JP3448237B2 - Waveguide type optical component and optical fiber connection method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveguide type optical component in which an arrayed waveguide diffraction grating (AWG) and another optical functional circuit are integrated on a substrate and an optical fiber connecting method. More specifically, the present invention has a high productivity of a waveguide type optical component which is excellent in mechanical strength and long-term reliability and in which an AWG and an optical functional circuit produced by using an optical / electric hybrid integration technology are integrated. , A circuit configuration method for providing at a low price.

[0002]

2. Description of the Related Art In recent years, with the spread of multimedia, the amount of communication and the diversification of information are rapidly advancing, and research and development of high-speed and large-capacity communication networks are being actively conducted. Among them, a wavelength division multiplexing communication system (WDM communication system) for transmitting a signal by carrying light on N different wavelengths
Holds great expectations as a technique for improving the communication capacity per optical fiber N times. In the above WDM communication system, in order to individually process the signal lights of different wavelengths propagating in one optical fiber, a wavelength multiplexer / demultiplexer for combining and separating the signal lights is required. . To date, various wavelength multiplexers / demultiplexers have been developed, such as those using a reflection mirror such as a fiber grating or a multilayer film reflection filter and a circulator. Among them,
An arrayed waveguide diffraction grating (AWG) manufactured by the planar optical waveguide circuit technology is mentioned as a wavelength multiplexer / demultiplexer most expected because of its advantages such as small size and high productivity.

The structure and operating principle of the AWG will be described below. A schematic configuration of the AWG is shown in FIG. 7 (a), and a schematic diagram of the transmission spectrum is shown in FIG. 7 (b). AWG is the first
Input / output channel waveguide 51, first fan-shaped slab waveguide 53a, channel waveguide array 52, second fan-shaped slab waveguide 53b, and second input / output channel waveguide 5
4 and. First input / output channel waveguide 51
The light incident on the first fan-shaped slab waveguide 53a propagates while being diffracted in the first fan-shaped slab waveguide 53a.
At the connection between 3a and the channel waveguide array 52,
An amplitude that depends on the field distribution at the connection between the first input / output channel waveguide 51 and the first fan-shaped slab waveguide 53a,
Has a phase distribution. The diffracted light is channel waveguide array 5
2 propagates to the connection between the channel waveguide array 52 and the second fan-shaped slab waveguide 53b. Here, the channel waveguide array 52 is configured such that the outer waveguides are sequentially lengthened by a predetermined length ΔL, and the wavelength λ
Optical path length difference corresponding to the waveguide length [Delta] L for the light _{(2π · n e · ΔL)} / λ (n e; effective refractive index of the channel waveguide array, lambda; the wavelength of the propagating light), and wavelengths Therefore, the wavefront of the light at the connection between the channel waveguide array 52 and the second fan-shaped slab waveguide 53b has a slope depending on the wavelength. The light incident on the second fan-shaped slab waveguide 53b from the channel waveguide array 52 is
Of the fan-shaped slab waveguide 53b and is focused at a position where multi-beam interference occurs at the connection between the second fan-shaped slab waveguide 53b and the second input / output channel waveguide 54. This focal point is located at the channel waveguide array 52 and the second
Since it depends on the degree of inclination of the wavefront at the connection with the fan-shaped slab waveguide 53b, the focal point differs depending on the wavelength of light. Therefore, as shown in FIG. 7B, a transmission spectrum in which the input / output channel waveguides coupled with low loss differ depending on the wavelength of light is obtained, and the wavelength division multiplexer / demultiplexer functions. To date, AWGs have been made of semiconductor materials, glass materials containing quartz as a main component, and in particular, AWGs made of glass materials containing quartz as a main component have low loss and low loss due to the characteristics of the materials. It has achieved excellent characteristics such as crosstalk and high temperature stability.

Recently, there has been a gradual increase in demand for optical components for WDM communication systems that use an AWG as a wavelength multiplexer / demultiplexer and are combined with various optical functional circuits. Already, a material using a semiconductor material or a glass material containing quartz as a main component has been realized. Among them, when a glass material containing quartz as a main component is used as a waveguide material, Optical components for WDM communication systems having particularly excellent characteristics have been realized due to their material characteristics. As an optical component for a WDM communication system using a glass material containing quartz as a main component, first, an AWG and a thermo-optical phase modulator are combined as a combination of an AWG and an optical functional circuit using a thermo-optical effect. Examples include a combined modulator / demodulator for optical CDMA system and an optical add / drop multiplexer in which an AWG and a thermo-optical light intensity modulator are combined.

In the circuits using these thermo-optic effects, it takes about 0.1 to several msec from the start or stop of application of the control current until the temperature of the waveguide reaches the saturated state. It is used for switching to a low-speed optical path such as switching to a standby system when a failure occurs and switching of an optical path when changing the network design. On the other hand, in order to realize an optical component for WDM communication system capable of high-speed operation for processing bits or cells of a high-speed optical signal of several MHz or more, it is necessary to combine an optical functional circuit capable of high-speed operation with an AWG. is there. However, although the glass material containing quartz as a main component has low loss and high temperature stability and is suitable as a waveguide material, it has an extremely stable characteristic in terms of material, and an optical functional circuit capable of high-speed operation. It is difficult to configure the small size.

As a method for realizing an optical functional circuit capable of high-speed operation by using a glass material containing quartz as a main component, which has excellent characteristics as a waveguide material, a channel waveguide is connected to a wall surface. The waveguide material is removed to form a groove for mounting an optical functional element, and a high-speed operation consisting of a semiconductor or an inorganic dielectric such as LiNO _{3 is} possible so that the groove is optically coupled to the channel waveguide on the wall surface. There is an optical / electric hybrid integration technology that mounts various optical functional elements.

The optical / electric hybrid integration technique will be described in detail below. FIG. 8 shows a procedure for manufacturing a waveguide type optical component by this technique. Here, as the substrate, S
Flame deposition method (FHD) in which SiCl ₄ and GeCl ₄ are burned using i to form a glass material containing quartz as a main component.
Method) will be described. First, as shown in FIG. 8A, a Si terrace 1a for mounting an optical functional element is formed on the Si substrate 1 by wet etching using an alkaline aqueous solution. A first lower clad layer 2 thicker than the height of the Si terrace 1a is formed thereon. The upper surface thereof is mechanically flat-polished until the upper surface of the Si terrace 1a is exposed, and a substrate side positioning marker 3 used when mounting the optical functional element on the upper surface of the Si terrace 1a is formed, as shown in FIG. A composite substrate as shown in is prepared.

