JP3427667B2 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JP3427667B2 JP3427667B2 JP07058797A JP7058797A JP3427667B2 JP 3427667 B2 JP3427667 B2 JP 3427667B2 JP 07058797 A JP07058797 A JP 07058797A JP 7058797 A JP7058797 A JP 7058797A JP 3427667 B2 JP3427667 B2 JP 3427667B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pin
- pressure sensor
- sleeve
- rigidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧力センサに関
し、特に溶融樹脂等の高温・高粘性流体の圧力（静圧）
の測定、エンジンの筒内圧等の高温・高圧の気体の圧力
の測定等に使用できる圧力センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor, and more particularly to the pressure (static pressure) of a high temperature, high viscosity fluid such as molten resin.
The present invention relates to a pressure sensor that can be used to measure the pressure of high-temperature / high-pressure gas such as engine cylinder pressure.
【０００２】[0002]
【従来の技術】従来、この種の圧力センサとしては、図
９，図１０，図１１に示すようなものがあった。2. Description of the Related Art Heretofore, as a pressure sensor of this type, there has been one as shown in FIGS.
【０００３】図９に示す圧力センサ１００は、受圧部１
０１に作用する圧力を圧力検出部１０２に備えた水晶圧
電素子によって検出するものである。The pressure sensor 100 shown in FIG.
The pressure acting on 01 is detected by the quartz crystal piezoelectric element provided in the pressure detection unit 102.
【０００４】図１０に示す圧力センサ２００は、スリー
ブ２０１内に摺動自在に挿入されたピン２０２によって
受圧部２０３の圧力を伝達して圧力検出部２０４におい
てこれを検出するものである。この圧力センサ２００で
は、ピン２０２の位置決めを板バネ２０５で行ってい
る。In the pressure sensor 200 shown in FIG. 10, the pressure of the pressure receiving portion 203 is transmitted by the pin 202 slidably inserted in the sleeve 201, and the pressure detecting portion 204 detects this. In the pressure sensor 200, the pin 202 is positioned by the leaf spring 205.
【０００５】図１１に示す圧力センサ３００においても
同様に、ダイアフラム３０１に係合されたピン３０３が
スリーブ３０２内に摺動自在に挿入されており、ピン３
０３の先端の受圧部３０４に作用する圧力を、ピン３０
３によってダイアフラム３０１に伝達し、ダイアフラム
３０１の変形を上面に配設された金属薄膜歪ゲージ３０
５の変形として検出するものである。Similarly, in the pressure sensor 300 shown in FIG. 11, the pin 303 engaged with the diaphragm 301 is slidably inserted into the sleeve 302, and the pin 3
The pressure acting on the pressure receiving portion 304 at the tip of the pin 03.
3 is transmitted to the diaphragm 301 and the deformation of the diaphragm 301 is provided on the upper surface of the metal thin film strain gauge 30.
It is detected as a modification of No. 5.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、圧力セ
ンサ１００のように、水晶圧電素子を使用すると加圧放
置ができないという問題があった。However, when the quartz crystal piezoelectric element is used like the pressure sensor 100, there is a problem that it cannot be left under pressure.
【０００７】また、圧力センサ２００のように、ピン２
０２の位置決めを板バネで行うタイプのものでは、ピン
２０２とスリーブ２０１とのクリアランスが約５μｍあ
り、ピン２０２・スリーブ２０１間のシール性がないの
で、特に低粘性流体については正確な圧力測定が望めな
いという問題があった。Further, like the pressure sensor 200, the pin 2
In the case of the type in which 02 is positioned by a leaf spring, the clearance between the pin 202 and the sleeve 201 is about 5 μm, and there is no sealing property between the pin 202 and the sleeve 201, so accurate pressure measurement is possible especially for low viscosity fluids. There was a problem that I could not hope.
【０００８】また、圧力センサ３００では、ピン３０３
の先端部に装着されたＯリング３０６でピンの位置決め
を行っているので、ピン３０３・スリーブ３０２間のシ
ール性は高いが、Ｏリングの変形によるピン３０３・ス
リーブ３０２間の摺動抵抗及びピン３０３の変形による
ピン３０３・スリーブ３０２間の摺動抵抗のために出力
に図１２に示すようなヒステリシスが生じるという問題
があった。Further, in the pressure sensor 300, the pin 303
Since the pin is positioned by the O-ring 306 attached to the tip of the pin, the sealing property between the pin 303 and the sleeve 302 is high, but the sliding resistance and the pin between the pin 303 and the sleeve 302 due to the deformation of the O-ring. There is a problem that hysteresis is generated in the output due to the sliding resistance between the pin 303 and the sleeve 302 due to the deformation of 303.
