JP3475321B2 - Graphic data generator - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the field of semiconductor design data processing, and more particularly to the field of design data correction processing that accompanies the miniaturization of graphic shapes on semiconductors. More specifically, corrected figure data for correcting the transfer shape to the wafer from original figure data used in an exposure drawing apparatus for creating a photomask pattern used for manufacturing a semiconductor circuit such as LSI. The invention relates to a device for generating.

[0002]

2. Description of the Related Art In recent years, various LSIs represented by ASIC are required to be highly integrated and highly functional due to the trend toward higher performance of electronic equipment and lightness, thinness, shortness and smallness. That is, it is required for LSI such as ASIC to reduce the chip size as much as possible to realize high functionality. The LSI such as the ASIC described above undergoes functions, logic design, circuit design, layout design, etc., to prepare a pattern for photomask pattern production, and after using this to fabricate a photomask, reduce the photomask pattern onto the wafer. It is manufactured through a long process of transferring by projection exposure or the like and performing a process of manufacturing a semiconductor element. When the pattern of the photomask is reduced and projected onto the wafer for exposure to transfer the pattern, the photomask is also called a reticle mask.

When a photomask pattern is transferred onto a wafer by reduction projection exposure or the like, an exposure shape distortion called an optical proximity effect occurs. This is because the size of the exposure shape (exposure size on the wafer) approaches the wavelength of the exposure light.
Alternatively, when the wavelength becomes smaller than the wavelength of light, it is impossible to faithfully expose the shape of the pattern of the photomask due to the diffraction phenomenon of light, and distortion occurs in the exposed shape exposed on the wafer. . When the pattern of the photomask (the shape of the portion that transmits light) has the shape shown in FIG. 10 (a) (a), the pattern shape formed on the wafer is shown in FIG. 10 (a) ( B)
Therefore, when it is desired to obtain the shape shown in FIGS. 10A and 10B as the pattern shape formed on the wafer,
Photomask pattern (shape of the part that transmits light)
Is corrected as shown in FIG. 10 (b) (a) to form the pattern shape formed on the wafer as shown in FIG. 10 (b) (b). Such correction is called optical proximity correction.

The graphic data for forming the pattern of the photomask is hereinafter referred to as original graphic data or design data, and is composed of various graphic information. Two examples of conventional methods of generating corrected graphic data will be described with reference to FIGS. 7 and 8. FIG. 7 is a schematic configuration diagram showing the processing apparatus of the first method and the processing apparatus of the second method. The processing apparatus of either method extracts the corners of the graphic from the original graphic data 710 to obtain the corrected graphic data 770 in which the corrected graphic is arranged. The processing device of the first method is
As shown in FIG. 7A, a graphic outer frame vectorization unit 711 that displays the outer frame of a graphic as a vector, a graphic corner extraction unit 712 that extracts a protruding corner portion (hereinafter also referred to as a convex corner), and an extracted corner. And a corrected figure arranging section 713 for arranging a corrected figure in the section. The process of the first method is performed for a figure consisting of figures 113, 114, and 115 represented by original figure data shown in FIG. 8A (showing the figure shown in FIG. 5A described later). A brief description will be given of a case where a correction figure is provided on a protruding corner portion. First, the figure outer frame vectorization unit 711 vectorizes the outer frame of the figure data as shown in FIG. 8B. Next, the figure angle extraction unit 712 calculates the cross product of the vectors and detects the convex angle as shown in FIG. Next, the corrected figure arranging unit 713 arranges the corrected figure at the detected convex angle position as shown in FIG. 8D, and obtains the corrected figure data 770.

