JP3433181B2 - X-ray fluorescence analyzer - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluorescence analyzer which can reliably perform inspection, maintenance and data management.

[0002]

2. Description of the Related Art Conventionally, the inspection required for an X-ray fluorescence analyzer,
Maintenance and data management were carried out according to the instruction manual, while whether or not each inspection, maintenance and data management was carried out was separately managed. In addition, data management was described in the instruction manual separately from inspection and maintenance.

[0003]

However, if the cycle in which each inspection, maintenance, and data management should be performed and the date and time when they were performed are managed separately, the inspection, maintenance, and data management are complicated, Certainly not easy to do.

The present invention has been made in view of the above conventional problems, and an object of the present invention is to provide an X-ray fluorescence analyzer capable of reliably performing inspection, maintenance and data management.

[0005]

To achieve the above object, the present invention provides a secondary X-ray generated by irradiating a sample with a primary X-ray.
In a fluorescent X-ray analyzer for measuring the intensity of a line, each item and contents of the inspection, maintenance and data management of the device are displayed on the display means according to the period to be performed, and the date and time of each item is recorded and updated. Maintenance management means for displaying the implementation date and time on the display means is provided.

According to the fluorescent X-ray analysis apparatus of the present invention, the maintenance management means integrally manages the period to be carried out and the date and time when it was carried out for each item of inspection, maintenance and data management, and displays it on the display means. As a result, inspection, maintenance and data management can be carried out reliably.

[0007] Here, in order to further integrate and manage the procedure to be carried out and to easily carry out inspection, maintenance and data management, the maintenance management means displays the procedure to be carried out item by item on the display means. It is preferable.

[0008] Further, in order that the timing for carrying out each item of inspection, maintenance and data management can be seen at a glance, the maintenance management means indicates that the period to be carried out has passed from the latest implementation date and time. It is preferable to display the item on the display unit so that the item that has not passed the cycle to be executed from the latest execution date and time can be identified.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION An X-ray fluorescence analyzer according to an embodiment of the present invention will be described below with reference to the drawings. First, the configuration of this device will be described. As shown in FIG. 1, this apparatus includes an X-ray tube 1 for generating X-rays, and an X-ray tube 1
Of the X-rays generated from the X-rays, X-rays having an increased attenuation rate of X-ray intensity in a predetermined wavelength range are passed as the primary X-rays 3 for irradiating the sample 4, and the fluorescence X generated from the sample 4 Diaphragm 6 which restricts the field of view of secondary X-rays 5 such as X-rays when viewed from the detector 10 side, and 2 which has passed through the diaphragm 6.
A divergence slit (solar slit) 7 that allows the next X-ray to pass in a limited direction, a spectroscopic element 8 that disperses the secondary X-ray that has passed through the divergence slit 7, and a secondary X-ray that is spectroscopically separated by the spectroscopic element 8. A light receiving slit (solar slit) 9 that passes in a limited direction, a detector 10 that measures the intensity of the secondary X-rays that have passed through the light receiving slit 9, a wave height analyzer 11, and a scaler 12 are provided. The sample 4 is placed on the sample table 14 via the sample holder 13 and exchanged by a sample exchange machine (not shown).

Here, the spectroscopic element 8, the light-receiving slit 9 and the detector 10 are linked by a goniometer (not shown) so that the intensities of the secondary X-rays of various wavelengths can be measured. That is, this fluorescent X-ray analysis apparatus is a wavelength dispersion type and scanning type apparatus. Although only one filter 2, diaphragm 5, divergence slit 7, spectroscopic element 8, light-receiving slit 9 and detector 10 are shown in the drawing, in reality, a plurality of different types (performances) are provided. , An arbitrary one can be selected by an exchange (not shown). A sample chamber 15 in which the sample 4 is irradiated with the primary X-rays 3, and a spectroscopic chamber 16 in which the spectroscopic element 8 and the detector 10 are installed.
Is evacuated.

The calculation based on the count value from the scaler 12 and the operation of each part of the device are carried out by the personal computer 17 provided in the device.
Done by. The personal computer 17 has the following maintenance management means 18, display means 19, storage means 20, and device maintenance means 22 in addition to input means such as a keyboard and mouse (not shown). The maintenance management means 18 is responsible for the inspection, maintenance and data management of the device.
Each item and contents are displayed on the display means 19 for each cycle to be executed, the date and time of the execution for each item is recorded and the latest execution date and time is displayed on the display means 19, and the execution procedure for each item is displayed on the display means 19. To display. Here, the maintenance management means 18 is capable of distinguishing an item for which a cycle to be carried out has passed from the latest implementation date and time and an item for which a cycle to be implemented has not passed from the latest implementation date and time. , On the display means 19.

The display means 19 is, for example, a CRT. The storage unit 20 is, for example, a hard disk and stores data from the scaler. The device maintenance means 22 is
Depending on the operator's selection, the presence or absence of various failures in the device is automatically diagnosed, and device maintenance such as core wire cleaning is performed.