【０００９】さらに、圧力センサ２００，３００では、
高圧になるにつれ座屈しやすくなる可能性があり、圧力
検出部２０４，ダイアフラム３０１を頑強な構造とする
必要も生じる。Further, in the pressure sensors 200 and 300,
There is a possibility that it will be more likely to buckle as the pressure becomes higher, and it is also necessary to make the pressure detection unit 204 and the diaphragm 301 a robust structure.
【００１０】本発明は上記従来技術の課題を解決するた
めになされたものであって、その目的とするところは、
簡略化された構造を有するとともに高精度の圧力センサ
を提供することにある。The present invention has been made to solve the above-mentioned problems of the prior art, and its purpose is to:
An object of the present invention is to provide a highly accurate pressure sensor having a simplified structure.
【００１１】[0011]
【課題を解決するための手段】上記目的を達成するため
に、第１の発明は、筒体と該筒体内周に摺動自在に挿入
された軸体とを有し、該軸体は一端に検出対象に接触す
る受圧部を備えており、該受圧部に作用する検出対象の
圧力を前記軸体の他端に設けられた圧力検出部に伝達し
て検出する圧力センサにおいて、前記軸体の受圧部を前
記筒体と接合したことを特徴とする。In order to achieve the above object, the first invention comprises a cylindrical body and a shaft body slidably inserted into the inner circumference of the cylindrical body, the shaft body having one end. A pressure sensor which is in contact with a detection target, and which transmits the pressure of the detection target acting on the pressure reception part to a pressure detection unit provided at the other end of the shaft body to detect the pressure. The pressure receiving part of is joined to the cylindrical body.
【００１２】軸体の受圧部と筒体は、例えば、溶接によ
って接合してもよいし、他の部材に軸体と筒体とを接合
するようにしてもよい。The pressure-receiving portion of the shaft and the cylinder may be joined, for example, by welding, or the shaft and the cylinder may be joined to another member.
【００１３】このように、軸体の受圧部と筒体とを接合
すれば、両者を位置決めするための部品が不要となるの
で、圧力センサの構造が簡略化される。従来使用されて
いた位置決めのためのＯリングを使用する必要がないの
で、筒体と軸体との間の摺動抵抗が減少する。By joining the pressure receiving portion of the shaft body and the cylindrical body in this manner, a component for positioning the both is not required, so that the structure of the pressure sensor is simplified. Since it is not necessary to use the conventionally used O-ring for positioning, the sliding resistance between the cylindrical body and the shaft body is reduced.
【００１４】軸体と筒体との隙間が接合によって密封さ
れれば、流体がセンサ内に侵入することもないので、低
粘性流体を検出対象とすることも可能である。If the gap between the shaft body and the cylindrical body is sealed by the joining, the fluid will not enter the sensor, so that a low-viscosity fluid can be detected.
【００１５】また、軸体の受圧部と筒体とを接合する
と、軸体の変形量が筒体と軸体の剛性に依存するので、
筒体の剛性を高めておけば高圧下でも軸体の座屈の可能
性が減少し、軸体と筒体との摺動抵抗も減少する。Further, when the pressure receiving portion of the shaft body and the cylindrical body are joined, the amount of deformation of the shaft body depends on the rigidity of the cylindrical body and the shaft body.
If the rigidity of the cylinder is increased, the possibility of buckling of the shaft is reduced even under high pressure, and the sliding resistance between the shaft and the cylinder is also reduced.
【００１６】このような圧力センサでは、軸体と筒体と
の摺動抵抗が大きいと加圧時と減圧時とで計測値に差が
生じるが、軸体と筒体との摺動抵抗が減少すれば、かか
る計測値のヒステリシスを低減することができ、高精度
の圧力測定が可能である。In such a pressure sensor, if the sliding resistance between the shaft and the cylinder is large, the measured values will differ between when the pressure is applied and when the pressure is reduced, but the sliding resistance between the shaft and the cylinder is large. If it is decreased, the hysteresis of the measured value can be reduced, and highly accurate pressure measurement can be performed.
【００１７】軸体の受圧部と筒体とを接合すれば、軸体
が座屈しにくくなるので、圧力検出部を頑強に作る必要
がなくなる。If the pressure receiving portion of the shaft body and the cylindrical body are joined together, the shaft body will be less likely to buckle, and it is not necessary to make the pressure detecting portion robustly.
【００１８】第２の発明は、第１の発明において、前記
筒体の剛性を変化させるための剛性調整手段を備えたこ
とを特徴とする。A second invention is characterized in that, in the first invention, a rigidity adjusting means for changing the rigidity of the cylindrical body is provided.
【００１９】このようにすれば、筒体の剛性に依存する
軸体の変形量を剛性調整手段によって変化させることが
できるので、剛性調整手段によって圧力センサの最大測
定圧を変化させることができる。With this arrangement, the amount of deformation of the shaft depending on the rigidity of the cylinder can be changed by the rigidity adjusting means, so that the maximum measuring pressure of the pressure sensor can be changed by the rigidity adjusting means.
