JP3513336B2 - Ink jet head and method of manufacturing the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inkjet head used for a recording apparatus and the like and a method for manufacturing the same.

[0002]

2. Description of the Related Art As one configuration of an ink jet head, the configuration disclosed in Japanese Patent Application No. 04-250048 can be considered. FIG. 1 is a diagram illustrating a configuration of a conventionally known inkjet head. The ink jet head of FIG. 1 is a thermal ink jet head that generates thermal energy in response to a recording signal and generates bubbles to eject ink. The substrate 1 on the support is provided with a heater which is an energy generating means for forming droplets. The top plate 2 (FIG. 2, FIG. 3), which is a component of FIG. 1, is provided on the joint surface 9 and is connected to the substrate 1 (hereinafter, top plate joint) to form a nozzle 3 that communicates with each groove. An orifice 4 for discharging droplets, a groove 5 communicating with a plurality of grooves to form a liquid chamber after joining, and an orifice plate 6 having a plurality of orifices are integrally provided. The top plate having these functional portions can be integrally formed of liquid crystal polymer, polysulfone, or the like. For example, it is possible to use a step of integrally forming the outer shape portion and the groove portion of the top plate, processing the orifice passage with an excimer laser, and opening the orifice. In addition, in order to perform good top plate joining, JP-A-04-2
It is also conceivable to provide a rib-shaped convex member (hereinafter referred to as a rib member) described in 50048, 04-247946, at least a part of which can be deformed by joining.

Joining surface 9 between the orifice plate 6 and the top plate
Is 9 on the space side on the top plate with an integrated orifice plate.
They are mutually joined so as to have a crossing angle α of about 0 to 92 °. Further, reinforcing ribs 11 are provided to supplement the strength of the orifice plate 6. There is no functional problem even if the reinforcing ribs are not provided. The top plate 2 and the substrate 1 are joined so that the relative positions of the orifice and the heater have a predetermined relationship. By joining, a nozzle, a liquid chamber in which a plurality of nozzles communicate with each other, and the like are formed. In FIG. 1, the top plate 2 and the substrate 1 which are in a predetermined positional relationship are pressed against each other by the pressing spring 8. The presser spring 8 has an M shape, and presses a portion of the top plate corresponding to the liquid chamber at the center of the M-shape and presses a portion of the top plate 2 corresponding to the nozzle by line contact. Further, in order to prevent ink leakage from the joint between the two, a silicon-based sealant may be applied around the joint. Crossing angle α
Provides the gap between the orifice plate and the substrate into which the sealant should enter in the sealing step after joining the top plate in a preferable range.

When the outer shape of the top plate is formed by injection molding or the like and the orifices, grooves, rib members, etc. are provided by processing in a later process, it is important to detect the processing position on the top plate. Grooves for forming nozzles and ribs are processed in the most severe places at several u
It must be accurately detected with a tolerance of m or less. Regarding the accuracy, the accuracy in the Y direction is particularly important. For example, when post-processing the groove with a laser or dicing saw, Y
Depending on the position detection accuracy in the direction, the distance Le from the tip of the groove on the orifice plate side to the orifice varies from work to work. As a result, the nozzle flow resistance from the heater to the orifice varies, and the droplet volume may differ for each inkjet head. Therefore, as the position reference in the Y direction, it is desirable to use the portion located in the vicinity of the orifice in order not to reduce the processing accuracy.
Specifically, in the top plate configured as shown in FIGS. 2 and 3, the intersection line G formed at the corner 10 of the orifice plate 6 and the joint surface 9
Is preferably used. As an example, FIGS. 4 and 5 show a specific procedure for post-processing a groove by an excimer laser.

A work (top plate) is adsorbed and fixed on a movable stage, and a shape near a corner 10 formed by an intersection of an orifice plate and a joint surface is captured by a CCD camera. With respect to the image observed as shown in FIG. 5, the intersection line G is recognized by image processing, and the processing start point of the groove located at the predetermined distance Le from the intersection line G is calculated with this position as a reference. After adjusting the position of the work or the laser shading mask based on the data and retracting the observation system, excimer laser irradiation is performed. In these procedures, since the intersecting line G is used as the reference in the Y direction, the intersecting line G can be easily recognized from the appearance, and more preferably, the fillet shape is completely sharp as shown in FIG. 5B. It is necessary.

