JP3525158B2 - Observation sample support method - Google Patents

Observation sample support method

Info

Publication number
JP3525158B2
JP3525158B2 JP00889297A JP889297A JP3525158B2 JP 3525158 B2 JP3525158 B2 JP 3525158B2 JP 00889297 A JP00889297 A JP 00889297A JP 889297 A JP889297 A JP 889297A JP 3525158 B2 JP3525158 B2 JP 3525158B2
Authority
JP
Japan
Prior art keywords
sample
movable stage
observation
holding cylinder
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP00889297A
Other languages
Japanese (ja)
Other versions
JPH10206296A (en
Inventor
俊郎 樋口
謙一 工藤
秀夫 横田
光典 小久保
寛 南都
孝一 新生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanagawa Academy of Science and Technology
Japan Science and Technology Agency
Shibaura Machine Co Ltd
Original Assignee
Kanagawa Academy of Science and Technology
Japan Science and Technology Agency
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanagawa Academy of Science and Technology, Japan Science and Technology Agency, Toshiba Machine Co Ltd filed Critical Kanagawa Academy of Science and Technology
Priority to JP00889297A priority Critical patent/JP3525158B2/en
Publication of JPH10206296A publication Critical patent/JPH10206296A/en
Application granted granted Critical
Publication of JP3525158B2 publication Critical patent/JP3525158B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、切断面観察の対象
となる試料を切断に耐え得るように支持する観察試料支
持方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an observation sample supporting method for supporting a sample, which is an object of observation of a cut surface, so as to withstand cutting.

【0002】[0002]

【従来の技術】試料観察法の1つとして、試料をその一
端部側から順次切断しながら、各切断面をCCDカメラ
により撮像し、この画像データを観察に適したデータに
処理してから、試料の切断面やこれらを合成して得た立
体像をモニターに表示する方法が知られている。
2. Description of the Related Art As one of sample observation methods, while sequentially cutting a sample from one end side, each cut surface is imaged by a CCD camera, and this image data is processed into data suitable for observation, A method of displaying a cut surface of a sample and a stereoscopic image obtained by synthesizing these on a monitor is known.

【0003】試料は試料本体とこれを包理する樹脂,パ
ラフィン等の包理剤とから成り、試料本体には医療分
野,製薬分野,食品分野,農業分野,生物分野等から適
宜選択された生物,動物,植物,食品等が用いられてい
る。
The sample is composed of a sample body and a resin, an embedding agent such as paraffin, which embeds the sample body, and the sample body is a living organism appropriately selected from the medical field, pharmaceutical field, food field, agricultural field, biological field and the like. , Animals, plants, foods, etc. are used.

【0004】また、試料を順次切断する装置には、試料
を必要量送り込むための送り機構と、送り込み後の試料
端部を切断する切断機構が用いられている。
Further, a device for sequentially cutting the sample uses a feeding mechanism for feeding a required amount of the sample and a cutting mechanism for cutting the end portion of the sample after the feeding.

【0005】図9に示すように、送り機構は、試料Sの
下面を支持するプレートPと、該プレートPを上方に押
圧する押圧ロッドRと、該押圧ロッドRを上方に移動さ
せる駆動源と、試料Sの上部が挿通される保持筒Hとを
備えている。試料Sは、押圧ロッドRからの押圧を受け
て保持筒H内を上昇し、保持筒Hの上端から押し出され
て上方に突出する。一方、切断機構は、保持筒Hの上端
から上方に突出した試料端部を回転途中で切断可能な切
断刃Cbと、これを所定方向に回動させる駆動源とを備
えている。
As shown in FIG. 9, the feed mechanism includes a plate P that supports the lower surface of the sample S, a pressing rod R that presses the plate P upward, and a drive source that moves the pressing rod R upward. , And a holding cylinder H through which the upper part of the sample S is inserted. The sample S receives pressure from the pressing rod R, rises in the holding cylinder H, is pushed out from the upper end of the holding cylinder H, and projects upward. On the other hand, the cutting mechanism includes a cutting blade Cb capable of cutting the sample end portion protruding upward from the upper end of the holding cylinder H during rotation, and a drive source for rotating the cutting blade Cb in a predetermined direction.

【0006】つまり、試料Sは保持筒H上端から必要量
上方に押し出されて突出し、該突出部分を切断刃Cbに
よって切断され、該切断面を順次観察されることにな
る。
That is, the sample S is pushed upward from the upper end of the holding cylinder H by a necessary amount and protrudes, the protruding portion is cut by the cutting blade Cb, and the cut surfaces are sequentially observed.

【0007】[0007]

【発明が解決しようとする課題】図10に示すように、
上記切断刃Cbには刃先角の他にすくい角θ1と逃げ角
θ2が設定されていることから、切断時の試料Sにはす
くい角θ1の角度に応じて該試料Sを持ち上げようとす
る力Fyが働く。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention As shown in FIG.
Since the rake angle θ1 and the clearance angle θ2 are set in the cutting blade Cb in addition to the cutting edge angle, the force for trying to lift the sample S according to the rake angle θ1 is applied to the sample S at the time of cutting. Fy works.

【0008】従来のものでは、試料Sの下面をプレート
Pによって支持しているだけなので、切断時に上記力F
yが働くと、試料Sが浮き上がって保持筒Hから上方に
抜け出してしまい、所期の切断が満足に行えなくなる不
具合がある。
In the conventional case, since the lower surface of the sample S is only supported by the plate P, the above force F at the time of cutting is used.
When y acts, the sample S floats up and slips out upward from the holding cylinder H, which causes a problem that desired cutting cannot be performed satisfactorily.

【0009】これを解消するため、保持筒Hに試料締め
付け機能を付与して上記力Fyに対抗させることも考え
られるが、該締め付けのみで試料Sを固定支持すること
は極めて難しく、往々にして締め付け力が強くなりすぎ
て試料Sが潰れて変形し、観察対象として使い物になら
なくなってしまう不具合がある。
In order to solve this, it is conceivable to add a sample tightening function to the holding cylinder H to counteract the force Fy, but it is extremely difficult to fix and support the sample S only by the tightening, and it is often the case. There is a problem that the tightening force becomes too strong and the sample S is crushed and deformed, making it unusable as an observation target.