【００２０】剛性調整手段によって筒体の剛性を低下さ
せておくと、圧力負荷時に筒体が撓み易くなるので、相
対的に軸体自体は撓みにくくなる。従って、高圧が作用
した場合でも、受圧部に作用する圧力が効果的に圧力検
出部に伝達されるので、高精度の圧力測定が可能とな
る。If the rigidity of the cylindrical body is lowered by the rigidity adjusting means, the cylindrical body easily bends when pressure is applied, so that the shaft body itself becomes relatively difficult to bend. Therefore, even when a high pressure is applied, the pressure acting on the pressure receiving portion is effectively transmitted to the pressure detecting portion, which enables highly accurate pressure measurement.
【００２１】第３の発明は、第１又は第２の発明におい
て、前記圧力検出部が、前記軸体の他端と係合し、前記
検出対象の圧力に応じて変形する金属製の膜状部材を備
えたことを特徴とする。In a third aspect based on the first or second aspect, the pressure detecting portion engages with the other end of the shaft body and is made of a metal film which is deformed according to the pressure of the detection target. A member is provided.
【００２２】このように、圧力検出部に金属製の膜状部
材を使用すれば、受圧部に圧力負荷が作用した状態で放
置しても、金属製の膜状部材の変形が保持されることに
より歪ゲージがその時点の状態のままなので圧力センサ
の出力に変動を生じることがない。As described above, when the metal film member is used for the pressure detecting portion, the deformation of the metal film member can be retained even if the pressure receiving portion is left under a pressure load. As a result, since the strain gauge remains in the state at that time, the output of the pressure sensor does not fluctuate.
【００２３】[0023]
【発明の実施の形態】以下、本発明を図示の実施形態に
基づいて説明する。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below based on the illustrated embodiments.
【００２４】（第１の実施形態）図１は本発明の第１の
実施形態に係る圧力センサ１の概略構造を示す。(First Embodiment) FIG. 1 shows a schematic structure of a pressure sensor 1 according to a first embodiment of the present invention.
【００２５】圧力センサ１においては、一方の端部に径
方向に突出するフランジ３を有する筒体としてのスリー
ブ２の孔２ａに略円柱状の軸体としてのピン４が挿入さ
れている。スリーブ２のフランジ３の端面に孔２ａを取
り囲む突出部５が形成されており、この突出部５に膜状
部材として断面略コの字形の金属製のダイアフラム６が
嵌合している。ダイアフラム６の開口側のフランジ７の
端面７ａとスリーブ２のフランジ３の端面２ｂが溶接に
よって固定されている。In the pressure sensor 1, a pin 4 as a substantially columnar shaft is inserted into a hole 2a of a sleeve 2 as a cylinder having a flange 3 protruding in the radial direction at one end. A protruding portion 5 surrounding the hole 2a is formed on the end surface of the flange 3 of the sleeve 2, and a metal diaphragm 6 having a substantially U-shaped cross section is fitted to the protruding portion 5 as a film-shaped member. An end surface 7a of the flange 7 on the opening side of the diaphragm 6 and an end surface 2b of the flange 3 of the sleeve 2 are fixed by welding.
【００２６】ダイアフラム６の膜状の頭部８の下面には
突出部８ａが形成されており、この突出部８ａとピン４
の端部に形成された凹部４ａとが嵌合するようになって
いる。ダイアフラム６の頭部８の上面には金属薄膜歪ゲ
ージ９が配設されている。ダイアフラム６の頭部８の上
面からは歪ゲージ９の出力信号を直接又は所定の処理を
行った後にセンサ１本体外へ取り出すための出力ケーブ
ル１０が引き出されており、この出力ケーブル１０は軸
方向に延びる棒状のケーブル固定部１１に固定支持され
ている。本実施形態では、ダイアフラム６及び歪ゲージ
９が圧力検出部を構成する。A projection 8a is formed on the lower surface of the membrane-shaped head 8 of the diaphragm 6, and the projection 8a and the pin 4 are formed.
The concave portion 4a formed at the end of is fitted. A metal thin film strain gauge 9 is provided on the upper surface of the head 8 of the diaphragm 6. From the upper surface of the head portion 8 of the diaphragm 6, an output cable 10 for extracting the output signal of the strain gauge 9 directly or after performing a predetermined process to the outside of the main body of the sensor 1 is drawn out. It is fixedly supported by a rod-shaped cable fixing portion 11 extending in the direction. In the present embodiment, the diaphragm 6 and the strain gauge 9 form a pressure detection unit.
