JP3492219B2 - Plunger pump device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plunger pump device for pumping pure water or the like, and is used, for example, for supplying ultrapure water for cleaning in a semiconductor manufacturing apparatus at high pressure.

[0002]

2. Description of the Related Art Conventionally, as a plunger pump for pumping pure water or the like, there is one disclosed in Japanese Patent Laid-Open No. 6-88568.

In this conventional plunger pump, as shown in FIG. 4, a cylinder chamber RP provided in a cylinder 81 is provided.
The plunger 82 moves in the axial direction in j to perform a pumping action. In order to perform a seal between the inner peripheral surface of the cylinder 81 and the outer peripheral surface of the plunger 82, the cylinder 8
The first seal member SAj1 and the second seal member SAj2 are provided on the inner peripheral surface of the first seal member SAj1.
And a second seal member SAj2 are provided with a discharge passage 83 for discharging the accumulated fluid to the outside.

The first seal member SAj1 prevents the pressurized fluid in the cylinder chamber RPj from leaking to the outside in the discharge process by the plunger 82. Second seal member S
Aj2 prevents minute wear powder generated from the first seal member SAj1 along with the movement of the plunger 82 from entering the cylinder chamber RPj.

[0005]

In the above-described conventional plunger pump, the fluid (pure water containing abrasion powder) accumulated between the first seal member SAj1 and the second seal member SAj2 is supplied to the plunger 82. In the discharging process by, the fluid (pure water) flowing over the second seal member SAj2 is pushed into the discharge flow path 83.

However, the first seal member SAj1 and the second seal member SAj1
Since there is no function of forcibly discharging the fluid that has accumulated between the seal member SAj2 and the sealing member SAj2, the fluid that has accumulated is not discharged at all during the suction process by the plunger 82. In addition, during the suction process, the second seal member S
Abrasion powder generated from Aj2 may enter the cylinder chamber RPj.

The present invention has been made in view of the above-mentioned problems. With a simple structure, a fluid containing abrasion powder generated from a seal member is naturally discharged, and the abrasion powder etc. is discharged into the cylinder chamber. It is an object of the present invention to provide a plunger pump device that prevents the intrusion of water.

[0008]

The device according to the invention of claim 1 is a plunger pump device 1 which performs a pumping action by a plunger 18 moving axially in a cylinder chamber RP provided in a cylinder 13. The inner peripheral surface SF1 of the cylinder 13 and the outer peripheral surface S of the plunger 18.
For performing sealing between the F2, a seal member SA1 provided on the inner peripheral surface SF1 of the cylinder 13, the cylinder chamber side of the seal member SA1, provided on the outer circumferential surface SF2 of the front Symbol plunger 18 And an annular drain groove 43 that communicates with the drain groove 43.
Discharge passage 3 for discharging the fluid that has entered inside to the outside
5 and directly open to the cylinder chamber 13
Suction flow path 34 for flowing into the cylinder chamber for supply
And, in the inhalation process by the plunger 18,
Flow into the cylinder chamber RP from the suction flow path 34.
Means for applying pressure to the fluid
In the discharge process by the injector 18,
Throttle and open the discharge flow path 35 in the suction step
A switching valve V2 for the purpose is provided .

[0009] In apparatus according to the invention of claim 2, wherein the de
On the cylinder chamber side of the groove 43, the plunge
A circumferential groove 44 is provided on the outer peripheral surface of the suction port 18,
The fluid is communicated from the circumferential groove 44 by communicating with the circumferential groove 44.
It is supplied by flowing into the Linda chamber.

[0010]

[0011]

In the device according to the third aspect of the present invention, the cylinder 13 is a part of a piston rod of a fluid pressure cylinder CY operated by a pressure fluid, and the plunger 1
8 is fixedly provided to the rod cover 14 of the fluid pressure cylinder CY.

Since the seal member SA1 and the drain groove 43 are provided in the piston rod 13 or the plunger 18, respectively, the volume of the space between them increases in the discharge process by the plunger, and the volume of the space decreases in the suction process. To do. Due to the pumping action by this, the fluid in the space is naturally discharged together with dust.

