JP3439842B2 - Oxygen / hydrogen generator - Google Patents

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to an apparatus for producing high-purity oxygen gas and hydrogen gas, and more specifically,
To supply oxygen gas and hydrogen gas in high purity required in various industrial fields such as oxide film formation processing and various heat treatment steps in the semiconductor manufacturing process, and to prevent corrosion of cooling water piping of nuclear power generation equipment Of equipment.

[0002]

2. Description of the Related Art Conventionally, the oxygen gas and hydrogen gas used in the various industrial fields mentioned above have been produced by using a by-product gas generated during salt electrolysis or petroleum refining by a catalytic combustion refining method or the like. After being purified to a certain degree of purity of hydrogen gas, the gas cylinder is filled under high pressure and supplied to the user for use.

On the other hand, with respect to oxygen gas, air is liquefied by the Joule-Thomson method and separated by the cryogenic separation method by utilizing the difference in boiling points to produce oxygen gas with a certain degree of purity, which is in the state of liquid oxygen. It is supplied to the cold evaporator (oxygen gas generator) of the factory in order to be vaporized and used as gas, or it is supplied to the user after being filled into a gas cylinder at high pressure and filled.

However, the gases such as oxygen and hydrogen supplied in this manner include nitrogen, carbon dioxide, carbon monoxide,
Impurities such as hydrocarbons and water are also contained, and they are not completely removed.For that reason, in order to further remove and purify the impurities, high-level purification such as adsorption treatment with an adsorbent or palladium membrane permeation method is performed. According to the treatment method, it is actually used after being purified and individually purified. However, there are impurities such as nitrogen that are difficult to remove even by such a purification treatment method. For example, in the field of semiconductors and the like, such residual impurities pose a problem in the recent purification of elements. .

Oxygen and hydrogen are filled in a cylinder at a high pressure and supplied, or are stored in a liquid state, and there is a risk that gas may leak and cause ignition or explosion during transportation, storage, or an emergency such as an earthquake. There was also a problem in terms of safety.

In order to solve such a conventional problem, the inventors of the present invention have disclosed, in JP-A-5-287570, a porous solid electrolyte such as a cation exchange membrane (fluorine) as shown in FIG. A resin-based sulfonic acid cation exchange membrane, for example, "Nafion 117" manufactured by DuPont) is used as a diaphragm, and a solid polymer electrolyte membrane having a structure in which a porous anode and a cathode made of a white metal group metal are bonded to both sides Using a water electrolysis cell with a structure separated into a chamber and a cathode chamber,
While proposing electrolysis while supplying pure water to the anode chamber, oxygen gas from the anode chamber, while proposing an oxygen-hydrogen generator using a water electrolysis cell configured to generate hydrogen gas from the cathode chamber, In Japanese Unexamined Patent Publication (Kokai) No. 5-287570, as shown in FIG. 7, oxygen gas and hydrogen gas generated in a water electrolyzer are introduced into a dehumidifier composed of molecular sieves to remove water contained in the gas. An oxygen / hydrogen generator capable of obtaining oxygen gas and hydrogen gas with higher purity is provided.

[0007]

However, in the dehumidifier using the molecular sieve, as shown in FIG. 7, in general, one of the dehumidifiers is used for dewatering and refining for continuous operation. Since it is necessary to desorb saturated water in the other dehumidifier, it is necessary to use two or more dehumidifiers in parallel, which requires a complicated device configuration such as a controller.

Further, in the dehumidifying apparatus using the molecular sieve, it is necessary to regenerate the adsorption capacity of the molecular sieve when the moisture adsorbed on the molecular sieve becomes saturated.
Swing cycle, pressure swing cycle, purge gas stripping cycle, displacement cycle, etc. It is not suitable as a system to be incorporated into the system, because complicated maintenance such as removing moisture by water and replacing nitrogen gas with oxygen gas or hydrogen gas is required.

Further, in a dehumidifier using a molecular sieve, since it is an inorganic compound such as crystalline zeolite, there is a possibility that impurity particles such as alumina may be mixed in high-purity oxygen gas or hydrogen gas, which is not preferable. It was

Further, in the dehumidifier using the molecular sieve, the dew point of the gas after moisture removal can be lowered to around -80 ° C. However, in the field of application other than semiconductor manufacturing, the dew point around room temperature is sufficient. In some cases, therefore, there is a problem that the specifications become over-specified with respect to the required dew point and the cost becomes rather high.