[0006]

However, depending on the material of the top plate and the manufacturing process, it is difficult to form the edge of the intersection line G. For example, when the top plate of FIG. 2 is manufactured by injection molding of resin, the mold with respect to the corners has a shape close to a right angle, so that the mold pieces are easily damaged during processing, and the radius is 5 to 10 μm over almost the entire corner. Due to the fillet shape, it may be difficult to accurately recognize the intersection line G. For example, with respect to the preferable state of FIG. 5B, it is difficult to accurately detect the ridge G in the posture of FIG. 5A in the corner shape of FIG. 5C. In order to obtain a more accurate corner shape, special processing is required on the mold or the top plate, which causes an increase in the cost of the inkjet head. In addition, it is disadvantageous in terms of wear resistance of the mold that the mold has a shape close to a right angle with respect to the corners. On the other hand, if the crossing angle α between the orifice plate and the joining surface is made larger, defects in the corners 10 due to processing are reduced, and the crossing line G can be easily recognized. There is a risk that the orifice plate will break when the ink jet head is used, since the gap generated in the area becomes large.

Therefore, the present invention solves the problems in the above-mentioned conventional ones, and does not depend on the accuracy of the edge shape of the corners at the time of manufacturing the top plate, and does not affect the subsequent steps such as the top plate joining. It is an object of the present invention to provide an inkjet head having a good image quality by detecting an accurate reference position for processing a groove, a rib member, etc., and a manufacturing method thereof.

[0008]

In order to solve the above problems, an ink jet head of the present invention has a first member having a plurality of energy generating means for ejecting ink and a second member joined to the first member. A plurality of grooves for forming nozzles corresponding to the location of the energy generating means by joining the second member with the first member, and an orifice for ejecting ink corresponding to the grooves. An ink jet head having an orifice plate member having the orifice opened, a line connecting a point on the rear surface of the orifice plate, which is a surface of the orifice plate member on the second member side, and a point on the joint surface. It is characterized in that at least one convex member having a minute portion as at least one of the ridge lines is provided at the intersection of the back surface of the orifice plate and the joint surface. In the inkjet head of the present invention, the convex member has two line segments connecting a point on the rear surface of the orifice plate and a point on the bonding surface, and the line segment corresponding to the two line segments. Two line segments on the joining surface, a line segment formed by the intersection line of the orifice plate back surface and the joining surface, a horizontal line segment parallel to the intersection line, and a vertical line segment parallel to the intersection line. You may form in the pentahedron which has a ridgeline. At that time, a part of the convex member is arranged so as to substantially abut with one end face in the arrangement direction of the energy generating means of the first member, and the first member and the second member are joined together. You may. Further, in the inkjet head of the present invention, the convex member,
A line segment connecting a point on the rear surface of the orifice plate and a point on the joint surface, a line segment formed by an intersection line of the rear surface of the orifice plate and the joint surface, a point on the intersection line and a point on the rear surface of the orifice plate A line segment that connects one point on the intersection line and a point on the intersection line at a target position and a point on the back surface of the orifice plate, a line segment that connects one point on the intersection line and a point on the joint surface, It may be formed on a tetrahedral convex member having a ridge line with a line segment connecting a point on the intersection line at a target position and a point on the joint surface. Then, it may be provided integrally with a reinforcing member of the orifice plate formed at the intersection of the rear surface of the orifice plate and the joint surface. Further, the method for manufacturing an inkjet head of the present invention comprises a first member having a plurality of energy generating means for ejecting ink, and a second member joined to the first member, wherein the second member is the first member. A plurality of grooves forming nozzles corresponding to the positions where the energy generating means is disposed by joining with one member, an orifice for ejecting ink corresponding to the grooves, and an orifice plate member having the orifices opened. In the method of manufacturing an inkjet head configured to form, a line segment connecting a point on the back surface of the orifice plate and a point on the bonding surface, or a line segment parallel to a crossing line between the back surface of the orifice plate and the bonding surface, A convex member having at least one of the ridge lines is provided at the intersection of the rear surface of the orifice plate and the joint surface, and a groove to be a nozzle is formed in the second member. The position of the ridge upon which formed was measured, based on the imaginary line connecting the virtual point or more of the virtual point is calculated from the position of 該稜 line, it is characterized by determining a processing position of said groove. Also in the method for manufacturing an inkjet head of the present invention, the first member and the second member are joined together, one end face of the first member in the arrangement direction of the energy generating means is partially attached to the convex member. The projection member may be provided integrally with the reinforcing member of the orifice plate formed at the intersection of the back surface of the orifice plate and the joint surface. May be.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION According to the present invention, since the ridge line of the convex member connecting the point on the back surface of the plate and the point on the joint surface is formed so as to directly connect the two points, the positioning on each surface is performed. It is also easy, and shape defects are less likely to occur near both ends of the ridgeline, and can be formed with high precision. Therefore, by detecting both end positions, the position where the ridgeline G should pass can be easily and precisely calculated from the spatial relationship of the positions, and even if the edge shape of the corner of the top plate is defective, The accurate reference position of can be known. Further, according to the present invention, the reference position in the Y direction for post-processing of the top plate such as groove processing can be accurately calculated regardless of defects such as the edge shape of the corner, which is preferable around the corner. Position accuracy processing can be performed. In the present invention, the ridge line of the convex member that connects the point on the back surface of the plate and the point on the joint surface is 95 ° on both sides of the space in order to facilitate detection of both ends of the ridge line.
It is preferable to determine the shape of the convex member and the intersection angle between the orifice plate and the joint surface so as to have the above intersection angle.