【００２７】ケーブル固定部１１のダイアフラム側端部
の外周には、出力ケーブル１０引き出し用の孔１２ａを
底面に設けた有底円筒形状の保護カバー１２が接合され
ている。保護カバー１２の底面に設けられた段部１２ｂ
にダイアフラム６の頭部８が嵌合するようになってお
り、保護カバー１２の筒部１２ｃはダイアフラム６の頭
部８の外周を覆っている。保護カバー１２のダイアフラ
ム６とは反対側の端面にはケーブル固定部１１を収納す
る有底円筒形のケーブル収納部１３が接合されており、
ケーブル収納部１３の底部の孔１３ａからケーブル固定
部１１の端部が若干露出している。On the outer periphery of the end of the cable fixing portion 11 on the diaphragm side, a bottomed cylindrical protective cover 12 having a hole 12a for drawing out the output cable 10 is joined. Step 12b provided on the bottom surface of the protective cover 12
The head portion 8 of the diaphragm 6 is fitted in the cylindrical portion 12c of the protective cover 12 and covers the outer periphery of the head portion 8 of the diaphragm 6. A bottomed cylindrical cable housing portion 13 for housing the cable fixing portion 11 is joined to an end surface of the protective cover 12 opposite to the diaphragm 6,
The end of the cable fixing portion 11 is slightly exposed from the hole 13a at the bottom of the cable housing portion 13.
【００２８】圧力センサ１は、図２に示すように、金型
１４に設けられた段付きの貫通孔１５に、受圧部１６が
金型１４内部に臨むように取り付ける。金型１４への取
り付けには、ケーブル収納部１３，保護カバー１２及び
ダイアフラム６の外周を覆う中空の取り付け用ネジ１７
を用いる。貫通孔１５内周面にネジ溝を切ったネジ部１
５ａが設けられ、締付部１７ａを締め付けて取り付け用
ネジ１７の外周のネジ部１７ｂと貫通孔１５内周面のネ
ジ部１５ａとを螺合させて取り付ける。取り付が完了す
ると、取り付け用ネジ１７の端部１７ｃと貫通孔１５の
段部１５ｂとの間でダイアフラム６のフランジ７及びス
リーブ２のフランジ３が挟持されて固定される。As shown in FIG. 2, the pressure sensor 1 is attached to a stepped through hole 15 provided in the mold 14 so that the pressure receiving portion 16 faces the inside of the mold 14. For attachment to the mold 14, a hollow attachment screw 17 for covering the outer circumference of the cable housing portion 13, the protective cover 12, and the diaphragm 6 is used.
To use. Threaded portion 1 with a thread groove formed on the inner peripheral surface of the through hole 15
5a is provided, and the tightening portion 17a is tightened to attach the screw portion 17b on the outer periphery of the mounting screw 17 and the screw portion 15a on the inner peripheral surface of the through hole 15 by screwing. When the mounting is completed, the flange 7 of the diaphragm 6 and the flange 3 of the sleeve 2 are clamped and fixed between the end portion 17c of the mounting screw 17 and the step portion 15b of the through hole 15.
【００２９】圧力センサ１は、受圧部１６に作用する金
型１４内の溶融樹脂の圧力をピン４によってダイアフラ
ム６に伝達し、ダイアフラム６の変形を歪ゲージ９の出
力変化として検出している。The pressure sensor 1 transmits the pressure of the molten resin in the mold 14 acting on the pressure receiving portion 16 to the diaphragm 6 by the pin 4, and detects the deformation of the diaphragm 6 as an output change of the strain gauge 9.
【００３０】本実施形態では、受圧部１６側でピン４と
スリーブ２とが溶接され、溶接部１８によって接合され
ている。溶接は軸方向に行ってもよいし軸に直交する方
向であってもよい。このように、ピン４とスリーブ２と
を溶接によって固定すれば、両者を位置決めするための
部品も不要となり構造が簡略化される。In the present embodiment, the pin 4 and the sleeve 2 are welded on the pressure receiving portion 16 side and joined by the weld portion 18. Welding may be performed in the axial direction or in a direction orthogonal to the axis. In this way, if the pin 4 and the sleeve 2 are fixed by welding, parts for positioning the both are not required and the structure is simplified.
【００３１】また、ピン４・スリーブ２間が密封される
ので、低粘性流体の圧力検出も可能となる。Since the pin 4 and the sleeve 2 are sealed, it is possible to detect the pressure of the low-viscosity fluid.
【００３２】さらに、ピン４にＯリングを装着する必要
がないので、ピン４とスリーブ２との摺動抵抗が減少す
る。Furthermore, since it is not necessary to attach an O-ring to the pin 4, the sliding resistance between the pin 4 and the sleeve 2 is reduced.