[0011]

In view of the above situation, the present invention is capable of efficiently removing water contained in oxygen gas and hydrogen gas with a simple device configuration and without requiring complicated maintenance. An object of the present invention is to provide an oxygen / hydrogen generator which is equipped with a dehumidifier and is capable of producing a higher purity oxygen gas and hydrogen gas.

The present invention has been made in order to achieve the problems and objects in the prior art as described above, and the gist of the constitution is the following (1) to (1).
( 6 ).

(1) An electrolyte membrane is used as a diaphragm to separate an anode chamber and a cathode chamber, and pure water is electrolyzed while supplying pure water to the anode chamber, and oxygen gas is discharged from the anode chamber to the cathode. Water electrolysis device configured to generate hydrogen gas from the chamber, respectively, connected to the water electrolysis device, oxygen gas generated in the anode chamber of the water electrolysis device, and moisture contained in the hydrogen gas generated in the cathode chamber , An oxygen / hydrogen generator comprising a thermoelectric cooling element type dehumidifier for dehumidifying
In the above, the thermoelectric cooling element type dehumidifier is
Oxygen gas dehumidifying unit with child cooling element and thermionic cooling element
Hydrogen gas dehumidifying section with a child, and both thermionic cooling elements
In order to dissipate the heat of
Oxygen, characterized in that it is composed of
Hydrogen generator.

[0014]

( 2 ) Each of the oxygen gas dehumidifying section and the hydrogen gas dehumidifying section is composed of a primary cooling chamber and a secondary cooling chamber, and a gas pipe for primary cooling is arranged in the primary cooling chamber, The gas cooled and dehumidified in the secondary cooling chamber and circulated to the primary cooling chamber is configured to primarily cool the gas introduced into the primary cooling chamber and flowing through the gas pipe, and the outlet of the gas pipe of the primary cooling chamber is configured. , The secondary cooling chamber is connected, the primary cooled gas is introduced into the secondary cooling chamber, and the gas introduced into the secondary cooling chamber is removed by the thermionic cooling element attached to the secondary cooling chamber. The secondary cooling chamber is configured to be cooled next, and the secondary cooling chamber is connected to the gas circulation opening of the primary cooling chamber so that the gas cooled and dehumidified in the secondary cooling chamber is circulated to the primary cooling chamber. It described above, characterized in that the configuration was to (1) Mounting of the oxygen-hydrogen generator.

( 3 ) A cooling / dehumidifying member made up of fins is formed on a wall portion on the thermoelectric cooling element side in the secondary cooling chamber, as described in (1) or (2) above. Oxygen / hydrogen generator.

( 4 ) A gas-liquid separator for oxygen gas for gas-liquid separating oxygen generated in the anode chamber of the water electrolyzer,
To connect between the anode chamber of the water electrolyzer and the oxygen gas inlet of the oxygen gas dehumidifying unit of the thermoelectric cooling element type dehumidifier, and to separate the hydrogen generated in the cathode chamber of the water electrolyzer into gas and liquid. The gas-liquid separator for hydrogen gas is connected between the cathode chamber of the water electrolyzer and the hydrogen gas inlet of the hydrogen gas dehumidifying unit of the thermoelectric cooling element type dehumidifying device, and further, the oxygen gas dehumidifying unit and The drain for draining provided in the secondary cooling chamber of the hydrogen gas dehumidifying unit is connected to the gas-liquid separator for oxygen gas and the gas-liquid separator for hydrogen gas, respectively, from the above (1) Oxygen according to any of (3)
Hydrogen generator.

( 5 ) The oxygen / hydrogen generator according to any one of the above (1) to (4) , wherein the heat radiating portion is a water cooling type heat radiating device.

[0019] (6) to each of the oxygen gas dehumidifying unit and the gas discharge port formed in a secondary cooling chamber of the hydrogen gas dehumidifying unit, characterized in that connecting the decompression device of the aforementioned (1)
The oxygen / hydrogen generator according to any one of (5) .

[0020]

Embodiments of the present invention will now be described in more detail with reference to the drawings.

FIG. 1 is a diagram showing the overall construction of an embodiment of the oxygen / hydrogen generator of the present invention. Reference numeral 1 denotes the whole oxygen / hydrogen generator of the present invention. The oxygen / hydrogen generator 1 of the present invention electrolyzes pure water supplied from a pure water supply system (not shown) to generate oxygen gas from the anode chamber and hydrogen gas from the cathode chamber. A water electrolysis device 10 having a structure as shown in FIG. 6 is provided. In this example, a solid polymer electrolyte membrane was used as the electrolyte membrane.