[0010]

EXAMPLES Examples of the present invention will be described below.
It should be noted that the present invention is not limited to the following examples and other specific shapes as long as they are in accordance with the idea of the present invention. It is clear that the top plate according to the present invention does not have to be limited to injection molding as a means for forming the shape before the post-processing. Needless to say, the present invention can be applied even when a defect occurs near the ridge G due to cutting. [Embodiment 1] In this embodiment, as shown in FIGS.
The virtual line of is one side, and the point F on the back of the plate
Is characterized by having a line segment K connecting a point E on the joining surface and a pentahedral convex member 12 having a line segment H as one side.
When the convex member 12 is viewed from the Z direction in the observation system of FIG.
Get an image of. The convex member 12 is provided outside the region for processing and arranging the structure, and has a ridge line I on the back surface of the plate at a position Lz = 100 um in the Z direction from the corner and Ly = in the Y direction from the corner.
Ridge line J and ridge line K on the joint surface at a position of 200 um,
It has H around the P plane. The dimensions Lz and Ly are appropriate values determined in advance when designing the top plate. FIG. 8 is a C-C cross section.

In this embodiment, a groove is formed on the reference surface by post-processing. The procedure of the processing method will be described with reference to FIGS.
First, with respect to the state of FIG. 11A, from the image of FIG.
It is easy to calculate the position of the ridge line G that becomes zero. That is, when the image of the ridge line J is recognized, the ridge line G is a position Ly from the position of the ridge line J in the Y minus direction. When the virtual position of the ridge G is calculated, the tip position of the groove in the Y direction is known as the distance Le from the virtual position. Similarly, the ridgeline K or H of the convex member 12 may be used as a reference for the position of the groove in the X direction. After adjusting the work position by moving the stage of the top plate, the joining surface is irradiated with an excimer laser to complete the groove processing (FIG. 11B).

The point that the above method of detecting a reference position for post-processing using a part of the convex member 12 is superior to the conventional method is that the ridge line of the convex member to be image-recognized is detected. It is easy. That is, as in the present embodiment, in the configuration in which the rear surface of the orifice plate and the joint surface have the intersecting angle α that is substantially a right angle or an obtuse angle, assuming the mold for the top plate, the joint surface is the P surface of the convex member 12. The angle at the ridge line J formed by the surface and the angle at the ridge line I formed by the P surface and the plate back surface are both obtuse angles sufficiently larger than 90 °. Therefore, it is much easier to process the shape as compared with a corner portion having an angle close to 90 °. Further, when injection molding is used, the ridge lines I and J are more advantageous than the ridge line G against the abrasion of the resin. Therefore, the ridgeline around the P surface can be transferred or formed on the top plate more accurately than the ridgeline G. Furthermore, the parameters Ly, Lz, and α used for calculating the position of the ridgeline G after image recognition can all be created only during processing of the mold depending on the accuracy of the processing machine, and control during processing is also possible. It's easy.

