JP3473227B2 - Electrode trimming method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode trimming method for a circuit board or a dielectric resonator used in electronic equipment used in a high frequency band.

[0002]

2. Description of the Related Art In recent years, high frequency circuit boards have been used in automobile telephones,
It is widely used in the field of wireless communication devices such as mobile phones and personal radios. In particular, among them, the high frequency filter is composed of a dielectric resonator and a coupling substrate for providing a coupling capacitance as disclosed in Japanese Patent Laid-Open No. 60-114001, and recently, a dielectric ceramic. There is also a dielectric resonator in which an electrode portion and a capacitance gap portion for giving a coupling capacitance are formed above.

The structure of a dielectric resonator using the conventional electrode trimming method will be described below. 2 is a perspective view of an essential part of a dielectric resonator formed by using a general electrode trimming method, and FIG. 3 is a sectional view of an essential part of the dielectric resonator shown in FIG. Reference numeral 11 is a dielectric ceramic portion made of rectangular parallelepiped ceramic, 12 is an open end made of a hollow portion formed in the dielectric ceramic portion 11, 13 is an input / output terminal portion for electrical connection, and 14 is an electrode material ground. The capacitive gap portion 15 is an electrode layer on which an electrode material is formed. These dielectric resonators employ a method in which a part of the electrode layer 15 having a thickness of about 5 to 15 μm is ground into a predetermined shape on the dielectric ceramic portion 11 to form the capacitance gap portion 14.

A conventional electrode trimming method will be described below. The grinding of the electrode layer 15 is performed by using a laser trimming method performed by irradiating laser light, a chemical etching method in which a mask is formed and trimmed with an etching agent, a direct contact trimming method using a high-speed rotating grindstone, or the like.
FIG. 5 is a sectional view of an essential part of an altered layer immediately after laser trimming formed by an electrode trimming method using a conventional laser trimming method. In FIG. 5, 16 is a modified layer in which a ceramic substrate melted by high heat of a laser or an electrode material is solidified to reduce resistance, 17 is a modified layer in which atomic defects are introduced into semiconductor by rapid cooling from a high temperature, and 18 is a scattered electrode It is a deposit consisting of a mixture of particles and ceramic substrate particles.

[0005]

The electrode trimming method using the laser trimming method is non-contact trimming and is excellent in both productivity and trimming speed, but it is a ceramic substrate or electrode material melted by high heat of laser. Solidify to form a low resistance altered layer. Further, in the ceramic substrate portion at a temperature lower than the melting point of the ceramic substrate, atomic defects are introduced by high heat, so that an altered layer formed into a semiconductor is generated in that portion, and a high frequency characteristic 1
Since the Q (reciprocal of tan δ) characteristic, which is one of the criteria, is significantly deteriorated, it is required to improve the Q characteristic for use in a high frequency circuit and a high frequency filter. Further, in the chemical etching method, since the production process such as mask formation and waste liquid treatment of the etching solution is complicated, the production facility is large and the productivity is low, and the improvement of the process is required. Further, in the direct contact trimming method using a high-speed rotary grindstone, it is difficult to uniformly grind the electrodes (form a capacitance gap), and mechanical damage such as chipping and cracks also occurs on the underlying ceramic part. Therefore, improvement in yield and reliability have been required.

The present invention, in a laser trimming method capable of non-contact continuous trimming, has a high insulation resistance in the trimming portion, can prevent deterioration of high frequency characteristics in elements and circuits, and is excellent in high performance and mass productivity. Another object of the present invention is to provide an electrode trimming method.

[0007]

In order to solve this problem, the present invention is an electrode trimming method for trimming an electrode portion formed on a ceramic substrate by laser light, in which a high pressure gas is applied to the trimming portion of the ceramic substrate. Trimming into a predetermined shape with laser light while jetting
With laser trimming to the ceramic substrate
Reattachment consisting of more scattered electrode particles or ceramic particles
The injection force of high-pressure gas should be adjusted so that the deposition layer is 200 μm or less.
And laser trimming step of controlling, the trimming Engineering
After a while, the surface change of the trimming part of the ceramic substrate
Degradation layer etching to remove the quality layer by chemical etching
After the deteriorated layer etching step, the trimmed ceramic substrate is heat-treated in the air to reoxidize the deteriorated layer in the trimming portion. Further, the modified layer etching step by chemical etching is provided before the reoxidation step.