On the anode side of the water electrolysis device 10, a gas-liquid separation device 20 for oxygen gas for separating the oxygen generated in the anode chamber of the water electrolysis device 10 into a gas-liquid is connected, while the water electrolysis device 10 is connected.
A gas-liquid separator 30 for hydrogen gas for gas-liquid separation of hydrogen generated in the cathode chamber of the water electrolysis apparatus 10 is connected to the cathode side of the.

The oxygen gas and the hydrogen gas, which have been gas-liquid separated in the two gas-liquid separators 20 and 30, are respectively the oxygen gas dehumidifying section 42 of the thermoelectric cooling element (Peltier) type dehumidifier 40 and the hydrogen gas. The water is introduced into the dehumidifying section 43 and is configured to remove water contained in the gas. Oxygen gas dehumidifying section 42 and hydrogen gas dehumidifying section of dehumidifying device 40
The oxygen gas and hydrogen gas whose moisture has been removed and the dew point has been lowered in 43 are appropriately supplied to an oxygen gas and hydrogen gas utilization facility (not shown). The water separated by the gas-liquid separators 20 and 30 is supplied to a drainage system (not shown) and appropriately drained.

As shown in FIG. 3, the dehumidifying device 40 basically has an oxygen gas dehumidifying section 42 provided with a thermoelectric cooling element 41a.
And a hydrogen gas dehumidifying section 43 equipped with a thermoelectric cooling element 41b.
In order to dissipate the heat of both thermoelectric cooling elements 41a, 41b,
It is composed of a heat radiating portion 44 arranged between both thermoelectric cooling elements.

The oxygen gas dehumidifying section 42 and the hydrogen gas dehumidifying section 43 are symmetrical and have the same structure. Below, for convenience of explanation, the hydrogen gas dehumidifying section 43 and the heat radiating section will be described. Only the structure of 44 will be explained, and the oxygen gas dehumidifying unit 42
With respect to the structure of, the same reference numerals are added in the drawings.

FIG. 2 is an exploded perspective view showing the detailed structures of the hydrogen gas dehumidifying section 43 and the heat radiating section 44. The hydrogen gas dehumidifying section 43 is shown in FIG.
Is composed of a primary cooling chamber 43a and a secondary cooling chamber 43b.

At the upper part of the primary cooling chamber 43a, there is a gas-liquid separation device.
A hydrogen gas inlet 43c for introducing the hydrogen gas that has been gas-liquid separated in 30 is provided, and the hydrogen gas inlet 43c is
A space 43d provided inside the primary cooling chamber 43a is connected to a gas pipe 43e for primary cooling arranged in a zigzag shape.

The outlet 43f at the end of the gas pipe 43e for primary cooling has a side wall 43 on the side of the secondary cooling chamber 43b of the primary cooling chamber 43a.
It is configured to penetrate through the vicinity of the bottom of g and reach the space 43d ′ of the secondary cooling chamber 43b.

A gas outlet 43h for discharging the cooled and dehumidified hydrogen gas is provided at the bottom of the primary cooling chamber 43a as described later. In addition, the primary cooling chamber 43
A gas circulation opening 43i is formed in the upper part of the side wall 43g on the side of the secondary cooling chamber 43b of a.

On the other hand, on the side wall 43j of the secondary cooling chamber 43b opposite to the primary cooling chamber 43a, cooling / dehumidifying members 43k, 43k composed of a plurality of comb-shaped fins spaced at regular intervals are provided. It is projected in the space 43d 'of 43b. A drain 43l is provided at the bottom of the secondary cooling chamber 43b to remove the water cooled and removed from the hydrogen gas, and the inner wall 43m at the bottom of the secondary cooling chamber 43b promotes drainage. Therefore, the structure is inclined toward the drain 43l. The drain 43l is connected near the bottom of the gas-liquid separator 30 as shown in FIG.

Further, on the side wall 43j of the secondary cooling chamber 43b,
A thermoelectric cooling element 41b is attached to the outside. Then, as shown in FIG. 3, between the thermionic cooling elements,
A heat radiating portion 44 is provided to radiate the heat of both thermoelectric cooling elements. The heat radiating portion 44 is formed by the side wall 44a of the heat radiating portion 44.
In the space 44b of the heat dissipation part 44, a plurality of baffle plates 44c and 44c projecting at different positions form a zigzag passage 44d for the refrigerant, and the refrigerant drainage on the upper wall of the passage 44d. A port 44e and a coolant inlet 44f are formed on the bottom wall. In this case, it is preferable to use water as the refrigerant to be used in consideration of thermal conductivity.

