JP3427667B2 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JP3427667B2 JP3427667B2 JP07058797A JP7058797A JP3427667B2 JP 3427667 B2 JP3427667 B2 JP 3427667B2 JP 07058797 A JP07058797 A JP 07058797A JP 7058797 A JP7058797 A JP 7058797A JP 3427667 B2 JP3427667 B2 JP 3427667B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pin
- pressure sensor
- sleeve
- rigidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、圧力センサに関
し、特に溶融樹脂等の高温・高粘性流体の圧力(静圧)
の測定、エンジンの筒内圧等の高温・高圧の気体の圧力
の測定等に使用できる圧力センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor, and more particularly to the pressure (static pressure) of a high temperature, high viscosity fluid such as molten resin.
The present invention relates to a pressure sensor that can be used to measure the pressure of high-temperature / high-pressure gas such as engine cylinder pressure.
【0002】[0002]
【従来の技術】従来、この種の圧力センサとしては、図
9,図10,図11に示すようなものがあった。2. Description of the Related Art Heretofore, as a pressure sensor of this type, there has been one as shown in FIGS.
【0003】図9に示す圧力センサ100は、受圧部1
01に作用する圧力を圧力検出部102に備えた水晶圧
電素子によって検出するものである。The pressure sensor 100 shown in FIG.
The pressure acting on 01 is detected by the quartz crystal piezoelectric element provided in the pressure detection unit 102.
【0004】図10に示す圧力センサ200は、スリー
ブ201内に摺動自在に挿入されたピン202によって
受圧部203の圧力を伝達して圧力検出部204におい
てこれを検出するものである。この圧力センサ200で
は、ピン202の位置決めを板バネ205で行ってい
る。In the pressure sensor 200 shown in FIG. 10, the pressure of the pressure receiving portion 203 is transmitted by the pin 202 slidably inserted in the sleeve 201, and the pressure detecting portion 204 detects this. In the pressure sensor 200, the pin 202 is positioned by the leaf spring 205.
【0005】図11に示す圧力センサ300においても
同様に、ダイアフラム301に係合されたピン303が
スリーブ302内に摺動自在に挿入されており、ピン3
03の先端の受圧部304に作用する圧力を、ピン30
3によってダイアフラム301に伝達し、ダイアフラム
301の変形を上面に配設された金属薄膜歪ゲージ30
5の変形として検出するものである。Similarly, in the pressure sensor 300 shown in FIG. 11, the pin 303 engaged with the diaphragm 301 is slidably inserted into the sleeve 302, and the pin 3
The pressure acting on the pressure receiving portion 304 at the tip of the pin 03.
3 is transmitted to the diaphragm 301 and the deformation of the diaphragm 301 is provided on the upper surface of the metal thin film strain gauge 30.
It is detected as a modification of No. 5.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、圧力セ
ンサ100のように、水晶圧電素子を使用すると加圧放
置ができないという問題があった。However, when the quartz crystal piezoelectric element is used like the pressure sensor 100, there is a problem that it cannot be left under pressure.
【0007】また、圧力センサ200のように、ピン2
02の位置決めを板バネで行うタイプのものでは、ピン
202とスリーブ201とのクリアランスが約5μmあ
り、ピン202・スリーブ201間のシール性がないの
で、特に低粘性流体については正確な圧力測定が望めな
いという問題があった。Further, like the pressure sensor 200, the pin 2
In the case of the type in which 02 is positioned by a leaf spring, the clearance between the pin 202 and the sleeve 201 is about 5 μm, and there is no sealing property between the pin 202 and the sleeve 201, so accurate pressure measurement is possible especially for low viscosity fluids. There was a problem that I could not hope.
【0008】また、圧力センサ300では、ピン303
の先端部に装着されたOリング306でピンの位置決め
を行っているので、ピン303・スリーブ302間のシ
ール性は高いが、Oリングの変形によるピン303・ス
リーブ302間の摺動抵抗及びピン303の変形による
ピン303・スリーブ302間の摺動抵抗のために出力
に図12に示すようなヒステリシスが生じるという問題
があった。Further, in the pressure sensor 300, the pin 303
Since the pin is positioned by the O-ring 306 attached to the tip of the pin, the sealing property between the pin 303 and the sleeve 302 is high, but the sliding resistance and the pin between the pin 303 and the sleeve 302 due to the deformation of the O-ring. There is a problem that hysteresis is generated in the output due to the sliding resistance between the pin 303 and the sleeve 302 due to the deformation of 303.
【0009】さらに、圧力センサ200,300では、
高圧になるにつれ座屈しやすくなる可能性があり、圧力
検出部204,ダイアフラム301を頑強な構造とする
必要も生じる。Further, in the pressure sensors 200 and 300,
There is a possibility that it will be more likely to buckle as the pressure becomes higher, and it is also necessary to make the pressure detection unit 204 and the diaphragm 301 a robust structure.
