JP3394091B2 - Displacement gauge - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a displacement meter, and more particularly, to a light emitting device and a semiconductor optical position detecting device (PSD;
Position Sensitive Detect
or a displacement meter provided with a sensor unit configured to measure a displacement amount of a surface to be measured by a triangulation method. 2. Description of the Related Art As shown in FIG. 4, a sensor section 11 comprising a light emitting element 12 and a semiconductor light position detecting element (PSD) 14 is shown.
The displacement meter that measures the displacement amount of the surface 16 to be measured by a triangulation method, irradiates a laser beam 13 from a semiconductor laser, which is the light emitting element 12, to the surface 16 to be measured of the measurement object 15, The scattered light is imaged as a light spot on the side of the semiconductor light position detecting element 14 by a light receiving lens,
By the position of the light spot at that time, for example, the displacement amount when the measurement surface 16 of the measurement object 15 having the reference position C moves from A to B can be measured as the amplitude D. Has become. [0003] Incidentally, the above-mentioned displacement meter is used to
Is irradiated with the laser light 13 on the surface 16 to be measured, and the scattered light is imaged as a light spot on the side of the semiconductor optical position detecting element 14. The amount of reflected light changes, which affects the measured value. [0004] For this reason, conventionally, for example, a white diffuse reflector is used as a standard measurement object before shipment of a product, and the measurement obtained at that time is a standard measurement value as shown by a solid line in FIG. After adjusting the output characteristics so as to be delivered to the user side. [0005] On the other hand, when the user uses a displacement meter, it is general that the actual measurement object 15 is different from the above standard measurement object in color, material, and the like. When the measurement is performed under the standard specifications, the output characteristics are shifted as shown by a broken line in FIG. 3. Therefore, it is necessary to correct the measured value obtained by the amount of the shift. [0006] In this case, the correction of the output characteristics is usually performed by adopting either a method performed by software or a method performed by hardware.
In particular, when the method using hardware is adopted, the correction is performed by incorporating a correction circuit capable of performing an external adjustment operation into the displacement meter. [0007] By the way, when the output characteristics are corrected under hardware, the user needs to operate the correction circuit incorporated in the displacement meter. Adjustments can be made. However, if the output characteristics are corrected by operating the correction circuit, the user cannot return to the output characteristics before shipping as the standard specification again, and It is necessary to make adjustments to restore the output characteristics to the standard specifications with the help of the above, and there is a disadvantage that the operation is complicated and lacks flexibility in operation. SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the prior art, and its structural features are a light emitting element and light emitted from the light emitting element. At least a sensor unit including a semiconductor light position detecting element that outputs a displacement state of the measured surface as a displacement signal based on the position of a light spot reflected and received by the measured surface of the measurement target. In a displacement meter that measures a displacement amount of the surface to be measured by a surveying method, a displacement signal detected by the sensor unit and sent to an output side is a measurement value corresponding to a standard output characteristic of a measurement target. A first correction circuit for performing a correction necessary for obtaining a target, and a correction required for obtaining a measurement value obtained by correcting a deviation of an output characteristic indicated on the side of the measured object with respect to a standard measured object. 2nd correction round An alternative switching between the road and the road is performed via a measurement value correction unit that is freely disposed, and the measurement value is output as a measurement value that has undergone necessary correction processing. For this reason, the displacement signal detected by the sensor section and sent to the output side is passed through one of the first correction circuit and the second correction circuit constituting the measurement value correction means. so,
Measured values corresponding to output characteristics adjusted at the time of shipment,
It is possible to selectively output a measured value after performing a correction process for correcting a deviation of the output characteristic of the measurement object measured by the user with respect to the standard measurement object. Therefore, the user can freely switch between the first correction circuit and the second correction circuit as desired, so that simple and flexible operability can be ensured. The displacement meter according to the present invention has a light emitting element 12 composed of a semiconductor laser and a laser beam 13 which is an irradiation light from the light emitting element 12, as is apparent from the description of FIG. And a semiconductor light position detecting element (PSD) 14 which outputs the state of displacement of the measured surface 16 as a displacement signal based on the position of a light spot that is reflected by the measured surface 16 of the measurement object 15 and received. It has at least a portion 11 and is formed so that the displacement of the surface 16 to be measured can be measured by triangulation.
In addition, it is provided with a measured value correcting means for correcting the measured value by the amount corresponding to the deviation of the output characteristic corresponding to the difference in the color or material of the measured object 15 to be measured. FIG. 1 is a block diagram showing an example of the configuration of the measured value correcting means provided in the displacement meter according to the present invention. In this case, the measured value correcting means 21 comprises a first correction circuit 22 and a second correction circuit. 23, and a switch 24 for selectively switching between the first correction circuit 22 and the second correction circuit 23. The first correction circuit 22 performs a correction necessary to obtain a measured value corresponding to an output characteristic indicated by a standard measuring object, and is adjusted in advance at the time of shipment. It is arranged so that the user cannot freely adjust it. The second correction circuit 23 performs a correction necessary for obtaining a measured value obtained by correcting a deviation of the output characteristic of the measured object 15 which is actually measured with respect to a standard measured object. It is provided so that the user can freely perform adjustment operation from outside. FIG. 2 shows a specific example of the configuration of the measured value correcting means 21 shown in FIG. 1. An operational amplifier 25 is provided between the input side and the output side of the displacement signal. The output signal from the operational amplifier 25 is negatively fed back through the measured value correcting means 21 provided on the side of the negative feedback circuit 26. In this case, the measured value correcting means 21 is used.