The second lower clad layer 4 is formed on the composite substrate by combining the FHD method and dry etching.
, The core 5 and the upper clad layer 6 are formed,
An embedded rectangular waveguide structure as shown in (c) is formed. Here, the second lower clad layer 4 is formed by adjusting the thickness so that the heights of the optical axes of the core 5 and the optical functional element 10 match when the optical functional element is mounted later.

As shown in FIG. 8D, the waveguide material is removed by dry etching until the upper surface of the Si terrace 1a is exposed to form a groove for mounting an optical functional element. After that, the electric wiring 7 for feeding the optical functional element 10 and the fixing AuSn solder 8 are formed on the upper surface of the Si terrace 1a. Finally, before mounting the optical function element 10, the chip is made using a dicing saw, and the substrate side positioning marker 3 and the optical function element side positioning marker 9 are used to make the core 5 and the optical function element 1
The AuSn solder 8 is heated and fixed while aligning the position with the optical axis of 0 (FIG. 8E).

As an example of a waveguide type optical component realized by integrating an AWG and an optical functional component manufactured by using the above optical / electric hybrid integration technique, a semiconductor optical switch array equipped with a semiconductor optical amplifier chip is used. An example is a transmission wavelength selector for an optical ATM system, which is sandwiched between two AWGs.

In the case of the optical component for WDM communication system in which the AWG and the optical functional circuit using the thermo-optic effect are combined, the optical functional circuit has a structure in which a thin film heater is simply loaded on the waveguide. It was possible to proceed with the manufacturing process while confirming the characteristics of the AWG during the manufacturing process. However, the optical functional component manufactured using the optical / electric hybrid integration technology has a structure in which the waveguide is cut by the groove for mounting the optical functional element and light is not propagated before the optical functional element is mounted. It is not possible to confirm the characteristics of the AWG during the manufacturing process, and after all manufacturing steps up to the mounting of the optical functional element are completed, the characteristics of all parts are evaluated to select non-defective products, or It was manufactured on a substrate different from the circuit, evaluated for characteristics, selected good products, and then connected by an adhesive such as an organic resin. Further, since the monitor light for centering does not propagate even when connecting the optical fiber, a dummy waveguide for centering is formed in the circuit, or the optical fiber of the mounted optical function element is fed and the connected fiber I was aligning.

[0012]

However, in the method of selecting non-defective products after completing all the manufacturing steps for all circuits, the optical functional element is mounted even for defective products out of the specifications. There were problems such as lower productivity and higher production costs. Further, in a method in which an AWG and an optical functional circuit are formed on different substrates, and a non-defective product is selected and then adhesively connected, the mechanical strength and long-term reliability are deteriorated due to an increase in the number of adhering portions, and several to several Dozens of waveguides need to be connected while aligning them with an accuracy of about 0.1 μm, which complicates the mounting process and requires a separate mounting device for circuit connection, which also reduces productivity. However, there were problems such as an increase in production costs. Furthermore, in the fiber connection process, the circuit configuration is limited by the formation of the alignment dummy waveguide, and a complicated fiber connection device that can align the fiber to be connected while supplying power to the optical functional element is required. Was occurring.

The object of the present invention is made in view of the above-mentioned prior art, in which an AWG and an optical functional circuit manufactured by using the optical / electric hybrid integration technology are manufactured on the same substrate, and are manufactured. It is possible to evaluate the characteristics of the AWG during the process, eliminate unnecessary processes for defective products, have excellent mechanical strength, long-term reliability, high productivity, and low cost waveguide type. It is to provide optical components.

Another object of the present invention is to provide an optical fiber connecting method capable of easily connecting such a waveguide type optical component and an optical fiber without using a complicated dedicated device.

[0015]

To achieve the above object, according to the Invention The waveguide-type optical component of the present invention as set forth in claim 1, it
They are each, double having first and second input-output channel waveguides
Several arrayed waveguide diffraction gratings and an optical functional circuit having an optical functional element optically coupled with the second input / output channel waveguide are arranged on the same substrate, and the plurality of arrayed waveguide diffraction gratings are arranged. In the waveguide type optical component in which the respective second input / output channel waveguides are optically connected to each other via the optical function circuit, each of the plurality of arrayed waveguide diffraction gratings is provided.
The number of the second input / output channel waveguides
At least one more than the number of channels of the optical functional circuit
The optical device of the second input / output channel waveguide
Each of the remaining I / O channel waveguides that are not connected to the active circuit
One of each of the plurality of
Other arrayed waveguides out of several arrayed waveguide gratings
One of the remaining input and output channel waveguides of the diffraction grating
It is characterized by being connected .

[0016]

[0017]

[0018]

[0019] To achieve the above object, the present invention waveguide type optical component according to claim 2, in the waveguide type optical component according to claim 1, input and output channel waveguides of the residual, the It is characterized in that it is a waveguide arranged on both outer sides of the second input / output channel waveguide.

In order to achieve the above object, an optical fiber connecting method according to a third aspect of the present invention is provided for connecting an optical fiber to the waveguide type optical component according to the first or second aspect. , A monitor light is incident from the first input / output channel waveguide of one of the plurality of arrayed waveguide diffraction gratings, transmitted through the plurality of arrayed waveguide diffraction gratings, and is transmitted to another arrayed waveguide diffraction grating. While the monitor light propagated to the first input / output channel waveguide of the grating is received by the connected optical fiber to measure the received light intensity, the connected optical fiber is aligned so that the received light intensity becomes maximum, The optical fiber to be connected and the waveguide type optical component are fixed and connected.

In order to achieve the above object, a waveguide type optical component according to a fourth aspect of the present invention is the optical element according to the first aspect or the second aspect.
In the waveguide type optical component described in (3), the substrate material is Si and the waveguide material is a glass material.

In order to achieve the above object, the optical fiber connecting method of the present invention according to claim 5 is the optical fiber connecting method according to claim 3 , wherein the substrate material is Si and the waveguide material is a glass material. Is characterized in that.

