JP3435313B2 - Vibration probe - Google Patents

Vibration probe

Info

Publication number
JP3435313B2
JP3435313B2 JP22669397A JP22669397A JP3435313B2 JP 3435313 B2 JP3435313 B2 JP 3435313B2 JP 22669397 A JP22669397 A JP 22669397A JP 22669397 A JP22669397 A JP 22669397A JP 3435313 B2 JP3435313 B2 JP 3435313B2
Authority
JP
Japan
Prior art keywords
lubricating oil
sliding bearing
support cylinder
movable shaft
vibration probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP22669397A
Other languages
Japanese (ja)
Other versions
JPH1164088A (en
Inventor
康臣 伴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22669397A priority Critical patent/JP3435313B2/en
Publication of JPH1164088A publication Critical patent/JPH1164088A/en
Application granted granted Critical
Publication of JP3435313B2 publication Critical patent/JP3435313B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、回転機械の回転
軸の振動を、振動計に伝達する振動プローブに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration probe for transmitting vibration of a rotary shaft of a rotary machine to a vibrometer.

【0002】[0002]

【従来の技術】回転軸の振動を振動計に伝達する振動プ
ローブとしては、例えば、図16に示す如く、支持筒1
01によって支持された可動軸103の先端に、回転軸
105の周面と接触し合う接触子107が設けられてい
る。
2. Description of the Related Art As a vibration probe for transmitting vibration of a rotating shaft to a vibrometer, for example, as shown in FIG.
A contactor 107 that comes into contact with the peripheral surface of the rotating shaft 105 is provided at the tip of the movable shaft 103 supported by 01.

【0003】可動軸103は、付勢ばね109により常
時下向きに付勢され、スベリ軸受111によって上下方
向の摺動が可能となっていて、接触子107からの振動
を振動計113へ伝達する構造となっている。
The movable shaft 103 is constantly urged downward by an urging spring 109 and can be slid vertically by a sliding bearing 111, and the vibration from the contact 107 is transmitted to the vibrometer 113. Has become.

【0004】[0004]

【発明が解決しようとする課題】接触子107は、付勢
ばね109によって回転軸105の周面と常時接触し合
うよう付勢されているが、回転中に潤滑油がスベリ軸受
111に作用すると矢印方向へ押し戻されるようにな
る。接触子107が矢印方向へ押し戻されると、回転軸
105から浮き上がり正確な測定ができない不具合いが
起きる。
The contact element 107 is urged by an urging spring 109 so as to be constantly in contact with the peripheral surface of the rotating shaft 105. However, when the lubricating oil acts on the sliding bearing 111 during rotation. It will be pushed back in the direction of the arrow. When the contact 107 is pushed back in the direction of the arrow, the contact floats above the rotary shaft 105 and accurate measurement cannot be performed.

【0005】この場合、スベリ軸受111の外径を支持
筒101の内径よりも小径として、隙間を設け、潤滑油
の作用をその隙間から逃がす手段が考えられる。隙間は
大きければそれだけより確実な効果が期待できるが、反
面、隙間はスベリ軸受111の遊び代となり、横振動を
拾う結果となり、正確な測定が難しくなる新たな問題を
招来する。
In this case, a means may be considered in which the sliding bearing 111 has an outer diameter smaller than the inner diameter of the support cylinder 101, and a gap is provided to allow the action of the lubricating oil to escape from the gap. If the gap is large, a more reliable effect can be expected, but on the other hand, the gap becomes a play allowance of the sliding bearing 111, which results in picking up lateral vibrations, which causes a new problem that accurate measurement becomes difficult.

【0006】そこで、この発明は、潤滑油の影響を最小
に抑え、接触子による正確な測定を可能とする振動プロ
ーブを提供することを目的としている。
Therefore, an object of the present invention is to provide a vibration probe which minimizes the influence of lubricating oil and enables accurate measurement with a contact.