As shown in FIG. 7B, the processing device of the second method is a graphic vertex coordinate registration unit 721 and a graphic extraction unit 72.
2. Comprised of a corrected figure placement unit 723. The process of the second method is shown in FIG. 8A (the figure shown in FIG. 5A, which will be described later).
A brief description will be given of a case where a corrected figure is provided at a protruding corner portion of a figure composed of 3, 114, and 115.
First, as shown in FIG. 8E, the figure vertex coordinate registration unit 7
Each vertex coordinate of the figure represented by the original figure data is registered by 21, and the presence / absence of the figure is registered as on or off for the area delimited by the vertex coordinates. Next, in the figure extracting unit 722, as shown in FIG. 8F, if one of the four areas where the vertices are in contact is on and the remaining three areas are off, the vertex is extracted as the original figure. The position of the convex corner is extracted as the convex angle of, and the corrected graphic placement unit 723 arranges the corrected graphic at the convex corner position to obtain the corrected graphic data 7
Get 70.

Incidentally, for example, the figure is a quadrangle F1, F2, F3, F4 as shown in FIG. 9A, and the figure F1,
Both F2 and F3 are squares of the same size, and
As shown in (b), the interval (feed pitch) is constant at P1, and only the quadrangle F4 has the other quadrangle F1, F2,
When the size of F3 is different from that of F3, as the original figure data, quadrangle F1 and its arrangement information (pitch information, coordinate information, pitch offset number information, etc.), and quadrangle F4 and its arrangement information are given, and figure F2 is given. , F3 is not included, and four figures F1 to F4 are generally represented. That is, as shown in FIG. 9B, the shaded portion is represented by the quadrangle F1 and the graphic data having the arrangement information. However, in the above-mentioned first conventional method, it is necessary to take out the outer frame of the original figure. Therefore, as the figure data for processing, the figure F1 shown in FIG.
It is necessary to store graphic data with graphic information and array information for F2 and F3, respectively, which increases the amount of data to be handled. Further, in the above-mentioned second conventional method, since it is necessary to extract all the vertex coordinates, the figure data in which figure information F1 and F2 and F3 shown in FIG. Therefore, it is necessary to set on and off, and the amount of data to be handled increases. In both the first method and the second method of the related art, when a corrected figure is generated by this method with respect to the entire original figure data for photomask production, the amount of data to be handled becomes huge and the capacity cannot be accommodated. There was a problem that it took a long time to process and was not practical.

[0007]

As described above, the conventional
In the method of generating corrected figure data for optical proximity correction from the original figure data for pattern formation of the photomask, the amount of data to be handled is enormous at the time of processing, and it is not possible to deal with the capacity, or the processing time is long and practical. There was a problem such as not, and it was necessary to deal with it. The present invention is
In correspondence with this, a method of generating corrected figure data to correct the transfer shape to the wafer with respect to the original figure data for forming the pattern of the photomask (this is called optical proximity effect correction), An object of the present invention is to provide a processing method in which the amount of data to be processed does not become enormous and the processing time is practical.

[0008]

