JP3458631B2 - Optical fiber physical quantity sensor - Google Patents

Optical fiber physical quantity sensor

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Publication number
JP3458631B2
JP3458631B2 JP34343096A JP34343096A JP3458631B2 JP 3458631 B2 JP3458631 B2 JP 3458631B2 JP 34343096 A JP34343096 A JP 34343096A JP 34343096 A JP34343096 A JP 34343096A JP 3458631 B2 JP3458631 B2 JP 3458631B2
Authority
JP
Japan
Prior art keywords
sensor
optical fiber
physical quantity
protective material
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP34343096A
Other languages
Japanese (ja)
Other versions
JPH10185712A (en
Inventor
圭介 福地
哲 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP34343096A priority Critical patent/JP3458631B2/en
Publication of JPH10185712A publication Critical patent/JPH10185712A/en
Application granted granted Critical
Publication of JP3458631B2 publication Critical patent/JP3458631B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、光ファイバにセン
サ部を形成し、この光ファイバでセンサ部から光を導く
ようにした光ファイバ物理量センサに係り、特に、正確
な測定が可能で、しかも耐震性等の機械的な耐久性を向
上させた光ファイバ物理量センサに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical fiber physical quantity sensor in which a sensor section is formed in an optical fiber, and light is guided from the sensor section by the optical fiber. The present invention relates to an optical fiber physical quantity sensor having improved mechanical durability such as earthquake resistance.

【0002】[0002]

【従来の技術】温度や歪み、応力等の物理量を検知する
ための接触型のセンサは種々知られている。電気を利用
したセンサとして、温度の測定に用いるセンサには電気
的抵抗が温度によって変化するサーミスタや熱電対、歪
みの測定に用いるセンサには電気的抵抗が歪みによって
変化する歪みゲージがある。物理量に応じて光特性量が
変化するセンサを利用した測定器としては、温度感受性
のある蛍光材料からの光量を光ファイバに取り込んで温
度を測定する光ファイバ温度計、導波路コア内部に形成
したグレーティング(格子)に歪みが加わると格子間隔
の変化によって反射光波長が変化することから歪量を測
定するファイバブラッググレーティング型歪計などがあ
る。
2. Description of the Related Art Various contact-type sensors for detecting physical quantities such as temperature, strain, and stress are known. As a sensor using electricity, a sensor used for measuring temperature includes a thermistor or thermocouple whose electric resistance changes with temperature, and a sensor used for measuring strain has a strain gauge whose electric resistance changes due to strain. An optical fiber thermometer that measures the temperature by incorporating the amount of light from a temperature-sensitive fluorescent material into an optical fiber as a measuring device that uses a sensor whose optical characteristic amount changes according to the physical quantity, is formed inside the waveguide core. When a strain is applied to the grating (grating), the reflected light wavelength changes due to a change in the lattice spacing, and thus there is a fiber Bragg grating type strain gauge which measures the amount of strain.

【0003】[0003]

【発明が解決しようとする課題】電気式のセンサを用い
て多点の測定を行う場合、それぞれの測定点にセンサを
配置すると共に各センサへ電源線や信号線を配線する必
要があるため、測定システムが大掛りになりコストも高
くなる。また、電気式のセンサは、電気的な環境に左右
されやすく、例えば電磁ノイズによる誤動作の可能性が
ある。また、電気式のセンサは、電気的な絶縁性が要求
される被測定物には接触させることができない。
When performing multi-point measurement using an electric sensor, it is necessary to dispose a sensor at each measurement point and connect a power supply line and a signal line to each sensor. The measuring system becomes large and the cost becomes high. Further, the electric sensor is easily influenced by the electric environment, and there is a possibility of malfunction due to, for example, electromagnetic noise. Further, the electric sensor cannot be brought into contact with the object to be measured which is required to have electrical insulation.