[0023]

The waveguide type optical component according to claim 1 of the present invention comprises:
Using multiple AWG and optical / electric hybrid integration technology
The optical unit is integrated with the optical functional circuit manufactured by
In order to configure the product, it is possible to use multiple devices to bypass the optical function circuit.
By connecting one AWG, it can be connected to the optical function circuit.
The second input / output channel waveguide is equipped with an optical functional element
Equipped with optical functional element even if it is cut by the groove for
Before the operation, the characteristics of a plurality of AWGs connected in series can be evaluated and good products can be selected. Therefore, it is possible to omit the step of mounting useless optical functional elements on defective products. It is possible to manufacture a waveguide type optical component with high mechanical strength, long-term reliability, high productivity, and low cost.

[0024]

[0025]

[0026]

The waveguide type optical component according to claim 2 of the present invention, in the waveguide type optical component according to claim 1, in particular, the input and output channel waveguides connected to the other AWG described above, By arranging them on both outer sides of the second input / output channel waveguide connected to the optical function circuit, the characteristics of a plurality of AWGs can be evaluated more accurately before mounting the optical function element, and the optical property of defective products can be improved. The element mounting process can be eliminated more reliably.

An optical fiber connecting method according to a third aspect of the present invention is the waveguide type optical component according to the first or second aspect , in which a plurality of AWGs are provided so as to bypass the optical functional circuit. Even if the second input / output channel waveguide connected to the optical functional circuit is cut by the groove for mounting the optical functional element, the monitor light incident from one of the first input / output channel waveguides While propagating through the plurality of AWGs to the other first input / output channel waveguide and receiving the propagated monitor light by the connected optical fiber to measure the received light intensity, the light intensity is maximized. Since the optical fiber to be connected and the waveguide type optical component are connected while aligning as described above, the second input / output channel waveguide connected to the optical functional circuit is cut by the groove for mounting the optical functional element. Even if Or forming a dummy waveguide alignment,
It is not necessary to connect the optical fiber while supplying power to the optical functional element, and it is easy to connect the connected optical fiber and the waveguide type optical component without limiting the circuit configuration and complicating the optical fiber connecting device. be able to.

A waveguide type optical component according to a fourth aspect of the present invention is the waveguide type optical component according to the first or second aspect , which uses a Si substrate having extremely high flatness, and
By using a waveguide material made of a glass material containing quartz as a main component, which has a very stable property,
It is possible to manufacture the waveguide type optical component having excellent performances such as low loss, low crosstalk, and high temperature stability.

An optical fiber connecting method according to a fifth aspect of the present invention is the optical fiber connecting method according to the third aspect , which uses a Si substrate having a very high flatness and is very stable in terms of material. By using a waveguide material made of a glass material containing quartz as a main component, which has various characteristics, it is possible to manufacture the waveguide type optical component having excellent performance such as low loss, low crosstalk, and high temperature stability. can do.

[0031]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [Embodiment 1] FIG. 1 shows a waveguide type optical component according to a first embodiment of the present invention.

As shown in FIG. 1, this embodiment is a multi-wavelength light receiving circuit, in which an 8-channel semiconductor PD array 10a as an optical functional circuit manufactured by using the optical / electric hybrid integration technique, 9-channel AWG55, which is one more channel than the semiconductor PD array 10a.
And are integrated on the Si substrate 1. The signal light having a plurality of different wavelengths, which is incident on the first input / output channel waveguide 51 from the fiber 11 to be connected, is guided to the AWG 55 through the fan-shaped slab waveguide 53, and the second wavelength corresponding to each wavelength is generated by the AWG 55. The input / output channel waveguide 54 is demultiplexed and received by the semiconductor PD array 10a. Second with nine
Of the second input / output channel waveguides 54a, 54b of the second input / output channel waveguides 54a are connected to the semiconductor PD array 10a, and the remaining one second input / output channel waveguides 54b.
Is connected to the end of the circuit as a characteristic confirmation channel waveguide. In this embodiment, the AWG 55 has a peak wavelength interval between channels of 50 GHz and an FSR of 16 ch (800
GHz) was used. An example of the design parameters of the AWG 55 is that the number of channel waveguide arrays 52 is 50.
Book, adjacent waveguide length difference of the channel waveguide array 52 (Δ
L) is 125 μm, and the focal length of the fan-shaped slab waveguide 53 is 15 mm. A first input / output channel waveguide 51,
Channel waveguide array 52 and fan-shaped slab waveguide 53
And the second input / output channel waveguide 54 shown in FIG.
It has a rectangular waveguide structure. An example of the approximate dimensions of the waveguide structure is as follows: the Si substrate 1 has a thickness of 1 mm, the first lower cladding layer 2 has a thickness of 20 μm, and the second lower cladding layer 4 has a thickness of 20 μm.
Has a thickness of 5 μm, the upper cladding layer 6 has a thickness of 20 μm,
The cross-sectional dimension of the core 5 is 7 μm square, and the relative refractive index difference between the core 5 and the cladding layer is 0.7%. As the semiconductor PD array 10a, for example, a semiconductor PD chip with a spot size conversion section using a tapered shape is used in order to increase the positional deviation tolerance when mounting an optical functional element, that is, a semiconductor PD, and its outline is shown. The dimensions are, for example, 1 mm in length, 300 μm in thickness, and 500 μm in width.

When connecting the fiber 11 to be connected, the second
The monitor light enters from the input / output channel waveguide 54b of
The connected fiber 11 receives the monitor light propagated to the first input / output channel waveguide 51, and the connected fiber 11 is aligned so that the received light intensity is maximized. Fix with UV curable organic adhesive.
In the present invention, by using the first input / output channel waveguide 51 and the second input / output channel waveguide 54b, only the aligning function which has been conventionally used is used without using the aligning dummy waveguide. With the fiber connecting device that has,
The fiber 11 to be connected can be connected. The optical component of this embodiment can be manufactured by using the optical / electric hybrid integration technique shown in FIG.

