JP3522096B2 - Energy filter support device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron microscope and the like.
Observation, analysis, etc. using a charged particle beam
Energy filters used in charged particle beam devices are
To adjust the position of the child beam at a predetermined position in the passage
Energy filter support device. 2. Description of the Related Art The energy filter supporting device is
Conventionally, the technologies described in the following (J01) and (J02) have been known.
ing. (J01) Technology shown in FIGS. 5 to 8 In addition, in order to facilitate understanding of
And the front-back direction is the X-axis direction, the left-right direction is the Y-axis direction,
The direction is the Z-axis direction, and arrows X, -X, Y, -Y, Z,-
The direction indicated by Z or the side indicated, respectively, forward, rear, left
, Right, up, down, or front, back, left, right
Side, upper side, lower side. Also, in the figure,
An arrow with “•” is an arrow pointing from the back of the paper to the front
Means that "x" is described in "○".
Means an arrow pointing from the front to the back. Figure 5
Electron microscope incorporating a conventional energy filter support device
It is explanatory drawing of a microscope. FIG. 6 is a view of the electron microscope of FIG.
Explanatory drawing of a conventional energy filter supporting device incorporated
6A is a sectional view taken along the line VIA-VIA of FIG.
FIG. 6B is a view taken along the line VIB-VIB in FIG. 6A.
is there. FIG. 7 is a sectional view taken along the line VII-VII of FIG. 6A.
FIG. 8 is a perspective view of a plate constituting the energy filter.
is there. [0003] In FIG. 5, a transparent particle beam apparatus is used.
The over-type electron microscope 1 includes a lens barrel 2 whose inside is kept in a vacuum.
An electron gun 3 is provided at the upper end of the lens barrel 2. Lens barrel 2
At the lower end, a fluorescent screen 4 for observation, a film 5 for imaging,
And an observation window 6. Below the electron gun 3
A focusing lens 7 is arranged above the fluorescent screen 4;
An object lens 8 is arranged. And the focusing lens
A stage support member 9 is arranged between the lens 7 and the objective lens 8.
Is placed. The stage support member 9 includes a sample mounting portion and
Goniometer stage GS is supported.
The charged particle beam diameter is set at the position facing the
A squeezing device 11 is supported. The gonio stage GS has a holder support hole.
12a having a cylindrical holder support member 12 having
You. The holder support member 12 supported the sample holder H.
In this state, the axial direction is
The support is adjustable. The tip of the sample holder H
The sample is held at the end. Provided at the upper end of the lens barrel 2
Electron beam (charged particle beam) emitted from an electron gun
Passes through the objective lens 8, then the aperture 13, the intermediate lens 1
4 and then enters the energy filter F. Said d
Energy is in a predetermined range by the energy filter F
Only the electron beam enters the projection lens 15. The projection
The electron beam incident on the lens is emitted from the fluorescent screen 4 or
It is incident on the film for imaging 5 and the sample image can be observed.
It becomes. [0005] In FIG. 6 to FIG.
The tab F has a pair of plates 21 and 21,
It is configured by joining the joining surfaces of the plates 21 and 21.
You. In FIG. 8, the joining surface of each plate 21 is concave.
Portions 22a to 22d are formed, and the upper end surface of the plate 21
A groove 23 for beam incidence is formed between the
And the lower end surface of the plate 21 and the recess 22d.
Between them is formed a groove 24 for beam emission. Ma
In addition, a beam passes between the recess 22a and the recess 22b.
An excess groove 26a is formed, and the recess 22b and the recess
A groove 26b for beam passage is formed between the portions 22c.
A groove for beam passage is provided between the concave portion 22c and the concave portion 22d.
26c are formed, and the concave portion 22a and the concave portion 22d are formed.
A groove 26d for beam passage is formed between them. FIG.
In the above, the electromagnet 2 is provided in the magnet housing recesses 22a to 22d.
7a to 27d are accommodated. The electromagnets 27a to 27d
Is disposed so as to be recessed from the joint surface of the pair of plates 21.
Have been. Then, the pair of plates 21 and 21 are connected.
In the combined state, the recesses 22 of the plates 21
a to 22d, beam input groove 23, beam output groove 2
4, and the concave grooves 26a to 26d for beam passage are opposed to each other.
And select only the electron beam with a certain range of energy.
The beam selection passage R (see FIGS. 6B and 8) through which
Is formed. In FIG. 6, a lens barrel 2 has a filter support case.
Case 31 is mounted. Filter support case 31
It has an outer end wall 32 at its outer end (rear end, −X end),
The outer end wall 32 has a pair of left and right filter support plates 3.
3, 33 are connected. Each filter support plate 3
3 has rod support parts 33a and 33b at the upper end,
The rod supports 33a and 33b extend in the Z-axis direction, respectively.
Filter support rods 34a and 34b are fixed.
6B and 7, the filter support rod 34
The lower ends of the a and b are connected to each other via connecting members 36a and 36b.
