JP3450001B1 - LED deterioration inspection method - Google Patents

LED deterioration inspection method

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Publication number
JP3450001B1
JP3450001B1 JP2002338260A JP2002338260A JP3450001B1 JP 3450001 B1 JP3450001 B1 JP 3450001B1 JP 2002338260 A JP2002338260 A JP 2002338260A JP 2002338260 A JP2002338260 A JP 2002338260A JP 3450001 B1 JP3450001 B1 JP 3450001B1
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Japan
Prior art keywords
led
current
voltage
inspected
value
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JP2002338260A
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JP2004170311A (en
Inventor
小方冲
Original Assignee
株式会社テクノローグ
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Abstract

【要約】 【課題】 静電破壊やクラックによる劣化のあるLED
を簡単,確実に選別する。 【解決手段】 1. 1μA以下の微弱定電流をLED
の順方向に印加して第1の電圧を測定し、一定値以下の
ものを排除する。 次いで、その約10倍の電流を印加
して、第2の電圧を測定し、第1の電圧との差の値によ
り最終選別を行う。 2. 0.01μA〜1mAの範
囲の複数の定電流をLEDに流し、そのときの電圧が電
流値の対数と比例するか歪かにより選別を行う。
[PROBLEMS] An LED having deterioration due to electrostatic breakdown and cracks
Is easily and reliably sorted. [MEANS FOR SOLVING PROBLEMS] LED with a weak constant current of 1μA or less
The first voltage is measured by applying the voltage in the forward direction, and those below a certain value are excluded. Next, a current about 10 times the current is applied, the second voltage is measured, and the final selection is performed based on the value of the difference from the first voltage. 2. A plurality of constant currents in the range of 0.01 μA to 1 mA are supplied to the LED, and selection is performed depending on whether the voltage at that time is proportional to the logarithm of the current value or whether the voltage is distorted.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、発光ダイオード
(LED)の検査方法に関するもので、特に静電破壊
(ESD)や、機械的衝撃によって生じたクラックによ
る劣化品を検査する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting a light emitting diode (LED), and more particularly to a method for inspecting a deteriorated product due to electrostatic discharge (ESD) or a crack caused by mechanical shock.

【0002】[0002]

【従来の技術】LED製造工程おける不良品を選別する
一般的検査方法としては、PN接合の順方向に、ほぼ点
灯に要する電流値に近い電流(ミリアンペア(mA)以
上のオーダー)を流し、電圧降下の大小を測定すること
によって行っている。しかしながら、この検査はPN接
合の特性を確認するための検査であり、静電破壊やクラ
ックによる劣化品は検出できない。このため、特に静電
破壊やクラックによる劣化品を検査する方法としては、
LEDに逆電圧を印加し、その際に生じる漏れ電流の有
無によって検査を行う方法がある。しかしながら、この
方法においても漏れ電流の有無と、劣化との相関関係が
不安定で信頼性が低く、劣化品を確実に検出することは
困難であった。これらの問題を解決する一方法として、
特開2002−156402号の方法が提案されてい
る。この方法はPN接合の順方向に1乃至10μA程度
の測定用電流を流すと共に、接合を加熱するための電流
をパルス状に流し、温度の異なる二点における電圧の変
化によって劣化を判定しようとするものである。
2. Description of the Related Art As a general inspection method for selecting defective products in an LED manufacturing process, a current (on the order of milliamperes (mA) or more) close to the current value required for lighting is applied in the forward direction of a PN junction, and a voltage is applied. This is done by measuring the magnitude of the descent. However, this inspection is an inspection for confirming the characteristics of the PN junction, and a deteriorated product due to electrostatic breakdown or crack cannot be detected. Therefore, as a method for inspecting deteriorated products due to electrostatic breakdown or cracks,
There is a method in which a reverse voltage is applied to the LED and inspection is performed depending on the presence or absence of a leakage current generated at that time. However, even in this method, the correlation between the presence or absence of leakage current and deterioration is unstable and reliability is low, and it is difficult to reliably detect a deteriorated product. One way to solve these problems is
The method of Japanese Patent Laid-Open No. 2002-156402 has been proposed. In this method, a current for measurement of about 1 to 10 μA is passed in the forward direction of the PN junction, a current for heating the junction is passed in a pulse shape, and deterioration is determined by a change in voltage at two points at different temperatures. It is a thing.