[0014]

1 is a front sectional view of a plunger pump device 1 according to the present invention, FIG. 2 is an enlarged view of a main part of the plunger pump device 1 shown in FIG. 1, and FIG. 3 is a plunger pump device. 1 is a fluid circuit diagram of a pump system CS1 configured to activate 1.

In FIG. 1, the plunger pump device 1
Is a cylinder tube 11, a piston 12, a piston rod 13, covers 14 and 15, a second tube 16, a second
The cover 17 and the plunger 18 are included.

The piston 12 slides on the inner peripheral surface of the cylinder tube 11 by the fluid pressure supplied from the ports P11 and P12. The piston rod 13 is the piston 12
It is connected with and moves integrally. Piston rod 13
Penetrates the cover 14 and projects into the second tube 16. The plunger 18 is fixed to the cover 14 coaxially with the piston rod 13 by being screwed into the second cover 17. Piston 12, covers 14 and 15, second tube 16, and second cover 17
A packing, a dust wiper, a wear ring, or the like is provided at an appropriate position.

The cylinder tube 11, the piston 12, the piston rod 13, and the covers 14 and 15 constitute a fluid pressure cylinder CY which operates with a pressure fluid such as air pressure.

Referring also to FIG. 2, the piston rod 13 has a hole 3 into which the fitting portion 32 of the plunger 18 is fitted.
1 is provided, and the inside of the hole 31 forms the cylinder chamber RP. The outer diameter of the fitting portion 32 is slightly smaller than the inner diameter of the cylinder chamber RP. That is, a gap is provided between the inner peripheral surface SF1 of the cylinder chamber RP and the outer peripheral surface SF2 of the fitting portion 32 so that they do not contact each other.

A packing groove is provided on the inner peripheral surface SF1 near the outlet of the hole 31 of the piston rod 13, and a packing SA1 is provided there. The packing SA1 is for performing a seal between the inner peripheral surface SF1 and the outer peripheral surface SF2 of the fitting portion 32, and particularly has a sealing effect against high pressure in the direction from the cylinder chamber RP side to the outside. It is something to demonstrate. A ring plate 41 and a retaining ring 42 for preventing the ring plate 41 from coming off are attached to the outside of the packing groove in which the packing SA1 is provided.

An annular peripheral groove 44 is provided on the outer peripheral surface SF2 at the tip of the plunger 18, and an annular drain groove 43 is provided on the outer side thereof. The circumferential groove 44 and the drain groove 43 are provided at axial positions such that they do not overlap the packing SA1 even at the suction process end of the plunger 18.

Further, the plunger 18 is provided with a discharge passage 33 penetrating in the axial direction at the center thereof, and in parallel with this, a suction passage 34 communicating with the circumferential groove 44 is provided. Further, in parallel with these, a discharge flow path 35 communicating with the drain groove 43 is provided. Ports P1, P2, P3 are provided at the portions open to the outside of the respective flow paths.

Further, the second tube 16 is provided with a port P4 for discharging the drain accumulated therein.

In the plunger pump device 1 thus constructed, the pressure fluid is supplied to the port P12 so that the piston 1
When 2 is driven to the left in FIG. 1, the piston rod 13 also moves accordingly, and the plunger 18 is fitted into the cylinder chamber RP. When the cylinder chamber RP is filled with a fluid such as pure water, the pure water is filled with the pure water.
It is pushed out to the discharge flow path 33 by 8 and discharged from the port P2.

In such a discharge process, the inner peripheral surface SF
The pure water accumulated between 1 and the outer peripheral surface SF2 is discharged from the drain groove 43 to the outside through the discharge flow path 35. Therefore, even if dust such as abrasion powder is generated from the packing SA1 or the like, the dust is discharged to the outside from the drain groove 43 through the discharge flow path 35 together with the flow of pure water.

Next, when the pressure fluid is supplied to the port P11 and the piston 12 is driven to the right in FIG. 1, the piston rod 13 also moves accordingly, and the plunger 18 fitted in the cylinder chamber RP moves. Move relative to the exit direction. At this time, the pure water supplied from the port P1 enters the circumferential groove 44 through the suction flow path 34, and flows from the circumferential groove 44 into the cylinder chamber RP.