In order to confirm the effectiveness of the present invention, fifty multi-wavelength light receiving circuits of this embodiment were manufactured. First, FIG.
As shown in FIGS. 8A to 8E, steps of partially removing the waveguide material on the substrate 1 to form a groove for mounting an optical functional element, and a chip using a dicing saw. Process until the optical functional circuit 10a is connected to the AWG by using the second input / output channel waveguide 54b.
55 properties were evaluated. The evaluation is shown in FIG.
The three items of loss, crosstalk, and peak wavelength shift were performed. Here, the allowable values of the characteristics are a loss of 2 dB or less, a crosstalk of 30 dB or more, and a peak wavelength shift of 0.0.
It was set to 4 nm (5 GHz) or less. As the measuring method, the loss and the crosstalk are directly measured as the actual measurement values in the second input / output channel waveguide 54b not connected to the optical functional circuit 10a, and the peak wavelength shift is connected to the optical functional circuit 10a. It was calculated based on the actual measurement value of the peak wavelength in the second input / output channel waveguide 54b which is not provided and the design value of the peak wavelength interval between channels. With this measurement method, the loss and crosstalk are 0.1d.
It can be measured with an error of B or less, and the peak wavelength shift is 0.02n.
It was possible to measure with an error of m (2.5 GHz) or less. As a result of the characteristic evaluation, 42 circuits corresponding to 84% of the total were non-defective products satisfying the above conditions. A semiconductor PD chip, which is an optical functional element, is mounted on the selected good product. That is, an optical functional element (semiconductor PD chip in this example) that configures an optical functional circuit so as to be optically coupled to the waveguide on the substrate 1 is shown in FIGS. 8D and 8E inside the groove. As shown, it is mounted using optical / electric hybrid integration technology. Thereby,
An AWG 55 and a semiconductor PD as an optical function circuit are provided on the substrate 1.
The array 10a is arranged to obtain an optical component. Here, as a result of evaluating the characteristics of the AWG 55 again, good characteristics satisfying the above-mentioned allowable value were obtained in 40 of 42 circuits. In the final characteristic evaluation, the two circuits did not satisfy the above-mentioned allowable values. This is because the measured values of the second input / output channel waveguide 54b not connected to the optical function circuit 10a indicate Since the design value was used as the value of the inter-channel peak wavelength interval when estimating the peak wavelength of the connected second input / output channel waveguide 54 a, the value of the inter-channel peak wavelength interval of the AWG 55 actually produced was This is because the peak wavelength could not be accurately obtained due to the error of.

In this embodiment, since the AWG 55 and the semiconductor laser array 10a are manufactured on the same substrate 1,
It has excellent mechanical strength and long-term reliability. Furthermore, it is possible to select 8 defective products by the characteristic evaluation performed before the process of mounting the optical functional element, eliminating the need to mount semiconductor PD chips on the defective products. be able to. In this embodiment, the cost for mounting the semiconductor PD chip and the cost for the semiconductor PD chip can be reduced by 16% as compared with the conventional method of mounting elements on all circuits.

In this embodiment, the semiconductor PD chip was used as the optical functional element constituting the optical functional circuit, but the present invention is not limited to this, and a laser chip made of a semiconductor material or an inorganic dielectric material. The present invention can be applied to the case where other optical functional elements such as EA modulator chip, AO modulator chip, and optical amplifier chip are used to improve mechanical strength, long-term reliability, and productivity. The effect of reducing the production cost can be obtained in the same manner as this embodiment.

In this embodiment, a glass material containing quartz as a main component is used as the waveguide material, but the present invention is not limited to this, and a semiconductor material or an inorganic dielectric material is used as the waveguide material. It can also be applied to the case, and the above effects can be obtained as in the present embodiment.

In this embodiment, the second input / output channel waveguide 54b not connected to the optical function circuit 10a is replaced with the second input / output channel waveguide 54 connected to the optical function circuit 10a.
Only one was placed in the position adjacent to a, but two
Alternatively, the peak wavelength interval between channels can be obtained by setting the value more than that, so that the characteristic evaluation performed before the device mounting step can be performed more accurately.

[Second Embodiment] FIG. 2 shows a waveguide type optical component according to a second embodiment of the present invention.

As shown in FIG. 2, this embodiment is a multi-wavelength light receiving circuit, in which an 8-channel semiconductor PD array 10a as an optical functional circuit manufactured by using the optical / electric hybrid integration technique is used. , The AWG55 of 10 channels, which is two channels more than the number of channels of the semiconductor PD array,
are integrated on the i substrate 1. Of the ten second input / output channel waveguides 54, eight second input / output channel waveguides 54a located at the center are connected to the semiconductor PD array 10a, and are arranged on both outer sides of the waveguide 54a. The two second input / output channel waveguides 54b are connected to the ends of the circuit as characteristic confirmation channel waveguides. AW used
The structural parameters of G55 are all the same as in Example 1 except that the number of the second input / output channel waveguides 54 is 10, and therefore detailed description thereof is omitted. The waveguide structure used for forming each channel waveguide, the schematic configuration of the semiconductor PD array 10a, the manufacturing procedure thereof, and the fiber connecting method are the same as those in the first embodiment, and thus detailed description thereof will be omitted.

Also in this embodiment, as in the first embodiment,
Fifty multi-wavelength light receiving circuits were manufactured. The characteristics of the AWG 55 were evaluated using the second input / output channel waveguide 54b not connected to the optical function circuit 10a at the stage of chip formation with a dicing saw. Loss and crosstalk are
The second, which is not connected to the optical function circuit 10a as in the first embodiment,
It was directly measured as the measured value in the input / output channel waveguide 54b. The peak wavelength shift is caused by the optical function circuit 10a.
A measured value of the peak wavelength in the second input / output channel waveguide 54b which is arranged on both outer sides of the second input / output channel waveguide 54a which is not connected to the two optical function circuits, It was calculated based on the peak wavelength interval between channels obtained from the difference between the measured values. In this embodiment, when calculating the peak wavelength of the second input / output channel waveguide 54a connected to the optical function circuit 10a,
Since the peak wavelength interval between channels can be obtained from the actual measurement value, the peak wavelength deviation of the AWG 55 can be evaluated more accurately than in the case of the first embodiment using the design value.
With such a measuring method, the loss and the crosstalk can be measured with an error of 0.1 dB or less as in the first embodiment, and the peak wavelength shift is half that in the first embodiment, ie, 0.01 nm.
It was possible to measure with an error of (1.25 GHz) or less. Example 1
Similarly, the allowable values of the characteristics are loss 2 dB or less, crosstalk 30 dB or more, peak wavelength shift 0.04 nm (5 GH
As a result of selecting non-defective products by setting z) or less, the non-defective products were 40 circuits corresponding to 80% of the whole. A semiconductor PD chip that is an optical functional element is mounted on the selected good product,
As a result of evaluating the characteristics of the AWG55 again, good characteristics satisfying the above-mentioned allowable values were obtained in all 40 circuits.