【0004】光式のセンサは、上記のような電気式のセ
ンサが持つ欠点がなく、しかも光ファイバの伝送損失の
少なさから遠隔での測定にも適している。しかし、光フ
ァイバは、その材料がガラスやプラスチックであるため
機械的な強度が低い。従って、このような光式のセンサ
を利用した測定システムには、機械的な耐久性、とりわ
け耐震性の問題がある。例えば、物理量に応じて光特性
量が変化するセンサ部を光ファイバの先端に形成し、こ
のセンサ部を被測定物に接触させると共に、上記光ファ
イバを上記センサ部から光特性量の検出器まで光を導く
リード部としたセンサにおいて、被測定物が振動したた
めにセンサ部が被測定物と共に振動した場合、リード部
とセンサ部との境界に応力が集中し、この境界の近傍で
光ファイバが断線することがある。
The optical sensor does not have the drawbacks of the electric sensor as described above and is suitable for remote measurement because of the small transmission loss of the optical fiber. However, the optical fiber has low mechanical strength because the material is glass or plastic. Therefore, the measurement system using such an optical sensor has a problem of mechanical durability, especially seismic resistance. For example, a sensor unit whose optical characteristic amount changes according to a physical quantity is formed at the tip of an optical fiber, and this sensor unit is brought into contact with an object to be measured, and the optical fiber is connected from the sensor unit to a detector of the optical characteristic amount. In a sensor with a lead that guides light, when the sensor part vibrates with the object to be measured because the object to be measured vibrates, stress concentrates on the boundary between the lead part and the sensor part, and the optical fiber near the boundary. May break.

【0005】そこで、本発明の目的は、上記課題を解決
し、正確な測定が可能で、しかも耐震性等の機械的な耐
久性を向上させた光ファイバ物理量センサを提供するこ
とにある。
Therefore, an object of the present invention is to provide an optical fiber physical quantity sensor that solves the above-mentioned problems, enables accurate measurement, and has improved mechanical durability such as earthquake resistance.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に本発明は、温度や歪み等の物理量に応じて光特性量が
変化するセンサ部を光ファイバの先端に形成し、上記光
ファイバを上記センサ部から光を導くリード部とし、導
かれた光の光特性量から被測定物の物理量を測定する光
ファイバ物理量センサにおいて、上記センサ部を少なく
とも樹脂等の固定剤を介して被測定物に固定し、上記リ
ード部の周囲を金属等の保護材で覆うと共に、上記リー
ド部と上記保護材との間に上記固定剤よりも弾性率が小
さい緩衝剤を充填し、上記緩衝剤の弾性率をセンサ部に
近いところで大きく、遠いところで小さくしたものであ
る。
In order to achieve the above-mentioned object, the present invention provides a sensor section in which the optical characteristic quantity changes according to a physical quantity such as temperature and strain, at the tip of the optical fiber, An optical fiber physical quantity sensor that measures a physical quantity of an object to be measured from a light characteristic amount of the guided light as a lead section that guides light from the sensor section, and the sensor section is an object to be measured through at least a fixing agent such as resin. The lead part with a protective material such as metal , and
The elastic modulus between the cover and the protective material is smaller than that of the above fixing agent.
Fill the buffer part with a buffer material,
It is large near and small at far .

【0007】上記保護材を被測定物に固定してもよい。The protective material may be fixed to the object to be measured.

【0008】上記センサ部及び上記保護材を被測定物内
に挿入し、このセンサ部の周囲を上記固定剤で埋め込ん
でもよい。
The sensor section and the protective material may be inserted into the object to be measured, and the periphery of the sensor section may be filled with the fixative.