In such a suction process, part of the pure water discharged from the peripheral groove 44 also flows into the drain groove 43 and is discharged to the outside through the discharge passage 35. Therefore, even if dust such as abrasion powder is generated from the packing SA1 or the like in the suction step, the dust is discharged from the drain groove 43 through the discharge flow path 35 to the outside together with the flow of pure water.

As described above, in both the discharging process and the suction process, the abrasion powder generated from the packing SA1 is
Along with the flow of pure water, it is forcibly discharged from the drain groove 43 to the outside through the discharge flow path 35.

In the suction process, by applying a pressure of about 1 kg / cm ² or more to the pure water supplied from the port P1, a pressure is generated from the cylinder chamber RP side to the space SP side. Pure water can be forced to flow into the space SP from the cylinder chamber RP side. As means for applying such pressure, various pumps for supplying pure water can be applied.

As shown in FIG. 3, ports P11, 1 provided in the fluid pressure cylinder CY of the plunger pump device 1 are shown.
2 is connected to the air pressure source A1 or the exhaust port A2 via a flow rate adjusting valve, an electromagnetic switching valve V1, a pressure adjusting valve RV1 and the like. The port P1 provided in the plunger 18 of the plunger pump device 1 is connected to the pure water supply device W1 via the check valve CK1 and the pipe line. Pure water supply device W
1 can be provided with various pumps for applying pressure to pure water. The port P2 is connected to the pure water discharge port W2 via the check valve CK2 and the conduit. Port P4
Is connected to the drain outlet D1 via a pipe.

An electromagnetic switching valve V2 and a throttle valve SV1 are connected to the port P3 at the outlet of the discharge passage 35.
In the discharge step, the electromagnetic switching valve V2 is turned off, and the pipe line is made into a throttle channel by the throttle valve, whereby the amount of pure water flowing out from the discharge channel 35 can be limited. In the suction process, the electromagnetic switching valve V2 is turned on so that the pure water in the space SP can be easily discharged.

The plunger pump device 1 of the above-described embodiment
According to this, the fluid containing the abrasion powder generated from the seal member SA1 is naturally discharged, and the abrasion powder does not enter the cylinder chamber RP.

Further, since the cylinder chamber RP is provided in the piston rod 13 and the plunger 18 is fixed, the total length of the plunger pump device 1 including the fluid pressure cylinder CY can be shortened.

Packing SA1, drain groove 43 and peripheral groove 4
By providing 4 and 4 respectively on the moving side (piston rod 13) and the fixed side (plunger 18), a pumping action is generated in the space between them, so the structure for that is simple.

In the above-described embodiment, the fluid pressure supplied to the port P11 is stopped or the flow rate thereof is reduced in the suction step, and the driving of the piston 12 is stopped or the speed thereof is reduced to add to the pure water. Even if the pressure is reduced, it is possible to prevent the inside of the cylinder chamber RP from becoming negative pressure, and it is possible to always allow pure water to flow into the drain groove 43. This makes it possible to prevent wear particles from entering the cylinder chamber RP more reliably.

Further, between the drain groove 43 and the peripheral groove 44,
Another peripheral groove may be provided, and a sealing material or wear ring made of a synthetic resin having good lubricity may be provided in the peripheral groove.
As a result, it is possible to more reliably prevent wear powder from entering the cylinder chamber RP, and at the same time, the inner peripheral surface SF1 of the cylinder chamber RP and the outer peripheral surface SF of the fitting portion 32 can be prevented.
It is possible to surely prevent the contact with the metal 2, and it is possible to surely prevent generation of abrasion powder due to contact with the metal surface.

In the above embodiment, the packing SA1
The structure, shape, size, material, etc. of can be variously changed. The suction passage 34 may be directly opened to the cylinder chamber RP without providing the circumferential groove 44. In addition, the structure, shape, size, material and the like of the plunger pump device 1 or the whole or each part of the fluid pressure circuit can be appropriately changed in accordance with the spirit of the present invention.