In this embodiment, the AWG is the same as in the first embodiment.
Since 55 and the semiconductor PD array 10a are formed on the same substrate 1, mechanical strength and long-term reliability are excellent.
10 in the characteristic evaluation performed before the process of mounting the optical functional element
Individual defective products can be sorted, and semiconductor PDs can be selected as defective products.
Since the chip mounting can be omitted, the semiconductor PD chip mounting process and the semiconductor PD chip cost can be reduced by 20 compared with the conventional method of mounting the elements on all circuits.
It was possible to reduce by%. In this embodiment, the characteristics of the AWG55 can be accurately evaluated before mounting the device,
Since defective products that do not satisfy the above-mentioned allowable value could be completely sorted out, it was possible to further omit mounting useless elements as compared with Example 1.

In this embodiment, the semiconductor P is used as an optical functional element.
Although the D chip was used and the glass material containing quartz as the main component was used as the waveguide material, the present invention is not limited to this, and it is also possible to use other optical functional elements and waveguide materials. It can be applied, and effects such as mechanical strength, long-term reliability, productivity improvement, and production cost reduction can be obtained as in the present embodiment.

[Third Embodiment] FIG. 3 shows a waveguide type optical component according to a third embodiment of the present invention.

As shown in FIG. 3, the present embodiment is a transmission wavelength selection circuit, in which an 8-channel semiconductor optical switch array 10b as an optical functional circuit manufactured by using the optical / electric hybrid integration technique is used. , AW of 10 channels, which is 2 channels more than that of the semiconductor optical switch array
G55a and 55b are integrated on the Si substrate 1. First input / output channel waveguide 51a of the first AWG 55a
A plurality of signal lights having different wavelengths, which are incident on the fiber 11 to be connected to the optical fiber, are separated by the first AWG 55a into the second input / output channel waveguides 54a corresponding to the respective wavelengths, and the semiconductor optical switch Lead to array 10b.
In this optical switch array 10b, a channel corresponding to a wavelength to be transmitted is turned on by applying a current,
The transmitted signal light is guided to the second AWG 55b, and is further multiplexed by the second AWG 55b into the first input / output channel waveguide 51b. Two AWGs 55a and 55
In b, among the ten second input / output channel waveguides 54, eight second input / output channel waveguides 54a located in the center are connected to the semiconductor optical switch array 10b, and both of the channel waveguides 54a are connected. The two second input / output channel waveguides 54b arranged on the outer side are connected to the ends of the circuit as a characteristic confirmation channel waveguide as shown in the drawing.

The structural parameters of the two AWGs 55a and 55b are all the same as in Example 1 except that the number of the second input / output channel waveguides 54 is 10, and therefore detailed description thereof will be omitted. Semiconductor optical switch array 10
As b, eight semiconductor optical amplifier chips with a spot size conversion part using a tapered shape are used in order to increase the positional deviation tolerance at the time of mounting the element, and the approximate size is, for example, 1 mm in length, Thickness 300 μm,
The width is 500 μm. Since the waveguide structure used for forming each channel waveguide, the manufacturing procedure thereof, and the fiber connecting method are the same as those in the first embodiment, detailed description thereof will be omitted.

Also in this embodiment, as in the first embodiment,
Fifty circuits of the above transmission wavelength selection circuit were manufactured. The characteristics of the two AWGs 55a and 55b were evaluated by using the second input / output channel waveguide 54b not connected to the optical function circuit 10b at the stage of chip formation with a dicing saw. Since the characteristic evaluation was performed by the same method as in Example 2, detailed description will be omitted. In this example, as in Example 2, the loss and the crosstalk can be measured with an error of 0.1 dB or less, and the peak wavelength shift is 0.01 nm (1.25 GH).
z) It was possible to measure with the following error. As in the case of Example 1, the allowable values of the characteristics are set to a loss of 2 dB or less, a crosstalk of 30 dB or more, and a peak wavelength shift of 0.04 nm (5 GHz) or less, and as a result, good products are selected. As a result, two AWGs 55a and 55b are allowed. 64% of non-defective products that meet the value
It was 32 circuits corresponding to. After that, a semiconductor optical amplifier chip that constitutes the semiconductor optical switch array 10b is mounted on the selected non-defective products, and the obtained semiconductor optical switch array 10b is driven to perform characteristic evaluation. As a result, two AWGs 55a for all 32 circuits are obtained. Good characteristics of 55 and 55b satisfying the above-mentioned allowable values were obtained. In this example, the characteristics of the two AWGs 55a and 55b could be accurately evaluated before mounting the element 10b, and only non-defective products could be completely selected. It was possible to eliminate the need to install various elements.

In this embodiment, as in the first embodiment, the two AWGs 55a and 55b and the semiconductor optical switch array 1 are used.
Since 0b and 0b are manufactured on the same substrate, it has excellent mechanical strength and long-term reliability. Furthermore, 18 defective products are selected by the characteristic evaluation performed before mounting the optical functional element, that is, the semiconductor optical amplifier chip. Since it was possible to eliminate the need to mount a semiconductor optical amplifier chip on a defective product, compared to the conventional method of mounting elements on all circuits, the mounting process of the semiconductor optical amplifier chip and the semiconductor optical amplifier The cost of chips was reduced by 36%.

In this embodiment, the semiconductor optical amplifier chip is used as the optical functional element constituting the optical functional circuit and the glass material containing quartz as the main component is used as the waveguide material, but the present invention is not limited to this. Other optical functional elements,
It can also be applied to the case where a waveguide material is used, and the same effects as reliability, productivity improvement, and production cost reduction can be obtained as in the present embodiment.

[Fourth Embodiment] FIG. 4 shows a waveguide type optical component according to a fourth embodiment of the present invention.

As shown in FIG. 4, this embodiment is a transmission wavelength selection circuit similar to that of the third embodiment, and was manufactured using the optical / electric hybrid integration technique. The 8-channel semiconductor optical switch array 10b as an optical functional circuit and the 10-channel AWGs 55a and 55b, which are two more channels than the semiconductor optical switch array 10b, are S.
Integrated on i substrate 1. Two AWGs 55a and 55
In b, among the 10 second input / output channel waveguides 54, the 8 second input / output channel waveguides 54a located at the center are connected to the semiconductor optical switch array 10b, and arranged on both outer sides thereof. ing. The two second input / output channel waveguides 54b from one AWG bypass the semiconductor optical switch array 10b, and the second second input / output channel waveguide 54b of the other AWG is provided.
Of the input / output channel waveguide 54b.