【0010】本発明は上記事情に鑑みてなされたもの
で、その目的とするところは、試料切断を良好に行える
観察試料支持方法を提供することにある。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an observation sample supporting method capable of satisfactorily cutting a sample.

【0011】[0011]

【課題を解決するための手段】上記目的を達成するた
め、請求項1の発明は、可動ステージとして逆テーパー
が内側面に設けられた凹部を有するものを用い、試料の
端部を加熱状態にある可動ステージの凹部に挿入し押し
付けて接触部分を溶融した後、該溶融分を固化させて試
料を可動ステージに密着固定すると共に、試料の他端部
を該試料の横断面形に整合した内孔を有する保持筒内に
挿通させた、ことをその特徴としている。
In order to achieve the above-mentioned object, the invention of claim 1 uses a reverse taper as a movable stage.
, Which has a concave portion provided on its inner side surface, inserts the end portion of the sample into the concave portion of the movable stage in a heated state and presses it to melt the contact portion, and then solidify the molten portion. The sample is closely fixed to the movable stage, and the other end of the sample is inserted into a holding cylinder having an inner hole aligned with the cross-sectional shape of the sample.

【0012】また、請求項2の発明は、可動ステージと
して逆テーパーが内側面に設けられた凹部を有するもの
を用い、冷却状態にある試料の端部を可動ステージの凹
部に挿入し押し付けて接触部分を溶融した後、該溶融分
を固化させて試料を可動ステージに密着固定すると共
に、試料の他端部を該試料の横断面形に整合した内孔を
有する保持筒内に挿通させた、ことをその特徴としてい
る。
The invention of claim 2 includes a movable stage and
And having a recess with a reverse taper on the inner surface
Using concave of the movable stage the ends of the sample in a cooled state
And press it to melt the contact part, then solidify the melted part to tightly fix the sample to the movable stage, and hold the other end of the sample with an inner hole that matches the cross-sectional shape of the sample. The feature is that it is inserted into the cylinder.

【0013】さらに、請求項3の発明は、可動ステージ
として逆テーパーが内側面に設けられた凹部を有するも
のを用い、冷却状態にある試料の端部を加熱状態にある
可動ステージの凹部に挿入し押し付けて接触部分を溶融
した後、該溶融分を固化させて試料を可動ステージに密
着固定すると共に、試料の他端部を該試料の横断面形に
整合した内孔を有する保持筒内に挿通させた、ことをそ
の特徴としている。
Further, the invention of claim 3 is the movable stage.
As a reverse taper has a recess provided on the inner surface
Using, the end portion of the sample in the cooled state is inserted into the concave portion of the movable stage in the heated state and pressed to melt the contact portion, and the molten portion is solidified to firmly fix the sample to the movable stage, It is characterized in that the other end of the sample is inserted into a holding cylinder having an inner hole aligned with the cross-sectional shape of the sample.

【0014】さらにまた、請求項6の発明は、試料の端
部を可動ステージに設けたクランプ部材により締め付け
て可動ステージに密着固定すると共に、試料の他端部を
該試料の横断面形に整合した内孔を有する保持筒内に挿
通させた、ことをその特徴としている。
Further, according to the invention of claim 6, the end portion of the sample is clamped by a clamp member provided on the movable stage to be closely fixed to the movable stage, and the other end portion of the sample is aligned with the cross-sectional shape of the sample. It is characterized in that it is inserted into a holding cylinder having an inner hole.

【0015】請求項1乃至3の各発明によれば、試料の
端部を溶融,固化させることで可動ステージに密着固定
させ、且つ試料の他端部を保持筒内に挿通させることに
より、観察対象となる試料が切断に耐え得るように支持
される。また、請求項の発明によれば、試料の端部を
クランプ部材で締め付けて可動ステージに密着固定さ
せ、且つ試料の他端部を保持筒内に挿通させることによ
り、観察対象となる試料が切断に耐え得るように支持さ
れる。
According to each of the first to third aspects of the invention, the end portion of the sample is melted and solidified to be closely fixed to the movable stage, and the other end portion of the sample is inserted into the holding cylinder for observation. The sample of interest is supported to withstand cutting. Further, according to the invention of claim 6 , the sample to be observed is obtained by tightening the end of the sample with the clamp member so as to be closely fixed to the movable stage and inserting the other end of the sample into the holding cylinder. Supported to withstand cutting.

【0016】[0016]

【発明の実施の形態】図1には本発明の実施に好適な試
料観察装置を示してある。この試料観察装置は、画像処
理による試料観察を可能とした試料観察機1と、試料の
送り込みと切断を行う試料切断機11とから構成されて
いる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a sample observation device suitable for carrying out the present invention. This sample observing apparatus is composed of a sample observing machine 1 capable of observing a sample by image processing, and a sample cutting machine 11 for feeding and cutting the sample.

【0017】試料観察機1は、二次元CCD2aを内蔵
したカラーまたはモノクロのカメラ2と、ハーフまたは
ダイクロイック等のミラー3aを内蔵したミラーケース
3と、対物レンズ4と、リング状照明器5と、光源6a
を内蔵した第1ランプハウス6と、光源7aを内蔵した
第2ランプハウス7と、これら機器を試料切断機11上
で支持するフレーム8と、図示省略の撮像制御部,画像
処理部及びモニターとから構成されている。
The sample observer 1 includes a color or monochrome camera 2 having a two-dimensional CCD 2a, a mirror case 3 having a mirror 3a such as a half or dichroic, an objective lens 4, and a ring illuminator 5. Light source 6a
A first lamp house 6 with a built-in, a second lamp house 7 with a built-in light source 7a, a frame 8 for supporting the device in the sample cutter 1 1 above <br/>, the imaging control unit not shown, the image It is composed of a processing unit and a monitor.

【0018】この試料観察機1では、第1ランプハウス
6からの光をミラー3a及び対物レンズ4を介して試料
切断面に照射、または、第2ランプハウス7からの光を
リング状照明器5を介して試料切断面に照射することに
より、該試料切断面からの反射光を対物レンズ4及びミ
ラー3aを介してカメラ2に入射して、試料切断面の画
像(画像データ)をメモリに取り込むことができる。
In this sample observing device 1, the light from the first lamp house 6 is applied to the sample cut surface via the mirror 3a and the objective lens 4, or the light from the second lamp house 7 is illuminated by the ring illuminator 5. By irradiating the sample cut surface via the, the reflected light from the sample cut surface is incident on the camera 2 via the objective lens 4 and the mirror 3a, and the image (image data) of the sample cut surface is captured in the memory. be able to.