【0003】[0003]

【発明が解決しようとする課題】特開2002−156
402号に示された方法は、測定用電流とは別個に加熱
用電流を必要とし、温度の設定も容易ではない。本発明
は、そのような特殊な手段を必要とすることなく劣化を
簡単且つ確実に検出しようとするものである。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
The method shown in No. 402 requires a heating current separately from the measurement current, and it is not easy to set the temperature. The present invention seeks to detect deterioration easily and reliably without the need for such special means.

【0004】[0004]

【課題を解決するための手段】本発明は、静電破壊や、
機械的衝撃によって発生したクラックによって劣化した
LEDが、LEDの検査や点灯に通常使用する電流(ミ
リアンペアのオーダー)の1万分の1程度の微弱な電流
(約0.1マイクロアンペア)付近で、特異な電流‐電
圧特性を示すことを発見し、これを用いた劣化したLE
Dの検査方法を提案するものである。
SUMMARY OF THE INVENTION The present invention is directed to electrostatic breakdown,
An LED that has deteriorated due to cracks caused by mechanical impact is unique near a weak current (about 0.1 microamperes), which is about 1 / 10,000 of the current normally used for LED inspection and lighting (on the order of milliamperes). It has been discovered that it exhibits excellent current-voltage characteristics, and deteriorated LE using this
It proposes the inspection method of D.

【0005】[0005]

【発明の実施の形態】以下発明の実施の形態を図面を参
照して説明する。図1は本発明の方法を実施するために
用いられるLED検査装置の基本的構成を示すブロック
図である。図1において、1は定電流電源でマイクロア
ンペア(μA)からミリアンペア(mA)のオーダーの
定電流を可変的に外部に供給できる能力を有している。
LEDは被検査発光ダイオードで検査装置に容易に着脱
できるように取付けられる。Rpは被検査LEDが劣化
している場合に生じる仮想的抵抗である。劣化が全くな
い理想的LEDの場合は、Rpは存在しないが、劣化が
生ずると、Rpはメグオーム(MΩ)オーダーの抵抗値
になる。2は高入力抵抗バッファーアンプ,3はA−D
変換器,4は制御・演算回路で、定電流電源1の電流I
fを制御する制御回路と、順方向電圧値VFを演算して
基準値と比較するための演算回路が合体したものであ
る。Ifは、定電流電源1から、LEDに印加される電
流を示す。VFは、LED端子間の順方向電圧を示す。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing the basic configuration of an LED inspection device used to carry out the method of the present invention. In FIG. 1, reference numeral 1 denotes a constant current power supply, which has a capability of variably supplying a constant current of the order of microampere (μA) to milliampere (mA) to the outside.
The LED is a light emitting diode to be inspected and is attached to the inspection device so as to be easily attached and detached. Rp is a virtual resistance generated when the LED to be inspected is deteriorated. In the case of an ideal LED having no deterioration, Rp does not exist, but when deterioration occurs, Rp has a resistance value of the order of megohms (MΩ). 2 is a high input resistance buffer amplifier, 3 is AD
The converter, 4 is a control / arithmetic circuit, which is the current I of the constant current power supply 1.
It is a combination of a control circuit for controlling f and a calculation circuit for calculating the forward voltage value VF and comparing it with a reference value. If represents the current applied to the LED from the constant current power supply 1. VF represents the forward voltage between the LED terminals.

【0006】劣化が全くない、即ちRpが存在しない理
想的LEDのPN接合の電圧(v),電流(I)特性
は、下記の一般式で表される。 I=Io{exp(eV/K・T)−1} ここで、e :電荷量 K:ボルッマン係数 T :絶対温度 電圧Vは、電流Iの対数に比例している。反対にRpが
存在し、その値が正常値に比べて低い場合は、上記数式
に示す比例関係は維持できなくなる。本発明者はLED
に0.1μA程度の微弱電流を流した場合は、この傾向
が特に顕著に表れることを発見し、実験により確認し
た。本発明はその点に着目しLEDの劣化品を検知しよ
うとするものである。
The voltage (v) and current (I) characteristics of the PN junction of an ideal LED having no deterioration, that is, no Rp, can be expressed by the following general formula. I = Io {exp (eV / K B · T) -1} where, e: charge amount K B: Borumman Factor T: absolute temperature voltage V is proportional to the logarithm of the current I. On the contrary, when Rp is present and its value is lower than the normal value, the proportional relationship shown in the above formula cannot be maintained. The inventor is LED
When a weak current of about 0.1 μA was applied to the device, it was found that this tendency was particularly remarkable and was confirmed by experiments. The present invention focuses on this point and detects an LED deterioration product.