【0007】[0007]

【課題を解決するための手段】前記目的を達成するため
に、この発明は、支持筒内に、測定対象物となる回転軸
の周面と接触し合う接触子を具備した可動軸と、可動軸
に嵌挿され前記支持筒の円壁面に沿って摺動可能な円筒
状のスベリ軸受と、接触子に回転軸側へ向けて付勢力を
与える付勢ばねとを設け、前記接触子で受けた振動を、
可動軸を介して振動計に伝達する振動プローブにおい
て、前記回転軸周面の潤滑油がスベリ軸受に作用して、
前記接触子が付勢ばねに抗して押し戻されるのを防ぐ潤
滑油逃がし通路を備えている。
In order to achieve the above object, the present invention relates to a movable shaft provided with a contactor in a support cylinder, the contactor being in contact with the peripheral surface of a rotating shaft to be measured. A cylindrical sliding bearing that is inserted into the shaft and is slidable along the circular wall surface of the support cylinder, and an urging spring that applies an urging force toward the rotating shaft side to the contactor are provided and received by the contactor. Vibration
In the vibration probe that transmits to the vibrometer via the movable shaft, the lubricating oil on the peripheral surface of the rotating shaft acts on the sliding bearing,
A lubricating oil escape passage is provided to prevent the contactor from being pushed back against the biasing spring.

【0008】そして好ましい実施形態の潤滑油逃がし通
路としては、スベリ軸受に設けた軸方向に貫通する貫通
孔と、貫通孔からの潤滑油を外へ逃がす支持筒に設けた
排出孔とで構成する。
The lubricating oil escape passage of the preferred embodiment is composed of a through hole provided in the sliding bearing and penetrating in the axial direction, and a discharge hole provided in the support cylinder for allowing the lubricating oil from the through hole to escape to the outside. .

【0009】あるいは、スベリ軸受の外周面に設けた軸
方向の凹溝と、凹溝からの潤滑油を外へ逃がす支持筒に
設けた排出孔とで構成する。
Alternatively, it is constituted by an axial groove provided on the outer peripheral surface of the sliding bearing and a discharge hole provided in a support cylinder for letting the lubricating oil from the groove escape to the outside.

【0010】あるいは、スベリ軸受が嵌挿された嵌挿領
域で、可動軸の周面に設けた軸方向の凹溝と、凹溝から
の潤滑油を外へ逃がす支持筒に設けた排出孔とで構成す
る。
Alternatively, in the fitting area where the sliding bearing is fitted, an axial groove provided on the peripheral surface of the movable shaft and a discharge hole provided on the support cylinder for letting the lubricating oil from the groove escape to the outside. It consists of.

【0011】あるいは、スベリ軸受が摺動する摺動領域
で、支持筒の内壁面に設けた軸方向の凹溝と、凹溝から
の潤滑油を外へ逃がす支持筒に設けた排出孔とで構成す
る。
Alternatively, in the sliding area where the sliding bearing slides, an axial groove formed in the inner wall surface of the support cylinder and a discharge hole formed in the support cylinder for letting the lubricating oil from the groove escape to the outside are formed. Constitute.

【0012】この場合、貫通孔及び凹溝は、可動軸の軸
心に対してほぼ均等に複数配置することが望ましい。
In this case, it is desirable that a plurality of through holes and concave grooves are arranged substantially evenly with respect to the axis of the movable shaft.

【0013】かかる振動プローブによれば、接触子から
の振動は、可動軸を介して振動計に伝達される。
According to such a vibration probe, the vibration from the contactor is transmitted to the vibrometer via the movable shaft.

【0014】この測定中において、回転軸周面の潤滑油
が、スベリ軸受に作用すると、潤滑油逃がし通路によっ
て、潤滑油はスベリ軸受を通過し、その後、支持筒の外
へ逃げるため、スベリ軸受に付勢ばねのばね圧を越えた
潤滑油の圧力が働くことがなくなると共に、横振動を拾
うこともない。したがって、接触子は、回転軸の周面と
確実に接触し合い、正確な測定が得られるようになる。
During this measurement, if the lubricating oil on the peripheral surface of the rotating shaft acts on the sliding bearing, the lubricating oil escape passage allows the lubricating oil to pass through the sliding bearing and then escape to the outside of the support cylinder. Further, the pressure of the lubricating oil that exceeds the spring pressure of the biasing spring does not work, and the lateral vibration is not picked up. Therefore, the contactor surely contacts the peripheral surface of the rotating shaft, and accurate measurement can be obtained.

