JP3409284B2 - Method of forming partition - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming partition walls made of a low melting point glass layer on a substrate such as glass,
Particularly, in a plasma display (hereinafter referred to as PDP), when a low melting point glass layer having a blast property is formed on a substrate such as a glass provided with electrodes, and a partition wall is formed by blasting the low melting point glass layer. The present invention relates to a method for efficiently forming a partition wall by polishing an electrode at the bottom of a workpiece or a substrate made of glass or the like without damaging the surface texture.

[0002]

2. Description of the Related Art Conventionally, a sandblast method has been widely adopted as one of methods for manufacturing a PDP. In this method, a low melting point glass layer having a blasting property and having a thickness of 1 mm or less is usually formed on a substrate such as glass provided with electrodes, and fine grooves having a width of 50 to 600 μm are formed in the low melting point glass layer. Grind to a certain depth. In this case, the groove width is made constant by applying or printing a masking tape or the like on the low melting point glass layer, and the low melting point glass layer is blasted by spraying an abrasive from the surface side of the low melting point glass layer onto a substrate such as glass. And a partition is formed by grinding to a depth reaching

As the abrasive particles, glass beads, alundum, corundum, etc. are usually used, and the hardness thereof is equal to or higher than that of the work piece in order to increase the polishing rate. Further, as the particle shape, a spherical shape or an almost spherical shape is used.

The advantage of using spherical or near spherical particles as the particle shape of the abrasive is that it is easy to remove coarse particles during the manufacturing process of the abrasive, and the adhesiveness to the work piece during blasting is high. And has good fluidity,
That is, there is little wear of the abrasive.

On the other hand, a drawback of the abrasive particles having a spherical shape or a shape close to a spherical shape is that the processing speed is slow because only a small amount of protrusions are present per particle, and only a portion corresponding to the curvature of the sphere can be polished. Therefore, it is impossible to process the groove and the corner of the groove accurately and efficiently. In order to improve this drawback, when using an abrasive having a small spherical shape or a shape close to a spherical shape, the curvature of the abrasive particles becomes small, so that even fine parts can be processed,
Since the mass of each abrasive particle is small, the impact force generated when the abrasive particles collide with the polishing surface is reduced, so that the polishing force itself is reduced and the efficiency is deteriorated. In addition, since the particle shape is a spherical shape or something close to it, when the polishing progresses to a certain extent and the groove is excavated, the abrasive particles collide with the groove wall surface at the groove bottom of the object to be polished. There is also a problem that the shape of the partition wall is difficult to be uniform. Further, when the abrasive particles are crushed, irregularly shaped protrusions are generated, and there is such a bad effect that the protrusions seriously scratch the surface to be polished. This is because the Mohs hardness of the abrasive is larger than that of the bottom substrate, which is the surface to be polished.

[0006] As an attempt to solve this, an abrasive having a so-called composite particle size, in which the particle size is adjusted to include an abrasive having a fine particle size, is used. Since the mixing ratio of the materials is not constant, there is a problem that so-called polishing unevenness is likely to occur due to remaining unpolished portions at the grooves and their corners, or conversely excessive polishing.

Further, when the abrasives are repeatedly used, segregation occurs and the variation of the mixing ratio of the abrasives having a fine particle diameter becomes large, which also causes the variation of the polishing accuracy. Furthermore, as described above, the abrasive having a fine particle diameter is
Since the mass of each particle is small, the grinding force is small and the efficiency is poor.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and the problem is to solve the above problems.
In particular, in the partition wall forming process of PDP, it is an object of the present invention to provide a method for efficiently and accurately polishing partition walls without impairing the properties of the bottom surface of the object to be polished.

[0009]

As a result of intensive studies, the inventors of the present invention have found that the shape of the abrasive, the Mohs hardness, the maximum particle size, and the average particle size are determined according to the pitch to be processed and the material of the workpiece. The inventors have found that the above object can be achieved by controlling the above, and have reached the present invention.

That is, according to the present invention, when a partition wall is formed by blasting a substrate provided with an electrode and a blasting low melting point glass layer provided on the substrate at predetermined intervals, the following formula (1) ), (2), (3), (4) and (5) are all used, the content of the method for forming partition walls is characterized by using an abrasive made of inorganic particle powder. 10 ≦ A ≦ 0.8C (1) 0.03C ≦ B ≦ 0.5C (2) 50 ≦ C ≦ 800 (3) 30 ≦ D ≦ 95 (4) E ₂ −3.5 ≦ E ₁ ≦ E ₂ -0.5 (5) where A: maximum particle size of abrasive (μm) B: average particle size of abrasive (μm) C: partition width d ₁ + grinding groove width d ₂ (μm) D at processing pitch : An index (%) indicating an irregular shape of a particle, showing an area ratio of a projected area of a particle to a circumscribed circle. E ₁ : Mohs hardness of abrasive material E ₂ : Mohs hardness of substrate or electrode, whichever is lower

A preferred embodiment is a method of forming partition walls in which the specific gravity F of the inorganic particle powder satisfies the following formula (15) (claim 2). 1 ≦ F ≦ 6 (15)

[0012] In a preferred embodiment, the inorganic particle powder is 0.
A method for forming partition walls, the surface of which is treated with a substance imparting a hydrophobicity of 01 to 5% by weight (claim 3).

