for a dielectric resonance component, to eliminate the need for complicated steps, and to provide various electrodes with high dimensional accuracy at low cost. An object of the present invention is to provide a method for forming an electrode of a dielectric resonance component that can be easily formed.

[0009]

In order to achieve the above object, the invention according to claim 1 of the present application forms a plurality of resonator holes between a pair of opposing end faces of a dielectric block, An inner conductor is formed on the inner surface of the resonator hole, an outer conductor is formed on the outer surface of the dielectric block, and each resonator formed for each resonator hole is coupled to at least one end surface of the pair of end surfaces.
A coupling electrode is formed, and the end surface on which the coupling electrode is formed and the
In an electrode forming method of a dielectric resonance component, wherein a plurality of input / output electrodes are formed across one side face adjacent to an end face , a tip is formed after forming the inner conductor and the outer conductor on the entire surface of the dielectric block. The coupling electrode and the plurality of input / outputs on the surface
Using an ultrasonic processing machine equipped with a cutting tool in which a recess for leaving an electrode is formed, the tip end surface of the cutting tool is brought into contact with the end surface and side surface of the dielectric block, and the cutting tool is ultrasonically vibrated. Then, a part of the outer conductor is scraped off by the vibration, and the electrode-shaped coupling electrode and the composite electrode corresponding to the recess are
It is characterized by forming a number of input / output electrodes .

The invention according to claim 2 is characterized in that, in the invention according to claim 1 , the inner conductor and the outer conductor are formed by electroless plating of Cu or the like.

[0011]

According to the above-mentioned electrode forming method, after the inner conductor and the outer conductor are formed on the entire surface of the dielectric block, a part of the outer conductor is scraped off by using an ultrasonic processing machine. Various electrodes are formed at predetermined locations.

Further, by forming the inner conductor and the outer conductor at once by electroless plating of Cu or the like, the number of conductor forming steps can be greatly reduced.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration of an ultrasonic processing machine and an electrode forming method for a dielectric resonant component according to an embodiment of the present invention will be described below with reference to the drawings. In the following examples, the external appearance of the target dielectric resonance component has the same configuration as that of the conventional example described in FIG. 6, and the same or corresponding portions and those having the same functions are designated by the same reference numerals. The description is omitted.

FIG. 1 is an external view showing the structure of an ultrasonic processing machine used for forming electrodes in this embodiment. This ultrasonic processing machine includes a stage device 20, an ultrasonic cutting device 30, and a compression pump 40. In the stage device 20, the processing table 22 is mounted on the displacement table 23, and the processing table 2
A holding jig 21 is fixedly placed on the upper surface of the unit 2. The dielectric block 1 to be cut is fixed and placed on the holding jig 21. The ultrasonic cutting device 30
An amplification horn 32 that amplifies and vibrates ultrasonic vibration is attached to an ultrasonic vibration device 33 movably supported by a displacement table 34, and a cutting tool 31 is attached to the amplification horn 32.

The displacement table 23 of the stage device 20 and the displacement table 34 of the ultrasonic cutting device 30 are movable in three orthogonal directions (X axis, Y axis, Z axis) and rotatable about the Z axis. Is configured.

The compression pump 40 jets cutting water mixed with cutting grains from a nozzle 41. This cutting water is sprayed between the cutting tool 31 and the dielectric block 1.

The moving distances (dimensions) and rotation angles of the displacement tables 23 and 34 and the machining time of the ultrasonic cutting device 30 can be arbitrarily set and controlled. Further, supply, takeout, processing control, etc. of the dielectric block 1 are automated.

FIG. 2 is an external perspective view of the tip of the cutting tool 31 shown in FIG. 1 as viewed from below. As shown in FIG.
The lower surface of the tip end of the cutting tool 31 is formed by a surface at a right angle corresponding to one end surface and one side surface of the dielectric block 1, and each surface is provided with a recess for leaving various electrodes in the dielectric block 1. There is. That is, one surface of the cutting tool 31 is provided with a recess corresponding to the electrode shape formed on the open end surface of the dielectric block 1, and the input / output electrode connection of the dielectric block 1 is formed on the surface orthogonal to this surface. A concave portion corresponding to the shape of the portion is formed. Each tip surface of the cutting tool 31 is attached to the amplification horn 32 at an inclination angle of about 45 °.

Next, an embodiment of the present invention in which electrodes are formed on the outer surface of the dielectric block by using the ultrasonic processing machine shown in FIG. 1 will be described.

First, the dielectric block 1 is prepared and placed on the holding jig 21 at an inclination angle of about 45 °. As shown in FIG. 3, the dielectric block 1 has a substantially rectangular parallelepiped shape, inside of which resonator holes 2a, 2b, 2c are formed, and the entire inner peripheral surface and outer surface of the resonator holes 2a, 2b, 2c are formed. Inner conductors 3, 3, 3 and outer conductor 4 are formed on the inner surface.
The inner conductor 3 and the outer conductor 4 are formed at once by electroless plating of Cu or the like.

