JP3405515B2 - Surface texture measuring machine - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detector equipped with a stylus (also called a stylus) for measuring surface texture represented by surface roughness, and a detector for advancing / retreating the detector along the measuring surface. The present invention relates to a surface texture measuring machine including a drive unit, and more particularly to a surface texture measuring machine that has high straightness and repeatability when a detector moves back and forth and is low in cost.

[0002]

2. Description of the Related Art A stylus for measuring roughness is involved in the surface of an object to be measured, and a detector equipped with the stylus is moved forward and backward along the surface to be measured, in the surface roughness direction of the stylus. 2. Description of the Related Art A surface roughness measuring machine is widely used, which detects a displacement, converts it into an electric signal, processes the electric signal in a predetermined manner, and measures the surface roughness.

Various drive units have been proposed for moving the detector of the surface roughness measuring device back and forth along the measuring surface.

For example, Japanese Examined Patent Publication No. 4-60523 discloses in FIG.
As shown in FIG. 4, a sliding shaft 34 held by a bearing 33 arranged on the frame 32 of the drive unit 30 and sliding in the advancing / retreating direction (arrow A direction) of the detector 10, and a moving block 36 on the sliding shaft 34. And a drive side connector 40 attached via a leaf spring 38, a feed piece 44 fixed to the slide shaft 34 by a connecting portion 42 for moving the slide shaft 34 forward and backward in the direction of arrow A, and the feed piece 44. A feed screw 46 that engages with 44, a speed reducer 50 connected to the feed screw 46 via a coupling 48, and a motor 52 for rotationally driving the speed reducer 50 are described. There is.

In the figure, reference numeral 14 is a detector-side connector pin, which is attached to the rear end (right end in the figure) of the case 12 of the detector 10, and which engages with the drive-side connector 40.
Is a stylus arm that swings around a fulcrum (20) in the case 12, in which a stylus 16 that moves up and down following the measurement surface is provided at the tip (the left end in the figure). A substantially L-shaped leaf spring 22, which constitutes a fulcrum of the stylus arm 18, is arranged near the rear end of the stylus arm 18, and the stylus lever 1
An inductance type displacement detector for detecting the vertical movement of the rear end of 8, a skid for absorbing fine irregularities in the vicinity of the stylus 16 and a stable measurement value, a reference numeral 26 , A nose for protecting the stylus 16 and the stylus arm 18.

[0006]

[Problems to be Solved by the Invention]
No. 23 is proposed for the purpose of providing a compact mount type surface roughness measuring machine.
Since 4 itself is configured to advance and retreat in the frame 32 of the drive unit 30 in the direction of arrow A, the length of the sliding shaft 34 cannot be increased so much, and the movement stroke of the detector 10 is limited. Further, the sliding shaft 34, which is a moving portion, is connected to the detector 1 via the moving block 36, the leaf spring 38, the connector 40, and the like.
Since the bearing 33 is connected to 0, there is a problem that the bearing 33 is easily affected by an external force, and it is difficult to maintain stable and highly accurate straightness.

[0007] On the other hand, the applicant of the present invention is disclosed in Japanese Patent Laid-Open No. 61-15590.
1 and 155701, as shown in FIG.
A guide shaft 60 fixed in parallel to the advancing / retreating direction of the detector 10 (left-right direction in the drawing) is provided on a frame (not shown) of the drive unit, and slides on the guide shaft 60
It is proposed to mount the detector 10 on a feed nut 45 which is moved by a feed screw 46 which is rotated by a motor 52.

In the drawing, 16 is a stylus, 62 is a slide rod fixed to the feed nut 45, 64 is a vertical guide member vertically connected to the tip of the slide rod 62, and 66 is the vertical guide. A sliding member 68 slidably mounted on the member 64 is a holding member 68 slidably mounted on the sliding member 66 for holding the detector 10, and 70 is a feed nut 45. The switch pins 72, 74 fixed to the
These are front end / rear end limit switches that are turned on at the forward limit position (referred to as the front end) or the backward limit position (referred to as the rear end) of the detector 10.

However, this Japanese Patent Laid-Open No. 61-1559
01 and the stylus type measuring instrument proposed in 155701, the span of the feed nut 45 with respect to the guide shaft 60 cannot be sufficiently taken, and the feed nut 45 is not only susceptible to external force, but also due to component error. There was a large amount of backlash, and it was not easy to maintain a stable and highly accurate straightness.