A preferred embodiment is a method for forming partition walls in which a fluidity aid is added in an amount of 0.01 to 5% by weight with respect to the inorganic particle powder (claim 4).

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below. In the partition wall formation using the PDP sandblast method, there is a preferable maximum particle diameter according to the processing pitch C (partition wall width d ₁ + grinding groove width d ₂ ). The particle size A (μm) is the processing pitch C (μ
It is necessary to select the inorganic particle powder so as to satisfy the following formula (1), preferably the following formula (6), and more preferably the following formula (7) in relation to m).

[0015] 10 ≦ A ≦ 0.8C (1) 11 ≦ A ≦ 0.7C (6) 12 ≦ A ≦ 0.6C (7)

That is, if the maximum particle size in the inorganic particle powder as an abrasive exceeds 0.8 C, the probability that particles larger than the groove width to be ground exists will be high, and a large abrasive will be present in the groove ground to some extent. The particles are trapped, and as a result, the grinding of the lower portion where the particles are trapped is hindered, and in some cases, the partition walls are damaged, resulting in a decrease in processing accuracy and production efficiency. In addition, the maximum particle size of the inorganic particle powder that is an abrasive is 1
If it is smaller than 0 μm, the average particle size of the inorganic particle powder also becomes extremely small, the grinding ability of one inorganic particle as an abrasive is reduced, and an abrasive having good grinding efficiency cannot be obtained. That is, with the above structure, damage to the partition walls is prevented, and the accuracy of the partition walls is significantly improved.

Further, the average particle size of the inorganic particle powder as the abrasive affects the processing speed and the dispersibility of the abrasive during the blasting. Considering these characteristics,
In the present invention, the average particle diameter B (μm) of the abrasive is expressed by the following formula (2), preferably the following formula (8), and more preferably the following formula (9) in relation to the processing pitch (C) (μm). Must be selected so that

[0018] 0.03C ≦ B ≦ 0.5C (2) 0.04C ≦ B ≦ 0.4C (8) 0.05C ≦ B ≦ 0.3C (9)

That is, in the partition wall formation using the PDP sandblasting method, there is a preferable average particle size depending on the processing pitch. The average particle size is 0.
If it exceeds 5C, the mass of each inorganic particle powder, which is an abrasive, increases, and the grinding force in one collision of particles also increases. As a result, from the glass or the like that is the bottom of the workpiece, The risk of damaging the electrodes provided on the substrate and the substrate surface also increases. Also, the average particle size is
If it is less than 0.03C, it is 1 of the inorganic particle powder which is an abrasive
The mass per piece is reduced, and the grinding force in one collision of particles is also reduced. As a result, the risk of damaging the electrodes and the substrate surface provided on the substrate made of glass or the like, which is the bottom of the workpiece, can be avoided, but the polishing efficiency is significantly reduced. That is, with the above configuration, good polishing efficiency can be maintained even if the processing pitch becomes small.

The processing pitch C in the partition wall formation using the blast method of PDP is usually blasting mainly in the range of 50 to 800 μm, and this range is also suitable in the present invention.

The index D, which indicates the irregular shape of the inorganic particle powder as the abrasive, affects the processing speed and processing accuracy particularly during blasting. The exponent indicating an indeterminate shape in the present invention means an area ratio of a projected area of a particle to a circumscribed circle as defined by the following formula (10), and the following formula (4), preferably the following formula (11), More preferably, the following formula (12)
Must be selected so that

[0022]                               Projected area of particles Area ratio to circumscribed circle = ──────────────── × 100 (10)             (%) Area of circumscribed circle of projected area of particles           30 ≦ D ≦ 95 (4)           35 ≦ D ≦ 90 (11)           40 ≦ D ≦ 85 (12)

With the above structure, the grooves and the corners of the object to be polished can be sufficiently and accurately processed. That is, since the crushing proceeds to some extent when the abrasive particles having an irregular shape collide with the surface to be polished, the rebound from the surface to be polished of the abrasive particles is suppressed as compared with the spherical abrasive particles, and the groove The shape is stable and accurate.

Further, with the above structure, the polishing efficiency can be improved. Although this mechanism is not necessarily clear, the present inventors have found that when the projections of the irregularly shaped abrasive particles collide with the surface to be polished, the spherical surfaces of the spherical abrasive particles collide with the surface to be polished. It is speculated that a much larger impact force is generated and polishing may proceed. That is, the projection of the irregularly shaped abrasive particles has a curvature smaller than that of the particle diameter by one digit or more, but the curvature of the spherical surface such as spherical abrasive particles is the same order as the particle diameter, There is a difference of two digits or more in the area of the collision part.
If the masses are substantially the same, the pressure exerted on the surface to be polished also becomes larger by two digits or more in the protrusions of the abrasive particles having an indefinite shape. It has been confirmed by experiments that the polishing power also increases with pressure. Therefore, if the index indicating an irregular shape exceeds 95%, the polishing efficiency is reduced to be close to that of spherical particles, and conversely, if it is less than 30%, the particle shape takes a needle shape or a scale shape, and the protrusion portion per particle is Will decrease and the polishing efficiency will decrease.