The lower end of the energy filter F is supported. The beam entrance R of the energy filter F
In order to position a in the path of the electron beam,
It is necessary to adjust the position of the energy filter F. Previous
The outer end wall 32 of the filter support case 31 has an outer end position.
An adjusting screw 37 is supported so as to be able to move back and forth.
The end portion 37a contacts the outer end surface of the energy filter F.
Energy filter F having an outer end surface contact portion 37b
The position in the front-back direction is adjusted. Sandals
The tip 37a of the outer end position adjusting screw 37 is
The outer end face (rear end face, −X side end face) of the energy filter F
When pressed, the filter support rods 34a and 34b are
Swinging back and forth around the upper end of the
The front and rear positions of the tab F are adjusted. In FIG. 6B,
Left and right sides (sides in the Y-axis direction) of the lens barrel 2
Position adjustment screws 38 and 39 are
The tips 38a and 39a are connected to the energy filter.
Abutment portions 38b, 39b abutting on the left and right sides of F
And adjusts the position of the energy filter F in the left-right direction.
It is supposed to. (J02) Technical technique shown in FIG. 9 FIG. 9 is an explanatory view of another conventional energy filter supporting device.
FIG. 9A shows another conventional energy filter in an electron microscope.
FIG. 9B, seen from above, with the support device installed
9B is a diagram viewed from the line IXB-IXB in FIG. 9A. What
In FIG. 9, the same components as those in FIGS.
Components are given the same reference numerals, and detailed description thereof is omitted.
You. The energy filter F shown in FIG.
1 is fixed, and the slider 41 is a frame fixed to the lens barrel 2.
It is slidably supported on the flange 42. FIG.
B, the front side of the slider 41 on the flange 42
On the surface, a front end position adjusting screw 4 supported on the front side surface of the lens barrel 2
3 abuts on the rear surface of the slider 41
2 the tip of the rear end position adjusting screw 44 supported on the rear side
Abut. The front end position adjusting screw 43 and the rear end position
The position of the slider 41 is adjusted by the position adjusting screw 44.
I can do it. Also, in FIG.
The slider 41 is supported on the left side of the lens barrel 2 on the left side.
The tip of the left end position adjusting screw 46 contacts the slider
On the right side of 41, the right end position supported by the right side of the lens barrel 2
The tip of the adjusting screw 47 is in contact. Adjust the left end position
The screw 46 and the right end position adjusting screw 47
The left and right positions of the da 41 can be adjusted. Problems to be Solved by the Invention (Problem of (J01))
Point) In the prior art (J01) described with reference to FIGS.
The filter support rods 34a and 34b are supported at their upper ends by fulcrums.
Swings back and forth, left and right as the energy filter F
The front, rear, left and right positions are adjusted. The filter support lock
When the arms 34a and 34b swing about their upper ends,
Supported on the lower ends of the filter support rods 34a, 34b
The energy filter F will also move up and down.
You. In this case, the performance of the electron microscope is adversely affected (image distortion or
The image is blurred). In addition, a small electron microscope with low accelerating voltage
In a mirror, the energy filter F is also relatively small, so that
The attachment / detachment work is easy, but large electron microscopes with high accelerating voltage
In a mirror, the energy filter F is also quite large and heavy.
It becomes difficult and the attachment and detachment work becomes difficult. (Problem of (J02)) Explanation will be given with reference to FIG.
In the prior art (J02), the lower end of the energy filter F
The four sliders 41, 4 connected to the slider 41
4, 46, 47 to press the slider 41 and the air.
The energy filter F is connected to a filter constituting a part of the lens barrel 2.
The slider 42 is slid on the edge 42. The slider 4
When replacing 1 or flange 42, remove part of lens barrel 2
Work is required. In addition, the technology of (J02)
The slider 4 is adjusted from the adjusting screws 43, 44, 46, 47.
1 is applied to the slider 41 and the energy
It does not pass through the position of the center of gravity of the member including the lugi filter F.
For this reason, the force acting on the slider 41 is
The center of gravity position rotation
And a rotational moment of
When the slider 41 slides, the flange 41
Galling easily occurs with the slider 41. The departure
If it occurs, the contact surface between the flange 42 and the slider 41
Damage to the lens, dust in the lens barrel 2
I do. The present invention has been made in view of the above circumstances, and has the following description.
Make the content an issue. (O01) An energy beam arranged in the path of the charged particle beam
Filter in a plane perpendicular to the direction of incidence of the charged particle beam.
Adjustment. (O02) Galling or dust when adjusting the position of the energy filter
To prevent the occurrence. (O03) To facilitate replacement of the energy filter. Means for Solving the Problems Next, the above-mentioned problems are solved.
In order to explain the invention devised in order to
Is used to facilitate correspondence with the elements of the embodiment described later.
The reference numerals in parentheses for the elements of the embodiments are added. Ma
In addition, the present invention will be described in correspondence with reference numerals in the embodiments described below.