【0010】本発明は上記従来技術の課題を解決するた
めになされたものであって、その目的とするところは、
簡略化された構造を有するとともに高精度の圧力センサ
を提供することにある。The present invention has been made to solve the above-mentioned problems of the prior art, and its purpose is to:
An object of the present invention is to provide a highly accurate pressure sensor having a simplified structure.
【0011】[0011]
【課題を解決するための手段】上記目的を達成するため
に、第1の発明は、筒体と該筒体内周に摺動自在に挿入
された軸体とを有し、該軸体は一端に検出対象に接触す
る受圧部を備えており、該受圧部に作用する検出対象の
圧力を前記軸体の他端に設けられた圧力検出部に伝達し
て検出する圧力センサにおいて、前記軸体の受圧部を前
記筒体と接合したことを特徴とする。In order to achieve the above object, the first invention comprises a cylindrical body and a shaft body slidably inserted into the inner circumference of the cylindrical body, the shaft body having one end. A pressure sensor which is in contact with a detection target, and which transmits the pressure of the detection target acting on the pressure reception part to a pressure detection unit provided at the other end of the shaft body to detect the pressure. The pressure receiving part of is joined to the cylindrical body.
【0012】軸体の受圧部と筒体は、例えば、溶接によ
って接合してもよいし、他の部材に軸体と筒体とを接合
するようにしてもよい。The pressure-receiving portion of the shaft and the cylinder may be joined, for example, by welding, or the shaft and the cylinder may be joined to another member.
【0013】このように、軸体の受圧部と筒体とを接合
すれば、両者を位置決めするための部品が不要となるの
で、圧力センサの構造が簡略化される。従来使用されて
いた位置決めのためのOリングを使用する必要がないの
で、筒体と軸体との間の摺動抵抗が減少する。By joining the pressure receiving portion of the shaft body and the cylindrical body in this manner, a component for positioning the both is not required, so that the structure of the pressure sensor is simplified. Since it is not necessary to use the conventionally used O-ring for positioning, the sliding resistance between the cylindrical body and the shaft body is reduced.
【0014】軸体と筒体との隙間が接合によって密封さ
れれば、流体がセンサ内に侵入することもないので、低
粘性流体を検出対象とすることも可能である。If the gap between the shaft body and the cylindrical body is sealed by the joining, the fluid will not enter the sensor, so that a low-viscosity fluid can be detected.
【0015】また、軸体の受圧部と筒体とを接合する
と、軸体の変形量が筒体と軸体の剛性に依存するので、
筒体の剛性を高めておけば高圧下でも軸体の座屈の可能
性が減少し、軸体と筒体との摺動抵抗も減少する。Further, when the pressure receiving portion of the shaft body and the cylindrical body are joined, the amount of deformation of the shaft body depends on the rigidity of the cylindrical body and the shaft body.
If the rigidity of the cylinder is increased, the possibility of buckling of the shaft is reduced even under high pressure, and the sliding resistance between the shaft and the cylinder is also reduced.
【0016】このような圧力センサでは、軸体と筒体と
の摺動抵抗が大きいと加圧時と減圧時とで計測値に差が
生じるが、軸体と筒体との摺動抵抗が減少すれば、かか
る計測値のヒステリシスを低減することができ、高精度
の圧力測定が可能である。In such a pressure sensor, if the sliding resistance between the shaft and the cylinder is large, the measured values will differ between when the pressure is applied and when the pressure is reduced, but the sliding resistance between the shaft and the cylinder is large. If it is decreased, the hysteresis of the measured value can be reduced, and highly accurate pressure measurement can be performed.
【0017】軸体の受圧部と筒体とを接合すれば、軸体
が座屈しにくくなるので、圧力検出部を頑強に作る必要
がなくなる。If the pressure receiving portion of the shaft body and the cylindrical body are joined together, the shaft body will be less likely to buckle, and it is not necessary to make the pressure detecting portion robustly.
【0018】第2の発明は、第1の発明において、前記
筒体の剛性を変化させるための剛性調整手段を備えたこ
とを特徴とする。A second invention is characterized in that, in the first invention, a rigidity adjusting means for changing the rigidity of the cylindrical body is provided.
【0019】このようにすれば、筒体の剛性に依存する
軸体の変形量を剛性調整手段によって変化させることが
できるので、剛性調整手段によって圧力センサの最大測
定圧を変化させることができる。With this arrangement, the amount of deformation of the shaft depending on the rigidity of the cylinder can be changed by the rigidity adjusting means, so that the maximum measuring pressure of the pressure sensor can be changed by the rigidity adjusting means.