The abrasive used in the present invention is characterized in that it has a lower specific gravity than the Mohs hardness of the substrate such as glass, which is the bottom of the workpiece. As a result, the low-melting-point glass layer, which is the work piece provided on the substrate, can be efficiently and accurately ground, and even if the grinding process reaches the bottom, the electrodes provided on the substrate and the surface of the substrate itself. It does not spoil the property. In the present invention, it is necessary to select the Mohs hardness (E ₁ ) of the inorganic particles that are abrasives so as to satisfy the following formula (5), preferably the following formula (13), and more preferably the following formula (14). . However, E ₂ is the lower Mohs hardness of the substrate or the electrode.

E ₂ −3.5 ≦ E ₁ ≦ E ₂ −0.5 (5) E ₂ −3 ≦ E ₁ ≦ E ₂ −1 (13) E ₂ −2.5 ≦ E ₁ ≦ E ₂ − 1.5 (14)

That is, when the Mohs hardness of the inorganic particle powder as the abrasive exceeds E ₂ -0.5, the substrate made of glass or the like at the bottom of the workpiece is damaged regardless of the particle size. give. Further, when the Mohs hardness of the inorganic particle powder as the abrasive is smaller than E ₂ -3.5, there is little risk of damaging the substrate made of glass or the like at the bottom of the workpiece, but the inorganic particle powder as the abrasive is small. The grinding power of the body is significantly reduced. That is, with the above-mentioned structure, even if the crushing of the abrasive progresses, the processing speed can be increased without deteriorating the surface properties of the electrode and the substrate provided on the substrate at the bottom of the workpiece. Usually, the substrate made of glass or the like at the bottom of the workpiece has a Mohs hardness of 5 or more, and magnesium oxide generally used as an electrode has a Mohs hardness of 6 to 7. Therefore, in this case, since E ₂ is 5, the Mohs hardness (E
₁ ) is 1.5 ≦ E ₁ ≦ 4.5, preferably 2 ≦ E ₁ ≦
4, more preferably 2.5 ≦ E ₁ ≦ 3.5.

The specific gravity (F) of the inorganic particles as the abrasive used in the present invention is preferably selected so as to satisfy the following formula (15), more preferably the following formula (16).

[0029] 1 ≦ F ≦ 6 (15) 2 ≦ F ≦ 5 (16)

That is, when the specific gravity of the inorganic particle powder as the abrasive exceeds 6, the kinetic energy of each particle increases, and the substrate such as glass or the electrode at the bottom of the workpiece tends to be damaged. . Further, if the specific gravity of the inorganic particle powder that is an abrasive is less than 1, the kinetic energy of each particle decreases, and the risk of damaging the substrate or electrode made of glass or the like at the bottom of the workpiece is reduced, The grinding force of certain inorganic particle powder is significantly reduced. That is, with the above configuration, the processing speed can be increased without deteriorating the surface properties of the substrate or electrode made of glass or the like at the bottom of the workpiece.

The abrasive used in the present invention may be either natural or synthetic inorganic particle powder, or may be a mixture thereof. As the natural inorganic particle powder, limestone, barite, gypsum, anhydrite, potassium alum, alumite, strontianite, titanium iron mineral, sulphate earth, celestite, graphite, cryolite, fluorite, Examples thereof include gibbsite, dolomite, rhodochrystalite, brucite and the like, and these may be used alone or in combination of two or more, and among them, limestone, barite and gypsum are preferable. Further, as the synthetic inorganic particle powder, calcium carbonate, sulfate, fluoride; barium sulfate, chloride; aluminum sulfate, hydroxide; strontium carbonate, sulfate, nitrate, chloride Examples thereof include titanium oxides, basic magnesium carbonate, magnesium hydroxide, and the like. These may be used alone or in combination of two or more, and among them, calcium carbonate,
Barium sulfate, calcium sulfate and the like are preferable.

Further, when the above-mentioned inorganic particle powder is used as an abrasive, adhesion of abrasive particles to the workpiece may occur. The causes of these phenomena are:
Adhesion due to water, static electricity, or intermolecular attraction is considered. The adhesion phenomenon caused by these is 0.01 to 5 depending on the substance that imparts hydrophobicity to the inorganic particle powder.
Not only can it be improved by surface treatment by weight%, preferably 0.1 to 4% by weight, but further,
The fluidity of the abrasive itself can also be improved.