A graphic data generator of the present invention is design data for forming a pattern of a photomask, which is graphic data represented by XY coordinates and composed of various graphic information. Original figure data (also referred to as design data) is used, and an X for optical proximity effect correction is applied to a protruding corner portion of each figure expressed on the XY coordinate plane by the original figure data.
A graphic data generator for generating a corrected graphic consisting of a square having a width L in the direction L and a length L on one side in the width L in the Y direction, wherein original graphic data or processed data obtained by processing the original graphic data is input. The first figure data, which is used as data and has the coordinates of the input figure data moved by L / 2 in the + X direction and the + Y direction, is created.
A second graphic data is created in which the layout is moved by L / 2 in the X direction and the -Y direction, and the coordinates of the input graphic data is moved by L / 2 in the + X direction and the -Y direction. Create the figure data and set the coordinates of the input figure data in the -X direction, +
A first graphic data arranging unit for creating fourth graphic data which is moved by L / 2 in the Y direction, and first graphic data and second graphic data obtained by the first graphic data arranging unit. The fifth graphic data is created by performing the logical sum processing of the graphic logic operation of the above, and the logical sum processing of the graphic logic operation of the third graphic data and the fourth graphic data obtained by the first graphic data arranging unit is performed. Then, the sixth graphic data is created, and the exclusive OR processing of the graphic logical operations of the fifth graphic data and the sixth graphic data is further applied to one side of the width L in the X direction and the width L in the Y direction. And a first logical operation unit for generating a correction figure for optical proximity correction, which is a square having a length of L. And
In the above, in order to adjust the generation position of the corrected figure with respect to each figure represented by the original figure data, to obtain processed data obtained by enlarging or reducing each figure represented by the original figure data. It is characterized in that it is provided with a pre-processing unit for performing the arithmetic processing of. Then, the preprocessing unit creates seventh graphic data in which the coordinates of the original graphic data are moved by a predetermined distance L1 in the + X direction and the + Y direction, and the coordinates of the original graphic data are set in the −X direction, −. Eighth graphic data having an arrangement moved by a distance L1 in the Y direction is created, and the coordinates of the original graphic data are set in the + X direction and the −Y direction.
Second graphic data for creating the ninth graphic data with the layout moved by the distance L1 and creating tenth graphic data with the layout of the original graphic data moved by the distance L1 in the −X direction and the + Y direction. Second placement data is added to the placement unit and the second graphic data placement unit to perform a logical sum operation of the graphic logic operations of the seventh graphic data, the eighth graphic data, the ninth graphic data, and the tenth graphic data. It is characterized in that it is provided with a logical operation section. Further, the pre-processing unit again sets the coordinates of the original graphic data in the + X direction and the + Y direction.
Eleventh graphic data having a layout moved by a predetermined distance L2 is created, and twelfth graphic data having a layout moved by a distance L2 in the −X direction and −Y direction of the original graphic data is created. Set the coordinates of figure data in the + X and -Y directions.
Third graphic data for creating the thirteenth graphic data with the layout moved by the distance L2 and creating fourteenth graphic data with the layout of the original graphic data moved by the distance L2 in the −X direction and the + Y direction. Arrangement unit and third graphic data Arrangement unit obtains the 11th graphic data, the 12th graphic data, the 13th graphic data, and the 14th graphic data It is characterized in that it is provided with a logical operation section.

[0009]

The graphic data generating apparatus of the present invention has the above-mentioned structure, and for correcting the optical proximity effect for correcting the transfer shape to the wafer from the original graphic data for forming the photomask pattern. In the process of generating the corrected figure data, it is possible to provide a process in which the amount of data to be handled does not become enormous and the processing time is practical. Specifically, using original figure data (also referred to as design data) which is design data for forming a pattern of a photomask, the original figure data is used to project the projected corners of each figure on the XY coordinate plane. At a practical level, it is possible to generate a correction figure consisting of a square for correcting the optical proximity effect, which has a length L of one side of the width L in the X direction and a width L in the Y direction. Specifically, the original graphic data (also referred to as design data), which is the design data for forming the pattern of the photomask, is composed of various graphic information and is the graphic data of the XY orthogonal coordinate intersection expression is used. , At the protruding corners of each figure expressed on the XY coordinate plane by the original figure data,
A graphic data generator for generating a corrected graphic for correcting the optical proximity effect, which is composed of a square having a width L in the X direction and a width L in the Y direction and having a side length of L. The processed data is used as input graphic data, and the coordinates of the input graphic data are set to L in the + X direction and the + Y direction.
Create the first figure data that has been moved by 1/2, and create the second figure data that has been moved by L / 2 in the coordinates of the input figure data in the -X direction and the -Y direction. The third graphic data is created in which the data coordinates are moved by L / 2 in the + X direction and the -Y direction, and the coordinates of the input graphic data are moved by L / 2 in the -X direction and the + Y direction. The first graphic data arranging unit for creating the fourth graphic data, and the logical sum operation of the graphic logical operations of the first graphic data and the second graphic data obtained by the first graphic data arranging unit. Creating fifth graphic data, performing logical sum processing of graphic logical operations of the third graphic data and the fourth graphic data obtained by the first graphic data arranging section, and creating sixth graphic data; Furthermore, the graphic logic of the fifth graphic data and the sixth graphic data By performing an exclusive OR processing of the calculation, X
A first generation of a correction figure for correcting the optical proximity effect, which is composed of a square having a width L in the direction L and a width L on one side in the Y direction as L
This is achieved by including the logical operation unit of. Further, in addition to this, each graphic represented by the original graphic data is represented by the original graphic data by including a preprocessing unit for performing an arithmetic process for obtaining the processed data which is enlarged or reduced. The position where the corrected figure is generated for each figure can be adjusted.