【0020】剛性調整手段によって筒体の剛性を低下さ
せておくと、圧力負荷時に筒体が撓み易くなるので、相
対的に軸体自体は撓みにくくなる。従って、高圧が作用
した場合でも、受圧部に作用する圧力が効果的に圧力検
出部に伝達されるので、高精度の圧力測定が可能とな
る。If the rigidity of the cylindrical body is lowered by the rigidity adjusting means, the cylindrical body easily bends when pressure is applied, so that the shaft body itself becomes relatively difficult to bend. Therefore, even when a high pressure is applied, the pressure acting on the pressure receiving portion is effectively transmitted to the pressure detecting portion, which enables highly accurate pressure measurement.
【0021】第3の発明は、第1又は第2の発明におい
て、前記圧力検出部が、前記軸体の他端と係合し、前記
検出対象の圧力に応じて変形する金属製の膜状部材を備
えたことを特徴とする。In a third aspect based on the first or second aspect, the pressure detecting portion engages with the other end of the shaft body and is made of a metal film which is deformed according to the pressure of the detection target. A member is provided.
【0022】このように、圧力検出部に金属製の膜状部
材を使用すれば、受圧部に圧力負荷が作用した状態で放
置しても、金属製の膜状部材の変形が保持されることに
より歪ゲージがその時点の状態のままなので圧力センサ
の出力に変動を生じることがない。As described above, when the metal film member is used for the pressure detecting portion, the deformation of the metal film member can be retained even if the pressure receiving portion is left under a pressure load. As a result, since the strain gauge remains in the state at that time, the output of the pressure sensor does not fluctuate.
【0023】[0023]
【発明の実施の形態】以下、本発明を図示の実施形態に
基づいて説明する。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below based on the illustrated embodiments.
【0024】(第1の実施形態)図1は本発明の第1の
実施形態に係る圧力センサ1の概略構造を示す。(First Embodiment) FIG. 1 shows a schematic structure of a pressure sensor 1 according to a first embodiment of the present invention.
【0025】圧力センサ1においては、一方の端部に径
方向に突出するフランジ3を有する筒体としてのスリー
ブ2の孔2aに略円柱状の軸体としてのピン4が挿入さ
れている。スリーブ2のフランジ3の端面に孔2aを取
り囲む突出部5が形成されており、この突出部5に膜状
部材として断面略コの字形の金属製のダイアフラム6が
嵌合している。ダイアフラム6の開口側のフランジ7の
端面7aとスリーブ2のフランジ3の端面2bが溶接に
よって固定されている。In the pressure sensor 1, a pin 4 as a substantially columnar shaft is inserted into a hole 2a of a sleeve 2 as a cylinder having a flange 3 protruding in the radial direction at one end. A protruding portion 5 surrounding the hole 2a is formed on the end surface of the flange 3 of the sleeve 2, and a metal diaphragm 6 having a substantially U-shaped cross section is fitted to the protruding portion 5 as a film-shaped member. An end surface 7a of the flange 7 on the opening side of the diaphragm 6 and an end surface 2b of the flange 3 of the sleeve 2 are fixed by welding.
【0026】ダイアフラム6の膜状の頭部8の下面には
突出部8aが形成されており、この突出部8aとピン4
の端部に形成された凹部4aとが嵌合するようになって
いる。ダイアフラム6の頭部8の上面には金属薄膜歪ゲ
ージ9が配設されている。ダイアフラム6の頭部8の上
面からは歪ゲージ9の出力信号を直接又は所定の処理を
行った後にセンサ1本体外へ取り出すための出力ケーブ
ル10が引き出されており、この出力ケーブル10は軸
方向に延びる棒状のケーブル固定部11に固定支持され
ている。本実施形態では、ダイアフラム6及び歪ゲージ
9が圧力検出部を構成する。A projection 8a is formed on the lower surface of the membrane-shaped head 8 of the diaphragm 6, and the projection 8a and the pin 4 are formed.
The concave portion 4a formed at the end of is fitted. A metal thin film strain gauge 9 is provided on the upper surface of the head 8 of the diaphragm 6. From the upper surface of the head portion 8 of the diaphragm 6, an output cable 10 for extracting the output signal of the strain gauge 9 directly or after performing a predetermined process to the outside of the main body of the sensor 1 is drawn out. It is fixedly supported by a rod-shaped cable fixing portion 11 extending in the direction. In the present embodiment, the diaphragm 6 and the strain gauge 9 form a pressure detection unit.