The substance used for the surface treatment can be used without particular limitation as long as it imparts hydrophobicity. Specific examples include oleic acid, lauric acid, myristic acid and myristic acid. Fatty acids such as isotridecyl, palmitic acid, behenic acid, stearic acid, isostearic acid; amides and bisamides of the above fatty acids; higher alcohols or branched higher alcohols such as stearyl alcohol; higher fatty acid esters of monohydric alcohols and higher fatty acid esters of polyhydric alcohols. Fatty acid ester lubricants such as very long chain esters of Monta wax type or partial hydrolysates thereof; barium stearate, calcium stearate, aluminum stearate, zinc stearate, magnesium stearate or their composites Metal soap-based lubricants and the like; C ₁₆ or liquid paraffin, micro Chris Tan wax, natural paraffin, synthetic paraffin, polyolefin wax and their partial oxide, fluoride, aliphatic, such as chlorides hydrocarbon lubricant; silicone oil, Soybean oil, coconut oil,
Oil agents such as palm kernel oil, linseed oil, rapeseed oil, cottonseed oil, tung oil, castor oil, beef tallow, squalane, lanolin and hydrogenated oil; carboxylates such as N-acyl amino acid salts, alkyl ether carboxylates and acylated peptides Sulfonates such as alkyl sulfonates, alkylbenzene and alkylnaphthalene sulfonates, sulfone succinates, α-olefin sulfonates, N-acyl sulfonates; sulfated oils, alkyl sulfates, alkyl ether sulfates , Sulfuric acid ester salts such as alkyl allyl ether sulfates and alkyl amide sulfates; phosphoric acid ester salts such as alkyl phosphates, alkyl ether phosphates, alkyl allyl ether phosphates; aliphatic amine salts, aliphatic quaternary Ammonium salt, benzalkonium salt, benzethonium chloride, pyridinium salt, Cationic surfactants such as midazolinium salts; amphoteric surfactants such as carboxybetaine type, aminocarboxylic acid salts, imidazolinium betaine, lecithin; polyoxyethylene alkyl ethers, polyoxyethylene secondary alcohol ethers, polyoxyethylene alkyls Phenyl ether, polyoxyethylene sterol ether, polyoxyethylene lanolin derivative, ethylene oxide derivative of alkylphenol formalin condensate, polyoxyethylene polyoxypropylene block polymer, polyoxyethylene polyoxypropylene alkyl ether, polyoxyethylene glycerin fatty acid ester, poly Oxyethylene castor oil and hydrogenated castor oil, polyoxyethylene sorbitan fatty acid ester, polyoxyethylene sorbitol fat Acid ester, polyethylene glycol fatty acid ester, fatty acid monoglyceride, polyglycerin fatty acid ester, polyglycerin fatty acid ester, sorbitan fatty acid ester,
Fatty acid alkanolamide, polyoxyethylene fatty acid ester amide, polyoxyethylene alkylamine,
Examples thereof include nonionic surfactants such as alkylamine oxide; fluorine-based surfactants; reactive surfactants such as polyoxyethylene allyl glycidyl nonyl phenyl ether; and the like, which may be used alone or in combination of two or more kinds. Of these, inexpensive stearic acid is preferable.

Furthermore, 1/10 of the average particle diameter of the inorganic particle powder is added to the inorganic particle powder as the abrasive as a fluidity aid.
It consists of the following average particle sizes and has a BET specific surface area of 10-8.
By adding and mixing fine powder of 00 m ² / g,
It is possible to improve the fluidity in the blast machine and the dispersibility of the inorganic particle powder at the time of blasting, and in addition, it is possible to reduce the residual property of the inorganic particle powder on the workpiece at the end of the blasting. . The amount of the fluidity aid added is preferably in the range of 0.01 to 5% by weight, more preferably 0.1 to 4% by weight, based on the inorganic particle powder. Specific examples of the fluidity aid are talc, silicic acid anhydride, bentonite, kaolin, magnesium oxide, magnesium carbonate, magnesium silicate, zinc oxide, magnesium hydroxide, colloidal silica, diatomaceous earth, magnesium stearate, dissolved silica powder, and fumes. Examples thereof include ultrafine powders of dosilica, silica, corn starch, starch, calcium silicate, etc. These may be used alone or in combination of two or more kinds. Of these, silicic acid anhydride and colloidal silica are preferable.

As described above, the features of the present invention are, for example,
In the blasting process in the partition wall forming step of the PDP panel, a material having a Mohs hardness lower than that of the substrate surface made of glass or the like at the bottom of the workpiece and the electrode provided on the substrate is selected as the material of the inorganic particle powder as the abrasive. Then, by controlling the maximum particle diameter, the average particle diameter, and the particle shape in accordance with the target processing pitch, it is an object of the present invention to provide a partition wall forming method with high polishing efficiency and processing accuracy.

A method of forming partition walls on the rear substrate portion of the PDP according to the present invention will be described. A low-melting glass layer having a blasting property and having a thickness of 10 to 1000 μm is formed on a substrate such as glass provided with electrodes. Further, a masking tape is applied or printed in stripes on the low melting point glass layer, and an abrasive is sprayed from above to form a portion of the low melting point glass layer not protected by the masking tape at a pitch of 50 to 800 μm and a depth of 10. A fine groove is grinded in the range of about 1000 μm to reach the surface of the substrate made of glass or the like at the bottom of the workpiece to form a partition wall.