More specifically, the preprocessing section creates seventh graphic data in which the coordinates of the original graphic data are moved by a predetermined distance L1 in the + X direction and the + Y direction, and the coordinates of the original graphic data are created. The eighth graphic data is created by arranging in the -X direction and the -Y direction by a distance L1 and the coordinates of the original graphic data are moved by a distance L1 in the + X and -Y directions. Create the figure data and set the coordinates of the original figure data to −
The first arrangement with the distance L1 moved in the X direction and the + Y direction
A second graphic data arranging section for creating graphic data of 0;
A second logic operation unit for performing a logical sum operation of graphic logic operations on the seventh graphic data, the eighth graphic data, the ninth graphic data, and the tenth graphic data obtained by the second graphic data arranging unit; It is equipped with. Alternatively, the eleventh graphic data is created in which the coordinates of the original graphic data are moved by a distance of 2 in the + X direction and the + Y direction, and the coordinates of the original graphic data are moved by a distance of 2 in the + X direction and the -Y direction. 12th graphic data is created, and the coordinates of the original graphic data are set to -X.
Direction, + Y direction, the 13th figure data which is arranged to be moved by a distance of 2 is created, and the coordinates of the original figure data are set in the -X direction,
A third graphic data arranging unit for creating fourteenth graphic data arranged to move by a distance of 1 in the −Y direction; and eleventh graphic data obtained by the third graphic data arranging unit,
The third logic operation unit is provided for performing a logical product process of the graphic logic operations of the second graphic data, the thirteenth graphic data, and the fourteenth graphic data.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of an example of an embodiment of a graphic data generator of the present invention, and FIG. 2 is a diagram for explaining a moving arrangement of a graphic represented by graphic data in X and Y directions. 3 is a diagram for explaining a graphic logic operation of a graphic represented by graphic data, FIG. 4 is a view for explaining a configuration of a preprocessing unit, and FIG. 5 is a diagram for explaining generation of a corrected graphic by the graphic logic operation. FIG. 6 is a diagram for explaining the change in the generation position of the corrected figure by the preprocessing unit. 1 to 6, 100 is a graphic data generator, 11
0 is original graphic data, 111, 111A, 112, 112
A, 115, 115A, 115B, 115C, 115
D, 116, 116A, 116B, 116C, 116
D, 117, 117A, 117B, 117C, 117D
Is a figure, 120 is input data, 130 is a first figure data placement unit, 131 is a + X direction, + Y direction movement placement process,
132 is −X direction, −Y direction movement arrangement processing, 133 is +
X-direction, −Y-direction moving / arrangement processing, 134 is −X-direction, +
Y-direction movement arrangement processing, 141, 142, 143, 144
Is graphic data, 150 is a first logical operation unit, 151, 1
52 is a logical sum processing unit, 155 and 156 are graphic data, 1
60 is exclusive logic processing, 165 is graphic data, 170 is auxiliary graphic data, 171, 172 and 173 are auxiliary graphics,
Reference numeral 200 is a pre-processing unit, and 300 is a post-processing unit. The graphic data generating apparatus 100 shown in FIG. 1 is design data for forming a pattern of a photomask, and is original graphic data (design data, which is graphic data of XY Cartesian coordinate expression, which is composed of various graphic information. (Also referred to as), the width X of the X direction and the width L of the Y direction for correcting the optical proximity effect are set to 1 at the protruding corners of each figure expressed on the XY coordinate plane by the original figure data.
A graphic data generating device for generating a corrected graphic consisting of a square whose side has a desired length L. In order to adjust the generation position of the corrected graphic for each graphic represented by the original graphic data, It is provided with a pre-processing unit for performing arithmetic processing for obtaining processing data obtained by enlarging or reducing each figure represented by the figure data.