As a result, the electrode particles and ceramic particles scattered during laser trimming are blown off to significantly reduce adhesion to the trimming portion, and further insulation caused by atomic defects generated in the ceramic portion due to rapid heating and quenching by laser light. The decrease in resistance can be recovered by the reoxidation process to recover the atomic defects. As a result, it is possible to reduce trimming damage to the underlying ceramic part and to remove the deteriorated layer due to the heat of the laser beam, so that it is possible to obtain a high-performance element excellent in high frequency characteristics. Mass productivity can be remarkably improved in grinding the formed electrode.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION The electrode trimming method according to claim 1 of the present invention is an electrode trimming method for trimming an electrode portion formed on a ceramic substrate by laser light, and a high voltage is applied to the trimming portion of the ceramic substrate. Laser trimming on the ceramic substrate while trimming to a predetermined shape with laser light while jetting gas
Composed of electrode particles or ceramic particles scattered by
Injection of high-pressure gas so that the redeposition layer is less than 200 μm
Laser trimming process to control force, and Trimin
After the grinding process, the table of the trimming part of the ceramic substrate
Altered layer etching to remove surface altered layer by chemical etching
And a re-oxidation step of re-oxidizing the deteriorated layer in the trimming portion by heat-treating the ceramic substrate trimmed after the deteriorated layer etching step in the atmosphere, and scattered during laser trimming. The electrode particles and ceramic substrate particles are blown off to reduce the adhesion to the trimming part, and further, the rapid reduction of heat by laser light in the laser trimming process reduces the insulation resistance due to the atomic defects generated in the ceramic part, and the reoxidation process. It has a function to restore the ceramic part by reoxidation, and it is possible to improve the high frequency characteristics of the element and improve the yield. Furthermore, it will stick to the surface of the trimming part.
Trimmed by reoxidation process after removing the deteriorated surface layer
Oxidation of the deteriorated layer of the part is facilitated and the decrease of the insulation resistance is ensured.
I can recover. Also, in the laser trimming process
By laser trimming on the ceramic substrate
Redeposition layer consisting of scattered electrode particles or ceramic particles
Is 200 μm or less, and the resonator is
Has the effect that the Q of
Can be improved.

[0010]

[0011]

The electrode trimming method according to claim 2 is
The high-pressure gas according to claim 1, wherein the high-pressure gas is composed of a gas containing oxygen, nitrogen, a noble gas, or a mixed gas thereof, and the high-pressure gas generates a high-speed gas flow, which scatters from electrodes and ceramic substrates. It has an effect of preventing reattachment of particles. In particular, when the high-pressure gas contains oxygen, it has an effect of suppressing generation of an altered layer due to rapid heating and quenching by laser light.

The electrode trimming method according to claim 3 is
The electrode portion and the connecting wire according to claim 1 or 2 , further comprising an electrode portion oxide layer etching step of removing an oxide layer of an electrode portion after the reoxidation step, wherein the electrode portion and the connecting wire are used when external wiring for connecting to the outside is performed. With this, there is an effect that it is possible to surely bond with and to prevent an increase in the resistance value of the connection portion. In particular, the electrode oxide layer etching step has a remarkable effect when the electrode is formed of a base metal such as copper (Cu) or nickel (Ni).

An embodiment of the present invention will be described below with reference to the drawings. (Embodiment 1) FIG. 1 is a process diagram of an electrode trimming method according to Embodiment 1 of the present invention. Reference numeral 1 is a laser trimming step of trimming a ceramic substrate to a predetermined shape with a laser beam while injecting a high-pressure gas onto the trimming portion. 2 is a laser trimming step. The surface alteration layer generated in the trimming portion of the ceramic substrate is removed by chemical etching. Step 3 for etching the deteriorated layer, 3 is a reoxidation step for heat-treating the trimmed ceramic substrate in the atmosphere to reoxidize the deteriorated layer in the trimmed section, 4 is an oxide layer for the electrode section for removing the oxide layer in the electrode section by chemical etching This is an etching process.

