JP3444145B2 - Physical quantity detector - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention detects a physical quantity such as pressure or flow rate, converts it into an electric signal, displays the physical quantity, and binarizes the electric signal with a predetermined threshold value to output the signal. The present invention relates to a physical quantity detection device, and more particularly to a physical quantity detection device having a plurality of sensors that detect physical quantities.

[0002]

Prior Art and Problems to be Solved by the Invention FIG.
6 is an external view of a conventional pressure detection switch, and FIG.
FIG. 17 is an internal block diagram of the detection switch of FIG. 16. Figure 1
8 is an internal block diagram of a conventional amplifier-separated pressure detection switch.

The detection switch shown in FIGS. 16 and 17 is a piezoresistive semiconductor pressure sensor and LE for displaying a pressure value.
The D display and the signal processing unit for binarizing and outputting the converted electric signal are stored in the same housing. This pressure detection switch is used, for example, for controlling the original pressure of an electronic component mounting device or the like and for checking chucking of a wafer. In this case, since the pressure sensor unit, the pressure display unit, and the operation unit are housed in the same housing, when the pressure detection switch is attached to the panel surface of the semiconductor manufacturing apparatus, it is necessary to pipe to the pressure measurement point. Since the propagation speed of pressure is slower than that of light and electric signals, there is a problem that if the piping is laid long, it takes a long time for the pressure change to reach the sensor. This becomes a big problem for the electronic component mounting apparatus in which the improvement of the processing speed is an important issue.

Further, when a leak occurs in the pipe (which usually occurs when a chip component is adsorbed), a pressure gradient is generated in the pipe, and a difference in pressure value between the pressure detection unit and the pressure sensor unit occurs. There is a problem that the pressure measurement error becomes large. In addition, it is an important problem that piping is complicated, especially in moving parts, in terms of pipe breakage, deterioration of accuracy, and durability.

On the other hand, even if the pressure detection switch is to be provided in the vicinity of the pressure measurement point, the pressure measurement point is usually located inside the electronic component mounting device, so that it is extremely difficult or difficult to install due to space problems. However, the operability of the pressure setting and the visibility of the pressure display are reduced.

Further, when the pressure measuring portion is a movable portion, not only the inertia of the pressure detection switch becomes large due to the weight of the pressure detecting switch, but also when the movable portion moves at high speed, the pressure is displayed. There is a problem that the displayed value cannot be read.

Since the pressure sensor portion, the display portion and the signal processing portion are separated in FIG. 18, the problem as shown in FIG. 16 does not occur, but there is a problem that the cost is high because the housing is separate. is there.

Therefore, an object of the present invention is to provide a miniaturized physical quantity detection device which can improve the detection performance.

Another object of the present invention is to provide a physical quantity detection device capable of improving the visibility in the detection result display.

[0010]

According to another aspect of the present invention, there is provided a physical quantity detecting device, wherein a plurality of sensor units individually detect a physical quantity, convert the physical quantity into an electric signal and output the electric signal, and an electric signal output from each of the sensor sections. A plurality of sensor units, each of which includes a display unit that performs display based on the above, and a detection unit that processes an electrical signal output from each of the plurality of sensor units using corresponding parameters and outputs a binary signal of a physical quantity. Each is connected to the display unit and the detection unit in separate housings and is connected to multiple sensors.
An indicator lamp is provided for each of the
When setting, use the indicator light of the corresponding sensor
That parameter settings Ru is configured to be informed.

According to the physical quantity detection device of the first aspect, since the plurality of sensor units are connected to the display unit and the detection unit in separate casings, the sensor unit can be made compact and lightweight. Further, since the sensor unit can be easily installed near the physical quantity measurement location, no piping is required, and the detection accuracy and response speed can be further improved. Further, the sensor unit can be easily installed even if the detection location is a movable unit. In addition, since the operation and the output can be confirmed for the plurality of sensor units by using the same detection unit and display unit, the handling is improved. Space saving on the panel surface can be achieved as compared with the conventional case where a plurality of detection devices are installed on a plurality of panel surfaces. Compared to the number of sensors that can be connected to the detector and display, if the number of sensors that are actually connected is set to a small number, the panel surface will be cut when adding more sensors later. The sensor unit can be easily added without hanging. In addition, the display panel of the display unit can be enlarged, so that the visibility is improved.

[0012]

Further, since the effect of the parameters set by using the indicator of the sensor unit is informed, it can easily identify and confirm the sensor portion in the parameter settings.