[0037]

According to the present invention, with a simple structure,
It is possible to naturally discharge the fluid containing the abrasion powder and the like generated from the seal member and prevent the abrasion powder and the like from entering the cylinder chamber. From the side of the cylinder chamber
Generate pressure on the side of the space and force the side of the cylinder chamber
Pure water can flow into the space from the inside. Discharge channel
The amount of fluid flowing out of the can be limited .

According to the second aspect of the present invention, a part of the fluid discharged from the circumferential groove also flows into the drain groove and is discharged to the outside through the discharge flow path. Is discharged to.

[0039]

[0040]

According to the fifth aspect of the present invention, the plunger can be driven and the total length of the device can be shortened.

[Brief description of drawings]

FIG. 1 is a front sectional view of a plunger pump device according to the present invention.

FIG. 2 is an enlarged view showing a main part of the plunger pump device shown in FIG.

FIG. 3 is a fluid circuit diagram for operating the plunger pump device.

FIG. 4 is an enlarged view showing a part of a conventional plunger pump.

[Explanation of symbols]

1 Plunger pump device 13 Piston rod (cylinder) 14 cover (cylinder cover) 18 Plunger 34 Inhalation flow path 35 discharge flow path 43 drain groove 44 circumferential groove RP cylinder chamber SF1 inner surface SF2 outer peripheral surface SA1 packing (seal member) V2 electromagnetic switching valve (switching valve) CY fluid pressure cylinder

─────────────────────────────────────────────────── --Continued from the front page (56) Reference JP-A-3-217665 (JP, A) JP-A-6-88568 (JP, A) JP-A-4-140483 (JP, A) JP-A-60- 36788 (JP, A) JP 7-217531 (JP, A) Actual development 2-118109 (JP, U) Registered utility model 3570 (JP, Z2) (58) Fields investigated (Int.Cl. ⁷ , DB name) F04B 53/16 F04B 9/125 F04B 9/133 F04B 53/14

Claims (3)

(57) [Claims] 1. A plunger pump device that exerts a pumping action when a plunger moves axially in a cylinder chamber provided in a cylinder, the plunger pump device comprising: for performing seal, the seal member provided on the inner peripheral surface of the cylinder, the cylinder chamber side of the seal member, the annular drain groove provided on the outer peripheral surface of the front Symbol plunger, the drain groove A discharge channel for communicating the fluid that has entered the drain groove to the outside, and a fluid that directly opens to the cylinder chamber to allow the fluid to flow to the cylinder chamber.
A suction flow path for flowing into and supplying the suction flow path through the plunger in the suction step.
Pressure is applied to the fluid flowing into the cylinder chamber.
Means is provided for connecting the discharge flow path in the discharge process by the plunger.
Throttle, to open the discharge flow path in the suction process
A plunger pump device characterized in that a switching valve for 2. A cylinder chamber provided in the cylinder is provided with a plastic.
The pump action is generated by the movement of the plunger in the axial direction.
A plunger pump device that volatilizes between the inner peripheral surface of the cylinder and the outer peripheral surface of the plunger.
It is installed on the inner peripheral surface of the cylinder to seal the
The sealed seal member and the plug on the cylinder chamber side of the seal member.
The annular drain groove provided on the outer peripheral surface of the drainer and the flow that communicates with the drain groove and enters the drain groove.
The discharge flow path for discharging the body to the outside and the plan in the cylinder chamber side of the drain groove.
A circumferential groove provided on the outer peripheral surface of the jar and the circumferential groove so that fluid is communicated from the circumferential groove to the cylinder chamber.
A suction flow path for flowing into and supplying the suction flow path through the plunger in the suction step.
Pressure is applied to the fluid flowing into the cylinder chamber.
Means is provided for connecting the discharge flow path in the discharge process by the plunger.
Throttle, to open the discharge flow path in the suction process
A plunger pump device characterized in that a switching valve for 3. The cylinder is a part of a piston rod of a fluid pressure cylinder which is operated by a fluid pressure, and the plunger is fixedly provided on a rod cover of the fluid pressure cylinder. The plunger pump device according to claim 1 or claim 2 .