【0027】ケーブル固定部11のダイアフラム側端部
の外周には、出力ケーブル10引き出し用の孔12aを
底面に設けた有底円筒形状の保護カバー12が接合され
ている。保護カバー12の底面に設けられた段部12b
にダイアフラム6の頭部8が嵌合するようになってお
り、保護カバー12の筒部12cはダイアフラム6の頭
部8の外周を覆っている。保護カバー12のダイアフラ
ム6とは反対側の端面にはケーブル固定部11を収納す
る有底円筒形のケーブル収納部13が接合されており、
ケーブル収納部13の底部の孔13aからケーブル固定
部11の端部が若干露出している。On the outer periphery of the end of the cable fixing portion 11 on the diaphragm side, a bottomed cylindrical protective cover 12 having a hole 12a for drawing out the output cable 10 is joined. Step 12b provided on the bottom surface of the protective cover 12
The head portion 8 of the diaphragm 6 is fitted in the cylindrical portion 12c of the protective cover 12 and covers the outer periphery of the head portion 8 of the diaphragm 6. A bottomed cylindrical cable housing portion 13 for housing the cable fixing portion 11 is joined to an end surface of the protective cover 12 opposite to the diaphragm 6,
The end of the cable fixing portion 11 is slightly exposed from the hole 13a at the bottom of the cable housing portion 13.
【0028】圧力センサ1は、図2に示すように、金型
14に設けられた段付きの貫通孔15に、受圧部16が
金型14内部に臨むように取り付ける。金型14への取
り付けには、ケーブル収納部13,保護カバー12及び
ダイアフラム6の外周を覆う中空の取り付け用ネジ17
を用いる。貫通孔15内周面にネジ溝を切ったネジ部1
5aが設けられ、締付部17aを締め付けて取り付け用
ネジ17の外周のネジ部17bと貫通孔15内周面のネ
ジ部15aとを螺合させて取り付ける。取り付が完了す
ると、取り付け用ネジ17の端部17cと貫通孔15の
段部15bとの間でダイアフラム6のフランジ7及びス
リーブ2のフランジ3が挟持されて固定される。As shown in FIG. 2, the pressure sensor 1 is attached to a stepped through hole 15 provided in the mold 14 so that the pressure receiving portion 16 faces the inside of the mold 14. For attachment to the mold 14, a hollow attachment screw 17 for covering the outer circumference of the cable housing portion 13, the protective cover 12, and the diaphragm 6 is used.
To use. Threaded portion 1 with a thread groove formed on the inner peripheral surface of the through hole 15
5a is provided, and the tightening portion 17a is tightened to attach the screw portion 17b on the outer periphery of the mounting screw 17 and the screw portion 15a on the inner peripheral surface of the through hole 15 by screwing. When the mounting is completed, the flange 7 of the diaphragm 6 and the flange 3 of the sleeve 2 are clamped and fixed between the end portion 17c of the mounting screw 17 and the step portion 15b of the through hole 15.
【0029】圧力センサ1は、受圧部16に作用する金
型14内の溶融樹脂の圧力をピン4によってダイアフラ
ム6に伝達し、ダイアフラム6の変形を歪ゲージ9の出
力変化として検出している。The pressure sensor 1 transmits the pressure of the molten resin in the mold 14 acting on the pressure receiving portion 16 to the diaphragm 6 by the pin 4, and detects the deformation of the diaphragm 6 as an output change of the strain gauge 9.
【0030】本実施形態では、受圧部16側でピン4と
スリーブ2とが溶接され、溶接部18によって接合され
ている。溶接は軸方向に行ってもよいし軸に直交する方
向であってもよい。このように、ピン4とスリーブ2と
を溶接によって固定すれば、両者を位置決めするための
部品も不要となり構造が簡略化される。In the present embodiment, the pin 4 and the sleeve 2 are welded on the pressure receiving portion 16 side and joined by the weld portion 18. Welding may be performed in the axial direction or in a direction orthogonal to the axis. In this way, if the pin 4 and the sleeve 2 are fixed by welding, parts for positioning the both are not required and the structure is simplified.
【0031】また、ピン4・スリーブ2間が密封される
ので、低粘性流体の圧力検出も可能となる。Since the pin 4 and the sleeve 2 are sealed, it is possible to detect the pressure of the low-viscosity fluid.
【0032】さらに、ピン4にOリングを装着する必要
がないので、ピン4とスリーブ2との摺動抵抗が減少す
る。Furthermore, since it is not necessary to attach an O-ring to the pin 4, the sliding resistance between the pin 4 and the sleeve 2 is reduced.