[0010] The applicant of the present invention, in fact fair 4-24408,
As shown in FIG. 16 of the main configuration, the frame 3 of the drive unit 30
2 is provided with a guide shaft 60 fixed in parallel with the advancing / retreating direction of the detector 10 (left-right direction in the drawing), slides on the guide shaft 60, and is moved by a feed screw 46 rotated by a motor 52. A pair of movable pieces 80, 8
It is also proposed to attach the detector 10 to one of the two (80 in the figure) via a fulcrum spring 86.

In the figure, 84 is both movable pieces 80, 84.
Is a pair of tension springs for urging the two toward each other to eliminate backlash.

However, this fairness 4-24408
Also in the surface roughness measuring device proposed in JP-A-61-1
There were the same problems as 55901 and 155701.

On the other hand, in Japanese Patent Laid-Open Publication No. 8-503331, a slide rod to which a detector is attached is positioned by pressing a L-shaped slide surface in the drive section with a leaf spring from an oblique direction so that it is located near the front end in the drive section. A drive belt is stretched between pulleys arranged near the rear end, the slide rod is fixed to a part of the drive belt, and the rotation of the pulley advances and retracts the detector attached to the tip of the slide rod. Although it is described, it is difficult to maintain a stable and highly accurate straightness because of the large backlash.

Further, in any of the above-mentioned prior arts,
Since the lead wire is used for the wiring to the detector 10 inside the driving unit 30, an unreasonable bending portion is apt to occur partially depending on the type of wire material and the wiring state of the wiring, and the connector and the sliding contact with the detector. A locally unstable load or the like is locally applied to a driving portion of a member or the like, which adversely affects straightness and repeatability.

The present invention has been made to solve the above-mentioned conventional problems. The sliding member is less likely to be affected by an external force,
The first object is to reduce rattling due to component errors and to realize stable and highly accurate straightness at low cost.

A second object of the present invention is to prevent the detector, the connector and the sliding portion from being subjected to an unstable load, and to prevent the straightness and the repeatability from being adversely affected.

[0017]

The present invention provides a surface texture measuring machine including a detector provided with a stylus for measuring surface texture and a drive unit for moving the detector forward and backward along the measurement surface. the frame of the drive unit, and the columnar guide a plurality of which are fixed parallel to a detector moving direction, slides columnar guide above, is substantially O-shape has a length to the detector moving direction, at least front and rear end 2 At least one is interpolation of the columnar guide at a location
A sliding member adapted to pass through, and a driving means for moving the sliding member forward and backward along the columnar guide,
A detector is attached to the sliding member and the sliding member
The remaining columnar guide does not insert the
That way, is obtained by solving the first problem.

[0018]

[0019]

Further, the detector is detachably attached to the drive unit by a connector, and the connector on the drive unit side is fixed to the sliding member.

The second problem is solved by using a flexible printed circuit board in at least a portion of the wiring connecting the driving unit and the detector, which portion is deformed by the movement of the detector.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention applied to a stationary portable surface roughness measuring machine will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing the structure of the main part of this embodiment, FIG. 2 is a side view seen from the direction of arrow II in FIG. 1, and FIG.
Is a vertical cross-sectional view of the drive unit to which the detector is attached as seen from the front, FIG. 4 is a vertical cross-sectional view of the same seen from above, and FIG.
Similarly, a vertical sectional view seen from the bottom, FIG. 6 is a lateral sectional view taken along line VI-VI of FIG. 4, FIG. 7 is a lateral sectional view taken along line VII-VII, and FIG. 8 is also taken along line VIII-VIII. FIG.

The drive unit 100 of the present embodiment has a main shaft (columnar guide) 1 fixed to a frame 102 thereof.
04 and a sub shaft (columnar guide) 106, and a substantially O-shape that slides on the shafts 104, 106 and is long in the detector advancing / retracting direction (direction of arrow A), and the main shaft 104 is provided at two front and rear ends thereof. A slide block (sliding member) 108 adapted to be inserted, an interlocking rod 110 and a feed nut 112 for advancing and retracting the slide block 108 along the shafts 104, 106,
A feed screw 114 screwed with the feed nut 112 and the feed screw 114 via a flexible coupling 116.
And a gear motor 118 for rotating the.

As shown in detail in FIG. 2, a detector mount 108A is formed at the rear end of the slide block 108, and a connector housing 150 for accommodating the detector 200 is provided below the detector mount 108A. A leaf spring 152 for applying a skid pressure attached to the end is fixed by a bolt 122 together with a shaft support plate 120 for pressing the lower surface of the sub shaft 106. Further, a leaf spring 126 having a sliding plate 124 fixed to press the upper side of the sub shaft 106 is fixed to the upper side of the detector mounting base 108A.
Are fixed by bolts 128.