Two AWGs 55a and 55b used
The structural parameter of the second input / output channel waveguide 54 is
Since all are the same as those in the first embodiment except that the number is 10, the detailed description will be omitted. The waveguide structure used for forming each channel waveguide and the manufacturing procedure thereof are the same as those in the first embodiment, and the schematic configuration of the semiconductor optical switch array 10b is the same as that in the third embodiment, so detailed description thereof will be omitted. .

When connecting the fiber 11 to be connected, the first
From the input / output channel waveguide 51a to the first AWG 55a
Monitor light to the two AWGs 55a and 55b
Is transmitted through the second AWG 55b to the first input / output channel waveguide 51b and received by the connected fiber 11, and the connected fiber 11 is aligned so that the received light intensity is maximized. And fixed with a UV-curable organic adhesive. In the present invention, the first input / output channel waveguide 51a on the first AWG 55a side and the first input / output channel waveguide 51a on the second AWG 55b side are provided.
By using the input / output channel waveguide 51b of FIG. 1, connection of the connected fiber 11 can be performed by using a fiber connecting device having only an aligning function which has been conventionally used, without using a dummy waveguide for aligning. It can be performed.
The optical component of this embodiment can be manufactured by using the optical / electric hybrid integration technique shown in FIG.

Also in this embodiment, as in the first embodiment,
Fifty circuits of the above transmission wavelength selection circuit were manufactured. The characteristics of the two AWGs 55a and 55b were evaluated by using the second input / output channel waveguide 54b not connected to the optical function circuit 10b at the stage of chip formation with a dicing saw. The characteristics are evaluated by the first input / output channel waveguide 51a on the first AWG 55a side and the first input / output channel waveguide 51a on the second AWG 55b side.
Using two input / output channel waveguides 51b
The transmission spectrum was measured with 55a and 55b connected in cascade. Similar to the second embodiment, the loss and the crosstalk are directly measured as the actual measurement values in the second input / output channel waveguide 54b not connected to the optical function circuit 10b, and the peak wavelength shift is the optical function circuit 10b. And the measured values of the peak wavelengths of the two second input / output channel waveguides 54b which are arranged on both outer sides of the second input / output channel waveguide 54a which are not connected to the optical function circuit 10b. , And it was calculated based on the peak wavelength interval between channels obtained from the difference between the measured values. With this measurement method, as in Example 2, the loss and crosstalk could be measured with an error of 0.1 dB or less, and the peak wavelength shift could be accurately measured with an error of 0.01 nm (1.25 GHz) or less. As in the first embodiment, the allowable value of the characteristic is set to the loss 2d.
B or less, crosstalk 30 dB or more, peak wavelength shift 0.04 nm (5 GHz) or less, and as a result of selection of good products, good products in which the two AWGs 55a and 55b both satisfy the allowable value correspond to 64% of the whole. It was 32 circuits that After that, a semiconductor optical amplifier chip is mounted on the selected non-defective product, and the obtained semiconductor optical switch array 10b is driven to perform characteristic evaluation. As a result, two AWGs 55a and 55b in all 32 circuits have the above allowable values. Good characteristics satisfying the above conditions were obtained. In this example, the characteristics of the two AWGs 55a and 55b could be accurately evaluated before mounting the elements, and only non-defective products could be completely selected. It was possible to omit mounting the device.

In this embodiment, as in the first embodiment, the two AWGs 55a and 55b and the semiconductor optical switch array 1 are arranged.
Since 0b and 0b are manufactured on the same substrate 1, it has excellent mechanical strength and long-term reliability. Furthermore, it is possible to select 18 defective products by the characteristic evaluation performed before mounting the optical functional element. Since it was possible to omit mounting the semiconductor optical amplifier chip on the defective product, compared to the conventional method of mounting elements on all circuits, the semiconductor optical amplifier chip mounting process and the cost required for the semiconductor optical amplifier chip Was reduced by 36%.

In this embodiment, the semiconductor optical amplifier chip was used as the optical functional element and the glass material containing quartz as the main component was used as the waveguide material, but the present invention is not limited to this. The present invention can also be applied to the case where the optical functional element and the waveguide material are used, and the same effects as reliability, productivity improvement, and production cost reduction can be obtained.

[Fifth Embodiment] FIG. 5 shows a waveguide type optical component according to a fifth embodiment of the present invention.

As shown in FIG. 5, this embodiment is a transmission wavelength selection circuit similar to that of the third embodiment, and is an 8-channel semiconductor optical switch as an optical functional circuit manufactured by using the optical / electric hybrid integration technique. One more channel than the array 10b and the semiconductor optical switch array 10b.
The channels AWGs 55a and 55b are integrated on the Si substrate 1. In the present embodiment, two AWGs 55a and 55b are overlapped at the fan-shaped slab waveguide 53, and there are nine AWGs 55a and 55b, respectively.
Of the second input / output channel waveguides 54a of the semiconductor optical switch array 10
and the remaining one second input / output channel waveguide 54b is connected to the end of the circuit as a characteristic confirmation channel waveguide.

The structural parameters of the AWGs 55a and 55b used are all the same as in Example 1 except that the number of the second input / output channel waveguides 54 is 10, so detailed description will be omitted. Since the waveguide structure used for forming each channel waveguide and its manufacturing procedure are the same as those in the first embodiment, and the schematic configuration of the semiconductor optical switch array 10b and the fiber connecting method are the same as those in the third embodiment, the details will be described. Detailed description is omitted.