【0019】また、切断面毎に取り込まれた画像データ
に対し領域分割,輪郭変形処理,合成等のデータ処理を
施すと共に、必要に応じて試料の切断面像やこれらを合
成して得た立体像(3次元像)をモニターに表示するこ
とができる。
Further, data processing such as area division, contour deformation processing, and synthesis is performed on the image data taken in for each cut surface, and a cut surface image of a sample and a solid obtained by combining these are obtained as necessary. The image (three-dimensional image) can be displayed on the monitor.

【0020】一方、試料切断機11は、図2にも示すよ
うに、床面等に載置可能なフレーム12と、フレーム1
2の上面一側に配置された試料保持部13と、その下側
に配置された試料支持部14と、フレーム12の上面中
央に配置された試料切断部15とから構成されている。
On the other hand, as shown in FIG. 2, the sample cutting machine 11 includes a frame 12 that can be placed on a floor surface, and a frame 1.
The sample holder 13 is arranged on one side of the upper surface of the sample 2, the sample supporter 14 is arranged below the sample holder 13, and the sample cutting section 15 is arranged at the center of the upper surface of the frame 12.

【0021】試料保持部13は、試料Sの横断面形に整
合した内孔を有する保持筒13aと、該保持筒13aを
冷却可能なペルチェ素子13bとを備えている。保持筒
13aは熱伝導性の高い金属等から成り、内孔下端部に
は試料Sの下方からの挿入を容易とするためのテーパー
面が設けられている。また、保持筒13aは、周方向に
複数に分割されており、バネ圧や空気圧等を利用して分
割片の少なくとも一部を駆動することで、分割片による
試料締め付けを可能としている。
The sample holder 13 comprises a holding cylinder 13a having an inner hole aligned with the cross-sectional shape of the sample S, and a Peltier element 13b capable of cooling the holding cylinder 13a. The holding cylinder 13a is made of a metal having high thermal conductivity, and has a tapered surface at the lower end of the inner hole for facilitating the insertion of the sample S from below. Further, the holding tube 13a is divided into a plurality of pieces in the circumferential direction, and by driving at least a part of the divided pieces by utilizing spring pressure, air pressure, or the like, the sample can be tightened by the divided pieces.

【0022】例えば、四角柱形状の試料Sを用いる場合
には、図3(a)に示すように、保持筒13aを、試料
Sの2側面に対向する固定分割片13a1と他の2側面
に対向する可動分割片13a2とから構成し、可動分割
片13a2を試料Sの中心に向かって移動させることで
試料締め付けを行えるようにする。或いは、図3(b)
に示すように、保持筒13aを、試料Sの2側面に対向
する固定分割片13a3と、他の側面それぞれに対向す
る2つの可動分割片13a4,13a5とから構成し、
各可動分割片13a4,13a5を試料側面と直角に移
動させることで試料締め付けを行えるようにする。
For example, in the case of using the sample S in the shape of a quadrangular prism, as shown in FIG. 3A, the holding cylinder 13a is provided on the fixed divided piece 13a1 facing the two side faces of the sample S and the other two side faces. The movable divided pieces 13a2 are opposed to each other, and the movable divided pieces 13a2 are moved toward the center of the sample S so that the sample can be tightened. Alternatively, FIG. 3 (b)
As shown in, the holding cylinder 13a is composed of a fixed divided piece 13a3 facing two side surfaces of the sample S and two movable divided pieces 13a4, 13a5 facing the other side surfaces,
By moving each of the movable divided pieces 13a4 and 13a5 at right angles to the side surface of the sample, the sample can be clamped.

【0023】この試料保持部13は、保持筒13a内に
挿通された試料Sを分割片によって締め付けることがで
きると共に、保持筒13a内の試料Sを必要に応じてペ
ルチェ素子13bの冷却作用によって冷却することがで
きる。本実施形態では、分割片による締め付けのみで試
料Sを固定支持するものではないので、該締め付け力は
試料Sが潰れない程度の弱い力でも充分である。
In the sample holder 13, the sample S inserted in the holding cylinder 13a can be tightened by the divided pieces, and the sample S in the holding cylinder 13a is cooled by the cooling action of the Peltier element 13b as necessary. can do. In the present embodiment, since the sample S is not fixedly supported only by the tightening by the divided pieces, the tightening force may be a weak force that does not crush the sample S.

【0024】試料支持部14は、図4(a)(b)に示
すように、試料Sの横断面形に整合した凹み14a1を
上面に有する可動ステージ14aと、該可動ステージ1
4aを加熱・冷却可能なペルチェ素子14bと、断熱材
14cを介してペルチェ素子14b及び可動ステージ1
4aを支えるナット筒14dと、該ナット筒14dを上
下方向に案内するガイド筒14eと、ナット筒14dに
螺合したボールネジ14fと、該ボールネジ14fを回
動可能なモータ14gとを備えている。可動ステージ1
4は熱伝導性の高い金属等から成り、凹み14a1の内
側面には試料固定力を高めるために逆テーパーが設けら
れている。
As shown in FIGS. 4 (a) and 4 (b), the sample support portion 14 has a movable stage 14a having a recess 14a1 on the upper surface, which is aligned with the cross sectional shape of the sample S, and the movable stage 1a.
Peltier element 14b capable of heating and cooling 4a, and Peltier element 14b and movable stage 1 via heat insulating material 14c.
A nut cylinder 14d for supporting the nut 4a, a guide cylinder 14e for guiding the nut cylinder 14d in the vertical direction, a ball screw 14f screwed into the nut cylinder 14d, and a motor 14g capable of rotating the ball screw 14f are provided. Movable stage 1
Reference numeral 4 is made of a metal having a high thermal conductivity, and a reverse taper is provided on the inner surface of the recess 14a1 to enhance the sample fixing force.

