JP3453989B2 - Optical semiconductor device module - Google Patents

Optical semiconductor device module

Info

Publication number
JP3453989B2
JP3453989B2 JP02933596A JP2933596A JP3453989B2 JP 3453989 B2 JP3453989 B2 JP 3453989B2 JP 02933596 A JP02933596 A JP 02933596A JP 2933596 A JP2933596 A JP 2933596A JP 3453989 B2 JP3453989 B2 JP 3453989B2
Authority
JP
Japan
Prior art keywords
optical semiconductor
container
semiconductor element
electronic cooling
cooling element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP02933596A
Other languages
Japanese (ja)
Other versions
JPH09223847A (en
Inventor
将人 根岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP02933596A priority Critical patent/JP3453989B2/en
Publication of JPH09223847A publication Critical patent/JPH09223847A/en
Application granted granted Critical
Publication of JP3453989B2 publication Critical patent/JP3453989B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、温度制御が必要
な光半導体素子の出射光を光ファイバーに結合する光半
導体素子モジュールに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical semiconductor element module for coupling emitted light of an optical semiconductor element that requires temperature control to an optical fiber.

【0002】[0002]

【従来の技術】図2は例えば気密を有する容器と、容器
内部に電子冷却素子を接合し、電子冷却素子の上に切削
加工により形成した平坦なWとCuを主成分とする材料
のベースを接合し、ベースの上に絶縁基板と接合してい
る光半導体素子と、温度検知部品と接合している絶縁基
板或いは温度検知部品と、片端が前記容器と接合してい
る電子回路部品と、レンズ保持部品と同一材料よりなる
ポストを接合し、ポストにレンズ保持部品を溶接してい
る従来の光半導体素子モジュールの構成説明用断面図で
あり、図2(b)は図2(a)の右側より見た図であ
る。図において1は容器、2はレンズ保持部品、3はポ
スト、4はベース、5は電子回路部品、6は電子冷却素
子、7は絶縁基板と接合された光半導体素子、8は温度
検知部品である。
2. Description of the Related Art FIG . 2 shows, for example, an airtight container and a flat base made of a material having W and Cu as main components, which is formed by joining an electronic cooling element inside the container and performing cutting on the electronic cooling element. An optical semiconductor element that is joined to an insulating substrate on a base, an insulating substrate or a temperature sensing component that is joined to a temperature detecting component, an electronic circuit component having one end joined to the container, and a lens FIG. 2B is a sectional view for explaining the configuration of a conventional optical semiconductor element module in which a post made of the same material as the holding component is joined and a lens holding component is welded to the post, and FIG. 2B is the right side of FIG. 2A. FIG. In the figure, 1 is a container, 2 is a lens holding component, 3 is a post, 4 is a base, 5 is an electronic circuit component, 6 is an electronic cooling element, 7 is an optical semiconductor element bonded to an insulating substrate, and 8 is a temperature detection component. is there.

【0003】次に動作について説明する。光半導体素子
7は駆動する際の自己発熱と、光半導体素子モジュール
の置かれる外部環境と、光半導体素子モジュール内部の
電子回路部品5の発熱により温度が変化する。
Next, the operation will be described. The temperature of the optical semiconductor element 7 changes due to self-heating during driving, an external environment in which the optical semiconductor element module is placed, and heat generation of the electronic circuit component 5 inside the optical semiconductor element module.

【0004】そして、温度検知部品8が検知した温度が
設定温度と異なる場合には光半導体素子モジュール外部
の電子冷却素子駆動装置は電子冷却素子6を温度検知部
品8が設定温度になるまで駆動する。これにより温度検
知部品8は常に設定温度で一定となる。よって温度検知
部品8と同様にベース4上に接合された光半導体素子も
ある一定温度となる。
When the temperature detected by the temperature detecting component 8 is different from the set temperature, the electronic cooling element driving device outside the optical semiconductor element module drives the electronic cooling element 6 until the temperature detecting component 8 reaches the set temperature. . As a result, the temperature detecting component 8 is always constant at the set temperature. Therefore, like the temperature detecting component 8, the optical semiconductor element bonded on the base 4 also has a certain temperature.