【0015】[0015]

【発明の実施の形態】以下、図1乃至図3の図面を参照
しながらこの発明の実施の形態を具体的に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be specifically described below with reference to the drawings of FIGS.

【0016】図1において、1は振動プローブVの支持
筒を示しており、内部には軸受3によって支持された可
動軸5が貫通している。
In FIG. 1, reference numeral 1 denotes a support cylinder of the vibration probe V, and a movable shaft 5 supported by a bearing 3 penetrates through the support cylinder.

【0017】可動軸5の先端には、回転軸7の周面と接
触し合う接触子9が設けられ、付勢ばね11により接触
子9は回転軸7側へ向けて常時付勢されている。
A contactor 9 for contacting the peripheral surface of the rotary shaft 7 is provided at the tip of the movable shaft 5, and the contactor 9 is constantly urged toward the rotary shaft 7 by an urging spring 11. .

【0018】付勢ばね11は、コイルばねとなっていて
可動軸5に介装され、一端は軸受3に、他端は可動軸5
に設けられたフランジ状のばね受部13とそれぞれ接触
している。
The urging spring 11 is a coil spring and is interposed on the movable shaft 5. One end is the bearing 3 and the other end is the movable shaft 5.
Are in contact with the respective flange-shaped spring bearings 13 provided on the.

【0019】可動軸5は、前記接触子9からの振動を振
動計15へ伝達する機能を有し、前記接触子9とばね受
部13との間には、円筒状のスベリ軸受17が一体に嵌
挿固着されている。
The movable shaft 5 has a function of transmitting the vibration from the contactor 9 to the vibrometer 15, and a cylindrical sliding bearing 17 is integrated between the contactor 9 and the spring receiving portion 13. It is inserted and fixed to.

【0020】スベリ軸受17は、支持筒1の内壁面に沿
って摺動可能となっており、潤滑油逃がし通路19とな
る軸方向の貫通孔21を複数有している。
The sliding bearing 17 is slidable along the inner wall surface of the support cylinder 1 and has a plurality of axial through holes 21 which serve as lubricating oil escape passages 19.

【0021】潤滑油逃がし通路19は、スベリ軸受17
に設けた貫通孔21と、支持筒1に設けた排出孔23と
から成り、排出孔23は左右に一対設けられている。
The lubricating oil escape passage 19 has a sliding bearing 17
And a discharge hole 23 provided in the support cylinder 1. A pair of discharge holes 23 are provided on the left and right.

【0022】貫通孔21は、可動軸5の軸心Xに対して
180度対称の位置に2つ設けられている。この場合、
図3に示す如く120度間隔で3つ、あるいは、図4に
示す如く90度間隔で4つ設けるようにしてもよい。
Two through-holes 21 are provided at 180-degree symmetrical positions with respect to the axis X of the movable shaft 5. in this case,
As shown in FIG. 3, three 120-degree intervals may be provided, or four 90-degree intervals may be provided as shown in FIG.

【0023】図5から図15は潤滑油逃がし通路19の
別の実施形態を示したものである。図5に示す潤滑油逃
がし通路19にあっては、スベリ軸受17の外周面に設
けた軸方向の凹溝25と、凹溝25からの潤滑油を外へ
逃がす支持筒1に設けた排出孔23とで構成するもので
ある。
FIGS. 5 to 15 show another embodiment of the lubricating oil escape passage 19. In the lubricating oil escape passage 19 shown in FIG. 5, an axial groove 25 provided on the outer peripheral surface of the sliding bearing 17 and a discharge hole provided in the support cylinder 1 for allowing the lubricating oil from the groove 25 to escape to the outside. And 23.