【0025】この試料支持部14は、可動ステージ14
a上に試料Sを直立状態で支持すると共に、モータ14
gによるボールネジ14fの回動によってナット筒14
dと一緒に可動ステージ14aを上下動させることがで
きる。また、可動ステージ14aに接触する試料Sを必
要に応じてペルチェ素子14bの発熱作用によって加熱
したり、冷却作用によって冷却することができる。ちな
みに、ペルチェ素子14bで生じ得る発熱作用と冷却作
用の切り替えは印加電圧の極性を変えることによって簡
単に行うことができる。
The sample support portion 14 is a movable stage 14
The sample S is supported upright on a and the motor 14
Rotation of the ball screw 14f by g causes the nut cylinder 14
The movable stage 14a can be moved up and down together with d. Further, the sample S contacting the movable stage 14a can be heated by the heat generating action of the Peltier element 14b or cooled by the cooling action as required. By the way, switching between the heat generating action and the cooling action that can occur in the Peltier element 14b can be easily performed by changing the polarity of the applied voltage.

【0026】試料切断部15は、図5に示す切断刃15
aを着脱自在に有する回転板15bと、該回転板15b
に連結されたシャフト15cと、シャフト15cをベル
ト15dを介して回動可能な減速機付きモータ15eと
を備えている。切断刃15aは、図5に示すように、本
体15a1と、カッタブレード15a2と、これを本体
15a1に固定するためのブレード押さえ15a3とか
ら成り、所定の刃先角,すくい角及び逃げ角(図10
照)を有している。
The sample cutting section 15 is a cutting blade 15 shown in FIG.
a rotating plate 15b having a detachably attached a and the rotating plate 15b
A shaft 15c connected to the shaft 15c, and a motor 15e with a speed reducer capable of rotating the shaft 15c via a belt 15d. As shown in FIG. 5, the cutting blade 15a includes a main body 15a1, a cutter blade 15a2, and a blade retainer 15a3 for fixing the cutter blade 15a2 to the main body 15a1, and has a predetermined cutting edge angle, rake angle and clearance angle (see FIG. 10 ). See).

【0027】この試料切断部15は、モータ15eによ
りシャフト15cを介して回転板15bを回動(1回
転)させることにより、試料Sの保持筒13a上端から
上方に突出した部分を、その切断刃15aによって端面
と平行に切断することができる。
The sample cutting unit 15 rotates the rotary plate 15b (one rotation) via the shaft 15c by the motor 15e, and thereby the portion of the sample S protruding upward from the upper end of the holding cylinder 13a is cut by the cutting blade. It is possible to cut parallel to the end face by 15a.

【0028】試料Sは、試料本体とこれを包理する樹
脂,パラフィン等の包理剤とから、図示例のものでは四
角柱形状に形成されている。試料本体には医療分野,製
薬分野,食品分野,農業分野,生物分野等から適宜選択
された生物,動物,植物,食品等が用いられる。
The sample S is formed in the shape of a quadrangular prism in the illustrated example from the sample main body and the embedding agent such as resin or paraffin that encapsulates the sample main body. As the sample body, an organism, an animal, a plant, a food or the like appropriately selected from the medical field, the pharmaceutical field, the food field, the agricultural field, the biological field, etc. is used.

【0029】ここで上記可動ステージ14aに対する試
料Sの固定方法を幾つか説明する。最初に、第1の固定
方法を図6を参照して説明する。まず、ペルチェ素子1
4bによって可動ステージ14aを所定温度(試料Sの
主に包理剤を溶融可能な温度)に加熱しておき、図6
(a)に示すように、該可動ステージ14aの凹み14
a1に試料Sの下端部を挿入して支持させ、試料Sの下
端面を可動ステージ14aに押し付けて接触部分を溶融
する。これと並行して、ペルチェ素子13bによって保
持筒13aを冷却しておき、同図(b)に示すように、
可動ステージ14aを上昇させて試料Sを保持筒13a
内に挿入する。これにより、試料Sが冷却されて上記の
溶融分が冷却固化し、溶融分が接着剤の役割を果たして
試料Sが可動ステージ14aに密着固定される。
Here, some methods of fixing the sample S to the movable stage 14a will be described. First, the first fixing method will be described with reference to FIG. First, Peltier element 1
6b, the movable stage 14a is heated to a predetermined temperature (a temperature at which the embedding agent of the sample S can be melted).
As shown in (a), the recess 14 of the movable stage 14a
The lower end of the sample S is inserted into and supported by a1 and the lower end surface of the sample S is pressed against the movable stage 14a to melt the contact portion. In parallel with this, the holding cylinder 13a is cooled by the Peltier element 13b, and as shown in FIG.
The movable stage 14a is raised to hold the sample S in the holding cylinder 13a.
Insert inside. As a result, the sample S is cooled and the above-mentioned molten component is cooled and solidified, and the molten component plays the role of an adhesive, so that the sample S is closely fixed to the movable stage 14a.

【0030】この第1の固定方法では、試料保持部13
のペルチェ素子13bによって試料Sを冷却することで
溶融分を固化させるようにしたが、この代わりに、試料
Sを保持筒13a内に挿入するときまたはその後に、試
料支持部14のペルチェ素子14bによって溶融分を冷
却固化させるようにしてもよい。
In the first fixing method, the sample holder 13
The sample S is cooled by the Peltier element 13b of FIG. 6 to solidify the molten component. Instead of this, when the sample S is inserted into the holding cylinder 13a or thereafter, the Peltier element 14b of the sample support portion 14 is used. The molten component may be cooled and solidified.

【0031】次に、第2の固定方法を図7を参照して説
明する。まず、図7(a)に示すように、保持筒13a
内に試料Sを挿入して分割片による締め付けによってこ
れを保持し、同状態でペルチェ素子13bによって保持
筒13a内の試料Sを予め冷却し、試料冷却後はペルチ
ェ素子13bによる冷却を停止する。続いて、同図
(b)に示すように、可動ステージ14aを上昇させ
て、該可動ステージ14aの凹み14a1に試料Sの下
端部を挿入する。これにより、予め冷却されている試料
Sの下端面が常温の可動ステージ14aに押し付けられ
て接触部分が溶融し、該溶融分が試料Sが持つ冷熱によ
って徐々に固化し、溶融分が接着剤の役割を果たして試
料Sが可動ステージ14aに密着固定される。
Next, the second fixing method will be described with reference to FIG. First, as shown in FIG. 7A, the holding cylinder 13a
The sample S is inserted therein and held by tightening with the divided pieces, and in the same state, the sample S in the holding cylinder 13a is cooled in advance by the Peltier element 13b, and after the sample is cooled, the cooling by the Peltier element 13b is stopped. Then, as shown in FIG. 3B, the movable stage 14a is raised and the lower end of the sample S is inserted into the recess 14a1 of the movable stage 14a. As a result, the lower end surface of the sample S, which has been cooled in advance, is pressed against the movable stage 14a at room temperature and the contact portion is melted, and the melted portion is gradually solidified by the cold heat of the sample S, and the melted portion becomes the adhesive. The sample S plays a role and is closely fixed to the movable stage 14a.