The reason is to facilitate understanding of the present invention.
This is not to limit the range of the examples to the examples. (The present invention) In order to solve the above problems, the present invention
The energy filter support device of the invention has the following requirements.
(A01) Z-axis extending in the vertical direction
With a charged particle beam path along the inside
(2), (A02) Removably mounted on the side of the lens barrel (2).
And extend in the front-rear direction which is horizontal and perpendicular to the Z axis.
An outer end wall (56) swells in the X-axis direction and is provided at the outer end in the X-axis direction.
And a Y-axis direction extending horizontally and in a horizontal direction perpendicular to the X-axis.
Left wall (54a) and right side spaced apart from each other
Filter supporting case (C) having a wall (54b), (A0
3) The lens barrel (2) and the filter support case
(C) A beam placed inside and on which a charged particle beam is incident
The upper surface on which the beam entrance (Ra) is formed and the beam entrance
Beam exit of charged particle beam incident from mouth (Ra)
A lower surface on which (Rb) is formed, and the beam entrance (Ra)
Energy in charged particles incident from a certain range
Charge for emitting charged particles from the beam exit port (Rb)
Energy fill having an electron beam selection path (R)
(F), (A04) Center of gravity of the energy filter (F)
Supported surfaces provided on the left and right sides near the position
(50a, 50a), (A05) The filter support case
(C) of the left side wall (54a) and the right side wall (54b).
It is provided on the inner side surface and supports the supported surface (50a, 50a).
Having a supporting surface (57a, 57a)
The filter (F) is slidably supported in a horizontal plane.
A pair of filter support members (57, 57), (A06)
The energy supported by the filter support case (C)
An outer end surface contact member (6) that contacts the outer end surface of the filter (F).
6) adjusting the position of the outer end of the energy filter (F).
Outer end position adjusting devices (61-69), (A07)
The energy filter (F) supported by the lens barrel (2)
Having an inner end surface abutting member (73) abutting against the inner end surface of
Inner end position for adjusting inner end position of energy filter (F)
Adjusting devices (71 to 74), (A08) due to the lens barrel (2)
The energy filter is supported so as to be adjustable in position.
(F) abutment portions that respectively contact the left side surface and the right side surface
Material (78, 83) having the energy filter (F)
Left / right position adjustment device (76-8
4). (Operation of the present invention) The present invention having the above-mentioned configuration
In the energy filter support device, the filter support case
(C) is an X extending horizontally and in the front-rear direction perpendicular to the Z axis.
The outer end wall (56) swells in the axial direction at the outer end in the X-axis direction, and water
Flat and extends in the horizontal direction perpendicular to the X axis in the Y axis direction
The left side wall (54a) and the right side wall (5
4b). The filter support case (C) includes:
Path of charged particle beam along Z-axis extending vertically
Is detachably attached to the side of the lens barrel (2) formed inside
Is done. The lens barrel (2) and the filter support case
The energy filter disposed inside the source (C)
(F) is the left side wall of the filter supporting case (C).
(54a) and the inner surface of the right side wall (54b).
Supported by a pair of filter support members (57, 57).
Have been. Filter support members (57, 57) and energy
Replace the filter (F) with the filter support case
By attaching and detaching (C) to and from the lens barrel (2),
It can be done easily. The energy filter
(F) is in the horizontal plane, that is, how the charged particle beam is incident.
The position is adjustable in a plane perpendicular to the direction. That is, the figure
5 to 8 shown in FIG.
When adjusting the position of the energy filter (F),
The energy filter (F) moves vertically (up and down)
Never. The lens barrel (2) and a filter support case
The beam entrance (R) of the energy filter (F) in (C)
a) is located in the X-axis direction from the path of the charged particle beam.
When it is out of alignment, the filter support case (C)
A supported outer end position adjusting device (61-69) or
Inner end position adjusting devices (71 to 7) supported by the lens barrel (2)
4) Operate the outer end face of the energy filter (F)
The outer end surface contact member (66) which comes into contact with the inner end surface
The energy fill by the inner end surface contact member (73)
(F) is adjusted in the X-axis direction. Also, the lens barrel
(2) and the energy in the filter support case (C).
The position of the beam entrance (Ra) of the filter (F) is
Deviated from the path of the particle beam in the horizontal direction (Y-axis direction)
When adjusting the horizontal position supported by the lens barrel (2)
Operating the energy filter by operating the devices (76-84)
(F) abutment portions that respectively contact the left side surface and the right side surface
The position of the material (78, 83) is adjusted to adjust the energy fill.
Adjust the left and right positions of the tab (F). The pair of filter support members (57, 5)
7) The support surface (57a, 57a) is an energy filter
(F) are provided on the left side surface and the right side surface near the center of gravity.
Support the supported surfaces (50a, 50a).