When this indicator lamp is used as a power indicator lamp for the corresponding sensor section, it is possible to easily detect a failure or disconnection of the corresponding sensor section.

The physical quantity detecting apparatus according to claim 2 is configured so the parameters are copied between the respective sensor portions A device according to claim 1.

In the physical quantity detecting device according to the second aspect of the present invention, the parameters are copied between the respective sensor units, so that the parameter setting of a large number of sensor units can be carried out easily.

A physical quantity detection device according to a third aspect is the device according to the first or second aspect , wherein the parameters are collectively set for all of the plurality of sensor units.

According to the physical quantity detecting device of the third aspect , parameter setting of a large number of sensor portions can be carried out quickly and easily.

A physical quantity detecting device according to a fourth aspect is the device according to any one of the first to third aspects, in which the other one is determined based on the level of an electric signal output by a predetermined sensor part among the plurality of sensor parts. Is configured to adjust the parameters of the sensor unit of.

According to the physical quantity detecting device of the fourth aspect, when the output of the predetermined sensor unit and the output of the other sensor unit are interlocked with each other, the output fluctuation due to the disturbance of the predetermined sensor unit, etc. Since the parameters of the other sensor units are adjusted based on this, the physical quantity can be stably detected without being affected by these disturbances.

A physical quantity detection device according to a fifth aspect is the device according to any one of the first to fourth aspects, in which when the electric signal to be output reaches a predetermined level for each of the plurality of sensor parts, the display part is displayed. Is configured to display the level of the electric signal of the sensor unit and information for specifying the sensor unit.

According to the physical quantity detection device of the fifth aspect , the display can be automatically switched in accordance with the movement of the target physical quantity detection location. Further, it is possible to easily confirm the measured abnormal value of the physical quantity and the measurement location thereof.

According to a sixth aspect of the present invention, there is provided a physical quantity detection device according to any one of the first to fifth aspects, wherein a display mode regarding an electric signal output by each of the plurality of sensor units in the display unit is as desired. Is configured to be switched.

According to the physical quantity detection device of the sixth aspect , it is possible to freely switch the sensor unit to be displayed on the display unit by a signal from a host device connected to the device. Further, in the case where the display mode is automatically switched, the operation for switching the display is not necessary, and the physical quantity and the detection state of the physical quantity at a plurality of different locations can be easily confirmed.

Further, when the display mode is set to the digital value display and the analog bar display, the parameter setting displays the set value digitally for each sensor unit, and the physical quantity is displayed on the analog bar display during the physical quantity measurement mode. Display with good visibility can be performed. Further, according to the analog bar display, the detection states and the detection values of the plurality of sensor units can be collectively displayed on the display unit in the physical quantity measurement mode.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. Although the pressure is detected here, the physical quantity to be detected is not limited to the pressure.

FIG. 1 is an internal block diagram of a physical quantity detection device according to an embodiment of the present invention. FIG. 2 is an external view of the physical quantity detection device of FIG.

The physical quantity detection device shown in FIGS. 1 and 2 is
Each of the four sensor units 21 to 24 for one controller unit 1 which mainly performs signal processing is connected to each channel via the connector 14 and a cable. The sensor units 21 to 24 are sensors for detecting pressure,
They may be the same type of sensor or different types.

In the figure, a panel section of the controller section 1 is provided with a display section 11 and operation switches 12 for various settings or operations, inside which a signal processing section 15 comprising a microcomputer including a CPU and a memory, and an output. An external input section 17 having a section 16, an external input and
Also, the cable 13 for outputting the processing result signal by the signal processing unit 15 is connected to the output unit 16. Also,
Each of the sensor units 21 to 24 is made of a semiconductor, and each of the sensors 25 to 28 that detects pressure as an electric signal and the amplification units 29 to 32 that amplifies the detected electric signal so that it can be processed in a subsequent stage. Including each.

Further, each of the sensor units 21 to 24 is L
Each of the indicator lights 33 to 36 formed of ED is attached. The display unit 11 is a 7-segment LE for displaying various messages such as measured values, set values and error information.
D, including a channel display section for identifying and displaying the connection channel of the sensor section to be displayed, a connection state display section showing the connection state of the sensor section, and an operation display section showing the output state of each channel .

In operation, the pressure detected by the sensors (25 to 28) is converted into an electric signal and amplified as a pressure signal by the amplification section (29 to 32) to obtain an analog amount (DC1 to DC1).
5 V or 4 to 20 mA) is applied to the signal processing unit 15 of the controller unit 1 via the connector 14.
The signal processing unit 15 binarizes each pressure signal with a threshold value held in advance and outputs the binarized signal via the output unit 16.