Also in this embodiment, as in the first embodiment,
Fifty circuits of the above transmission wavelength selection circuit were manufactured. The characteristics of the AWGs 55a and 55b were evaluated using the second input / output channel waveguide 54b not connected to the optical function circuit 10b at the stage of chip formation with a dicing saw. As the measurement method, as in the first embodiment, the loss and the crosstalk are directly measured as the actual measurement values in the second input / output channel waveguide 54b not connected to the optical functional circuit 10b, and the peak wavelength deviation is It was calculated based on the measured value of the peak wavelength in the second input / output channel waveguide 54b not connected to the optical function circuit 10b and the designed value of the peak wavelength interval between channels. In this measuring method,
Similarly, loss and crosstalk can be measured with an error of 0.1 dB or less, and the peak wavelength shift is 0.02 nm (2.5 G
It was possible to measure with an error of less than (Hz). As in Example 1, the allowable values of the characteristics were set to a loss of 2 dB or less, a crosstalk of 30 dB or more, and a peak wavelength shift of 0.04 nm (5 GHz) or less. As a result, two good AWGs 55a and 55b were selected. The non-defective products satisfying the above-mentioned allowable value were 38 circuits corresponding to 76% of the whole. After that, a semiconductor optical amplifier chip is mounted on the selected good product, and the obtained semiconductor optical switch array 10b is driven to drive the AWG5.
As a result of evaluating the characteristics of 5a and 55b, good characteristics of the two AWGs 55a and 55b satisfying the above-mentioned allowable values were obtained in 36 out of 38 circuits. Two circuits did not meet the above tolerances in the final characterization,
Similar to the first embodiment, this is based on the measured value of the second input / output channel waveguide 54b not connected to the optical function circuit 10b, and the second input / output channel waveguide 54a connected to the optical function circuit 10b. Since the design value was used as the value of the peak wavelength interval between channels when estimating the peak wavelength of
This is because the peak wavelength could not be accurately determined due to an error from the value of the peak wavelength interval between channels of the AWGs 55a and 55b actually manufactured. In this embodiment, 2
It is necessary that the characteristics of the two AWGs 55a and 55b both satisfy the above-mentioned allowable value, but since the two AWGs 55a and 55b are superposed on each other in the fan-shaped slab waveguide 53 and arranged in close proximity to each other, the third embodiment is omitted. Compared to
The influence of in-plane distribution such as manufacturing error can be suppressed to a low level,
It can be manufactured with high yield.

In this embodiment, as in the first embodiment, the two AWGs 55a and 55b and the semiconductor optical switch array 1 are arranged.
Since 0b and 0b are formed on the same substrate 1, mechanical strength,
It has excellent long-term reliability, and 12 defective products can be selected by the characteristic evaluation performed before mounting the optical functional device.
Since it was possible to omit mounting a semiconductor optical amplifier chip on a defective product, compared to the conventional method of mounting elements on all circuits, the semiconductor optical amplifier chip mounting process and the cost for the semiconductor optical amplifier chip can be reduced. It was possible to reduce by 24%.

In this embodiment, the semiconductor optical amplifier chip is used as the optical functional element and the glass material containing quartz as the main component is used as the waveguide material, but the present invention is not limited to this. The present invention can also be applied to the case where the optical functional element and the waveguide material are used, and the same effects as mechanical strength, long-term reliability, productivity improvement, and production cost reduction can be obtained.

[Embodiment 6] FIG. 6 shows a waveguide type optical component according to a sixth embodiment of the present invention.

As shown in FIG. 6, this embodiment is a transmission wavelength selection circuit similar to that of the third embodiment. Here, an 8-channel optical function circuit manufactured by using the optical / electric hybrid integration technique is used. The semiconductor optical switch array 10b and the 10-channel AWGs 55a and 55b, which are two more channels than the semiconductor optical switch array 10b, are Si.
Integrated on the substrate 1. Two AWGs 55a and 55b
Among the 10 second input / output channel waveguides 54, the eight second input / output channel waveguides 54a located in the center are connected to the semiconductor optical switch array 10b, and both outsides of the channel waveguides 54a. that it has been placed in.

[0065]

[0066]

[0067] are two second output channel waveguides 54b and the second interconnect input and output channel waveguides 54b of the other AWG so as to bypass the semiconductor optical switch array 10b of from one AWG There is.

Two AWGs 55a and 55b used
The structural parameter of the second input / output channel waveguide 54 is
Since all are the same as those in the first embodiment except that the number is 10, the detailed description will be omitted. The waveguide structure used for forming each channel waveguide and the manufacturing procedure thereof are the same as those in the first embodiment, and the schematic configuration of the semiconductor optical switch array 10b is the same as that in the third embodiment, so detailed description thereof will be omitted. .

When connecting the fiber 11 to be connected, the first
From the input / output channel waveguide 51a to the first AWG 55a
Monitor light to the two AWGs 55a and 55b
Is transmitted through the second AWG 55b to the first input / output channel waveguide 51b and received by the connected fiber 11, and the connected fiber 11 is aligned so that the received light intensity is maximized. And fixed with a UV-curable organic adhesive. In the present invention, the first input / output channel waveguide 51a on the first AWG 55a side and the first input / output channel waveguide 51a on the second AWG 55b side are provided.
By using the input / output channel waveguide 51b of FIG. 1, connection of the connected fiber 11 can be performed by using a fiber connecting device having only an aligning function which has been conventionally used, without using a dummy waveguide for aligning. It can be performed.
The optical component of this embodiment can be manufactured by using the optical / electric hybrid integration technique shown in FIG.

Also in this embodiment, as in the first embodiment,
Fifty circuits of the above transmission wavelength selection circuit were manufactured. The characteristics of the two AWGs 55a and 55b were evaluated by using the second input / output channel waveguide 54b not connected to the optical function circuit 10b at the stage of chip formation with a dicing saw. Since the characteristic evaluation was performed by the same method as in Example 4,
Details are omitted. With this method, loss and crosstalk can be measured with an error of 0.1 dB or less, and the peak wavelength shift is 0.01 nm (1.25 GHz), as in the case of the fourth embodiment.
z) Accurate measurement was possible with the following error. As in the first embodiment, the allowable value of the characteristic is a loss of 2 dB or less, and the crosstalk 30
As a result of selecting non-defective products by setting the peak wavelength shift to 0.04 nm (5 GHz) or less, the two AWG5
The non-defective products in which 5a and 55b both satisfied the allowable value were 32 circuits corresponding to 64% of the whole. After that, a semiconductor optical amplifier chip is mounted on the selected non-defective product, and the semiconductor optical switch array 10b is driven to perform characteristic evaluation. As a result, two AWGs 55a and 55b are provided for all 32 circuits.
In both cases, good characteristics satisfying the above allowable values were obtained.
In this embodiment, two AWGs 55a are mounted before mounting the device.
And 55b characteristics can be accurately evaluated,
It was possible to select only
In comparison, it is possible to save the use of unnecessary elements.
Came.