【0024】この場合、凹溝25は、可動軸5の軸心X
に対して180度対称の位置に2つ設けられているが、
図7に示す如く120度間隔で3つ、あるいは、図8に
示す如く90度間隔で4つ設けることも可能である。
In this case, the concave groove 25 has a center X of the movable shaft 5.
Two are provided 180 degrees symmetrical with respect to
It is also possible to provide three 120-degree intervals as shown in FIG. 7 or four 90-degree intervals as shown in FIG.

【0025】図9に示す潤滑油逃がし通路19にあって
は、スベリ軸受17が嵌挿された嵌挿領域で、可動軸5
の周面に設けた軸方向の凹溝27と、凹溝27からの潤
滑油を外へ逃がす支持筒1に設けた排出孔23とで構成
する。
In the lubricating oil relief passage 19 shown in FIG. 9, the movable shaft 5 is located in the fitting area where the sliding bearing 17 is fitted.
And a drain hole 23 provided in the support cylinder 1 for allowing the lubricating oil from the groove 27 to escape to the outside.

【0026】この場合、凹溝27は、可動軸5の軸心X
に対して180度対称の位置に2つ設けられているが、
図11に示す如く120度間隔で3つ、あるいは、図1
2に示す如く90度間隔で4つ設けることも可能であ
る。
In this case, the concave groove 27 has the axis X of the movable shaft 5.
Two are provided 180 degrees symmetrical with respect to
As shown in FIG. 11, three 120-degree intervals, or FIG.
It is also possible to provide four at 90 degree intervals as shown in FIG.

【0027】図13に示す潤滑油逃がし通路19にあっ
ては、スベリ軸受17が嵌挿された嵌挿領域で、支持筒
の周壁面に設けた軸方向の凹溝29と、凹溝29からの
潤滑油を外へ逃がす支持筒1に設けた排出孔23とで構
成する。
In the lubricating oil escape passage 19 shown in FIG. 13, in the fitting area where the sliding bearing 17 is fitted, the axial groove 29 provided on the peripheral wall surface of the support cylinder and the groove 29 And a discharge hole 23 provided in the support cylinder 1 for letting the lubricating oil escape to the outside.

【0028】この場合、凹溝29は、可動軸5の軸心X
に対して180度対称の位置に2つ設けられているが、
図14に示す如く120度間隔で3つ、あるいは、図1
5に示す如く90度間隔で4つ設けることも可能であ
る。
In this case, the concave groove 29 has a center X of the movable shaft 5.
Two are provided 180 degrees symmetrical with respect to
As shown in FIG. 14, three at 120 degree intervals, or FIG.
It is also possible to provide four at 90 degree intervals as shown in FIG.

【0029】このように構成された振動プローブVによ
れば、回転軸7の周面と接触し合う接触子9からの振動
は、可動軸5を介して振動計15に伝達される。
According to the vibration probe V thus constructed, the vibration from the contactor 9 which comes into contact with the peripheral surface of the rotary shaft 7 is transmitted to the vibrometer 15 via the movable shaft 5.

【0030】この測定中において、回転軸7の周面の潤
滑油がスベリ軸受17に作用すると、貫通孔21を介し
てスベリ軸受17を通過し、その後、排出孔23から外
へ逃げるようになる。このため、スベリ軸受17の下部
には、付勢ばね11のばね圧を越えて潤滑油の圧力が高
まることがなくなると共に、横振動を拾うことがなく、
接触子9は、回転軸7の周面と確実に接触し合い、正確
な測定が得られる。
During this measurement, when the lubricating oil on the peripheral surface of the rotary shaft 7 acts on the sliding bearing 17, it passes through the sliding bearing 17 through the through hole 21 and then escapes from the discharge hole 23 to the outside. . Therefore, in the lower portion of the sliding bearing 17, the spring pressure of the biasing spring 11 does not exceed the pressure of the lubricating oil, and the lateral vibration is not picked up.
The contactor 9 surely makes contact with the peripheral surface of the rotating shaft 7, and accurate measurement can be obtained.