【0005】[0005]

【発明が解決しようとする課題】上記のような従来の光
半導体素子モジュールでは容器1の内面上に電子冷却素
子6を接合しているため、電子冷却素子6で発生した熱
を光半導体素子モジュールの放熱面である容器1の外面
まで伝導する間に、容器1の熱抵抗や容器1と電子冷却
素子6の接合部の接触熱抵抗により温度差を生じ、光半
導体素子モジュールの冷却能力が悪かった。
In the conventional optical semiconductor element module as described above, since the electronic cooling element 6 is bonded to the inner surface of the container 1, the heat generated in the electronic cooling element 6 is transferred to the optical semiconductor element module. While conducting the heat to the outer surface of the container 1 which is the heat dissipation surface, a temperature difference is generated due to the thermal resistance of the container 1 and the contact thermal resistance of the junction between the container 1 and the electronic cooling element 6, and the cooling capacity of the optical semiconductor element module is poor. It was

【0006】[0006]

【0007】[0007]

【0008】[0008]

【0009】[0009]

【0010】[0010]

【0011】[0011]

【0012】[0012]

【0013】この発明は上記のような課題を解決するた
めになされたもので、光半導体素子モジュールの外部環
境温度と光半導体素子の設定動作温度に大きな温度差を
生じた場合においても、光半導体素子にあまり影響を与
えずに正常に動作させることができる光半導体素子モジ
ュールを得るものである。
The present invention has been made in order to solve the above problems, and even when a large temperature difference occurs between the external environmental temperature of the optical semiconductor element module and the set operating temperature of the optical semiconductor element, the optical semiconductor (EN) An optical semiconductor device module that can be operated normally without affecting the device too much.

【0014】また、この発明は、光半導体素子モジュー
ルに使用する電子冷却素子の消費電力を低減するもので
ある。
The present invention also reduces the power consumption of the electronic cooling element used in the optical semiconductor element module.

【0015】[0015]

【0016】[0016]

【課題を解決するための手段】この発明の光半導体素子
モジュールは、容器1の一部或いは全部が電子冷却素子
6の絶縁基板で構成されているものである。
In the optical semiconductor element module of the present invention, a part or the whole of the container 1 is composed of an insulating substrate of the electronic cooling element 6.

【0017】[0017]

【0018】[0018]

【0019】[0019]

【0020】[0020]

【発明の実施の形態】DETAILED DESCRIPTION OF THE INVENTION

実施の形態1.図1はこの発明の実施の形態1を示す断
面図で、図1(b)は図1(a)を右側より見た図であ
り、図において2,3,4,5,6,7,8は従来の技
術と全く同一のものであるが、容器1の面は、電子冷却
素子6が挿入される開口部を有しており、電子冷却素子
6が挿入された状態において、電子冷却素子6の面と同
一平面上にあり、電子冷却素子6の面とで光半導体素子
モジュールの主要な放熱面を構成する。また、容器1と
電子冷却素子6のはめあい部分は、必要に応じて気密封
止する。
Embodiment 1. 1 is a cross-sectional view showing a first embodiment of the present invention, and FIG. 1 (b) is a view of FIG. 1 (a) seen from the right side. In FIG. 1, 2, 3, 4, 5, 6, 7, 8 is exactly the same as the prior art, but the surface of the container 1 has an opening into which the electronic cooling element 6 is inserted, and the electronic cooling element 6 is inserted in the inserted state. 6 and the surface of the electronic cooling element 6 constitute the main heat dissipation surface of the optical semiconductor element module. Further, the fitting portion between the container 1 and the electronic cooling element 6 is hermetically sealed if necessary.