【0009】[0009]

【0010】[0010]

【0011】[0011]

【発明の実施の形態】以下、本発明の実施形態を添付図
面に基づいて詳述する。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

【0012】図1に示されるように、本発明の光ファイ
バ物理量センサは、温度や歪み等の物理量に応じて光特
性量が変化するセンサ部21を光ファイバ心線2の先端
に形成したものであり、このセンサ部21から図示しな
い光特性量の検出器までの光ファイバ心線2は、測定用
の光を導くリード部22となっている。リード部22の
周囲は保護材3で覆われている。この保護材3には、光
ファイバ心線2よりも弾性率が大きいものが使用されて
いる。ここでは、保護材3としてSUS管を用いてい
る。
As shown in FIG. 1, in the optical fiber physical quantity sensor of the present invention, a sensor portion 21 whose optical characteristic quantity changes according to a physical quantity such as temperature or strain is formed at the tip of the optical fiber core wire 2. The optical fiber core wire 2 from the sensor portion 21 to the detector of the optical characteristic amount (not shown) is a lead portion 22 that guides the measurement light. The periphery of the lead portion 22 is covered with the protective material 3. As the protective material 3, a material having an elastic modulus larger than that of the optical fiber core wire 2 is used. Here, a SUS tube is used as the protective material 3.

【0013】被測定物1には保護材3の形状に合わせた
円柱状の挿入孔4(被測定物内は点線で示す)が形成さ
れており、この挿入孔4内にセンサ部21と保護材3の
先端部とを挿入してある。保護材3の先端部(被測定物
内は破線で示す)は挿入孔4の途中まで挿入されてお
り、保護材3の先端部より先にはセンサ部21(実線で
示す)を構成する光ファイバ心線2のみが挿入されてい
る。センサ部21の周囲の挿入孔空間(点線で示した空
間)には固定剤5が埋め込まれている。この固定剤5
は、エポキシ樹脂等の後硬化する樹脂であり、充填時に
は柔軟であるが、その後、硬化することによってセンサ
部21を被測定物1に一体化させることができる。この
ようにして、センサ部21は固定剤5で埋め込まれるこ
とによって被測定物1に一体化されて固定され、また、
保護材3は挿入孔4に挿入されることによって被測定物
1に固定されている。
A cylindrical insertion hole 4 (indicated by a dotted line inside the object to be measured) is formed in the object to be measured 1 in conformity with the shape of the protective material 3, and the sensor part 21 and the protective portion are protected in the insertion hole 4. The tip of the material 3 is inserted. The tip of the protective material 3 (indicated by a broken line inside the object to be measured) is inserted partway into the insertion hole 4, and the light forming the sensor portion 21 (indicated by a solid line) is located ahead of the tip of the protective material 3. Only the fiber core wire 2 is inserted. The fixative 5 is embedded in the insertion hole space (the space indicated by the dotted line) around the sensor portion 21. This fixative 5
Is a resin that is post-cured, such as an epoxy resin, and is flexible at the time of filling, but the sensor unit 21 can be integrated with the DUT 1 by curing thereafter. In this way, the sensor section 21 is integrally fixed to the DUT 1 by being embedded with the fixative 5, and
The protective material 3 is fixed to the DUT 1 by being inserted into the insertion hole 4.

【0014】保護材3とリード部22の光ファイバ心線
2との間に形成される空間(破線で示した空間)には、
センサ部21に近い側に、ジェルからなる緩衝剤7が充
填されている。この緩衝剤7には、固定剤5よりも弾性
率が小さいものが使用されている。なお、この緩衝剤7
には、センサ部21に近いほど弾性率が大きく、センサ
部21から遠いほど弾性率が小さくなるように、連続的
又は段階的に弾性率を変えたものを使用してもよい。
In the space formed between the protective material 3 and the optical fiber core wire 2 of the lead portion 22 (the space shown by the broken line),
The buffer 7 made of gel is filled on the side close to the sensor unit 21. The buffer 7 has a smaller elastic modulus than the fixing agent 5. In addition, this buffer 7
The elastic modulus may be continuously or stepwise changed such that the elastic modulus increases as the distance from the sensor unit 21 increases and the elastic modulus decreases as the distance from the sensor unit 21 increases.