【0031】[0031]

【発明の効果】以上、説明したように、この発明の振動
プローブによれば、スベリ軸受に、回転軸の潤滑油が作
用しても、押し戻されることがなくなり、回転軸に対す
る接触子の確実な接触が可能となり、正確な測定結果が
得られる。
As described above, according to the vibration probe of the present invention, even if the lubricating oil of the rotating shaft acts on the sliding bearing, the sliding probe is not pushed back, and the contact of the rotating shaft to the rotating shaft is ensured. Contact is possible and accurate measurement results are obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明にかかる振動プローブの説明図。FIG. 1 is an explanatory diagram of a vibration probe according to the present invention.

【図2】スベリ軸受に貫通孔を設けた斜視図。FIG. 2 is a perspective view in which a sliding bearing is provided with a through hole.

【図3】スベリ軸受に貫通孔を3つ設けた説明図。FIG. 3 is an explanatory diagram in which three sliding holes are provided in a sliding bearing.

【図4】スベリ軸受に貫通孔を4つ設けた説明図。FIG. 4 is an explanatory diagram in which four through holes are provided in a sliding bearing.

【図5】スベリ軸受に凹溝を設けた別の実施形態を示す
図1と同様の説明図。
5 is an explanatory view similar to FIG. 1, showing another embodiment in which a sliding bearing is provided with a concave groove.

【図6】スベリ軸受に凹溝を設けた斜視図。FIG. 6 is a perspective view of a sliding bearing provided with a groove.

【図7】スベリ軸受に凹溝を3つ設けた説明図。FIG. 7 is an explanatory diagram in which three concave grooves are provided in the sliding bearing.

【図8】スベリ軸受の凹溝を4つ設けた説明図。FIG. 8 is an explanatory diagram in which four concave grooves of the sliding bearing are provided.

【図9】可動軸に凹溝を設けた別の実施形態を示す図1
と同様の説明図。
FIG. 9 is a view showing another embodiment in which a movable shaft is provided with a concave groove.
Explanatory drawing similar to FIG.

【図10】可動軸に凹溝を設けた斜視図。FIG. 10 is a perspective view of a movable shaft provided with a groove.

【図11】可動軸に凹溝を3つ設けた説明図。FIG. 11 is an explanatory view in which three concave grooves are provided on the movable shaft.

【図12】可動軸に凹溝を4つ設けた説明図。FIG. 12 is an explanatory view in which four concave grooves are provided on the movable shaft.

【図13】支持筒の内壁面に凹溝を設けた別の実施形態
を示す図1と同様の説明図。
FIG. 13 is an explanatory view similar to FIG. 1, showing another embodiment in which a concave groove is provided on the inner wall surface of the support cylinder.

【図14】支持筒の内壁面に凹溝を3つ設けた説明図。FIG. 14 is an explanatory diagram in which three concave grooves are provided on the inner wall surface of the support cylinder.

【図15】支持筒の内壁面に凹溝を4つ設けた説明図。FIG. 15 is an explanatory diagram in which four concave grooves are provided on the inner wall surface of the support cylinder.

【図16】従来例を示した振動プローブの説明図。FIG. 16 is an explanatory view of a vibration probe showing a conventional example.

【符号の説明】[Explanation of symbols]

1 支持筒 5 可動軸 7 回転軸 9 接触子 11 付勢ばね 17 スベリ軸受 19 潤滑油逃がし通路 1 Support tube 5 movable axes 7 rotation axis 9 contacts 11 Biasing spring 17 Sliding bearing 19 Lubricating oil escape passage