The figure data obtained by moving and arranging the input figure data 120 is used to generate corrected figure data by performing arithmetic processing. The first graphic data moving / arranging unit 130 for obtaining the graphic data, and the graphic data (14
1 to 144), and a first arithmetic processing unit 150 for performing arithmetic processing.

In the first graphic data arranging unit 130, L / L corresponding to the input graphic data 120 to be input, which corresponds to a corrected graphic consisting of a square having a desired side size L to be generated.
The figure data (1) in which the figures are moved and arranged in the X and Y directions (+ or − directions) by the length of 2 respectively.
41-144). The graphic data 141 is different from the input graphic data 120 in the + X direction and the + Y direction, respectively.
The figure data is moved by L / 2. The graphic data 142 is in the −X direction, − with respect to the input graphic data 120.
The graphic data is moved by L / 2 in the Y direction. The graphic data 143 is graphic data obtained by moving the input graphic data 120 by L / 2 in the + X direction and the −Y direction, respectively. The graphic data 144 is graphic data obtained by moving the input graphic data 120 by L / 2 in the −X direction and the + Y direction, respectively. Specifically, the processing of the first graphic data placement unit 130 will be described with reference to FIG. Note that FIG. 2A shows the graphic 11 before movement.
1 and 112, and the figures moved in the + X direction and the + Y direction by x1 and y1 are shown in FIG.
It becomes like figures 111A and 112A shown in (b).

The first logical operation section 150 performs a logical sum processing 151 on the graphic data 141 and the graphic data 142,
The graphic data 155 is obtained. Further, the graphic data 143 and the graphic data 144 are logically ORed 152 to obtain the graphic data 156. Then, the obtained graphic data 155 and the graphic data 156 are subjected to exclusive OR processing 160 to obtain graphic data 165. Here, the logical operation processing of the graphic represented by the graphic data will be briefly described based on FIG. As shown in FIG. 3A, when a quadrangle figure A and a figure B are represented, the figure A corresponding to this is displayed.
And the graphic B, the logical sum of the graphic A and the graphic B, the exclusive logical sum of the graphic A and the graphic B, and the inversion of the graphic B (Invers
e) are respectively FIG. 3 (b), FIG. 3 (c), and FIG.
It is represented as a black part in (d). The actual processing contents are already widely known and will not be described here.

By using such a logical operation, the figure data generator 100 shown in FIG. 1 corrects a square having a side length L at the protruding corner of the figure represented by the original figure data. The fact that a graphic can be generated will be described with reference to a specific example in FIG. For simplicity, input graphic data 120
The figures represented by are rectangular figures 113, 114, and 1
The case of only 15 will be described with reference to FIGS. 1 and 5. When the input graphic data 120 is shifted in the + X direction and the + Y direction by L / 2 and arranged (corresponding to the processing of 131), the graphic data 141 of the graphic data 141 obtained is obtained.
The figures corresponding to 3, 114, and 115 are 1 in FIG.
13A, 114A, 115A, and when the input graphic data 120 is shifted by L / 2 in the −X direction and −Y direction, respectively, and arranged (corresponding to the processing of 132), Figures 113, 114, 115
The figures corresponding to are 113B, 114B,
115B, the graphic represented by the graphic data 155 obtained by performing the logical sum processing 151 of the graphic data 141 and the graphic data 142 is the shaded area in FIG. 5B. Similarly, when the input graphic data 120 is displaced by L / 2 in the + X direction and the -Y direction, respectively, and arranged (corresponding to the processing of 133), the graphic 113 of the acquired graphic data 143,
The figures corresponding to 114 and 115 are 113 in FIG.
As shown in D, 114D, and 115D, the input graphic data 120 is shifted by L / 2 in the −X direction and the + Y direction, respectively, and arranged (corresponding to the processing of 134), and the graphic 113 of the acquired graphic data 144 is obtained. , 114, 115 correspond to 113C, 114C, 115 in FIG. 5C.
It becomes like C, and graphic data 143 and graphic data 144
Graphic data 15 obtained by performing the logical sum processing 152 with
The figure represented by 6 is the shaded area in FIG. Than this,
The exclusive OR processing 160 of the shaded area shown in FIG. 5 (b) and the shaded area shown in FIG. 5 (c) is performed, and the result is as shown in FIG. 5 (d). A square auxiliary figure 171 having a length L can be generated.