【0033】このようにピン4とスリーブ2とを接合す
ると、ピン4の変形量はスリーブ2とピン4剛性に依存
するので、スリーブ2の剛性を高めておけば高圧下でも
ピン4の座屈の可能性は減少し、ピン4とスリーブ2と
の摺動抵抗も減少する。従って、図3に示すように圧力
センサ1の出力のヒステリシスが減少し、高精度の圧力
測定が可能となる。測定圧力1000kgf/cm2 フ
ルスケールに対する最大差発生時(500kgf/cm
2 )における減圧時と加圧時の出力差を従来例に係る圧
力センサ300と比較してみると、圧力センサ300で
は34kgf/cm2 であるのに対して本実施形態に係
る圧力センサ1では16kgf/cm2となっており、
ヒステリシスの減少が認められた。When the pin 4 and the sleeve 2 are joined in this way, the amount of deformation of the pin 4 depends on the rigidity of the sleeve 2 and the pin 4, so if the rigidity of the sleeve 2 is increased, the pin 4 will buckle even under high pressure. And the sliding resistance between the pin 4 and the sleeve 2 is also reduced. Therefore, as shown in FIG. 3, the hysteresis of the output of the pressure sensor 1 is reduced, and highly accurate pressure measurement becomes possible. Measurement pressure 1000kgf / cm 2 When maximum difference from full scale occurs (500kgf / cm
Comparing the output difference between the pressure reduction and the pressure increase in 2 ) with the pressure sensor 300 according to the conventional example, it is 34 kgf / cm 2 in the pressure sensor 300, whereas in the pressure sensor 1 according to the present embodiment. It is 16 kgf / cm 2 ,
A decrease in hysteresis was observed.
【0034】ピン4とスリーブ2とを接合することによ
りピン4が座屈しにくくなるので、圧力検出部を頑強に
作る必要もなくなる。By joining the pin 4 and the sleeve 2 to each other, the pin 4 is less likely to buckle, so that it is not necessary to make the pressure detecting portion robustly.
【0035】また、ピン4の変形量がスリーブ2の剛性
に依存するので、スリーブ2の剛性を変えることによっ
て、センサ1の最大測定圧を変化させることもできる。
本実施形態では、剛性調整手段としてスリーブ2の筒部
19に径方向に薄肉とした薄肉部20を設けてスリーブ
2の剛性を下げている。Further, since the deformation amount of the pin 4 depends on the rigidity of the sleeve 2, the maximum measurement pressure of the sensor 1 can be changed by changing the rigidity of the sleeve 2.
In this embodiment, the rigidity of the sleeve 2 is reduced by providing a thin portion 20 that is thin in the radial direction on the tubular portion 19 of the sleeve 2 as a rigidity adjusting means.
【0036】圧力センサ1に圧力が作用したときのスリ
ーブ2,ピン4及びダイアフラム6の変形状態を図4に
示す。破線部分が圧力負荷前,実線部分が圧力負荷時の
変形状態である。圧力負荷時には、剛性の低下したスリ
ーブ2が撓むので、ピン4自体は撓みにくくなる。従っ
て、高圧が作用した場合でも、受圧面の圧力がピン4に
より効果的にダイアフラム6へと伝達され、高精度の圧
力測定が可能となる。FIG. 4 shows the deformed state of the sleeve 2, the pin 4 and the diaphragm 6 when pressure is applied to the pressure sensor 1. The broken line shows the deformation before pressure loading, and the solid line shows the deformation under pressure loading. When pressure is applied, the sleeve 2 having reduced rigidity bends, and thus the pin 4 itself does not bend easily. Therefore, even when a high pressure is applied, the pressure on the pressure receiving surface is effectively transmitted to the diaphragm 6 by the pin 4, and it is possible to measure the pressure with high accuracy.
【0037】本実施形態では、圧力検出に金属製ダイア
フラムを使用しているので、受圧部に圧力負荷が作用し
た状態で放置しても出力の変動がない。In this embodiment, since the metal diaphragm is used for pressure detection, the output does not change even if the pressure receiving portion is left under a pressure load.
【0038】スリーブ2の剛性を変えるには、図5に示
すようにスリーブ2の筒部19に軸方向のスリット21
を設けても良い。また、スリットは、軸方向のものに限
られず、図6(a),(b)に示すように、軸に直交す
る方向のスリット22を孔2aの両側に設け、このスリ
ット22を軸方向に互いに軸の回りに90°ずつずらし
て交互に設けるようにしてもよい。In order to change the rigidity of the sleeve 2, an axial slit 21 is formed in the tubular portion 19 of the sleeve 2 as shown in FIG.
May be provided. The slits are not limited to those in the axial direction, and as shown in FIGS. 6A and 6B, slits 22 in the direction orthogonal to the axis are provided on both sides of the hole 2a, and the slits 22 are arranged in the axial direction. Alternatively, they may be provided alternately by being shifted by 90 ° around the axis.
【0039】また、図7(a),(b)に示すように、
スリーブ2の先端部23外周に軸方向に延びるリブ24
を周方向に配設すれば、圧力センサ1を金型14に取り
付ける際の位置決めが確実となる。Further, as shown in FIGS. 7 (a) and 7 (b),
A rib 24 extending axially around the outer periphery of the tip portion 23 of the sleeve 2.
Are arranged in the circumferential direction, the positioning when the pressure sensor 1 is attached to the mold 14 becomes reliable.