As a preferable material for each of the above-mentioned members, considering the prevention of contamination of impurities due to corrosion and particle generation, the cooling / dehumidifying member 43k is made of aluminum having a corrosion-resistant surface treatment, and other members. As for, use is made of electrolytically polished stainless steel and then subjected to heat treatment in an oxidizing atmosphere to form a colored oxide film, or after heat treatment, the colored oxide film is dissolved and removed by pickling and washing. It is desirable to use
-13563, JP 62-17184 (JP-B2-1916), JP 2
-141566).

The dehumidifying device 40 thus constructed is shown in FIG.
As shown in FIG. 1, first, the hydrogen gas separated in the gas-liquid separator 30 is separated into the primary cooling chamber 43 of the hydrogen gas dehumidifying section 43.
While being introduced through the hydrogen gas introduction port 43c of a and flowing through the gas pipe 43e for primary cooling, the primary cooling chamber 43a is cooled and dehumidified in the secondary cooling chamber 43b and is passed through the gas recirculation opening 43i. The hydrogen gas is primarily cooled by the gas recirculated to the space 43d.

After that, the hydrogen gas introduced into the space 43d 'of the secondary cooling chamber 43b via the outlet 43f at the end of the gas pipe 43e is heated by the heat attached to the outside of the side wall 43j of the secondary cooling chamber 43b. When passing between the cooling / dehumidifying members 43k, 43k cooled by the Peltier effect of the electronic cooling element 41b, secondary cooling, that is, cooling / dehumidifying, is performed to lower the dew point.

As described above, the secondary cooled hydrogen gas is
Opening for gas circulation in the side wall 43g of the primary cooling chamber 43a
After the primary cooling of the hydrogen gas flowing through the primary cooling chamber 43a to the space 43d of the primary cooling chamber 43a again through the primary cooling chamber 43a and flowing through the gas pipe 43e for primary cooling, it was provided at the bottom of the primary cooling chamber 43a. Cooled and dehumidified hydrogen gas is discharged through the gas outlet 43h, and hydrogen gas utilization facility (not shown)
It will be supplied as needed.

On the other hand, the water cooled and removed from the hydrogen gas in the secondary cooling chamber 43b passes through the drain 43l provided at the bottom of the secondary cooling chamber 43b, as shown in FIG.
It is designed to be introduced near the bottom of the gas-liquid separator 30.

In the oxygen gas dehumidifying section 42 as well, the oxygen gas is cooled and dehumidified in the same cycle.

With respect to the present oxygen / hydrogen generator equipped with such a dehumidifier 40, the Peltier energization amount is operated at 4 A,
When the dew point of the gas was measured, the results shown in Table 1 below were obtained.

[0039]

[Table 1]

If the current supplied to the thermoelectric cooling elements 41a, 41b is too large, the temperature of the dehumidifier 40 will drop too much and the water inside the dehumidifier may freeze, possibly blocking the pipes and causing continuous operation. The temperature of the dehumidifier 40 to the side walls 42j, 43j of the secondary cooling chambers 42b, 43b, which are cooling sections, or the cooling / dehumidifying members 42k, 43k from the outside, such as a thermocouple. If the temperature of the dehumidifier falls below a predetermined value (for example, 2 ° C), the energization of the thermoelectric cooling elements 41a, 41b is stopped, and conversely,
If the temperature of the dehumidifier reaches a specified value (for example, 5 ° C) or more, a continuous operation is possible if a control device (not shown) is provided to start energizing the thermoelectric cooling elements 41a, 41b. Becomes

FIG. 5 is a diagram showing the overall structure of another embodiment of the oxygen / hydrogen generator of the present invention, which has the same structure as the above embodiment, but the gas outlets 42h, 43h of the dehumidifier 40. The difference is that a pressure reducing valve is provided after. This is because if the temperature is constant, the saturated steam pressure is constant, so generate a gas at a pressure as high as possible compared to the pressure used,
By reducing the partial pressure of water vapor and then adiabatically expanding (decompressing) it to be used, a gas having a smaller water content and a lower dew point can be obtained.

For example, when the dew point was measured with and without the pressure reducing valve, the results shown in Table 2 below were obtained.