【0021】従来の容器1の底部に載せていた構造では
電子冷却素子6の放熱面から出る熱は、容器1の底部に
伝わり、容器1の底部外面より外部へ放熱されていたた
め、容器1と電子冷却素子6の放熱面との接触熱抵抗と
容器1の材料特性、形状による熱抵抗により光半導体素
子モジュールの放熱効率を悪くしていた。
In the conventional structure mounted on the bottom of the container 1, the heat generated from the heat dissipation surface of the electronic cooling element 6 is transmitted to the bottom of the container 1 and is dissipated to the outside from the outer surface of the bottom of the container 1. The heat dissipation efficiency of the optical semiconductor element module is deteriorated due to the contact heat resistance with the heat dissipation surface of the electronic cooling element 6 and the heat resistance due to the material characteristics and shape of the container 1.

【0022】また、従来の光半導体素子モジュールにお
いて、容器1の底面での熱抵抗を減らすために底面の厚
さを薄くする方法もあるが、容器1の形状、材料特性に
より容器1の剛性バランスから光半導体素子モジュール
取付けの際の応力によって、容器1の主要な放熱面であ
る底面が撓み、取付面との間に隙間を生み、光半導体素
子モジュールの放熱効果を悪くする恐れがあった。
In the conventional optical semiconductor element module, there is also a method of reducing the thickness of the bottom surface of the container 1 in order to reduce the thermal resistance at the bottom surface. However, the rigidity balance of the container 1 depends on the shape and material characteristics of the container 1. Therefore, there is a risk that the bottom surface which is the main heat dissipation surface of the container 1 is bent due to the stress at the time of mounting the optical semiconductor element module, and a gap is created between the bottom surface and the mounting surface, which may deteriorate the heat dissipation effect of the optical semiconductor element module.

【0023】そこで、前記のような構成による光半導体
素子モジュールにすると、電子冷却素子の放熱面が直接
外部に出ることにより、前記容器1と電子冷却素子6の
絶縁基板との接触熱抵抗と、容器1の材料特性、形状に
よる熱抵抗が削減でき、剛性バランスについては容器1
の底部厚みが光半導体素子モジュールの放熱効率に与え
る影響が小さくなるので、厚くすることもでき、光半導
体素子モジュールの熱効率を改善できる。なお、上記実
施の形態1では容器1の一部を電子冷却素子6の絶縁基
板で構成したが、容器1の全部を上記絶縁基板で構成し
ても良い。
Therefore, in the optical semiconductor element module having the above-mentioned structure, the heat radiation surface of the electronic cooling element is directly exposed to the outside, so that the contact thermal resistance between the container 1 and the insulating substrate of the electronic cooling element 6 is increased. The thermal resistance due to the material characteristics and shape of the container 1 can be reduced.
Since the thickness of the bottom portion of the component has less influence on the heat radiation efficiency of the optical semiconductor element module, it can be made thicker and the thermal efficiency of the optical semiconductor element module can be improved. Although part of the container 1 is made of the insulating substrate of the electronic cooling element 6 in the first embodiment, the whole container 1 may be made of the insulating substrate.

【0024】[0024]

【0025】[0025]

【0026】[0026]

【0027】[0027]

【0028】[0028]

【0029】[0029]

【0030】[0030]

【0031】[0031]

【0032】[0032]

【0033】[0033]

【0034】[0034]

【0035】[0035]

【0036】[0036]

【0037】[0037]

【0038】[0038]

【0039】[0039]

【0040】[0040]

【0041】[0041]

【0042】[0042]

【発明の効果】この発明によれば、従来の構造に比べ、
容器1と電子冷却素子6の絶縁基板との接触熱抵抗、容
器1の材料特性、形状による熱抵抗がなくなり、電子冷
却素子6の消費電力を低減、或いは光半導体素子モジュ
ールの冷却能力を改善できる。
According to the present invention, compared with the conventional structure,
The contact thermal resistance between the container 1 and the insulating substrate of the electronic cooling element 6 and the thermal resistance due to the material characteristics and shape of the container 1 are eliminated, and the power consumption of the electronic cooling element 6 can be reduced or the cooling capacity of the optical semiconductor element module can be improved. .

【0043】[0043]

【0044】[0044]

【0045】[0045]

【図面の簡単な説明】[Brief description of drawings]

【図1】 この発明による光半導体素子モジュールの実
施の形態1を示す断面図である。
FIG. 1 is a sectional view showing a first embodiment of an optical semiconductor element module according to the present invention.