As described above, the pre-processing unit enlarges or reduces each figure represented by the original figure data in order to adjust the generation position of the corrected figure.
Further description will be given based on FIG. In the pre-processing unit as well, the original figure data is moved in the + X direction and the + Y direction by a desired distance L1
A predetermined distance L1 in the −X direction and the −Y direction, + X direction,
The moving arrangement processing 211, 212, 213, 214 for moving and arranging a predetermined distance L1 in the −Y direction, a predetermined distance L1 in the −X direction, and a predetermined distance L1 in the + Y direction is performed.
Of the graphic data arranging unit 210 and the graphic data 221, 222, 223 respectively obtained by these processes.
A second logical operation unit 2 that performs a logical sum processing on the H.224.
30 and a third logical operation unit 235 that performs a logical product process on the graphic data 221, 222, 223, and 224 obtained by these processes, respectively. Logical sum processing 231 by the second logical operation unit 230
By doing so, the original graphic data can be obtained by expanding the graphic data 241 by one side L1, and the second logic operation unit 235 can be obtained.
The logical product processing 236 by
It is possible to obtain the reduced graphic data 242 by one. These graphic data 241 to graphic data 242
Is used as the input graphic data shown in FIG. 1 to generate the auxiliary graphic data 170. Of course, the enlargement amount for obtaining the enlarged graphic data 241 and the reduced graphic 24
It is not necessary to use the same reduction amount to obtain 2. The preprocessing unit shown in FIG. 4 can specify the enlargement amount and the reduction amount independently. Here, in order to perform the logical sum processing 231,
The second graphic data arranging section 210 for obtaining the graphic data is used as the graphic data arranging section for obtaining the graphic data for performing the logical sum processing 236. However, in addition to the second graphic data arranging section 210, It is also possible to provide three graphic data arranging sections and use different graphic data arranging sections for each logical operation.

Next, the reduction and enlargement of the graphic represented by the original graphic data by the preprocessing unit will be described with reference to FIG. FIG. 6A shows figures 117, 118, and 119 represented by the original figure data. Here, in order to make the explanation easy to understand, the figures 117, 118, and 119 represented by the original figure data are the figures 113, 114, and 1 in the case described in FIG. 5, respectively.
The same figure as 15. Original figure data in + X direction,
The original graphic data is moved by L1 / 2 in the + Y direction and arranged, and the obtained graphic data is moved and arranged by L1 / 2 in the -X direction and the -Y direction, respectively, and the original graphic data is moved in the + X direction and -Y. The graphic data obtained by arranging by displacing L1 / 2 in each direction, and L in the -X direction and + Y direction.
When they are moved by 1/2 and arranged, and these are overlapped and displayed, a schematic view as shown in FIG. 6B is obtained. Therefore, the original graphic data is moved and arranged by L1 / 2 in the + X direction and the + Y direction, respectively, and the obtained graphic data and −
Graphic data obtained by moving and arranging L1 / 2 in the X direction and −Y direction respectively, and graphic data obtained by moving and arranging L1 / 2 in the + X direction and −Y direction respectively. , -X direction, + Y direction, respectively, are moved by L1 / 2 and arranged, and the figure represented by the figure data obtained by the logical sum with the figure data obtained is as shown in FIG. 6C. Become. The figure shown in FIG.
The figure shown in (a) is changed in the X direction and the Y direction without changing its position.
This is an auxiliary figure 1 that has been enlarged by the width L1 in the direction
72 is generated by arranging as shown in FIG. 6D in the same manner as the processing shown in FIG. It should be noted that one side l1 and L1 of the square auxiliary figure 172 shown in FIG. 6D is L1 <l1.
Relationship. In addition, the original figure data is + X direction, + Y
And the figure data obtained by moving and arranging by L1 / 2 respectively in the direction, and the figure data obtained by moving and arranging by L1 / 2 in the -X direction and the -Y direction respectively.
The figure data obtained by moving and arranging L1 / 2 in the X direction and the −Y direction respectively, and the figure data obtained by moving and arranging L1 / 2 in the −X direction and the + Y direction respectively. The figure represented by the figure data obtained by the logical product is as shown in FIG. 6 (e). Figure 6 (e)
The figure shown is the figure shown in FIG. 6 (a) that has been reduced by the width L1 in the X and Y directions without changing its position, and its auxiliary figure 173 is the same as that shown in FIG. And generated as shown in FIG. 6 (f). Incidentally, one side l2 and L of the square auxiliary figure 173 shown in FIG.
1 is a relationship of L2 <l1.