Next, the displacement tables 23 and 34 are actuated so that the tip end surface of the cutting tool 31 is the open end surface 1a of the dielectric block 1 and the one side surface 1c on which the input / output electrode connecting portion is formed.
Is positioned so as to come into contact with the cutting tool 31, and the vertical vibration of the cutting tool 31 vibrates the cutting abrasive grains supplied together with the cutting water from the nozzle 41 of the compression pump 40 to contact the outer surface of the outer conductor 4 of the cutting tool 31. Is scraped off. Then, when the cutting depth reaches a preset depth, or when the processing time reaches a preset time, the ultrasonic vibration device 33 moves up (or the processing table 22 moves down), The cutting process is stopped. As a result, the cutting tool 3
The outer conductor 4 corresponding to the shape of the tip surface of 1 is removed by cutting,
An electrode having a pattern corresponding to the concave portion under the tip of the cutting tool 31 is formed. In this way, the dielectric resonant component in which the coupling electrodes 5, 5, 5, the input / output electrodes 6, 6, the ground electrode 7, and the various electrodes of the input / output electrode connecting portions 6a, 6a shown in FIG. 6 are formed is obtained. .

In the method of forming electrodes of this dielectric resonance component,
Since various electrodes with complicated patterns that are formed across the end surface and side surface of the dielectric block can be formed at one time corresponding to the recesses in the cutting tool tip surface of the ultrasonic processing machine, the electrode dimensions The accuracy can be significantly improved, and thus the number of man-hours for forming electrodes can be significantly reduced, and the variation in the characteristics of the dielectric resonant component can be significantly reduced. In addition, since uniform conductors are formed on a large number of dielectric blocks at one time by plating, etc., it is possible to significantly reduce the number of man-hours required to form the conductors and to greatly reduce variations in electrode film thickness and electrode strength. it can.

In the above embodiment, the dielectric resonance component in which a large number of electrodes are formed across the open side end face and the side face has been described. However, as shown in FIG. One coupling electrode 5 for adjusting the frequency may be formed, and the shape, number, etc. of the electrodes formed on the end face or the side face are not particularly limited. When forming the electrode shown in FIG. 4, for example, as shown in FIG.
A cutting tool 31 having a concave portion (or hole) having a shape corresponding to the coupling electrode 5 shown in FIG.

Further, in each of the above-mentioned embodiments, the electrode is formed on the open-side end surface side, but the electrode may be formed on the short-circuit side end surface side. Also, the number of resonator holes is not particularly limited.

[0025]

As described above, according to the electrode forming method of the dielectric resonant component of the present invention, a part of the outer conductor formed on the outer surface of the dielectric block is scraped off by utilizing ultrasonic vibration. Since various electrodes can be formed at one time corresponding to the concave portion of the tip of the cutting tool, the electrode dimensional accuracy can be significantly improved, and thus the number of electrode forming steps can be significantly reduced and the manufacturing cost can be reduced. It is possible to greatly reduce the variation in the characteristics of the dielectric resonant component. Furthermore, since uniform conductors are formed on a large number of dielectric blocks at one time by plating, etc., the number of conductor formation steps is also reduced, manufacturing costs are further reduced, and variations in electrode film thickness and electrode strength are greatly reduced. it can.

[Brief description of drawings]

FIG. 1 is an external view showing a configuration of an ultrasonic processing machine according to an embodiment of the present invention.

FIG. 2 is an external perspective view of a cutting tool of an ultrasonic processing machine according to an embodiment of the present invention.

FIG. 3 is an external perspective view of a dielectric block before forming electrodes according to an embodiment of the present invention.

FIG. 4 is an external perspective view of a dielectric resonant component according to another embodiment of the present invention.

5 is an external perspective view of a cutting tool used for forming electrodes of the dielectric resonant component shown in FIG.

FIG. 6 is an external perspective view of an example of the present invention and a conventional dielectric resonance component.

[Explanation of symbols]

1 Dielectric block 2a, 2b, 2c Resonator hole 3 Inner conductor 4 outer conductor 5 coupling electrodes 6 input / output electrodes 6a Input / output electrode connection part 7 Earth electrode 20 stage equipment 21 Holding jig 22 Processing table 23 Displacement table 30 ultrasonic cutting equipment 31 cutting tools 32 amplification horn 33 Ultrasonic vibration device 34 Displacement table 40 compression pump

Claims (2)

(57) [Claims] 1. A plurality of resonator holes are formed between a pair of opposing end surfaces of a dielectric block, an inner conductor is formed on an inner surface of the resonator hole, and an outer conductor is formed on an outer surface of the dielectric block. ,
The resonator hole is formed on at least one end surface of the pair of end surfaces.
Forming a coupling electrode that couples each resonator formed for each
An end face on which the coupling electrode is formed and one side adjacent to the end face
A method for forming an electrode of a dielectric resonance component, comprising a plurality of input / output electrodes formed across a surface, wherein the inner conductor and the outer conductor are formed on the entire surface of the dielectric block, and then the coupling electrode is formed on the tip surface. And an ultrasonic processing machine equipped with a cutting tool in which recesses for leaving the plurality of input / output electrodes are formed,
The tip surface of the cutting tool is brought into contact with the end surface and the side surface of the dielectric block, the cutting tool is ultrasonically vibrated, a part of the outer conductor is scraped off by the vibration, and an electrode shape corresponding to the recess is formed. A method for forming an electrode of a dielectric resonant component, comprising forming a coupling electrode and a plurality of input / output electrodes . 2. The method for forming an electrode of a dielectric resonance component according to claim 1 , wherein the inner conductor and the outer conductor are formed by electroless plating of Cu or the like.