Here, the jetting force of the high-pressure gas is adjusted so that the redeposited layer of the electrode particles or the ceramic particles scattered by laser trimming on the ceramic substrate becomes 200 μm or less. Further, as the high pressure gas, a gas containing oxygen, nitrogen, a rare gas or a mixed gas thereof is used, and as the gas containing oxygen, air, pure oxygen, a mixed gas of nitrogen and oxygen is preferable. As the rare gas, helium (He), argon (Ar), neon (Ne), krypton (Kr), or the like can be used, but it is preferable to use the argon gas in terms of cost. As a result, in the laser trimming step 1, it is possible to prevent generation of an altered layer such as a ceramic substrate or an electrode portion.
As the ceramic substrate, high dielectric constant type ceramic capacitor substrate, temperature compensating ceramic capacitor substrate, piezoelectric type ceramic substrate, pyroelectric type ceramic substrate, forsterite substrate, alumina substrate, etc., the insulation resistance decreases when quenching from high temperature atmosphere. A ceramic substrate or the like is used. As a solvent used for chemical etching, dilute sulfuric acid,
It is preferable to use dilute nitric acid, dilute hydrofluoric acid, or a mixture thereof.

As described above, according to the present embodiment, it is possible to reduce the adhesion of impurities that cause a reduction in the insulation resistance to the trimming portion by blowing away the electrode particles and ceramic particles scattered during the laser trimming step 1. it can.
Further, the reduction of the insulation resistance caused by the atomic defects generated in the ceramic part due to the rapid heating and quenching by the laser light in the laser trimming step 1 can be recovered by the reoxidation in the reoxidation step 3, and the high frequency characteristics are excellent. An element can be formed and mass productivity can be improved.

[0017]

EXAMPLES Next, examples of the present invention will be described with reference to FIGS.

(Examples 1 to 5) A manufacturing process of a dielectric resonator (coaxial type, 3 mm square) having the structure shown in FIGS. 2 and 3 will be described. As the dielectric ceramic portion 11, a dielectric ceramic substrate having a chemical composition of Ba—Ti—Nd—Sm—O system and a relative dielectric constant value of 93 was used.
Silver is formed on the surface of the dielectric ceramic portion 11 by a plating method. Using this ceramic substrate, as Example 1, laser trimming step 1, altered layer etching step 2, reoxidation step 3 and electrode portion oxide layer etching step 4
I went. Here, as the laser trimming step 1,
Trimming of the capacitance gap portion 14 was performed using an excimer laser to form a dielectric resonator. At this time, air was used as the high-pressure gas for injection and was injected at a pressure of 0.1 MPa to the trimming portion forming the capacity gap portion 14.
Next, in the altered layer etching step 2, a part of the dielectric resonator was subjected to etching treatment for 10 minutes using dilute sulfuric acid (5 wt% concentration). Further, as the reoxidation step 3, the dielectric resonator was heat-treated at 500 to 800 ° C. in the atmosphere. Finally, as the electrode part oxide layer etching step 4, a part of the dielectric resonator was subjected to etching treatment for 5 minutes using dilute sulfuric acid (5 wt% concentration).

Further, as Example 2, the laser trimming process 1, the deteriorated layer etching process 2 and the reoxidation process 3 were performed without performing the electrode portion oxide layer etching process 4 with respect to Example 1. As Example 3, unlike Example 1, the altered layer etching step 2 was not performed, but the laser trimming step 1, the reoxidation step 3 and the electrode portion oxide layer etching step 4 were performed. As Example 4, as compared with Example 3,
The laser trimming step 1 and the reoxidation step 3 were performed without performing the electrode part oxide layer etching step 4. As Example 5, as in Example 3, laser trimming step 1,
The reoxidation step 3 and the electrode part oxide layer etching step 4 were performed. At this time, nitrogen was used as the high-pressure gas for injection in the laser trimming step 1.

Comparative Examples 1 to 3 As Comparative Example 1, laser trimming step 1 and reoxidation step 3 were performed without forming the high pressure gas in Examples 1 to 5 to form a dielectric resonator. Further, as Comparative Example 2, a dielectric resonator was formed by performing only the laser trimming step 1 and the altered layer etching step 2 in which the injection of the high pressure gas using nitrogen in Example 5 was added. Further, as a comparative example 3, only the conventional laser trimming step 1 in which injection of high pressure gas was not added was performed to form a dielectric resonator.

Examples 1 to 5 manufactured as described above
Also, regarding the dielectric resonators of Comparative Examples 1 to 3, the insulation resistance between the input / output part and the ground, the appearance of the capacitance gap part (presence or absence of deposits, trimming state), and the Q (frequency of the dielectric resonator at no load) 1 GHz) was measured. The results (Table 1)
Shown in.