【0032】この第2の固定方法では、予め冷却された
試料Sが持つ冷熱によって溶融分を固化させるようにし
たが、試料Sのステージ接触部分が溶融した後に、試料
支持部14のペルチェ素子14bによって溶融分を冷却
固化させるようにしてもよく、勿論、試料保持部13の
ペルチェ素子13bによって試料Sを冷却しても溶融分
を固化できる。
In the second fixing method, the melted portion is solidified by the cold heat of the sample S that has been cooled in advance, but after the stage contact portion of the sample S is melted, the Peltier element 14b of the sample support portion 14 is melted. The molten component may be cooled and solidified by, of course, the molten component can be solidified even when the sample S is cooled by the Peltier element 13b of the sample holder 13.

【0033】次に、第3の固定方法を図7を引用して説
明する。まず、図7(a)に示すように、保持筒13a
内に試料Sを挿入して分割片による締め付けによってこ
れを保持し、同状態でペルチェ素子13bによって保持
筒13a内の試料Sを予め冷却し、試料冷却後はペルチ
ェ素子13bによる冷却を停止する。続いて、ペルチェ
素子14bによって可動ステージ14aを所定温度(試
料Sの主に包理剤を溶融可能な温度)に加熱し、同図
(b)に示すように、可動ステージ14aを上昇させ
て、該可動ステージ14aの凹み14a1に試料Sの下
端部を挿入する。これにより、予め冷却されている試料
Sの下端面が加熱状態の可動ステージ14aに押し付け
られて接触部分が溶融する。試料Sのステージ接触部分
が溶融する前後何れかにペルチェ素子14bによる加熱
を停止すると、溶融分が試料Sが持つ冷熱によって徐々
に固化し、溶融分が接着剤の役割を果たして試料Sが可
動ステージ14aに密着固定される。
Next, the third fixing method will be described with reference to FIG. First, as shown in FIG. 7A, the holding cylinder 13a
The sample S is inserted therein and held by tightening with the divided pieces, and in the same state, the sample S in the holding cylinder 13a is cooled in advance by the Peltier element 13b, and after the sample is cooled, the cooling by the Peltier element 13b is stopped. Subsequently, the Peltier element 14b heats the movable stage 14a to a predetermined temperature (a temperature at which the embedding agent of the sample S is mainly meltable), and the movable stage 14a is raised as shown in FIG. The lower end of the sample S is inserted into the recess 14a1 of the movable stage 14a. As a result, the lower end surface of the sample S that has been cooled in advance is pressed against the movable stage 14a in the heated state, and the contact portion is melted. When the heating by the Peltier element 14b is stopped before or after the stage contact portion of the sample S is melted, the melted component is gradually solidified by the cold heat of the sample S, and the melted component plays the role of an adhesive to move the sample S to the movable stage. It is tightly fixed to 14a.

【0034】この第3の固定方法では、予め冷却された
試料Sが持つ冷熱によって溶融分を固化させるようにし
たが、試料Sのステージ接触部分が溶融した後に、試料
支持部14のペルチェ素子14bによって溶融分を冷却
固化させるようにしてもよく、勿論、試料保持部13の
ペルチェ素子13bによって試料Sを冷却しても溶融分
を固化できる。
In the third fixing method, the molten component is solidified by the cold heat of the pre-cooled sample S. However, after the stage contact portion of the sample S is melted, the Peltier element 14b of the sample support portion 14 is melted. The molten component may be cooled and solidified by, of course, the molten component can be solidified even when the sample S is cooled by the Peltier element 13b of the sample holder 13.

【0035】ちなみに、上記の第2の固定方法と第3の
固定方法では、試料Sを保持部13aに挿通保持させた
状態でその端部を可動ステージ14aに密着固定できる
ので、試料S自体に微妙な曲がりがあるような場合で
も、該試料Sを曲がりなりに可動ステージ14aに固定
することが可能で、可動ステージ14aが上下動すると
きでも試料Sに曲がりに逆らった無理な力が加わること
を防止できる。
By the way, in the above-mentioned second fixing method and third fixing method, since the end of the sample S can be closely attached and fixed to the movable stage 14a while the sample S is held in the holding portion 13a, the sample S itself can be fixed. Even if there is a slight bend, the sample S can be fixed to the movable stage 14a without bending, and an unreasonable force against the bend is applied to the sample S even when the movable stage 14a moves up and down. Can be prevented.

【0036】試料Sを上記の固定方法によって可動ステ
ージ14a上に固定した後は、分割片による締め付けを
解除した状態で可動ステージ14aを所定量上昇させて
試料Sを保持筒13aの上端から所定量突出させ、次い
で保持筒13aの分割片によって試料Sを締め付けて保
持する。先に述べたように、本実施形態では、分割片に
よる締め付けのみで試料Sを固定支持するものではない
ので、該締め付け力は試料Sが潰れない程度の弱い力で
も充分である。
After the sample S is fixed on the movable stage 14a by the above-mentioned fixing method, the movable stage 14a is lifted by a predetermined amount while the tightening by the divided pieces is released, and the sample S is moved by a predetermined amount from the upper end of the holding cylinder 13a. The sample S is projected, and then the sample S is clamped and held by the divided pieces of the holding cylinder 13a. As described above, in the present embodiment, the sample S is not fixedly supported only by the tightening by the divided pieces, so that the tightening force is sufficient so that the sample S is not crushed.

【0037】そして、回転板15bを1回転させて試料
Sの突出部分をその切断刃15aによって端面と平行に
切断する(図10参照)。
Then, the rotating plate 15b is rotated once to cut the protruding portion of the sample S by the cutting blade 15a thereof in parallel with the end face (see FIG. 10).