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 支持筒内に、測定対象物となる回転軸の
周面と接触し合う接触子を具備した可動軸と、可動軸に
嵌挿され前記支持筒の円壁面に沿って摺動可能な円筒状
のスベリ軸受と、接触子に回転軸側へ向けて付勢力を与
える付勢ばねとを設け、前記接触子で受けた振動を、可
動軸を介して振動計に伝達する振動プローブにおいて、 前記回転軸周面の潤滑油がスベリ軸受に作用して、前記
接触子が付勢ばねに抗して押し戻されるのを防ぐ潤滑油
逃がし通路を備えていることを特徴とする振動プロー
ブ。
1. A movable shaft having a contactor in contact with a peripheral surface of a rotary shaft, which is an object to be measured, in a support cylinder, and slides along a circular wall surface of the support cylinder inserted into the movable shaft. A vibrating probe that is provided with a possible cylindrical sliding bearing and an urging spring that imparts an urging force to the contactor toward the rotary shaft side, and transmits the vibration received by the contactor to the vibrometer via the movable shaft. 2. The vibration probe according to claim 1, further comprising a lubricating oil escape passage that prevents the contact surface of the contactor from being pushed back by the lubricating oil on the peripheral surface of the rotating shaft acting on the sliding bearing.
【請求項2】 潤滑油逃がし通路は、スベリ軸受に設け
た軸方向に貫通する貫通孔と、貫通孔からの潤滑油を外
へ逃がす支持筒に設けた排出孔とから成ることを特徴と
する請求項1記載の振動プローブ。
2. The lubricating oil escape passage comprises an axially penetrating hole provided in the sliding bearing, and an exhaust hole provided in a support cylinder for allowing the lubricating oil from the through hole to escape to the outside. The vibration probe according to claim 1.
【請求項3】 潤滑油逃がし通路は、スベリ軸受の外周
面に設けた軸方向の凹溝と、凹溝からの潤滑油を外へ逃
がす支持筒に設けた排出孔とからなることを特徴とする
請求項1記載の振動プローブ。
3. The lubricating oil escape passage comprises an axial groove provided on the outer peripheral surface of the sliding bearing and a discharge hole provided on a support cylinder for allowing the lubricating oil from the groove to escape to the outside. The vibration probe according to claim 1.
【請求項4】 潤滑油逃がし通路は、スベリ軸受が嵌挿
された嵌挿領域で、可動軸の周面に設けた軸方向の凹溝
と、凹溝からの潤滑油を外へ逃がす支持筒に設けた排出
孔とから成ることを特徴とする請求項1記載の振動プロ
ーブ。
4. The lubricating oil escape passage is a fitting insertion region in which a sliding bearing is fitted, and an axial groove provided on the peripheral surface of the movable shaft and a support cylinder for letting the lubricating oil from the groove escape to the outside. The vibration probe according to claim 1, further comprising a discharge hole provided in the vibration probe.
【請求項5】 潤滑油逃がし通路は、スベリ軸受が摺動
する摺動領域で、支持筒の内壁面に設けた軸方向の凹溝
と、凹溝からの潤滑油を外へ逃がす支持筒に設けた排出
孔とから成ることを特徴とする請求項1記載の振動プロ
ーブ。
5. The lubricating oil escape passage is a sliding region in which the sliding bearing slides, and includes an axial groove provided on the inner wall surface of the supporting cylinder and a supporting cylinder for escaping lubricating oil from the concave groove to the outside. The vibration probe according to claim 1, comprising a discharge hole provided.
【請求項6】 貫通孔及び凹溝は、可動軸の軸心に対し
てほぼ均等に複数配置されていることを特徴とする請求
項2,3,4,5記載の振動プローブ。
6. The vibration probe according to claim 2, wherein a plurality of through holes and concave grooves are arranged substantially evenly with respect to the axis of the movable shaft.
JP22669397A 1997-08-22 1997-08-22 Vibration probe Expired - Fee Related JP3435313B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22669397A JP3435313B2 (en) 1997-08-22 1997-08-22 Vibration probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22669397A JP3435313B2 (en) 1997-08-22 1997-08-22 Vibration probe

Publications (2)

Publication Number Publication Date
JPH1164088A JPH1164088A (en) 1999-03-05
JP3435313B2 true JP3435313B2 (en) 2003-08-11

Family

ID=16849182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22669397A Expired - Fee Related JP3435313B2 (en) 1997-08-22 1997-08-22 Vibration probe

Country Status (1)

Country Link
JP (1) JP3435313B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100396081C (en) * 2004-09-14 2008-06-18 宇东电浆科技有限公司 Multiple resolution image sensor and its control method
CN106289779A (en) * 2016-08-08 2017-01-04 上海大学 Vibrating sensor erecting device in a kind of bearing tester

Also Published As

Publication number Publication date
JPH1164088A (en) 1999-03-05

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