Outer end position adjusting device (61-69), said inner end position adjusting device
Position (71-74) or left / right position adjustment device (76-8)
4) the force acting on the energy filter (F)
If the direction passes through the vicinity of the position of the center of gravity,
No rotational moment is generated in the energy filter (F)
The support surface (57a, 57a) and the supported surface
(50a, 50a)
Can be. For this reason, dust caused by the galling is not
It does not occur in the cylinder (2). [0018] The energy filter (F) includes the energy filter (F).
Beam entrance formed on the upper surface of lugi filter (F)
(Ra) is the charged particle beam
When passing through the system selection passage (R), the energy falls within a predetermined range.
Pass only certain charged particles through the energy filter
(F) through the beam exit (Rb) formed on the lower surface.
A constant charged particle beam in Kyrgyz is emitted. (Embodiment 1 of the present invention) The present invention
Embodiment 1 of the energy filter supporting device of
The invention is characterized by having the following requirements,
(A09) The outer end surface contact member (66) is moved forward by elastic force.
Elastic force to contact the outer end face of the energy filter (F)
The outer end position adjusting device (61 to 61) having a generator (D);
69). The elastic force of the elastic force generator (D) is
Spring pressure, atmospheric pressure and compressed air pressure can be used.
It is possible. (Operation of Embodiment 1 of the Present Invention)
In the first embodiment of the energy filter supporting device, the outer end position
The elastic force generating device (D) of the position adjusting devices (61 to 69) is a bullet.
The outer end surface contact member (66) is moved by the energy
It is brought into contact with the outer end face of the filter (F). For this reason,
Before the surface opposite to the outer end surface of the energy filter (F)
The position of the inner end face is moved outward by the inner end face contact member (73).
Move the energy filter against the elastic force.
(F) moves outward. Also move outward
Position of the inner end surface contact member (73) that contacts the inner end surface that is
When the device is moved inward, the elastic force is applied to the support surface.
(57a, 57a) and the supported surface (50a, 50a)
If it is greater than the frictional resistance between
The member (66) moves inward by elastic force,
The energy filter (F) is moved inward. in this case,
Just adjusting the position of the inner end contact member (73),
Adjust the position of the energy filter (F) in the X-axis direction
be able to. (Embodiment 2 of the present invention)
The second embodiment of the gear filter supporting device is the present invention.
(A010)
The inner end surface contact member (73) is elastically
Elastic force generator for contacting the inner end face of the gear filter (F)
The inner end position adjusting device having: (Operation of Embodiment 2 of the Present Invention)
In the second embodiment of the filter support device, in the inner end position adjusting device,
The elastic force generating device uses the elastic force to cause the inner end surface contact member (7
3) is brought into contact with the inner end face of the energy filter (F).
You. For this reason, the inner end face of the energy filter (F)
The position of the outer end surface, which is the opposite surface, to the outer end surface contact member
When moved inward by (66), the inner end surface contact portion
The material (73) moves inward. In addition, the inner end face direction
The outer end surface contact member (6) contacting the outer end surface moving toward
When the position of 6) is moved outward, the elastic force
Holding surface (57a, 57a) and the supported surface (50a, 5a).
0a), the inner end
The surface contact member (73) is moved outward by elastic force.
The energy filter (F) is moved outward. this
In this case, adjust the position of the outer end surface contact member (66).
Can adjust the position of the energy filter (F).
Wear. (Embodiment 3 of the present invention) Energy of the present invention
The third embodiment of the gear filter support device is an embodiment of the present invention.
That the following requirements are met in Embodiment 1 or 2.
(A011) The energy filter (F)
Vertically relative to either outer or inner end face
Slidable and relatively slidable in the left and right directions
Outer end contact member (66) or inner end contact member (73)
The elastic force generator (D). (Operation of the Third Embodiment of the Present Invention)
In the third embodiment of the filter support device, the elastic force generating device
(D) is an outer end surface contact member (66) or an inner end surface contact member
(73) is connected to the outer end face of the energy filter (F) or
Is vertically slid relatively to one of the inner end faces
As possible and relatively non-slidable in the left and right direction
You. To be relatively slidable in the vertical direction.
The outer end surface contact member (66) or the inner end surface contact member
The vertical position of (73) corresponds to the energy filter (F).
There is no need to place them correctly for In addition, the elastic force
The outer end surface contact member (66) or
Indicates that the inner end surface contact member (73) is used as the energy filter (F).
The energy filter (F) having a contact point as a fulcrum.
Of the energy filter (F)
Adjusting the horizontal position of the beam entrance (Ra)
Can be. (Embodiment 4 of the present invention) Energy of the present invention
Embodiment 4 of the gear filter support device is the present invention.
(A012)
The contact members that respectively contact the left side surface and the right side surface
One of the contact members is elastically
The right and left position adjusting device to be brought into contact with the tab (F). (Operation of the Fourth Embodiment of the Present Invention)
In the fourth embodiment of the filter support device, the left-right position adjusting device is used.
The contact parts contact the left side and the right side, respectively.
One contact member of the material is elastically
Abut the filter (F). Therefore, the present invention
The energy filter supporting device according to the fourth embodiment includes the above-described left side surface.