【0038】切断後は、試料Sの切断面を照明しながら
試料観察機1のカメラ2で撮像する。試料Sの切断と切
断面の撮像は順次繰り返され、詳しくは、回転板13b
を等速回転させながら切断の合間に切断面の撮像が繰り
返され、これにより各切断面の画像(画像データ)がメ
モリに取り込まれる。
After the cutting, the camera 2 of the sample observing machine 1 takes an image while illuminating the cut surface of the sample S. The cutting of the sample S and the imaging of the cut surface are sequentially repeated.
The images of the cut surfaces are repeated between the cuts while rotating at a constant speed, whereby the images (image data) of the cut surfaces are captured in the memory.

【0039】メモリに取り込まれた各切断毎の画像デー
タには領域分割,輪郭変形処理,合成等のデータ処理が
施され、外部からの要求に応じて試料Sの切断面像やこ
れを合成して得た立体像(3次元像)がモニターに表示
され、これに基づいて種々の観察、例えば、医療分野に
おける病理検査,製薬分野における毒性検査,食品分野
における食品検査,農業分野における農作物検査や植物
構造解析,生物分野における生体試料検査等が実施され
る。
The image data for each cut taken in the memory is subjected to data processing such as area division, contour deformation processing, and synthesis, and the cut surface image of the sample S and this are synthesized in response to a request from the outside. The three-dimensional image (three-dimensional image) obtained by this is displayed on the monitor, and based on this, various observations such as pathological examination in the medical field, toxicity examination in the pharmaceutical field, food inspection in the food field, crop inspection in the agricultural field, etc. Plant structure analysis and biological sample inspection in the biological field will be conducted.

【0040】先に説明したように、試料Sの端部を可動
ステージ14aに密着固定させ、且つ試料の他端部を保
持筒13aの分割片によって締め付けることにより試料
Sの固定支持を行うようにしたので、試料Sの端部を切
断刃15aによって切断する際に該試料Sにこれを持ち
上げようとする力が働いても、該試料Sが浮き上がるこ
とを確実に防止でき、安定した姿勢を維持したままで試
料Sの切断を良好に行うことができ、ひいては切断後の
切断面撮像及び画像処理に基づく試料観察を適正に行う
ことができる。
As described above, the sample S is fixedly supported by closely fixing the end of the sample S to the movable stage 14a and tightening the other end of the sample by the divided piece of the holding cylinder 13a. Therefore, even when the force to lift the sample S is exerted when the edge of the sample S is cut by the cutting blade 15a, it is possible to reliably prevent the sample S from rising and maintain a stable posture. The sample S can be satisfactorily cut as it is, and by extension, the sample observation based on the cut surface imaging after the cutting and the image processing can be appropriately performed.

【0041】また、試料Sのステージ接触部分を溶融し
て固化させることにより、該溶融分を接着剤として利用
して試料Sを可動ステージ14aに密着固定しているの
で、可動ステージ14aに対する試料固定のために専用
の接着剤や器具等を必要としない。
Further, since the sample S is brought into close contact with and fixed to the movable stage 14a by melting and solidifying the stage contact portion of the sample S by using the melted portion as an adhesive, the sample is fixed to the movable stage 14a. Because of this, there is no need for special glue or equipment.

【0042】しかも、可動ステージ14aの凹み14a
1の内側面に設けた逆テーパーに試料Sの固化分を係合
させるようにしているので、可動ステージ14aに対す
る試料Sの固定を強固なものとすることができる。
Moreover, the recess 14a of the movable stage 14a
Since the solidified portion of the sample S is engaged with the reverse taper provided on the inner side surface of the sample 1, the sample S can be firmly fixed to the movable stage 14a.

【0043】さらに、試料Sが可動ステージ14aに密
着固定されているので、可動ステージ14aによって試
料Sを上方移動のみならず下方移動させることが可能で
あり、試料Sの切断面を切断位置よりも引っ込める必要
がある場合や、試料Sを保持筒13a内から下方に抜
出す場合に有用で、試料Sの取り扱いが極めて容易とな
る。
Further, since the sample S is closely fixed to the movable stage 14a, it is possible to move the sample S downward as well as upward by the movable stage 14a, and the cut surface of the sample S can be moved more than the cutting position. or if you need to retract, useful when issuing <br/> unplug downwardly sample S from the holding cylinder 13a, the handling of the sample S is extremely easy.

【0044】つまり、試料切断面の撮像に光量との関係
で時間を要するような場合、例えば蓄積型CCDを内蔵
したカメラで蛍光画像を撮像するような場合には、回転
板15bを等速回転させるときの切断の合間では時間が
足りないため、このような場合には可動ステージ14a
によって試料Sを下方移動させて試料Sの切断面を切断
位置よりも引っ込めておけば、切断刃15aを空回しさ
せることよる時間稼ぎが可能となり、このときに試料
Sの切断面に傷が付くことも防止できる。
That is, when it takes time to image the sample cut surface due to the amount of light, for example, when a fluorescence image is taken by a camera having a built-in CCD, the rotary plate 15b is rotated at a constant speed. In such a case, the movable stage 14a is not used because there is not enough time between cuttings.
If it the sample S by the downward movement retracted from the cutting position the cutting surface of the sample S by, buy time by be idle the cutting blade 15a becomes possible, scratches on the cut surface of the sample S in this case It can also prevent sticking.

【0045】尚、上記実施形態で用いた試料保持部13
のペルチェ素子13bは従来周知の他の冷却手段、例え
ば冷媒回路を用いた冷凍機等で代用してよい。また、試
料支持部14のペルチェ素子14bも従来周知の他の加
熱冷却手段、例えば加熱・冷却兼用のヒートポンプ等で
代用してもよく、加熱のみを行うのであれば電熱ヒータ
等をペルチェ素子14bの代わりに用いてもよい。
The sample holder 13 used in the above embodiment
The Peltier element 13b may be replaced with other conventionally known cooling means, for example, a refrigerator using a refrigerant circuit. Further, the Peltier element 14b of the sample support portion 14 may be replaced with other heating / cooling means known in the related art, for example, a heat pump for both heating and cooling. If only heating is performed, an electric heater or the like may be used instead of the Peltier element 14b. It may be used instead.