The post-processing unit 300 performs processing such as removing a part of overlapping graphics when the generated auxiliary graphics overlap each other.

Finally, the graphic data generator 10 shown in FIG.
0 can generate a square of a desired size at the protruding corner of each figure by adjusting its position. Although the auxiliary figure to be generated is a square here, it may be a rectangle by changing the movement amount in the X and Y directions when moving and arranging the input figure data. The advantage of using a square as the auxiliary figure to be generated is that the amount of data to be processed is reduced and the processing time is set to a practical level.

[0020]

As described in detail above, according to the present invention,
A device that generates corrected figure data for optical proximity correction for correcting the transfer shape to the wafer from the original figure data for pattern formation of the photomask, and the amount of data handled during processing does not become huge, In addition, it has become possible to provide a graphic data generating device whose processing time is practical. This makes it possible to sufficiently cope with fine processing of semiconductors.

[Brief description of drawings]

FIG. 1 is a first embodiment of a graphic data generator according to the present invention.
Schematic diagram of the example

FIG. 2 is a diagram for explaining a moving arrangement of a graphic represented by graphic data in the X and Y directions.

FIG. 3 is a diagram for explaining a logical operation of a graphic represented by graphic data.

FIG. 4 is a schematic configuration diagram of a preprocessing unit.

FIG. 5 is a diagram for explaining generation of a corrected figure by a figure logical operation.

FIG. 6 is a diagram for explaining a change in the generation position of a corrected figure by the preprocessing unit.

FIG. 7 is a diagram for explaining a conventional method of generating a corrected figure.

FIG. 8 is a diagram for explaining identification of a generation position of a corrected figure.

FIG. 9 is a diagram illustrating a relationship between graphic data and a graphic represented.

FIG. 10 is a diagram for explaining the necessity of an auxiliary figure.

[Explanation of symbols]

100 Graphic Data Generator 110 Original Graphic Data 111, 111A, 112, 112A Graphic 113, 113A, 113B, 113C, 113D
Figures 114, 114A, 114B, 114C, 114D
Figures 115, 115A, 115B, 115C, 115D
Graphics 116, 117, 118 Graphics 120 Input data 130 First graphics data placement unit 131 + X direction, + Y direction movement placement processing 132 −X direction, −Y direction movement placement processing 133 + X direction, −Y direction movement placement processing 134 − X-direction / + Y-direction movement arrangement processing 141, 142, 143, 144 Graphic data 150 First logical operation units 151, 152 Logical sum processing units 155, 156 Graphic data 160 Exclusive logical processing 165 Graphic data 170 Auxiliary graphic data 171, 172, 173 Auxiliary figure 200 Pre-processing section 210 Second figure data arranging section 211 + X direction, + Y direction moving placement processing 212 -X direction, -Y direction moving placement processing 213 + X direction, -Y direction moving placement processing 214 -X Direction, + Y direction movement placement processing 221, 222, 223, 224 Figure data 231 Pattern logical operation section 236 third logic operation unit 241, 242 graphic data 300 post-processing unit 410 designed graphic data 415 formed pattern 420 corrected graphic data 425 formed