【0007】図2のグラフは上記関係を説明するグラフ
で、このグラフは図1のブロック図に示す装置により、
複数のLEDを測定した結果得られたものである。縦軸
には電圧VFを、横軸には電流Ifを対数目盛りによっ
て表している。グラフ上の線aは、正常な(劣化のほと
んどない)LEDが示す特性を表している。定電流電源
1により、電流を0.01μAから10mAの範囲に増
加させると、電圧VFもほぼ直線的に増加する。点線
b,c,dで表した曲線は劣化のあるLEDの示す特性
である。bは劣化程度が少なく、dは劣化程度の大きい
もので、cはその中間である。
The graph of FIG. 2 is a graph for explaining the above relationship. This graph is obtained by the device shown in the block diagram of FIG.
It is obtained as a result of measuring a plurality of LEDs. The vertical axis represents the voltage VF and the horizontal axis represents the current If on a logarithmic scale. The line a on the graph represents the characteristics of a normal (almost no deterioration) LED. When the current is increased from 0.01 μA to 10 mA by the constant current power supply 1, the voltage VF also increases almost linearly. The curves represented by the dotted lines b, c, d are the characteristics of the deteriorated LED. The degree of deterioration of b is small, the degree of deterioration of d is large, and c is in the middle.

【0008】このグラフより明らかな如く、0.1μA
の印加電流において、aとb,c,dは電圧VFに顕著
な有意の差が生じている。しかし、電流が0.1mAを
超えると、何れもaの直線に収斂し、有意な差は生じな
くなる。従って、0.1μA程度の微弱電流を流したと
きのVF1を測定すれば、正常品と非正常品の第1の選
択ができる。図1に示す演算回路4に、基準データとし
てVF1が2.0V以上のものを合格の基準値として入
力しておけばaのみが合格品となり、b,c,dは不合
格品となる。基準データとしてVF1が1.8V以上の
ものを合格の基準値として入力しておけばa,bが合格
品、c,dが不合格品となる。請求項1の発明において
はこれが第一の検査工程となる。Ifの最適電流値とV
Fの最適電圧値は、測定するLEDの規格や型式等によ
り異なるので、特定の数値を規定することは難しいが、
PN接合の良否の測定に用いられる電流が通常1mA以
上であるのに対し、その一万分の1以下の微弱電流を用
いることが本発明の特徴の一つである。
As is clear from this graph, 0.1 μA
In the applied current of, there is a significant difference in the voltage VF between a and b, c, d. However, when the current exceeds 0.1 mA, they all converge to the straight line a, and no significant difference occurs. Therefore, by measuring VF1 when a weak current of about 0.1 μA is applied, the first selection between the normal product and the abnormal product can be made. If VF1 having a VF1 of 2.0 V or more is input as a reference value for acceptance into the arithmetic circuit 4 shown in FIG. 1, only a is a passed product, and b, c and d are rejected products. If VF1 of 1.8 V or more is input as the reference data as the reference value of the acceptance, a and b are acceptable products and c and d are unacceptable products. In the invention of claim 1, this is the first inspection step. Optimum current value of If and V
The optimum voltage value of F varies depending on the standard and model of the LED to be measured, so it is difficult to specify a specific value,
One of the features of the present invention is that the current used for measuring the quality of the PN junction is usually 1 mA or more, while the weak current of 1 / 10,000 or less thereof is used.