Further, the channel to be displayed on the display unit 11 is switched by external input. FIG. 3 is an explanatory diagram of signal levels of external inputs corresponding to channels displayed on the display unit 11 of FIG. As shown in FIG. 3, the signal level of each of the externally operable external inputs provided in association with the external input section 17 and “H” or “L” is set.
By setting to, the data regarding the channel corresponding to the combination pattern of the external input and the signal level shown in FIG. 3 can be displayed on the display unit 11.

As described above, the controller unit of the four sensor units can be replaced by the single controller unit 1. Also, 4
The space on the panel surface of the controller unit 1 is shared by the two sensor units.

According to FIG. 1, the pressure sensor portion can be made compact and lightweight without increasing the cost. Further, since the pressure sensor unit can be installed in the vicinity of the pressure measurement point, there is no need for piping, and the pressure detection accuracy and response speed can be further increased. Further, the pressure sensor unit can be easily installed even if the pressure measurement location is a movable unit. In addition, the pressure sensors of multiple channels can be operated and checked at the same location, improving the ease of handling.

Space saving of the panel surface can be realized as compared with the conventional case where the sensor unit is installed on a plurality of panel surfaces. If the number of sensor units actually connected is set smaller than the number of sensor units that can be connected to the controller unit 1,
The sensor unit can be easily added without adding the trouble of cutting the panel surface when adding the sensor unit later. Further, since the display panel can be made large for each sensor unit, the visibility is improved.

FIG. 4 is a flow chart for initial setting in the physical quantity detection device shown in FIGS. At the time of initial setting of various parameters such as a threshold value for the binarization processing by the signal processing unit 15 described above, FIG.
First, according to the flowchart of FIG.
U determines whether or not the sensor unit is connected via the connector 14 (S1), and determines whether or not the setting mode is set according to the determination that the sensor unit is connected (S2).

At this time, the setting mode is set, for example, as shown in FIG.
The sensor units 21 to 24 are connected as shown in FIG. 3, and the indicator lights 33 to 36 of the sensor units 21 to 24 are turned on by the CPU as a power source display or the like, and the corresponding sensor unit is not defective. It is assumed that the user is informed that the operation is normal (Y in S2).

In response to the determination that the CPU is in the setting mode, the CPU changes the indicator lamp 33 of the sensor unit 21 from the lighting state to the blinking state to notify that the sensor unit 21 is the initial setting target (S3), Various parameters relating to the sensor unit 21 are initialized (S4). By repeating the above processing for each of the other sensor units 22 to 24 in the same manner, it is possible to perform the initial setting process while notifying the sensor units to be set of all the connected sensor units 21 to 24. it can.

On the other hand, it is assumed that the indicator lamps 33 to 36 of the sensor units 21 to 24 are in the extinguished state in the measurement mode instead of the setting mode (N in S2). At this time, the CPU is the sensor unit 2
The indicator light 33 of No. 1 is switched from the extinguished state to the lit state to notify that the sensor unit 21 is the measurement target (S5), and the pressure measurement process including the binarization process described above for the sensor unit 21 is performed ( S6). The above processing is performed by the other sensor unit 22.
Similarly, it is possible to perform the measurement process while informing each of the connected sensor units 21 to 24 about the sensor unit to be measured.

FIG. 5 is a flow chart for copying the set values in the physical quantity detection device shown in FIGS. 1 and 2. “CH” in the following figures and in the description is an abbreviation for a channel, and each of CH1 to CH4 indicates a connection channel of each of the sensor units 21 to 24.

In FIG. 5, parameter setting processing such as initial values for each CH is performed using copying from CH to CH. First, the user operates the operation unit (operation switch) 12 to select the CH from which the value is copied.
Reads the set value from the memory area of the copy source CH and turns on the corresponding indicator lamps (33 to 36) for identifying and informing the selected copy source CH (S7).

Next, the user operates the operation unit (operation switch) 1
2 is operated to select the destination CH of the value, and accordingly C
The PU performs copying by writing the previously read set value of the copy source CH in the memory area of the copy destination CH (S).
8, S9). At this time, the corresponding indicator lights (33 to 36) for identifying and notifying the copy destination CH are set in, for example, a blinking state.