In the figure, 101 is the case of the drive unit,
Reference numeral 130 is a switch pin set up on the slide block 108, and 132 and 134 are the switch pins 130.
A front end / rear end switch 140 for engaging or disengaging the gear motor 118 to stop or reverse the gear motor 118 is a mountain-shaped bulge 150A formed outside the connector housing 150 in the vicinity of the backward limit position of the detector 200. Engage with
The detector lift plate 154 fixed to the frame 102 with bolts 142 for raising the tip of the detector 200 and preventing the stylus 202 and the skid 204 from protruding downward from the bottom surface of the driving unit 100 is the connector. A drive side connector accommodated in the housing 150, 206 is a detector side connector pin inserted into the drive side connector 154, 208 is a detector connector housing, and 210 is a nose.

The driving unit 100 is shown in FIGS.
As shown in FIG. 2, it can be accommodated in the electrical component section 300.
An electric component side connector 136 for electrically connecting to the electric component part 300 is provided at the rear end of the drive part 100. The electric component side connector 136 and the drive side connector 15 are provided.
Between the four, via a connector housing 150, a flexible printed circuit board (FPC) 138 having a thickness of, for example, about 0.2 mm and being flexible, is wired.

The flexible printed circuit board 138 is
As shown in FIG. 9, both ends of the drive unit 100 are soldered to the connector housing 150 and the connector 13 on the electrical component side.
6 and the middle portion is fixed to the slide block 108 by a screw 139 and accommodated in a U-shaped slack, and absorbs a change in wiring length due to movement of the connector 154, Tension is not applied even if the housing 150 (detector 200) moves.

The electric component section 300 is shown in FIG. 10 (front view),
As shown in FIG. 11 (plan view), FIG. 12 (bottom view), and FIG. 13 (block diagram), the detector housed in the drive unit 100 via the cable 302 connected to the electrical component side connector 136. The signal processing circuit 304 for processing the signal given from the signal 200, the measurement circuit 306 for obtaining the surface roughness corresponding to various parameters based on the signal from the signal processing circuit 304, and the measurement circuit 306 A digital display 308 for displaying measured values and the cable 30
Drive circuit 310 for driving the gear motor 118 in the drive unit 100 via the drive circuit 310, the drive circuit 310, and the measurement circuit 30.
6 and the control circuit 312 for controlling the digital display 308
And a power supply circuit 314 for supplying electric power to each of these circuits.

The solid line in the figure indicates the detector 20 at the time of measurement.
The tip position of 0 and the broken line indicate the tip position of the detector 200 in the state of being retracted in the electrical component unit 300.

In the figure, 320 is a power switch and 32
Reference numeral 2 is a start switch and 324 is a parameter selection switch.

In the measurement, depending on the object to be measured, FIG.
0 to 12, the drive unit 100 is connected to the electrical component unit 300.
It is selected whether it is used in the state of being housed in the device or the drive unit 100 is separated from the electrical component unit 300 and used alone.
For example, when measuring the inner surface of a small hole or the like, the electrical component 3
00 is an obstacle, so remove the drive unit 100 and measure,
In other situations, it can be used as a unit.

Specifically, the stylus 202 of the detector 200 is brought into contact with the measurement surface, the power switch 320 is turned on, and the start switch 322 is pushed. Then, the control circuit 312
Causes the gear motor 118 to rotate through the drive circuit 310. With the rotation of the gear motor 118, the feed screw 114
When is rotated, the slide block 108 moves the feed screw 11
4 is moved in the axial direction, the stylus 202 of the detector 200 is moved.
Moves up and down according to the surface roughness of the measured object.

The displacement of the stylus 202 is converted into an electric signal by the detector 200, and then applied to a signal processing circuit 304 through a cable 302 where it is processed and processed there.
Given to. The measurement circuit 306 is a signal processing circuit 304.
The surface roughness is obtained according to the parameter instructed by the control circuit 312 based on the signal from the, and this is displayed on the digital display 308.

In the present embodiment, the slide block 108 has a substantially O-shape that is long in the detector advancing / retreating direction, and the main shaft 104 is inserted into the front and rear ends of the slide block 108. Therefore, the slide block 108 is lightweight and simple. The configuration can have a long span. In addition to the main shaft 104, a short sub-shaft 106 is provided so that the slide block 1
Since the detector mounting base 108A of No. 08 is pressed, the stability is particularly high. It should be noted that, of the pillar-shaped guide the shape and number
Is not limited to a cylindrical shape or two, but may be a prismatic shape ,
It is also possible to or providing the sub-shaft two or more not long.