Or the other contact member of the contact members that contact the right side
To move the energy filter (F) in the horizontal direction.
The adjustment is performed in the front-back direction according to the second or third embodiment of the present invention.
Can be performed in the same manner as in the case of the position adjustment. Embodiments of the present invention will now be described with reference to the drawings.
Examples (embodiments) will be described, but the present invention is not limited to the following embodiments.
However, the present invention is not limited to this. (Embodiment 1) FIG. 1 shows an energy filter supporting apparatus according to the present invention.
Example 1 is mounted on a transmission electron microscope (charged particle beam device).
FIG. 1A is a partial cross-sectional plan view of a main part in a worn state.
FIG. 1B is a diagram viewed from the line IB-IB in FIG. 1A.
You. FIG. 2 is a view from the line II-II in FIG. 1A. The energy filter supporting device of the first embodiment
S is the same transmission as the transmission electron microscope 1 shown in FIG.
Mounted on a scanning electron microscope 1. Also, this embodiment
Energy supported by the first energy filter supporting device S
The filter F is the energy filter F described with reference to FIG.
On the left and right sides of the energy filter F having the same configuration as
Attach the supported members 50, 50 attached to the rear end face (outer end face).
The outer end contact member 51 and the front end face (inner end face)
It has an inner end contact member 52 attached thereto. That is,
The energy filter F of the first embodiment has been described with reference to FIG.
Electron beam (charged particle)
(Ra) Ra (see FIG. 8)
) Is formed on the upper surface on which the laser beam is formed and the beam entrance Ra.
The beam exit Rb (see Fig. 8) of the emitted electron beam is shaped
The lower surface thus formed and the light incident from the beam entrance Ra.
Electrons whose energy is within a predetermined range
And a beam selection passage R for emitting light from the outlet Rb.
You. In FIG. 1, the left and right supported members 5
0.50 is a self-lubricating metal (molybdenum disulfide or
Molybdenum disulfide or the like with graphite embedded or sintered metal
Which contains graphite), and the lower surface of the
Supported surface 5 having a small coefficient of friction by rubbing molybdenum fluoride
0a and 50a are formed. The supported surfaces 50a, 5
0a is almost the same as the position of the center of gravity of the energy filter F.
The left and right supported surfaces 50 are disposed at the height position.
The line connecting a and 50a is the center of gravity of the energy filter F
Are arranged so as to pass in the vicinity of. In addition, the outer end cover
The contact member 51 and the inner end contact member 52 are
It is arranged at a position almost the same height as the center of gravity of the gear filter F.
The outer end contacted member 51 and the inner end contacted portion.
The line connecting the members 52 is the position of the center of gravity of the energy filter F.
It is arranged to pass near. In addition, the outer end
A V-shaped groove 51 formed in a vertical direction on the rear surface of the contact member 51.
a is formed. 1 and 2, a transmission electron microscope 1
Of the charged particle beam along the Z axis extending vertically
A passage having a lens barrel 2 formed therein;
The filter support case C is detachably attached to the side of 2
Have been. The filter supporting case C is
The front end frame member 53 constituted by
The welded square tube member 54 is welded to the square tube member 54.
Rear end frame member 55 formed of a frame-shaped plate
And an outer end wall 56 for closing the rear end frame member 55.
You. The rectangular tube member 54 includes a left side wall 54a, a right side wall 54b,
The cross-section having the end wall 54c and the lower end wall 54d has a rectangular cylindrical shape.
It is a member. Inside of the left side wall 54a and the right side wall 54b
The supported members 50, 50 of the energy filter F
Filter support members 57, 57 for supporting
You. The upper surfaces of the filter supporting members 57, 57
Support surface 5 having a small coefficient of friction for supporting holding surfaces 50a, 50a
7a and 57a. Therefore,
The energy filter F is formed of the filter supporting members 57, 57.
It can slide smoothly on the support surfaces 57a, 57a.
You. The outer end wall 56 has an adjusting device mounting hole 56a.
Is formed. A ring is provided in the adjustment device mounting hole 56a.
Material 61 is mounted. Outer end wall 56 and ring member
An O-ring 62 for sealing is disposed between the O-ring 62 and the O-ring 61.
You. A cylinder support plate is provided on the outer surface of the ring member 61.
The ring member 61 and the shell are welded.
The welded portion of the Linda support plate 63 is configured to be airtight.
You. The cylinder support plate 63 has a cylinder through hole.
63a are formed. The cylinder support plate 6
A cylinder 64 is connected to 3 by a screw. Previous
The cylinder 64 has a slide pin receiving hole 64a at the front.
The screw hole 64b is formed in the rear part. An outer end is provided in the slide pin receiving hole 64a.
Positioning pin (outer end surface contact member) 66 slides back and forth
Housed as possible. The outer end positioning pins 66
The moving plate 67 is welded, and the weld is airtight.