【0015】図1のセンサにあっては、まず、センサ部
21を固定剤5で被測定物1に固定して一体化させてい
るので、被測定物1の温度や歪み等の物理量がセンサ部
21に効果的に伝わり、被測定物1の物理量を正確に測
定することができる。この形態では、センサ部21が被
測定物1内に挿入されているので、被測定物内部の物理
量変化に従ってセンサ部21の光特性量が変化する。リ
ード部22のセンサ部21とは反対側に物理量測定器
(図示せず)を接続し、この物理量測定器からプローブ
光を送出し、物理量測定器に戻ってきた光の波長や光量
などの特性量を測定することにより被測定物1の物理量
を測定することができる。
In the sensor of FIG. 1, first, since the sensor portion 21 is fixed to the object to be measured 1 with the fixing agent 5 and integrated, the physical quantity such as temperature and strain of the object to be measured 1 is measured by the sensor. The physical quantity of the DUT 1 is effectively transmitted to the portion 21, and the physical quantity of the DUT 1 can be accurately measured. In this embodiment, since the sensor unit 21 is inserted into the DUT 1, the optical characteristic amount of the sensor unit 21 changes according to the change in the physical quantity inside the DUT. A physical quantity measuring instrument (not shown) is connected to the side of the lead section 22 opposite to the sensor section 21, a probe light is sent from this physical quantity measuring instrument, and characteristics such as wavelength and quantity of light returned to the physical quantity measuring instrument. By measuring the quantity, the physical quantity of the DUT 1 can be measured.

【0016】また、リード部22の周囲を光ファイバ心
線2よりも弾性率が大きい保護材3で覆うと共にこの保
護材3を被測定物1に固定したので、従来はリード部2
2とセンサ部21との境界に集中していた応力が保護材
3の長さ方向に分散されて局部的に加わる応力が緩和さ
れる。これにより、センサの機械的な強度が高められ、
耐久性が向上する。
Further, since the periphery of the lead portion 22 is covered with the protective material 3 having a larger elastic modulus than the optical fiber core wire 2 and the protective material 3 is fixed to the DUT 1, the lead portion 2 is conventionally used.
The stress concentrated on the boundary between the sensor 2 and the sensor portion 21 is dispersed in the length direction of the protective material 3, and the stress locally applied is relaxed. This enhances the mechanical strength of the sensor,
The durability is improved.

【0017】また、リード部22と保護材3との間に固
定剤5よりも弾性率が小さい緩衝剤7を充填したので、
センサ部21が被測定物1と共に振動した場合でもセン
サ部近傍のリード部22はセンサ部21の振動に追随し
やすくなり、リード部22とセンサ部21との境界に加
わる応力が緩和される。さらに、緩衝剤7の弾性率がセ
ンサ部21から離れるに従って小さくなっていると、応
力を集中させずに分散させることができる。これにより
センサの耐震性が向上する。
Since the buffer 7 having a smaller elastic modulus than the fixing agent 5 is filled between the lead portion 22 and the protective material 3,
Even when the sensor part 21 vibrates together with the DUT 1, the lead part 22 near the sensor part easily follows the vibration of the sensor part 21, and the stress applied to the boundary between the lead part 22 and the sensor part 21 is relaxed. Furthermore, if the elastic modulus of the buffer 7 decreases as the distance from the sensor portion 21 increases, the stress can be dispersed without being concentrated. This improves the seismic resistance of the sensor.

【0018】次に、図2に示されるように、本発明の光
ファイバ物理量センサの別の形態は、被測定物1の表面
に保護材3を嵌め込むためのU溝8を掘り、このU溝8
に保護材3を嵌め込んである。センサ部21は被測定物
1の表面に接触している。保護材3は、留め具6によっ
て被測定物1に固定されている。センサ部21は、樹脂
等の固定剤5で被測定物1の表面に固定されている。そ
の他の構成は図1のものと同様になっている。従って、
このセンサは、被測定物1の表面の物理量がセンサ部2
1に効果的に伝わり、被測定物表面の物理量を正確に測
定することができると共に、応力が分散されるので、耐
久性、耐震性に優れている。
Next, as shown in FIG. 2, in another embodiment of the optical fiber physical quantity sensor of the present invention, a U groove 8 for fitting the protective material 3 into the surface of the DUT 1 is dug, and the U groove 8 is formed. Groove 8
Protective material 3 is fitted in. The sensor section 21 is in contact with the surface of the DUT 1. The protective material 3 is fixed to the DUT 1 by a fastener 6. The sensor section 21 is fixed to the surface of the DUT 1 with a fixing agent 5 such as resin. The other structure is similar to that of FIG. Therefore,
In this sensor, the physical quantity of the surface of the DUT 1 is the sensor unit 2
1, the physical quantity of the surface of the object to be measured can be accurately measured, and the stress is dispersed. Therefore, the durability and the earthquake resistance are excellent.