When image processing is performed by one camera as shown in FIG. 4, it is sufficient to incline the workpiece so that the ridgelines I and J can be seen at the same time when the image is captured. At this time,
From the viewpoint of detection of the standard of post-processing and reliability of top plate joining, α is preferably 91 to 95 °. Further, the angles β and γ of the convex member 12 of the top plate in FIG. 8 are determined by the values of Ly and Lz, but both are 80 ° in consideration of the ease of processing the die.
The following is preferable, and 60 ° or less is more preferable. In the practical processing procedure, the convex member 12, the joint surface 9, the ridge G
Are preferably controlled within the same visual field from the Z direction by a microscope or the like. For that purpose, considering the depth of focus of the optical system, Lz is preferably 300 μm or less, more preferably 100 μm or less.

For calculating the ridge line G, a line segment that is not parallel to the ridge line G may be used. For example, when the ridge line K is image-recognized, the line segment EF is a position at which it is divided into Ly: Lz / cos (α-90). Alternatively, the convex member 12 may be provided at both ends of the surface to be grooved, and the virtual line of the ridge line G may be weighted and calculated from the measurement result of the shape of each member. After grooving, the convex member 12
Is unnecessary. Therefore, the convex member 12 may be removed as shown in FIG. 11C by an excimer laser or other mechanical means. Further, in this case, although the convex member 12 is outside the range of the groove processing in this embodiment, it may be provided within the range of the groove processing.
Moreover, the convex member 12 having one side of the ridgeline H in the direction in which the groove is processed
It is also conceivable to use the first surface and the Q surface as the reference surfaces for the top plate and the top plate to stick together. FIG. 10 shows a state of the substrate and the top plate when the top plate is joined by the butting of the orifice plate 6 viewed from the side of the orifice 4. Further, a form as shown in FIG. 14 is also conceivable.

[Embodiment 2] FIG. 12 shows a virtual line of the ridge line G,
And a tetrahedral convex member having a line segment K'connecting a point F'on the back surface of the plate and a point E'on the joining surface as a ridge line.

In this embodiment, the position of the virtual line of the ridge line G is known as a line that divides the projection line of the line segment E'F 'onto the XY plane by dividing the image by recognizing the ridge line K'. be able to. Ly 'and Lz' are 5 for high precision detection.
0-300um is suitable.

In the structure of this embodiment, since the structure is simpler than that of the embodiment shown in FIG. 6, it is possible to reduce the size of the convex member itself, and it is relatively easy to remove the grooves and rib members after the post-processing is completed. Is. Further, when the groove is processed, it may be provided within the range of the processing.

[Embodiment 3] In FIG. 13, a convex member which is a detecting means for knowing the position of the virtual line of the ridge line G which is a reference for post-processing has a tetrahedral structure and is integrally provided with the reinforcing rib 11. Here is an example. Since the structure of this embodiment is obtained by removing the vertices of the three surfaces on the mold, it is very easy to process the mold for forming the convex member.

[0019]

As described above, in the ink jet head of the present invention, by forming the convex member having the ridge line which can be easily detected by the appearance of both end positions, the Y direction of the top plate which is particularly important for the ink ejection performance is An accurate reference position for processing can be known, and an inkjet head with good image quality can be obtained based on this reference position. Further, since it is not necessary to perform a special process for ensuring the accuracy of the corners of the top plate for obtaining the accuracy of post-processing such as grooves, it is possible to reduce the manufacturing cost of the inkjet head.
Further, according to the method of manufacturing an inkjet head of the present invention, it is possible to stably manufacture an inkjet head having no drop volume variation even when the shape accuracy of the corners of the top plate changes due to wear of the mold. .

[Brief description of drawings]

FIG. 1 is a view showing a conventionally known inkjet head.

FIG. 2 is a diagram showing an outline of a top plate.

FIG. 3 is a diagram showing an AA cross section in the vicinity of a corner of an inkjet head.

FIG. 4 is a view showing an observation and processing system for post-processing the top plate.