In the present embodiment, since the wiring to the drive side connector 154 is the flexible printed circuit board 138, the bent portion is stable and the load applied to the bending is
Therefore, the load on the connector 154 becomes constant, the sliding state is not affected by the fluctuation of the load due to the wiring, and the straightness and repeatability of the detector movement are improved. Moreover, individual wiring is not required, the number of parts is reduced, and wiring work is facilitated. It is also possible to use a normal lead wire as the wiring to the drive unit side connector.

In the above-described embodiment, the present invention is applied to the stationary portable surface roughness measuring machine, but the application target of the present invention is not limited to this. For example, a contour shape measuring machine or a tertiary It is also applicable to the surface roughness measuring probe used in the original coordinate measuring machine.

[0038]

According to the present invention, the columnar guide can be lengthened, and the receiving portion of the sliding portion of the sliding member can be arranged with a long span. Therefore, the sliding member is less likely to be affected by external force, rattling due to subtle component errors is reduced, and stable, highly accurate straightness can be realized at low cost. Therefore, the repeat accuracy can be improved and the accuracy can be stabilized. Further, the number of parts is reduced and the assembly is facilitated, so that the cost can be reduced.

[Brief description of drawings]

FIG. 1 is a perspective view showing a main configuration of an embodiment of the present invention.

FIG. 2 is a side view seen from the direction of arrow II in FIG.

FIG. 3 is a vertical cross-sectional view of a drive unit to which the detector according to the above-described embodiment is attached as seen from the front.

FIG. 4 is a vertical cross-sectional view seen from above.

[Fig. 5] Similarly, a vertical cross-sectional view seen from the bottom.

6 is a cross-sectional view taken along line VI-VI in FIG.

[Fig. 7] Similarly, a cross-sectional view taken along line VII-VII.

FIG. 8 is a transverse sectional view taken along the line VIII-VIII of FIG.

FIG. 9 is a perspective view showing an assembly shape of the flexible printed circuit board used in the above embodiment.

FIG. 10 is a front view showing a state in which the drive unit of the embodiment is housed in an electrical component unit.

FIG. 11 is a plan view of the same.

FIG. 12 is a bottom view of the same.

FIG. 13 is a block diagram showing a configuration of the electric component section.

FIG. 14 is a cross-sectional view showing a configuration of a mounting type surface roughness measuring device proposed in Japanese Patent Publication No. 60523/1990.

FIG. 15 is a front view showing a configuration of a main part of a drive mechanism of a stylus type measuring machine proposed by the applicant in Japanese Patent Laid-Open No. 61-155901.

FIG. 16 is a front view showing the configuration of the main part of the drive mechanism of the surface roughness measuring machine also proposed in Japanese Utility Model Publication No. 4-24408.

[Explanation of symbols]

100 ... Drive unit 102 ... Frame 104 ... Main shaft (columnar guide) 106 ... Sub shaft (columnar guide) 108 ... Slide block (sliding member) 108A ... Detector mount 110 ... Interlocking rod 112 ... Feed nut 114 ... Feed screw 116 ... Flexible coupling 118 ... Gear motor 120 ... Shaft support plate 124 ... Sliding plate 126, 152 ... leaf spring 136 ... Electrical side connector 138 ... Flexible printed circuit board (FPC) 150 ... Connector housing 154 ... Drive side connector 200 ... Detector 202 ... Stylus 204 ... Skid 206 ... Connector pin 300 ... Electrical component 302 ... Cable 304 ... Signal processing circuit 306 ... Measuring circuit 308 ... Digital display 310 ... Driving circuit 312 ... Control circuit 314 ... Power supply circuit 320 ... Power switch 322 ... Start switch 344 ... Parameter selection switch

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A 61-155701 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01B 7/34 102 G01B 21/30 102

Claims (3)

(57) [Claims] 1. A detector provided with a stylus for measuring surface texture,
A surface texture measuring instrument including a drive unit for advancing and retracting the detector along a measurement surface, wherein a plurality of columnar guides fixed to the frame of the drive unit in parallel with the advancing and retreating direction of the detector, and the columnar guides. slides over a substantially O have long detector moving direction
Is a shaped, comprising a sliding member in which at least one of the columnar guide at at least front and rear ends two positions is adapted to insert, and driving means for the movable unit, is moved forward and backward along said columnar guides, It is attached to the detector on the sliding member, not through the movable unit, the remaining columnar guide該滑moving parts
A surface texture measuring machine characterized by pressing down the material . Wherein Oite to claim 1, wherein the detector is detachable to said drive unit by a connector, the surface texture measuring, characterized by being connector of the driving unit side is fixed to the sliding member Machine. 3. The method of claim 1 or 2, wherein the wire connecting the drive unit and the detector, the surface texture measuring instrument that portion which is deformed by the movement of at least the detector is characterized in that it is a flexible printed circuit board .