【0019】以上、2つの実施形態を説明したが、これ
に限らず特許請求の範囲に記載した要件を満たすもので
あれば、同等の効果を奏することができる。例えば、図
1の場合、保護材3を挿入孔4の途中まで挿入し、その
先にセンサ部21が出るようにしたが、センサ部21の
先端まで保護材3を設けてもよい。このようにすると、
センサ部21を被測定物1に実装するときに光ファイバ
心線を傷つけることがない。この場合、保護材3の先端
部内に、センサ部21を保護材3に一体化させて固定す
るための固定剤を充填し、これにより被測定物1の物理
量をセンサ部21に効率よく伝達させることができる。
また、図1の場合、緩衝剤7を保護材3とリード部22
との間の空間のうちセンサ部21に近い側にのみ充填し
たが、リード部22の全長に亘って充填してもよく、こ
のようにすると、リード部22を覆う保護材3に振動が
加わった場合にもリード部22の光ファイバ心線2に加
わる振動を緩和することができる。
Although the two embodiments have been described above, the present invention is not limited to this, and the same effect can be obtained as long as the requirements described in the claims are satisfied. For example, in the case of FIG. 1, the protective material 3 is inserted partway into the insertion hole 4 and the sensor portion 21 is exposed at the tip thereof, but the protective material 3 may be provided up to the tip of the sensor portion 21. This way,
The optical fiber core wire is not damaged when the sensor unit 21 is mounted on the DUT 1. In this case, the tip of the protective member 3 is filled with a fixing agent for fixing the sensor unit 21 integrally with the protective member 3, and thereby the physical quantity of the DUT 1 is efficiently transmitted to the sensor unit 21. be able to.
Further, in the case of FIG. 1, the buffer 7 is used as the protective material 3 and the lead portion 22.
Although it is filled only in the space near the sensor portion 21 in the space between and, it may be filled over the entire length of the lead portion 22. In this case, vibration is applied to the protective material 3 covering the lead portion 22. Even in the case of, the vibration applied to the optical fiber core wire 2 of the lead portion 22 can be mitigated.

【0020】[0020]

【発明の効果】本発明は次の如き優れた効果を発揮す
る。
The present invention exhibits the following excellent effects.

【0021】(1)被測定物の温度や歪み等の物理量が
センサ部に効果的に伝わり、被測定物の物理量を正確に
測定することができる。
(1) Physical quantities such as temperature and strain of the object to be measured are effectively transmitted to the sensor section, and the physical quantity of the object to be measured can be accurately measured.

【0022】(2)応力が緩和されるため、センサの機
械的な強度が高められ、耐久性が向上する。
(2) Since the stress is relieved, the mechanical strength of the sensor is increased and the durability is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施形態を示す光ファイバ物理量セ
ンサの斜視図である。
FIG. 1 is a perspective view of an optical fiber physical quantity sensor showing an embodiment of the present invention.