FIG. 5 is a diagram illustrating a state near a corner of a top plate.

FIG. 6 is a diagram illustrating an example of the present invention.

FIG. 7 is a diagram illustrating an example of the present invention.

FIG. 8 is a diagram illustrating an example of the present invention.

FIG. 9 is a diagram illustrating an example of the present invention.

FIG. 10 is a diagram illustrating an example of the present invention.

FIG. 11 is a diagram illustrating an example of the present invention.

FIG. 12 is a diagram illustrating another embodiment of the present invention.

FIG. 13 is a diagram illustrating another embodiment of the present invention.

FIG. 14 is a diagram illustrating another embodiment of the present invention.

[Explanation of symbols]

1: substrate 2: Top plate 3: Groove 4: Orifice 5: Horikomi 6: Orifice plate 7: heater 8: Presser spring 9: Joining surface of the top plate 10: Corner 11: Reinforcing rib 12: convex member

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B41J 2/16 B41J 2/05

Claims (8)

(57) [Claims] 1. A first member having a plurality of energy generating means for ejecting ink, and a second member joined to the first member.
A plurality of grooves for forming nozzles corresponding to the location of the energy generating means by joining the second member with the first member, and an orifice for ejecting ink corresponding to the grooves. And an orifice plate member having the orifice opened, and connecting a point on the rear surface of the orifice plate, which is a surface of the orifice plate member on the second member side, and a point on the joint surface. An ink jet head having at least one convex member having a line segment as at least one of ridge lines at a crossing portion between the back surface of the orifice plate and the bonding surface. 2. The convex member has two line segments connecting a point on the rear surface of the orifice plate and a point on the joint surface, and two on the joint surface corresponding to the two line segments.
The ridge has two line segments, a line segment formed by the intersecting line of the back surface of the orifice plate and the joining surface, a horizontal line segment parallel to the intersecting line, and a vertical line segment parallel to the intersecting line. The inkjet head according to claim 1, wherein the inkjet head is a pentahedral convex member. 3. A portion of the convex member is the first convex member.
The inkjet head according to claim 2, wherein the member is arranged so as to substantially protrude from one end face in the arrangement direction of the energy generating means of the member, and joins the first member and the second member. 4. The convex member includes a line segment connecting a point on the rear surface of the orifice plate and a point on the joint surface, a line segment formed by an intersecting line of the rear surface of the orifice plate and the joint surface, and on the intersecting line. A line segment connecting a point on the back surface of the orifice plate with a point on the back surface of the orifice plate, a line segment connecting a point on the back surface of the orifice plate with a point on the intersection line, and a point on the back surface of the orifice plate A line segment connecting points on the surface,
The inkjet head according to claim 1, wherein the inkjet head is a tetrahedron convex member having a ridgeline as a line segment that connects a point on the intersection line of the target position and a point on the joint surface. 5. The ink jet recording apparatus according to claim 4, wherein the convex member is provided integrally with a reinforcing member of the orifice plate formed at the intersection of the rear surface of the orifice plate and the joint surface. head. 6. A first member having a plurality of energy generating means for ejecting ink, and a second member joined to the first member.
A plurality of grooves for forming nozzles corresponding to the location of the energy generating means by joining the second member to the first member, and an orifice for ejecting ink corresponding to the grooves. And a line segment connecting a point on the back surface of the orifice plate and a point on the bonding surface, or the back surface of the orifice plate and the back surface of the orifice plate. A line segment parallel to the intersection line of the joint surface,
A convex member having at least one of the ridge lines is provided at the intersection of the rear surface of the orifice plate and the joint surface, and the position of the ridge line is measured when forming a groove to be a nozzle in the second member, The method for manufacturing an ink jet head, wherein the machining position of the groove is determined with reference to a virtual point calculated from the position or a virtual line connecting the plurality of virtual points. 7. The joining of the first member and the second member,
7. The method of manufacturing an ink jet head according to claim 6, wherein one end surface of the first member in the arrangement direction of the energy generating means is substantially pressed against a part of the convex member. . 8. The ink jet recording apparatus according to claim 6, wherein the convex member is provided integrally with a reinforcing member of the orifice plate formed at the intersection of the rear surface of the orifice plate and the joint surface. Head manufacturing method.