It is expected that the PDP will be further refined in the future, and the processing pitch will be reduced accordingly. However, by using the method of the present invention, the PDP can be formed on the substrate made of glass or the like at the bottom of the object to be processed. It is possible to provide a partition wall forming method that is more accurate and highly efficient than a method that uses a spherical and high-hardness abrasive material without impairing the surface properties of the electrodes and the substrate provided. The abrasive used in the present invention can be used in combination with a spherical abrasive having high hardness, if necessary.

[0038]

EXAMPLES The present invention will be described in more detail below with reference to production examples and examples, but the scope of the present invention is not limited thereto.

Production Example 1 White sugar crystalline limestone was crushed and classified to produce heavy calcium carbonate having a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 74 μm, an average particle diameter of 25 μm, and an index of 63% indicating an indefinite shape. Then
Stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.)
1.3% by weight relative to 100 parts by weight of heavy calcium carbonate particle powder, and as a fluidity aid, the particle size range is 0.005 to 0.05 μm, and the BET specific surface area is 100 to 150 m ^2. / G of fumed silica (Reorosil CP-102; manufactured by Tokuyama) was added in an amount of 2% by weight based on 100 parts by weight of the heavy calcium carbonate particle powder, and the mixture was heated and mixed by a Henschel mixer for surface treatment.

Production Example 2 Dense limestone was roasted, digested and carbonized to obtain a Mohs hardness of 3,
Specific gravity 2.7, maximum particle size 74μm, average particle size 25μ
m, whisker-like calcium carbonate showing an indefinite shape of 32% was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added to the whisker-like calcium carbonate particle powder in an amount of 1.3% by weight. In addition, as a fluidity aid, the particle size range is 0.005-0.05μ.
m, BET specific surface area of 100 to 150 m ² / g fumed silica (Reorosil CP-102; manufactured by Tokuyama)
2% by weight was added to 100 parts by weight of the whisker-like calcium carbonate particle powder, and the mixture was heated and mixed with a Henschel mixer for surface treatment.

Production Example 3 A dense limestone was roasted, digested and carbonated to produce a vaterite-like calcium carbonate having an index of 95%, which was used in Example 1. By mixing with calcium carbonate, calcium carbonate having a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 88 μm, an average particle diameter of 30 μm, and an index of 86% showing an irregular shape is produced, and stearic acid (TST: Miyoshi Oil & Fat Co., Ltd. (Manufactured by the company) is added in an amount of 1.3% by weight with respect to 100 parts by weight of calcium carbonate particle powder, and a particle size range of 0.005 is added as a fluidity aid.
0.05 μm, BET specific surface area 100 to 150 m ² /
2 g by weight of fumed silica (g) (Reorosil CP-102; manufactured by Tokuyama Corp.) was added to 100 parts by weight of the calcium carbonate particle powder, and the mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 4 A dense limestone was roasted, digested and carbonated to produce an amorphous 95% vaterite-like calcium carbonate, which was used in Example 1 with an amorphous 63%. By mixing with calcium carbonate, a calcium carbonate having a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 88 μm, an average particle diameter of 29 μm, and an index of 73% showing an irregular shape is produced, and stearic acid (TST: Miyoshi Oil & Fat Co., Ltd. (Manufactured by the company) is added in an amount of 1.3% by weight with respect to 100 parts by weight of calcium carbonate particle powder, and a particle size range of 0.005 is added as a fluidity aid.
0.05 μm, BET specific surface area 100 to 150 m ² /
2 g by weight of fumed silica (g) (Reorosil CP-102; manufactured by Tokuyama Corp.) was added to 100 parts by weight of the calcium carbonate particle powder, and the mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 5 Whisker-like calcium carbonate having an index of 32% showing an amorphous form was produced by roasting, digesting and carbonating dense limestone, and used for Example 1, and having an index of 63% showing an amorphous form. By mixing with calcium carbonate, calcium carbonate having a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 88 μm, an average particle diameter of 26 μm, and an index of 45% showing an indefinite shape is produced, and stearic acid TST (Miyoshi Oil & Fat Co., Ltd. 1.3% by weight relative to 100 parts by weight of calcium carbonate particle powder, and a particle size range of 0.005 to 0.
2 wt% of fumed silica having a BET specific surface area of 100 to 150 m ² / g (Rheoroseal CP-102; manufactured by Tokuyama Corporation) was added in an amount of 2 wt% with respect to 100 parts by weight of calcium carbonate particle powder, and mixed by heating with a Henschel mixer. Surface treatment was performed.

Production Example 6 White sugar crystalline limestone was crushed and classified to have a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 62.23 μm, and an average particle diameter of 18 μ.
m, a heavy calcium carbonate having an index of 59% showing an irregular shape was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added thereto in an amount of 1.3% by weight based on 100 parts by weight of the heavy calcium carbonate particle powder. The mixture was added, heated and mixed with a Henschel mixer, and surface-treated.

Production Example 7 Barite produced by Osaki Industry Co., Ltd. was classified to have a Mohs hardness of 3.
5, specific gravity 4.3, maximum particle size 31.11μm, average particle size 11μm, 62% index barite showing an amorphous form,
As the fluidity aid, the range of particle diameter is 0.005
0.05 μm, BET specific surface area 100 to 150 m ² /
2 g by weight of fumed silica (Rheoroseal CP-102; manufactured by Tokuyama Corp.) of 2 g was added to 100 parts by weight of barite particle powder, and heated and mixed with a Henschel mixer.