[0071]

[0072]

[0073]

In this embodiment, as in the first embodiment, the two AWGs 55a and 55b and the semiconductor optical switch array 1 are arranged.
Since 0b and 0b are manufactured on the same substrate 1, it has excellent mechanical strength and long-term reliability. Furthermore, it is possible to select 18 defective products by the characteristic evaluation performed before mounting the optical functional element. Since it was possible to omit mounting the semiconductor optical amplifier chip on the defective product, compared to the conventional method of mounting elements on all circuits, the semiconductor optical amplifier chip mounting process and the cost required for the semiconductor optical amplifier chip Was reduced by 36%.

In this embodiment, the semiconductor optical amplifier chip is used as the optical functional element and the glass material containing quartz as the main component is used as the waveguide material, but the present invention is not limited to this. The present invention can also be applied to the case where the optical functional element and the waveguide material are used, and the same effects as reliability, productivity improvement, and production cost reduction can be obtained.

[0076]

As is apparent from the concrete description based on the embodiments, the plurality of A's are used in the present invention.
Fabricated using WG and optical / electric hybrid integration technology
Optical function circuit is integrated on the same substrate to form an optical component.
Multiple AWGs to bypass the optical function circuit when
The second input that is connected to the optical function circuit by connecting
The output channel waveguide is used as a groove for mounting the optical functional element.
Therefore, even if it is cut, the
Evaluate the characteristics of multiple AWGs that are connected in series
It is possible to sort, so useless optical functional elements for defective products
The process of mounting the
High mechanical strength, long-term reliability, high productivity, and low cost
can do. Moreover, a waveguide type optical component with excellent mechanical strength and long-term reliability can be easily connected without the need for a centering dummy waveguide and a complicated fiber connecting device capable of supplying power to the optical functional element. It can be provided with high productivity and low cost. Therefore, the present invention is extremely effective in putting into practical use an optical waveguide type optical component which has high mechanical strength, long-term reliability, high productivity, and low cost.

[Brief description of drawings]

FIG. 1A is a plan view showing a schematic configuration of a waveguide type optical component according to a first embodiment of the present invention, and FIG. 1B is an A in FIG.
It is a sectional view taken along the line A-A '.

FIG. 2 is a plan view showing a schematic configuration of a waveguide type optical component according to a second embodiment of the present invention.

FIG. 3 is a plan view showing a schematic configuration of a waveguide type optical component according to a third embodiment of the present invention.

FIG. 4 is a plan view showing a schematic configuration of a waveguide type optical component according to a fourth embodiment of the present invention.

FIG. 5 is a plan view showing a schematic configuration of a waveguide type optical component according to a fifth embodiment of the present invention.

FIG. 6 is a plan view showing a schematic configuration of a waveguide type optical component according to a sixth embodiment of the present invention.

7A is a plan view showing a schematic configuration of an arrayed waveguide diffraction grating (AWG), and FIG. 7B is a schematic diagram showing a schematic transmission spectrum of an AWG.

FIG. 8 is a process chart showing a manufacturing procedure of a waveguide type optical component manufactured by using an optical / electric hybrid integration technique.

[Explanation of symbols]

1 Si substrate 2 First lower cladding layer 3 PCB side alignment marker 4 Second lower cladding layer 5 cores 6 Upper clad layer 7 Electric wiring for power supply 8 Fixing AuSn solder 9 Optical function element side alignment marker 10 Optical functional element 10a Semiconductor PD array (optical functional circuit) 10b Semiconductor optical switch array 11 Connected fiber 1a Si terrace 51, 51a, 51b First input / output channel waveguide 52 channel waveguide array 53 Fan-shaped slab waveguide 53a First fan-shaped slab waveguide 53b Second fan-shaped slab waveguide 54, 54a, 54b Second input / output channel waveguide 55 Array Waveguide Diffraction Grating 55a First arrayed waveguide diffraction grating 55b Second arrayed waveguide diffraction grating

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akimasa Kaneko 3-19-2 Nishishinjuku, Shinjuku-ku, Tokyo Nihon Telegraph and Telephone Corporation (56) References Japanese Patent Laid-Open No. 10-303815 (JP, A) Special Features Kaihei 10-227936 (JP, A) JP 10-227934 (JP, A) JP 11-30722 (JP, A) JP 10-48458 (JP, A) JP 9-49937 ( JP, A) JP-A-8-313744 (JP, A) J. B. D. Soul et. a. , Electronics Letters, July 20, 1995, Vol. 31 No. 15, pp. 1289-1291 (58) Fields surveyed (Int.Cl. ⁷ , DB name) G02B 6/12-6/14 G02B 6/28-6/34

Claims (5)

(57) [Claims] 1. An optical functional circuit having a plurality of arrayed waveguide diffraction gratings each having first and second input / output channel waveguides, and an optical functional element optically coupled to the second input / output channel waveguides. In a waveguide type optical component in which the second input / output channel waveguides of each of the plurality of arrayed waveguide diffraction gratings are optically connected to each other via the optical functional circuit. The number of the second input / output channel waveguides of each of the plurality of arrayed waveguide diffraction gratings is determined to be at least one greater than the number of channels of the optical functional circuit to be connected, and the second
Among the input / output channel waveguides, one of each of the remaining input / output channel waveguides not connected to the optical function circuit is bypassed to the optical function circuit and the plurality of arrayed waveguide gratings Among them, a waveguide type optical component characterized in that it is connected to the remaining input / output channel waveguide of one of the other array waveguide diffraction gratings. 2. The waveguide type optical component according to claim 1, wherein the remaining input / output channel waveguide is a waveguide arranged on both outer sides of the second input / output channel waveguide. A waveguide type optical component. 3. When connecting an optical fiber to the waveguide type optical component according to claim 1 or 2, one of the plurality of arrayed waveguide diffraction gratings is used as the first optical fiber. Monitor light is input from the output channel waveguide, transmitted through the plurality of arrayed waveguide diffraction gratings, and propagated to the first input / output channel waveguides of other arrayed waveguide diffraction gratings. While receiving light with a fiber and measuring the received light intensity, align the connected optical fiber so that the received light intensity is maximized, and fix and connect the connected optical fiber and the waveguide type optical component. A method for connecting an optical fiber, characterized by: 4. The waveguide type optical component according to claim 1 or 2, wherein the substrate material is Si and the waveguide material is a glass material. 5. The optical fiber connecting method according to claim 3, wherein the substrate material is Si and the waveguide material is a glass material.