[0043]

[Table 2]

[0044]

According to the oxygen / hydrogen generator of the present invention, the oxygen / hydrogen generator of the present invention is a very excellent invention which exhibits the following remarkable and unique effects.

(1) Like an oxygen / hydrogen generator using a dehumidifier using a molecular sieve as a dehumidifier,
Since maintenance such as regeneration of the molecular sieve that has become saturated with water is not required, continuous operation is possible and no complicated device configuration is required.

(2) Since it is possible to remove water without the risk of impurities being mixed in unlike an oxygen / hydrogen generator equipped with a dehumidifier using a molecular sieve, it is possible to use a higher purity oxygen gas or hydrogen gas. Can be provided.

(3) Since the dew points of oxygen gas and hydrogen gas that have passed through the dehumidifier of this apparatus are dew points around room temperature, they can be applied to fields of application other than semiconductor manufacturing.

(4) Since the oxygen gas dehumidifying unit and the hydrogen gas dehumidifying unit are provided in one dehumidifying device, it is not necessary to provide a plurality of dehumidifying devices, and the size of the entire device becomes compact.

(5) Since the oxygen gas dehumidifying section and the hydrogen gas dehumidifying section are each composed of the primary cooling chamber and the secondary cooling chamber, the gas is cooled by the thermionic cooling element in the secondary cooling chamber, and as a result, , The moisture in the gas is dehumidified. In this case, the gas circulated from the secondary cooling chamber to the primary cooling chamber is
For example, when the dew point is 5 ° C, it is 5 ° C (humidity 100%).

By precooling the gas flowing into the primary cooling chamber with this cooled gas, pre-dehumidification is performed.

Therefore, the heat can be effectively used in order to utilize the gas having the low temperature after the secondary cooling for the primary cooling without leaving the gas outside the system.

The gas after the secondary cooling has a humidity of 100%, but since it is used for the primary cooling, the amount of water in the gas remains constant and the gas temperature rises, so the humidity decreases. .

Therefore, in the case of a gas having a humidity of 100%, dew condensation will occur immediately due to a slight temperature difference, but the gas cooled and dehumidified by using this device takes a long time to dew and is difficult to dew. It is possible to obtain gas.

(6) Since the cooling / dehumidifying member consisting of fins is formed on the wall portion on the thermoelectric cooling element side in the secondary cooling chamber, the contact area between the cooled cooling / dehumidifying member and the gas (heat transfer area) ) Becomes large, it is possible to cool and dehumidify more efficiently.

(7) Since the dehumidifier of this apparatus is configured to return the water content after removing the water content in the gas to the gas-liquid separation apparatus, more continuous operation is possible.

(8) Since the heat radiating portion is a water cooling type heat radiating device, the heat transfer effect is greater than that of the air cooling type, so that the cooling effect of the thermoelectric cooling element is increased and the dehumidifying effect is also achieved. Increase.

(9) With a device provided with a pressure reducing valve after the gas discharge ports 42h, 43h of the dehumidifier 40, it is possible to obtain a gas having a smaller water content and a lower dew point.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing the overall configuration of an embodiment of an oxygen / hydrogen generator of the present invention.

FIG. 2 is an exploded perspective view showing a detailed structure of the dehumidifying device 40.

FIG. 3 is a sectional view showing a detailed structure of the dehumidifying device 40.

FIG. 4 is a schematic diagram illustrating an operating state of the dehumidifying device 40.

FIG. 5 is a schematic view showing the overall configuration of another embodiment of the oxygen / hydrogen generator of the present invention.

FIG. 6 is a schematic diagram showing a configuration of a conventional water electrolysis device.

FIG. 7 is a schematic diagram of an oxygen / hydrogen generator equipped with a dehumidifier using a conventional molecular sieve.

[Explanation of symbols]

1 ... Oxygen / hydrogen generator 10 ... Water electrolysis device 20, 30 ... Gas-liquid separation device 40 ... Dehumidifier 42 ... Oxygen gas dehumidifier 43 ... Hydrogen gas dehumidifier 41a, 41b… Thermionic cooling element 44 ... Heat sink 42a, 43a… Primary cooling chamber 42b, 43b… Secondary cooling chamber 42c, 43c… Gas inlet 42d, 43d ... space 42e, 43e… Gas piping 42f, 43f… Exit 42g, 43g… Side wall 42h, 43h ... Gas outlet 42i, 43i… Gas circulation opening 42j, 43j… Side wall 42k, 43k ... Cooling / dehumidifying members 42l, 43l ... Drain 42m, 43m… bottom inner wall 44a… Side wall 44b ... space 44c ... Baffle plate 44d ... passage 44e… Refrigerant drain port 44f… Refrigerant inlet