Production Example 8 Barite produced by Osaki Industry Co., Ltd. was classified to have a Mohs hardness of 3.
5, specific gravity 4.3, maximum particle size 44 μm, average particle size 20
μm, an index 61% barite showing an amorphous form was produced.

Production Example 9 Barite manufactured by Osaki Industry Co., Ltd. was classified to have a Mohs hardness of 3.
5, specific gravity 4.3, maximum particle size 13.08 μm, average particle size 7 μm, index 61% barite showing an indefinite shape is manufactured, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) is barite. 1.3% by weight was added to 100 parts by weight of the particle powder, and the particle size range was 0.00 as a fluidity aid.
5 ~ 0.05μm, BET specific surface area 100 ~ 150m
² / g fumed silica (Reorosil CP-10
2; manufactured by Tokuyama Co., Ltd.) in an amount of 2% by weight based on 100 parts by weight of barite particle powder, and mixed by heating with a Henschel mixer.
Surface treatment was performed.

Production Example 10 Barite manufactured by Osaki Industry Co., Ltd. was classified to obtain a Mohs hardness of 3.
5, specific gravity 4.3, maximum particle size 37 μm, average particle size 15
μm, an index 59% barite showing an indefinite shape was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added thereto in an amount of 1.3% by weight based on 100 parts by weight of the barite particle powder.
Further, as a fluidity aid, the particle size range is 0.005
0.05 μm, BET specific surface area 100 to 150 m ² /
2 wt% of fumed silica (g) (Rheoroseal CP-102; manufactured by Tokuyama Corporation) was added to 100 parts by weight of barite particle powder, and the mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 11 Gypsum manufactured by Noritake Co., Ltd. was classified to obtain a Mohs hardness of 3.5, a specific gravity of 3.0, a maximum particle size of 62.23 μm, an average particle size of 22 μm, an index of 67% indicating an indefinite shape, and stearic acid (TST). : Manufactured by Miyoshi Yushi Co., Ltd.) as gypsum particle powder 1
1.3 wt% was added to 100 parts by weight, and as a fluidity aid, the particle size range was 0.005-0.05μ.
m, BET specific surface area of 100 to 150 m ² / g fumed silica (Reorosil CP-102; manufactured by Tokuyama)
2% by weight to 100 parts by weight of gypsum particle powder,
The mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 12 Gypsum manufactured by Noritake Co., Ltd. was classified to obtain a Mohs hardness of 2, a specific gravity of 2.3, a maximum particle diameter of 104.65 μm, an average particle diameter of 74 μm, an index of 65% indicating an indefinite shape, and stearic acid (TST: Miyoshi). Oil and fat manufactured by Gypsum Particle Powder 10
1.3% by weight relative to 0 parts by weight, and as a fluidity aid, a particle size range of 0.005 to 0.05 μm,
2 wt% of fumed silica having a BET specific surface area of 100 to 150 m ² / g (Reorosil CP-102; manufactured by Tokuyama) was added to 100 parts by weight of the gypsum particle powder, and the mixture was heated and mixed with a Henschel mixer for surface treatment. went.

Production Example 13 White sugar crystalline limestone was crushed and classified to have a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 418.6 μm, and an average particle diameter of 52 μ.
m, heavy calcium carbonate having an index of 58% showing an indefinite form was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added thereto in an amount of 1.3% by weight based on 100 parts by weight of the heavy calcium carbonate particle powder. In addition, a fumed silica (Rheoroseal CP-102; manufactured by Tokuyama) having a particle diameter range of 0.005 to 0.05 μm and a BET specific surface area of 100 to 150 m ² / g is added as a fluidity aid. 2% by weight was added to 100 parts by weight of calcium particle powder, and the mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 14 White sugar crystalline limestone was crushed and classified to have a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle size of 4.62 μm, and an average particle size of 1.5 μm.
m, heavy calcium carbonate having an index of 64% showing an indefinite shape was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added thereto in an amount of 1.3% by weight based on 100 parts by weight of the heavy calcium carbonate particle powder. In addition, a fumed silica (Rheoroseal CP-102; manufactured by Tokuyama) having a particle diameter range of 0.005 to 0.05 μm and a BET specific surface area of 100 to 150 m ² / g is added as a fluidity aid. 2% by weight was added to 100 parts by weight of calcium particle powder, and the mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 15 White sugar crystalline limestone was wet pulverized, dried and classified to obtain a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle size of 11 μm and an average particle size of 1.
μm, a heavy calcium carbonate having an index of 65% showing an irregular shape was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added thereto in an amount of 1.3% by weight based on 100 parts by weight of the heavy calcium carbonate particle powder. And as a fluidity aid,
Fumed silica having a particle size range of 0.005 to 0.05 μm and a BET specific surface area of 100 to 150 m ² / g (Rheoroseal CP-102; manufactured by Tokuyama Corporation) is used with respect to 100 parts by weight of heavy calcium carbonate particle powder. 2% by weight,
The mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 16 White sugar crystalline limestone was crushed and classified to have a Mohs hardness of 3, a specific gravity of 2.7, a maximum particle diameter of 104.65 μm and an average particle diameter of 79.
μm, a heavy calcium carbonate having an index of 59% showing an irregular shape was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added thereto in an amount of 1.3% by weight based on 100 parts by weight of the heavy calcium carbonate particle powder. And as a fluidity aid,
Fumed silica having a particle size range of 0.005 to 0.05 μm and a BET specific surface area of 100 to 150 m ² / g (Rheoroseal CP-102; manufactured by Tokuyama Corporation) is used with respect to 100 parts by weight of heavy calcium carbonate particle powder. 2% by weight,
The mixture was heated and mixed with a Henschel mixer to perform surface treatment.