Is configured. The moving plate 67 and the syringe
A bellows 68 is connected between the support plate 63 and the bellows 68.
And their connections are airtight. Said
The inside of the bellows 68 communicates with the outside atmosphere,
The moving plate 67 is pressed forward by the atmosphere.
It is to be noted that reference numerals 61 to 64 and 67 to 68 indicate the above.
The elastic force generating device D is constituted by the constituent elements. Previous
A rear end adjusting screw 69 is provided in the screw hole 64b of the cylinder 64.
And the inner end thereof is the rear end face of the outer end positioning pin 66.
Is in contact with At the outer end of the rear end adjusting screw 69,
As shown in FIG.
Driver engaged from outside with no driver engagement groove (Figure
(Not shown) to rotate the rear end adjustment screw 69 to move it back and forth.
It is configured to be adjustable. Before the front end of the rear end adjusting screw 69 abuts
The contact portion 66a at the inner end of the outer end positioning pin 66 is
In the vertical direction of the outer end contact member 51 of the energy filter F
Sliding movement in the vertical direction relative to the extending V-shaped groove 51a
Possible and relatively non-slidable in the left and right directions
I do. By the elements indicated by the reference numerals 61 to 69,
The energy filter is supported by a filter support case C.
Outer end positioning pins that contact the outer end face of
Contact member) 66 and the outer end position of the energy filter F
Outer end position adjusting devices (61-69) for adjusting
ing. In FIG. 1A, the lens barrel 2 has a front side surface.
Is provided with an inner end surface positioning pin support member 71.
You. On the inner end side of the inner end face positioning pin support member 71,
A pin receiving hole 71a is formed, and a screw hole is formed on the outer end side.
71b are formed. The pin receiving hole 71a has an inner end
The positioning pin 73 is slidably housed. Previous
An inner end adjusting screw 74 is screwed into the screw hole 71b, and
The end is in contact with the front end face of the inner end positioning pin 73.
You. A screwdriver is provided at the outer end (front end) of the inner end adjusting screw 74.
An engagement groove (not shown) is formed,
A driver (not shown) engaged externally with the driver engagement groove
) To rotate the inner end adjustment screw 74 to adjust the position back and forth.
It is configured so that it can be knotted. Before the tip of the inner end adjusting screw 74 abuts
The contact portion 73a of the inner end of the inner end positioning pin 73 is
The energy filter F is in contact with the inner end contact member 52.
You. The elements indicated by the reference numerals 71 to 74 are used to
The energy filter is supported by a filter support case C.
Inner end locating pin that contacts the inner end face of
Member) 73 and the inner end position of the energy filter F
An inner end position adjusting device (71-74) for adjusting is configured
I have. In FIG. 1A, the lens barrel 2 has a left side surface.
The inner end surface positioning pin support member 71 of the front side surface,
Similar to the end positioning pin 73 and the inner end adjusting screw 74,
Left end surface positioning pin support member 76 formed, left side position
A fixing pin 78 and a left side adjustment screw 79 are provided.
I have. 1A, the lens barrel 2 has a right side surface.
The left side positioning pin support member 76, the left side position
Same configuration as fixing pin 78 and left side adjustment screw 79
Right side positioning pin support member 81, right side positioning
Female pin 83 and a right side position adjusting screw 84 are provided.
ing. Then, the elements indicated by the reference numerals 76 to 84
The left and right position adjusting device (8) of the energy filter F
1 to 84). (Operation of Embodiment 1) In FIGS.
The energy filter F extends along the Z axis extending in the vertical direction.
Lens barrel 2 in which the path of the charged particle beam along is formed
Is located within. The filter supporting case C has the energy
The side of the lens barrel 2 with the filter F supported inside
It is removable on the surface. The filter attached to the lens barrel 2
Before being placed inside the ruta support case C and inside the lens barrel 2
The energy filter F is provided in the filter supporting case C.
Provided on the inner side surfaces of the left side wall 54a and the right side wall 54b.
Supported by the pair of filter support members 57, 57
ing. The filter support members 57, 57 and the energy
To replace the filter F, replace the filter support case C with the mirror.
By attaching to and detaching from the cylinder 2, it can be easily performed.
Wear. The energy filter F has a horizontal surface.
In the plane perpendicular to the incident direction of the charged particle beam
The position can be adjusted with. That is, the subordinates shown in FIGS.
The energy filter as in the conventional energy filter support device.
When adjusting the position of the filter F, the energy filter F
It does not move in the vertical direction (vertical direction). Outer end positioning pin by elastic force generator D
Reference numeral 66 denotes an outer end face of the energy filter F in a vertical direction.
Relatively slidable and relatively slidable left and right
Abut the impossible. Can slide relatively in the vertical direction
, The vertical position of the outer end positioning pin 66
The position must be precisely located with respect to the energy filter F.
No need. In addition, the elastic force generator D allows the outer end
The position where the surface contact member 66 contacts the energy filter F
The energy filter F is rotated in the left and right directions with respect to a fulcrum.