【００３３】このようにピン４とスリーブ２とを接合す
ると、ピン４の変形量はスリーブ２とピン４剛性に依存
するので、スリーブ２の剛性を高めておけば高圧下でも
ピン４の座屈の可能性は減少し、ピン４とスリーブ２と
の摺動抵抗も減少する。従って、図３に示すように圧力
センサ１の出力のヒステリシスが減少し、高精度の圧力
測定が可能となる。測定圧力１０００ｋｇｆ／ｃｍ2 フ
ルスケールに対する最大差発生時（５００ｋｇｆ／ｃｍ
2 ）における減圧時と加圧時の出力差を従来例に係る圧
力センサ３００と比較してみると、圧力センサ３００で
は３４ｋｇｆ／ｃｍ2 であるのに対して本実施形態に係
る圧力センサ１では１６ｋｇｆ／ｃｍ2となっており、
ヒステリシスの減少が認められた。When the pin 4 and the sleeve 2 are joined in this way, the amount of deformation of the pin 4 depends on the rigidity of the sleeve 2 and the pin 4, so if the rigidity of the sleeve 2 is increased, the pin 4 will buckle even under high pressure. And the sliding resistance between the pin 4 and the sleeve 2 is also reduced. Therefore, as shown in FIG. 3, the hysteresis of the output of the pressure sensor 1 is reduced, and highly accurate pressure measurement becomes possible. Measurement pressure 1000kgf / cm 2 When maximum difference from full scale occurs (500kgf / cm
Comparing the output difference between the pressure reduction and the pressure increase in 2 ) with the pressure sensor 300 according to the conventional example, it is 34 kgf / cm 2 in the pressure sensor 300, whereas in the pressure sensor 1 according to the present embodiment. It is 16 kgf / cm 2 ,
A decrease in hysteresis was observed.
【００３４】ピン４とスリーブ２とを接合することによ
りピン４が座屈しにくくなるので、圧力検出部を頑強に
作る必要もなくなる。By joining the pin 4 and the sleeve 2 to each other, the pin 4 is less likely to buckle, so that it is not necessary to make the pressure detecting portion robustly.
【００３５】また、ピン４の変形量がスリーブ２の剛性
に依存するので、スリーブ２の剛性を変えることによっ
て、センサ１の最大測定圧を変化させることもできる。
本実施形態では、剛性調整手段としてスリーブ２の筒部
１９に径方向に薄肉とした薄肉部２０を設けてスリーブ
２の剛性を下げている。Further, since the deformation amount of the pin 4 depends on the rigidity of the sleeve 2, the maximum measurement pressure of the sensor 1 can be changed by changing the rigidity of the sleeve 2.
In this embodiment, the rigidity of the sleeve 2 is reduced by providing a thin portion 20 that is thin in the radial direction on the tubular portion 19 of the sleeve 2 as a rigidity adjusting means.
【００３６】圧力センサ１に圧力が作用したときのスリ
ーブ２，ピン４及びダイアフラム６の変形状態を図４に
示す。破線部分が圧力負荷前，実線部分が圧力負荷時の
変形状態である。圧力負荷時には、剛性の低下したスリ
ーブ２が撓むので、ピン４自体は撓みにくくなる。従っ
て、高圧が作用した場合でも、受圧面の圧力がピン４に
より効果的にダイアフラム６へと伝達され、高精度の圧
力測定が可能となる。FIG. 4 shows the deformed state of the sleeve 2, the pin 4 and the diaphragm 6 when pressure is applied to the pressure sensor 1. The broken line shows the deformation before pressure loading, and the solid line shows the deformation under pressure loading. When pressure is applied, the sleeve 2 having reduced rigidity bends, and thus the pin 4 itself does not bend easily. Therefore, even when a high pressure is applied, the pressure on the pressure receiving surface is effectively transmitted to the diaphragm 6 by the pin 4, and it is possible to measure the pressure with high accuracy.
【００３７】本実施形態では、圧力検出に金属製ダイア
フラムを使用しているので、受圧部に圧力負荷が作用し
た状態で放置しても出力の変動がない。In this embodiment, since the metal diaphragm is used for pressure detection, the output does not change even if the pressure receiving portion is left under a pressure load.
【００３８】スリーブ２の剛性を変えるには、図５に示
すようにスリーブ２の筒部１９に軸方向のスリット２１
を設けても良い。また、スリットは、軸方向のものに限
られず、図６（ａ），（ｂ）に示すように、軸に直交す
る方向のスリット２２を孔２ａの両側に設け、このスリ
ット２２を軸方向に互いに軸の回りに９０°ずつずらし
て交互に設けるようにしてもよい。In order to change the rigidity of the sleeve 2, an axial slit 21 is formed in the tubular portion 19 of the sleeve 2 as shown in FIG.
May be provided. The slits are not limited to those in the axial direction, and as shown in FIGS. 6A and 6B, slits 22 in the direction orthogonal to the axis are provided on both sides of the hole 2a, and the slits 22 are arranged in the axial direction. Alternatively, they may be provided alternately by being shifted by 90 ° around the axis.
【００３９】また、図７（ａ），（ｂ）に示すように、
スリーブ２の先端部２３外周に軸方向に延びるリブ２４
を周方向に配設すれば、圧力センサ１を金型１４に取り
付ける際の位置決めが確実となる。Further, as shown in FIGS. 7 (a) and 7 (b),
A rib 24 extending axially around the outer periphery of the tip portion 23 of the sleeve 2.