The switch 24 includes a first correction circuit 22 composed of a variable resistor and a second correction circuit 23 also composed of a variable resistor connected at least in parallel, and a switch 24 disposed on the input side of the negative feedback circuit 26. To the first contact t ₁ or the second contact t ₂
The first correction circuit 22 and the second correction circuit 23 can be selectively switched by connecting the circuit to any one of the above and closing the circuit. The variable resistor itself forming the first correction circuit 22 cannot be operated by the user. Since the present invention is configured as described above, the displacement signal detected by the sensor section 11 and sent to the output side is supplied to the negative feedback circuit 26 of the operational amplifier 25 in parallel with the negative feedback circuit 26. Negative feedback is performed via the measurement value correction unit 21 including the first correction circuit 22 and the second correction circuit 23. Further, the measured value correcting means 21 connects the switch 24 to either the first contact point t or the second contact point t ₂ , so that the first correction circuit 22 and the second correction circuit 23 Can be switched alternatively, so that the output signal from the operational amplifier 25 can be fed back negatively through either the first correction circuit 22 or the second correction circuit 23. For this reason, when the user wants to obtain a measured value based on the output characteristic adjusted at the time of shipment, the switch 24 is connected to the first contact point t ₁ to close the first correction circuit 22. By doing so, it is possible to take immediate action. When the user intends to actually measure a measurement object 15 different from the standard measurement object, the switch 24 is connected to the second point t ₂ and the second correction circuit 23 is connected. By closing, it is possible to switch from the first correction circuit 22 immediately. Further, since the second correction circuit 23 is formed so that the user can freely perform an adjustment operation from the outside, such as a variable resistor, the object to be measured is measured. 15 can be individually adjusted in accordance with the output characteristics shown in FIG. 15, so that a correction process for correcting a deviation of the output characteristics caused by a relationship with a standard measurement object is performed, and then output as a measured value. Can be. Therefore, the user can freely switch between the first correction circuit and the second correction circuit as needed, thereby operating the displacement meter easily and flexibly to meet the needs of the site and performing the measurement work. Can be carried out. As described above, according to the present invention, the first correction circuit and the second correction circuit constituting the measurement value correction means for converting the displacement signal detected by the sensor section and sent to the output side. The measured value corresponding to the standard output characteristic adjusted at the time of shipment by passing through one of the correction circuit and the output characteristic indicated by the measurement object measured by the user with respect to the standard measurement object Can be selectively output with the measured value after the correction processing for correcting the deviation. Therefore, the user can freely switch between the first correction circuit and the second correction circuit as desired, so that simple and flexible operability can be ensured.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a configuration example of a measurement value correcting unit provided in a displacement meter according to the present invention. FIG. 2 is a circuit diagram showing a specific configuration example of a measurement value correction unit provided in the displacement meter according to the present invention. FIG. 3 is an explanatory diagram illustrating an example of output characteristics when a displacement meter according to the present invention is used for a standard measurement object and other measurement objects. FIG. 4 is an explanatory diagram showing a measurement state performed using a displacement meter on a surface to be measured of a measurement object. DESCRIPTION OF SYMBOLS 11 Sensor section 12 Light emitting element 13 Laser light 14 Semiconductor light position detecting element (PSD) 15 Measurement object 16 Measurement surface 17 Measurement waveform 21 Measurement value correction means 22 First correction circuit 23 Second correction circuit 24 switch 25 operational amplifier 26 negative feedback circuit t ₁ first contact t ₂ second contact

Claims (1)

(1) A light-emitting element and a light-receiving element that reflects irradiation light from the light-emitting element on a surface to be measured of an object to be measured and receives the light from the light-emitting element. A displacement meter for measuring the displacement of the surface to be measured by a triangulation method at least having a sensor unit comprising a semiconductor optical position detecting element for outputting a displacement state as a displacement signal. The displacement signal sent to the side is a first correction circuit for performing a correction necessary to obtain a measurement value corresponding to the output characteristic indicated by the standard measurement object, and is actually measured for the standard measurement object. A second correction is performed to obtain a measured value in which the deviation of the output characteristic indicated by the object to be measured is corrected.
A displacement meter characterized in that an alternative switching with a correction circuit is passed through measurement value correction means which is freely disposed, and is output as a measurement value subjected to necessary correction processing.