[0022]

[Table 1]

As is clear from this (Table 1), in the case where the high-pressure gas was injected in the laser trimming step 1, the resistivity and the Q of the dielectric resonator show high values. In the comparative example without high-pressure gas injection, an altered layer made of a mixture of silver and ceramic was formed in the capacitance gap portion, and the Q value of the dielectric resonator could not be measured. Further, by performing the reoxidation step 3, the value of the specific resistance value is stably increased, and by performing the altered layer etching step 2, the Q of the dielectric resonator shows a higher value. I understand. It was also found that the electrode trimming method in this example is superior in characteristics and appearance to the comparative example.

FIG. 4 shows the relationship between the re-adhesion layer width of the electrode particles or ceramic particles scattered in the trimming portion and the no-load Q (Table 2) and a curve thereof.

[0025]

[Table 2]

As is clear from this (Table 2) and FIG. 4, when the re-adhesion layer width exceeds 200 μm, the Q value of the dielectric resonator is rapidly deteriorated when no load is applied. It is understood that the injection force of the high pressure gas should be controlled so that the pressure becomes 200 μm or less.

As the high-pressure gas injected during trimming, a gas containing oxygen is most effective, but a gas containing no oxygen such as nitrogen gas can be used to prevent the redeposition layer. The electrode portion oxide layer etching step 4 after the reoxidation step 3 is intended to remove the oxide layer on the surface of the electrode portion generated during the reoxidation step 4, and is required in the case of an electrode using a base metal material such as copper. It In some cases, solder plating may be further performed to facilitate electrical connection with the circuit board side.

In this embodiment, the high pressure gas is air,
Although nitrogen gas was used, the same effect can be obtained by using pure oxygen, argon gas, helium gas, or the like. Further, although the present embodiment is applied to the trimming for forming the capacitance gap portion of the dielectric resonator, the present invention can also be applied to the trimming for forming the electrode pattern of the high frequency circuit board portion.

[0029]

As described above, according to the present invention, in the laser trimming method capable of non-contact continuous trimming, the trimming damage to the ceramic portion which is the base is reduced, and the deterioration of the ceramic portion due to the heat of the laser beam is reduced. Since the layer can be removed, a high-performance element can be obtained, a high-performance element with high insulation resistance in the electrode trimming portion can be obtained, and continuous electrode grinding with laser light is possible. Therefore, the advantageous effect of high performance and excellent mass productivity can be obtained.

[Brief description of drawings]

FIG. 1 is a process diagram of an electrode trimming method according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a main part of a dielectric resonator formed by using a general electrode trimming method.

3 is a cross-sectional view of a main part of the dielectric resonator shown in FIG.

FIG. 4 is a curve diagram showing a relationship between the width of a redeposited layer of electrode particles or ceramic particles scattered in a trimming portion and a no-load Q in an example of the present invention.

FIG. 5 is a sectional view of an essential part of an altered layer immediately after laser trimming formed by an electrode trimming method using a conventional laser trimming method.

[Explanation of symbols]

1 Laser trimming process 2 Altered layer etching process 3 Reoxidation process 4 Electrode part oxide layer etching process 11 Dielectric ceramic part 12 open end 13 Input / output terminals 14 Capacitance gap part 15 electrode layers 16 Altered layer with low resistance 17 Deteriorated layer made into semiconductor 18 Adhesion

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-350314 (JP, A) JP-A-4-200888 (JP, A) JP-A-7-161571 (JP, A) JP-A-5- 213684 (JP, A) JP-A-5-82386 (JP, A) JP-A-63-313046 (JP, A) Actual development 4-134290 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01P 7/04 B23K 26/00 C23F 4/04 H01P 11/00

Claims (3)

(57) [Claims] 1. An electrode trimming method for trimming an electrode portion formed on a ceramic substrate by laser light, which comprises trimming a predetermined shape by the laser light while injecting a high pressure gas to the trimming portion of the ceramic substrate. Together with the laser beam to the ceramic substrate
From electrode particles or ceramic particles scattered by minging
The redeposition layer of less than 200 μm
And laser trimming step for controlling the injection force, the tri
The trimming portion of the ceramic substrate after the bending step
Of the deteriorated layer which removes the surface modified layer by chemical etching
Etching step , and a re-oxidation step of re-oxidizing the deteriorated layer of the trimming portion by heat-treating the ceramic substrate trimmed after the deteriorated layer etching step in the atmosphere,
An electrode trimming method comprising: 2. The electrode trimming method according to claim 1 , wherein the high-pressure gas is a gas containing oxygen, nitrogen, a rare gas, or a mixed gas thereof. Wherein after said re-oxidation process, the electrode trimming method according to any one of claims 1 to 2, characterized in that an electrode oxidation layer etching step for removing the oxide layer of the electrode portion.