【0009】次に、上記第一の検査工程において合格の
判定がされたものについて、制御・演算回路4から定電
流電源1に対し、電流値を約1μAに引き上げるよう指
示が行われ、それによって生じた電圧VF2を測定す
る。A−D変換器3にはVF1が記憶されているので、
制御・演算回路1においてVF2とVF1の差が算出さ
れ、これが基準データと比較され、一定値を超えたもの
を不合格品と判定する。例えば、VF1−VF2を0.
3V以下と基準データを与えておくと、aは合格となり
bは不合格となる。請求項1の発明において、これが第
二の検査工程となる。請求項1の発明においては、第一
の検査工程によって、第一段階の選別を行い、第一段階
の選別を通過したものについて、第二の検査工程におい
て第二段階の選別を行うので、従来選別が困難であった
劣化品を正確で確実に判定できる特徴がある。
Next, with respect to the products judged to pass in the first inspection step, the control / arithmetic circuit 4 instructs the constant current power supply 1 to increase the current value to about 1 μA, whereby The resulting voltage VF2 is measured. Since VF1 is stored in the A / D converter 3,
The difference between VF2 and VF1 is calculated in the control / arithmetic circuit 1, and the difference is compared with the reference data, and those exceeding a certain value are judged as rejected products. For example, if VF1-VF2 is 0.
When 3 V or less and standard data are given, a is a pass and b is a fail. In the invention of claim 1, this is the second inspection step. According to the first aspect of the invention, the first inspection step performs the first-stage selection, and the second inspection step performs the second-stage selection for those that have passed the first-stage selection. It has the feature that it can accurately and reliably determine deteriorated products that were difficult to sort.

【0010】「0006」項記載の数式及び図2のグラ
フから明らかな如く、劣化の少ないLEDは0.1μA
から0.1mAの範囲に亘って電流‐電圧特性がほぼ直
線的(比例的)に変化する特徴がある。従って、被検査
LEDに0.1μAから0.1mAまでの電流を10倍
ずつ段階的に加え、そのときのVFがほぼ直線的に増加
すればそのLEDは正常であると判定できることが明ら
かである。請求項2の発明はこの方法に関するものであ
る。
As is clear from the mathematical expression described in the paragraph “0006” and the graph of FIG. 2, the LED with less deterioration is 0.1 μA.
The characteristic is that the current-voltage characteristic changes almost linearly (proportionally) over the range from 0.1 mA to 0.1 mA. Therefore, it is apparent that the LED can be determined to be normal if a current of 0.1 μA to 0.1 mA is stepwise applied to the LED to be inspected by a factor of 10 and the VF at that time increases substantially linearly. . The invention of claim 2 relates to this method.

【0011】具体的には図1に示すと同じ装置を用い、
定電流電源1からは最初0.1μAの電流をLEDに流
し、そのときのVFをA−D変換器3で測定し記憶す
る。次に制御・演算回路4の指示により、10倍の電流
1μAを流し、そのときの電圧VFを測定する。同様に
電流を10倍ずつ増加し、VFが比例的に増加するかを
演算し、これが基準値を外れた場合は不合格品と判定す
る。
Specifically, the same device as shown in FIG. 1 is used,
A current of 0.1 μA is first applied to the LED from the constant current power supply 1, and the VF at that time is measured by the A / D converter 3 and stored. Then, according to an instruction from the control / arithmetic circuit 4, a 10 times larger current of 1 μA is passed and the voltage VF at that time is measured. Similarly, the current is increased by 10 times, and it is calculated whether or not VF is increased proportionally. If this value is out of the reference value, it is determined as a rejected product.

【0012】上記二方法は、夫々単独で用いても効果の
あるものであるが、例えば請求項1に示す方法と請求項
2に示す方法を併用してもよく、その場合はより正確で
精度の高い検査を行うことができる。
The above two methods are effective even if they are used alone, but for example, the method shown in claim 1 and the method shown in claim 2 may be used together, and in that case, they are more accurate and accurate. High quality inspection can be performed.

【0013】[0013]

【発明の効果】本発明の方法によれば、従来測定が非常
に困難であったLEDの劣化を正確,簡単に検知できる
ので、LEDの検査精度を向上させることができる。
According to the method of the present invention, it is possible to accurately and easily detect the deterioration of the LED, which has been very difficult to measure in the past, so that the inspection accuracy of the LED can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】 LED検査装置の基本的構成を示すブロック
FIG. 1 is a block diagram showing a basic configuration of an LED inspection device.

【図2】 図1のブロック図に示す装置により、複数の
LEDを測定した結果を示すグラフ。
FIG. 2 is a graph showing the results of measuring a plurality of LEDs by the device shown in the block diagram of FIG.