【0046】また、上記実施形態では試料Sの端部を溶
融,固化させて可動ステージ14aに密着固定するよう
にしたものを例示したが、図8(a)に示すように、可
動ステージ14hの上面に筒状のクランプ部材14iを
設けて、該クランプ部材14iによって試料Sの端部を
締め付けて可動ステージ14hに密着固定するようにし
てもよい。このクランプ部材14iは、同図(b)に示
すように、試料Sの2側面に対向する固定片14i1
と、他の2側面に対向する可動片14i2とから成り、
バネ圧や空気圧等を利用して可動分割片14i2を試料
Sの中心に向かって移動させることで試料締め付けを行
えるようになっている。勿論、可動片の個数は2以上で
あってもよく、また、クランプ部材の内面に突起等の食
い込み部分を設けておけば可動ステージ14hに対する
試料Sの固定をより強固なものとすることができる。
In the above embodiment, the end of the sample S is melted and solidified so as to be closely fixed to the movable stage 14a. However, as shown in FIG. A cylindrical clamp member 14i may be provided on the upper surface, and the end portion of the sample S may be clamped by the clamp member 14i so as to be closely fixed to the movable stage 14h. The clamp member 14i includes a fixing piece 14i1 facing two side surfaces of the sample S, as shown in FIG.
And a movable piece 14i2 facing the other two side surfaces,
The sample can be tightened by moving the movable division piece 14i2 toward the center of the sample S by using spring pressure, air pressure, or the like. Of course, the number of movable pieces may be two or more, and if the inner surface of the clamp member is provided with a biting portion such as a protrusion, the sample S can be more firmly fixed to the movable stage 14h. .

【0047】[0047]

【発明の効果】以上詳述したように、本発明によれば、
試料の端部を切断する際にこれを持ち上げようとする力
が働いても、該試料が可動ステージから浮き上がること
を確実に防止でき、安定した姿勢を維持したままで試料
の切断を良好に行うことができる。また、試料が可動ス
テージに密着固定されているので、試料の切断面を切断
位置よりも引っ込める必要がある場合や、試料を保持筒
内から下方に抜出す場合に有用で、試料の取り扱いが
極めて容易となる。
As described in detail above, according to the present invention,
Even if the force that lifts the end of the sample is exerted when it is cut, the sample can be reliably prevented from rising from the movable stage, and the sample is cut well while maintaining a stable posture. be able to. Also, since the sample is tightly fixed to the movable stage, and when it is necessary to retract from the cutting position the cutting surface of the sample, useful when out and disconnect downwardly sample from the holding cylinder, the sample handling It will be extremely easy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る試料観察装置の全体図FIG. 1 is an overall view of a sample observation device according to the present invention

【図2】試料切断機の詳細図[Fig. 2] Detailed view of the sample cutting machine

【図3】保持筒を構成する分割片の上面図FIG. 3 is a top view of a divided piece forming a holding cylinder.

【図4】可動ステージの縦断面図と上面図FIG. 4 is a vertical sectional view and a top view of a movable stage.

【図5】切断刃及び試料の斜視図FIG. 5 is a perspective view of a cutting blade and a sample.

【図6】可動ステージに対する試料の固定方法を示す図FIG. 6 is a diagram showing a method of fixing a sample to a movable stage.

【図7】可動ステージに対する試料の固定方法を示す図FIG. 7 is a diagram showing a method of fixing a sample to a movable stage.

【図8】可動ステージに対する試料の固定方法を示す図FIG. 8 is a diagram showing a method of fixing a sample to a movable stage.

【図9】従来の試料支持方法及び試料切断方法を示す図FIG. 9 is a diagram showing a conventional sample supporting method and sample cutting method.

【図10】切断時に試料に働く力を示す図FIG. 10 is a diagram showing a force acting on a sample during cutting.

【符号の説明】[Explanation of symbols]

1…試料観察機、11…試料切断機、S…試料、13…
試料保持部、13a…保持筒、13a1〜13a5…分
割片、13b…ペルチェ素子、14…試料支持部、14
a…可動ステージ、14b…ペルチェ素子、14h…可
動ステージ、14i…クランプ部材、15…試料切断
部、15a…切断刃。
1 ... Sample observation machine, 11 ... Sample cutting machine, S ... Sample, 13 ...
Sample holder, 13a ... Holding cylinder, 13a1 to 13a5 ... Divided piece, 13b ... Peltier element, 14 ... Sample support, 14
a ... movable stage, 14b ... Peltier element, 14h ... movable stage, 14i ... clamp member, 15 ... sample cutting part, 15a ... cutting blade.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 工藤 謙一 東京都豊島区巣鴨5−15−16 (72)発明者 横田 秀夫 神奈川県川崎市多摩区菅2−15−7 キ ャピタル稲田堤206 (72)発明者 小久保 光典 静岡県沼津市大岡2068−3 東芝機械株 式会社 沼津事業所内 (72)発明者 南都 寛 静岡県沼津市大岡2068−3 東芝機械株 式会社 沼津事業所内 (72)発明者 新生 孝一 静岡県沼津市大岡2068−3 東芝機械テ クノ株式会社内 (56)参考文献 特開 平8−35921(JP,A) 特開 平6−265452(JP,A) 特開 平3−249539(JP,A) 特開 平2−299643(JP,A) 実開 昭57−63375(JP,U) 実開 昭57−19973(JP,U) 実開 昭55−65543(JP,U) 実開 平5−87555(JP,U) 実公 昭11−12727(JP,Y1) 小林賢知、樋口俊郎、青木勇、工藤謙 一,三次元内部構造顕微鏡の開発,精密 工学会誌,日本,精密工学会,1995年 1月 5日,第61巻、第1号,p.100 −106 (58)調査した分野(Int.Cl.7,DB名) G01N 1/00 - 1/44 JICSTファイル(JOIS)─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kenichi Kudo 5-15-16 Sugamo, Toshima-ku, Tokyo (72) Inventor Hideo Yokota 2-15-7 Suga, Tama-ku, Kawasaki-shi, Kanagawa Capital Inada Tsutsumi 206 (72) Inventor Mitsunori Kokubo 2068-3 Ooka, Numazu-shi, Shizuoka Toshiba Machine Co., Ltd.Numazu office (72) Inventor Hiroshi Nanto 2068-3 Ooka, Numazu-shi, Shizuoka Toshiba Machine Co., Ltd.Numazu office (72) Inventor Shinsei Koichi 2068-3 Ooka, Numazu City, Shizuoka Prefecture Toshiba Machine Techno Co., Ltd. (56) Reference JP-A-8-35921 (JP, A) JP-A-6-265452 (JP, A) JP-A-3-249539 ( JP, A) JP-A-2-299643 (JP, A) Actual opening Sho 57-63375 (JP, U) Actual opening Sho 57-19973 (JP, U) Actual opening Sho 55-65543 (JP, U) Actual opening Flat 5-87555 (JP, U) Kosho 11-12727 (JP, Y1) Kenichi Kobayashi, Toshiro Higuchi, Isamu Aoki, Kenichi Kudo, Development of three-dimensional internal structure microscope, Japan Society for Precision Engineering, Japan, Precision Engineering Society, January 5, 1995, 1st Volume 61, Issue 1, p. 100-106 (58) Fields surveyed (Int.Cl. 7 , DB name) G01N 1/00-1/44 JISST file (JOIS)