【0040】なお、本実施形態では、ダイアフラム6の
頭部8の下面に突出部8aを設けてピン4先端の凹部4
aと嵌合させて力を伝達しているが、両者の係合部の形
状はこのようなものに限られず、ダイアフラム6の頭部
8の下面を平坦面としてピン4の先端を半球形としても
よい。また、両者を平坦面としてもよい。In this embodiment, the projection 8a is provided on the lower surface of the head 8 of the diaphragm 6 to form the recess 4 at the tip of the pin 4.
Although the force is transmitted by fitting with a, the shape of the engaging portion of both is not limited to this, and the lower surface of the head 8 of the diaphragm 6 is a flat surface and the tip of the pin 4 is a hemispherical shape. Good. Alternatively, both may be flat surfaces.
【0041】(第2の実施形態)図8に本発明の第2の
実施形態に係る圧力センサのスリーブ2及びピン4の受
圧部25側の端部を示す。スリーブ2及びピン4以外の
構成は第1の実施形態と同様なので、説明を省略する。(Second Embodiment) FIG. 8 shows the ends of the sleeve 2 and the pin 4 on the pressure receiving portion 25 side of the pressure sensor according to the second embodiment of the present invention. Since the configuration other than the sleeve 2 and the pin 4 is the same as that of the first embodiment, the description thereof will be omitted.
【0042】本実施形態では、スリーブ2とピン4の受
圧部25側の端面2b,4bにSUS等からなる板状部
材27をレーザ溶接等によって接合している。このよう
にピン4とスリーブ2を板状部材27を介して接合すれ
ば、両者を位置決めするための部品も不要となり構造が
簡略化される。In this embodiment, the plate-like member 27 made of SUS or the like is joined to the end faces 2b, 4b of the sleeve 2 and the pin 4 on the pressure receiving portion 25 side by laser welding or the like. If the pin 4 and the sleeve 2 are joined via the plate-like member 27 in this way, parts for positioning them are not required, and the structure is simplified.
【0043】また、ピン4・スリーブ2間が密封される
ので、低粘性流体の圧力検出も可能となる。Further, since the pin 4 and the sleeve 2 are hermetically sealed, it is possible to detect the pressure of the low-viscosity fluid.
【0044】さらに、ピン4にOリングを装着する必要
がないので、出力のヒステリシスが減少し、高精度の圧
力測定が可能となる。Furthermore, since it is not necessary to attach an O-ring to the pin 4, the hysteresis of the output is reduced and highly accurate pressure measurement becomes possible.
【0045】このようにピン4とスリーブ2と板状部材
27を介して接合すると、ピン4の変形量はスリーブ2
とピン4剛性に依存するので、スリーブ2の剛性を高め
ておけば高圧下でもピン4の座屈の可能性は減少し、ピ
ン4とスリーブ2との摺動抵抗も減少する。従って、圧
力センサの出力のヒステリシスが減少し、高精度の圧力
測定が可能となる。When the pin 4 and the sleeve 2 are joined to each other through the plate member 27 in this manner, the deformation amount of the pin 4 is
Since the pin 4 depends on the rigidity of the pin 4, if the rigidity of the sleeve 2 is increased, the possibility of buckling of the pin 4 is reduced even under high pressure, and the sliding resistance between the pin 4 and the sleeve 2 is also decreased. Therefore, the hysteresis of the output of the pressure sensor is reduced, and highly accurate pressure measurement can be performed.
【0046】ピン4とスリーブ2とを接合することによ
りピン4が座屈しにくくなるので、圧力検出部を頑強に
作る必要もなくなる。By joining the pin 4 and the sleeve 2 to each other, the pin 4 is less likely to buckle, so that it is not necessary to make the pressure detecting portion robustly.
【0047】ピン4の変形量がスリーブ2の剛性に依存
するので、スリーブ2の剛性を変えることによって、セ
ンサの最大測定圧を変化させることもできる。Since the deformation amount of the pin 4 depends on the rigidity of the sleeve 2, the maximum measurement pressure of the sensor can be changed by changing the rigidity of the sleeve 2.
【0048】また、ピン4の変形量は、板状部材27の
厚さにも依存する。従って、所望の最大測定圧に応じて
図8(a)のように肉厚のものであってもよいし、図8
(b)に示すように薄肉のものであってもよい。The amount of deformation of the pin 4 also depends on the thickness of the plate member 27. Therefore, the thickness may be as shown in FIG. 8 (a) depending on the desired maximum measurement pressure.
It may be thin as shown in (b).
【0049】第1及び第2の実施形態では、金型内の溶
融樹脂の圧力を測定する場合について説明したが、本発
明に係る圧力センサはこのような用途に限定されるもの
ではない。In the first and second embodiments, the case where the pressure of the molten resin in the mold is measured has been described, but the pressure sensor according to the present invention is not limited to such an application.