As described above, the copy source CH and the copy destination CH are displayed separately and can be switched independently. Further, as shown in FIG. 5, all CHs can be selected as the copy destination, so that the value setting man-hours can be reduced by copying the value obtained by teaching only the 1CH of the copy source to all the CHs.

FIG. 6 is a flowchart for setting ON / OFF points in the physical quantity detection device shown in FIGS. 1 and 2. For each CH, the value of the ON point and the value of the OFF point of its output are set as follows.

First, the user operates the operation unit (operation switch) 1
2 is operated and the target CH is switched to, for example, CH1, and the values of the ON point and the OFF point are input.
U stores the input ON point and OFF point values in memory C
Write in the area corresponding to H1 (S10).

In the same manner, the values of the ON point and the OFF point for each of CH2 to CH4 are sequentially determined in the same manner.
Is written in the corresponding area of the memory (S
11-S13). In addition, the user operates the operation unit 12 to specify all the CHs, and the same ON point and OF for all the CHs.
When the F point setting is instructed, the CPU writes the same input ON point and OFF point values in all the CH regions of the memory (S14).
The values of the points and OFF points can be set collectively.

In particular, when a workpiece such as a chip component is sucked by the suction nozzle, a plurality of pressure sensors for confirming the suction are provided in the suction nozzle, and the same O is applied to all CHs.
Since the values of the N point and the OFF point are often set, the setting man-hour can be significantly reduced according to the flowchart of FIG.

Further, according to the flowchart of FIG. 6, it becomes easy to finely adjust the set value for each CH after setting the same value for all CHs at once.

FIGS. 7A and 7B are views for explaining that a malfunction occurs in the physical quantity detection device shown in FIGS. 1 and 2 due to a disturbance. 8A and 8B are flowcharts for eliminating the malfunctions shown in FIGS. 7A and 7B.

FIG. 9 is a diagram for explaining the new threshold value setting according to the flow chart of FIG. 8A, and FIG.
It is a figure explaining the output correction by the flowchart of (b).

In FIG. 7A, the suction confirmation pressure sensor 40 is provided at the nozzle 43 for adsorbing the work 42 at one end, and the nozzle 4 is provided at the other end of the nozzle 43.
Source pressure confirmation pressure sensor 4 for measuring reference pressure in 3
1 is provided. In FIG. 7A, the work 42 is sucked by the suction nozzle 43.

Recently, since the work 42 such as a chip component has been downsized, the suction nozzle 43 has a small diameter, and the pressure difference in the nozzle 43 before and after the suction is small. Also,
At the time of suction, air leaks from the gap between the nozzle 43 and the work 42 as shown by the dotted line in the figure, so the nozzle 43
A pressure gradient is generated inside, and the pressure difference becomes smaller and smaller, which makes detection difficult. Therefore, as shown in FIG. 1, since the sensor unit can be downsized, the sensor unit can be installed near the suction nozzle 43 to facilitate detection and increase the response speed.

However, as shown in FIG. 7B, for example, when a plurality of devices are connected to the source pressure, the operating state of each device becomes a disturbance and the source pressure is changed, and the nozzle 4 is changed.
Although 3 does not adsorb the work 42, the output of the adsorption confirmation pressure sensor 40 exceeds the threshold value 44 and malfunctions. Even in applications where the exhaust pressure of the exhaust duct of semiconductor manufacturing equipment is detected, such malfunctions may occur when the output from the reference pressure measurement sensor changes as the internal pressure of the clean room changes due to downblowing in the clean room or opening / closing of the door. There is also.

The problems of these malfunctions are shown in FIGS. 8 (a) and 8 (b).
It is resolved according to the flowchart of.

In FIG. 8A, the influence of the fluctuation of the original pressure is removed by correcting the threshold value 44 of the suction confirmation pressure sensor 40 according to the amount of the fluctuation of the original pressure. The reference value of the source pressure of the source pressure confirmation pressure sensor 41 is stored in advance in the area corresponding to the sensor 41 of the memory of the processing unit 15 according to the above-described parameter setting process.

First, the correction coefficient is arbitrarily set by the user via the operation unit 12 (S15), and the CPU fetches the threshold value 44 from the area of the sensor 40 of the memory (S16) and the sensor 41 of the memory. The reference value of the source pressure is read out from the region and the source pressure fluctuation amount is obtained based on the current output of the sensor 41 (S17). Next, for example, the threshold value 4 is set in accordance with “threshold correction amount = source pressure fluctuation amount (%) × correction coefficient”.
The correction amount of 4 is calculated (S18). A new threshold value 45 is obtained by using the calculated threshold value correction amount, and the threshold value 45 is set as a new threshold value in the area of the sensor 40 of the memory (S19), and then the process of S15 is performed. After that, the threshold value correction process is continued in the same manner.