Are arranged in the circumferential direction, the positioning when the pressure sensor 1 is attached to the mold 14 becomes reliable.
【００４０】なお、本実施形態では、ダイアフラム６の
頭部８の下面に突出部８ａを設けてピン４先端の凹部４
ａと嵌合させて力を伝達しているが、両者の係合部の形
状はこのようなものに限られず、ダイアフラム６の頭部
８の下面を平坦面としてピン４の先端を半球形としても
よい。また、両者を平坦面としてもよい。In this embodiment, the projection 8a is provided on the lower surface of the head 8 of the diaphragm 6 to form the recess 4 at the tip of the pin 4.
Although the force is transmitted by fitting with a, the shape of the engaging portion of both is not limited to this, and the lower surface of the head 8 of the diaphragm 6 is a flat surface and the tip of the pin 4 is a hemispherical shape. Good. Alternatively, both may be flat surfaces.
【００４１】（第２の実施形態）図８に本発明の第２の
実施形態に係る圧力センサのスリーブ２及びピン４の受
圧部２５側の端部を示す。スリーブ２及びピン４以外の
構成は第１の実施形態と同様なので、説明を省略する。(Second Embodiment) FIG. 8 shows the ends of the sleeve 2 and the pin 4 on the pressure receiving portion 25 side of the pressure sensor according to the second embodiment of the present invention. Since the configuration other than the sleeve 2 and the pin 4 is the same as that of the first embodiment, the description thereof will be omitted.
【００４２】本実施形態では、スリーブ２とピン４の受
圧部２５側の端面２ｂ，４ｂにＳＵＳ等からなる板状部
材２７をレーザ溶接等によって接合している。このよう
にピン４とスリーブ２を板状部材２７を介して接合すれ
ば、両者を位置決めするための部品も不要となり構造が
簡略化される。In this embodiment, the plate-like member 27 made of SUS or the like is joined to the end faces 2b, 4b of the sleeve 2 and the pin 4 on the pressure receiving portion 25 side by laser welding or the like. If the pin 4 and the sleeve 2 are joined via the plate-like member 27 in this way, parts for positioning them are not required, and the structure is simplified.
【００４３】また、ピン４・スリーブ２間が密封される
ので、低粘性流体の圧力検出も可能となる。Further, since the pin 4 and the sleeve 2 are hermetically sealed, it is possible to detect the pressure of the low-viscosity fluid.
【００４４】さらに、ピン４にＯリングを装着する必要
がないので、出力のヒステリシスが減少し、高精度の圧
力測定が可能となる。Furthermore, since it is not necessary to attach an O-ring to the pin 4, the hysteresis of the output is reduced and highly accurate pressure measurement becomes possible.
【００４５】このようにピン４とスリーブ２と板状部材
２７を介して接合すると、ピン４の変形量はスリーブ２
とピン４剛性に依存するので、スリーブ２の剛性を高め
ておけば高圧下でもピン４の座屈の可能性は減少し、ピ
ン４とスリーブ２との摺動抵抗も減少する。従って、圧
力センサの出力のヒステリシスが減少し、高精度の圧力
測定が可能となる。When the pin 4 and the sleeve 2 are joined to each other through the plate member 27 in this manner, the deformation amount of the pin 4 is
Since the pin 4 depends on the rigidity of the pin 4, if the rigidity of the sleeve 2 is increased, the possibility of buckling of the pin 4 is reduced even under high pressure, and the sliding resistance between the pin 4 and the sleeve 2 is also decreased. Therefore, the hysteresis of the output of the pressure sensor is reduced, and highly accurate pressure measurement can be performed.
【００４６】ピン４とスリーブ２とを接合することによ
りピン４が座屈しにくくなるので、圧力検出部を頑強に
作る必要もなくなる。By joining the pin 4 and the sleeve 2 to each other, the pin 4 is less likely to buckle, so that it is not necessary to make the pressure detecting portion robustly.
【００４７】ピン４の変形量がスリーブ２の剛性に依存
するので、スリーブ２の剛性を変えることによって、セ
ンサの最大測定圧を変化させることもできる。Since the deformation amount of the pin 4 depends on the rigidity of the sleeve 2, the maximum measurement pressure of the sensor can be changed by changing the rigidity of the sleeve 2.
【００４８】また、ピン４の変形量は、板状部材２７の
厚さにも依存する。従って、所望の最大測定圧に応じて
図８（ａ）のように肉厚のものであってもよいし、図８
（ｂ）に示すように薄肉のものであってもよい。The amount of deformation of the pin 4 also depends on the thickness of the plate member 27. Therefore, the thickness may be as shown in FIG. 8 (a) depending on the desired maximum measurement pressure.
It may be thin as shown in (b).
【００４９】第１及び第２の実施形態では、金型内の溶
融樹脂の圧力を測定する場合について説明したが、本発
明に係る圧力センサはこのような用途に限定されるもの
ではない。In the first and second embodiments, the case where the pressure of the molten resin in the mold is measured has been described, but the pressure sensor according to the present invention is not limited to such an application.