【図2】本発明の他の実施形態を示す光ファイバ物理量
センサの斜視図である。
FIG. 2 is a perspective view of an optical fiber physical quantity sensor showing another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 被測定物 2 光ファイバ心線 3 保護材 4 挿入孔 5 固定剤 7 緩衝剤 8 U溝 21 センサ部 22 リード部 1 DUT 2 Optical fiber core 3 protective materials 4 insertion holes 5 fixative 7 buffer 8 U groove 21 Sensor part 22 Lead

フロントページの続き (56)参考文献 特開 平7−324986(JP,A) 特開 平8−201186(JP,A) 特開 平5−296736(JP,A) 特開 平6−221931(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01L 1/24 G01B 11/16 G01K 11/12 Continuation of the front page (56) Reference JP-A-7-324986 (JP, A) JP-A-8-201186 (JP, A) JP-A-5-296736 (JP, A) JP-A-6-221931 (JP , A) (58) Fields surveyed (Int.Cl. 7 , DB name) G01L 1/24 G01B 11/16 G01K 11/12

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 温度や歪み等の物理量に応じて光特性量
が変化するセンサ部を光ファイバの先端に形成し、上記
光ファイバを上記センサ部から光を導くリード部とし、
導かれた光の光特性量から被測定物の物理量を測定する
光ファイバ物理量センサにおいて、上記センサ部を少な
くとも樹脂等の固定剤を介して被測定物に固定し、上記
リード部の周囲を金属等の保護材で覆うと共に、上記リ
ード部と上記保護材との間に上記固定剤よりも弾性率が
小さい緩衝剤を充填し、上記緩衝剤の弾性率をセンサ部
に近いところで大きく、遠いところで小さくしたことを
特徴とする光ファイバ物理量センサ。
1. A sensor section, whose optical characteristic quantity changes according to a physical quantity such as temperature and strain, is formed at the tip of an optical fiber, and the optical fiber is used as a lead section for guiding light from the sensor section.
In an optical fiber physical quantity sensor that measures a physical quantity of an object to be measured from an optical characteristic quantity of guided light, the sensor unit is fixed to the object to be measured through at least a fixing agent such as a resin, and the periphery of the lead portion is metal. Cover it with a protective material such as
The elastic modulus between the cord and the protective material is higher than that of the fixing agent.
Fill a small buffer, and adjust the elastic modulus of the above buffer to the sensor section.
An optical fiber physical quantity sensor characterized in that it is made larger at a position closer to and smaller at a distance .
【請求項2】 上記保護材を被測定物に固定したことを
特徴とする請求項1記載の光ファイバ物理量センサ。
2. The optical fiber physical quantity sensor according to claim 1, wherein the protective material is fixed to an object to be measured.
【請求項3】 上記センサ部及び上記保護材を被測定物
内に挿入し、このセンサ部の周囲を上記固定剤で埋め込
んだことを特徴とする請求項1又は2記載の光ファイバ
物理量センサ。
3. The optical fiber physical quantity sensor according to claim 1, wherein the sensor section and the protective material are inserted into an object to be measured, and the periphery of the sensor section is filled with the fixative.
JP34343096A 1996-12-24 1996-12-24 Optical fiber physical quantity sensor Expired - Fee Related JP3458631B2 (en)

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Application Number Priority Date Filing Date Title
JP34343096A JP3458631B2 (en) 1996-12-24 1996-12-24 Optical fiber physical quantity sensor

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JP3458631B2 true JP3458631B2 (en) 2003-10-20

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Publication number Priority date Publication date Assignee Title
JP4588432B2 (en) * 2004-12-15 2010-12-01 富士重工業株式会社 Method for manufacturing modular sensor for damage detection

Family Cites Families (4)

* Cited by examiner, † Cited by third party
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JPH07324986A (en) * 1991-05-08 1995-12-12 Takaoka Electric Mfg Co Ltd Method for fitting optical fiber temperature sensor to uneven part
JPH05296736A (en) * 1992-04-17 1993-11-09 Takaoka Electric Mfg Co Ltd Optical fiber distortion sensor
JPH06221931A (en) * 1993-01-26 1994-08-12 Furukawa Electric Co Ltd:The Optical fiber for measuring temperature
JP3144254B2 (en) * 1995-01-24 2001-03-12 日本鋼管株式会社 Iron skin temperature distribution measurement method

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