Production Example 17 Dense limestone was roasted, digested and carbonated to obtain a Mohs hardness of 3,
Specific gravity 2.7, maximum particle size 52.33 μm, average particle size 2
μm, whisker-like calcium carbonate having an amorphous shape and an index of 22% was produced, and stearic acid (TST: manufactured by Miyoshi Yushi Co., Ltd.) was added to the whisker-like calcium carbonate particle powder in an amount of 1.3% by weight. As a fluidity aid, the particle size range is 0.005 to 0.05.
2% by weight of fumed silica having a particle size of 100 μm and a BET specific surface area of 100 to 150 m ² / g (Rheoroseal CP-102; manufactured by Tokuyama Corporation) was added to 100 parts by weight of whisker-like calcium carbonate particle powder, and heated and mixed with a Henschel mixer. Then, the surface treatment was performed.

Production Example 18 Dense limestone was roasted, digested and carbonated to obtain a Mohs hardness of 3,
Specific gravity 2.7, maximum particle size 5.5 μm, average particle size 2 μ
m, vaterite-like calcium carbonate having an index of 96% showing an indefinite shape, and stearic acid TST (manufactured by Miyoshi Yushi Co., Ltd.) were added to the vaterite-like calcium carbonate particle powder 1
1.3 wt% was added to 100 parts by weight, and as a fluidity aid, the particle size range was 0.005-0.05μ.
m, BET specific surface area of 100 to 150 m ² / g fumed silica (Reorosil CP-102; manufactured by Tokuyama)
2% by weight was added to 100 parts by weight of the vaterite-like calcium carbonate particle powder, and the mixture was heated and mixed with a Henschel mixer for surface treatment.

Production Example 19 Talc (SP-50A: manufactured by Fuji Talc Industry Co., Ltd.) was classified to have a Mohs hardness of 1, a specific gravity of 2.7 and a maximum particle diameter of 12.
Talc with an average particle size of 4.45 μm and an average particle size of 25 μm and an index of 33% indicating an indefinite shape was produced, and stearic acid (TS
(T: manufactured by Miyoshi Yushi Co., Ltd.) was added at 1.3% by weight to 100 parts by weight of the talc particle powder as an abrasive, and the mixture was heated and mixed with a Henschel mixer for surface treatment.

Production Example 20 Talc (SP-50A: manufactured by Fuji Talc Industry Co., Ltd.) was classified to have a Mohs hardness of 1, a specific gravity of 2.7 and a maximum particle diameter of 74.
00 μm, average particle diameter 19 μm, index 45 indicating irregular shape
% Talc was produced, and a particle size range of 0.005 to 0.05 μm and a BET specific surface area of 1 were used as a fluidity aid.
2 wt% of 100 to 100 parts by weight of talc particle powder which is an abrasive with a fumed silica of 0.000 to 150 m ² / g (Rheoroseal CP-102: manufactured by Tokuyama Corporation) as a fluidity aid.
The mixture was added and heated and mixed with a Henschel mixer.

Production Example 21 Mohs hardness 6.5, average particle diameter 25 μm, specific gravity 2.5,
Glass beads manufactured by Union Co., Ltd. having a maximum particle diameter of 52.33 μm and an index of 98% indicating an irregular shape were used.

Production Example 22 Spherical alumina manufactured by Showa Denko KK having a Mohs hardness of 9, a specific gravity of 3.2, an average particle diameter of 25 μm, a maximum particle diameter of 37 μm and an index of 97% indicating an irregular shape was used.

Examples 1 to 12 and Comparative Examples 1 to 10 Using the abrasives obtained in the above Production Examples 1 to 22, partition walls were formed on the back substrate portion of the PDP. As the object to be polished, a PDP back panel for an experiment was used according to the following method for forming partition walls, and a partition wall formation test was performed by adjusting the spray pressure of the blast machine and the spray weight of the polishing agent per unit time, The surface texture and partition shape of the glass substrate at the bottom of the workpiece were observed.

Partition wall forming method: (A) Production of experimental PDP back panel: Electrodes are printed and formed in stripes at intervals of 150 μm on a substrate made of soda glass (100 × 100 mm, thickness 3 mm). Magnesium), apply a low melting point glass paste on it with a coater and dry it, then apply a low melting point glass paste with blast resistance to the surface, laminate a photosensitive material, then expose and develop the low melting point glass paste A pattern was formed on top.