【００５０】[0050]
【発明の効果】以上説明したように、第１の発明によれ
ば、軸体と筒体を位置決めするための部品が不要となる
ので、圧力センサの構造が簡略化される。従来使用され
ていた位置決めのためのＯリングを使用する必要がない
ので、筒体と軸体との間の摺動抵抗が減少する。As described above, according to the first aspect of the invention, the parts for positioning the shaft body and the cylinder body are not required, so that the structure of the pressure sensor is simplified. Since it is not necessary to use the conventionally used O-ring for positioning, the sliding resistance between the cylindrical body and the shaft body is reduced.
【００５１】軸体と筒体との隙間が接合によって密封さ
れれば、流体がセンサ内に侵入することもないので、低
粘性流体を検出対象とすることも可能である。If the gap between the shaft body and the cylindrical body is sealed by joining, the fluid will not enter the sensor, so that a low-viscosity fluid can be used as the detection target.
【００５２】また、第１の発明によれば、軸体の変形量
が筒体と軸体の剛性に依存するので、筒体の剛性を高め
ておけば高圧下でも軸体の座屈の可能性が減少し、軸体
と筒体との摺動抵抗も減少する。従って、計測値のヒス
テリシスを低減することができ、高精度の圧力測定が可
能である。Further, according to the first aspect of the invention, since the deformation amount of the shaft body depends on the rigidity of the cylinder body and the shaft body, if the rigidity of the cylinder body is increased, the shaft body can buckle even under high pressure. Performance is reduced, and sliding resistance between the shaft body and the cylinder body is also reduced. Therefore, the hysteresis of the measured value can be reduced, and highly accurate pressure measurement can be performed.
【００５３】さらに、第１の発明によれば、軸体が座屈
しにくくなるので、圧力検出部を頑強に作る必要がなく
なる。Furthermore, according to the first aspect of the present invention, since the shaft body is less likely to buckle, it is not necessary to make the pressure detecting portion robust.
【００５４】第２の発明によれば、筒体の剛性に依存す
る軸体の変形量を剛性調整手段によって変化させること
ができるので、剛性調整手段によって圧力センサの最大
測定圧を変化させることができる。According to the second aspect of the present invention, the amount of deformation of the shaft depending on the rigidity of the cylinder can be changed by the rigidity adjusting means, so that the maximum measuring pressure of the pressure sensor can be changed by the rigidity adjusting means. it can.
【００５５】また、剛性調整手段によって筒体の剛性を
低下させておくと、圧力負荷時に筒体が撓むので、軸体
自体は撓みにくくなる。従って、高圧が作用した場合で
も、受圧部に作用する圧力が効果的に圧力検出部に伝達
されるので、高精度の圧力測定が可能となる。If the rigidity of the cylinder is lowered by the rigidity adjusting means, the cylinder bends when pressure is applied, and the shaft itself becomes difficult to bend. Therefore, even when a high pressure is applied, the pressure acting on the pressure receiving portion is effectively transmitted to the pressure detecting portion, which enables highly accurate pressure measurement.
【００５６】第３の発明によれば、受圧部に圧力負荷が
作用した状態で放置しても圧力センサの出力に変動を生
じることがない。According to the third invention, the output of the pressure sensor does not fluctuate even if the pressure receiving section is left under a pressure load.
【図１】図１は本発明の第１の実施形態に係る圧力セン
サの概略構造を示す断面図である。FIG. 1 is a sectional view showing a schematic structure of a pressure sensor according to a first embodiment of the present invention.
【図２】図２は本発明の第１の実施形態に係る圧力セン
サの取付状態を示す部分断面図である。FIG. 2 is a partial cross-sectional view showing a mounted state of the pressure sensor according to the first embodiment of the present invention.
【図３】図３は本発明の第１の実施形態に係る圧力セン
サの圧力と出力との関係を示すグラフである。FIG. 3 is a graph showing a relationship between pressure and output of the pressure sensor according to the first embodiment of the present invention.
【図４】図４は本発明の第１の実施形態に係る圧力セン
サのスリーブ，ピン及びダイアフラムの圧力負荷時の変
形状態を示す図である。FIG. 4 is a diagram showing a deformed state of the sleeve, the pin and the diaphragm of the pressure sensor according to the first embodiment of the present invention when pressure is applied.
【図５】図５は本発明の第１の実施形態の変形例に係る
圧力センサのスリーブ端部を示す図である。FIG. 5 is a diagram showing a sleeve end portion of a pressure sensor according to a modified example of the first embodiment of the present invention.