【符号の説明】[Explanation of symbols]

1・・・・・・・・・・定電流電源 LED・・・・・・・・被検査発光ダイオード Rp・・・・・・・・・仮想抵抗 2・・・・・・・・・・高入力抵抗バッファーアンプ 3・・・・・・・・・・A−D変換器 4・・・・・・・・・・制御・演算回路 If・・・・・・・・・LEDに印加される電流 VF・・・・・・・・・LED端子間の順方向電圧 1 --- Constant current power supply LED: Light emitting diode to be inspected Rp ... ・ ・ ・ Virtual resistance 2 ... High input resistance buffer amplifier 3 ・ ・ ・ ・ ・ ・ ・ ・ A-D converter 4 Control circuit If ・ ・ ・ ・ ・ ・ Current applied to LED VF ・ ・ ・ ・ ・ ・ Forward voltage between LED terminals

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01L 33/00 G01R 31/26 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01L 33/00 G01R 31/26

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】定電流電源から、被検査LEDのPN接合
の順方向に、1μA以下の定電流を流し、 被検査LEDの端子間の電圧(VF)をA−D変換器
で測定すると共に記憶させ、 VFを制御・演算回路で、予め入力してある基準値と
比較し、 VFが基準値の範囲内と判断した場合は、前記定電流
電源に電流を約10倍に引き上げるよう指示を出し、 被検査LEDの電流が約10倍に引き上げられた状態で
被検査LEDの端子間の電圧(VF)をA−D変換器
で測定し、 制御・演算回路でVFとVFの差を算出し、 その値が予め制御・演算回路に入力されている基準値の
範囲内である場合を合格と判定するLEDの劣化検査方
法。
1. A constant current of 1 μA or less is flowed from a constant current power source in the forward direction of a PN junction of an LED to be inspected, and a voltage (VF 1 ) between terminals of the LED to be inspected is measured by an AD converter. They are stored together, in the control and operation circuit VF 1, compared to a reference value that is entered in advance, if the VF 1 determines that the range of the reference value, raise the current to approximately 10 times the constant current source , The voltage between the terminals of the LED to be inspected (VF 2 ) is measured by the A / D converter while the current of the LED to be inspected is increased to about 10 times, and VF 1 is set in the control / arithmetic circuit. A method for inspecting deterioration of an LED, which calculates a difference in VF 2 and judges that the value is within a range of a reference value input in advance to a control / arithmetic circuit as a pass.
【請求項2】定電流電源から、被検査LEDのPN接合
の順方向に、0.01μA以上の定電流を流し、 被検査LEDの端子間の電圧(VF)をA−D変換器
で測定すると共に記憶させ、 VFを制御・演算回路で、予め入力してある基準値と
比較し、 VFが基準値の範囲内と判断した場合は、前記定電流
電源に電流を約10倍に引き上げるよう指示を出し、 被検査LEDの電流が約10倍に引き上げられた状態で
被検査LEDの端子間の電圧(VF)をA−D変換器
で測定し、 制御・演算回路でVFとVFの差を算出し、 その値が予め制御・演算回路に入力されている基準値の
範囲内である場合は前記定電流電源に、更に電流を約1
0倍に引き上げるように指示し、 以下電流値が10mA以下の範囲までこれを繰り返し、 その電圧値が全範囲に亘ってその対数値に対して直線的
に比例関係にあるものを適正と判断するLEDの劣化検
査方法。
2. A constant current of 0.01 μA or more is caused to flow from the constant current power source in the forward direction of the PN junction of the LED to be inspected, and the voltage (VF 1 ) between the terminals of the LED to be inspected is converted by an AD converter. are stored together with the measuring, control and operation circuit VF 1, compared to a reference value that is entered in advance, if the VF 1 determines that the range of the reference value, about 10 times a current to the constant current source , The voltage between the terminals of the LED to be inspected (VF 2 ) is measured by the A / D converter while the current of the LED to be inspected is increased by about 10 times, and the control / arithmetic circuit controls the VF. The difference between 1 and VF 2 is calculated, and when the value is within the range of the reference value input to the control / arithmetic circuit in advance, the constant current power source is further supplied with about 1 current.
It is instructed to increase it to 0 times, and this is repeated until the current value is 10 mA or less, and it is determined that the voltage value is linearly proportional to the logarithmic value over the entire range. LED deterioration inspection method.
JP2002338260A 2002-11-21 2002-11-21 LED deterioration inspection method Expired - Fee Related JP3450001B1 (en)

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