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一端部側から順次切断されその切断面を
観察される試料を所定姿勢で支持する観察試料支持方法
において、可動ステージとして逆テーパーが内側面に設けられた凹
部を有するものを用い、 試料の端部を加熱状態にある可動ステージの凹部に挿入
押し付けて接触部分を溶融した後、該溶融分を固化さ
せて試料を可動ステージに密着固定すると共に、試料の
他端部を該試料の横断面形に整合した内孔を有する保持
筒内に挿通させた、 ことを特徴とする観察試料支持方法。
1. In an observation sample supporting method for supporting a sample, which is sequentially cut from one end side and whose cut surface is observed, in a predetermined posture, a concave taper provided as an movable stage on the inner side surface is provided with a reverse taper.
Insert the end of the sample into the recess of the heated movable stage using
After pressing and melting the contact part, the melted part is solidified to firmly fix the sample to the movable stage, and the other end of the sample is placed in a holding cylinder having an inner hole aligned with the cross-sectional shape of the sample. An observation sample supporting method, characterized in that the observation sample is inserted.
【請求項2】 一端部側から順次切断されその切断面を
観察される試料を所定姿勢で支持する観察試料支持方法
において、可動ステージとして逆テーパーが内側面に設けられた凹
部を有するものを用い、 冷却状態にある試料の端部を可動ステージの凹部に挿入
押し付けて接触部分を溶融した後、該溶融分を固化さ
せて試料を可動ステージに密着固定すると共に、試料の
他端部を該試料の横断面形に整合した内孔を有する保持
筒内に挿通させた、 ことを特徴とする観察試料支持方法。
2. An observing sample supporting method for supporting a sample, which is sequentially cut from one end side and whose cut surface is observed, in a predetermined posture, wherein a concave taper provided as an movable stage is provided with an inverse taper on the inner side surface.
Insert the end of the sample in the cooled state into the recess of the movable stage using
After pressing and melting the contact part, the melted part is solidified to firmly fix the sample to the movable stage, and the other end of the sample is placed in a holding cylinder having an inner hole aligned with the cross-sectional shape of the sample. An observation sample supporting method, characterized in that the observation sample is inserted.
【請求項3】 一端部側から順次切断されその切断面を
観察される試料を所定姿勢で支持する観察試料支持方法
において、可動ステージとして逆テーパーが内側面に設けられた凹
部を有するものを用い、 冷却状態にある試料の端部を加熱状態にある可動ステー
の凹部に挿入し押し付けて接触部分を溶融した後、該
溶融分を固化させて試料を可動ステージに密着固定する
と共に、試料の他端部を該試料の横断面形に整合した内
孔を有する保持筒内に挿通させた、 ことを特徴とする観察試料支持方法。
3. An observation sample supporting method for supporting a sample, which is sequentially cut from one end side and whose cut surface is observed, in a predetermined posture, wherein a concave portion provided with an inverse taper on the inner side surface as a movable stage.
Using the one that has a section , insert the end of the sample in the cooled state into the concave part of the movable stage in the heated state and press it to melt the contact part, then solidify the melted portion and fix the sample closely to the movable stage At the same time, the other end of the sample is inserted into a holding cylinder having an inner hole aligned with the cross-sectional shape of the sample.
【請求項4】 溶融分の固化が冷却によるものである、 ことを特徴とする請求項1乃至3の何れか1項記載の観
察試料支持方法。
4. The method for supporting an observation sample according to claim 1, wherein the solidification of the molten component is caused by cooling.
【請求項5】 試料が試料本体とこれを包理する包理剤
とから成り、包理剤が主に溶融される、 ことを特徴とする請求項1乃至4の何れか1項記載の観
察試料支持方法。
5. The observation according to claim 1, wherein the sample comprises a sample body and an embedding agent which embeds the body, and the embedding agent is mainly melted. Sample support method.
【請求項6】 保持筒を、試料の締め付けを可能とした
複数の分割片から構成し、試料切断時には保持筒内に挿
通された試料を分割片によって締め付けるようにした、 ことを特徴とする請求項1乃至5の何れか1項記載の観
察試料支持方法。
6. The holding cylinder is composed of a plurality of divided pieces capable of tightening the sample, and the sample inserted into the holding cylinder is tightened by the divided pieces when cutting the sample. Item 6. A method for supporting an observation sample according to any one of items 1 to 5.
JP00889297A 1997-01-21 1997-01-21 Observation sample support method Expired - Lifetime JP3525158B2 (en)

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JP4953366B2 (en) * 2006-02-13 2012-06-13 セイコーインスツル株式会社 Thin section manufacturing apparatus and thin section manufacturing method
DE102006054609B4 (en) * 2006-11-17 2015-05-07 Leica Mikrosysteme Gmbh Device for processing samples
JP5316161B2 (en) 2009-03-27 2013-10-16 ソニー株式会社 Observation device
JP6219624B2 (en) * 2013-07-04 2017-10-25 デクセリアルズ株式会社 Manufacturing method of thermal conductive sheet, manufacturing apparatus of thermal conductive sheet, cutting method of resin molded body
US9587215B2 (en) * 2014-08-07 2017-03-07 General Electric Company Devices, systems and methods for automated transfer of a sample
CN109049044B (en) * 2018-06-25 2023-12-19 农业部南京农业机械化研究所 Crop stalk physical mechanics sample processingequipment

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* Cited by examiner, † Cited by third party
Title
小林賢知、樋口俊郎、青木勇、工藤謙一,三次元内部構造顕微鏡の開発,精密工学会誌,日本,精密工学会,1995年 1月 5日,第61巻、第1号,p.100−106

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