Next, the operation of this device will be described.
The operator activates the maintenance management means 18 using the personal computer 17, and in the “check cycle” combo box displayed on the display means 19 as shown in FIG.
When the monthly inspection is selected, the inspection, maintenance, and data management items for which the cycle is 6 months are displayed as “inspection item”. Here, No. There are four items from 1 to 4. In addition, in the display, for the sake of simplicity, "inspection" includes maintenance and data management, and "inspection item"
In addition to the inspection and maintenance of each hardware part of the device, the backup of the data files stored in the storage means 20 and the execution of the failure diagnosis by the device maintenance means 22 are included.

In addition, in the inspection cycle, daily inspection, weekly inspection, monthly inspection, yearly inspection, irregular maintenance, or device repair can be selected. For example, in the daily inspection, there are PR gas flow rate check, cooling water check, PHA adjustment, automatic inspection by executing the device inspection program (device state inspection), etc. as the items of the device inspection and maintenance. For example, updating drift correction coefficient of X-ray intensity and analyzing check sample. In the monthly inspection, the inspection and maintenance of the device include cleaning of the core wire of the detector 10, grease up of the drive unit, lubrication of the goniometer gear,
There are detector resolution checks, etc., and data management items include saving user data. The non-regular maintenance is applied to those that are not regularly performed such as replacement of the X-ray tube, and the device repair is to record the repaired record.

The maintenance management means 18 is for each item
The date and time when the inspection, maintenance and data management are performed are recorded, and the latest date and time of the inspection is displayed on the display means 19 as the "inspection date and time". For example, monthly inspection detector (FP
For items automatically executed by a program installed in the personal computer 17, such as the core wire cleaning in 10) and the saving of user data, the date and time of execution is automatically recorded. For items such as the drive unit grease-up performed manually by an operator or the like, the record of the date and time of implementation is also manually input while observing the display of the display unit 19. Further, for the drift correction coefficient update of the X-ray intensity and the analysis of the check sample in the daily inspection, the obtained drift correction coefficient and the analysis result of the check sample are set to, for example, 1
Since it will be displayed in a graph collectively for the months,
You may display by the program which displays another graph. The user data save, which is an item of data management, is for backing up the data as a measure when the hard disk of the personal computer 17 fails, and the execution date and time is automatically recorded. Can be seen at a glance.

The display of the inspection execution date and time is made in the normal font for the items for which the execution cycle has not passed since the latest execution date and time, but the items for which the execution cycle has elapsed since the latest execution date and time are displayed. About it is made in italic to stand out. This makes it possible to see at a glance which items are in time for inspection, maintenance, and data management. In addition to the different fonts for identification, for example, the display color of the inspection implementation date may be changed for identification. Further, when the column of the inspection date and time is clicked, the records of the date and time when the inspection was performed are displayed in a list in order from the latest date and time, so that the past execution history can be checked.

As described above, according to the X-ray fluorescence analyzer of the present embodiment, the maintenance management means 18 manages the inspection, maintenance, and data management items by integrating the cycle to be carried out and the date and time when the maintenance was carried out. Then, the items are displayed on the display means 19 and the items for which inspection, maintenance and data management should be performed can be seen at a glance, so that inspection, maintenance and data management can be carried out without fail.

In this example, since it is time to perform maintenance for "vacuum pump oil replacement", clicking "Help" for that item will guide you through the procedure for vacuum pump oil replacement. Is displayed. Therefore, when conducting inspections, maintenance and data management,
There is no need to refer to the instruction manual one by one. After the implementation, record the implementation date and time as described above. As described above, according to the X-ray fluorescence analyzer of the present embodiment, the maintenance management unit 18 integrates and manages the procedure to be performed for each item of inspection, maintenance, and data management, and the display unit 19 displays the integrated management. Since it is displayed, inspection, maintenance and data management can be performed easily.

[0019]

As described in detail above, according to the X-ray fluorescence analyzer of the present invention, the maintenance management means determines the cycle to be carried out and the date and time when it was carried out for each item of inspection, maintenance and data management. Since the integrated management is performed and displayed on the display means, inspection, maintenance and data management can be surely performed.

[Brief description of drawings]

FIG. 1 is a schematic view showing an X-ray fluorescence analyzer according to an embodiment of the present invention.

FIG. 2 is a diagram showing an example of a display on a display unit of the same apparatus.

[Explanation of symbols]

3 ... Primary X-ray, 4 ... Sample, 5 ... Secondary X-ray, 10 ... Detector, 18 ... Maintenance management means, 19 ... Display means.

Claims (3)

(57) [Claims] 1. A secondary X generated by irradiating a sample with a primary X-ray.
In fluorescent X-ray analyzers that measure the intensity of X-rays, each item and content of the inspection, maintenance and data management of the device are displayed on the display means according to the cycle to be performed, and the date and time of each item is recorded and updated. An X-ray fluorescence analyzer provided with maintenance management means for displaying the implementation date and time on the display means. 2. The fluorescent X-ray analysis apparatus according to claim 1, wherein the maintenance management unit causes the display unit to display a procedure to be performed for each item. 3. The item according to claim 1 or 2, wherein the maintenance management means has passed a cycle to be carried out from the latest execution date and time, and a cycle to be carried out from the latest execution date and time. An X-ray fluorescence analyzer for displaying on the display means so that it can be discriminated from the other items.