【0050】[0050]
【発明の効果】以上説明したように、第1の発明によれ
ば、軸体と筒体を位置決めするための部品が不要となる
ので、圧力センサの構造が簡略化される。従来使用され
ていた位置決めのためのOリングを使用する必要がない
ので、筒体と軸体との間の摺動抵抗が減少する。As described above, according to the first aspect of the invention, the parts for positioning the shaft body and the cylinder body are not required, so that the structure of the pressure sensor is simplified. Since it is not necessary to use the conventionally used O-ring for positioning, the sliding resistance between the cylindrical body and the shaft body is reduced.
【0051】軸体と筒体との隙間が接合によって密封さ
れれば、流体がセンサ内に侵入することもないので、低
粘性流体を検出対象とすることも可能である。If the gap between the shaft body and the cylindrical body is sealed by joining, the fluid will not enter the sensor, so that a low-viscosity fluid can be used as the detection target.
【0052】また、第1の発明によれば、軸体の変形量
が筒体と軸体の剛性に依存するので、筒体の剛性を高め
ておけば高圧下でも軸体の座屈の可能性が減少し、軸体
と筒体との摺動抵抗も減少する。従って、計測値のヒス
テリシスを低減することができ、高精度の圧力測定が可
能である。Further, according to the first aspect of the invention, since the deformation amount of the shaft body depends on the rigidity of the cylinder body and the shaft body, if the rigidity of the cylinder body is increased, the shaft body can buckle even under high pressure. Performance is reduced, and sliding resistance between the shaft body and the cylinder body is also reduced. Therefore, the hysteresis of the measured value can be reduced, and highly accurate pressure measurement can be performed.
【0053】さらに、第1の発明によれば、軸体が座屈
しにくくなるので、圧力検出部を頑強に作る必要がなく
なる。Furthermore, according to the first aspect of the present invention, since the shaft body is less likely to buckle, it is not necessary to make the pressure detecting portion robust.
【0054】第2の発明によれば、筒体の剛性に依存す
る軸体の変形量を剛性調整手段によって変化させること
ができるので、剛性調整手段によって圧力センサの最大
測定圧を変化させることができる。According to the second aspect of the present invention, the amount of deformation of the shaft depending on the rigidity of the cylinder can be changed by the rigidity adjusting means, so that the maximum measuring pressure of the pressure sensor can be changed by the rigidity adjusting means. it can.
【0055】また、剛性調整手段によって筒体の剛性を
低下させておくと、圧力負荷時に筒体が撓むので、軸体
自体は撓みにくくなる。従って、高圧が作用した場合で
も、受圧部に作用する圧力が効果的に圧力検出部に伝達
されるので、高精度の圧力測定が可能となる。If the rigidity of the cylinder is lowered by the rigidity adjusting means, the cylinder bends when pressure is applied, and the shaft itself becomes difficult to bend. Therefore, even when a high pressure is applied, the pressure acting on the pressure receiving portion is effectively transmitted to the pressure detecting portion, which enables highly accurate pressure measurement.
【0056】第3の発明によれば、受圧部に圧力負荷が
作用した状態で放置しても圧力センサの出力に変動を生
じることがない。According to the third invention, the output of the pressure sensor does not fluctuate even if the pressure receiving section is left under a pressure load.
【図1】図1は本発明の第1の実施形態に係る圧力セン
サの概略構造を示す断面図である。FIG. 1 is a sectional view showing a schematic structure of a pressure sensor according to a first embodiment of the present invention.
【図2】図2は本発明の第1の実施形態に係る圧力セン
サの取付状態を示す部分断面図である。FIG. 2 is a partial cross-sectional view showing a mounted state of the pressure sensor according to the first embodiment of the present invention.
【図3】図3は本発明の第1の実施形態に係る圧力セン
サの圧力と出力との関係を示すグラフである。FIG. 3 is a graph showing a relationship between pressure and output of the pressure sensor according to the first embodiment of the present invention.
【図4】図4は本発明の第1の実施形態に係る圧力セン
サのスリーブ,ピン及びダイアフラムの圧力負荷時の変
形状態を示す図である。FIG. 4 is a diagram showing a deformed state of the sleeve, the pin and the diaphragm of the pressure sensor according to the first embodiment of the present invention when pressure is applied.
【図5】図5は本発明の第1の実施形態の変形例に係る
圧力センサのスリーブ端部を示す図である。FIG. 5 is a diagram showing a sleeve end portion of a pressure sensor according to a modified example of the first embodiment of the present invention.