(B) Blasting: Using the experimental PDP rear panel manufactured as described above,
Grinding experiments were performed using the various abrasives of Production Examples 1 to 22 above. The setting conditions of the blast machine as the processing conditions are as follows, and the partition forming time of various abrasives was measured to measure the polishing accuracy and efficiency. Injection nozzle diameter: 9 mm Abrasive material injection pressure: 2.5 kg / cm ² Abrasive material injection amount: 10 g / min Distance to panel: 10 cm Mohs hardness of magnesium oxide (MgO): 6 to 7 Mohs hardness of soda glass: 5

Table 1 shows the composition of the inorganic particle powder as the abrasive and the result of the partition formation test. The properties and polishing accuracy of the abrasive particles shown in Table 1 were measured and evaluated by the following methods.

The maximum particle size of the inorganic particle powder that is an abrasive,
The average particle size is Nikkiso Co., Ltd. Microtrac FR
It was measured using A.

As an index indicating an irregular shape, an average value of values measured by randomly selecting 20 points of particles shown in an electron micrograph was calculated.

Regarding the variation of the partition wall value, the standard deviation was calculated based on a value measured by randomly selecting 20 widths between adjacent ribs formed after polishing.

The polishing efficiency is shown by a value obtained by the following formula with reference to the time required in Example 1 in forming the partition wall of the PDP back panel (this is referred to as G). Polishing efficiency = (G / (polishing time)) × 100

The surface texture was observed by using an electron microscope.
The scratches on the surface of the back panel of the PDP after polishing, the processed shapes of the grooves and the corners thereof were visually observed and evaluated according to the following criteria. Good: No damage, and the processed shape at the corner of the groove is not rounded. Somewhat bad: There are some scratches and / or the processed shape at the corners of the groove is slightly rounded. Bad: There are many scratches and / or the processed shape of the corner of the groove is rounded.

[0070]

[Table 1]

(Note) 10 ≦ A ≦ 0.8C That is (10 ≦ A ≦ 120) 0.03C ≦ B ≦ 0.5C That is (4.5 ≦ B ≦ 75) 50 ≦ C ≦ 800 30 ≦ D ≦ 95 E ₂ −3.5 ≦ E ₁ ≦ E ₂ −0.5 That is (1.5 ≦ E ₂ ≦ 4.5)

The PDP partition wall-forming abrasive has a good surface property at the bottom of the work piece, no damage in the groove corners, and a good partition wall value related to the processing accuracy. At the same time, it is required that the variation is 30 μm or less, preferably 20 μm or less, and the polishing efficiency is 50% or more, preferably 60% or more. As is clear from the results of Table 1, the partition wall forming method of the present invention represented by Examples satisfies these numerical values, does not impair the surface quality of the bottom of the work piece, and has excellent processing accuracy and polishing efficiency. Is.

[0073]

INDUSTRIAL APPLICABILITY As described above, the partition wall forming method of the present invention does not impair the surface properties of the workpiece, and has a higher processing efficiency and processing than the conventional partition wall forming method using the spherical high hardness abrasive. It has excellent accuracy.

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tadashi Sone 5-24 Matsue 5-chome, Edogawa-ku, Tokyo Inside Fuji Manufacturing Co., Ltd. (56) Reference JP 11-133889 (JP, A) JP 10-69851 (JP, A) JP-A 9-274852 (JP, A) JP-A 11-138441 (JP, A) JP-A 9-1009026 (JP, A) JP-A 5-266791 (JP , A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B24C 11/00 B24C 1/04 H01J 9/02 H01J 11/02

Claims (4)

(57) [Claims] 1. When blasting a substrate provided with electrodes and a blasting low melting point glass layer provided on the substrate to form partition walls at predetermined intervals, the following formulas (1), (2) ), (3), (4) and (5) are all satisfied, the method of forming partition walls is characterized by using an abrasive made of inorganic particle powder. 10 ≦ A ≦ 0.8C (1) 0.03C ≦ B ≦ 0.5C (2) 50 ≦ C ≦ 800 (3) 30 ≦ D ≦ 95 (4) E ₂ −3.5 ≦ E ₁ ≦ E ₂ -0.5 (5) where A: maximum particle size of abrasive (μm) B: average particle size of abrasive (μm) C: partition width d ₁ + grinding groove width d ₂ (μm) D at processing pitch : An index (%) indicating an irregular shape of a particle, showing an area ratio of a projected area of a particle to a circumscribed circle. E ₁ : Mohs hardness of abrasive material E ₂ : Mohs hardness of substrate or electrode, whichever is lower 2. The specific gravity F of the inorganic particle powder is represented by the following formula (15).
The method of forming a partition wall according to claim 1, wherein 1 ≦ F ≦ 6 (15) 3. The method for forming partition walls according to claim 1, wherein the inorganic particle powder is surface-treated with 0.01 to 5% by weight of a substance that imparts hydrophobicity. 4. A fluidity aid of 0.0 to the inorganic particle powder.
The method for forming partition walls according to claim 1, wherein 1 to 5% by weight is added.