Front page continued (72) Inventor Kiyoshi Hirai 475-20 Shinnobe, Beppu Town, Kakogawa City, Hyogo Prefecture (72) Inventor Shin-ichi Yasui 4-108 Nozoe Harima Town, Kako County, Hyogo Prefecture Tawny SA202 (72) Inventor Nagao Ebisu Kita Suma, 13-13 Minami-ochiai, Suma-ku, Kobe-shi, Hyogo Prefecture (72) Inventor Hiroyuki Harada 2-2 Marunouchi, Chiyoda-ku, Tokyo Marunouchi Mitsui Building Mitsubishi Corporation (56) References Special Features Kai 63-250481 (JP, A) JP 3-177592 (JP, A) Actual Kai 4-64569 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) C25B 1 / 00-15/08

Claims (6)

(57) [Claims] 1. An electrolyte membrane is used as a diaphragm to separate an anode chamber and a cathode chamber, and pure water is electrolyzed while supplying pure water to the anode chamber, and oxygen gas is discharged from the anode chamber to the cathode chamber. Water electrolysis apparatus configured to generate hydrogen gas from, respectively, connected to the water electrolysis apparatus, oxygen gas generated in the anode chamber of the water electrolysis apparatus, and water contained in hydrogen gas generated in the cathode chamber, Oxygen / hydrogen generator consisting of a thermoelectric cooling element type dehumidifier for dehumidification
In the thermoelectric cooling element type dehumidifying device,
Oxygen gas dehumidification section with a thermoelectric cooling element
Dissipates heat from the hydrogen gas dehumidifier and the thermoelectric cooling elements
In order to achieve the
Oxygen / hydrogen generator characterized by being composed of
Place 2. The oxygen gas dehumidifying section and the hydrogen gas dehumidifying section are each composed of a primary cooling chamber and a secondary cooling chamber, and a gas pipe for primary cooling is arranged in the primary cooling chamber,
The gas cooled and dehumidified in the secondary cooling chamber and circulated to the primary cooling chamber is configured to primarily cool the gas introduced into the primary cooling chamber and flowing through the gas pipe, and the outlet of the gas pipe of the primary cooling chamber. Is connected to the secondary cooling chamber, the primary cooled gas is introduced into the secondary cooling chamber,
The thermoelectric cooling element attached to the secondary cooling chamber is configured to secondary cool the gas introduced into the secondary cooling chamber, and the secondary cooling chamber is connected to the gas recirculation opening of the primary cooling chamber. to, 請, characterized in that the cooling-dehumidified gas was configured to reflux into the primary cooling chamber in a secondary cooling chamber
The oxygen / hydrogen generator according to claim 1 . 3. The oxygen / hydrogen generator according to claim 1 or 2 , wherein a cooling / dehumidifying member composed of fins is formed on a wall portion of the secondary cooling chamber on the thermoelectric cooling element side. . Wherein the oxygen gas gas-liquid separation device for the oxygen generated in the anode chamber to the gas-liquid separation of the water electrolysis apparatus, oxygen gas dehumidifier in the anode chamber and the thermionic cooling element method of a water electrolysis apparatus While connecting between the oxygen gas inlet of the dehumidifying section, a gas-liquid separator for hydrogen gas for gas-liquid separation of hydrogen generated in the cathode chamber of the water electrolysis device, the cathode chamber of the water electrolysis device and heat Connected between the hydrogen gas introduction port of the hydrogen gas dehumidification unit of the electronic cooling element type dehumidification device, further, the drain for draining provided in the secondary cooling chamber of the oxygen gas dehumidification unit and the hydrogen gas dehumidification unit each oxygen-according to any one of claims 1 to 3, characterized in that connected to the oxygen gas for the gas-liquid separator and the gas-liquid separator for hydrogen gas
Hydrogen generator. Wherein said heat radiating portion is oxygen-hydrogen generator according to any of claims 1 to 4, characterized in that a heat radiator of a water-cooled cooled. 6. according to any of claims 1-5, characterized in that each of the gas discharge port formed in a secondary cooling chamber of the oxygen gas dehumidifying unit and a hydrogen gas dehumidifying unit, connecting the decompressor Oxygen / hydrogen generator.