The result of threshold value correction according to the flow of FIG. 8A is shown in FIG. The reference value of the source pressure of the source pressure confirmation pressure sensor 41 used in the flowchart of FIG. 8A may be an intermediate point between the ON point and the OFF point of the sensor 41.

In FIG. 8B, the pressure sensor 4 for confirming the original pressure is shown.
The output of the suction confirmation pressure sensor 40 is corrected by subtracting the output of 1 and the output of the suction confirmation pressure sensor 40.

First, the CPU is the pressure sensor 41 for confirming the original pressure.
(S20), then the suction pressure value output by the suction confirmation pressure sensor 40 is fetched (S2).
1), the suction pressure value is subtracted from the original pressure value to obtain the differential pressure value (S22). This differential pressure value is set to a preset threshold value 44.
The output of the suction confirmation pressure sensor 40 is determined by comparing with the above, and the influence of the fluctuation of the original pressure is removed.

FIG. 10 shows the output of the suction confirmation pressure sensor 40 corrected according to the flow of FIG. 8B.

As described above, without being affected by the fluctuation of the source pressure,
In addition, stable detection can be performed without being affected by disturbance such as wind.

FIGS. 11 and 12 are flow charts showing an example of a display switching procedure and another example when the outputs of a plurality of sensor sections are turned on in the physical quantity detection device of FIGS. 1 and 2.

In the physical quantity detection device of FIGS. 1 and 2, when the outputs of a plurality of CHs are in a predetermined range and are in the ON state, the CH having a high priority among the plurality of CHs is displayed as shown in FIG. 12 may be processed as shown in FIG.
Alternatively, a plurality of CHs may be sequentially switched and displayed at predetermined time intervals as shown in FIG.

In FIG. 11, if it is assumed that CH1, CH2, CH3, and CH4 are installed in order according to the flow of the process, the CHs are switched and displayed in order according to the flow of the process. Therefore, the display priority is CH1>CH2>CH3> CH4.

According to the process flow, first, CH1 is turned on (Y in S23), and accordingly the CPU displays the channel number "CH1" and its measured value on the display unit 11 (S2).
4, S25). When the measured values of all CHs are displayed on the display unit 11, only the measured values of CH1 may be turned on or blinked.

After that, since the steps proceed in order, the display section 11 switches the display to CH2, CH3, CH4 in the same manner.

As described above, since the display of the display unit 11 is switched in a predetermined order, in this case, in the order according to the flow of the process, if any abnormality occurs, it is possible to easily confirm the occurrence and the location of the abnormality.

In FIG. 12, CH1, CH2,
The channel number and the corresponding measurement value are switched and displayed at a predetermined interval (timer) in the order of CH3 and CH4.

FIG. 13 is a processing flowchart for displaying measured values in the physical quantity detection device of FIGS. 1 and 2. In FIG. 13, the measured values of CH displayed on the display unit 11 are switched at fixed time intervals. The CPU first displays the CH number "CH1" and its measured value on the display unit 11 according to the internal timer (S40), and after a certain period of time, CH
The number 2 “CH2” and its measured value are displayed (S4
1). Thereafter, similarly, CH3 and CH4 are sequentially performed (S42 and S43).

As described above, the display is automatically switched even if the user does not operate the keys of the operation section 12, so that the states of a plurality of pressure measurement points can be easily confirmed.

14 (a) and 14 (b) are shown in FIGS.
FIG. 7 is a diagram for explaining switching of the display mode of the physical quantity detection device shown in FIG. FIG. 15 is a processing flowchart for switching the display mode of FIG.

In this physical quantity detection device, it is possible to switch between a display mode in which the measured value of only a predetermined CH is digitally displayed on the display unit 11 and a display mode in which the input states of all CHs are displayed in an analog bar. In FIG. 14A, the former display mode is shown, and the measured value of “CH1” is digitally shown as “730”. In FIG. 14B, the latter display mode is shown, and the input status is shown by analog bar display for all CHs.

The switching between the above two display modes is, for example, the former digital display mode which is excellent in quantitative recognition when setting the parameters of each CH, and the latter analog bar display mode which is excellent in visibility in the normal measurement mode. You may make it possible to grasp the operating condition of the moment.