【図2】 従来の光半導体素子モジュールを示す断面図
である。
FIG. 2 is a cross-sectional view showing a conventional optical semiconductor device module.

【符号の説明】[Explanation of symbols]

1 容器、2 レンズ保持部品、3 ポスト、4 ベー
ス、5 電子回路部品、6 電子冷却素子、7 光半導
体素子、8 温度検知部品
1 container, 2 lens holding parts, 3 posts, 4 bases, 5 electronic circuit parts, 6 electronic cooling elements, 7 optical semiconductor elements, 8 temperature detecting parts .

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 光半導体素子と、 前記光半導体素子に熱的に結合された電子冷却素子と、 前記光半導体素子に熱的に結合された温度検知部品と、前記光半導体素子および温度検知部品を収容するととも
に、前記電子冷却素子の放熱面を直接外部に露出させる
ように、当該電子冷却素子が挿入され嵌合された開口部
を底部に有した容器とを備えた光半導体素子モジュール
であって、 当該光半導体素子モジュールの取付けの際の応力によっ
て、前記容器の底面が撓まないように、当該容器におけ
る底部の厚みを厚くした ことを特徴とする光半導体素子
モジュール。
1. An optical semiconductor element, an electronic cooling element thermally coupled to the optical semiconductor element, a temperature sensing component thermally coupled to the optical semiconductor element , the optical semiconductor element and a temperature sensing component. Accommodating
In addition, the heat dissipation surface of the electronic cooling element is directly exposed to the outside.
So that the electronic cooling element is inserted and fitted
Optical semiconductor element module including a container having a bottom
Due to the stress during mounting of the optical semiconductor device module.
The bottom of the container so that it does not bend.
The optical semiconductor element module is characterized in that the thickness of the bottom portion is increased.
【請求項2】 前記容器は、底面を取り付ける取付面と
の間に隙間を生じないように、底部の厚みを厚くしたこ
とを特徴とする請求項1記載の光半導体素子モジュー
ル。
2. The container has a mounting surface for mounting a bottom surface.
Make sure that the bottom is thick so that there is no gap between
An optical semiconductor device module according to claim 1, characterized in that
Le.
【請求項3】 前記容器は、底面が前記電子冷却素子の
底面と同一平面上にあって、当該電子冷却素子との嵌合
部を気密封止したこと特徴とする請求項1記載の光半導
体素子モジュール。
3. The container has a bottom surface of the electronic cooling element.
Fits with the electronic cooling element on the same plane as the bottom surface
The optical semiconductor according to claim 1, wherein the portion is hermetically sealed.
Body element module.
JP02933596A 1996-02-16 1996-02-16 Optical semiconductor device module Expired - Lifetime JP3453989B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP02933596A JP3453989B2 (en) 1996-02-16 1996-02-16 Optical semiconductor device module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02933596A JP3453989B2 (en) 1996-02-16 1996-02-16 Optical semiconductor device module

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2003087495A Division JP3893356B2 (en) 2003-03-27 2003-03-27 Optical semiconductor element module
JP2003087494A Division JP3893355B2 (en) 2003-03-27 2003-03-27 Optical semiconductor element module

Publications (2)

Publication Number Publication Date
JPH09223847A JPH09223847A (en) 1997-08-26
JP3453989B2 true JP3453989B2 (en) 2003-10-06

Family

ID=12273374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02933596A Expired - Lifetime JP3453989B2 (en) 1996-02-16 1996-02-16 Optical semiconductor device module

Country Status (1)

Country Link
JP (1) JP3453989B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4833440B2 (en) * 2000-05-26 2011-12-07 古河電気工業株式会社 Manufacturing method of semiconductor laser module
KR100414666B1 (en) * 2001-11-08 2004-01-13 삼성전자주식회사 Optical communication module with adiabatic structure
GB2404281A (en) * 2003-07-25 2005-01-26 Agilent Technologies Inc Optoelectronic assembly with thermoelectric cooler

Also Published As

Publication number Publication date
JPH09223847A (en) 1997-08-26

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