【図6】図6(a)は図6(b)のA−A断面図であ
り、図6(b)は本発明の第1の実施形態の他の変形例
に係る圧力センサのスリーブ端部を示す図である。6A is a sectional view taken along line AA of FIG. 6B, and FIG. 6B is a sleeve end of a pressure sensor according to another modification of the first embodiment of the present invention. It is a figure which shows a part.
【図7】図7(a)は本発明の第1の実施形態の他の変
形例に係る圧力センサのスリーブを先端側からみた図で
あり、図7(b)は本発明の第1の実施形態の他の変形
例に係る圧力センサのスリーブ端部を軸に直交する方向
からみた図である。FIG. 7 (a) is a view of a sleeve of a pressure sensor according to another modification of the first embodiment of the present invention as seen from the distal end side, and FIG. 7 (b) is the first of the present invention. It is the figure which looked at the sleeve end of the pressure sensor concerning the other modification of an embodiment from the direction orthogonal to the axis.
【図8】図8(a),(b)は本発明の第2の実施形態
に係る圧力センサのスリーブ端部を示す図でる。8A and 8B are views showing a sleeve end portion of a pressure sensor according to a second embodiment of the present invention.
【図9】図9は従来の圧力センサを示す断面図である。FIG. 9 is a sectional view showing a conventional pressure sensor.
【図10】図10は従来の他の圧力センサを示す断面図
である。FIG. 10 is a cross-sectional view showing another conventional pressure sensor.
【図11】図11は従来の他の圧力センサを示す断面図
である。FIG. 11 is a cross-sectional view showing another conventional pressure sensor.
【図12】図12は従来の他の圧力センサの圧力と出力
との関係を示すグラフである。FIG. 12 is a graph showing a relationship between pressure and output of another conventional pressure sensor.
1,100,200,300 圧力センサ 2,201,302 スリーブ 4,202,303 ピン 6,301 ダイアフラム 9 歪ゲージ 10 出力ケーブル 14 金型 17 取り付け用ネジ 21,22 スリット 24 リブ 27 板状部材 1,100,200,300 Pressure sensor 2,201,302 Sleeve 4,202,303 pin 6,301 diaphragm 9 Strain gauge 10 output cable 14 mold 17 mounting screws 21,22 slits 24 ribs 27 Plate-shaped member
Claims (2)
軸体とを有し、 該軸体は一端に検出対象に接触する受圧部を備えてお
り、 該受圧部に作用する検出対象の圧力を前記軸体の他端に
設けられた圧力検出部に伝達して検出する圧力センサに
おいて、 前記軸体の受圧部を前記筒体と接合すると共に、 前記筒体に、前記筒体の剛性を変化させるための、前記
筒体自体の一部の厚みを径方向に薄肉とした剛性調整手
段を備えたことを特徴とする圧力センサ。1. A cylindrical body and a shaft body slidably inserted into the inner circumference of the cylindrical body, the shaft body having a pressure receiving portion in contact with a detection target at one end, and acting on the pressure receiving portion. In a pressure sensor that transmits and detects the pressure of the detection target to a pressure detection unit provided at the other end of the shaft body, the pressure receiving unit of the shaft body is joined to the cylinder body, and the cylinder body , In order to change the rigidity of the cylinder ,
A pressure sensor comprising a rigidity adjusting means in which the thickness of a part of the cylinder itself is reduced in the radial direction .
し、前記検出対象の圧力に応じて変形する金属製の膜状
部材を備えたことを特徴とする請求項1記載の圧力セン
サ。2. The pressure detecting portion engages with the other end of the shaft body.
The metal film that deforms according to the pressure of the detection target
The pressure sensor according to claim 1, further comprising a member .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07058797A JP3427667B2 (en) | 1997-03-07 | 1997-03-07 | Pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07058797A JP3427667B2 (en) | 1997-03-07 | 1997-03-07 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
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JPH10253475A JPH10253475A (en) | 1998-09-25 |
JP3427667B2 true JP3427667B2 (en) | 2003-07-22 |
Family
ID=13435851
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JP07058797A Expired - Fee Related JP3427667B2 (en) | 1997-03-07 | 1997-03-07 | Pressure sensor |
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JP (1) | JP3427667B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2006032152A1 (en) * | 2004-09-22 | 2006-03-30 | Kistler Holding Ag | Pressure sensor |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0694561A (en) * | 1992-09-11 | 1994-04-05 | Matsushita Electric Ind Co Ltd | Piezoelectric type pressure sensor |
JPH0749283A (en) * | 1993-08-05 | 1995-02-21 | Matsushita Electric Ind Co Ltd | Piezoelectric pressure sensor and manufacture thereof |
JPH08136384A (en) * | 1994-11-07 | 1996-05-31 | Matsushita Electric Ind Co Ltd | Combustion pressure sensor |
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1997
- 1997-03-07 JP JP07058797A patent/JP3427667B2/en not_active Expired - Fee Related
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