When the CH output has an error value, the output value of the corresponding CH is automatically displayed in FIG. 14A so that the abnormality can be promptly confirmed. Good.

Further, the switching of the display modes of FIGS. 14A and 14B can be similarly applied to the physical quantity detecting device connecting only 1CH.

In FIG. 15, when all the CHs are selected in the measurement mode (Y in S58), the measured values of all the CHs are displayed in the analog bar of FIG. 14 (b). The corresponding CH is digitally displayed in FIG. 14A (S50 to S57).

When a predetermined CH is selected, the digital display and the analog bar display may be simultaneously performed for the corresponding CH, or only the analog display may be displayed and the digital display may be turned off. Turning off the digital display can reduce power consumption.

[Brief description of drawings]

FIG. 1 is an internal block diagram of a physical quantity detection device according to an embodiment of the present invention.

FIG. 2 is an external view of the physical quantity detection device in FIG.

3 is an explanatory diagram of a signal level of an external input corresponding to a channel displayed on the display unit of FIG.

FIG. 4 is a flowchart for initial setting in the physical quantity detection device shown in FIGS. 1 and 2.

5 is a flowchart for copying set values by the physical quantity detection device shown in FIGS. 1 and 2. FIG.

6 is a flowchart for setting ON / OFF points in the physical quantity detection device shown in FIGS. 1 and 2. FIG.

7A and 7B are diagrams for explaining that malfunction occurs due to disturbance in the physical quantity detection device shown in FIGS. 1 and 2. FIG.

8A and 8B are flowcharts for eliminating the malfunction shown in FIGS. 7A and 7B.

FIG. 9 is a diagram illustrating new threshold value setting according to the flowchart of FIG.

FIG. 10 is a diagram illustrating output correction according to the flowchart of FIG.

FIG. 11 is a flowchart showing an example of a display switching procedure when the outputs of a plurality of sensor units are turned on by the physical quantity detection device of FIGS. 1 and 2.

FIG. 12 is a flowchart showing another example of the display switching procedure when the outputs of the plurality of sensor units are turned on in the physical quantity detection device of FIGS. 1 and 2.

13 is a processing flowchart for displaying measured values in the physical quantity detection device of FIGS. 1 and 2. FIG.

14A and 14B are diagrams for explaining switching of display modes of the physical quantity detection device shown in FIGS. 1 and 2.

FIG. 15 is a processing flowchart for switching display modes of FIGS. 14 (a) and 14 (b).

FIG. 16 is an external view of a conventional pressure detection switch.

17 is an internal block diagram of the detection switch of FIG.

FIG. 18 is an internal block diagram of a conventional amplifier-separated pressure detection switch.

[Explanation of symbols]

1 controller 11 Display 12 Operation part 15 Signal processing unit 21-24 Sensor part 33-36 indicator light The same reference numerals in the drawings indicate the same or corresponding parts.

─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) G01D 21/00 G01L 19/08

Claims (6)

(57) [Claims] 1. A plurality of sensor units that individually detect a physical quantity, convert the physical amount into an electric signal and output the electric signal, a display unit that displays based on the electric signal output from each of the sensor units, and the plurality of sensors. In a physical quantity detection device including a detection unit that processes the electrical signal output from each of the units using a corresponding parameter and outputs a binarized signal of the physical amount, each of the plurality of sensor units is The plurality of sensor units are connected to the display unit and the detection unit in separate housings.
An indicator lamp is provided for each of the
When the parameter setting is made, in front of the corresponding sensor
That the parameter setting is characterized Rukoto be informed using the serial display lamp, a physical quantity detecting device. 2. The physical quantity detection device according to claim 1 , wherein the parameter is copied between each of the sensor units. 3. The parameter is collectively set for all of the plurality of sensor units,
Physical quantity detecting apparatus according to claim 1 or 2. 4. The parameter of another sensor unit is adjusted based on the level of the electric signal output by a predetermined sensor unit among the plurality of sensor units.
Physical quantity detecting apparatus according to any one of claims 1 to 3. 5. When the electric signal to be output reaches a predetermined level for each of the plurality of sensor units,
The information specifying the level and the sensor portion of the electrical signal of the sensor unit, characterized in that it is displayed on the display unit, the physical quantity detecting device according to any one of claims 1 to 4. 6. The display mode according to any one of claims 1 to 5 , wherein a display mode regarding the electric signal output by each of the plurality of sensor units in the display unit is switched as desired. Physical quantity detection device.