And right and left of the beam entrance Ra of the energy filter F
The position of the direction can be adjusted. Inside the lens barrel 2 and filter support case C
The position of the beam entrance Ra of the energy filter F is
When it is displaced in the X-axis direction from the path of the charged particle beam
Is an outer end position supported by the filter support case C.
Knot device (61-69) or the inside supported by the lens barrel 2
By operating the end position adjusting devices (71 to 74),
Outer end positioning pins (outside
(End face contact member) 66 or inner end position contacting the inner end face
An energy pin is provided by a female pin (inner end surface contact member) 73.
Adjust the position of the filter F in the X-axis direction. The lens barrel 2
And the energy filter F in the filter support case C
Is the position of the beam entrance Ra the path of the charged particle beam?
From the left and right (Y-axis direction).
Adjustment of the left and right position adjustment devices (76 to 84) supported by the cylinder 2.
By rotating the joint screws 79 and 84 respectively, the energy
Each contacting the left and right sides of the filter F
Move the positioning pins 78 and 83 in the left and right direction to
The position of the energy filter F in the left-right direction is adjusted. The right and left positions of the energy filter F are adjusted.
When setting, in front of the outer end position adjusting device (61-69)
Moving plate 67 and cylinder support plate 6
3 and a bellows 68 connecting between the two members.
Since atmospheric pressure is introduced into the space formed,
The moving plate 67 is pressed forward (X direction).
You. For this reason, the above-mentioned welded to the moving plate 67
The contact portion 66a of the outer end positioning pin 66 is always forward (X direction).
Of the guide member 51 on the rear end face of the energy filter F
Abuts the V-shaped groove 51a relatively immovably in the left-right direction
You. Therefore, the beam incident on the energy filter F
When adjusting the position of the mouth Ra in the left-right direction, the outer end positioning pin
The contact between the contact portion 66a of the pin 66 and the V-shaped groove 51a is supported.
Rotate the energy filter F to adjust the position
be able to. The position of the energy filter F was adjusted.
Later, when the charged particle beam is irradiated from the electron gun 3,
The energy filter F is connected to the charged particle beam selection path R
A charge whose energy in the charged particles passing through
Electric particles are emitted from the beam emission port Rb. (Embodiment 2) FIG. 3 shows an energy filter according to the present invention.
Example 2 of the filter support device is a transmission electron microscope (charged particle
3A is an explanatory view of a main part in a state of being attached to a wire device), and FIG.
3B is a sectional view taken along the line IIIB-IIIB in FIG. 3A.
FIG. FIG. 4 is a view taken from the line IV-IV in FIG. 3A.
FIG. Embodiment 2 Energy Filter Supporting Apparatus of Embodiment 2
S is the energy of the first embodiment except for the configuration described below.
It is configured similarly to the filter support device S. FIG. 3B,
In FIG. 4, provided on the left and right side surfaces of the energy filter F.
The supported members 50, 50 are fixed to the lower part with screws.
Sliders 50b, 50b. The sly
The lower surface of the die 50b is made of molybdenum disulfide
A supported surface 50a having a friction coefficient is formed. The left side wall 54 of the filter supporting case C
a, a filter support member fixed to the inner surface of the right side wall 54b
57, 57 are sliders 5 fixed on the upper surface with screws.
7b and 57b. On the upper surface of the slider 57b
Is a low friction coefficient support surface rubbed with molybdenum disulfide
57a are formed. Therefore, the energy
The filter F is provided on the support surface 5 of the filter support members 57, 57.
It is possible to smoothly slide on 7a and 57a. Said
The supported member 50 and the filter supporting member 57 are
A slurry having supported surfaces 50a and 57a having a low coefficient of friction.
Parts other than the idas 50b and 57b are independent of the friction coefficient.
Any material can be used for the clerk. In addition,
The riders 50b and 57b are interchangeable. In the second embodiment,
Other operations are the same as those in the first embodiment. (Modification) The embodiment of the present invention has been described in detail.
However, the present invention is not limited to the above embodiment.
Within the scope of the present invention described in the claims.
Thus, various changes can be made. Modification of the present invention
Examples will be described below. (H01) The outer end position adjusting device (61 to 6) of each of the above embodiments.
9) is that the inside of the bellows 68 communicates with the outside atmosphere,
The moving plate 67 is moved forward by the atmosphere (inside the lens barrel 2).
Outer end welded to the moving plate 67 by pressing
The case where the positioning pin 66 is pressed forward is illustrated.
However, the outer end positioning pin 66 is moved forward by the aforementioned atmosphere.
The outer end position adjusting device (61 to 6).
Other position adjusting devices other than 9) can be adopted. Ma
The inside of the bellows 68 is isolated from the atmosphere to
By adjusting the internal pressure, the outer end positioning pin can be adjusted.