Claims (4)

(57) [Claims] 1. Design data for forming a pattern of a photomask, which is composed of various graphic information, X-
Original figure data (also referred to as design data), which is figure data of Y coordinate expression, is used, and in the projected corner portion of each figure expressed on the XY coordinate plane by the original figure data, the X direction for optical proximity effect correction. A graphic data generator for generating a corrected graphic consisting of a square having a width L and a width L of one side in the Y direction, the input graphic data being original graphic data or processing data obtained by processing the original graphic data. The first graphic data is created by arranging the coordinates of the input graphic data by moving L / 2 in the + X direction and the + Y direction, and setting the coordinates of the input graphic data in the -X direction and the -Y direction by L / Create the second graphic data that has been moved by 2 and set the coordinates of the input graphic data to +
A fourth graphic data is created in which the layout is moved by L / 2 in the X and −Y directions, and the coordinates of the input graphic data are moved by L / 2 in the −X and + Y directions. A first graphic data arranging section for creating graphic data, a first graphic data and a second graphic data obtained by the first graphic data arranging section.
The logical sum processing of the graphic logical operation of the graphic data of
Of the third graphic data and the fourth graphic data obtained by the first graphic data arranging unit is subjected to the logical sum operation of the graphic logical operations to create the sixth graphic data. The exclusive logical sum processing of the graphic logical operations of the fifth graphic data and the sixth graphic data is performed to obtain the widths L and Y in the X direction.
A graphic data generating device comprising: a first logic operation unit configured to generate a correction graphic for optical proximity correction, which is composed of a square having a length L of one side of the direction width L. . 2. The method according to claim 1, wherein each graphic represented by the original graphic data is enlarged or reduced in order to adjust the generation position of the corrected graphic with respect to each graphic represented by the original graphic data. A graphic data generation device comprising a pre-processing unit for performing arithmetic processing to obtain processed data. 3. The preprocessing unit according to claim 2, wherein the coordinates of the original graphic data are a predetermined distance L1 in the + X direction and the + Y direction.
The seventh graphic data having the moved layout is created, the coordinates of the original graphic data are created in the −X direction and the −Y direction by the distance L1 and the eighth graphic data is created, and the coordinates of the original graphic data are created. Is created in the + X direction and in the -Y direction by the distance L1 and the ninth figure data is created, and the coordinates of the original figure data are arranged in the -X direction and the + Y direction by the distance L1 in the 10th figure. A second graphic data placement unit for creating data, and seventh graphic data, eighth graphic data, ninth graphic data, and tenth graphic data obtained by the second graphic data placement unit.
And a second logical operation unit for performing a logical sum processing of the logical operation of the graphic data of FIG. 4. The original graphic data according to claim 2, wherein the preprocessing unit creates eleventh graphic data in which the coordinates of the original graphic data are moved by a predetermined distance L2 in the + X direction and the + Y direction. The twelfth graphic data having the arrangement in which the data coordinates are moved by the distance L2 in the −X direction and the −Y direction is created, and the coordinates of the original graphic data are arranged by moving the distance L2 in the + X direction and the −Y direction. Create the 13th figure data,
Set the coordinates of the original graphic data in the -X direction and + Y direction by the distance L2
Third to create 14th figure data with moved layout
And the graphic data arranging unit and the third graphic data arranging unit perform the logical product operation of the graphic logical operations of the 11th graphic data, the 12th graphic data, the 13th graphic data, and the 14th graphic data. A graphic data generating device comprising a third logical operation unit.