【図６】図６（ａ）は図６（ｂ）のＡ−Ａ断面図であ
り、図６（ｂ）は本発明の第１の実施形態の他の変形例
に係る圧力センサのスリーブ端部を示す図である。6A is a sectional view taken along line AA of FIG. 6B, and FIG. 6B is a sleeve end of a pressure sensor according to another modification of the first embodiment of the present invention. It is a figure which shows a part.
【図７】図７（ａ）は本発明の第１の実施形態の他の変
形例に係る圧力センサのスリーブを先端側からみた図で
あり、図７（ｂ）は本発明の第１の実施形態の他の変形
例に係る圧力センサのスリーブ端部を軸に直交する方向
からみた図である。FIG. 7 (a) is a view of a sleeve of a pressure sensor according to another modification of the first embodiment of the present invention as seen from the distal end side, and FIG. 7 (b) is the first of the present invention. It is the figure which looked at the sleeve end of the pressure sensor concerning the other modification of an embodiment from the direction orthogonal to the axis.
【図８】図８（ａ），（ｂ）は本発明の第２の実施形態
に係る圧力センサのスリーブ端部を示す図でる。8A and 8B are views showing a sleeve end portion of a pressure sensor according to a second embodiment of the present invention.
【図９】図９は従来の圧力センサを示す断面図である。FIG. 9 is a sectional view showing a conventional pressure sensor.
【図１０】図１０は従来の他の圧力センサを示す断面図
である。FIG. 10 is a cross-sectional view showing another conventional pressure sensor.
【図１１】図１１は従来の他の圧力センサを示す断面図
である。FIG. 11 is a cross-sectional view showing another conventional pressure sensor.
【図１２】図１２は従来の他の圧力センサの圧力と出力
との関係を示すグラフである。FIG. 12 is a graph showing a relationship between pressure and output of another conventional pressure sensor.
１，１００，２００，３００ 圧力センサ ２，２０１，３０２ スリーブ ４，２０２，３０３ ピン ６，３０１ ダイアフラム ９ 歪ゲージ １０ 出力ケーブル １４ 金型 １７ 取り付け用ネジ ２１，２２ スリット ２４ リブ ２７ 板状部材 1,100,200,300 Pressure sensor 2,201,302 Sleeve 4,202,303 pin 6,301 diaphragm 9 Strain gauge 10 output cable 14 mold 17 mounting screws 21,22 slits 24 ribs 27 Plate-shaped member
Claims (2)
軸体とを有し、 該軸体は一端に検出対象に接触する受圧部を備えてお
り、 該受圧部に作用する検出対象の圧力を前記軸体の他端に
設けられた圧力検出部に伝達して検出する圧力センサに
おいて、 前記軸体の受圧部を前記筒体と接合すると共に、 前記筒体に、前記筒体の剛性を変化させるための、前記
筒体自体の一部の厚みを径方向に薄肉とした剛性調整手
段を備えたことを特徴とする圧力センサ。1. A cylindrical body and a shaft body slidably inserted into the inner circumference of the cylindrical body, the shaft body having a pressure receiving portion in contact with a detection target at one end, and acting on the pressure receiving portion. In a pressure sensor that transmits and detects the pressure of the detection target to a pressure detection unit provided at the other end of the shaft body, the pressure receiving unit of the shaft body is joined to the cylinder body, and the cylinder body , In order to change the rigidity of the cylinder ,
A pressure sensor comprising a rigidity adjusting means in which the thickness of a part of the cylinder itself is reduced in the radial direction .
し、前記検出対象の圧力に応じて変形する金属製の膜状
部材を備えたことを特徴とする請求項１記載の圧力セン
サ。2. The pressure detecting portion engages with the other end of the shaft body.
The metal film that deforms according to the pressure of the detection target
The pressure sensor according to claim 1, further comprising a member .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07058797A JP3427667B2 (en) | 1997-03-07 | 1997-03-07 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07058797A JP3427667B2 (en) | 1997-03-07 | 1997-03-07 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10253475A JPH10253475A (en) | 1998-09-25 |
| JP3427667B2 true JP3427667B2 (en) | 2003-07-22 |
Family
ID=13435851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07058797A Expired - Fee Related JP3427667B2 (en) | 1997-03-07 | 1997-03-07 | Pressure sensor |
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| Country | Link |
|---|---|
| JP (1) | JP3427667B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006032152A1 (en) * | 2004-09-22 | 2006-03-30 | Kistler Holding Ag | Pressure sensor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0694561A (en) * | 1992-09-11 | 1994-04-05 | Matsushita Electric Ind Co Ltd | Piezoelectric type pressure sensor |
| JPH0749283A (en) * | 1993-08-05 | 1995-02-21 | Matsushita Electric Ind Co Ltd | Piezoelectric pressure sensor and manufacture thereof |
| JPH08136384A (en) * | 1994-11-07 | 1996-05-31 | Matsushita Electric Ind Co Ltd | Combustion pressure sensor |
-
1997
- 1997-03-07 JP JP07058797A patent/JP3427667B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10253475A (en) | 1998-09-25 |
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