Can be configured to automatically adjust the position of the
It is. (H02) The elastic force generating device D is
Leaf spring, compression coil spring, elastic rubber
And other elastic members can be used. (H03) The supported surface 50a and the supporting surface 57a are
Instead of contacting the roller with a roller, ball, etc.
It is possible to adopt a configuration of re-contact. (H04) In each of the above embodiments, the energy filter F
The fixed supported members 50, 50
Integrated with the members forming the left and right side surfaces of the
Alternatively, they can be configured separately. (H05) Close the bellows 68 and reduce the pressure of the compressed air.
By changing the axis of any energy filter
Can be used for mechanisms. With any of the above energy filters
Is pneumatic even for large energy filters (heavy)
By raising the shaft 66
It is possible to give. Heavy and light energy filter
No matter what the air pressure changes,
Apply pressure to the V-shaped groove 51a to create a fulcrum for the moving mechanism.
It becomes possible. The energy filter supporting device of the present invention described above.
The arrangement has the following effects. (E01) An energy beam arranged in the path of the charged particle beam
The filter in a plane perpendicular to the direction of incidence of the charged particle beam.
Can be adjusted. (E02) Galling or dust when adjusting the position of the energy filter
Can be prevented from occurring. (E03) The energy filter can be easily replaced
You.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view of a main part in a state where an embodiment 1 of an energy filter supporting device of the present invention is mounted on a transmission electron microscope (charged particle beam device). Is a partial cross-sectional plan view,
FIG. 1B is a diagram viewed from the line IB-IB in FIG. 1A. FIG. 2 is a diagram viewed from the line II-II in FIG. 1A. FIG. 3 is an explanatory view of a main part of a state in which an energy filter supporting apparatus according to a second embodiment of the present invention is mounted on a transmission electron microscope (charged particle beam apparatus). FIG.
FIG. 3B is a diagram viewed from the line IIIB-IIIB in FIG. 3A. FIG. 4 is a diagram viewed from the line IV-IV in FIG. 3A. FIG. 5 is an explanatory view of an electron microscope in which a conventional energy filter supporting device is incorporated. 6 is an explanatory view of a conventional energy filter supporting device incorporated in the electron microscope of FIG. 1, FIG. 6A is a plan view taken along the line VIA-VIA of FIG. 5, and FIG. It is the figure seen from VIB-VIB line of 6A. FIG. 7 is a sectional view taken along the line VII-VII of FIG. 6A. FIG. 8 is a perspective view of a plate constituting the energy filter. FIG. 9 is an explanatory view of another conventional energy filter supporting apparatus, FIG. 9A is a view seen from above in a state where another conventional energy filter supporting apparatus is incorporated in an electron microscope, and FIG. It is the figure seen from the IXB-IXB line of FIG. 9A. [Description of References] C: Filter support case, D: Elastic force generator, F: Energy filter, R: Charged particle beam selection passage, Ra:
Beam entrance, Rb ... Beam exit, 2 ... Barrel, 50a,
50a: Supported surface, 54a: Left side wall, 54b: Right side wall 56: Outer end wall, 57, 57: Filter support member, 57
a, 57a: Support surface, 61-69: Outer end position adjusting device, 6
6 ... outer end surface contact member, 71-74 ... inner end position adjusting device,
73: inner end surface contact member, 76 to 79, 81 to 84: left and right position adjusting device, 78, 83 ... contact member

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01J 49/44-49/48 H01J 37/05

Claims (1)

(57) [Claim 1] An energy filter supporting device (A01) having the following requirements: a lens barrel in which a path of a charged particle beam is formed along a Z-axis extending vertically. (A02) It is detachably mounted on the side surface of the lens barrel, swells in the X-axis direction extending in the front-rear direction that is horizontal and perpendicular to the Z-axis, and has an outer end wall at the outer end in the X-axis direction. A filter support case having a left side wall and a right side wall provided at intervals in a Y-axis direction extending in the left-right direction perpendicular to the X-axis; (A03) charged particles disposed inside the lens barrel and the filter support case; An upper surface on which a beam entrance through which a beam is incident is formed; a lower surface on which a beam exit of a charged particle beam incident from the beam entrance is formed; and energy in the charged particles incident from the beam entrance is predetermined. Charge in range (A04) supported surfaces provided on the left and right sides near the center of gravity of the energy filter, and (A05) the filter support. A pair of filter support members provided on inner side surfaces of the left side wall and the right side wall of the case and supporting the supported surface, and supporting the energy filter slidably in a horizontal plane; (A06) An outer end position adjusting device supported by the filter support case and having an outer end surface abutting member that abuts on an outer end surface of the energy filter, for adjusting an outer end position of the energy filter; (A07) supported by the lens barrel An inner end position adjusting device that has an inner end surface contact member that abuts on an inner end surface of the energy filter and adjusts an inner end position of the energy filter; A08) A left / right position adjusting device which is supported by the lens barrel so as to be adjustable in position and has contact members which respectively contact the left side surface and the right side surface of the energy filter, and adjust the left and right positions of the energy filter.